JP6110176B2 - Packaging material for substrate storage container - Google Patents

Description

  The present invention relates to a package of a substrate storage container for storing semiconductor wafers, and more particularly to a package of a substrate storage container used for packaging or transporting a substrate storage container having a total weight of 8 kgf or more that is difficult for human handling. Is.

  Conventionally, when packing and transporting a substrate storage container for storing a semiconductor wafer of φ300 mm, although not shown, a reinforcing material, a cushioning material, and an elastic material are manually laid and stacked in a packaging box made of cardboard or the like. Then, the substrate storage container packaged on the elastic material is manually mounted upward, and after the buffer material and the reinforcing material are manually stacked on the front surface of the substrate storage container, the packaging box is opened. The upper flap is closed and transported (see Patent Documents 1 and 2).

  The substrate storage container is a front open box type in which a lid is fitted to the open front of the container main body for aligning and storing a plurality of semiconductor wafers, and a flange to be gripped by the transfer device is attached to the ceiling of the container main body. The transport rails are detachably mounted on both side walls of the container body. When such a substrate storage container is packed and shipped, it is packaged and sealed with an opaque aluminum laminate bag.

  By the way, although a φ450 mm type semiconductor wafer has been studied as a next generation type, the substrate storage container for storing this φ450 mm semiconductor wafer is larger than the 300 mm type substrate storage container and the weight is increased (about 25 kg). As a result, the handling and packing by hand is not a problem, and it also violates industry regulations regarding handling mass.

  Therefore, with respect to the 450 mm type substrate storage container, handling and packaging using a robot arm or the like have been studied in order to improve the safety and efficiency of work and meet the industry regulations.

JP 2007-137454 A JP 2011-16549 A

  However, since the conventional packaging box is a vertical opening type in which the opened upper portion is simply opened and closed by a plurality of flaps, there is a possibility that the upper flap may prevent the robot arm from approaching. In addition, the substrate storage container packaged with the aluminum laminate bag does not have a grippable portion and is difficult to take out, so that it is expected to hinder mechanization. Also, when packaging the substrate storage container, the aluminum laminated bag becomes unstable and unstable, and makes it difficult to grasp the flange and rail of the substrate storage container from the outside. Handling becomes very difficult, and handling may cause breakage or tearing.

  Furthermore, although the conventional reinforcing material, cushioning material, and elastic material are excellent in absorbing shock and vibration, when used for packing a heavy and large substrate storage container having a total weight of 8 kgf or more, the strength is insufficient. The semiconductor wafer may be damaged.

  The present invention has been made in view of the above, and hardly interferes with the approach of a robot or the like, can automatically transport a substrate storage container having a total weight of 8 kgf or more, ensures the strength required for packaging, and An object of the present invention is to provide a package for a substrate storage container that can prevent breakage or tearing of the package.

In order to solve the above-described problems, the present invention covers an individual pallet for a packaging body that wraps a substrate storage container having a total weight of 8 kgf or more, a bottom pallet on which the individual pallet can be mounted, a packaging body, and an individual pallet. A hollow covering protector , wherein the individual pallet and at least a part of the covering protector are each formed of a resin-containing molding material or foamed material, and a conveyance insertion port is provided on at least the peripheral surface of the bottom pallet. There,
A bottom cover member is mounted on the bottom pallet, and the bottom cover member is formed from a cover plate mounted on the bottom pallet and a wall supported in an undulating manner on at least a part of the peripheral edge of the cover plate,
A positioning member is mounted on the bottom cover member, and the positioning member is formed from a laminated plate that overlaps the bottom cover member, and a positioning protrusion that is provided on the laminated plate and positions the individual pallet at least in the XY direction.
The upper part of the covering protector is opened, and the opened upper part of the covering protector is covered with a detachable lid member ,
The rear surface and the peripheral surface of the individual pallet are notched so as to be fitted to the positioning protrusions of the positioning member via gaps, and a part of the notches are used as a plurality of access ports.
The wall of the bottom cover member is formed to have a height that can conceal at least most of the access port of the individual pallet .

Note that a plurality of individual pallets can be provided, and at least the positioning member among the covering protector, the bottom cover member, and the positioning member can be divided according to the number of the individual pallets.

The covering protector surrounds the periphery of the package and the individual pallet and is detachably supported on any of the peripheral part of the bottom pallet and the bottom cover member, the peripheral part of the bottom pallet, and the peripheral part of the bottom cover member. And a lid member that is detachably attached to an open top of the cylinder member.
In addition, a plurality of support columns, each of which is provided upright at the four corners of the surface of the bottom pallet, and a plurality of wall plates that are detachably fitted between the plurality of support columns and surround the package and the individual pallet. And a lid member that detachably covers the upper part of the opening defined by the plurality of wall plates.

Here, the substrate storage container according to the claims can be composed of a container body that can store a plurality of semiconductor wafers arranged in the vertical direction and a lid that opens and closes the front surface of the container body. . The semiconductor wafer is mainly a φ450 mm type, but if the total weight of the substrate storage container is 8 kgf or more, it may be a φ300 mm type or a φ450 mm or more type. The package can be formed by packaging the substrate storage container with various packaging materials such as opaque packaging bags. The access port can be provided on at least the peripheral surface of the back surface and the peripheral surface of the individual pallet.

  An alignment member for aligning the bottom cover member can be provided on at least one of the center portion, the peripheral edge portion, and the corner portion of the bottom pallet surface. The covering protector can be supported by the bottom pallet and the bottom cover member, the bottom pallet, or the bottom cover member. In the case where the covering protector includes a plurality of support columns, each support column can be formed in a substantially plane L shape, and a fitting groove that can be fitted to the wall plate can be formed on both sides of the support column. In addition, the positioning protrusions of the positioning member are not particularly limited to a plurality, and can be formed by, for example, pins or blocks. Further, the positioning protrusion can be appropriately configured to have a substantially planar H shape, L shape, substantially II shape, substantially III shape, or the like.

  According to the present invention, since a conventional flap or the like does not exist in the covering protector, there is little possibility that the flap or the like hinders the approach of the robot. Further, the package is not handled as it is, but is mounted on an individual pallet with excellent transportability and handled individually, so that it can be easily handled by a robot. In addition, since the individual pallet and at least a part of the covering protector are made of a material that is more rigid than conventional cardboard, even if it is used for packing a substrate storage container having a total weight of 8 kgf or more, the strength is insufficient. Less likely to deform.

According to the present invention, it is possible to automatically transport a heavy substrate storage container having a total weight of 8 kgf or more with less obstruction of the robot. Moreover, the strength required for packaging the substrate storage container can be ensured, and breakage or tearing of the packaging material forming the package can be prevented.
Moreover, the impact which acts on the substrate storage container of a package can be relieved by the bottom part cover member located between a bottom part pallet and a positioning member. In addition, since the notch of the individual pallet and the positioning protrusion of the positioning member are not fitted deeply but through a gap, even if the individual pallet is positioned at least in the XY direction, it can be It is less likely to interfere with access. In addition, since a part of the notch of the individual pallet becomes a plurality of access ports as access means, it is not necessary to newly provide an access port separately from the notch.
Moreover, it becomes possible to suppress the penetration | invasion of the dust from the exterior with respect to the access port of an individual pallet with the wall of a bottom part cover member. Furthermore, if the wall on which the bottom cover member stands is tilted, the access port of the individual pallet can be completely exposed, so that the vertical stroke of the robot can be increased, and an improvement in handling operation can be expected.

According to the second aspect of the present invention, if a bottom pallet on which a plurality of individual pallets are mounted is utilized, a plurality of packaging bodies can be transported together at one time, so that the transport efficiency can be improved. .

According to the third aspect of the present invention, since the covering protector is constituted by the separate cylindrical member and the lid member, the structure of the covering protector can be simplified. Further, if the cylindrical member surrounding the package is pulled up, the access port opened in the individual pallet can be quickly accessed, so that improvement in workability can be expected.
According to the fourth aspect of the present invention, the individual pallet on which the package is mounted is provided by removing at least the front wall plate from among the plurality of wall plates forming the covering protector and exposing the access port of the individual pallet. Can be easily taken out by the robot.

It is an exploded perspective view showing typically an embodiment of a packing object of a substrate storage container concerning the present invention. It is a disassembled perspective view which shows typically the package, the individual pallet, the bottom pallet, the bottom cover member, and the positioning member in the embodiment of the package of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically a package, an individual pallet, a bottom pallet, a bottom cover member, and a positioning member in an embodiment of a package of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the package body, separate pallet, bottom part pallet, and positioning member in embodiment of the package body of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically a package, an individual pallet, a bottom pallet, a covering protector, a bottom cover member, and a positioning member in an embodiment of a package of a substrate storage container concerning the present invention. It is a disassembled perspective view which shows typically 2nd Embodiment of the package body of the substrate storage container which concerns on this invention. It is a disassembled perspective view which shows typically 3rd Embodiment of the package body of the substrate storage container which concerns on this invention. It is a disassembled perspective view which shows typically 4th Embodiment of the package body of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the partition board in a 4th embodiment of the packing object of the substrate storage container concerning the present invention. It is side explanatory drawing which shows typically 4th Embodiment of the package body of the substrate storage container which concerns on this invention. It is a disassembled perspective view which shows typically 5th Embodiment of the package body of the substrate storage container which concerns on this invention. It is principal part cross-section explanatory drawing which shows typically the support | pillar and wall board, and bottom part cover member of a covering protection body in 5th Embodiment of the package body of the substrate storage container which concerns on this invention.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A package body of a substrate storage container in the present embodiment is a package body in which a large and heavy substrate storage container is packaged as shown in FIGS. 1 individual pallet 2, a bottom pallet 10 on which the individual pallet 2 on which the packaging body 1 is mounted, a cushioning member 20 stacked on the packaging body 1, and a hollow covering the packaging body 1 and the individual pallet 2 The bottom cover member 30 that supports the cover protector 21 is mounted on the bottom pallet 10, and the individual pallet 2 is positioned on the bottom cover member 30 by the positioning protrusions 42. The positioning member 40 is mounted.

  Although not shown, the substrate storage container is a front open box container body that arranges and stores a plurality of semiconductor wafers of φ450 mm in the vertical direction, a lid body that is detachably fitted to the open front of the container body, And a locking mechanism that locks the lid fitted to the front surface of the container body, and has a total weight of 8 kgf or more.

  The container body has a pair of left and right support pieces that horizontally support the semiconductor wafer on the inner surfaces of both side walls thereof, and a flange that is gripped from above by the transfer device is attached to the center of the ceiling, etc. Removable transport rails extending in the front-rear direction are selectively mounted on the lower outer surface of both side walls. Further, the lid body is formed, for example, in a hollow frontal substantially rectangular shape and incorporates a locking mechanism, and is directed upward when the packaging body 1 is mounted on the individual pallet 2. Such a substrate storage container has a total weight of about 25 kg when 25 semiconductor wafers are aligned and stored in the container body.

  The packaging body 1 is formed in a two-layer structure including, for example, a plastic bag for packaging a substrate storage container and an opaque aluminum laminated bag for sealing and packaging the plastic bag from the outside ( (Shown in a rectangular parallelepiped). The aluminum laminated bag is colored, for example, in silver to improve design and barrier properties.

  Such a package 1 makes it impossible to visually grasp the flange and the transport rail of the substrate storage container from the outside. Therefore, when the package 1 is not mounted on the individual pallet 2, mechanical handling by the robot arm is not possible. Have difficulty. However, when mounted on the individual pallet 2, the use of the individual pallet 2 facilitates mechanical handling by the robot arm.

  As shown in FIGS. 1 to 5, the individual pallet 2 is molded into a substantially rectangular plane having an area on which the packaging body 1 can be mounted by using a molding material or a foam material containing resin, and at the four corners of the peripheral surface. R processing which prevents damage and improves durability is performed as needed. When the individual pallet 2 is molded from a resin-containing molding material, examples of the molding material resin include inexpensive thermoplastic resins such as polyethylene and polystyrene from the viewpoint of mass production while ensuring rigidity. In the molding material, various fillers such as a reinforcing filler are blended as necessary. In the case of molding with a foam material, examples of the foam material include a material obtained by foaming a thermoplastic resin such as polyolefin, polyurethane, polyethylene, and polystyrene having excellent buffering ability.

  The surface of the individual pallet 2 is basically formed flat, but if necessary, surrounding ribs 3 surrounding the package 1 are formed at the peripheral edge, or most of the area excluding the peripheral edge is formed. A dent is formed and fitted into the lower portion of the package 1 to stabilize the posture of the package 1. Further, an elastic buffer layer made of weakly adhesive elastomer or rubber having a vibration absorbing function is selectively adhered to the surface of the individual pallet 2.

  On the back surface of the individual pallet 2 and the front and rear surfaces of the peripheral surface, access means that enables access from the outside by a fork of the robot arm, specifically, a pair of right and left access ports 4 are cut out at a predetermined interval. Each access port 4 extends in the front-rear direction. The back surface of the individual pallet 2 and the front and rear surfaces of the peripheral surface are cut into a substantially plane H shape so as to be loosely fitted to the positioning projection 42 of the positioning member 40 via a gap. , Specifically a pair of left and right long straight portions are used as a pair of access ports 4 extending in the front-rear direction.

  Each access port 4 is sectioned in a horizontally long, generally inverted U shape, and is formed at a height at which the fork of the robot arm can move up and down to some extent. Such an access port 4 is directed in the front-rear direction of the bottom pallet 10 when the packaging body 1 is packed, and when the covering protector 21 is removed from the bottom pallet 10, it is exposed and can be accessed from the outside. To do.

  As shown in FIGS. 1 to 5, the bottom pallet 10 is formed in a substantially rectangular plate material having an area on which the individual pallet 2, the covering protector 21, and the bottom cover member 30 can be mounted. The bottom pallet 10 is made of a predetermined material (for example, wood, steel, synthetic resin, etc.). A pair of left and right transport insertion ports 11 that can be accessed by a forklift from the outside are perforated side by side at predetermined intervals on at least the front and rear surfaces of the peripheral surface of the bottom pallet 10. 11 is partitioned into a horizontally long frontal rectangular shape extending in the front-rear direction.

  The surface of the bottom pallet 10 is basically formed flat without unevenness. However, in order to reliably prevent displacement, rattling, and dropout of the covering protector 21 and the bottom cover member 30, it is fitted to at least a part of the peripheral edge of the surface of the bottom pallet 10, for example, the back and one side of the peripheral edge. The wall 12 can be protrudingly formed.

  As shown in FIGS. 1, 3, 4, and 5, the buffer member 20 is formed into a flat rectangular plate or a substantially dish-shaped cross section with a predetermined material, for example, and is in close contact with the upper part of the package 1, Mitigates the impact on the substrate storage container. As the material of the buffer member 20, various foam materials having a large expansion ratio are preferable in order to obtain sufficient strength. However, the present invention is not limited to this, and a molding material, foam material, cardboard or the like similar to the individual pallet 2 may be used.

  As shown in FIGS. 1, 4, and 5, the covering protector 21 surrounds the front and rear, left, and right peripheries of the packaging body 1 and the individual pallet 2, and the inner peripheral edge (inside the peripheral edge) of the bottom cover member 30. A rectangular tube member 22 that is detachably supported by the frame member 22, and a lid member 24 that is mounted on the upper portion 23 of the rectangular tube member 22. The square tube member 22 and the lid member 24 are formed of the same molding material or foam material as that of the individual pallet 2. The rectangular tube member 22 is formed in a hollow rectangular tube shape whose upper and lower portions are opened, and a lid member 24 that covers the buffer member 20 from above is detachably fitted to the opened upper portion 23. The lid member 24 is formed in a cross-sectional dish shape or a flat plate or the like.

  As shown in FIGS. 1, 2, and 5, the bottom cover member 30 is integrally formed on a substantially rectangular flat cover plate 31 that is detachably mounted on the surface of the bottom pallet 10, and a peripheral portion of the cover plate 31. Thus, it is formed in a substantially dish-shaped cross section having a wall 32 for positioning the peripheral edge portion of the positioning member 40, and the impact acting on the substrate storage container is mitigated.

  The wall 32 of the bottom cover member 30 includes a front wall 33 formed in front of the peripheral edge of the cover plate 31, a back wall 34 formed in the rear of the peripheral edge of the cover plate 31 and facing the front wall 33, and the cover plate 31. It is formed in a plane frame shape provided with a pair of left and right side walls 35 respectively formed on both sides of the peripheral edge of the. The wall 32 is formed at a height that exposes the pair of access ports 4 of the individual pallet 2 when the individual pallet 2 is positioned by the positioning member 40.

  As shown in FIGS. 1 and 2, the positioning member 40 includes a planar rectangular plate 41 that detachably overlaps the surface of the cover plate 31 of the bottom cover member 30, and an individual pallet provided on the surface of the laminated plate 41. 2 and positioning protrusions 42 for positioning in the XY direction, and at least exhibits a positioning function of the positioning function and the buffer function. The same material as that of the bottom cover member 30 corresponds to the material of the positioning member 40.

  The positioning protrusion 42 of the positioning member 40 is partitioned into a substantially plane H shape so as to correspond to the notch 5 on the back surface of the individual pallet 2, and has a low height that is not more than half of the height (depth) of the notch 5 of the individual pallet 2. And is loosely fitted into the notch 5 through a gap. The pair of left and right long straight portions 43 of the positioning projection 42 are loosely fitted into the access port 4 of the individual pallet 2 from below and face the upper surface of the access port 4 with a gap therebetween to insert the fork of the robot arm. The individual pallet 2 is positioned in the Y direction. On the other hand, the short connection part 44 which connects between the center of a pair of linear part 43 loosely fits into the notch 5 of the individual pallet 2 from below, and positions the individual pallet 2 in the X direction.

  In the above, when packing and transporting a heavy package 1 in which a φ450 mm type substrate storage container is packed, first, the individual pallet 2 and the bottom pallet 10 are prepared, and the bottom cover member 30 and the positioning member 40 are provided on the bottom pallet 10. And the pair of linear portions 43 of the positioning projection 42 are directed in the front-rear direction of the bottom pallet 10. Further, before and after this operation, the packaging body 1 is mounted on the individual pallet 2 by a robot arm, and the back wall side of the substrate storage container is brought into contact with the surface of the individual pallet 2 via the packaging body 1 to store the board. The container lid is directed upward to stabilize the posture of the package 1.

  When the posture of the package 1 is stabilized, the individual pallet 2 on which the package 1 is mounted is palletized by a robot arm. At this time, the robot arm inserts a fork into the pair of access ports 4 of the individual pallet 2 from the front and lifts up (see FIG. 2), conveys the individual pallet 2 onto the positioning member 40 of the bottom pallet 10 and positions it ( 3), and the front surface of the individual pallet 2 is aligned with the front surface of the bottom pallet 10, and the fork is retracted and pulled out from the pair of access ports 4 of the individual pallet 2, so that each access port 4 is exposed to be accessible from the outside. .

  Next, the cushioning member 20 is laminated and covered on the upper portion of the package 1 (see FIG. 4), and the periphery of the package 1 and the individual pallet 2 is covered with the rectangular tube member 22 of the covering protector 21. The lower end portion of the rectangular tube member 22 is supported between the outer side of the individual pallet 2 and the inner peripheral edge of the surface of the bottom cover member 30 (inner side of the peripheral portion). The lid member 24 that covers the member 20 from above is fitted (see FIG. 5), and then the bottom pallet 10 and the square tube member 22, and the square tube member 22 and the lid member 24 are respectively adhesive tape and magic tape (registered trademark). , The same shall apply hereinafter), various bands made of plastic or the like, or rugged friction fitting or the like, so that the package 1 can be packed.

At this time, after the rectangular tube member 22 of the covering protector 21 is fitted to the package 1 and the individual pallet 2, the lid member 24 may be fitted to the upper portion 23 of the rectangular tube member 22, but this is not limitative. Is not to be done. For example, after the lid member 24 is fitted to the buffer member 20 of the packaging body 1, the rectangular tube member 22 of the covering protector 21 is fitted to the packaging body 1, the individual pallet 2, and the lid member 24. The upper part 23 and the lid member 24 may be fixed.
Such a package can be handled and transported between factories by inserting and lifting the forks of the forklift into the pair of transport insertion ports 11 of the bottom pallet 10.

  Next, when unpacking the transported packaging body and taking out the packaging body 1, the lid member 24 is removed from the upper portion 23 of the rectangular tube member 22 of the covering protector 21, and the rectangular tube member 22 is pulled upward. If the pair of access ports 4 of the individual pallet 2 are exposed, the individual pallet 2 on which the package 1 is mounted can be taken out by the robot arm. At this time, the robot arm inserts and lifts the fork into the pair of access ports 4 of the individual pallet 2 from the front, conveys the individual pallet 2 from the bottom pallet 10, and after the conveyance, forks from the access ports 4 of the individual pallet 2. It will be pulled out.

  According to the above configuration, since there are no plurality of flaps or the like in the covering protector 21, it is possible to effectively eliminate the possibility that the flaps hinder the approach of the robot arm. In addition, the package 1 is not handled as it is, but individually using the individual pallet 2 that is excellent in transportability. For example, the flange of the substrate storage container can be visually grasped from the outside with the aluminum laminate bag of the package 1. Even without it, it can be easily handled by the robot arm. Further, it is possible to eliminate the possibility that the package 1 on the individual pallet 2 breaks or tears along with the handling of the individual pallet 2.

  In addition, since the covering protector 21 is divided into a separate rectangular tube member 22 and a lid member 24 and the rectangular tube member 22 having the upper and lower portions opened is surrounded by the package 1, the rectangular tube member 22. By pulling upward, the access port 4 of the individual pallet 2 can be quickly and easily accessed.

  In addition, among the individual pallet 2, the buffer member 20, the covering protector 21, and the bottom cover member 30, at least the individual pallet 2 and the covering protector 21 are formed of a material that is more rigid than conventional cardboard, and the strength is increased. Therefore, even if it is used for packing a heavy and large substrate storage container having a total weight of 8 kgf or more, it will not be deformed due to insufficient strength. Accordingly, it is possible to effectively prevent the substrate storage container and the semiconductor wafer from being damaged.

  Moreover, since the positioning protrusion 42 of the positioning member 40 is partitioned into a substantially plane H shape, the individual pallet 2 can be positioned with high accuracy in the XY direction without providing a plurality of positioning blocks. Furthermore, since the straight portion 43 of the positioning projection 42 is loosely fitted into each access port 4 of the individual pallet 2, even if the individual pallet 2 is positioned, there is no hindrance to the insertion of the fork of the robot arm. .

  Next, FIG. 6 shows a second embodiment of the present invention. In this case, a plurality of (in this embodiment, four) individual pallets 2 on which the packaging body 1 is mounted, a buffer member 20, and a covering The protector 21, the bottom cover member 30, and the positioning member 40 are divided according to the number of the plurality of individual pallets 2, and at least a plurality of the plurality of individual pallets 2 and the bottom cover member 30 are provided on the surface of the bottom pallet 10A. A plurality of alignment members 13 for aligning the bottom cover member 30 in the X and Y directions are arranged as necessary.

  The plurality of individual pallets 2, the buffer member 20, the covering protector 21, the bottom cover member 30, and the positioning member 40 are arranged in, for example, a 2 × 2 matrix. Further, the bottom pallet 10 </ b> A in the present embodiment is enlarged to a size that allows a plurality of bottom cover members 30 and positioning members 40 to be mounted side by side.

  The plurality of alignment members 13 are formed, for example, at the center of the surface of the bottom pallet 10A and contact the corners of the plurality of bottom cover members 30 and contact the corners of the plurality of bottom cover members 30, and the surface of the bottom pallet 10A. A plurality of substantially planar L-shaped corner ribs 15 formed at the four corners and in contact with the corners of the bottom cover member 30 are provided, and the central rib 14 and the plurality of corner ribs 15 are selected as necessary. Formed. When the central rib 14 and the plurality of corner ribs 15 are not necessary, the surface of the bottom pallet 10A is formed flat. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and if the covering protector 21 for any selected package 1 is removed from the plurality of packages 1, the selected package 1 Since the access port 4 of the individual pallet 2 can be accessed, it is obvious that the package 1 can be handled safely using the individual pallet 2. Moreover, since the bottom pallet 10A is enlarged and the number thereof is reduced, a reduction in the number of parts can be expected. Further, if the bottom pallet 10A is handled, four packaging bodies 1 can be transported at a time, so that a significant improvement in transport efficiency can be expected.

  Next, FIG. 7 shows a third embodiment of the present invention. In this case, the bottom pallet 10A is enlarged and formed in the same manner as the above embodiment, and the package 1 is mounted on the bottom pallet 10A. A plurality of pallets 2 (four in this embodiment) are mounted, and the buffer member 20 and the positioning member 40 are divided according to the number of the individual pallets 2.

  At the four corners of the surface of the bottom pallet 10A, among the plurality of individual pallets 2 and the bottom cover member 30A, a plurality of alignment members 13 for aligning at least the bottom cover member 30A in the XY direction, in other words, the corner ribs 15 Are arranged as necessary. In the present embodiment, the covering protector 21A includes one large rectangular tube member 22A that surrounds the periphery of the plurality of packaging bodies 1 and the individual pallets 2, and one attached to the open upper portion 23A of the rectangular tube member 22A. And a large lid member 24A.

  The bottom cover member 30 </ b> A in the present embodiment is enlarged and formed to a size that can mount a plurality of individual pallets 2 and positioning members 40. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as that of the above embodiment can be expected. Moreover, if the covering protector 21A is removed, the access ports 4 of the four individual pallets 2 can be easily accessed. It is clear that can be improved. Further, since the covering protector 21A and the bottom cover member 30A are enlarged and the number thereof is reduced, it is obvious that further reduction in the number of parts can be expected.

  Next, FIGS. 8 to 10 show a fourth embodiment of the present invention. In this case, the wall 32 of the large bottom cover member 30A can be concealed from the access ports 4 of the plurality of individual pallets 2. FIG. The front wall 33A forming the wall 32 can be raised and lowered, and the front wall 33A is opposed to the access ports 4 of the individual pallets 2 to prevent dust from entering the access ports 4 of the individual pallets 2. Like to do.

  Between the several package 1 in this embodiment, the plane substantially cross-shaped partition plate 50 which partitions the package 1 is interposed as needed. The front wall 33A of the wall 32 is supported in front of the peripheral edge of the cover plate 31 so as to be swingable in the front-rear direction (see the arrow in FIG. 10), and fixing tabs 36 are mounted on both sides. Examples of the tab 36 include an adhesive tape and an insertion piece.

  Unlike the front wall 33A, the back wall 34 and the pair of side walls 35 forming the wall 32 are fixed and integrally formed. The free wall of each side wall 35, that is, the front end, is provided on the side of the front wall 33A. Locking portions 37 that are detachably locked to the tabs 36 protruding from the portions are provided. The locking portion 37 corresponds to, for example, an adhesive tape that adheres to the tab 36 or a slot that is inserted into the tab 36.

  In the above, when unpacking the package and taking out the package 1, the cover member 24A is removed from the rectangular tube member 22A of the covering protector 21A, the rectangular tube member 22A is pulled upward and removed, and the bottom cover member 30A is removed. When the tab 36 and the locking portion 37 are unlocked and the front wall 33A of the bottom cover member 30A is erected in the front direction to expose the access ports 4 of the plurality of individual pallets 2, respectively, A plurality of individual pallets 2 can be sequentially taken out by the robot arm. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as that of the above embodiment can be expected. Moreover, if the front wall 33A of the bottom cover member 30A is tilted in the front direction, the access port 4 of the individual pallet 2 can be completely exposed. Accordingly, the stroke of the vertical movement of the robot arm can be increased, and a significant improvement in handling operation can be expected.

  Next, FIG. 11 and FIG. 12 show a fifth embodiment of the present invention. In this case, a plurality of support columns 25 each provided with a covering protector 21A are erected at the four corners of the surface of the bottom pallet 10A. A plurality of wall plates 27 that are detachably fitted between the plurality of support columns 25 and surround the front, rear, left, and right peripheries of the plurality of packaging bodies 1 and the individual pallets 2, and the openings defined by the plurality of wall plates 27. The upper part is formed from a lid member 24A that detachably covers the upper part.

  Between the plurality of packaging bodies 1 in the present embodiment, a plane substantially cross-shaped partition plate 50 is interposed as necessary. Further, the plurality of support columns 25 are bent and formed into an angle having a substantially L-shaped cross section by a molding material containing a resin such as polycarbonate or various metal materials, and a large bottom cover member 30A is mounted on the bottom pallet 10A. At this time, the cover plate 31 penetrates through the through holes 38 drilled in the four corners.

  Each support column 25 is screwed to the surface corner of the bottom pallet 10A via a fastener such as a bolt. A fitting groove 26 extending in the vertical direction is cut out on both end faces of the column 25, and the end of the wall plate 27 is detachably fitted into each fitting groove 26. Each fitting groove 26 is partially reduced in width as necessary to prevent the fitting wall plate 27 from falling off.

  Each wall plate 27 is formed in a horizontally long rectangle by a molding material containing resin or a foam material. The wall 32 of the bottom cover member 30A is adjusted to a height at which the access port 4 of the individual pallet 2 is exposed or a height at which the access port 4 can be concealed. The front wall 33A of the wall 32 is fixed or supported so as to be swingable in the front-rear direction as necessary.

  In the above, when packing and transporting the package 1, first, the individual pallet 2 and the bottom pallet 10A with the support column 25 are prepared, and the bottom cover member 30A and the positioning member 40 are sequentially mounted on the bottom pallet 10A. The linear portion 43 of the positioning projection 42 is directed in the front-rear direction of the bottom pallet 10A, the packaging body 1 is sequentially mounted on the plurality of individual pallets 2 by the robot arm, and the lid of the substrate storage container is directed upward. Stabilize 1 posture. At this time, the positioning member 40 is preferably used, but may be omitted if the positioning member 40 is less necessary, such as positioning the plurality of individual pallets 2 by the plurality of support columns 25.

  When the posture of the package 1 is stabilized, a plurality of individual pallets 2 on which the package 1 is mounted are sequentially palletized by a robot arm. At this time, the robot arm inserts and lifts a fork into the pair of access ports 4 of the individual pallet 2 from the front, conveys and positions the individual pallet 2 on the positioning member 40 of the bottom pallet 10A, and positions the bottom pallet 10A. The front face of the individual pallet 2 is aligned with the front face, and the fork is retracted from the pair of access ports 4 of the individual pallet 2 and pulled out.

  Next, the cushioning member 20 is covered on the top of each package 1, and the wall plates 27 are fitted between the plurality of support columns 25, respectively, and the plurality of wall plates 27 are surrounded by the plurality of packages 1 and the individual pallets 2. 24A, and the lid member 24A is fitted to the upper part of the opening defined by the plurality of wall plates 27. Thereafter, the plurality of wall plates 27 and the lid member 24A are respectively attached to various bands made of adhesive tape, magic tape, plastic, etc. Or if it fixes by uneven | corrugated friction fitting etc., it will become possible to pack the package 1. In such a package, a fork of a forklift is inserted into the pair of transport insertion ports 11 of the bottom pallet 10A and is lifted and transported between factories.

  On the other hand, when unpacking the transported packaging body and taking out the packaging body 1, the lid member 24 </ b> A is removed from the plurality of wall plates 27, and at least the front wall plate 27 among the plurality of wall plates 27. Is removed to expose the access ports 4 of the plurality of individual pallets 2, the plurality of individual pallets 2 can be sequentially taken out by the robot arm. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and if only the wall plate 27 on the front side is removed without removing all the wall plates 27 forming the covering protector 21A, the package body 1 can be taken out by a robot arm. Moreover, diversification of the configuration of the covering protector 21A can be achieved.

  In the above-described embodiment, the packaging bodies 1 are stacked in the upper and lower stages, but a plurality of packaging bodies 1 may be stacked in the covering protective bodies 21 and 21A. Further, a magnet or a magnetic material may be attached to the individual pallet 2 as an access means and accessed using a magnetic force. Further, by forming a pair of opposed portions facing each other on the back surface of the individual pallet 2 and making the pair of opposed portions contactable with the conveyor rail, the individual pallet 2 may be conveyed by a roller conveyor. good.

  Further, a plurality of casters that can appear and disappear on the back surface of the individual pallet 2 can be provided, and the plurality of casters can be used for convenience during transportation. In addition, the individual pallet 2 can be provided with a shelf portion that supports the package 1 by floating from the surface. In this case, a pair or two pairs of shelves can be provided or arranged so as to be scattered.

  Further, when the packaging body 1 is mounted on the individual pallet 2, a gap is formed between the surface of the individual pallet 2 and the packaging body 1, and this gap is used as a second access port to insert a robot arm. It is possible to handle. If it carries out like this, it can utilize for delivering the package 1 between clean rooms with different cleanliness, or delivering the package 1 between an external environment and a clean room environment.

  Specifically, only the package 1 can be carried into the clean room from the package that has been transported. In this case, since it is possible to prevent the individual pallet 2 that may be contaminated in the external environment from being brought into the clean room and maintain the clean environment as it is, prevention of contamination of the semiconductor wafer can be expected.

  In addition, in the area where the individual pallet 2 of the above-described embodiment contacts the fork of the robot arm and the access port 4, a replaceable reinforcing member made of a rigid reinforcing part made of polycarbonate or a protective sheet made of polystyrene or polyolefin is used. May be attached as necessary to improve durability. In the above embodiment, the ends of the pair of access ports 4 are exposed on the front and rear surfaces of the individual pallet 2, but the access ports 4 may be provided on the left and right surfaces of the peripheral surface of the individual pallet 2.

  The bottom pallet 10 · 10A and the bottom cover member 30 · 30A support the lower end of the covering protector 21. However, the bottom cover member 30 · 30A or the bottom pallet 10 · 10A supports the covering protector 21. Also good. Further, although the pair of access ports 4 are provided side by side on the individual pallet 2, it is possible to provide a single access port 4 that is horizontally long on the peripheral surface of the individual pallet 2. Moreover, although the conveyance insertion port 11 of the bottom pallets 10 and 10A is directed in the front-rear direction, it can be directed in the left-right direction.

  Also, as the bottom pallet 10.10A, it is possible to use existing two-way pallet, four-way pallet, scraped pallet, single-sided pallet, single-sided pallet, double-sided pallet, airfoil pallet, etc. is there. Further, the rectangular tube members 22 and 22A may be formed in a sleeve shape so that a part of the peripheral wall of the rectangular tube members 22 and 22A, for example, the front wall and the side wall can be opened and closed horizontally.

  Further, not only the front wall 33A of the bottom cover member 30A can be raised and lowered, but the front wall 33A and the rear wall 34 may be raised and lowered, respectively. Further, the positioning protrusion 42 of the positioning member 40 is omitted, and an X-direction positioning pin for positioning the individual pallet 2 in the X direction on the laminated plate 41 of the positioning member 40, and a Y-direction positioning pin for positioning the individual pallet 2 in the Y direction, May be provided.

  The package of the substrate storage container according to the present invention can be used in the semiconductor manufacturing field, distribution field, transportation field, and the like.

1 Package 2 Individual pallet 4 Access port (access means)
DESCRIPTION OF SYMBOLS 10 Bottom pallet 10A Bottom pallet 11 Conveying insertion port 20 Buffer member 21 Cover protector 21A Cover protector 22 Square tube member (tubular member)
22A Square tube member (tube member)
23 Upper part 23A Upper part 24 Lid member 24A Lid member 25 Column 27 Wall plate 30 Bottom cover member 30A Bottom cover member 31 Cover plate 32 Wall 33 Front wall 33A Front wall 34 Back wall 35 Side wall 40 Positioning member 41 Laminating plate 42 Positioning protrusion 43 Straight line

Claims (4)

It includes an individual pallet for packaging the total weight was wrapped over the substrate storage container 8 kgf, and the individual pallets can be mounted bottom pallet, a hollow covering member for covering the package and the individual pallets, individually A pallet and at least a part of the covering protector are each formed of a resin-containing molding material or foamed material, and a packaging body for a substrate storage container provided with a transport insertion port on at least the peripheral surface of the bottom pallet ,
A bottom cover member is mounted on the bottom pallet, and the bottom cover member is formed from a cover plate mounted on the bottom pallet and a wall supported in an undulating manner on at least a part of the peripheral edge of the cover plate,
A positioning member is mounted on the bottom cover member, and the positioning member is formed from a laminated plate that overlaps the bottom cover member, and a positioning protrusion that is provided on the laminated plate and positions the individual pallet at least in the XY direction.
The upper part of the covering protector is opened, and the opened upper part of the covering protector is covered with a detachable lid member ,
The rear surface and the peripheral surface of the individual pallet are notched so as to be fitted to the positioning protrusions of the positioning member via gaps, and a part of the notches are used as a plurality of access ports.
A packaging body for a substrate storage container, wherein the wall of the bottom cover member is formed to a height that can conceal at least most of the access port of the individual pallet . The package of a substrate storage container according to claim 1, wherein a plurality of individual pallets are provided, and at least the positioning member among the covering protector, the bottom cover member, and the positioning member is divided according to the number of the plurality of individual pallets. A cylinder that surrounds the periphery of the packaging body and the individual pallet, and is detachably supported by the peripheral part of the bottom pallet and the bottom cover member, the peripheral part of the bottom pallet, and the peripheral part of the bottom cover member. The packaging body for a substrate storage container according to claim 1 or 2 , wherein the packaging body is formed from a member and a lid member that is detachably attached to an upper portion of the cylindrical member. A plurality of struts provided upright at the four corners of the surface of the bottom pallet, and a plurality of wall plates that are detachably fitted between the plurality of struts and surround the package and the individual pallets; The package body for a substrate storage container according to claim 1 or 2 , wherein the packaging body is formed from a lid member that detachably covers an upper opening portion defined by the plurality of wall plates.

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