JP6525306B2 - Package - Google Patents

Description

  The present invention relates to a package.

  Conventionally, when packing and transporting a substrate storage container for storing a semiconductor wafer of φ 300 mm, for example, the packaged substrate storage container is transferred from a clean room (not shown) to a quasi clean room environment which is a packing work place by pallets etc. The reinforcing material, the buffer material, and the elastic material are manually laid and laminated in the packaging box, and the substrate storage container in the packaged state is manually mounted upward on the elastic material, and the substrate storage container is facing upward. The cushioning material and the reinforcing material are manually stacked and laminated on the front of the case, and then the open upper flap of the packaging box is closed and transported (see Patent Documents 1 and 2).

  The substrate storage container is of a front open box type in which a lid is fitted to the open front of a container body for aligning and storing a plurality of semiconductor wafers, and a flange gripped by a ceiling transport device is attached to the ceiling of the container body. The transport rails are detachably mounted on both side walls of the container body. Such a substrate storage container is packaged and sealed in an opaque aluminum laminated bag, and packaged and shipped in this state. Then, after being transported, it is taken out of the packaging box and carried into the clean room of the transport destination.

JP, 2013-23252, A Japanese Utility Model Publication No. 05-49658

Substrate containers used to transport next-generation 450 mm wafers are expected to have a significant increase in weight compared to existing 300 mm wafer transport containers, with a total weight of approximately 25 kg. For this reason, it is difficult for workers to load and unload pallets, and it is indispensable to automate using machines and devices. In the case of loading and unloading of lightweight objects, it is common to use a device that adsorbs the top surface of the exterior carton box, and it is easy to unpack the stored package by unpacking the top of the package. It is.
However, when the weight of the package increases, there is a problem that the handling can not be carried out safely or automatically unless the package is sufficiently considered in handling.

  Then, this invention is made in view of said subject, Comprising: It aims at providing the package which fully considered handling.

  In order to solve the above-mentioned subject, the present invention is a package which stores a substrate storage container, and it has a side wall in four sides and has a hollow storage box main body which has an opening at least in the upper part, and the storage A pair of shock absorbers disposed at a bottom and an upper portion in the box body, an upper lid provided at the opening and having a top plate portion corresponding to at least the opening, the storage box main body and the upper lid; And at least one upper connecting portion to be connected, the upper connecting portion corresponding to the fixing position of the upper lid main body side belt whose one end side is fixed to the side wall and the upper lid main body side belt An upper lid side belt having one end fixed to the upper lid, a main body side belt for the upper lid, and one other end side of the upper lid side belt. Engaging portion and body side bell for the upper lid And wherein provided on the other end side of the upper lid side belt consists of a engaged portion, to provide a package of the engaged portion and the engagement portion is disengageably.

(2) The storage box main body is a portion in which the package in which the substrate storage container is packaged is stored, and the buffer body is disposed to be in contact with the bottom and the top of the package (1 Provide the package described in 2.).
(3) The inner side wall of a pair of the said storage box main bodies which will oppose the pair of side surfaces which the said storage box main body accommodates the package which packaged the board | substrate storage container and which opposes the said package. The package according to (1) or (2), which is separated by 50 mm or more from the side surface of the package and is provided with an accessible gap to the package.

(4) The upper lid includes an overlap portion extending from the top plate and overlapping the outside of the side wall, and the upper lid side belt is relative to the fixed position of the upper lid body side belt The package according to any one of (1) to (3), wherein the one end side is fixed at the position of the overlapping portion.
(5) The package as described in (4) is provided with the temporary fixing means provided in the surface where the said overlap part and the said side wall oppose.
(6) The package according to any one of (1) to (5), wherein a total load capacity of the upper connection portion is 30 kgf or more.
(7) In the upper lid, one ridgeline of the top plate portion is integrally connected to one ridgeline of the side wall, and the upper lid is integrally provided with the storage box main body; any one of (1) to (6) Provide the package described in 1.
(8) The top plate portion has a flat outer surface of the top plate portion, and when transporting the package, the top plate portion has rigidity such that the flat surface can be sucked and lifted and transported. 7) The package according to any one of 7) is provided.

(9) Moreover, the outer surface of the said top-plate part provides the package as described in (8) provided with one or more marks which show the contact position of the adsorption | suction pad which adsorb | sucks the said plane.
(10) The package according to (9), wherein the size of the mark is approximately equal to the size at the time of contact of the suction pad for suctioning the flat surface or larger than the size at the time of contact of the suction pad.
(11) The mark provides the package described in (9) or (10) which is disposed at at least four corners of the top plate.
(12) The package according to any one of (9) to (11), wherein the mark is disposed at a position different from the contact position of the suction pad that sucks the flat surface.

(13) The present invention further comprises a bottom cover having an opening provided at the bottom of the storage box body, a bottom plate corresponding to the opening provided at the bottom, the storage box body, and the bottom cover. At least one or more bottom connection parts to be connected, wherein the bottom connection parts correspond to the bottom lid body side belt whose one end is fixed to the side wall and the fixing position of the bottom lid body side belt A bottom lid side belt having one end fixed to the bottom lid, and a bottom side lid main body belt and the bottom lid side belt provided on one other end side of the bottom lid side belt; An engaging portion and an engaged portion provided on the other end of the bottom lid body side belt and the other end side of the bottom lid side belt, wherein the engaging portion and the engaged portion can be engaged or disengaged The packing according to any one of (1) to (12) To provide the body.

  ADVANTAGE OF THE INVENTION According to this invention, the package which fully considered handling is provided.

It is an exploded perspective view showing the packing object of a 1st embodiment of the present invention. It is a side view of the package of FIG. (A) is a front view showing the fixed state of the fixing band of the first embodiment of the present invention, (b) is a front view showing the unlocked state of the fixing band of the first embodiment of the present invention . It is sectional drawing of the package of FIG. It is a perspective view showing the substrate storage container which the packing body of a 1st embodiment of the present invention stores. It is a perspective view showing the package and buffer object of a substrate storage container of a 1st embodiment of the present invention. It is a perspective view showing the handling state of the package of 1st Embodiment of this invention. It is an exploded perspective view showing the packing object of a 2nd embodiment of the present invention. It is a perspective view showing the package of 3rd Embodiment of this invention. It is a perspective view showing the handling state of the package of 3rd Embodiment of this invention. It is a perspective view showing the package of 3rd Embodiment of this invention. It is a perspective view showing the package of 3rd Embodiment of this invention.

  Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the drawings. The same components are denoted by the same reference numerals throughout the description of the embodiment.

  FIG. 1 is an exploded perspective view showing a package according to a first embodiment of the present invention. FIG. 2 is a side view of the package of FIG. Fig.3 (a) is a front view showing the fixation state by the top connection part and the bottom connection part of 1st Embodiment of this invention, FIG.3 (b) is the top connection part and bottom connection part of 1st Embodiment of this invention. Is a front view showing the unlocked state. FIG. 4 is a cross-sectional view of the package of FIG.

  As shown in FIG. 1, FIG. 2 and FIG. 4, the package 30 of the first embodiment is for storing the substrate storage container 1, and comprises a storage box main body 3, a pair of upper buffer 4a, and a bottom buffer. It has a body 4b, an upper lid 8, a lower lid 9, an upper connecting portion 11, and a lower connecting portion 12.

  FIG. 5: is a perspective view showing the board | substrate storage container which the package of 1st Embodiment of this invention accommodates. The substrate storage container 1 is a box as shown in FIG. 5 and has a container main body 1a having an opening on the front surface for storing a wafer with an outer diameter of 450 mm and a door 1b for closing the opening of the container main body 1a. Since the total weight when storing 25 wafers is about 25 kg, it is difficult for workers to handle them by hand manually, and there is also a risk that it will hurt the body if forced to do so.

  Returning to FIG. 1, FIG. 2 and FIG. 4, the storage box main body 3 is formed in a hollow shape like a sleeve, has side walls 5 on all sides, and accommodates the package 2 in which the substrate storage container 1 is packaged. It is a part. The package 2 is made of, for example, an aluminum laminated bag, and after the substrate storage container 1 is stored in the aluminum laminated bag, the opening of the aluminum laminated bag is sealed. The aluminum laminated bag can use the film of the multilayer structure which laminated resin films, such as polyethylene, a polypropylene, a polyethylene terephthalate, a polystyrene-type resin, and the resin film which affixed aluminum foil, for example.

  The storage box main body 3 has an upper opening 6 and a lower opening 7 in the vertical direction, and the upper cover 8 and the lower cover 9 are attached to the upper opening 6 and the lower opening 7, respectively. There is. The pair of upper shock absorbers 4 a and the lower shock absorber 4 b are disposed at the bottom and the top in the storage box body 3. The top buffer 4 a and the bottom buffer 4 b are arranged to be in contact with the bottom and top of the package 2.

  At the opening of the storage box main body 3, an upper lid 8 having a top plate portion 8a corresponding to the opening is provided. The upper lid 8 includes an overlap portion 8 b extending from the top plate portion 8 a and overlapping the outer side of the side wall 5. The upper lid 8 is integrally formed with the storage box main body 3 by connecting one ridge of the top plate 8 a integrally with one ridge of the side wall 5.

  In the top plate portion 8a, the outer surface of the top plate portion 8a is flat, and when the package 30 is transported, an adsorption type handler as a transport device adsorbs a flat surface and lifts the surface so that the transportable rigidity can be achieved. Have. An upper connecting portion 11 connecting the storage box body 3 and the upper lid 8 and a bottom connecting portion 12 connecting the storage box body 3 and the bottom lid 9 are provided. The upper connecting portion 11 and the lower connecting portion 12 are made of, for example, ones that can be attached and removed with one touch.

  As shown in FIG. 3, the upper connecting portion 11 includes an upper lid side belt 11a, an upper lid main body side belt 11b, an engaging portion 11c, and an engaged portion 11d. The total load capacity of the upper connecting portion 11 is 30 kgf or more. One end side of the upper lid main body side belt 11b is fixed to the side wall 5 by a pin or the like. The upper lid side belt 11a is provided at the position of the upper lid 8 corresponding to the fixing position of the upper lid body side belt 11b, and one end side of the upper lid side belt 11a is fixed to the upper lid 8 ing. One end side of the upper lid side belt 11a is fixed at the position of the overlapping portion 8b opposite to the fixing position of the upper lid main body side belt 11b.

  On the other end side of the band portion 13 of the upper lid side belt 11a, a projecting engaging portion 11c is disposed. A groove-shaped engaged portion 11 d is provided on the other end side of the band portion 13 of the upper lid main body side belt 11 b. By inserting the engaging portion 11c into the engaged portion 11d, both are engaged with each other, and the upper lid side belt 11a and the upper lid main body side belt 11b can be integrated. Further, a part of the engaging part 11c is made to be an accessible part 11e exposed from the through hole provided in the engaged part 11d when it is fitted, and the part is deformed inward, thereby engaging with one touch. The engagement portion 11c and the engaged portion 11d can be engaged and disengaged, and the engagement can be unlocked.

  The bottom lid 9 has a bottom plate 9a corresponding to the opening provided at the bottom. The bottom lid 9 includes an overlapping portion 9 b extending from the bottom plate portion 9 a and overlapping the outside of the side wall 5. In the bottom lid 9, one ridge line of the bottom plate portion 9 a is integrally connected to one ridge line of the side wall 5, and is integrally formed with the storage box main body 3.

  The bottom connection portion 12 connects the storage box main body 3 and the bottom cover 9. The bottom connecting portion 12 includes a bottom lid side belt 12a, a bottom lid main body side belt 12b, an engaging portion 12c, and an engaged portion 12d. The bottom lid body side belt 12b is fixed to the side wall 5 at one end by a pin or the like. The bottom lid side belt 12a is provided at the position of the bottom lid 9 corresponding to the fixed position of the bottom lid main body side belt 12b, and one end side of the bottom lid side belt 12a is fixed to the bottom lid 9 There is.

  An engagement portion 12c is disposed on the other end side of the band portion 13 of the bottom lid side belt 12a. An engaged portion 12 d is disposed on the other end side of the band portion 13 of the bottom lid body side belt 12 b. The engaging portion 12c and the engaged portion 12d can be engaged and disengaged by operating the accessible portion 12e.

  A temporary fixing portion (temporary fixing means) 14 which can be temporarily fixed is provided on the overlapping portions 8b and 9b of the upper lid 8 and the lower lid 9 and the side wall 5, respectively. As a result, since the overlap portions 8 b and 9 b and the side wall 5 are auxiliaryly joined with a weak force, generation and penetration of contaminants due to side flaps can be prevented. In addition, since the side portions can be opened outward by temporarily fixing, the workability at the time of packing and unpacking can be improved. The temporary fixing portion 14 may be, for example, Velcro (registered trademark), an adhesive layer made of rubber, a thermoplastic elastomer, or the like, or may use magnetic force.

  FIG. 6 is a perspective view showing a package and a buffer of the substrate storage container of the first embodiment of the present invention. As shown in FIGS. 4 and 6, the package 2 of the substrate storage container 1 is in the recess of the bottom buffer 4b in a state where the door 1b is directed upward (the wafer is vertical). The back side is held in contact.

  The bottom buffer 4 b has a support 15 and a lift claw insertion part 16 formed between the support 15 on the bottom side, and a recess 17 engageable with the rear surface of the substrate storage container on the upper surface. It is formed. The upper buffer 4a is formed with a recess 18 engageable with the front face to which the door of the substrate storage container is attached. Thus, the package 2 is sandwiched and protected in the storage box by the pair of upper buffer 4a and the lower buffer 4b arranged above and below, so that vibration and impact during transportation are mitigated. The substrate storage container 1 can be safely transported. The upper buffer 4a and the bottom buffer 4b can be formed from a molded sheet of a polystyrene resin or a polyolefin resin, or a foamed resin molded product obtained by foaming these.

  FIG. 7 is a schematic perspective view showing a state in which the upper surface of the package 30 of the substrate storage container of the first embodiment is adsorbed and handled. Although the flat top surface of the upper lid closing the upper opening of the storage box is adsorbed by the transfer device 19, the side wall 5, the upper lid 8 and the lower lid 9 have sufficient load bearing performance. Since the upper connecting portion 11 and the lower connecting portion 12 are connected to each other, mechanical handling becomes possible.

  The load-bearing performance of the upper connecting portion 11 and the lower connecting portion 12 needs to be at least 30 kg, since it is only necessary to be 1.2 times the weight of the package 2 of the substrate storage container 1 to be stored. Although it is preferable to arrange one or more on each side because the load is evenly dispersed, the number of the upper connecting portion 11 and the bottom connecting portion 12 is preferably one or less for each side in consideration of workability. It can also be done.

  According to the package 30 of the first embodiment, the upper lid 8 can be easily removed by unlocking the upper connecting portion 11 and the lower connecting portion 12 by having the opening at the upper portion. After removing the upper buffer body 4a, the storage box main body 3 holds the package 2 in which the substrate storage container 1 is packaged, and the storage box main body 3 faces the pair of opposing side surfaces of the package 2 The inner side wall 5a of the box body 3 is separated from the side surface of the package 2 by 50 mm or more on one side, and an accessible clearance to the package 2 is provided. That is, when the upper lid 8 and the upper buffer 4a are removed, an accessible gap of 50 mm or more is formed between the package 2 and the inner side wall 5a of the storage box main body 3. The accessible clearance is particularly preferably in the range of 50 mm to 100 mm or less.

  By forming such a gap, robot access is enabled, and handling with an automatic transport machine becomes possible. For example, since the substrate storage container 1 is stored with the door surface facing upward, the substrate storage container 1 is taken out at the top by chucking a flange portion or the like overhanging the opening peripheral edge of the container main body to fit the door 1b. It becomes possible to convey to a predetermined position. As described above, since the handling can be performed using an automatic machine, the burden on workers can be reduced and safe handling can be performed.

  Further, by forming a gap of 50 mm, in addition to the handling of the automatic machine becomes possible, it is possible to ease the vibration during transportation. Further, by setting the gap to 100 mm or less, it is possible to prevent the storage space from increasing by increasing the size of the package more than necessary, and to reduce the transportation efficiency.

Next, a second embodiment of the present invention will be described. FIG. 8 is an exploded perspective view showing a package 40 according to a second embodiment of the present invention. In the example shown in FIG. 8, the connecting portion 23 is formed by connecting the upper lid 21 opposite to one side of the lower lid 22 opposite to one side of the storage box main body 20 having an opening at the upper portion and the lower portion. .
With the connecting portion 23 as a base point, the upper lid 21 can be bent to the outside of the storage box main body 20 to open the upper portion. The other form is the same as that of the first embodiment described above, and the same effect as this can be obtained. In this case, since the storage box main body 20 and the upper lid 21 and the lower lid 22 are partially integrated, the number of parts can be reduced, and assembly and unpacking operations can be facilitated. Storage space can be reduced and management is easy.

  FIGS. 9-12 is a perspective view showing the package 50 of 3rd Embodiment of this invention. When the package of the first embodiment is adsorbed and handled by the transport device 19 as shown in FIG. 7, if the package is not adsorbed at the correct position, the position shifts and adsorption becomes insufficient, or the balance is lost when fishing. And stable handling becomes difficult. In the third embodiment, a mark 24 is provided on the outer surface of the top plate 8a of the first embodiment to indicate the position at which the suction pad 19a of the transfer device 19 is adsorbed. For this reason, positioning with the conveyance apparatus 19 and the package 50 can be performed efficiently and correctly.

  In FIG. 9 and FIG. 10, marks 24 are provided on the outer surface of the top plate 8a by printing or the like. The mark 24 is disposed at the suction position of the suction pad 19a, and is formed in a circular shape substantially equal to or larger than the size at the time of contact of the suction pad 19a. For this reason, even after suction of the top plate portion 8a by the transfer device 19, it can be confirmed from the appearance whether or not the suction position of the suction pad 19a is shifted.

  FIG. 11 shows the case of the transfer device 19 that sucks at four corners of the top plate 8a, and the marks 24 are also provided at four corners, but may be provided at two diagonal locations. In addition, in the case of the transport device 19 that sucks at the center of the top plate 8a, only one mark 24 may be provided at the suction position of the suction pad 19a.

  In FIG. 12, a projecting alignment member 25 is provided on the conveyance device 19, and the mark 24 is disposed at a position corresponding to the alignment member 25. Although the mark 24 is disposed at a position different from the contact position of the suction pad 19a, the package 50 can be adsorbed and handled at the correct position by adsorbing so that the alignment member 25 and the mark 24 coincide. . Also, the mark 24 can be made smaller.

  According to the above embodiment, since the upper lid 8 is fixed to the storage box main body 3 or 20 having the opening at the upper portion using the physical locking means, the package storages the substrate storage container 1 Loading or unloading of the package onto the pallet is performed using the transport device 19, and the upper part of the unloaded package is easily unpacked, and the handling robot easily accesses the package 2 of the stored substrate container. As it becomes possible, safe handling becomes possible.

  In this embodiment, although the example of the storage box main body provided with the opening up and down was shown, it does not restrict to this, it has an opening only in the upper part, and the opening of the lower part is closed by the bent piece integrated with the storage box main body It may be In the embodiment, one substrate storage container is stored in the storage box. However, the present invention is not limited to this. A plurality of substrate storage containers may be stored in one storage box, for example, in multiple stages.

  As mentioned above, although specific embodiment was described, this invention is not limited to the said embodiment.

DESCRIPTION OF SYMBOLS 1 board storage container 2 package 3 storage box main body 4a top buffer 4b bottom buffer 5 side wall 6 top opening 7 bottom opening 8 top lid 8a top plate 8b overlap portion 9 bottom portion lid 9a bottom plate 9b overlap portion 11 upper connecting portion 12 lower portion connecting portion 14 temporary fixing portion 19 transfer device 19a suction pad 20 storage box main body 21 upper lid 22 lower lid 23 connecting portion 24 mark 25 alignment member

Claims (12)

A package for storing a 450 mm wafer substrate storage container, wherein
A hollow storage box body having side walls on all sides and an opening at least on the top;
A pair of shock absorbers disposed at the bottom and the top in the storage box body;
Provided in the opening, have a top plate portion which corresponds to at least the opening, and an upper lid capable of handling the mechanical by adsorbing the top plate portion,
At least one upper connecting portion connecting the storage box main body and the upper lid;
Equipped with
An upper lid main body side belt in which the upper connecting portion fixes one end side to the side wall;
An upper lid side belt provided at a position of the upper lid corresponding to a fixing position of the upper lid body side belt, and fixing one end side to the upper lid;
An engagement portion provided on the other end side of the upper lid main body side belt and the upper lid side belt;
The upper lid body side belt and an engaged portion provided on the other end side of the upper lid side belt,
Wherein said engaging portion Ri engaged portion is disengageably der,
An opening provided at the bottom of the storage box body;
A bottom lid having a bottom plate portion corresponding to the opening provided at the bottom portion;
At least one bottom connecting portion connecting the storage box main body and the bottom cover;
Equipped with
Said bottom connection part
A bottom lid body side belt having one end fixed to the side wall;
A bottom lid side belt provided at a position of the bottom lid corresponding to a fixed position of the bottom lid body side belt, and having one end fixed to the bottom lid;
An engagement portion provided on the other end side of the bottom lid body side belt and the bottom lid side belt;
It consists of a main body side belt for the bottom lid and an engaged portion provided on the other end side of the bottom lid side belt,
The engaging portion and the engaged portion can be disengaged,
The buffer at the bottom has a lift claw insertion portion and a recess engageable with the rear surface of the substrate storage container.
The upper part of the buffer body is packaging body according to claim Rukoto to have a front and engageable recess door of the substrate storage container is mounted. The storage box main body is a portion for storing a package in which a 450 mm wafer substrate storage container is packaged,
The package according to claim 1, wherein the buffer is disposed to be in contact with the bottom and the top of the package.   The inner side walls of a pair of the storage box main bodies which are to be opposed to a pair of opposing side surfaces of the package in a state where the storage box main body accommodates a package in which a 450 mm wafer substrate storage container is packaged. The package according to claim 1 or 2, which is separated by 50 mm or more from the side surface of the package, and is provided with an accessible gap to the package. The upper lid includes an overlap portion extending from the top plate portion and overlapping the outside of the side wall,
4. The upper lid side belt according to any one of claims 1 to 3, wherein the one end side is fixed at a position of the overlapping portion opposite to the fixed position of the upper lid body side belt. The package as described in a section.   5. The package according to claim 4, further comprising temporary fixing means provided on the facing surfaces of the overlap portion and the side wall.   The load-bearing total of the said upper connection part is 30 kgf or more, The package body of any one of the Claims 1-5 characterized by the above-mentioned.   7. The upper lid according to claim 1, wherein one ridge line of the top plate portion is integrally connected to one ridge line of the side wall, and the upper lid is integrally provided with the storage box main body. The package according to any one of the items.   The top plate portion is characterized in that the outer surface of the top plate portion is a flat surface, and has a rigidity such that the flat surface can be adsorbed, lifted, and transported when the package is transported. The package according to any one of claims 7 to 10.   9. The package according to claim 8, wherein the outer surface of the top plate portion includes one or more marks indicating contact positions of suction pads for suctioning the flat surface.   10. The package according to claim 9, wherein the size of the mark is approximately equal to the size at the time of contact of the suction pad for suctioning the flat surface, or larger than the size at the time of contact of the suction pad.   The package according to claim 9 or 10, wherein the mark is arranged at at least four corners of the top plate. The package according to any one of claims 9 to 11, wherein the mark is disposed at a position different from the contact position of the suction pad for suctioning the flat surface.

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