WO2005113375A1

WO2005113375A1 - Substrate reception container, substrate reception body, and substrate conveyance device

Info

Publication number: WO2005113375A1
Application number: PCT/JP2005/009250
Authority: WO
Inventors: Takeshi Matsumoto; Takeyuki Doko; Yusuke Nakamura; Tohru Takehara; Keisuke Yumoto; Toyohiko Tanaka; Kensaku Suzuki; Norihiko Nakahara
Original assignee: Dai Nippon Printing Co., Ltd
Priority date: 2004-05-21
Filing date: 2005-05-20
Publication date: 2005-12-01
Also published as: TWI375643B; CN1956899A; KR20070012370A; TW200604069A; KR101217758B1; JPWO2005113375A1; CN1956899B; JP4924033B2

Abstract

A reception container for receiving a layered body constructed by layering substrates. The substrate reception container has a support base having a support surface on which the substrates can be placed horizontally and has pressing means for applying uniform pressing force to the entire upper surface of the layered body, placed on the support base, to press and fix the layered body to the support base. The pressing means has a load support plate provided while being connected to the support base so as to face the upper surface of the layered body placed on the support base and has an air bag placed between the load support plate and the layered body, supported by the load support plate, and applying uniform pressing force to the entire upper surface of the layered body.

Description

Specification

Substrate storage container, substrate storage body and substrate transport device

Technical field

The present invention relates to a substrate storage container, a substrate storage body, and a substrate transport device for transporting and protecting a sheet glass, a glass substrate, and a color filter substrate used in a liquid crystal display device as a processed product thereof, and the like. is there.

Background art

[0002] Conventionally, when storing and transporting a color filter substrate in which projections such as a black matrix, a coloring layer, a transparent conductive film layer, and a spacer are formed on the surface of a flat glass and a glass substrate which is a processed product thereof, In order to protect the surface of the glass substrate from scratches and breakage, a number of grooves are formed so that the substrates can be inserted upright from the opening above the box so that they do not touch each other, and can be held. A storage container in a foam resin box that can be stored in parallel at predetermined intervals was used.

Patent Document 1: JP-A-2002-264992

[0003] However, recently, there has been a demand for the production of large glass substrates, and if these are stored in a box-shaped storage container at a predetermined interval as in the conventional case, a larger storage container, Space is required, and conventionally only the periphery of the substrate is loosely supported, so that the glass substrate ends fall off due to vibrations during transportation, etc. There is a problem that the glass is in contact with the adjacent glass substrate and is damaged.

Disclosure of the invention

Problems to be solved by the invention

[0004] It is an object of the present invention to provide a substrate storage container, a substrate storage body, and a substrate transporter that can transport processed products such as large-sized glass sheets, glass substrates, and color filter substrates while avoiding damage such as scratches and breakage during transportation. An apparatus is provided.

Means for solving the problem

[0005] A first invention is a storage container for storing a stacked body formed by stacking a plurality of substrates, and a support surface on which the stacked body can be placed with the substrate kept horizontal. A branch with A substrate holding means for applying a uniform pressing force to the entire upper surface of the stack placed on the support, and pressing and fixing the stack to the support. Container.

[0006] A second invention is a substrate storage body formed by storing a stacked body formed by stacking a plurality of substrates via a spacer in the substrate storage container of the first invention.

[0007] Further, a third invention includes a first support plate, a second support plate, and a stack formed by stacking a plurality of substrates via a spacer, wherein the stack is A substrate housing body sandwiched between first and second support plates and supported by being pressed.

[0008] Further, the fourth invention provides a pedestal for pressing and supporting a stacked body formed by stacking a plurality of substrates and storing the pedestal, and a cushioning member on an inner floor surface, A container for holding the gantry on a cushioning member, wherein the gantry has a property of absorbing a low-frequency component of vibration, and the container has a property of absorbing a high-frequency component of vibration. It is transportation to be a sign. The gantry has a characteristic of absorbing a low-frequency component of vibration, that is, a characteristic of generally preventing deformation of the stack due to a low-frequency component of vibration having a large amplitude. It has a characteristic of absorbing, that is, a characteristic of effectively blocking propagation of high frequency components to the gantry by converting vibration energy into heat by a floor cushioning member.

[0009] Further, the fifth invention provides a pedestal for pressing and supporting and storing a stacked body formed by stacking a plurality of substrates, and a panel mechanism for storing the pedestal and having a panel mechanism on an inner ceiling surface thereof. A container that suspends and holds the gantry by a mechanism, wherein the gantry has a property of absorbing low-frequency components of vibration, and the container has a property of absorbing high-frequency components of vibration. It is a transport device characterized by the above. The pedestal has a characteristic of absorbing a low-frequency component of vibration, that is, a characteristic of generally preventing deformation of a stack due to a low-frequency component of vibration having a large amplitude, and the container absorbs a high-frequency component of vibration. In other words, the cushioning member on the floor converts the energy of the vibration into heat, thereby effectively blocking the propagation of the high-frequency component to the gantry.

[0010] In a sixth aspect of the present invention, a pedestal for pressing and supporting a stacked body formed by stacking a plurality of substrates and storing the pedestal, and a bottom part having a buffer member and holding the pedestal is provided. And said A box comprising a cover disposed above a bottom portion, wherein the gantry has a characteristic of absorbing a low-frequency component of vibration, and the bottom portion has a characteristic of absorbing a high-frequency component of vibration. It is a transport device characterized by the above.

[0011] In a seventh aspect, the transportation device according to the sixth aspect is connected to a floor member, and four pillars erected at the corners of the floor member and an upper part of the pillar. It is a transportation device surrounded by a rack with four beams.

[0012] In an eighth aspect, the present invention provides a support base having a support surface on which a stacked body obtained by laminating a plurality of substrates via a separating member can be placed in a state where the substrates are horizontal. A uniform pressing force is applied to the entire upper surface of the stack placed on the table, and the stack is stored in a substrate storage container having a pressing means for pressing and fixing the stack against the support table. And a container that stores the substrate storage body, stores the substrate storage body, has a buffer member on the inner floor surface, and holds the substrate storage body on the buffer member. The container is characterized in that the container has a characteristic of absorbing low-frequency components, and the container has a characteristic of absorbing high-frequency components of vibration.

[0013] A ninth invention includes a first support plate, a second support plate, and a stack formed by stacking a plurality of substrates via a spacer, wherein the stack includes A pallet provided with a support surface on which the substrate storage body, which is sandwiched between the first and second support plates and pressed and supported, and on which the substrate storage body can be mounted, and the substrate mounted on the pallet; A substrate housing body housed in a box body including a detachable lid body provided to cover the housing body;

A container for storing the substrate storage body housed in the box, having a buffer member on the inner floor surface, and holding the gantry on the buffer member, wherein the substrate storage body has a low frequency of vibration. The transport device has a characteristic of absorbing a wave component, and the container has a characteristic of absorbing a high frequency component of vibration.

[0014] In the present invention, the stack of substrates is fixed by a pressing body that presses the entire surface of the substrate using a mount or a substrate storage body having sufficient rigidity against the weight of the stack of substrates and vibration during transportation. Thereby, the bending of each substrate and the deformation of the stacked body of the substrates are suppressed, the substrates are prevented from rubbing each other or the substrate and the separating body, and the containers are transported in a container having a cushioning function on the floor surface. Vibration during transportation has low frequency (40Hz or less) component and high frequency (40 ~: 100Hz) component By using a board storage body that is fixed by pressing the stack against a sufficiently rigid base or high-rigid support base, low-frequency vibration can be absorbed and the container floor has a buffer function. By doing so, high-frequency vibrations can be absorbed, and when the pressing force of the substrate stack is not sufficient, the divided vibration prevents the collision force, rubbing and rubbing between individual substrates or between the substrate and the separating body. Can be.

The invention's effect

[0015] The substrate storage container and the substrate storage body of the present invention can carry a large number of large glass substrates or processed products thereof and can uniformly support and transport the entire surface of the substrate. In addition, it is possible to prevent rubbing between the substrates and between the substrate and the separating body, and to avoid damage such as scratches or breakage on the surface of the substrate, which increases the transfer efficiency. Further, by further providing a shock absorbing material, the shock resistance is excellent, and damages such as scratches or defects on the substrate surface can be avoided.

[0016] Furthermore, by placing the stacked body on the pallet, an effect that transportation using a forklift or the like becomes easy can be obtained. Further, if the lid is detachably attached to the pallet so as to surround the stacked body placed on the pallet, and the top plate of the lid is made to function as the above-mentioned load supporting plate, The load can also be used as a load supporting plate, so that the structure can be simplified, and the stack can be covered with the lid to prevent adhesion of dirt and dust to the substrate.

[0017] Further, if a configuration is provided having a second pallet for storing an inner box formed of a pallet and a lid attached to the pallet and an outer box composed of the second lid, the outer pallet is housed in the outer box. The inner box is free from dirt, dust, etc. adhered to the inner box.When the inner box is transported into the factory where the substrate is used, the inside of the factory can be kept clean, with no dirt, dust, etc. The effect is obtained.

[0018] The transportation device of the present invention has a mount or substrate storage body on which a large number of large glass sheets, glass substrates, or processed products thereof are mounted and pressed and supported by pressing means, and has a cushioning member on the floor surface. By storing it in a container or container, it is possible to absorb and transport low-frequency and high-frequency vibrations, and therefore, it is possible to avoid damage such as scratches or defects on the substrate surface.

Brief Description of Drawings Garden 1] is a cross-sectional view showing one example of the substrate storage body of the present invention.

Garden 2] FIG. 2 is a perspective view of an inner box of the substrate storage body of FIG.

Garden 3] is an explanatory view of a state where a stack is placed on a pallet.

Garden 4] is an explanatory view of a state in which a stack is placed on a pallet.

Garden 5] is an explanatory view of a substrate.

Garden 6] is an explanatory view of a stack.

FIG. 7 is an explanatory diagram of a stack.

Garden 8] is a sectional view showing an example of the substrate storage body of the present invention.

Garden 9] is a cross-sectional view showing one example of the substrate storage body of the present invention.

FIG. 10 is a front view showing an example of the substrate housing of the present invention.

FIG. 11 is a plan view of the support plate of FIG.

Garden 12] is a front view showing an example of the substrate storage body of the present invention.

FIG. 13 is a plan view of the support plate of FIG.

Garden 14] is a front view showing an example of the substrate storage body of the present invention.

FIG. 15 is a plan view of the support plate of FIG.

FIG. 16 is a front view showing an example of the substrate storage body of the present invention.

FIG. 17 is a sectional view taken along line AA of the substrate container of FIG. 16.

Garden 18] is a front view showing an example of the substrate storage body of the present invention.

FIG. 19 is a BB cross-sectional view of the transporter of FIG.

FIG. 20 is a perspective view showing an example of the transportation device of the present invention.

FIG. 21 is a perspective view of a container of the transportation device in FIG. 20.

FIG. 22 is a plan view of the floor of the container of FIG. 21.

FIG. 21 is a perspective view of a gantry of the transportation device of FIG. 20.

FIG. 24 is a cross-sectional view showing one example of the transportation device of the present invention.

FIG. 25 is a perspective view showing an example of the transportation device of the present invention.

FIG. 26 is a sectional view of the transportation device in FIG. 25.

FIG. 27 is a perspective view showing an example of the transportation device of the present invention.

FIG. 28 is a perspective view showing another example of the gantry used for the transportation device of the present invention. FIG. 29 is a perspective view showing another example of a gantry used for the transportation device of the present invention. FIG. 30 is a perspective view showing another example of a gantry used for the transportation device of the present invention. FIG. 31 is a perspective view showing an example of the transportation device of the present invention.

FIG. 32 is a perspective view showing an example of the transportation device of the present invention.

Explanation of symbols

1 ……… Substrate storage

3 ……… Substrate

3a ---- ''

3b ---- Resin layer

3ο

4Α ······ Separator

4Β ··········· Separator

5 ……… stacked

7 ……… Reinforced plate

9 ……… Reinforced plate

II- ·-Pallet

12 -... --- Lid

13

15-…-'… Airbag

17 -... Palette

19-…… lid

21-… Tube

23 ······ Valve

31-…-… Substrate storage

33Airbag

41Board storage

43 Elastic plate material

51 ····························· Package Support Plate Groove Support Plate Band Package Support Plate Top Support Plate Nut Bolt Hole Packing Support Plate Support Plate Clamp Metal Part Board Housing Shock Absorber Shock Absorber Shock Absorber Shock Absorber Shock Absorber Board Shock Absorber Material Shock absorber Shock absorber Shock absorber 97 Shock absorber

99 Shock absorber

101 ········· Transportation equipment

103-… '·-… Container

105 ---- one ... stand

107-... one ... floor member

109…-… cushioning material

111-

113-

115-… ceiling

117…-… --Door

119-… · · Back plate

123 Floor members

125 ... back member

127Pressing body

131 Enclosure member

133 ··············· No: ^ Kamno

135 ········ '/': ^ Kamno Nenore

137 ...…-'Screw

139

141 ······ Transportation equipment

143 -... --... Support member

145-…

147-…… --Guide

149-…-… Container

151…--… Transportation equipment

153 -...… '-Floor

155…-… cushioning member 157 Mount holder

158 protrusion

159 cover

161 Transportation equipment

163 Floor members

165 pillar

167 beams

171 trestle

173 Pressing body

175 air spring

181 trestle

183 Upper surface member

185 Support members

187 arm

191 trestle

193 air spring

201 Transport Equipment

211 Transport equipment

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic cross-sectional view of a substrate storage body according to a first embodiment in which a stack of substrates is stored in a substrate storage container of the present invention, and FIG. 2 is a partial cross-sectional view of the substrate storage body of FIG. FIG. 3 is a schematic side view showing a state in which a stack of substrates is placed on a pallet, and FIG. 4 is a schematic side view showing a state in which a stack of substrates is placed on a pallet. The substrate storage 1 is a stack 5 formed by stacking a large number of substrates and stored in a substrate storage container (hereinafter simply referred to as a storage container) 10. Hereinafter, each part will be described in detail.

The substrate 3 to be stored in the present embodiment is a sheet glass, a glass substrate, and its additional products, and is used for a color filter of a liquid crystal display, a thin film transistor (TFT), and the like. And glass substrates. A typical structure is schematically shown in FIG.

In FIG. 5, the substrate 3 is provided with a functional layer 3b (for example, in the case of a substrate for a color filter, a black matrix, a colored pixel, an ITO electrode, etc.) on one surface of a substrate body 3a such as a glass plate. Layer) on which a protective film 3c for preventing damage during storage and transportation is formed. The protective film 3c is made of a material that can be easily formed and easily removed, and often uses a water-soluble resin (for example, polybutyl alcohol). The film thickness is about 10 to 20 x m. Normally, the functional layer 3b and the protective film 3c are formed in the entire region except a few mm around the periphery of the substrate body 3a. In this specification, a region where the functional layer 3b and the protective film 3c are formed thereon is referred to as an effective region.

The size of the substrate 3 is not particularly limited, and may be a large size of about 1800 mm wide × 2000 mm long. Also, the thickness of the substrate is not limited. Force 0.3 to: 1. Omm. The number of sheets to be stored is preferably about 1 to 300.

The storage container 10 has a double structure including an inner box for storing the stack 5 and an outer box for storing the inner box. The inner box is detachably attached to the pallet 11 so as to surround the pallet 11 constituting a support base provided with a support surface 11a for supporting the stack 5 and the stack 5 placed on the pallet 11. With a lid 12 to be attached.

The support surface 11 a of the pallet 11 has an area larger than the area of the substrate 3 so that the stack 5 can be supported in a state where the substrate 3 is parallel to the support surface 11 a. . The lid 12 is a box-shaped one provided with a top plate 12a parallel to the support surface 11a when attached to the pallet 11, and four side plates 12b perpendicular to the support surface 11a.

[0027] In order to position the lid 12 at a predetermined position with respect to the pallet 11, protrusions ib that fit into the inner surface of the side plate 12b of the lid 12 are formed at a plurality of locations on the upper surface of the pallet 11. The means for positioning the lid 12 with respect to the pallet 11 is not limited to the one using the projections ib, but can be changed as appropriate.

[0028] The top plate 12a of the lid 12 is stacked by the airbag 15 as described later.

The lid 12 functions as a load supporting plate for supporting a reaction force when a pressing force is applied to the upper surface of the cover 12, and the lid 12 has a structure having rigidity to withstand the reaction force. The lid 12 is connected to the pallet 11 by a connecting means having a strength capable of supporting the reaction force. ing. In the present embodiment, a plurality of snap locks 13 are used to connect the lid 12 to the pallet 11 with necessary strength. The snap-in lock 13 can be opened and closed with one touch, so that it has good workability and can withstand a large tensile force. The connecting means for connecting the lid 12 to the pallet 11 is not limited to the buckle lock, but may be any using bolts and nuts, using a connecting pin, and the like.

[0029] On the support surface 11a of the pallet 11, a reinforcing plate 7 with high plane accuracy is placed, and the stack 5 is placed thereon. A reinforcing plate 9 having high planar accuracy is placed on the stack 5, and an airbag 15 is placed on the reinforcing plate 9. By supporting or pressing the substrate 3 with the flat reinforcing member, damage to the substrate 3 can be further prevented.

The airbag 15 is inflated by supplying pressurized air to the inside thereof, and the upper surface position is restrained by the top plate (load supporting plate) 12 a of the lid 12, so that the entire upper surface of the stacked body 5 is covered. They are arranged so that they can be pressed uniformly via the reinforcing plate 9. Therefore, the airbag 15 and the top plate 12a supporting the airbag 15 apply uniform pressing force to the entire upper surface of the stack 5 to constitute pressing means for pressing and fixing the stack against the support table.

[0031] In addition, an air supply tube is provided on the airbag 15 so as to extend outside the lid 12 so that pressurized air can be supplied into the airbag 15 with the lid 12 attached to the pallet 11. A valve 21 is connected, and a valve 23 is attached to a tip of the valve 21.

[0032] The reinforcing plates 7, 9 arranged above and below the stack 5 are provided so as to support or press the substrate of the stack 5 as flatly as possible. As the reinforcing members 7 and 9, a lightweight plate material having excellent flatness is used.Specifically, it is preferable to use a honeycomb panel or a laminated plate having a foam body as a core and an FRP board as a skin. . The reinforcing members 7 and 9 have the same or larger area as the substrate 3 so as to support or press the entire surface of the stack 5. As for the planar accuracy of the reinforcing members 7 and 9, it is preferable that the surface roughness is about 100 mRmax or less, and the flatness is that the minimum radius of curvature is about 700 m or more.

The outer box for storing the inner box composed of the pallet 11 and the lid 12 is formed of the second pallet 17 and the lid 19 that can be attached to and detached from the second pallet 17. The lid 19 has the same shape as the lid 12 of the inner box, and can be attached to and detached from the pallet 17 by the buckle lock 13. Illustration is omitted. However, the pallet 17 of the outer box is provided with a means for positioning and fixing the pallet 11 of the inner box at a predetermined position.

[0034] In stacking a large number of the substrates 3 to form the stacked body 5, the spacers 4 are sandwiched between the substrates 3 so that the functional layer 3b and the protective film 3c of each substrate 3 can be protected. Is preferred. The form in which the spacer 4 is sandwiched is not particularly limited, and the spacer 4 may be present at least at a position covering the effective area of the substrate 3.A preferred form is, as shown in FIG. A long spacer 4A is disposed such that both ends extend outside the substrate 3 or, as shown in FIG. 7, a spacer 4B having substantially the same size as the substrate 3 when folded in two. In addition, a form in which the sheet is sandwiched between the substrates 3 in a folded state can be given. In the embodiment shown in FIG. 6, the end of the spacer 4A extends outside the substrate 3, so that when the spacer is peeled off, it is necessary to grasp the extended portion by holding the extended portion. The mechanism can be simplified and can be reliably gripped. In the embodiment shown in FIG. 7, since the spacer 4B is folded in two, the protective film 3c of the substrate 3 (see FIG. 5) absorbs moisture during transportation and adheres to the piece 4Ba of the spacer in contact with the protective film 3c. Even if it does, the upper piece 4Bb is not adhered, so that the upper piece 4Bb can be easily sucked and held by a suction pad or the like when peeling off the spacer 4B. By attaching one piece to a means (for example, a nip roll or the like) capable of reliably peeling the spacer 4, the spacer 4 can be reliably peeled from the substrate.

[0035] The material used for the spacer 4 is arbitrary as long as it can protect the substrate 3, and paper, a resin sheet, or the like is used. Examples of a preferable material for the spacer 4 include a foam sheet made of a resin having closed cells, for example, “Miramat” (trade name, manufactured by Nippon Kaisha Net! SP). Since the resin foam sheet having closed cells has appropriate softness, the protection of the functional layer 3b on the substrate surface is ensured, and since there is no air permeability, the moisture absorption of the protective film 3c can be prevented. When the thickness of the spacer 4 is too small, the protective effect is reduced. On the other hand, when the thickness is too large, the cost is increased and the bulk is disadvantageous. Therefore, in consideration of these, the thickness is selected to be about 0.25 to 1 mm. Is preferred.

Next, a method of storing the stack 2 in the storage container 10 will be described. As shown in FIGS. 3 and 4, the reinforcing plate 7 is placed on the pallet 11, and then the substrate 3 and the separating body are alternately stacked thereon. Stacked to form stack 5. Note that the stack 5 may be formed in another place, and the stack 5 may be changed to be placed on the pallet 11. After the stack 5 is placed on the pallet 11, the reinforcing member 9 and the airbag 15 are put on the stack 5, and the lid 12 is covered from above, and the lid 12 is fixed to the pallet 11. Then, a pressurized air supply device (not shown) such as a compressor is connected to the air supply tube 23 connected to the airbag 15 to supply pressurized air to the airbag 15. Thereby, the airbag 15 is inflated, the upper surface of the stack 5 is pressed through the reinforcing plate 9, and the stack 5 is pressed against the pallet 11 and fixed.

The pressing force by the airbag 15 can be adjusted to a desired value by adjusting the air pressure supplied to the airbag 15. If the height of the stack 5 is insufficient and the pressing force cannot be applied to the stack 5 by the airbag 15, insert a suitable spacer between the reinforcing plate 9 and the airbag 15. Okebore.

After supplying the pressurized air at the desired pressure to the airbag 15, the valve 23 is closed and the pressurized air supply device is removed. Thereafter, the whole is stored in an outer box formed by the second pallet 17 and the lid 19, and is transported to a desired place and stored in that state. Even during transportation and storage, the airbag 15 is kept in a state in which the pressurized air is sealed, so that the airbag 15 continues to exert an even pressing force on the upper surface of the stack 5, and If 3 shifts and causes damage, it will not be damaged.

When the substrates are stored in the storage container 10, the pallets 11 are placed in a horizontal state and the substrates are stacked in a horizontal state, but when the formed substrate storage body 1 is transported, The present invention is not limited to the case where the pallet 11 is kept in a horizontal state, and the pallet 11 may be inclined or stand upright if necessary. Even in this case, since the substrate 3 is tightened with a uniform pressure over the entire surface and is pressed against the pallet 11, the substrate 3 cannot be moved and can be safely transported without causing damage to the substrate 3. .

[0040] In unpacking, the lid 19 of the outer box is removed, the inner box (pallet 11, lid 12, etc.) stored therein is taken out and carried into a desired place. At this time, since the inner box was covered with the outer box, there was no dust or dirt attached.Therefore, transport the inner box to a place where cleanliness is required, such as in a factory where substrates are used. No problem can occur. Next, after evacuating the airbag 15, the lid 12 is removed from the pallet 11, and the airbag 15 is replaced. After removing the hard plate 9, the substrate 3 and the spacer 4 may be alternately taken out from the upper surface side of the stack 5.

As described above, the substrate 3 is placed in a horizontal state, and the airbag 15 applies a uniform pressing force to the entire upper surface of the stack 5. Therefore, even when the substrate size is large, Even in a large number of cases, each substrate 3 can be tightened and fixed with a uniform pressure over the entire area, so that the substrate does not move and is not damaged during transportation. In addition, since the airbag 15 applies a uniform pressing force to the entire surface of the substrate, even if the pressing force per unit area is set small, the substrate can be restrained so as not to move. Damage can be prevented. Further, the pressing force can be easily adjusted by adjusting the air pressure supplied to the airbag.

In the present invention, the pressing means is configured to apply a uniform pressing force to the entire upper surface of the stack, but the “entire upper surface” is not necessarily limited to the entire upper surface in a strict sense. Even if the area is slightly smaller than the entire area, it is sufficient if the substrate can be restrained so as not to move by applying a uniform load to the area.Specifically, 80% of the entire upper surface area It means a region of a degree or more.

In the first embodiment, a force that uses only the pressing force of the airbag 15 disposed on the top surface of the stack 5 to fix the substrate 3 is used. It is also possible to arrange a suitable cushioning material between the side plates 12b of the lid body 12. FIG. 8 shows a substrate storage body 31 according to the embodiment in that case.In this embodiment, an airbag 33 is inserted as a cushion material between the side surface of the stack 5 and the side plate 12b of the lid 12, and FIG. In addition, the side of the stack 5 is restrained by filling the pressurized air. With this configuration, the displacement of the substrate 3 during transportation can be more reliably prevented.

Further, in the first embodiment, the pressing device that uses the airbag 15 as the pressing device that applies a uniform pressing force to the upper surface of the stack 5 is used. However, the pressing device is not limited to this. Other structures may be used.

FIG. 9 shows a substrate housing 41 using a pressing means having another structure. In this embodiment, an elastic plate material 43 made of rubber, sponge, resin foam, or the like is arranged between the stack 5 placed on the pallet 11 and the top plate 12a of the lid 12 in a compressed state. are doing. In other words, the elastic plate 43 is thicker than the gap between the top plate 12a and the reinforcing plate 9 in the uncompressed state. The elastic plate 43 is placed on the reinforcing plate 9, and the top plate 12a of the lid 12 is pressed from above, and the lid 12 is pressed against the pallet 11 by appropriate pressing means. By connecting the lid 12 to the pallet 11 in this state, the top plate 12a presses the elastic plate material 43 to elastically deform it, whereby the elastically deformed elastic plate material 43 covers the entire upper surface of the stack 5. A uniform pressing force can be applied.

Further, in each of the above-described embodiments, a force that uses the top plate 12a of the lid 12 as a load support plate that supports the airbag 15 and the elastic plate material 43 is a load support plate that supports the airbag 15 and the elastic plate material 43. It is not necessary to use the form of the top plate 12a of the lid 12, but it is necessary to simply use a flat plate-like load support plate, and connect this load support plate to the pallet 11 using connecting rods, pipes, flat plates, etc. Tomorrow.

Next, a substrate housing according to a second embodiment of the present invention will be described.

FIG. 10 is a front view of a substrate storage body 51 according to the second embodiment of the present invention (the side of the lid in the front of the figure is not shown). It is stored in the body. FIG. 11 is a plan view of the support plate 55 used in FIG.

[0048] In the substrate storage 51, components having the same functions as those of the components of the substrate storage 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0049] The substrate storage body 51 of the present invention includes a package 53 that is a substrate storage body that presses and supports the stacked body 5, an inner box that stores the package 53, and an outer box that stores the inner box. It has a double structure. The inner box can be attached to and detached from the pallet 11 so as to surround the pallet 11 forming a support base having a support surface 11a for supporting the package 53 and the stacked body 5 placed on the pallet 11. It has a lid 12 attached to the camera.

As shown in FIG. 10, the packing body 53 has the stacked body 5 of the substrate 3 placed on the supporting plate 57, further placed on the supporting body 55 on the stacked body 5, and thereafter, a band 59 as a pressing means is provided. By pressing the support plate 55 and the support plate 57 to the predetermined pressing pressure by tightening the band 59 and surrounding the outer circumference of the support plate 55 and the support plate 57, the support plate is pressed against the stack 5 and fixed. As the band 59, a rubber band can be used as the band 59, which is particularly preferable to have a configuration in which panels are inserted in series. By using the rubber band, there is no loosening due to the decrease in the thickness of the stack during transportation. [0051] As shown in Fig. 11, the support plates 55 and 57 are in the shape of a rectangular plate, and it is preferable to provide the groove 56 in advance at the portion where the band is to be hung. The groove 56 prevents the band 59 from shifting and facilitates the pressing operation.

[0052] Since the support plates 55 and 57 press the entire surface of the substrate without unevenness, those having high bending stiffness are preferable, and lighter ones are preferable in consideration of handling. For example, honeycomb panels and sandwich panels are raised. Can be Also, the size of the support plate is preferably larger than the substrate.

When the substrate 3 is mounted on the support plate 57 to form the stacked body 5, in order to avoid contact between the substrates, a paper, a resin film or a sheet having a cushioning property is provided between the adjacent substrates 3. Insert it. As the sheet having a cushioning property, a sponge sheet made of expanded polyethylene, expanded polypropylene, or expanded polyurethane can be suitably used.

[0054] The number of substrates 3 to be stored is preferably about 1 to 500, and can be suitably used, and particularly preferably about 100 to 200.

Although not shown, the band 7 has a structure that has a fastening portion and can be fixed.

The package 53 can be transported either horizontally (in a state where the substrate is laid down) or vertically (in a state where the substrate is upright). The step of sandwiching the substrate stack 5 between the support plates 55 and 57 and integrating the support plates 55 and 57 with the substrate stack 5 using the band 59 as the pressing means is preferably performed in a horizontal stacking manner. It is. When transporting vertically, it is preferable to form the package 53 by horizontal loading and then transport it vertically.

[0057] The preferable range of the pressing pressure of the support plate by the band 59 as the pressing means is different between the horizontal stacking and the vertical stacking. In the case of the horizontal stacking, the weight is reduced due to its own weight. OOG / cm when the ² preferred tool vertically stacked is 100 to 500 g / cm ² is preferred instrument particularly preferably 300 to 500 g, fe in cm.

When storing the package 53 in the inner box, the package 53 is fixed to the pallet 11 by a fixing means (not shown).

[0059] In the second embodiment, the form in which the package 53 is housed in a double box has been described. However, the package 53 may be simply housed in a box, or a finole such as a stretch film may be used. It can also be covered and transported. As described above, according to the second embodiment, the stacked body can be transported while being pressed and supported by the band 59, so that damage such as scratches or breakage on the substrate surface, which enhances the transport efficiency, can be prevented. Evasive power S can.

In the second embodiment, the packing body 53 uses the band 59 as the pressing and supporting means, but other pressing and supporting means may be used. FIGS. 12 and 13 and FIGS. 14 and 15 show a package 61 and a package 71 using the pressing and supporting means.

[0062] The package 61 will be described.

12 and 13 are explanatory diagrams of the package 61, FIG. 12 is a front view of the package 61, and FIG. 13 is a plan view of the support plate 63 used in FIG. In the package 61, components having the same functions as those of the components of the package 53 are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 12, the packing body 61 has the stack 5 stacked on the support plate 65, and the support plate 63 is further mounted on the stack 5, and then, the end portions of the support plates 63 and 65. As a pressing means, a tightening bolt 67 is passed, a bolt 67 is fitted to a nut 66 provided at the bottom of the support plate 65, and the top portion 64 is tightened by turning the top portion 64 to pressurize to a predetermined holding pressure. It is pressed and fixed to the stack 5.

As shown in FIG. 13, the support plates 63 and 65 have a rectangular plate shape, and have holes 69 at four corners of the support plates 63 and 65 for passing bolts.

The support plates 63 and 65, like the support plates 55 and 57, press the entire surface of the substrate without unevenness, so that those having high flexural rigidity are preferable, and those that are lighter in consideration of handling are preferable. For example, a honeycomb panel and a sandwich panel are used. Also, the size of the support plate is preferably larger than that of the substrate.

The arrangement of the bolts 67 is not limited to the position shown in FIG. 13, and a plurality of bolts 67 are provided at positions where the entire surface of the substrate can be uniformly supported and transported.

As in the case of the package 1, the package 61 is formed by a force package 61 that can be transported either horizontally or vertically during transportation, that is, by the support plates 63 and 65. The step of sandwiching the substrate stack 5 and integrating the support plates 63 and 65 with the substrate stack 5 using bolts 67 as a pressing means is preferably performed in a horizontal stack. In the case of transporting vertically, it is preferable to form the package 61 by horizontal loading and then transport it vertically. [0068] The preferable range of the holding pressure of the support plate by the bolt 67 as the pressing means is different between the horizontal stacking and the vertical stacking. In the case of the horizontal stacking, the weight is reduced due to its own weight. OOG / cm when the ² preferred tool vertically stacked is 100 to 500 g / cm ² is preferred instrument particularly preferably 300 to 500 g, fe in cm.

As described above, according to the present embodiment, the stacked body can be transported while being pressed and supported by the bolt 67, so that damage such as scratches or deficit on the substrate surface, which enhances the transport efficiency, can be prevented. Avoidance power S

[0070] The package 71 will be described.

14 and 15 are explanatory views of the package 71, FIG. 14 is a front view of the package 71, and FIG. 15 is a plan view of the support plate 73 used in FIG. In the package 71, components having the same functions as those of the components of the package 53 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In the package 71, the stack 5 is placed on the support plate 75, the support plate 73 is further placed on the stack 5, and then a plurality of U-shaped clamps 77 are provided at the end of the support plate. The support plate 73 is pressed against the stack 5 by the clamp 77, and is pressed to a predetermined pressing pressure and fixed.

[0072] As shown in Fig. 15, the support plates 73 and 75 are in the shape of a square plate, and it is preferable that metal is buried in the clamp mounting portion in advance (metal portion 79), and the clamp portion is formed as a concave portion. Is also preferred.

[0073] As with the support plates 55 and 57, the support plates 73 and 75 press the entire surface of the substrate without unevenness, so that those having high bending rigidity are preferable, and those that are lighter in consideration of handling are preferable. For example, a honeycomb panel and a sandwich panel are used. Also, the size of the support plate is preferably larger than that of the substrate.

The clamps 77 are not limited to the positions shown in FIGS. 14 and 15, and are provided at a plurality of positions where the entire surface of the substrate can be uniformly supported and transported.

[0075] The package 71 can be transported either horizontally or vertically, as in the case of the package 53. However, when the package 71 is formed, that is, when the support plates 73 and 75 are used. The step of sandwiching the substrate stack 5 and integrating the support plates 73, 75 and the substrate stack 5 using the clamp 77 as a pressing means is preferably performed in a horizontal stack. When transporting vertically, it is preferable to form the package 71 horizontally and then transport it vertically. [0076] The preferable range of the holding pressure of the support plate by the clamp 77, which is a pressing means, differs between horizontal stacking and vertical stacking. In the case of horizontal stacking, the weight is reduced due to its own weight. / If cm ² is preferred instrument vertically stacked it is preferable instrument particularly preferably 100 to 500 g / cm ² is 30 0~500g / cm ^2.

As described above, according to the present embodiment, the stacked body can be transported while being pressed and supported by the clamp 77, so that damage such as scratches or deficit on the substrate surface, which enhances the transportation efficiency, can be prevented. Avoiding power S can.

[0078] The package 53 in the second embodiment is also preferably combined with a shock absorber as shown in Figs. In the state shown in FIGS. 16 to 19, the force can be stored in the double-structured box or a box having another shape, or can be transported by covering with a film such as a stretch film.

FIGS. 16 and 17 are explanatory views of a package 81 in which a package 53 and a shock absorber are combined according to the second embodiment. FIG. 16 is a front view (the front shock absorber is not shown), and FIG. 17 is a cross-sectional view taken along line AA of FIG. FIG. 18 is a front view of the package 91 (the shock absorber in the foreground is not shown), and FIG. 19 is a cross-sectional view of the transporter 91 shown in FIG. Components having the same functions as the components in the above description are denoted by the same reference numerals, and detailed description is omitted.

As shown in FIG. 16, the package 81 has shock absorbers arranged on the bottom, top, and sides of the horizontally stacked package 53. The shock absorber 82 is provided at the bottom of the package 53, and the shock absorber 83 is provided at the top of the package 53. The shock absorbers 82 and 83 have a square shape slightly larger than the support plate of the package 53.

As the side shock absorbers, shock absorbers 87 and 89 are provided at the end of the substrate of the stack 5, and shock absorbers 85 are provided outside the shock absorbers 87 and 89. The shock absorber 87 and the outer shock absorber 85 may be integrally formed.

[0081] The shape of the shock absorbing material is not particularly limited. However, if a recess is formed in accordance with the shape of the package, it is effective in preventing lateral displacement during transportation. It is also effective to form the bottom, side and top shock absorbers 82, 85, 83 so that they are combined in a box shape. [0082] The material of the shock absorbing material 82 is not particularly limited. However, when a drop impact test is performed on the transportation body of the present invention and an external impact force of 20G is applied, the impact force on the stacked body is reduced by 3%. Foamed polypropylene, which desirably has a cushioning property of about G or less, can be suitably used. Also, as for the material of the shock absorbers 83, 85, 87, and 89, foamed polypropylene can be suitably used similarly to the shock absorber 82.

Here, the arrangement of the shock absorbing material that can use only the shock absorbing material 82 at the force bottom described with reference to the example in which the shock absorbing material is arranged on the entire surface of the package 53 is appropriately selected.

As shown in FIG. 18, the package 91 has shock absorbers arranged on the bottom, top, and sides of the vertically stacked package 53. Shock absorbers 92 and 93 are provided at the bottom of the package 53, and shock absorbers 94 and 95 are provided at the top of the package 53.

The shock absorbers 92 and 94 have a square shape slightly larger than the bottom of the package 53. Further, the shock absorbing material 92 and the shock absorbing material 93, and the shock absorbing material 94 and the shock absorbing material 95 may be integrally formed.

Further, a shock absorbing material 97 on the side is provided, and a shock absorbing material 99 is provided between the shock absorbing material 97 and the end of the substrate of the stack 5 of the package 53.

[0086] The shape of the shock absorbing material is not particularly limited. However, if a recess is formed in accordance with the shape of the package, it is effective to prevent lateral displacement during transportation. Also, if the whole is formed in a box shape, workability during transportation is improved.

[0087] As the material of the shock absorbing materials 92, 93, 94, 95, 97, and 99, foamed polypropylene can be suitably used as described above.

[0088] Here, the arrangement of the shock absorbing material that can use only the shock absorbing materials 92 and 93 at the force bottom described with reference to the example in which the shock absorbing material is arranged on the entire surface of the package 53 is appropriately selected.

As described above, by forming the support plate into a package pressed against the stack, the entire surface of the substrate can be supported and transported. By providing the shock absorbing material at the bottom, the substrate can be transported. Vibration can be absorbed, and the end of the board can be protected by providing a shock absorber at the end of the board of the package. By surrounding the entire body with the shock absorber, external shocks can be absorbed. As a result, the substrate can be prevented from being displaced at the time of transportation because the transportation efficiency is improved, and damage such as scratches or defects on the substrate surface can be avoided. Next, a substrate transport device according to a third embodiment of the present invention will be described.

20 to 23 are explanatory views of the substrate transport device 101 according to the third embodiment of the present invention, FIG. 20 is a perspective view of the substrate transport device 101, and FIG. 21 is a substrate transport device of FIG. FIG. 22 is a perspective view of the container 103 of FIG. 101, and FIG. 22 is a plan view of the floor surface 111 of the container of FIG. FIG. 23 is a perspective view of the gantry 105 in the substrate transport apparatus 101 of FIG.

[0091] As shown in Fig. 20, the substrate transport apparatus 101 has a gantry 105 shown in Fig. 23 stored in a container 103 shown in Fig. 21 as a substrate storage body.

The container 103 of the substrate transport apparatus 101 shown in FIG. 20 has a box shape surrounded by a floor member 107, a side plate 113, a back plate 119, a ceiling plate 115, and a door 117, and a buffer member 109 is fixed to the floor surface 111. Provided.

[0092] The floor member 107 is a material having high rigidity, and a steel pipe or a metal square pipe formed in a frame shape or a sheet shape can be suitably used, and is useful for work with a forklift or the like. The side plate 113, the back plate 119, the ceiling plate 115, and the door 117 are not particularly limited in material, but a panel in which a resin corrugated cardboard is fixed to an aluminum frame is preferably used. A sandwich panel in which an aluminum plate is adhered to both sides of a foamed resin molded product such as foamed polypropylene in which the side plate 113, the back plate 119, the ceiling plate 115, and the door 117 are integrally molded can also be suitably used.

[0093] The buffer member 109 may be provided at several points in a block shape as shown in Fig. 22, but may be used in a sheet shape. As the cushioning member 109, an oil damper or a viscoelastic body such as viscoelastic rubber can be suitably used.

The pedestal 105 stored in the container 103 is a pedestal on which the board 3 is mounted and which is made of a metal material or the like and has sufficiently high rigidity.

As shown in FIG. 23, the gantry 105 includes a floor member 123 and a back member 125 erected on the floor member 123, and the floor member 123 and the back member 125 are fixed by welding or the like. The floor member 123 and the back member 125 each have a rectangular frame provided with a plurality of columns, and the floor member 123 has legs having a shape useful for work with a forklift or the like. A pressing member 127 is provided on the floor member 123 so as to face the back member 125, and the stack 5 is sandwiched and pressed between the back member 125 and the pressing member 127. At this time, the back member 125 is installed perpendicular to the floor member 123. Be killed.

[0095] A plurality of substrates 3 are mounted on the gantry body, and an enclosing member 131 is provided in contact with an end of the substrate 3. The surrounding member 131 is connected to the back member 125 and the pressing body 127. Further, the enclosing member 131 is provided so as to avoid corner portions of the substrate 3. The enclosure member 131 has a rectangular frame shape.

[0096] Although the surfaces of the floor member 123 and the enclosing member 131 that are in contact with the ends of the substrate 3 are not shown, rubber is preferably provided. Thereby, it is possible to absorb a shock at the time of transportation and irregularity of the substrate 3. The rubber preferably has a thickness of 3 mm or more and 10 mm or less, and preferably has a hardness of 30 HS or more and 70 HS or less.

[0097] Honeycomb panels 133 and 135 are disposed on the substrate 3 support surface of the back member 125 and the pressing body 127, respectively. It is particularly important to sandwich the substrate 3 on a surface that is not easily bent, and the honeycomb panel supports the substrate 3 on the entire surface where twisting and bending are less likely to occur, thereby preventing partial pressurization. The thickness of the honeycomb panel is not particularly limited, but is preferably 50 mm or less.

[0098] In the platform 105 for transporting substrates, the pressing body 127 includes a plurality of screws 137 and a front member 139. The screw 137 is fixed to the floor member 123 or the surrounding member 131.

[0099] By disposing the honeycomb panel 133 on the gantry body, mounting a plurality of substrates 3 and disposing the honeycomb panel 135, the pressing body 127 and the surrounding member 131, the plurality of screws 137 are rotated collectively. The front member 139 is moved in the direction of the back member 125 to support the substrate 3 under pressure. By rotating a plurality of screws 137 collectively, the entire surface of the substrate 3 is pressed evenly. The number and arrangement of the screws are not particularly limited, but are set so that the entire surface of the substrate 3 is uniformly pressed.

The surface pressure at the time of supporting the substrate 3 under pressure is preferably 500 gZcm ² or less, particularly preferably 200 to 300 g / cm ² .

[0101] The floor member 123, the back member 125, the front member 139, and the enclosing member 131 are not limited to any particular materials as long as the rigidity is sufficient. It is particularly preferable to use a steel or metal square pipe formed in a frame shape. Although a frame-shaped member is used in the present embodiment, a thin plate may be provided between the frames, or a sheet-shaped member may be used. May be.

[0102] The size of the substrate 3 is not particularly limited, but the length of each side is about 0.5m to 2.5m and can be suitably used. In addition, the thickness of the substrate is not limited, but is often about 0.3 to 1. Omm. The number of sheets to be stored is preferably about 200 to 500. When mounting the substrate 3 on the main body of the gantry, in order to avoid contact between the substrates 3, a stacked body using a separating member 4 made of paper, resin film, sponge sheet, etc. between adjacent substrates 3 may be used. preferable.

[0103] The substrate transport apparatus 101 has a gantry 105 as a substrate storage body stored on a buffer member 109 of a container 103. An aluminum plate (not shown) is fixed on the cushioning member 109, and the gantry 105 is stored on the fixed aluminum plate. The floor member 123 of the gantry 105 is fixed with a detachable holding member such as a clamp. The gantry 5 is fixed only at the floor, not at the side.

As described above, according to the present embodiment, the pedestal 105 supporting the substrate by pressing the honeycomb panel 135 against the substrate 3 using the plurality of screws 137 and the cushioning member 109 to the floor surface 111 are fixed. The container is stored in the container 103, and the floor member 123 is fixed on the cushioning member 109 and transported, so that the gantry absorbs the low frequency component of the vibration, and the cushioning member 109 of the container 103 absorbs the high frequency component of the vibration. Since it absorbs, it is possible to cope with various impacts during transportation, and it is possible to avoid damage such as scratches or defects on the substrate surface.

Next, a description will be given of a substrate transport apparatus 141 according to a fourth embodiment of the present invention.

FIG. 24 is a front view (a door 117 is not shown) of a substrate transport apparatus 141 according to the fourth embodiment of the present invention. The substrate transport device 141 includes a container 149 and the gantry 105 described in the first embodiment.

In the substrate transport device 141, components having the same functions as those of the components of the substrate transport device 101 are denoted by the same reference numerals, and detailed description thereof will be omitted.

The container 149 is provided with a plurality of panel-structured support members 143 capable of hanging the gantry 105 on the ceiling plate 115, the rail 145 is provided substantially horizontally inside the side plate 113, and the guide 147 is provided on the side surface of the gantry 105. Is provided.

The floor member 107 is made of a material and structure having high rigidity, and has legs in a shape useful for work with a forklift or the like. The side plate 113, the rear plate 119, the ceiling plate 115, and the door 117 are made of special materials. However, it is necessary to have a high rigidity and a frame capable of hanging the gantry 105 to the ceiling plate 115.

The board transport device 141 suspends the pedestal 105 on the support member 143 provided on the container 149, and stores the guide 147 provided on the pedestal along the rail 145.

As described above, according to the fourth embodiment, the highly rigid base 105 supporting the substrate 3 by pressing the honeycomb panel 135 against the substrate 3 using the plurality of screws 137 allows the container 149 The cabinet absorbs the low-frequency component of the vibration by suspending it from the ceiling using the panel-structured support member 143 and transporting it, and the panel-structured support member 143 of the container 149 absorbs the vibration. Since the high frequency component is absorbed, it is possible to cope with various impacts during transportation, and it is possible to avoid damage such as scratches or defects on the substrate surface.

[0110] Next, a description will be given of a substrate transport apparatus 151 according to a fifth embodiment of the present invention.

FIG. 25 is a perspective view of a substrate transport device 151 according to the fifth embodiment of the present invention. FIG. 26 is a cross-sectional view of the substrate transport device 151 of FIG.

[0112] In the substrate transport apparatus, the gantry 105 is placed on the bottom of the gantry holding member 157 provided on the floor 153 via the buffer member 155 via the buffer member 155, and inside the projection 158 provided as a holding mechanism. Cover with.

[0113] The floor 153 and the gantry holding member 157 are made of a material having high rigidity, and a steel or metal square pipe formed in a frame shape or a plane shape can be suitably used.

As the buffer member 155, a viscoelastic resin sheet can be suitably used. Further, not only a viscoelastic resin sheet but also a viscoelastic body such as an oil damper or a viscoelastic rubber can be used.

[0114] The cover 159 has a box shape with no bottom and is intended to prevent dirt. Therefore, the material of the cover 159 is not particularly limited, and is made of resin cardboard, an aluminum frame covered with a film, foamed polypropylene. An integrally molded article of a foamed resin such as that described above can be suitably used.

As described above, according to the fifth embodiment, by pressing the honeycomb panel 135 against the substrate 3 using the plurality of screws 137, the highly rigid base 105 supporting the substrate can be moved to the cushioning member. By mounting on the bottom having 155, covering with a cover 159, and transporting, the gantry 105 absorbs the low-frequency component of the vibration, and the cushioning member 155 absorbs the high-frequency component of the vibration. It is possible to respond to impact, and damage the surface of the substrate Page can be avoided.

Next, a description will be given of a substrate transport apparatus 161 according to a sixth embodiment of the present invention.

FIG. 27 is a perspective view of a board transport device 161 according to the sixth embodiment of the present invention. The board transport device 151 is further stored in a rack having only a skeleton except for the floor member 163. The rack has four columns 165 erected at the corners of the floor member 163, and has a structure in which the upper portions of the columns 165 are connected by four beams 167. The floor member 163, the column 165, and the beam 167 are made of a material having high rigidity, and their connections are firmly fixed.

As described above, according to the sixth embodiment, the gantry 105 absorbs the low-frequency component of the vibration, the buffer member 155 of the transport device 151 absorbs the high-frequency component of the vibration, and further transports the substrate. By transporting the device 151 by enclosing it in a strong rack, it is possible to cope with various impacts during transport, and it is possible to avoid damage such as scratches or defects on the substrate surface.

[0119] The mounts of the substrate transporting devices 101, 141, 151, and 161 have been described by taking the mount 5 as an example. However, the structure is not limited to the structure of the mount 5, for example, as shown in Figs. A highly rigid base that presses and supports a suitable substrate can be suitably used. FIG. 28 shows a gantry 171 that differs from the gantry 105 in the structure of the pressurizing body. FIGS. 29 and 30 show gantry 181 and 191 that lay down and stack substrates and support them by pressing. In the frames 171, 181 and 191, those having the same functions as those of the above-described components are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 28, the gantry 171 uses an air panel for a mechanism that presses and supports the substrate 3, and the pressurizing body 173 includes a front member 139 provided with a plurality of air springs 175. The front member 139 has a shape provided with a plurality of columns in a rectangular frame, and the front member 139 is connected to the surrounding member 131 connected to the rear member 125 by a connector that can be easily attached and detached.

[0121] By simultaneously injecting air into the plurality of air panels 175, the entire surface of the substrate 3 is pressed evenly. An air cylinder can be used instead of the air spring 175. The number and arrangement of the air panels are not particularly limited, but are set so that the entire surface of the substrate 3 is pressed evenly.

[0122] After disposing the honeycomb panel 133 on the gantry body, mounting the substrate 3, and disposing the honeycomb panel 135, the pressurizing body 173, and the surrounding member 131, air is collectively injected into a plurality of air panels 175, and the honeycomb is formed. By pressing the panel 135, the substrate 3 can be pressed and supported. [0123] As shown in FIG. 29, the gantry 181 includes a floor member 123 and a support member 185 provided perpendicular to the floor member 123, and the floor member 123 and the support member 185 are fixed by welding or the like. . The floor member 123 and the support member 185 each have a shape in which a plurality of columns are provided in a rectangular frame, and the floor member 123 has a leg portion having a shape useful for work with a forklift or the like. The substrate 3 is stacked on the floor member 123, and a pressing body having an upper surface member 183 is provided, and the substrate 3 is sandwiched and supported by the floor member 123 and the pressing body. After the honeycomb panel 133 is placed on the floor member 123, the substrate 3 is loaded, the honeycomb panel 135 and the surrounding member 131 are placed, and then the upper surface member 183 is placed on the honeycomb panel 135, and the weight of the upper surface member 183 or further. A pressing mechanism (not shown) that presses the upper surface member 183 toward the floor member 123 uniformly presses and supports the entire surface of the substrate 3.

In the gantry 191, as shown in FIG. 30, the pressurizing body that presses and supports the substrate 3 includes an upper surface member 183 provided with a plurality of air springs 193. The upper surface member 183 is connected to the surrounding member 131 connected to the floor member 123 by a connector. After the honeycomb panel 133 is placed on the floor member 123, the substrate 3 is loaded, the honeycomb panel 135 and the enclosure member 131 are arranged, and then the upper surface member 183 is connected to the enclosure member 131, and the air panels 193 are collectively connected. The substrate 3 is pressed and supported by pressing the honeycomb panel 135 with air.

Next, a description will be given of a substrate transport apparatus 201 according to a seventh embodiment of the present invention.

FIG. 31 is a schematic perspective view of a substrate transport device 201 according to the seventh embodiment of the present invention. The substrate transport apparatus 201 is configured by storing the substrate storage body 1 shown in FIG. In the substrate transporting device 201, components having the same functions as those of the components of the substrate transporting device 1 and the substrate container 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In the present invention, the substrate 3 is stored in the substrate storage container 10 to form the substrate storage 1, and the substrate storage 1 is stored in the container 103.

According to the present embodiment, the entire surface of the substrate 3 can be transported while being supported by the substrate storage body 1, and by storing the substrate 3 in the container 101, the force S for reducing or blocking vibration during transportation can be achieved. . By supporting the stacked body on the entire surface with the substrate housing 1, the low frequency component of the vibration is absorbed to prevent deformation due to the low frequency component of the vibration. Prevents transmission of high frequency components, so during various transports And can avoid damage such as scratches or defects on the substrate surface.

Next, a description will be given of a substrate transport apparatus 211 according to an eighth embodiment of the present invention.

FIG. 32 is a schematic perspective view of a substrate transport device 211 according to the eighth embodiment of the present invention. The substrate transport device 211 includes a container 103 in which a substrate storage body 51 shown in FIG. In the substrate transport device 211, components having the same functions as those of the components of the substrate transport device 1 and the substrate container 51 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In the present invention, the package 53 of the board 3 is housed in a box to form the board storage body 51, and the board body 51 is contained in the container 103.

According to the present embodiment, the entire surface of the substrate can be transported while being supported by the substrate storage body 51. By storing the substrate in the container 101, the force S for reducing or blocking vibration during transportation can be achieved. By supporting the stacked body entirely on the substrate housing 51, the low frequency component of the vibration is absorbed to prevent deformation due to the low frequency component of the vibration, and the cushioning member 109 of the container 103 absorbs the high frequency component of the vibration and Since the propagation of the components is prevented, it is possible to cope with various impacts during transportation, and it is possible to avoid damage such as scratches or defects on the substrate surface.

[0129] Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the structures described in the embodiments, but can be appropriately modified within the scope of the claims. Needless to say.

Claims

The scope of the claims

[1] A storage container for storing a stacked body configured by stacking a plurality of substrates, the storage container including a support surface having a support surface on which the stacked body can be placed in a state where the substrate is horizontal. A substrate storage container, comprising: pressing means for applying a uniform pressing force to the entire upper surface of the stack placed on the support, pressing the stack against the support and fixing the stack.

[2] a load support plate provided in connection with the support base so that the pressing means faces an upper surface of the stack mounted on the support base, and a load support plate and the stack 2. The substrate storage container according to claim 1, further comprising an airbag disposed between the airbags and supported by the load supporting plate to apply a uniform pressing force to the entire upper surface of the stack.

[3] The load support plate provided in connection with the support base so that the pressing means faces the upper surface of the stack mounted on the support base, and the load support plate and the stack An airbag that is disposed between the airbags and is supported by the load supporting plate to apply a uniform pressing force to the entire upper surface of the stack;

The support base is a pallet, and the pallet is provided with a lid detachably attached so as to surround the stacked body placed on the pallet, and a top plate of the lid is configured to have the load on the pallet. 2. The substrate storage container according to claim 1, wherein the substrate storage container functions as a support plate.

[4] A load support plate provided in connection with the support base so that the pressing means faces an upper surface of the stack placed on the support base, and a load support plate and the stack An airbag that is disposed between the airbags and is supported by the load supporting plate to apply a uniform pressing force to the entire upper surface of the stack;

The support is a pallet, and the lid is detachably mounted on the pallet so as to surround the stacked body placed on the pallet. Acts as a support plate,

2. The substrate storage container according to claim 1, further comprising a second pallet for storing an inner box formed by the pallet and the lid, and an outer box including a second lid.

[5] The pressing means includes: an elastic plate member disposed on an upper surface of the stack placed on the support base; a load support plate disposed on the upper surface of the elastic plate member; Connecting means for connecting the load support plate to the support table so that the plate material is elastically deformed by pressing, and a uniform pressing force is applied to the entire upper surface of the stack via the elastic plate material. 2. The substrate storage container according to claim 1, wherein

[6] A substrate storage body formed by storing a stacked body formed by laminating a plurality of substrates via a spacer in the substrate storage container according to claim 1.

[7] a first support plate and a second support plate,

Comprising a stacked body obtained by laminating a plurality of substrates via a spacer,

The substrate storage body, wherein the stack is sandwiched between the first and second support plates and is pressed and supported.

8. The substrate container according to claim 7, wherein the pressing support is formed by fastening an outer periphery of the first support plate and the second support plate with a band.

9. The pressure support, wherein the outer periphery of the first support plate and the second support plate is fastened by a band, and the band is a band having a panel structure in series. The board storage body described above.

10. The substrate container according to claim 7, wherein the pressing support is formed by clamping the first support plate and the second support plate with a clamp.

11. The substrate container according to claim 7, wherein the pressing support is formed by fastening the first support plate and the second support plate with bolts.

[12] A substrate storage body further housing the substrate storage body in a box, wherein the box is mounted on a pallet having a support surface on which the substrate storage body can be mounted, and on the pallet. The substrate storage body according to claim 7, comprising a removable lid body provided to cover the substrate storage body.

[13] A substrate storage body in which the substrate storage body is further stored in a box body, wherein the box body is provided with a pallet having a support surface on which the substrate storage body can be mounted, and mounted on the support base. Having an inner box formed by a detachable lid provided so as to cover the formed substrate storage body, and an outer box including a second pallet and a second lid for storing the inner box. The substrate storage body according to claim 7, wherein:

[14] A gantry for pressing and supporting and storing a stack formed by stacking a plurality of substrates, A container for storing the gantry, having a buffer member on the inner floor surface, and holding the gantry on the buffer member;

The transportation device, wherein the gantry has a characteristic of absorbing a low-frequency component of vibration, and the container has a characteristic of absorbing a high-frequency component of vibration.

15. The transport device according to claim 14, wherein the buffer member is an oil damper.

16. The transport device according to claim 14, wherein the buffer member is a viscoelastic body.

[17] The gantry is composed of a floor member and a back member erected and fixed to the floor member, and a gantry body for standing and supporting the substrate; and a gantry body on the floor member facing the back member. 15. The transport apparatus according to claim 14, further comprising: a pressurizing member arranged and capable of pressing the stacked body toward the back member, and a surrounding member attachable to the back member and the pressurizing member.

[18] The gantry includes a floor member, a pressurizing body capable of pressing the stacked body loaded on the floor member toward the floor member, and a surrounding member attachable to the floor member. Term 1

4. The transport device according to 4.

19. The transport device according to claim 14, wherein the stack is a stack configured by stacking a plurality of substrates via a separating body.

[20] a gantry for pressing and supporting a stacked body formed by stacking a plurality of substrates, and

A container for storing the gantry, having a panel mechanism on an inner ceiling surface, and suspending and holding the gantry by the panel mechanism;

21. The transport device according to claim 20, wherein the stack is a stack configured by stacking a plurality of substrates via a separator.

[22] a gantry for pressing and supporting and storing a stacked body configured by stacking a plurality of substrates,

A box-shaped object that stores the gantry, has a buffer member, holds the gantry, and a cover that is disposed above the bottom;

The transportation device, wherein the gantry has a characteristic of absorbing a low frequency component of the vibration, and the bottom has a characteristic of absorbing a high frequency component of the vibration.

[23] The stack is a stack configured by stacking a plurality of substrates via a separator. A transport device according to claim 22.

[24] The periphery of the transportation device according to claim 22, which is surrounded by a rack including a floor member, four columns erected at corners of the floor member, and four beams connecting the upper portions of the columns. Transport equipment.

[25] A support provided with a support surface on which a stack formed by laminating a plurality of substrates via a separating body can be mounted in a state where the substrate is horizontal, and a stack mounted on the support A substrate storage container that stores the stack in a substrate storage container having pressing means for applying a uniform pressing force to the entire upper surface of the stack and pressing the stack against the support table and fixing the stack;

A container storing the substrate storage body, having a buffer member on the inner floor surface, and holding the substrate storage body on the buffer member;

The transport device according to claim 1, wherein the substrate housing has a characteristic of absorbing a low-frequency component of vibration, and the container has a characteristic of absorbing a high-frequency component of vibration.

[26] A load support plate provided in connection with the support base so that the pressing means faces the upper surface of the stack mounted on the support base, and a load support plate and the stack 26. The transportation device according to claim 25, further comprising an airbag disposed between the airbags and supported by the load support plate to apply a uniform pressing force to the entire upper surface of the stack.

[27] A first support plate, a second support plate, and a stack formed by laminating a plurality of substrates via a spacer, wherein the stack includes the first and second support plates. A substrate storage body sandwiched and supported by a plate is provided so as to further cover a pallet having a support surface on which the substrate storage body can be mounted, and to cover the substrate storage body mounted on the pallet. A substrate housing body housed in a box body comprising a removable lid body

A container storing the substrate storage body stored in the box, having a buffer member on the inner floor surface, and holding the gantry on the buffer member;

28. The transport device according to claim 27, wherein the pressing support is formed by fastening an outer periphery of the first support plate and the second support plate with a band.