CN1937505A - 刻蚀机集群控制器与工艺模块控制器通讯系统及方法 - Google Patents

刻蚀机集群控制器与工艺模块控制器通讯系统及方法 Download PDF

Info

Publication number
CN1937505A
CN1937505A CN 200610011316 CN200610011316A CN1937505A CN 1937505 A CN1937505 A CN 1937505A CN 200610011316 CN200610011316 CN 200610011316 CN 200610011316 A CN200610011316 A CN 200610011316A CN 1937505 A CN1937505 A CN 1937505A
Authority
CN
China
Prior art keywords
controller
process module
data
information
cluster controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 200610011316
Other languages
English (en)
Chinese (zh)
Other versions
CN100429887C (zh
Inventor
徐华
丁力
贾培发
王家廞
赵雁南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Beijing North Microelectronics Co Ltd
Original Assignee
Tsinghua University
Beijing North Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University, Beijing North Microelectronics Co Ltd filed Critical Tsinghua University
Priority to CNB2006100113166A priority Critical patent/CN100429887C/zh
Publication of CN1937505A publication Critical patent/CN1937505A/zh
Application granted granted Critical
Publication of CN100429887C publication Critical patent/CN100429887C/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Computer And Data Communications (AREA)
CNB2006100113166A 2006-02-09 2006-02-09 刻蚀机集群控制器与工艺模块控制器通讯系统及方法 Active CN100429887C (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2006100113166A CN100429887C (zh) 2006-02-09 2006-02-09 刻蚀机集群控制器与工艺模块控制器通讯系统及方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2006100113166A CN100429887C (zh) 2006-02-09 2006-02-09 刻蚀机集群控制器与工艺模块控制器通讯系统及方法

Publications (2)

Publication Number Publication Date
CN1937505A true CN1937505A (zh) 2007-03-28
CN100429887C CN100429887C (zh) 2008-10-29

Family

ID=37954793

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006100113166A Active CN100429887C (zh) 2006-02-09 2006-02-09 刻蚀机集群控制器与工艺模块控制器通讯系统及方法

Country Status (1)

Country Link
CN (1) CN100429887C (und)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102136923A (zh) * 2010-01-27 2011-07-27 新奥特（北京）视频技术有限公司 一种被动收集数据的方法及其系统
CN102136925A (zh) * 2010-01-27 2011-07-27 新奥特（北京）视频技术有限公司 一种基于snmp协议的被动收集数据的方法和系统
CN103777618A (zh) * 2014-02-20 2014-05-07 北京七星华创电子股份有限公司 半导体工艺的指令执行的控制方法
CN113377433A (zh) * 2021-05-27 2021-09-10 北京北方华创微电子装备有限公司 半导体工艺的执行方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0837157A (ja) * 1994-07-21 1996-02-06 Kokusai Electric Co Ltd 半導体製造装置のネットワークシステム
KR100781406B1 (ko) * 2000-06-16 2007-12-03 동경 엘렉트론 주식회사 제어기 간의 접속 상태를 검출하는 반도체 제조 장치와, 반도체 제조 장치 제어 시스템의 부트스트랩 방법 및 인터록 방법
JP2002280278A (ja) * 2001-03-15 2002-09-27 Toshiba Corp 半導体製造装置の制御方法及びその制御システム
JP2003124086A (ja) * 2001-10-16 2003-04-25 Oomiya Kogyo Kk 半導体製造関連装置の稼動管理システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102136923A (zh) * 2010-01-27 2011-07-27 新奥特（北京）视频技术有限公司 一种被动收集数据的方法及其系统
CN102136925A (zh) * 2010-01-27 2011-07-27 新奥特（北京）视频技术有限公司 一种基于snmp协议的被动收集数据的方法和系统
CN103777618A (zh) * 2014-02-20 2014-05-07 北京七星华创电子股份有限公司 半导体工艺的指令执行的控制方法
CN113377433A (zh) * 2021-05-27 2021-09-10 北京北方华创微电子装备有限公司 半导体工艺的执行方法

Also Published As

Publication number Publication date
CN100429887C (zh) 2008-10-29

Similar Documents

Publication Publication Date Title
US7555706B2 (en) Human machine interface
CN103336705B (zh) 脚本处理和工作流系统间的自动转码和语义自适应
US7840293B2 (en) Caching identifications and associated production database guids for expedited acquisition of linking information contained within multiple distinct production database tables
US7565443B2 (en) Common persistence layer
US20060224702A1 (en) Local workflows in a business process management system
US7546606B2 (en) System and method using a connector architecture for application integration
US9785140B2 (en) Multi-protocol multi-client equipment server
US6334158B1 (en) User-interactive system and method for integrating applications
KR100795765B1 (ko) 사용자 인터페이스와 데이터 컴포넌트 간의 지능형 맵핑을이용한 무선 애플리케이션 구축 시스템 및 방법
US20050114378A1 (en) System and method for providing a standardized adaptor framework
US20020147745A1 (en) Method and apparatus for document markup language driven server
US20030182470A1 (en) Generating reusable software assets from distributed artifacts
CA2664161A1 (en) Common component framework
US20120215581A1 (en) Ad-Hoc and Priority-Based Business Process Execution
US20090063395A1 (en) Mapping log sets between different log analysis tools in a problem determination environment
US20020066074A1 (en) Method and system for developing and executing software applications at an abstract design level
CN100429887C (zh) 刻蚀机集群控制器与工艺模块控制器通讯系统及方法
CN103177156A (zh) 一种企业应用集成适配器的设计器系统及其设计方法
US7926024B2 (en) Method and apparatus for managing complex processes
EP1849275B1 (en) Multi-protocol multi-client equipment server
WO2024169392A1 (zh) 开发方法、装置、电子设备和存储介质
CN100428095C (zh) 产生描述特殊自动化设备的结构化表示的方法
EP1127441B1 (en) Enterprise communication protocol
Pancerella et al. Using CORBA to integrate manufacturing cells to a virtual enterprise
AU2006201207B2 (en) Human machine interface

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone

Co-patentee after: Tsinghua University

Patentee after: Beijing North China microelectronics equipment Co Ltd

Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing

Co-patentee before: Tsinghua University

Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing