CN1937505A - Etchingmachine cluster controller and process module controller communication system and method - Google Patents
Etchingmachine cluster controller and process module controller communication system and method Download PDFInfo
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- CN1937505A CN1937505A CN 200610011316 CN200610011316A CN1937505A CN 1937505 A CN1937505 A CN 1937505A CN 200610011316 CN200610011316 CN 200610011316 CN 200610011316 A CN200610011316 A CN 200610011316A CN 1937505 A CN1937505 A CN 1937505A
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Abstract
This method includes the group controller (GC), the technology module controller (TMC), the Ethernet connecting GC and TMC and the comm. module, which transfers the control info and state info between GC and TMC via the Ethernet. The method is that: (1) prepare step, (2) net test connect step, (3) the practical comm. step. When it works normally, GC interacts info and instructions with TMC via Web server.
Description
Technical field
The present invention relates to microelectronic, be specifically related to the information communication system between integrated circuit etching machine (commercial machine) cluster controller (CTC) and the technical module controller (PMC).The invention still further relates to the method for integrated circuit cluster controller for etching devices and technical module controller communication system.
Background technology
In 200mm integrated circuit etching machine (commercial machine) equipment, mainly be divided into cluster controller (CTC), technical module controller (PMC) and three parts of transport module controller (TMC) are carried out centralized monitor respectively, to the control of chamber equipment with to the control of mechanical arm transmission equipment.Wherein CTC coordinates controlling PMC and TMC as most crucial control appliance, makes three parts can be good at cooperating and finishes the task of etching.
In control relation, the relation between CTC and the PMC is the tightst, and this just relates to the design problem of communication module between CTC and PMC.The communication module of designing should be able to well be supported the control of CTC to PMC, and the data and the feedback information that can timely and accurately PMC be produced given CTC simultaneously.
In the etching environment of reality, the CTC control program is on the different computers with the PMC control program, connects by Ethernet between them.And the influence to network can be ignored in the environment.
CTC mainly shows the distribution of instruction and the monitoring of data and warning to the control of PMC.
1 instruction
Instruction is an one-way transmission, promptly sends instruction to PMC from CTC, instructs PMC to carry out various operations.
Instruction comprises that certain instruction feature (as title etc.) is used to distinguish different instructions, comprises certain parameter simultaneously and carries out specific degrees (as setting the height parameter of rising in the PINUP operation) with clear and definite will instruct.Under special circumstances, instruction can not have argument section.
2 data
PMC is responsible for the data sampling on the equipment is read out, and data have four types in etching machine system: integer (int), floating type (float), Boolean type (boolean), character string type (string).Allow the CTC part can access these data by communication module, to reach the function of monitor data.
Type for order parameter also only has above four types equally.
3 warnings
May under some fortuitous events, occur the mistake of operation among the PMC, thereby produce some specific warning messages.PMC may recover automatically according to warning, but needs the further control of CTC in some cases.Therefore just need CTC to pass through communication module and can monitor these warnings, thereby finish certain operation or PMC is further controlled.
Based on above communication information content, communication module need reach certain function and performance requirement.
4 accuracys
Accuracy comprises the situation of two aspects: be when single CTC controls the situation of many PMC on the one hand, need accurately control information is sent to the PMC of appointment, the situation of other PMC can not occur being transferred to; On the other hand, the control between CTC and PMC is responsive and important, so needs communication module guarantee information undistorted and not losing in transmission course.
5 real-times
As real-time control system, itself should have higher real-time.PMC and TMC control machinery, and very strict requirement is arranged on sequential, also just need very high real-time (generally requiring the response time in ms level even higher).But in the control relation of CTC and PMC, control by logical relation, strict on topological order, but requirement is not high on sequential requires, and therefore real-time is required there is not strict requirement.Just because of this, communication module also do not need to require too high to real-time, will remain on the s level response time and just can meet the demands.
In the system of reality, because CTC may provide product by different producers with PMC, therefore needing a kind of consolidation form retrains communication module.Generally all use Semi standard or other existing international standards to be the basis, realize communicating by letter between CTC and PMC.But accuracy, real-time are not ideal enough.
Summary of the invention
(1) technical problem that will solve
The purpose of this invention is to provide a kind of cluster controller for etching devices and technical module controller communication system with accuracy, real-time, purpose of the present invention also provides the method for cluster controller for etching devices and technical module controller communication system.
(2) technical scheme
In order to achieve the above object, the present invention takes following scheme:
Cluster controller for etching devices of the present invention and technical module controller communication system, comprise cluster controller, technical module controller, the Ethernet that connects cluster controller and technical module controller, also comprise communication module, this communication module transmits control information and state information by Ethernet between cluster controller and technical module controller.
Wherein, described communication module comprises attribute data service interface, director data service interface, data item data, services interface, alarm data service interface, intermediate document, wherein,
---the attribute information service interface is used for the Property Name that cluster controller will inquire about and sends to the technical module controller, and cluster controller returns to the technical module controller with the value of Property Name correspondence;
---the command information service interface is used for cluster controller and instructs to the transmit operation of technical module controller in control procedure, instructs the technical module controller that technology is controlled;
---data item information service interface, the title of data item to be checked is provided by cluster controller, the technical module controller is searched respective items after receiving this title in the store data items structure, the data item data of correspondence are converted to character string type, passes to client.
---the warning message service interface, provide any input parameter by cluster controller, the technical module controller is searched warning record the warning message between twice service call is fed back to cluster controller with the form of character string after having received service call;
---intermediate document is used to deposit attribute, instruction, data item and alarm data, to realize that carrying out data by file between the controller exchanges.
Wherein, the client of the Web service of described Ethernet is based upon the CTC end; The service end of Web service is based upon the PMC end.
Wherein, described intermediate document uses XML document.
The method of cluster controller for etching devices and technical module controller communication system has following steps:
1) preparation step;
2) network test connects job step;
3) concrete communication work step: after promptly entering normal operating condition, cluster controller carries out the mutual of information and instruction by Web server and technical module controller.
Wherein, described preparation step comprises:
A) start Web server, to provide services on the Internet;
B) start technical module controller control program, the technical module controller is carried out necessary preliminary treatment;
C) generate four XML document at technical module controller end and deposit attribute, instruction, data item and warning message respectively.
D) start cluster controller.
Wherein, described network test connection job step comprises:
A) cluster controller sends the technical module controller essential information that service request is obtained needs control;
B) after Web server is received the querying attributes information request, search the information in the corresponding XML document, and return;
C) network test connects under the normal situation, sets up separate threads, is used to monitor the situation of warning message.
Wherein, described concrete communication work step comprises the flow process of cluster controller end:
I) cluster controller proposes service request to Web server;
II) Web server analysis request enters the respective handling function;
III) handle function and search corresponding XML document, and information is analyzed, return information needed;
IV) Web server returns from handling the return information that function obtains, perhaps error message;
V) cluster controller obtains feedback information.
Wherein, described concrete communication work step comprises the flow process of technical module controller end:
α) the technical module controller is searched corresponding XML document, upgrades corresponding information and obtains command information;
β) resolve command information;
γ) the control technical module is finished instruction.
Wherein, the read-write operation of described XML document uses the content of DOM analyzing XML file, and according to four kinds of dissimilar XML document data, writes and realize four XML document processing classes.
(3) beneficial effect
Compared with the prior art, owing to adopt above scheme, the invention has the advantages that: 1) be based upon on Simple Object Access Protocol (SOAP) agreement and the HTTP(Hypertext Transport Protocol) agreement owing to Web service, these two agreements can guarantee the correct reception and the transmission of data, therefore the communication module of using the present invention to develop is can be guaranteed on the accuracy of information transmission.2) on real-time, it seems that from the result who tests the connect hours can guarantee that in 1 second, communication efficiency afterwards is then relatively good first, and is similar with socket (Socket) connection speed.3) on versatility, it seems it is to provide remote service under Java language, VC.NET language environment, to develop from design, if use Java language then can also to develop by interdepartmental system platform with Web service.In addition, the document that relates in the design uses the XML form as far as possible, can carry out alternately with other programs.4) overcome the problem of communication system closure.
Description of drawings
Fig. 1 is communication mechanism figure of the present invention;
Fig. 2 is that service interface of the present invention calls schematic diagram.
Embodiment
Following examples are used to illustrate the present invention, but are not used for limiting the scope of the invention.
As shown in Figure 1, communication module of the present invention comprises attribute data service interface, data item data, services interface, alarm data service interface, intermediate document.
As shown in Figure 2, method of the present invention comprises:
1) preparation
A) start Web server, to provide services on the Internet;
B) start technical module controller control program, the technical module controller is carried out necessary preliminary treatment, as the pre-heating technique chamber etc.;
C) generate four XML document at technical module controller end and deposit attribute, instruction, data item and warning message respectively.
D) start cluster controller;
2) network test connection work
A) cluster controller sends the technical module controller essential information that service request is obtained needs control.If cluster controller is connected with network normally, should be able to obtain the feedback information of Web server;
B) after Web server is received the querying attributes information request, search the information in the corresponding XML document, and return.If the XML document configuration is correct, then can extract correct technical module controller information;
C) network test connects under the normal situation, sets up separate threads, is used to monitor the situation of warning message.
3) concrete communication work
After entering normal operating condition, cluster controller carries out the mutual of information and instruction by Web server and technical module controller.Comprise the processing of two aspects: cluster controller end and technical module controller end, idiographic flow is as follows respectively:
The cluster controller end:
I) cluster controller proposes service request to Web server;
II) Web server analysis request enters the respective handling function;
III) handle function and search corresponding XML document, and information is analyzed, return information needed;
IV) Web server returns from handling the return information that function obtains, perhaps error message;
V) cluster controller obtains feedback information;
Technical module controller end:
α) the technical module controller is searched corresponding XML document, upgrades corresponding information (attribute information, data message, warning message) and obtains command information;
β) resolve command information;
γ) the control technical module is finished instruction.
After entering concrete control flow, constantly realize real-time control to PMC by instruction interface in the service of calling and data-interface.With the process of sending video disc to enter chamber is example: call instruction interface at first, will send the sheet instruction to be transferred to PMC; Constantly check the sign amount (BOOL DiskInChamber) of cavity state afterwards, when these data are " TRUE ", confirm that video disc has entered chamber; After video disc enters chamber, then can carry out follow-up work, as begin to carry out machining process, task start (startJob) instruction is sent to PMC.
A described thread is the sequence (being the code of being write) of given instruction, a stack (variable that defines in given method), and some shared data (variable of class one-level); Thread also can be from overall class the access static data, its disclosed list of references has: BomirF.Bic, Alan C.Shaw, Principles of Operating System (English process plate), publishing house of Tsing-Hua University,
2004-1-1
Below embodiments of the invention are described further.
Communication subsystem involved in the present invention needs to consider to stride the communication (precondition) of language platform and the problem of versatility, has generally selected the design of communication scheme based on Web Services mode on implementation.
One, precondition
The CTC program of using in the real system is the program based on VC of independent development, and the program of PMC end is based on the program of the Control Vision Java exploitation of Brooks company.Must be noted that in the design of communications process setting can universal scheme in different language.The source program of CVJ part can't be learnt simultaneously, is merely able to inherit on the basis based on original class and add, and also should be noted that this factor when the design of communications scheme.
Consider exploitation and development in the future, as far as possible that communication module is independent, and can use general standard with compatibility convenient and other manufacturers or self other product.
Two, communication module design
After comprehensive each side factor, select to use the Web service mode as finishing design with the technology path of communication module in the occasion to communication module.The communication mechanism of whole communication subsystem as shown in Figure 1.
(1) Service Design
1, the data qualification in the communication
Require it seems from the data communication of CTC and PMC, mainly contain the mutual of four aspect data.
1) attribute data
Many PMC are often arranged, and the functional attributes of each PMC may be all inequality, for example operates the response time, system's usage platform etc. in etching apparatus.For CTC, must be able to distinguish different PMC (e.g is by the Query Name attribute), obtain the base attribute (the operation platform attribute of e.gPMC) of PMC, coordinate control each PMC (e.g coordinates this machine time attribute of each PMC).These attribute datas are generally only inquired about when CTC and PMC connect, and therefore also can regard as the inquiry of attribute data and confirm one of detection method that CTC and PMC correctly are connected.
The Property Name that CTC will inquire about in the communication sends to PMC, and PMC returns to CTC with the value of Property Name correspondence.For the operation-interface of unified property value, the title of design attributes and value all are character string type.For the property value of some numeric types, only need from the character string of returning, extract out according to different types.
2) director data
In etching machine system, CTC controls PMC and TMC on the whole as the upper strata Control Software, and PMC only controls corresponding reaction chamber.For the needs of controlling, CTC must send the certain operations instruction to PMC in control procedure, instruct PMC that reaction is controlled.After instruction sent, PMC did not need to return any data (execution of instruction needs the time, so return results immediately, execution result can solve by other modes) to CTC.PMC does not need and can not control CTC, and the transmission of director data is unidirectional (sending to PMC from CTC) from this angle.
May there be parameter in instruction, and the number of parameter and type change according to the variation of instruction, may not possess parameter for some instructions.Parameter is the indispensable part of instruction, and parameter has been determined degree, character or even the operand of operation.Therefore also need to comprise content of parameter in the director data.
Director data is designed to character string type, has also comprised the type and the numerical value of parameter in character string except comprising instruction attributes such as instruction title etc.Such design can not need to come sort instructions according to the number of parameter, thereby has reduced the interface that director data transmits.The processing that need to increase only is after PMC receives director data, and the type and the numerical value of parameter is extracted according to the director data form.
3) data item data
PMC is in control sampled data from the equipment of bottom constantly during consersion unit, CTC need obtain the value of these data item, provide reference for upper strata control on the one hand, can determine whether controlled condition satisfies according to the numerical value of some data item, give the technological operation personnel with visual showing interface on the other hand, make things convenient for personnel to carry out data record and monitoring.
The data item data have only four types in etching system, if all provide a service interface to every type data, then can seem redundant.Consider from the another one angle, because the program development personnel of CTC and PMC are known for the data type of specific data item, this data conversion of four types can be become the data of character string type, be to transmit, and data carried out conversion on the type at receiving terminal and transmitting terminal with unified service interface.
CTC provides data item name to be referred to as parameter to interface, the character string type of service interface return data item number certificate.
4) alarm data
In the PMC control procedure, the equipment of bottom may detect at PMC and can produce warning after unusual because various factors occurs unexpectedly, and PMC can automatically perform certain operations and recovers unusually on the one hand, on the other hand PMC by communication interface with warning notice CTC.CTC analyzes and record warning after receiving warning, under situation about being necessary, further sends the instruction process abnormal conditions to PMC.
General alarm data has comprised the each side information of a warning, has mainly comprised the title of warning, the generation time of warning, the order of severity (alert level) of the concrete wrong content of warning and warning.Three information spinners in front will be used for record by CTC; last information is then pointed out CTC processing procedure difference; for example may need directly to shut down to handle, and need wait for that for low-level warning value the numerical value of certain data item reaches requirement for high level warning.
Mention in the superincumbent design, PMC needs the regular hour after receiving command value allows equipment carry out corresponding operation, thereby can not provide execution result immediately.Here can utilize the mechanism of warning that instruction execution result is notified to CTC.The return information that can instruct is set to other warning message of lowermost level.
In the time of design alarm data coffret, CTC does not need to send any information to PMC, only needs constantly inquiry warning service interface to catch warning message.The return value of warning service interface is designed to character string type, has comprised several warning message above-mentioned in the character string.The back will provide string format in detail.
2, the service end of Web service and client
Must there be service end and client in the Web service.In general, service end provides concrete operations, and client is then called service.According to top analysis to data, can know in etching machine system PMC as the main source of not only data but also as to the hardware device directory operator, therefore the service end with Web service is based upon the PMC end; CTC is as the overall Control Software in upper strata, and nearly all data all obtain from PMC or TMC, and its control to PMC and TMC is also embodied in and instructs the latter to carry out some operation, and therefore the client with Web service is based upon the CTC end.This mentality of designing with conventional art route (based on the Socket design) is different.
3, the design of service interface
By top the data of using in the communication are classified, also analyzed how from data angle design service interface.To describe the design of service interface below in detail.
1) attribute data service interface String getProperty (String name);
Wherein client need provide Property Name to be checked, and after calling this service, the return value that obtains is the property value of Property Name correspondence.Service end is searched the data record bar of Property Name correspondence receiving after service interface calls in storage organization, its value is converted to character string type returns to service interface.For individual cases, for example obtain PMC device numbering attribute, should obtain the integer data, then can obtain (can use the parseIntegere function of Integer class among the Java) by the string analysis function.
2) director data service interface int sendCommand (String cmd, Stringarguments);
Because all service interfaces must return a value (promptly not supporting does not have type return value void) in the Web service, therefore the return value with service interface is designed to the int type, and (network state is normal) return value should be 1 in the ordinary course of things.
The information that client provides comprises two parts: the cmd of character string type comprises the base attribute of instruction, and for example title is numbered etc.; The parameter of another part character string type (Arguments) has comprised the parameter of instruction, and the value of arguments is not empty (null) when instruction has parameter.
3) data item data, services interface String requireData (String name);
With the attribute data service class seemingly, client need provide the title of data item to be checked, service end is searched respective items after receiving this title in the store data items structure, the data item data of correspondence are converted to character string type, passes to client by service interface.
4) alarm data service interface String queryAlarm ();
Different with other service is, alarm data service department needs client to provide any input parameter, and service end can be searched the warning record warning message between twice service call is fed back to client with the form of character string after having been received service call.
(2) intermediate document design
Web service is set under Java need knows the source code of program, and be subjected to the influence of odjective cause, can't learn the source code of CVJ PMC part now fully.Then need to consider to use other way to address this problem.
Consideration independently becomes a process with the Web service part, finishes the function of service end, and the logic control part independently exists, and carries out data by file between the two and exchanges.Simultaneously in order there to be unified file structure to use XML document.
Basic not influence for the client of service that is to say that the CTC end does not need to be concerned about how PMC provides service and realize service.Originally the data interaction between same in-process different threads has become the data interaction between different processes on the uniform machinery for service end, and other operation principles are without any change.
For the processing of XML document, the JAXP class libraries exploitation that can use Java to provide.Can guarantee the simple and accurate of code.At four kinds of last surface analysis different data, designed four different XML document and carried out record respectively.
(3) design realizes
According to top design, in realization, mainly comprised two parts, the firstth, to the read-write operation of middle XML document, the secondth, deployment services.
For the read-write operation of XML document, used the JAXP kit, use the content of DOM analyzing XML file.According to four kinds of dissimilar XML document data, write and realized four XML document handle classes (title of class is as follows: AlarmDealer, CommandDealer, DataDealer, PropertyDealer).It needs to be noted, when director data is handled, used self-designed instruction class,,, except basic title and numbering, also have the parameter array of indefinite length for instruction because instruction has specific type unlike other parameters.In order will the operation of instruction to be encapsulated, designed instruction class, in class, use an Object[] array of type, concerning argument of type integer, use the Integer class to represent, the floating type parameter represents that with the Double class Boolean type represents that with the Boolean class character string is represented with the String class.Simultaneously instruction class also provides the interpolation parameter, has got parms, obtained operation such as title, makes things convenient for later development personnel's development.
For the deployment of service, the Application Server that has used Sun Microsystems to provide maps out the work, and wherein only need carry out some settings to the port and the server operating right of service.Be provided with referring to " Demo service manual " in detail.
The effect of the embodiment of the invention is:
1, accuracy
Web Services is based upon on soap protocol and the http protocol, these two agreements can guarantee the correct reception and the transmission of data, therefore use Web Services technology to develop communication module, on the accuracy of information transmission being can be guaranteed.
2, real-time
The shortcoming of the maximum of Web Services is the network time of its consumption long (time loss that directly connects generation with respect to Socket), especially when calling Web Services first, need start the program of a similar Servlet in service end, therefore need the longer time.It seems that from the result of test the connect hours can guarantee that in 1 second, communication efficiency afterwards is then relatively good first, and is similar with socket (Socket) connection speed.
The such time loss in the application scenario of communication module can receive hereto, because CTC mainly is control on topological structure to the control of PMC, is not very high to the requirement of real-time.According in the past design of communication (principle machine CTC with PMC the realization of communicating by letter) if can satisfy at Millisecond and carry out the data feedback in the time, just can accept.From the test effect, use Web Services art designs communication module can satisfy 500ms and upgrade a secondary data (being the designing requirement of original communication module).
Described socket (Socket) can be regarded as two programs and carry out the end points of communication in connecting, a program writes a segment information among the Socket, this Socket sends to this segment information among the another one Socket, this segment information can be sent in other programs, its disclosed list of references has: (U.S.) W.Richard Stevens, Bill Fenner, AndrewM.Rudoff, UNIX network programming volume I socket networking API (the English edition third edition), China Machine Press, 2004-7-1
3, versatility
Use Web Service technology to have very strong general letter.It seems it is to provide remote service under Java language, VC.NET language environment, to develop from present design, if use Java language then can also to develop by interdepartmental system platform with Web Service.
On the other hand, the document that relates in the design uses the XML form as far as possible, can carry out alternately with other programs.
Both sides as communication module in the design are separate, do not need to obtain the other side each other and how to realize operating, and make that development process can parallel processing the angle of exploitation.Simultaneously such development mode allows the client to use different Web service clients to bring in the Web service that connects PMC.
The communication module of using Web Service mode to develop on the whole has high generality.
Three, data format design
When calling the service that Web Services provides, need the input of parameter, simultaneously returning of data arranged also, so the form of data need be reached an agreement between CTC and PMC.All simultaneously data need be carried out record in the XML document of correspondence, also need the form of XML document is decided.
1 attribute
The storage that attribute is relevant is called in the document of Property.xml in name, and form is as follows:
<PMC>
＜Property Name〉property value＜/Property Name 〉
<name>PMCDEMO</name>
<system>Windows</system>
<Date>2005-05-26</Date>
</PMC>
Call the Property Name that needs the input character string type when getattr is served, be both the property value of return character string type.
For example:
String?name＝new?String(“system”)；
String?result＝pmc.getProperty(name)；
The result value that obtains is " Windows ".
2 instructions
The information of instruction is stored in the document that name is called cmd.xml, and form is as follows:
<Commands>
<command>
＜name〉the instruction title＜/name 〉
＜id〉order number＜/id 〉
<Arguments>
＜argument type=" parameter type "〉parameter value＜/argument 〉
</Arguments>
<command>
<name>pu</name>
<id>0</id>
<Arguments>
<argument?type＝″int″>12</argument>
<argument?type＝″float″>32.2</argument>
</Arguments>
</command>
</command>
</Commands>
The instruction title and the character string type parameter that need the input character string type when calling the getattr service are returned the integer number simultaneously and whether successfully to be described operation.
Each parameter is made of two parts, parameter type and parameter value.Form is " parameter type: parameter value ".Use the space to separate between different parameters.
For example:
String?name＝new?String(“PinUp”)；
String?args＝new?String(“int：10boolean：true”)；
int?result＝pmc.sendCommand(name，args)；
The result value that obtains should be 1.
3 data
The storage that PMC collects is called the document of a.xml in name, and form is as follows:
＜dataitem name=" data item title " id=" data item numbering " type=" data item type " 〉
＜value〉data value＜/value 〉
<DataItems>
<dataitem?name＝″temperature″id＝″1″type＝″float″>
<value>24.0</value>
</dataitem>
</dataitem>
</PMC
Call the data item title that needs the input character string type when obtaining the data item occurrence service, simultaneously the data item occurrence of return character string type.
For example:
String?name＝new?String(“temprature”)；
String?result＝pmc.requireData(name)；
double?dResult＝Double.parseDouble(result)；
The result value that obtains for " 24.0 " be that the data of float type can use corresponding processing function to obtain the data item occurrence of numeric type owing to realize having known return value.
4 warnings
The information of warning is stored in name and is called in the literary composition retaining of alarm.xml, and form is as follows:
<Alarms>
＜alarm name=" warning title " id=" warning numbering " 〉
＜time〉the warning generation time＜/time 〉
＜level〉warning level＜/level 〉
＜info〉the warning content＜/info 〉
</alarm>
<alarm?name=″test″id＝″2005″>
<time>20050608-14:20:00</time>
<level>0</level>
<info>JustATest</info>
</alarm>
</Alarms>
Calling when obtaining the warning service does not need to import any parameter, singly is to return the information that the character string that obtains has comprised all warnings.Some the warning messages that this character string comprises, by ' n ' separate.Each warning is made of five parts, the title of warning, and the numbering of warning, the generation time of warning, the rank of warning, the content of warning is used between the different parts ', ' separate.Form is " name; The title of warning, id: the numbering of warning, time: the generation time of warning, level: the rank of warning, info: the content of warning ".
For example:
String?result＝pmc.qureyAlarm()；
String[]alarms＝result.split(“\n”)；
String[]information＝alarms[1].split(“，”)；
The result value that obtains should be (order of five parts is indefinite):
”id：2005，name：test，time：20050608-14:20:00，level：0，info：JustATest”
Can utilize the split function (similar function is also arranged among the VC) of String class among the Java to be separated into one by one little part handles one by one.
The attention of value be that the form of time does not fix in program, the implication for both sides can understand the time mutually please realize consulting form.For example the form that timetable is in this example is YYYYMMDD-HHMMSS.
Claims (10)
1, a kind of cluster controller for etching devices and technical module controller communication system, comprise cluster controller, technical module controller, the Ethernet that connects cluster controller and technical module controller, it is characterized in that also comprising communication module, this communication module transmits control information and state information by Ethernet between cluster controller and technical module controller.
2, a kind of cluster controller for etching devices as claimed in claim 1 and technical module controller communication system, it is characterized in that: described communication module comprises attribute data service interface, director data service interface, data item data, services interface, alarm data service interface, intermediate document, wherein
-attribute data service interface is used for the Property Name that cluster controller will inquire about and sends to the technical module controller, and cluster controller returns to the technical module controller with the value of Property Name correspondence;
-director data service interface is used for cluster controller and instructs to the transmit operation of technical module controller in control procedure, instructs the technical module controller that technology is controlled;
-data item data, services interface, the title of data item to be checked is provided by cluster controller, the technical module controller is searched respective items after receiving this title in the store data items structure, the data item data of correspondence are converted to character string type, passes to client.
-alarm data service interface provides any input parameter by cluster controller, and the technical module controller is searched warning record the warning message between twice service call is fed back to cluster controller with the form of character string after having received service call;
-intermediate document is used to deposit attribute, instruction, data item and alarm data, to realize that carrying out data by file between the controller exchanges.
3, a kind of cluster controller for etching devices as claimed in claim 1 and technical module controller communication system is characterized in that: the client of the Web service of described Ethernet is based upon the CTC end; The service end of Web service is based upon the PMC end.
4, a kind of cluster controller for etching devices as claimed in claim 2 and technical module controller communication system is characterized in that: described intermediate document uses XML document.
5, be used for the method for described cluster controller for etching devices of one of claim 1 to 4 and technical module controller communication system, it is characterized in that comprising:
1) preparation step;
2) network test connects job step;
3) concrete communication work step: after promptly entering normal operating condition, cluster controller carries out the mutual of information and instruction by Web server and technical module controller.
6, the method for a kind of cluster controller for etching devices as claimed in claim 5 and technical module controller communication system is characterized in that described preparation step comprises:
A) start Web server, to provide services on the Internet;
B) start technical module controller control program, the technical module controller is carried out necessary preliminary treatment;
C) generate four XML document at technical module controller end and deposit attribute, instruction, data item and warning message respectively.
D) start cluster controller.
7, the method for a kind of cluster controller for etching devices as claimed in claim 5 and technical module controller communication system is characterized in that described network test connects job step and comprises:
A) cluster controller sends the technical module controller essential information that service request is obtained needs control;
B) after Web server is received the querying attributes information request, search the information in the corresponding XML document, and return;
C) network test connects under the normal situation, sets up separate threads, is used to monitor the situation of warning message.
8, the method for a kind of cluster controller for etching devices as claimed in claim 5 and technical module controller communication system is characterized in that described concrete communication work step comprises the flow process of cluster controller end:
I) cluster controller proposes service request to Web server;
II) Web server analysis request enters the respective handling function;
III) handle function and search corresponding XML document, and information is analyzed, return information needed;
IV) Web server returns from handling the return information that function obtains, perhaps error message;
V) cluster controller obtains feedback information.
9, the method for a kind of cluster controller for etching devices as claimed in claim 5 and technical module controller communication system is characterized in that described concrete communication work step comprises the flow process of technical module controller end:
α) the technical module controller is searched corresponding XML document, upgrades corresponding information and obtains command information;
β) resolve command information;
γ) the control technical module is finished instruction.
10, the method for a kind of cluster controller for etching devices as claimed in claim 5 and technical module controller communication system, it is characterized in that: the read-write operation of described XML document, use the content of DOM analyzing XML file, and, write and realize four XML document processing classes according to four kinds of dissimilar XML document data.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102136925A (en) * | 2010-01-27 | 2011-07-27 | 新奥特（北京）视频技术有限公司 | Method and system for passively collecting data based on SNMP protocol |
| CN102136923A (en) * | 2010-01-27 | 2011-07-27 | 新奥特（北京）视频技术有限公司 | Method and system for passively collecting data |
| CN103777618A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Method for controlling instruction execution of semiconductor technology |
| CN113377433A (en) * | 2021-05-27 | 2021-09-10 | 北京北方华创微电子装备有限公司 | Method for executing semiconductor process |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0837157A (en) * | 1994-07-21 | 1996-02-06 | Kokusai Electric Co Ltd | Network system of semiconductor fabricating apparatus |
| JP5236142B2 (en) * | 2000-06-16 | 2013-07-17 | 東京エレクトロン株式会社 | Semiconductor manufacturing equipment that detects connection status between controllers |
| JP2002280278A (en) * | 2001-03-15 | 2002-09-27 | Toshiba Corp | Method and system for controlling semiconductor manufacturing apparatus |
| JP2003124086A (en) * | 2001-10-16 | 2003-04-25 | Oomiya Kogyo Kk | Operation control system of semiconductor manufacture- related apparatus |
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2006
- 2006-02-09 CN CNB2006100113166A patent/CN100429887C/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102136925A (en) * | 2010-01-27 | 2011-07-27 | 新奥特（北京）视频技术有限公司 | Method and system for passively collecting data based on SNMP protocol |
| CN102136923A (en) * | 2010-01-27 | 2011-07-27 | 新奥特（北京）视频技术有限公司 | Method and system for passively collecting data |
| CN103777618A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Method for controlling instruction execution of semiconductor technology |
| CN113377433A (en) * | 2021-05-27 | 2021-09-10 | 北京北方华创微电子装备有限公司 | Method for executing semiconductor process |
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Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone Co-patentee after: Tsinghua University Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Co-patentee before: Tsinghua University Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |