KR20030003660A - System and Method for Generating SECS Message Source in SECS - Google Patents

Abstract

PURPOSE: A system for automatically generating an SECS(Semiconductor Equipment Communication Standard) message is provided to define semiconductor manufacturing equipments and equipment servers, and to define an SECS message used for SECS communication between the equipments, then to combine the defined equipments and the servers with the message, thereby quickly implementing equipment automation by automatically generating an SECS message program source. CONSTITUTION: Many equipments(310-314) perform semiconductor manufacturing processes. Many EQSs(Equipment Servers)(320-324) perform SECS communication with the equipments(310-314) by defining equipment characteristics, process control names, and an SECS message, and automatically generating an SECS message source. An MES(Manufacture Execution System)(330) executes procedures and records on a manufacturing spot, and executes resource management. A database(340) stores data necessary for operating the MES(330). A shared database(350) stores the SECS message defined in the EQSs(320-324) and data inputted from the equipments(310-314).

Description

System and Method for Generating SECS Message Source in SECS}

The present invention relates to a system and method for automatically generating a semi-conductor equipment communication standard (SECS) communication software source, and in particular, by selecting data corresponding to a SECS message capable of determining an operation in SECS message communication of a semiconductor manufacturing process system. A system and method for automatically generating a SECS communication software source configured to automatically perform program source coding of a SECS message to control the control.

In general, a semiconductor manufacturing process system is connected to a host through an equipment server (Equipment Server (EQS), hereinafter referred to as EQS) that manages equipment for each process as a group. Each device reports process progress and results to the host, who use these reports to operate and manage a series of semiconductor manufacturing processes.

Semiconductor manufacturing equipment is generally classified into process equipment, assembly equipment, test equipment and inspection equipment, and related equipment according to the process. Due to the complexity and diversity of the semiconductor manufacturing process that goes through more than 500 steps, there are many types of equipment and its uses. Very diverse For this reason, managing semiconductor manufacturing processes effectively is not an easy task. Almost all semiconductor manufacturing equipment uses a protocol for controlling it, and the protocol used is the Semi-conductor Equipment Communications Standard (SECS) protocol, which is a semiconductor manufacturing equipment communication standard.

The SECS protocol is a protocol of communication between devices used in semiconductor manufacturing processes. That is, the SECS protocol is a protocol (Standard or Standard) established by SEMI (Semiconductor Equipment and Material International) to efficiently communicate with semiconductor devices.

The SECS is a layer for managing a semiconductor manufacturing process (Generic Equipment Model & Application layer), a message generation layer (SECS II Layer) for reporting the progress and results of each process, and a message transmission and reception for transmitting and receiving the generated message Can be divided into layers (SECSⅠLayer).

The SECS-I and SECS-II are communication interface methods between the semiconductor manufacturing equipment and the host computer. These methods define the physical connections, signal sizes, data rates, and logical protocols required for exchanging messages (information) between the host computer and the device, and information exchange occurs through a serial point-to-point line. .

In addition, all messages used in the SECS protocol comply with one or more message transfer rules, and each message transfer rule is processed as one transaction. The combination of these transactions controls and manages the semiconductor manufacturing process.

The semiconductor manufacturing process manager analyzes the characteristics of the equipment that will use the SECS communications software and the processing procedures of the semiconductor manufacturing process that will use the equipment prior to running the SECS communications software. Based on the analyzed results, a semiconductor manufacturing process scenario is prepared. In this case, the written scenario represents the flow of messages transmitted and received between the host computer and the equipment, and the flow of these messages represents the semiconductor manufacturing process.

1 illustrates an example of a SECS message transmitted and received between an equipment server (EQS) and equipment in an SECS communication.

Referring to FIG. 1, first, when communication starts to establish a work in the equipment (Establish Communication) transmits a SECS message "S1 F13" to the EQS, the EQS sends a SECS message "S1 F14" in response. Send it to the equipment. The equipment transmits a SECS message called "S1 F1" to the EQS that inquires whether the equipment exists, and receives a SECS message called "S1 F2" from the EQS. The equipment then transfers the operation mode to the process control mode (Mode Change) sends a SECS message of "S6 F11" to EQS, and sends a confirmation message "S6 F12" to "S6 F11" sent from EQS. Receive. On receipt of the confirmation message, the manager places the product on a workbench to start the semiconductor manufacturing process (product loading).

The equipment manager puts the product on the manufacturing process bench, and after loading the product (Loading Complete) sends a SECS message "S6 F11" to the EQS. The EQS sends a confirmation message "S6 F12" to the device and the Start Commission sends a "S2 F41" SECS message to the device.

The instrument sends a confirmation message "S2 F42" SECS message for "S2 F41" to EQS and starts the process (Process Start) sends a "S6 F11" SECS message to EQS, and then confirms the message "S6". F12 "is received from the EQS. The equipment manager proceeds with the manufacturing process. When the manufacturing process is in progress and completed, the equipment side manager sends the "S6 F11" message to the EQS side to receive the confirmation message "S6 F12" message from the EQS side. On the equipment side, the product moves out from the workbench (Move Out Request) sends the message "S6 F11" to the EQS and when the confirmation message "S6 F12" is received, unloads the finished product from the workbench (Unload a Cassette). Then, when the product has been unloaded from the workbench (Move Out Complete) sends the message "S6 F11" to the EQS, and receives a confirmation message "S6 F12" about it from the EQS. Subsequently, the equipment prepares for the next work (Move In Request) transmits the message "S6 F11" to the EQS, and also receives the confirmation message "S6 F12" from the EQS. This completes the series of processes.

As shown in FIG. 1, it can be seen that SECS messages of “S6 F11” and “S6 F12” are used several times as a pair between the EQS and the equipment. That is, it can be seen that the SECS message has a pair of SECS messages that respond to one query SECS message.

In detail, the QS process between the EQS and the device is described. For example, when a SECS message "S6 F11" is sent from the device to the EQS, the EQS manager checks the internal data value of the received "S6 F11" SECS message. It should be analyzed what it means. After the analysis, the EQS manager must create a "S6 F12" containing the corresponding response and control messages, and send a coded program source that can realize this.

FIG. 2 shows an example of the configuration of each SECS message illustrated in FIG. 1.

As shown in FIG. 2, each SECS message has its own representation as a combination of Stream (S1-S128) numbers and Function (F1-F128) numbers, such as "S6 F11". In FIG. 2, the SECS message " S6 F11 " is set so that its Function Name is Host Command Confirm (HCA), and the forwarding direction is sent from the Equipment to the Server (EQS). This is a message, and it can be seen that the message should be responded to by the equipment in the receiving EQS. Also, the SECS data item (SECS Item) included in the " S6 F11 " SECS message is L, 3 (210). That is, L, 3 (210) has three data lines (Line), the first line has a <DATAID> 220 representing a serial ID (ID) of the data (DATA), the second line It has a <CEID> 230 indicating a Collect Event ID, and the third line has an L, 2 240 consisting of two lines. The first line of L, 2 (240) has a <RPTID> (250) indicating the Report ID, the second line is L, 3 (260) with three lines, which is the port number. It has <PORT> 270 which shows, <LOTID> 280 which shows a lot (product) ID, and <PPID> 290 which shows a work instruction (Process Program ID).

The EQS manager analyzes the characteristics of the equipment and the processing procedures of the semiconductor manufacturing process that will use the equipment, creates a semiconductor manufacturing process scenario based on the analyzed results, and shows each SECS message used for SECS communication. As such, the data values must be coded manually.

In general, one machine usually uses as few as 20 to 30 and as many as 50 to 60 SECS messages to achieve automation. Each SECS message is predefined to be sent to the device or server at any particular point in time. If one SECS message is used in one particular situation, there would be no problem in controlling the equipment. However, as shown in S1 F11 of FIG. 1, one SECS message may be shared in various situations and according to the command data value therein. If the status of each piece of equipment is to be displayed, this can be problematic in normal circumstances. Therefore, analyzing the dozens of SECS messages transmitted and received between the equipment and the EQS and coding the program source accordingly takes a lot of time and has a problem of reducing work efficiency.

In addition, semiconductor equipment is generally expensive. However, if EQS is made from such expensive semiconductor equipment and connected directly to the equipment without a test process, it is not only inefficient in utilization of the equipment but also reduces the production efficiency of the product.

The existing SECS communication software used separate process control names for each equipment for operation and management of each manufacturing process, and thus did not have a consistent structure. The process control names had to be newly reconfigured according to the characteristics of the semiconductor manufacturing equipment. As a result, different software systems have to be developed for use in different manufacturing equipments, which leads to redundant investments, and continuous system testing not only reduces reliability, but also makes maintenance difficult. .

In order to solve the above problems, the present invention provides a program source for assigning each variant number and sequence name according to the data of the SECS message that can determine the operation in the SECS message communication of the semiconductor manufacturing system, thereby controlling the equipment. It is an object of the present invention to provide an automatic generation system and method for automatically generating a SECS message source configured to automatically perform coding.

Another object of the present invention is to provide a SECS message definition and communication logging file and a logging file of a device server based on XML (eXtensible Markup Language) to check and analyze SECS message communication between semiconductor manufacturing systems in remote locations using the Internet. It provides a system and method for automatically generating SECS message sources that can be controlled and changed.

1 is a diagram showing an example of a SECS message transmitted and received between an equipment server (EQS) and equipment (Equipment) in the SECS communication,

2 is a view showing an example of the configuration of each SECS message illustrated in FIG.

3 is a block diagram schematically illustrating a configuration of a semiconductor manufacturing system for explaining a method for automatically generating a SECS message source according to an embodiment of the present invention;

Figure 4 is a block diagram showing the internal configuration of each function of the EQS of FIG.

5 is a flowchart illustrating a method for automatically generating SECS communication software according to the present invention;

FIG. 6 is a diagram illustrating a screen defining a SECS message for controlling a semiconductor manufacturing process; FIG.

7 is a view showing a menu bar for executing "EzGen";

8 is a diagram illustrating a SECS message definition input screen;

9 is a diagram illustrating a screen showing a defined SECS message in XML;

10 is a view showing a result of defining a SECS message;

11 is a diagram showing a screen in XML showing the result of defining a SECS message;

12 is a view showing an input screen for defining equipment characteristics,

13 is a view showing an input screen for equipment type setting,

14 is a view showing a screen about a device group,

15 is a diagram illustrating a screen for defining a process control name according to an equipment group;

16 is a diagram illustrating a screen for defining an equipment server;

17 is a diagram illustrating a screen about executing SECS message source automatic generation;

18 is a diagram showing the configuration of a semiconductor manufacturing internet system according to a second embodiment of the present invention.

♣ Explanation of symbols for main part of drawing ♣

310 ~ 314: Equipment 320 ~ 324: EQS

330: MES340: Database

350: shared database 410: SECS message definition unit

420: equipment characteristic definition unit 430: equipment group definition unit

440: SECS message source generation unit 450: test simulation

460: communication interface definition unit 470: NIC

480: database server 490: control unit

1810: Internet 1820, 1830: host

1840-1846: Remote Equipment 1850-1856: Remote EQS

In order to achieve the above object, the present invention provides a plurality of equipment for executing a semiconductor manufacturing process, and a plurality of equipment for automatically coding a program source corresponding to the SECS message transmitted and received with the equipment according to the characteristics and manufacturing process of the equipment A method of automatically generating a SECS message source having a server, the method comprising: (a) defining a SECS message for controlling the semiconductor manufacturing process, (b) defining data on equipment characteristics of the equipment, and (c) Defining a process control name according to the semiconductor manufacturing process, (d) combining the SECS message required for the defined process control name, (e) data combining the SECS message with the process control name Defining a device group according to the device characteristics, (f) automatically executing coding of each SECS message source according to the defined device group to generate a SECS message. It provides a method for automatically generating a SECS message source, characterized in that it comprises a step of generating.

In addition, the present invention provides a plurality of equipment for executing the semiconductor manufacturing process, MES for executing lot history and history of the manufacturing site, management of all resources, defined SECS messages and data input from the equipment A SECS message definition unit defining a database and SECS messages required for control of a manufacturing process, an equipment characteristic definition unit defining data on manufacturing equipment characteristics, a process control name according to a manufacturing process, and defining the defined process control A device group definition unit defining a device group by combining SECS messages required for a command, a communication interface definition unit defining an interface for communication with the device, and coding coding of each SECS message source according to the defined device group. SECS message source generation unit that executes automatically, when testing to test the SECS message and the equipment defined above SECS message source automatic, characterized in that it comprises an equipment server having a simulation unit, a network interface card for physically connecting for communication with another system, a system-wide control and a control for automatic generation of SECS message source Provide a generation system.

In addition, the present invention is the Internet as a network for transmitting and receiving data between computers scattered in remote locations, a plurality of equipment for performing a semiconductor manufacturing process, a plurality of equipment connected to the plurality of devices to perform SECS message communication A server, automatically generating a SECS message and a communication logging file connected to the Internet and used for SECS message communication between the plurality of devices and the plurality of device servers (EQS), based on the extended generation language, through the Internet, and A semiconductor manufacturing Internet system comprising a host computer controlling SECS message communication between a plurality of devices and said plurality of equipment servers (EQS).

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

3 is a block diagram schematically illustrating a configuration of a system for automatically generating a SECS message source according to a first embodiment of the present invention.

SECS message source automatic generation system according to the present invention defines a plurality of equipment (310 ~ 314) for executing a semiconductor manufacturing process, the characteristics of the equipment, process control name, SECS message, and automatically generates the SECS message source equipment 310 314) and a plurality of equipment servers (EQS: EQS) (320-324) for executing SECS communication, a manufacturing execution system for managing lot progress and history of manufacturing sites, and management of all resources ( MES: Manufacture Execution System (hereinafter referred to as MES), a database 340 in which data necessary for operating the manufacturing execution system 330 is stored, SECS messages defined in the EQSs 320 to 324 and the equipment ( It is composed of a shared database 350 for storing the data input from 310 ~ 314.

4 is a block diagram schematically showing the internal configuration of each function of the EQS1 320. Since the other EQSs 321 to 324 have the same configuration, the EQS1 320 will be described as a representative.

EQS1 320 of FIG. 4 is a SECS message defining unit 410 for defining a SECS message for controlling a semiconductor manufacturing process, an equipment characteristic defining unit 420 for defining data on equipment characteristics, and a process according to a semiconductor manufacturing process. A device group definition unit 430 for defining a control group and defining a device group by combining SECS messages required for the defined process control name, and automatically executing coding of each SECS message source according to the defined device group. SECS message source generation unit 440, the test simulation unit 450 for testing the defined equipment and the SECS message in a simulation, the communication interface definition unit 460 defining the interface for communication with the device 310, equipment The operation of the EQS1 320 to the database 340, the network interface card (NIC) for physically connecting to the 310 or other system for communication. It is composed of a database server 480 that is responsible for storing the data according to the function and stores the generated SECS message, the control unit 490 for controlling system-wide control and automatic generation of the SECS message source.

The SECS message source generator 440 is a software program that automatically codes the defined SECS message as "C" or "C ++" or "Visual Basic" when the SECS message is defined according to the equipment characteristics and the process control name. Executable files are displayed as icons on the window.

The control unit 490 of the EQS1 320 may predefine SECS messages for controlling the equipment 1 310, characteristics of the equipment, a process control name combined with the SECS message, a communication interface, and the like. When the SECS message is received, the function of transmitting a corresponding SECS message is controlled.

Next, an operation of the SECS message source automatic generation system according to the present invention configured as described above will be described with reference to the flowchart shown in FIG. 5 and the screen figures shown in FIGS. 6 to 17.

In order to facilitate the understanding of the present invention, a software program of the SECS message source generator 440 is called "EzGen (Easy Generator)" in the sense of easily generating a SECS message source.

First, in EQS1 320 that controls equipment 1 310 online, the administrator executes "EzGen" installed in EQS1 320. When an execution command of "EzGen" is input from a key input means (not shown), the controller 490 of the EQS1 320 basically displays a screen for defining a SECS message required for controlling the semiconductor manufacturing process as shown in FIG. present.

The screen of "EzGen" shown in FIG. 6 is a GUI (Graphic User Interface) screen that defines, creates, edits, and copies SECS messages. A list of generated SECS messages is displayed on the left side, and a plurality of screens are displayed on the right side. Displays the contents of the SECS message selected from the SECS message list.

In addition, the "EzGen" screen includes a message menu button 710 for defining a SECS message, an equipment menu button 720 for defining equipment characteristics, and a process menu button 730 for defining a process control name, as shown in FIG. ), A server menu button 740 for defining EQS, a generation menu button 750 for creating a source for the SECS message, a test menu button 760 for testing the defined "EzGen", a set of SECS messages sent from the instrument. A menu bar screen including a log menu button 770 for viewing a log file and an exit menu button 780 for terminating a function of "EzGen" is provided.

The administrator then first defines the SECS message used for SECS communication. In order to define the SECS message, the administrator defines the SECS message by clicking the message menu button 710 on the menu bar (step S502).

When the message menu button 710 is input, the controller 490 provides a SECS message definition input screen as shown in FIG. 8. The SECS message definition input screen shown in FIG. 8 is a field for inputting a stream, a function, and a variant of the SECS message, a description of the defining SECS message, and a transfer of the SECS message. It includes a field for inputting direction, reply, message structure, etc.

As shown in FIG. 8, for example, the stream value is "002", the function is "041", and the variant is "002", the description is "Remote Command", and the forwarding direction is "Host- > EQ ", enter" Reply "or not, and define the SECS message" S002 F041 V002 "in SML in the message structure. When the administrator inputs data for one SECS message definition, the administrator ends the SECS message definition by clicking the End button.

When the administrator completes defining and inputting one SECS message, the controller 490 drives the database server 480 to store the defined and input data as described above in the database 340 and FIG. 9. As shown in FIG. 10, the result is stored as a file in XML, and the result screen is displayed as shown in FIG.

The SECS message definition result screen shown in FIG. 10 shows a list of a plurality of SECS messages in the left configuration, and the format is a combination of a stream, a function, and a newly added variant. The configuration is, for example, "S002 F041 V002" or the like. Here, 'S' represents a stream, 'F' represents a function, and 'V' represents a variant. Also, the number after each acronym indicates the serial number. In the right configuration, the program source content of the selected SECS message among the plurality of SECS message lists is represented by SML. In addition, as shown in FIG. 11, the definition result of the SECS message is stored as an XML screen.

An administrator can select one SECS message from a list of multiple SECS messages, modify or edit it, and copy it to another library. Here, the library is a group of similar SECS messages.

Subsequently, the manager defines data necessary for setting the device by clicking the device menu button 720 that defines the device characteristics in the function menu bar (step S504). When the equipment menu button 720 is clicked, the controller 490 provides an input screen for defining equipment characteristics as shown in FIG. 12. In the device characteristic screen shown in FIG. 12, a device type (Type), a device group (Group), a server driver name (SDR Name), a device name (Device Name), and the like are selected and defined. For example, the device type, description, SECS library, device type, protocol, and the like are shown.

In the equipment characteristic screen shown in FIG. 12, when the administrator first clicks the right mouse button to set the equipment type, the controller 490 may select “Create”, “View”, “Copy”, Sub menus such as "Paste" and "Delete" are provided. The administrator selects "Create" from the submenu to set a new device type. When the administrator selects the “create” menu for setting the device type, the controller 490 provides an input screen regarding the device type setting shown in FIG. 13. The input screen related to the device type setting illustrated in FIG. 13 may include a device type input box (Device Type), a description of the device (Description), a port input box (Port ID, Port Kind, Port Table), a device type protocol input box, SECS Library List. When the administrator completes the input of the equipment type items as described above, the controller 490 stores the input equipment type data in the database 340, and displays the result along with a plurality of lists as shown in FIG.

The administrator defines the device type after defining the device type. The administrator selects a device group setting on the device property screen shown in FIG. 12. Then, the controller 490 provides a screen about the device group as shown in FIG. 14. The screen related to the equipment group shown in FIG. 14 includes a top portion representing a device group selection box, a sequence name, a process description, and the like, a SECS message list, a delivery direction, a message, a device type, and the like. It consists of the lower part that represents. In order to create a device group, the administrator clicks the right mouse button on the screen of FIG. 14 and selects a menu related to creation from a submenu. When a menu for creating a device group is selected, the controller 490 provides a screen for inputting a device group name input box, a device group description column, a facility column to which the device group belongs, a protocol column, a library type column, a device type list field, and the like. do. When the equipment group data as described above is input by the administrator, the controller 490 stores the data regarding the inputted equipment group setting in the database 340, and the result of the manufacturing process name (Sequence Name) at the top as shown in FIG. ) And a manufacturing process description (Sequence Description), and the bottom left shows the SECS message list, the right side shows the delivery direction of the SECS message, the equipment type, the combined SECS message and the like.

After defining the device group, the administrator defines the server driver name. That is, the server driver name (SDR Name) is selected on the device characteristic screen shown in FIG. 12. The controller 490 provides a screen for inputting a server driver name. Although not shown, the screen for entering the server driver name includes the server driver name (SDR Name), the server driver description, the node name, the block count, and the server driver protocol (SDR Protocol). It is supposed to be entered. When the input for the server driver name is completed, the controller 490 stores the data in the database 340.

The administrator then selects and defines a device name from the device characteristic screen of FIG. 12. The screen for defining the device name selects and inputs a device name input field, a device name description field, a SECS device ID field, and an SDR list field. The controller 490 stores data defined for the device name selected and input by the administrator in the database 340.

The manager who defines the equipment characteristics as above defines each process control name of semiconductor manufacturing (step S506). This process control name definition defines a message group unit called a process, and connects one process to one SECS message. Each Sequence has a subcomponent called Process. When a process menu button 730 for defining a process control name according to a semiconductor manufacturing process is input by a manager, the controller 490 provides a screen for defining a process control name for a device group as shown in FIG. 15. The administrator clicks the right mouse button on the screen of FIG. 15 to select a creation menu from the submenus. Although not shown, the controller 490 provides a screen for inputting a process control name and a description of the process control name. The manager enters and defines the process control name and enters a description. The controller 490 stores the data defined for the input process control name in the database 340.

The manager then combines the SECS message required for the process control name, and defines a trigger message (Trigger Message) of the combined SECS message (step S508). When the administrator clicks the process menu button 730 on the menu bar, the controller 490 provides a screen for combining the equipment group, process control name, and SECS message as shown in FIG. 15. When the administrator selects a device group on the screen of FIG. 15, the controller 490 reads a plurality of process control names corresponding to the selected device group from the database 340 and presents the list. The administrator selects one process control name from among the process control names, selects SECS messages for the selected process control name from the SECS message list on the left, and drags and drops them to the message window on the right. Move to combine. Then, the delivery direction, SECS message name, device type, trigger message, etc. of the selected SECS message are displayed in the message window on the right.

In FIG. 15, a symbol "D" is key information indicating that a list of key messages among the messages transmitted from a device is set as a key, and a symbol "X" indicates a structure of a message transmitted from the device. Compare expression used to distinguish by value, symbol "K" means keep data for keeping data transmitted from equipment in a certain channel and passing it to server using common EQS routine. ), "R" denotes a Routine Connection for connecting data held on a specific channel to the corresponding routine and transmits it to the EQS, "S" denotes whether the data is transmitted to the equipment (Send Data to Device), The symbol "E" is an exception handling used when an error occurs. The symbol "P" is a definition parameter used to collect the corresponding position value of the trigger message transmitted from the equipment. & Point) respectively. The administrator selects each of the combined SECS messages and clicks the right mouse button to set key information, comparison expressions, routine maintenance data, connection routines, and transmission data to the device. The controller 490 stores the set data in the database 340.

When the combination of the process control name and the SECS message is completed as described above, the administrator clicks the server menu button 740 defining the equipment server in the menu bar of FIG. 7 to define the equipment server (step S510). When the server menu button 740 is input by the administrator, the controller 490 provides a screen for defining the equipment server as shown in FIG. 16. The screen for defining the equipment server shown in FIG. 16 is already defined. A tool that associates a device name with a device group or server driver name. That is, the controller 490 provides a screen indicating a device group, a device server name, a description, a server driver name, a connected host, and the like as shown in FIG. 16. The administrator sets up a device server by inputting a create button using a right mouse button on the screen of FIG. If the create button for the equipment server definition is input, the controller 490 provides a screen for inputting the equipment server name and description, although not shown. When the administrator inputs and completes the equipment server name and description, the controller 490 displays the result on the screen. Next, the administrator places the mouse on the input device server name and selects a device connection from the submenus using the right mouse. Then, all device names connected to the device group are listed. If a device name to be connected is selected from the list of device names shown, the selected device name is set to be connected to the device server.

After defining the equipment, the equipment server, and the process control names in this way, the administrator inputs the create menu button 750 in the menu bar of FIG. 7 to finally generate the program source. When the administrator inputs the generation menu button 750, the controller 490 operates the SECS message source generator 440 to execute "EzGen" (step S512). When EzGen is executed, a screen for automatically generating a SECS message source is provided as shown in FIG. 17. The screen of FIG. 17 is a column for selecting a device group, an option used only at compile time (If you only want to create commanfile), an option to compress to an ASCII data item (Compress ASCII Data Item), and a furnace (Furnace). If furnaceequipment only, If only wet type batch equipment, If only the equipment type that loads the equipment port first (If load and reserve equipment) , Options for using only BCR equipment servers (If BCR equipment), options for using only laser maker equipment (If laser maker equipment), and the like. The administrator can save all the data in the device group as a file. When the administrator selects a device group and selects other options to complete the input, the controller 490 generates a communication program source of the SECS message belonging to the device group by "EzGen" of the SECS message source generator 440. . The program source for the SECS message is written in SML according to the type of driver used and stored in the shared database 350 in the form of a file. SECS message sources can be written not only in SML, but also in programming languages such as "C" or "C ++" and "Visual Basic."

On the other hand, the control unit 490 tests all of these works properly before applying the SECS message and the defined equipment characteristics, equipment server and equipment group to the system. The controller 490 operates the test simulation unit 450 to set the equipment simulation, the equipment server simulation, and the like according to the simulation program, and tests each SECS message by applying them to the simulation (step S514). As a result of running the test simulation, a warning screen is provided to redefine and set the SECS message in which an error occurs (not shown). The administrator checks this and redefines the SECS message in error.

As a result of the test simulation, when no error occurs, the controller 490 operates the communication interface defining unit 460 to communicate with the devices 310 to 314 and other systems through the NIC 470. The communication interface is set based on the port setting data and the driver data input at the time of server definition (step S516).

After setting the communication interface, the controller 490 executes SECS message communication with the devices 310 to 314 (step S518). That is, when the SECS message is received from the device 1 310, the corresponding SECS message is transmitted to the device 1 (310).

As described above, according to the first exemplary embodiment of the present invention, in the SECS message communication of the semiconductor manufacturing system, the SECS message source is automatically generated to automatically generate the SECS message program source by defining the data required for the SECS message communication. Generation systems and methods can be realized.

Meanwhile, in recent years, as the Internet is widely used, general programs and software are also implemented to be realized on the Internet. Representatively, it is writing program to support various functions of web site as well as web site using ASP (Active Server Page) or Java Server Page (JSP). Using the Internet, you can also control remote systems and devices, overcoming time and space constraints.

FIG. 18 is a block diagram schematically illustrating a configuration of a semiconductor manufacturing internet system for explaining a method for automatically generating a SECS message source according to a second embodiment of the present invention.

In FIG. 18, the same parts as in FIG. 3 described above are given the same reference numerals, and detailed descriptions thereof are already omitted.

The semiconductor manufacturing Internet system according to the second embodiment of the present invention is the Internet 1810 as a network for transmitting and receiving data between computers scattered in remote areas, and the Internet 1610 and a plurality of equipment servers (EQS). The host computer 1820, 1830, the device 1840-1846 that executes the semiconductor manufacturing process, the remote device 1840-1846, and the response SECS message to the SECS message queried over the Internet 1810. It consists of equipment server (EQS, 1850 ~ 1856) to transmit based on the extended generation language (XML).

For example, the semiconductor manufacturing internet system illustrated in FIG. 18 manages a host computer 1820 managing a plurality of equipment servers 320 to 324 in Busan and a plurality of equipment servers 1850 to 1856 in Seoul. It can be assumed that the host computers 1830 are interconnected via the Internet 1810.

The extended generation language (XML) is a web page description language that is being standardized by an organization called the World Wide Web Consorsium (WWW Consorsium) in order to replace the Hyper Text Markup Language (HTML). XML is an optimization of the standard general document generation language (SML) for the Internet while extending the link function used in HTML and defining the advantages of both HTML and SGML.

The XML has a hierarchical structure and is suitable for expressing the SECS / GEM / HSMS protocol for controlling semiconductor manufacturing equipment because the user defines and describes tags, and expresses various XML parsers and style sheets. By using XSL (eXtensible Stylesheet Language) to define, modify SECS / GEM / HSMS protocol. XSL is a language used to create stylesheets that describe how data sent over the Web using XML will be presented to the user.

In the semiconductor manufacturing Internet system configured as described above, for example, a host computer 1830 in Seoul manages a plurality of equipment servers 320 to 324 in Busan, for example, via the Internet 1810. ) To control a plurality of equipment server (320 ~ 324) on the web screen.

That is, the administrator of the semiconductor manufacturing internet system accesses a website for managing systems in all branches including Seoul and Busan through the host computer 1830, and the website manages the semiconductor manufacturing system of each branch. , A web screen showing a device status and a real time status of the device, a menu defining a device shown in the first embodiment, a menu defining a device server, a menu defining a SECS message, a menu for creating a SECS message source, and the like. To provide.

When the administrator clicks the real-time status menu of the device servers 320 to 324 managed by the host computer 1820 in Busan on the web screen provided to the host computer 1830, the respective device servers 320 to 324 and the equipment The SECS message status screen between 310 and 314 is provided in real time.

For example, if a query SECS message from equipment3 312 is sent to EQS3 322 and is not yet processed, the SECS message status screen indicates that the query SECS message has arrived at equipment server 3312 but has not been processed. The administrator checks the outstanding status and recognizes an error in the transmission of the SECS message.

Therefore, the administrator selects a menu relating to the generation of the SECS message from among a plurality of menus of the currently viewed web screen, and defines the SECS message in steps S502 to S512 described in the above-described first embodiment, and defines the equipment 3 ( The SECS message is reset in combination with the characteristics of 312 and EQS3 322. Thereafter, the device 3312 performs a function of transmitting a response SECS message. The newly defined SECS message on the web is an XML generated message. This process is easier to implement because EQS displays XML-based log files, SECS communication log files, and ultimately SECS messages themselves.

In addition, the administrator can create and create a plurality of SECS messages newly to be used on the website in steps S502 to S518 on the web, and also generate SECS message sources to execute SECS message communication with remote systems.

As described above, according to the second exemplary embodiment of the present invention, a semiconductor manufacturing internet system capable of controlling SECS message communication between equipment servers 320 to 324 remotely through the Internet 1810 and automatically generating a SECS message source is provided. It can be realized.

The present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the technical gist of the present invention.

That is, the same may be applied to a generic equipment model (GEM) or a high-speed SECS message services (HSMS) system.

As described above, according to the present invention, the SECS message program source is automatically generated according to the definition of the semiconductor manufacturing equipment and the equipment servers and the SECS messages required for the SECS communication between them. And it becomes easy to maintain it after implementing equipment automation.

In addition, by implementing the equipment automation, it is possible to collect a variety of data generated from the equipment and to make a database, to achieve a more stable semiconductor manufacturing environment.

And, through the Internet, it is possible to control SECS communication between semiconductor manufacturing equipment and equipment servers in remote locations, define SECS and HSMS protocols using XML, and develop, maintain, and repair the equipment in the existing LAN environment. By making it possible to remotely via the Internet, it is possible to reduce the cost of semiconductor manufacturing equipment automation management.

Claims (14)

A plurality of equipment servers which automatically code a program source corresponding to a Semi-conductor Equipment Communication Standard (SECS) message transmitted and received with the equipment according to the characteristics and manufacturing process of the semiconductor equipment and the semiconductor manufacturing process. In the SECS message source automatic generation method comprising: (a) defining a SECS message for controlling the semiconductor manufacturing process, (b) defining data on equipment characteristics of the equipment, (c) defining a process control name according to the semiconductor manufacturing process, (d) combining the SECS message for the defined process control name; (e) defining a device group according to equipment characteristics by combining the SECS message with the process control name; (f) automatically executing coding of each SECS message source according to the defined equipment group to generate a SECS message; SECS message source automatic generation method comprising a. The method of claim 1, After the step (f), (g) testing the defined SECS message and the device by simulation; (h) defining an interface for communication between the device server and the device; (i) performing SECS message communication between the device server and the device. And automatically executing the SECS message source. The method of claim 1, The step (a) is a field for inputting a stream, a function, and a variant of the SECS message, a description of the SECS message, a direction of delivering the SECS message, and a reply. And a SECS message definition input screen including a field for inputting a message structure. The method of claim 1, Step (a) to step (e) is a SECS message source automatic generation method, characterized in that the SECS message source is expressed in XML (eXtensible Markup Language). The method of claim 1, Step (f) is characterized in that the SECS message source is coded in a "C" or "C ++" or "Visual Basic" programming language. A large number of equipment for carrying out the semiconductor manufacturing process, MES that executes lot progress and history of manufacturing sites, and manages all resources. A database storing defined SECS messages and data input from the device, SECS message defining unit defining SECS message required for control of manufacturing process, equipment characteristic defining unit defining data on manufacturing equipment characteristics, process control name according to manufacturing process, and A device group definition unit defining a device group by combining SECS messages, a communication interface definition unit defining an interface for communication with the device, and a SECS which automatically executes coding of each SECS message source according to the defined device group. Message source generation unit, test simulation unit for simulating the defined SECS messages and equipment, network interface card for physical connection for communication with other systems, system-wide control and automatic generation of SECS message source Equipment server having a control unit SECS message source automatic generation system comprising a. The method of claim 6, The SECS message source generator is a software program that automatically codes the defined SECS message into an SML document when the SECS message is defined according to the equipment characteristics and the process control name. The execution file is displayed in the form of an icon on a window. SECS message source automatic generation system. The method of claim 6, The device characteristic defining unit is configured to define a device type (Type), a device group (Group), a server driver name (SDR Name), a device name (Device Name), the device type, description, SECS message source automatic generation system, characterized in that it provides a screen for entering the device characteristics, which is to be represented by the SECS library, device type, protocol. The method of claim 6, And wherein said automatically generated SECS message program source is coded in Extended Generation Language (XML). The Internet as a network for transmitting and receiving data to and from computers scattered in remote areas, A large number of equipment for executing the semiconductor manufacturing process, A plurality of device servers connected to the plurality of devices to perform SECS message communication; Automatically generate a SECS message source connected to the Internet and used for SECS message communication between the plurality of devices and the plurality of device servers (EQS) based on an extended generation language, via the Internet, A semiconductor manufacturing Internet system comprising a host computer controlling SECS message communication between a plurality of equipment servers (EQSs). The method of claim 10, The host computer manages a semiconductor manufacturing system of each branch office, a menu showing equipment status and real-time status of equipment, a menu defining semiconductor manufacturing equipment, a menu defining equipment server, a menu defining SECS message, and a SECS message. A semiconductor manufacturing internet system comprising a web screen including a source generation menu. The method of claim 10, The menu defining the semiconductor manufacturing equipment is defined by selecting a device type, a device group, a server driver name, a device name, and a device name. A semiconductor manufacturing internet system providing a screen for inputting device characteristics, which is to be displayed by type, description, SECS library, device type, and protocol. The method of claim 10, The SECS message source generation menu is a semiconductor manufacturing Internet system, characterized in that if the SECS message is defined according to the equipment characteristics and the process control name, by automatically coding the defined SECS message into an XML document. The method of claim 10, The device group is a screen composed of a device group selection field, a sequence name, an upper portion indicating a sequence description, and a lower portion indicating a SECS message list, a delivery direction, a message, and an equipment type. And a menu for inputting a device group name input box, a device group description column, a facility field to which a device group belongs, a protocol field, a library type field, and a device type list field.