JP2980180B2 - Production line - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing line, and more particularly to a manufacturing apparatus / inspection apparatus for performing physical / chemical reaction, machining, measurement, and the like, and a man-machine interface at a location away from the manufacturing apparatus / inspection apparatus. Equipment is provided,
The present invention relates to a manufacturing line in which the manufacturing device / inspection device is controlled by performing communication between the manufacturing device / inspection device and the man-machine interface device.

[0002]

2. Description of the Related Art Recent semiconductor manufacturing equipment, semiconductor inspection equipment, etc. have a relatively high degree of intelligence by incorporating a microcomputer and the like, and these equipments are provided in a local area to a host computer which controls the entire factory. They are connected via a network (LAN). Because the device itself is intelligent, the host computer does not directly monitor the status signal inside the device to control the physical quantity in the device, and these monitoring and control are performed by the microcontroller built in the device. It is usually left to a computer. The host computer can perform high-precision control of the entire system only by roughly grasping the processing progress of these devices by macro commands.

From a host computer to a semiconductor manufacturing apparatus,
As an example of an apparatus control method for controlling a semiconductor inspection apparatus, for example, a semiconductor manufacturing equipment material association (Semiconductor
Equipment & Materials Institute), “Semiconductor Manufacturing Equipment Communication Standard (SECS), BOOK OF SE
MI STANDARDS 1978, 1990, SEMI ". This standard stipulates lower-level protocols and communication contents relating to communication between a host computer and a built-in computer of the apparatus, but does not specify a method of creating a command, a method of confirming a command processing result, and the like. Therefore, both the host computer side and the built-in computer side constitute their own man-machine interface (MMI), and thus the factory is full of a wide variety of man-machine interface devices, that is, display devices and panels.

[0004] On the other hand, the automation of semiconductor manufacturing equipment and semiconductor inspection equipment has advanced, and the number of operators and workers working in factories has been decreasing, and the number of equipments assigned to each operator has increased. . In addition to utilizing the extra power generated by the automation of semiconductor wafer transfer, the contents of the work itself, such as checking the validity of the results of lot processing and adding data to the database, as well as simply starting the equipment and checking the operation status. Is also diversifying. As a result, one operator needs to handle a wide variety of man-machine interfaces.

[0005]

In a manufacturing line such as a factory having the above-described semiconductor manufacturing equipment and semiconductor inspection equipment, various kinds of man-machine interfaces are used, and therefore, an operator operates various kinds of man-machine interfaces. The operator can operate these man-machine interface devices because man-machine interface devices are frequently provided near each manufacturing device / inspection device scattered in a large factory space. There is a problem that you have to run around for it.

SUMMARY OF THE INVENTION It is an object of the present invention to monitor or control all of these manufacturing apparatuses / inspection apparatuses from an arbitrary place in a unified man-machine interface environment in a manufacturing line provided with a plurality of manufacturing apparatuses / inspection apparatuses. To provide a production line that can be used.

[0007]

According to a first aspect of the present invention, a manufacturing line includes a plurality of manufacturing apparatuses / inspection apparatuses having a built-in computer and a plurality of host computers connected to a man-machine interface apparatus. In a computer integrated manufacturing line in which a manufacturing apparatus / inspection apparatus and each of the host computers are interconnected by a local area network, each of the built-in computers controls processing of the manufacturing apparatus / inspection apparatus, and The present state of the apparatus / inspection apparatus is transmitted to the local area network by return information in a format common to each of the host computers, and each of the host computers is provided for each of the manufacturing apparatuses / inspection apparatuses. / The types of states that the inspection device can take and the states A host processing parameter table which stores a unified describe message, the via the man-machine interface device each manufacturing device /
When a request to monitor any of the inspection devices is input, if a communication channel has not been established with the built-in computer of the manufacturing device / inspection device, the communication channel is established, and the reply information is sent from the built-in computer. Acquiring the message and referring to the host processing parameter table to output the message corresponding to the current state to a corresponding man-machine interface device. The status of the inspection device is displayed.

A manufacturing line according to a second aspect of the present invention includes a plurality of manufacturing apparatuses / inspection apparatuses having a built-in computer and a plurality of host computers connected to a man-machine interface apparatus. In a computer-integrated manufacturing line in which the host computers are interconnected by a local area network, each of the built-in computers changes the current state of the manufacturing apparatus / inspection apparatus in a format common to the host computers. Sending the reply information to the local area network, giving exclusive control to the host computer based on a request from one of the host computers, storing a host computer name having the control right, The host computer having the control right The host computer interprets the control command in a format common to the host computer and controls the processing of the manufacturing apparatus / inspection apparatus based on the interpretation. The type of processing that can be performed by the apparatus / inspection apparatus, the type of state that can be taken by the manufacturing apparatus / inspection apparatus, the type of processing, and a message that uniformly describes the processing and state for each type of state are stored. A host processing parameter table, when a request for monitoring any of the manufacturing apparatuses / inspection apparatuses is input via the man-machine interface apparatus, a communication path between the apparatus and the built-in computer of the manufacturing apparatus / inspection apparatus; If communication is not established, the communication path is established, the reply information is obtained from the built-in computer, and the A request to output the message corresponding to the current state to the corresponding man-machine interface device with reference to the processing parameter table and to control any of the manufacturing devices / inspection devices via the man-machine interface device Is input, if a communication path is not established with the built-in computer of the manufacturing apparatus / inspection apparatus, the communication path is established, and if the control right for the manufacturing apparatus / inspection apparatus is not obtained, Requesting the built-in computer to acquire control authority, referring to the host processing parameter table, outputting a message corresponding to a process that can be performed by the manufacturing device / inspection device to the man-machine interface device, and One of them was selected via the man-machine interface device A control command representing the processing is sometimes transmitted to the built-in computer.

[0009]

The communication of control commands and reply information between each host computer and each manufacturing apparatus / inspection apparatus is performed in a format common to the host computers, and each host computer executes each manufacturing apparatus / inspection apparatus. A host processing parameter table that stores messages describing the processes to be obtained and the states that each manufacturing device / inspection device can take is provided, so that any manufacturing machine can be connected to any man-machine interface device connected to any host computer. / The inspection device can be controlled in a unified man-machine interface environment.

[0010]

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a manufacturing line according to one embodiment of the present invention, FIG. 2 is a block diagram showing a configuration of a manufacturing / inspection apparatus 4, FIG. 3 is a block diagram showing one configuration of a host computer, and FIG. Host processing parameter table 1
FIG. 5 is a flowchart for explaining processing in the built-in computer 2, and FIG. 6 is a flowchart for explaining processing in the host computer 1.

This manufacturing line is used for semiconductor manufacturing. As shown in FIG. 1, a plurality of host computers 1 and a plurality of manufacturing / inspection devices 4 are interconnected by a LAN (local area network) 5. Have been. The manufacturing / inspection apparatus 4 includes, for example, a physical reaction system 3a for executing a physical reaction process, a chemical reaction system 3b for executing a chemical reaction process, a machining system 3c for executing machining, and a physical quantity measurement, respectively. Physical measurement system 3
d, a reaction system 3 represented by a mechanical measurement system 3e for measuring a mechanical quantity, and the reaction system 3 is controlled by a built-in computer 2 provided in a manufacturing / inspection apparatus 4. I have. A plurality of reaction systems 3 may be provided for each manufacturing / inspection device 4.

The built-in computer 2 mutually converts an upper-level communication program 21 for controlling communication with the LAN 5, control commands and return information exchanged with the host computer 1 via the LAN 5, and internal expressions in the manufacturing / inspection device 4. And a system control program 23 for controlling the processing of each reaction system 3 and collecting information from each reaction system 3, and a communication parameter table 24 for holding parameters required for communication. I have. By configuring the built-in computer 2 in this manner, the built-in computer 2 transmits the current state of the reaction system 3 to the LAN by using reply information in a format common to each host computer.
5 and gives exclusive control to the host computer 1 based on a request from one of the host computers 1, and stores the address of the host computer having the control right in the communication parameter table 24, By interpreting a control command in a format common to each host computer transmitted from the host computer 1 having the control right via the LAN 5, it is possible to control the processing of the reaction system 3 based on this interpretation. .

On the other hand, the host computer 1 is connected to a man-machine interface device (not shown).
A host processing parameter table 14 to be described later, a host-side command process for giving a control command to the device control program 13 and receiving reply information from the device control program 13 in accordance with an instruction input to the man-machine interface device with reference to the host process parameter table 14 It comprises a program 11, a window control program 12 for controlling the display screen of the man-machine interface device in multiple windows, and a host-side command processing program 11 and a device control program 13 for controlling the interface with the LAN 5. Although not shown, the host computer 1 may be connected to a higher-level computer, and the higher-level computer may perform macroscopic processing or higher-level specific processing. With this configuration, when a request to monitor any one of the manufacturing / inspection devices 4 is input via the man-machine interface device, the host computer 1 communicates with the built-in computer 2 of the manufacturing / inspection device 4. If a communication path is not established between them, a communication path is established, return information indicating the current state of the manufacturing / inspection apparatus 4 is acquired from the built-in computer 2 via the LAN 5, and the host processing parameter table 14 is referred to. And outputs a message corresponding to the current state to the corresponding man-machine interface device, and when a request to control any of the manufacturing / inspection devices 4 is input through the man-machine interface device, If a communication path has not been established with the built-in computer 2, a communication path is established and If the control right for the manufacturing / inspection apparatus 4 has not been obtained, a request for obtaining the control right is requested to the built-in computer 2 and a message corresponding to the processing that the manufacturing / inspection apparatus 4 can perform is referred to by referring to the host processing parameter table 14. It is possible to output the control command to the built-in computer 2 via the LAN 5 when the selected command is output through the man-machine interface device.

Here, the host processing parameter table 1
4 will be described with reference to FIG. The host processing parameter table 14 includes, for each manufacturing // inspection apparatus 4, the type of processing that the manufacturing / inspection apparatus 4 can perform, the type of state that the manufacturing / inspection apparatus 4 can take, and the type of this processing and state. And a message that describes the processing and state in a unified manner. The device table 31, the command definition table 32, the message definition table 33, the name definition table 34, the response display definition table 35, the status display definition And a table 36.

The device table 31 stores each manufacturing / inspection device 4
Of each device and LAN of its built-in computer 2
5 and a connection flag for storing a connection state between the host computer 1 and the manufacturing / inspection apparatus 4. The command definition table 32 is for storing a type of a transmission command for designating a control command and a type of a reception command for responding to the designation of processing by the man-machine interface device. The control command is transmitted from each host computer 1 to each manufacturing / inspection device 4 via the LAN 5 in a format common to the host computer 1. The message definition table 33 includes a specific content of each transmission command, that is, a control parameter for controlling each manufacturing / inspection apparatus 4 to instruct execution of a process (a part indicating a specific content of control accompanying the control command). ) Is stored to display a message displayed on the man-machine interface device to prompt the user to specify ()). In the message definition table 33, a name file number is also stored in association with each message in order to associate with a name file in a name definition table 34 described later. The name definition table 34 indicates that after a transmission command and a reception command are exchanged between the host computer 1 and the man-machine interface device, a control command is actually formed based on the exchange, based on the internal computer 2 of the manufacturing / inspection device 4.
, And is composed of a name file corresponding to each transmission command. Each name file describes a sequence (sequence) of control commands corresponding to the transmission command with the control command name. The message ID (a number representing each control command) is stored in association with the message ID. The response display definition table 35 stores the specific contents of each received command, that is, a message that responds when a process is designated by the man-machine interface device. Status display definition table 36
Is used when the reply information is sent from the built-in computer 2 of each manufacturing / inspection device 4 to decode the reply information and display a message corresponding to the man-machine interface device. And a corresponding message are stored. Next, the operation of the present embodiment will be described.

First, the operation flow of the built-in computer 2 will be described with reference to FIG. Here, only the part related to the communication of the built-in computer 2 with the host computer 1 will be described.

When a connection request is received from any of the plurality of host computers 1 (step 101), the host communication program 21 responds to the request and returns a connection permission response to the host computer 1 (step 102). ). At this time, the address number of the host computer 1 that has made the connection request is stored in the communication parameter table 24 (step 103). Upon receiving the connection permission request, the host computer 1 establishes a communication path and starts communication (step 104). In this case, a plurality of communication paths with different host computers 1 may be simultaneously established. Here, if there is a termination request from the host computer 1 (step 105), the host communication program 21 responds to this, and the host computer 1 closes the communication path (step 108) and terminates the processing.

If there is no termination request, the system waits for a control command from the host computer 1 (step 10).
6). When the control command is input, the control command is analyzed by the device-side command processing program 22 (step 107), and the internal expression as an analysis result is transmitted to the system control program 23 (step 109). Is controlled (step 110).
When it is not necessary to communicate a control result, a measurement result, or the like to the host computer 1 with the control of the reaction system 3, the process returns to step 105 (step 111). When it is necessary to communicate with the host computer 1, the system control program 23
Collects information during the processing of the reaction system 3 and information at the end of the processing, and returns the information to the apparatus-side command processing program 22 at an appropriate timing (step 112). The device-side command processing program 22 converts information obtained from the system control program 23 into a format that can be interpreted by the host computer 1 (step 113), and creates reply information (step 114). Then, with the help of the host communication program 21, this reply information is transmitted to the host computer 1 via the LAN 5 (step 115). At this time, the host computer 1 stored in the communication parameter table 24
Is used as the return address. After the communication with the host computer 1 ends, the process returns to step 111.

As described above, the built-in computer 2 controls the reaction system 3 in response to the control command from the host computer 1 and communicates with the host computer 1. Here, the communication flow with the host computer 1 that has acquired the control right, which will be described later, can be monitored even by the host computer 1 that has not acquired the control right. it can. When performing this monitoring, a control command representing only the monitoring operation is used, and the operation proceeds in the same manner as described above except for the above.

Next, the flow of the operation of the host computer 1 will be described with reference to FIGS. 6 and 8 (screen examples). Here, only the part of the host computer 1 related to communication with the built-in computer 2 will be described.

It is assumed that the device name of the manufacturing / inspection device 4 to be controlled or monitored has been specified in advance. First, the host-side command processing program 11 checks the specified apparatus name against the apparatus table 31 of the host processing parameter table 14 (step 121), sets the connection flag in the apparatus table 31 to a predetermined mode, and sets the manufacturing mode. Reading out the network address of the built-in computer 2 of the inspection device 4 and using that information as the device control program 1
3 (step 122). Device control program 13
Establishes a connection with the target built-in computer 2 via the LAN 5 based on the acquired address (step 123), receives information from the host-side command processing program 11, and sends the information to the manufacturing / inspection apparatus 4. The host-side command processing program 1 sends a control command, receives reply information from the manufacturing / inspection device 4, and
Get ready to give it to one. Then, the window processing program 12 displays the menu operation screen 43 on the display device of the man-machine interface device (step 124), and performs the operation by referring to the host processing parameter table 14 in consideration of the specified device name. The remaining window frames (45, 46, 47) in the man-machine interface screen 42 are created and displayed.
At this time, if the device-side command processing program 11 holds information to be notified to the operator based on the reply information from each manufacturing / inspection device 4, the window processing program 12 receives this information and receives the information from the man-machine interface device. It is displayed on the screen (step 125). This display is updated when the state information / abnormality information of each manufacturing / inspection apparatus 4 is acquired and when the state changes.

If the operator has selected the monitoring mode, that is, the mode in which only the state of the manufacturing / inspection apparatus 4 is monitored (step 126), the operator allows the operator to select the content to be processed (step 13).
0), a screen for setting a screen as a monitoring screen or performing other processing that is not directly related to control of the manufacturing / inspection apparatus 4 (a lot processing mode screen or a data processing mode screen)
And the operator executes the above-described processing in the monitoring mode (step 131). If the operator selects the end of all the processes, the operation is ended. Otherwise, the process returns to step 125.

When the monitoring mode is not set, that is, when the mode for controlling the manufacturing / inspection apparatus 4 (control mode) is set, the window control program 12 controls the screen for controlling the apparatus for which the control right has been acquired (device control described later). Screen 48) is displayed on the man-machine interface device (step 127), and based on the input from the man-machine interface device, the host-side command processing program 11
Transmits a control command to the built-in computer 2 of the manufacturing / inspection apparatus 4 to execute control of the manufacturing / inspection apparatus 4 (step 128). If the continuation of control is selected, the process returns to step 127, and if the continuation of control is not selected, the process proceeds to step 130 (step 12).
9).

As described above, the host computer 1
Communicates with the built-in computer 2 to monitor and control the manufacturing / inspection device 4. Here, it seems that only one program is being executed at the same time due to the description given with reference to the flowchart, but the latest state information of each manufacturing / inspection apparatus during processing in the control or monitoring mode. / It is necessary to obtain abnormal information.
The programs of the present embodiment, that is, the host-side command processing program 11, the window processing program 12, and the device control program 13 are actually operated simultaneously and cooperatively by a multi-process. As a result, the display content can be updated immediately when the device status changes.

Next, the actual operation will be described in more detail with reference to an example of a screen of the man-machine interface device, including an operation method performed by an operator. FIG. 7 illustrates an example of a screen for initial processing, FIG. 8 illustrates a display example of a screen for operation of the host computer 1, FIG. 9 illustrates an example of a screen in the device control mode, FIG. 10 is a diagram for explaining a procedure for routinely controlling the manufacturing / inspection apparatus 4.

When starting up the host computer 1,
A screen 41 for the initial processing shown in FIG. 7 is displayed. The screen 41 is used to input a program to be started and a device name of the manufacturing / inspection device 4 to be monitored / controlled. The operator operates a program (host-side command processing program 11,
Window processing program 12, device control program 1
3) is selected and activated, and a program which is not directly related to the device control but is to be executed (for example, a program relating to lot tracking or a program relating to database processing) is selected and activated, and monitoring and The device name of the manufacturing / inspection device 4 to be controlled is designated. More than one device name can be specified at a time.
When designating a device name, it is necessary to distinguish between requesting control of the device or simply monitoring the device. If a plurality of host computers 1 attempt to control the same manufacturing / inspection apparatus 4, the control of the manufacturing / inspection apparatus 4 will be confused, and exclusive control of the control right will be performed. I have to do it. As a mechanism for performing such exclusive control, the communication parameter table 24 of each built-in computer 2 stores which host computer 1 is given the control right, and the control right from the host computer 1 other than the host computer 1 is stored. The request may be rejected. In this case, also in each host computer 1, the host computer 1 stores the manufacturing / inspection apparatus 4 which currently has the control right, and gives up the control right immediately when the control right becomes unnecessary.

When the designation of the device name is performed, a communication path between the host computer 1 and the built-in computer 2 of the device is established.
Displays the man-machine interface screen 42 for operation as shown in FIG. 8 on the man-machine interface device. The man-machine interface screen 42 is displayed in a multi-window manner at the same time as the menu operation screen 43, and includes a common operation screen area 44, a status display screen 45, an abnormality display screen 46, and the like.

The menu operation screen 43 is used to select a function, select a mode, end processing, and the like. The menu operation screen 43 is always displayed, and the contents of the item are executed by clicking the item with a mouse or the like. It is supposed to be. The common operation screen area 44 is an area for displaying a device operation screen 47 for each device to be monitored and controlled. By selecting a device name, the device operation screen 47 for that device pops up. ing. The device operation screen 47 can be used for both monitoring and control of the device. If the device operation screen 47 is used for purposes other than control, the search / edit / replacement of the recipe and the lot selection are performed in addition to the device monitoring. It can be widely used for progress management and database search. The purpose of distinguishing between screens for control and other than control purposes is to reduce the probability of competing for control. When a screen other than the control screen is displayed, it is assumed that control will not be performed for the time being,
Even if the control right is acquired, the control right can be temporarily transferred to another host computer 1. At the upper end of the device operation screen 47, for example, items such as "device <control, monitoring>, lot, data" are displayed. By selecting these items with a cursor, a mouse, or the like, device control and device details are performed. Operations such as information monitoring, lot progress management, and database search can be selectively performed.

The status display screen 45 is always displayed as long as device monitoring is specified, and the latest status of the manufacturing / inspection device 4 to be monitored is displayed here. The abnormality display screen 46 indicates the manufacturing / inspection device 4 to be monitored.
Is an area for displaying the content of the abnormality when an abnormality occurs in any of them, and the screen size can be enlarged and displayed as necessary.

When the apparatus operation screen 47 is in the control mode, that is, the apparatus control screen 48 is displayed. An example of the device control screen 48 is shown in FIG. 9, where the manufacturing / inspection device 4 is routinely controlled by interactively operating the device control screen 48 displayed on the man-machine interface device. The processing flow is shown in FIG. The upper part of the device control screen 48 includes the name of the device to be controlled, the name of the operating operator, the name of the lot, the name of the recipe,
This is an area for displaying a process name and the like. Of these, the device name and the operator name are generally determined before shifting to this screen, and the corresponding fields are filled with the information. The left part of the device control screen 48 is a command specification column 51 for specifying a command or a macro command. In the command specification column 51, selectable commands or macro commands are displayed. At the center of the device control screen 48, a control parameter instruction column 52 for instructing input of control parameters and an execution status display column 53 for displaying an execution status are provided from the top. From the top, a response parameter display field 54 for displaying a response message and a menu operation field 55 for selecting processes such as scrolling, searching, executing and ending are provided.

Next, a procedure for performing an interactive operation using the apparatus control screen 48 will be described. here,
It is assumed that an etcher is selected as the manufacturing / inspection device 4 to be controlled. First, the window processing program 12
Refers to the device table 31 and the command definition table 32 of the host processing parameter table 14 and displays macro commands and commands that can be specified in the command specification column 51 (step 151). Here, the macro command will be described. This macro command selects a processing mode in which the control is mainly executed by the operator or the host computer 1 is mainly executed. The “higher-level automatic control mode” is a mode in which the host computer 1 leaves processing to a higher-level computer (not shown) higher than itself, and the host computer 1 itself mediates communication between the higher-level computer and the built-in computer 2. . "Automatic control <immediate>mode"
Is a mode in which, when the execution is instructed, the host computer 1 automatically performs the processing immediately. The "automatic control <standby>mode" is a mode in which a time at which execution is to be performed is designated, and when the time comes, the host computer 1 automatically performs the processing. The "manual control mode" is a mode in which processing is performed at the responsibility of the operator. On the other hand, the command represents a process that can be actually executed by the manufacturing / inspection apparatus 4, and if it is an etcher, as shown in the figure,
"Registration lot confirmation", "Detailed display (display details of device status)", "Local / Remote (designation of operation mode as device)", "Process start / stop / restart", "Data collection / non- Commands such as "collect" can be specified.

The operator clicks a click mark (“□”) displayed before each command with a mouse or the like, and then clicks “Execute” in the menu operation column 55 to select a command or a macro command. I do. This selection corresponds to the selection of the transmission command, and when this selection is made, the mode transits to the mode corresponding to the command or the macro command, and the color of the click mark clicked changes to indicate that the selection is completed. indicate. If the command to be selected or the macro command is not displayed, the screen is scrolled by appropriately operating the menu operation column 55, and the command to be selected is displayed.
What is necessary is just to display a macro command. Here, it is assumed that “resume processing” is selected in “automatic control <immediate> mode”.

When a command or macro command is selected, the window processing program executes the message definition table 3 to specify the name of the lot to be processed, for example.
3, a message prompting the user to input control parameters is displayed in the control parameter instruction column 52, and the operator inputs control parameters such as a lot name according to the message (step 152). When this input is performed, the processing is restarted.

At the top of the apparatus control screen 48, there are provided areas for displaying the name of the lot to be processed, the name of the recipe defining the processing conditions, the name of the process to be processed, and the like. If there are any items whose contents are not displayed, select the click mark of the item and select the search in the menu operation column 55. The database is searched, and a new window is opened in an erasable area, and candidates for these items are opened. Is displayed. Clicking an appropriate candidate from the candidates will select it and display it in the display column of the corresponding item at the top of the screen. In this way, the processing content to be executed by the device to be controlled can be specified. Then, by clicking the execution in the menu operation column 55, the processing is restarted as specified as the transmission command. Instead of inputting the control parameters to the control parameter instruction column 52 described above, the selection of the processing target can be performed in this manner.

When the control parameters are input or the processing target is selected as described above, and the processing is restarted by the built-in computer 2, the window processing program 13
With reference to the response display definition table 35, a message of the received command corresponding to the selected transmission command (resumption of processing in this case) is displayed in the response parameter display column 54 (step 153). Here, a message about the process restart is displayed.

When the exchange between the transmission command and the reception command is completed as described above, the host computer 1
Subsequently, a list of names specified by the name file numbers in the name definition table 34 and the corresponding message I
According to the order of D, a control command is sent to the built-in computer 2 to continue a series of processing (here, wafer etching after restart). The correspondence between each message ID and the control command is stored in the host processing parameter table 1.
4 and if a control command is received,
The built-in computer 2 controls the reaction system 3 so as to execute essential processes such as manufacturing and inspection. During execution of the process, return information transmitted from the built-in computer 2 to the host computer 1 is received by the host computer as needed, and based on the information, the status display definition table 3
By referring to No. 6, the progress of the processing and the like are displayed in the execution status display column 53 (step 154).

As described above, a series of processes are standardized, and a man-machine interface device connected to an arbitrary one of the plurality of host computers 1 is operated by a unified man-machine interface environment. Control and monitoring of a plurality of manufacturing / inspection devices 4
Operations such as device control, detailed device information monitoring, lot progress management, and database search can be performed in parallel. The provision of a unified man-machine interface environment means that if a host computer is connected to a higher-level computer, the host computer can control the production line in this unified man-machine interface environment. This means that the control by the host computer becomes easy.

[0038]

According to the present invention, communication of control commands and return information between each host computer and each manufacturing apparatus / inspection apparatus is performed in a format common to the host computers, and each host computer can execute each manufacturing apparatus / inspection apparatus. By providing a host processing parameter table that stores messages describing the processing and the state of each manufacturing device / inspection device in a unified manner, a man-machine interface device connected to any distributed host computer can
While monitoring the latest operating status of a large number of desired manufacturing / inspection devices, it is possible to perform processing not directly related to the control and monitoring of these devices, and to control the manufacturing / inspection devices. Can be controlled in a unified man-machine interface environment, so that there is only one type of man-machine interface that the operator should master, operation errors are drastically reduced, and desired man-machine interface / inspection can be performed from one man-machine interface device. This has the effect of eliminating the need to run around because the device can be controlled. Further, the present invention has an effect that when the host computer is connected to a higher-level computer, the control of the manufacturing line by the higher-level computer becomes easier.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a production line according to an embodiment of the present invention.

FIG. 2 is a block diagram illustrating a configuration of a manufacturing / inspection device 4.

FIG. 3 is a block diagram showing a configuration of a host computer 1.

FIG. 4 is a diagram illustrating a configuration of a host processing parameter table 14;

FIG. 5 is a flowchart illustrating processing in a built-in computer 2.

FIG. 6 is a flowchart illustrating processing in the host computer 1.

FIG. 7 is a diagram illustrating an example of a screen for initial processing.

FIG. 8 is a diagram illustrating a display example of a screen for operation of the host computer 1.

FIG. 9 is a diagram illustrating an example of a screen in the device control mode.

FIG. 10 is a diagram illustrating a procedure for routinely controlling the manufacturing / inspection apparatus 4.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 host computer 2 built-in computer 3 reaction system 4 manufacturing / inspection device 5 LAN 11 host-side command processing program 12 window processing program 13 device control program 14 host processing parameter table 21 host communication program 22 device-side command processing program 23 system control program 24 Communication parameter table 31 Device table 32 Command definition table 33 Message definition table 34 Name definition table 35 Response display definition table 36 Status display definition table 42 Man-machine interface screen 43 Menu operation screen 44 Common operation screen area 45 Status display screen 46 Error display screen 47 Device operation screen 48 Device control screen

Continuation of the front page (72) Inventor Masahiro Yoshizawa 1-6, Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (56) References JP-A-63-249328 (JP, A) JP-A-3-26450 JP-A-62-134766 (JP, A) JP-A-63-296185 (JP, A) JP-A-5-20330 (JP, A) JP-A-5-20332 (JP, A) Kaihei 5-66805 (JP, A) WO 91/1850 (WO, A1) (58) Fields investigated (Int. Cl. ⁶ , DB name) G06F 17/60 B23Q 41/00 G05B 51/02

Claims (3)

(57) [Claims] A plurality of manufacturing devices / inspection devices having a built-in computer and a plurality of host computers connected to a man-machine interface device are provided, and each of the manufacturing devices / inspection devices and each of the host computers are local. In a computer-integrated manufacturing line interconnected by an area network, each of the built-in computers controls processing of the manufacturing apparatus / inspection apparatus, and displays the current state of the manufacturing apparatus / inspection apparatus in each of the host computers. The host computer transmits each type of status of the manufacturing device / inspection device for each of the manufacturing device / inspection device and the status of the status. Messages that describe the status in a unified manner for each type are stored When a request for monitoring any one of the manufacturing apparatuses / inspection apparatuses is input via the man-machine interface apparatus, a communication path between the apparatus and a built-in computer of the manufacturing apparatus / inspection apparatuses is provided. If not established, establish the communication path, obtain the reply information from the built-in computer, refer to the host processing parameter table, and send the message corresponding to the current state to the corresponding man-machine interface device. A production line for outputting, wherein the corresponding man-machine interface device simultaneously displays the status of the plurality of production devices / inspection devices. 2. A plurality of manufacturing apparatuses / inspection apparatuses having a built-in computer, and a plurality of host computers connected to a man-machine interface apparatus are provided, and each of the manufacturing apparatuses / inspection apparatuses and each of the host computers are local. In a computer-integrated manufacturing line interconnected by an area network, each of the built-in computers indicates the current state of the manufacturing apparatus / inspection apparatus by using return information in a format common to each of the host computers. To give exclusive control to the host computer based on a request from one of the host computers, store the name of the host computer having the control right, and store the host computer having the control right Shared with each host computer from The host computer is configured to interpret the control command in the format described above and to control the processing of the manufacturing apparatus / inspection apparatus based on the interpretation. Host processing parameter table that stores the types of processing that can be performed, the types of states that the manufacturing apparatus / inspection apparatus can take, the types of processing, and messages that unify the processing and state for each type of state. When a request to monitor any of the manufacturing devices / inspection devices is input via the man-machine interface device, a communication path is established between the computer and the built-in computer of the manufacturing device / inspection device. If not, the communication path is established, the reply information is obtained from the built-in computer, and the host processing parameter table is obtained. The message corresponding to the current state is output to the corresponding man-machine interface device with reference to the file, and a request to control any of the manufacturing devices / inspection devices via the man-machine interface device is input. When the communication path is not established with the built-in computer of the manufacturing apparatus / inspection apparatus, the communication path is established, and when the control right for the manufacturing apparatus / inspection apparatus is not acquired, the control right Requesting the acquisition from the built-in computer, outputting a message corresponding to a process that can be performed by the manufacturing apparatus / inspection device to the man-machine interface device by referring to the host processing parameter table, and selecting any of the processes that can be performed. Represents the processing when selected through the man-machine interface device. A production line for transmitting a control command to the built-in computer. 3. A man-machine interface device displays a screen showing a current state of a manufacturing apparatus / inspection apparatus and an operation which is irrelevant to the operation of a specific manufacturing apparatus / inspection apparatus but is necessary for operation of the entire manufacturing line. The production line according to claim 1, wherein a screen representing the following is displayed simultaneously.