CN1913329B - Precision rotation mechanism driven by piezoelectric double-chip and its device - Google Patents

Precision rotation mechanism driven by piezoelectric double-chip and its device Download PDF

Info

Publication number
CN1913329B
CN1913329B CN200610088848XA CN200610088848A CN1913329B CN 1913329 B CN1913329 B CN 1913329B CN 200610088848X A CN200610088848X A CN 200610088848XA CN 200610088848 A CN200610088848 A CN 200610088848A CN 1913329 B CN1913329 B CN 1913329B
Authority
CN
China
Prior art keywords
piezoelectric bimorph
output shaft
fixed
driven member
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200610088848XA
Other languages
Chinese (zh)
Other versions
CN1913329A (en
Inventor
阎绍泽
张付兴
温诗铸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CN200610088848XA priority Critical patent/CN1913329B/en
Publication of CN1913329A publication Critical patent/CN1913329A/en
Application granted granted Critical
Publication of CN1913329B publication Critical patent/CN1913329B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

This invention relates to a precision rotating unit driven by piezoelectric dual-wafers and its device including two sets of dual-wafer actuating pieces, two sets of sway bars, two clutches, an output shaft and a base, in which, the output shaft is supported on the base by a sliding bearing, the two clutches are composed of driven and driving components, the driven component is fixed on the output shaft, the two driving components are set at both ends of the driven one covering on the shaft, the two sets of sway bars are set at both sides of the two clutches with two shift plates and a jacket for each set, the two shifting plates are fixed at either end of the jacket, one of the shifting plates is fixed to the driving piece, two sets of the piezoelectric dual-wafer activating components are set at either sides of the two clutches composed of fixedly connected piezoelectric dual-wafers and a pin shaft, one end of the dual-wafer is fixed to the shaft and the other end is fixed on the base and the grooves of the shaft and the shifting plates are matched to constitute a plane higher pair.

Description

Precision rotation mechanism and device thereof that piezoelectric bimorph drives
Technical field:
Precision rotation mechanism and device thereof that piezoelectric bimorph drives belong to precision optical machinery movement control technology field.
Background technology:
In Precision Machining, measurement and control field, more and more higher to the position control accuracy requirement of instrument and equipment.In precision optical machinery movement control technology field, when the rectilinear motion resolution requirement reaches micron even nanometer, or corner reaches classification even second when level, the piezoelectric ceramic quasi-driver has been widely used in microoperation precision optical machinery kinetic control system owing to have resolution height, fast, the efficient advantages of higher of response.
Because single piezoelectric ceramic quasi-driver output form is fairly simple, and the output displacement is less, therefore, needs the design novel mechanism, realizes the output of big stroke or high pulling torque and different motion form.The Ohnishi of Japanese Alps of nineteen ninety Electronics Co., Ltd. etc. has designed a creeping motion type electric rotating machine (Ohnishi K. based on Creeping Principle, Umeda M., Kurosawa M.etal.Rotary inchworm-type piezoelectric actuator.Electrical Engineering in Japan, 1990, Vol.110, No.3, pp.107-114 creeping motion type piezoelectricity rotary actuator, the NEC engineering, 1990, Vol.110, No.3, pp.107-114), this motor adopts the piezoelectric actuator of dilatation to the rotor clamper, piezoelectric actuator with torsional deflection drives the rotor rotation, by the different sequencing control to clamper piezoelectric actuator and drive pressure motor-driven cylinder, realizes the continuous rotation of output shaft.When operating frequency is 10Hz, produce the moment of torsion of 0.2Nm, but the output shaft velocity of rotation only is 3 °/min.Though this class electric rotating machine can be used for accurate angular displacement positioning control, its output speed is generally lower.
The accurate actuator of piezoelectric inertia impact formula mainly is made of with inertial mass heap formula or twin-wafer type piezoelectric drive element, utilizes the inertia of mass, cooperates the flexible or flexural deformation of piezoelectric drive element, realizes moving fast on a large scale or rotation.The impact type rotation precision driver (Zhang Hongzhuan that it is driver element that Zhang Hongzhuan etc. have developed a kind of cantilever type piezoelectric twin lamella that has a lumped mass with free end, once flat, Hua Shunming, Cheng Guangming, Yang Zhigang. the research of piezoelectric bimorph type impact type rotation precision driver. optical precision engineering, 2005, the 13rd volume, the 3rd phase, pp.298-304), its rotating distance is 180 °.This driver mainly is made up of piezoelectric bimorph, impact mass piece, flexible hinge, spring, axle and pedestal etc.; Piezoelectric bimorph and impact mass piece constitute driver element, and an end of piezoelectric bimorph is connected with axle, and the other end is to be connected the free end of a mass; Adopt the specific frequency pressure regulation driving method of deciding to realize that driver rotates output.The operation principle that this driver rotates counterclockwise a step is: at first make the free end of piezoelectric bimorph drive mass and driving under the signal of telecommunication effect counter-clockwise swing at a slow speed, the controlling and driving voltage waveform, make moment of inertia that piezoelectric bimorph free end mass produces less than the moment of friction between axle and the bearing, this moment the output shaft transfixion; The free end drive mass that the controlling and driving signal of telecommunication produces voltage waveform and causes piezoelectric bimorph suddenly stops, swing clockwise fast, forms counterclockwise moment of inertia, and moment of inertia is greater than moment of friction at this moment, and the promotion output shaft rotates counterclockwise.From its operation principle as can be seen, the output speed of such actuator and moment are subjected to the restriction of the moment of friction between moment of inertia, axle and the bearing that piezoelectric bimorph free end mass produces, only are suitable for the less occasion of moment.
Piezoelectric ultrasonic motor is a popular direction of micromachine research field over nearly 20 years, has advantages such as compact conformation, volume is little, noise is little, and it and the marked difference of traditional electromagnetic motor are no magnetic and are not subjected to the influence in magnetic field.Piezoelectric ultrasonic motor generally is made up of rotor, stator and piezoelectric element, utilize the inverse piezoelectric effect excitation ultrasound vibration of piezoelectric ceramic, amplify by means of elastomer resonance, stator by with the contacting of rotor, produce by the friction coupling and rotatablely move or rectilinear motion.According to the difference of piezoelectric ceramic exiting form, piezoelectric ultrasonic motor can be divided into again that capable ripple is driving, standing wave is driving, mixed excitation type and cycle motivation type.The people such as Uchino of U.S. Penn State university utilize capable ripple drive principle, designed a kind of miniature ultrasonic motor (Uchino K., Cagatay S., Koc B., et al.Micro Piezoelectric Ultrasonic Motors.Journal ofElectroceramics, 2004, Vol.13, No.1-3, pp.393-401 miniature piezoelectric supersonic motor. piezoelectric ceramic journal, 2004, Vol.13, No.1-3, pp.393-401), the piezoelectric ceramic stator of this supersonic motor is made up of a piezoelectric ceramic disc and the dentation becket that is fixed on this potsherd by centre bore, utilize the detrusion pattern of piezoelectric ceramic, by importing sinusoidal and cosine two path control signal, drive pressure electroceramics stator vibrates near its first order resonance frequency, drives rotor by means of frictional force and realizes rotating output.The rotary-type supersonic motor of general piezoelectricity is that frictionally carries out Motion Transmission, thereby has many shortcomings, and is big as friction energy loss, and it is bigger to wear and tear, and the life-span is shorter, the restriction that the output maximum moment is also rubbed.
Present piezoelectricity electric rotating machine is generally the microminiature drive mechanism, because be subjected to the restriction of its mechanism or structure, this class piezoelectric motor is difficult to take into account the high performance requirements of output torque and output speed, perhaps output speed is less, perhaps output torque is less, is difficult to satisfy some engineering application needs.
Summary of the invention:
The objective of the invention is to design the precision rotation mechanism that a kind of piezoelectric bimorph drives.Form swing mechanism a little by piezoelectric bimorph actuated piece and fork, the driving link of clutch and driven member are fixed with fork and output shaft respectively, based on a kind of rotation vermicular movement principle of novelty, when keeping angle of elevation displacement resolution, realize that the precision of output shaft is rotated.
Piezoelectric bimorph is by generally constituting by three layers, and two-layer up and down is piezoceramics layer 43, and middle one deck is a spring beam layer 42, as shown in figure 11.Each piezoceramics layer has specific polarised direction.When the applied field direction is identical with polarised direction, piezoceramics layer will extend at direction of an electric field (z direction among Figure 11), and will shrink in the direction (x direction among Figure 11) perpendicular to electric field; Opposite, when the applied field direction is opposite with polarised direction, piezoceramics layer will shrink at direction of an electric field, and will extend in the direction perpendicular to electric field.Among the present invention in the employed piezoelectric bimorph two ceramic layers polarised direction opposite, therefore, when piezoelectric bimorph one end be completely fixed, when the other end is free, under effect of electric field, one deck ceramic layer shrinks, and another layer elongation, thereby the piezoelectric bimorph free end will produce flexural deformation up or down, thus output action power and displacement.Employed piezoelectric bimorph adopts the working method of beam type among the present invention: an end is fixed, other end freedom.
The mechanism that the present invention proposes is characterised in that, contains two groups of piezoelectric bimorph actuated pieces, two groups of forks, two clutches, an output shaft and a base;
Described output shaft is supported on the base by sliding bearing, form two clutches by two clutch driving links and a driven member, described driven member and output shaft are fixed, and described two clutch driving links lay respectively at the both sides of driven member, and are enclosed within on the output shaft;
Described two groups of forks lay respectively at the both sides of described two clutches, each group fork all contains two dials plate and a sleeve, dial the two ends that plate is separately fixed at sleeve for two, described sleeve and output shaft constitute revolute pair, and one of them is dialled plate and fixes with its close clutch driving link;
Described two groups of piezoelectric bimorph actuated pieces lay respectively at the both sides of described two clutches, each group piezoelectric bimorph actuated piece is by piezoelectric bimorph and bearing pin is fixed constitutes, one end and the bearing pin of piezoelectric bimorph are fixed, the other end is fixed on the base, described bearing pin cooperates formation plane higher pair with groove on dialling plate, and described piezoelectric bimorph actuated piece and fork are formed swing mechanism a little.
Accurate tumbler proposed by the invention is characterized in that, it contains an output shaft, four piezoelectric bimorph actuated pieces, two forks, two clutches, two sliding bearings and base;
Described output shaft is supported on the base by two sliding bearings; Described two clutches are made up of two driving links and a driven member, described driving link under "on" position with the driven member adhesive, under off-position, separate with driven member; Described driven member and output shaft are fixed, and two driving links lay respectively at the both sides of driven member;
Described two forks are connected to the both sides of two driving links, and each fork dials plate by two and a sleeve is formed, and dial the two ends that plate is cemented in sleeve for two, and the sleeve sky is enclosed within on the output shaft, constitute revolute pair with output shaft; Described one group of plate and this driving link near driving link is fixed; Have groove dialling the end of plate away from output shaft;
Described four piezoelectric bimorph actuated pieces are divided into two groups of both sides that are positioned at described clutch driving link respectively, and each group contains two piezoelectric bimorph actuated pieces, and the axis of these two relative output shafts of piezoelectric bimorph actuated piece is symmetrically distributed; Each piezoelectric bimorph actuated piece is made up of piezoelectric bimorph and bearing pin, piezoelectric bimorph is fixed near an end and the base of output shaft, an end and bearing pin away from output shaft are fixed, insert in two grooves of dialling on the plate at described bearing pin two ends, constitutes two-freedom plane higher pair removable and that rotate with group plate.
Described clutch driving link is made up of electromagnetic core, coil and shell, coil on iron core, when coil electricity, clutch driving link and driven member adhesive.Described piezoelectric bimorph be by jig and screw on base.
Experimental results show that the present invention utilizes the vermicular movement principle, adopt two groups of piezoelectric bimorph actuated piece driven, by to two the clutch adhesives and the sequencing control of unclamping, can realize accurate rotate continuously and the unidirectional batch (-type) of big torque rotates that the terminal swing of piezoelectric bimorph is converted into output shaft; Simultaneously, by adjusting, can realize two-way arbitrarily angled continuous little rotation of output shaft to two groups of piezoelectric bimorph actuated pieces and Clutch Control sequential.The present invention is simple in structure, but has that step angle is adjustable continuously, the big precision positioning of stroke, be easy to characteristics such as control, and the present invention can be applicable to fields such as microoperation, precision assembling, precision positioning.
Description of drawings:
Fig. 1 is the precision rotation mechanism structural representation that the present invention designs.
Fig. 2 is the accurate tumbler structural representation that the present invention designs.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is the front section view of Fig. 2.
Fig. 5 is the zoomed-in view of A part among Fig. 3.
Fig. 6 is the topology view of base.
Fig. 7 is the cutaway view of clutch.
Fig. 8 is the topology view of bearing pin.
Fig. 9 is the topology view of sleeve.
Figure 10 is a topology view of dialling plate.
Figure 11 is the piezoelectric bimorph fundamental diagram.
Embodiment:
Below in conjunction with accompanying drawing, introduce content of the present invention in detail.
Among Fig. 1-Figure 10,6,11,17,23 is piezoelectric bimorph; 7,12,18,24 is bearing pin, and 37 is the rectangular channel on the bearing pin; 5,8,9,13 for dialling plate, and 39,40 for dialling the square groove on the plate, and 41 for dialling the circular hole on the plate; 2,10 is sleeve, and 38 is that the positioning boss of dialling plate is installed on the sleeve; 19,22 is the clutch driving link, and 34 is the clutch iron core, and 36 is clutch coil, and 35 is clutch outer, and 25 is the fairlead (totally 2) on the clutch outer, and 20 is the clutch driven member, and 21 is holding screw; 1,16 is the both sides floor of base, and 32,33 is the dead eye on the floor of both sides, and 31 is the base plate of base, and 29 for installing the boss (totally 4) of piezoelectric bimorph, and 30 is screw hole (totally 8); 4 is jig (totally 4), and 3 is screw (totally 8); 14 is output shaft, and 15,26 is sliding bearing, and 27 is pad, and 28 is spring.
Fig. 1 is the precision rotation mechanism that piezoelectric bimorph of the present invention drives, its basic mentality of designing is based on the vermicular movement principle, adopt the fork of two groups of piezoelectric bimorph actuated piece actuating sleeves on output shaft slightly to swing, be equipped with two clutches, by certain time sequence control, realize that the precision of output shaft is rotated.
As shown in Figure 1, piezoelectric bimorph 6,11,17,23 respectively with four piezoelectric bimorph actuated pieces of bearing pin 7,12,18,24 fixed formations, piezoelectric bimorph is away from the fixed bearing pin groove of an end of output shaft 14, the other end and base are fixed; Dial plate 5,8 and 9,13 respectively with two forks of sleeve 2,10 fixed compositions, the sleeve 2,10 on the fork constitutes revolute pairs with output shaft 14 respectively; The bearing pin 7,12,18,24 of four piezoelectric bimorph actuated pieces respectively with fork in the rectangular slot dialled on the plate 5,8,9,13 cooperates formation plane motion higher pair, form two swing mechanisms a little by four piezoelectric bimorph actuated pieces and two forks.Output shaft 14 is supported on the base by sliding bearing 15,26; Form two clutches by clutch driving link 19,22 and driven member 20, driving link 19,22 respectively with fork near clutch to dial plate 8,9 fixed, and sky is enclosed within on the output shaft 14, driven member 20 is fixed with output shaft 14; Fork, clutch and output shaft component movement transformation mechanism, this mechanism is converted into the swing of fork the continuous motion output or the unidirectional batch (-type) rotation of big torque of output shaft micro-stepping.This has just constituted the precision rotation mechanism of the piezoelectric bimorph driving that can realize the Angular Displacement stroke.Basic functional principle is as follows:
The precision rotation mechanism that described piezoelectric bimorph drives contains four piezoelectric bimorphs, and being divided into is two groups; It is characterized in that, at first make clutch driving link 22 and driven member 20 adhesives, and driven member 20 unclamps with driving link 19; Piezoelectric bimorph 6 and 23 is applied voltage and produces and be synchronized with the movement, and one is bent upwards, and another is bent downwardly, and passes motion to by bearing pin 7 and 24 and dials plate 5 and 8; Because it is fixed with clutch driving link 22 to dial plate 8, drive clutch driving links 22 swing synchronously so dial plate 8, move thereby make driven member 20 with 22 adhesives of clutch driving link drive output shafts 14.When the voltage on being applied to piezoelectric bimorph 6 and 23 reaches maximum, clutch driving link 22 and driven member 20 are unclamped; Then, shed the voltage that is added on piezoelectric bimorph 6 and 23, make it return to initial condition, finished a drive cycle of piezoelectric bimorph 6 and 23, realized that a micro-stepping of output shaft 14 rotates output.
In like manner, make clutch driving link 19 and driven member 20 adhesives, and driven member 20 unclamps with driving link 22; Piezoelectric bimorph 11 and 17 is applied voltage and produces and be synchronized with the movement, and one is bent upwards, and another is bent downwardly, and passes motion to by bearing pin 12 and 18 and dials plate 9 and 13; Because it is fixed with clutch driving link 19 to dial plate 9, drives clutch driving link 19 swing synchronously so dial plate 9, thereby make driven disc 20 drive output shaft 14 rotations.When the voltage on being applied to piezoelectric bimorph 11 and 17 reaches maximum, clutch driving link 19 and driven member 20 are unclamped; Then, shed the voltage that is added on piezoelectric bimorph 11 and 17, make it return to initial condition, finished a drive cycle of piezoelectric bimorph 11 and 17, realized that a micro-stepping of output shaft 14 rotates output.
By two groups of piezoelectric bimorphs 6 and 23 and 11 and 17 being applied the sequencing control of voltage, above-mentioned piezoelectric bimorph actuated piece cantilever end is swung up and down, as shown in figure 11, pass motion to the clutch driving link through dialling plate 5,8 and 9,13, the adhesive by solenoidoperated cluthes driving link and driven member realizes that the rotation of moment on output shaft export.The circulation said process can be realized the continuous rotation output of mechanism.By controlling the action sequence of two groups of piezoelectric bimorphs and two clutches, both can realize that the continuous micro-stepping square of output shaft rotated output, also can realize unidirectional intermittent movement output.Change the control sequence of two clutches and two groups of piezoelectric bimorph actuated pieces, can realize the two-way rotation of output shaft.Control is added on the voltage waveform of piezoelectric bimorph actuated piece, also can realize that the small step pitch in the rotating campaign output of big step pitch and the cyclic process of changing step is rotated output continuously.Basic exercise principle of the present invention that Here it is.
Based on motion shown in Figure 1, the stepping tumbler structure that piezoelectric bimorph of the present invention drives as shown in Figure 2.Illustrated piezoelectric bimorph 6 is fixed on as shown in Figure 6 the base boss 29 by jig 4 and two screws 3, and other three piezoelectric bimorphs 23,11 and 17 adopt identical fixed form to be separately fixed on other three boss of base; The output of piezoelectric bimorph 6 is cemented in the rectangular channel 37 on as shown in Figure 8 the bearing pin 7, constitutes the piezoelectric bimorph actuated piece; The two ends of bearing pin 7 constitute higher pairs and are connected with as shown in figure 10 the square groove 39 on the plate 5,8 dialled, and other three piezoelectric bimorphs 23,11 are identical with the connected mode of bearing pin 12,18,24, group plate 5,8 and 9,13 with 17; Dial plate 5,8 and sleeve 2 circular port 41 on group plate and the fixed formation fork in positioning boss 38 places of sleeve both sides as shown in Figure 9, it is fixed with clutch iron core 34 again to dial plate 8; Promptly dial plate 5,8, sleeve 2 and clutch driving link 22 are fixed, and constitute revolute pair by sleeve 2 and output shaft 14; Dial plate 9,13, the fit system of sleeve 10 and clutch driving link 19 and connected mode and above-mentioned situation are similar; Driven member 20 is fixed by holding screw and output shaft 14; The coiling of solenoid 36 is drawn by the fairlead on the clutch 25; Bearing 26,15 respectively with as shown in Figure 6 base both sides floor 1,16 on dead eye 32,33 fixed, output shaft 14 is supported on the base by sliding bearing 15,26; Spring 28 among Fig. 5 in order to axial pre tightening force, frictional force and damping force to be provided, also can carry out fine adjustment to above-mentioned power by the thickness of regulating pad 27 between pad 27 and axle sleeve 2.
Stepping tumbler corresponding shown in Figure 2, its basic functional principle is as follows:
(1) rotates counterclockwise
When clutch driving link and the driven member adhesive fixed with fork, and another clutch driving link and driven member make the piezoelectric bimorph actuated piece drive this fork counter-clockwise swing when unclamping; When fork is swung clockwise, make with fixed clutch driving link and the driven member of this fork and unclamp.
At first, make clutch coil 36 energisings fixed, make clutch driving link 22 and driven member 20 adhesives, and be in off-position, clutch 19 and driven member 20 are unclamped with the fixed clutch coil of clutch driving link 19 with clutch driving link 22; Piezoelectric bimorph 6,23 is applied voltage, make piezoelectric bimorph 6 be bent upwards, piezoelectric bimorph 23 is bent downwardly, thereby plate 5,8 is dialled in drive and clutch driving link 22 rotates counterclockwise; Because clutch driving link 22 and driven member 20 adhesives, thereby driven member 20 drive output shafts 14 rotate counterclockwise; When the voltage of piezoelectric bimorph 6 and 23 reached maximum, clutch driving link 22 unclamped with driven member 20, and made clutch driving link 19 and driven member 20 adhesives, and driven output shaft 14 and rotated counterclockwise a step this moment.Then, apply voltage piezoelectric bimorph 11 is bent upwards, piezoelectric bimorph 17 is bent downwardly; Make it be returned to initial condition and shed the voltage that acts on piezoelectric bimorph 6 and 23; This moment piezoelectric bimorph 11 and 17 ends swing drive dial plate 9 and 13 and clutch driving link 19 rotate counterclockwise, rotate counterclockwise thereby make driven member 20 with 19 adhesives of clutch driving link drive output shafts 14; When the driving voltage of piezoelectric bimorph 11 and 17 reached maximum, clutch driving link 19 unclamped with driven member 20, and clutch driving link 22 and driven member 20 adhesives shed the voltage that is applied to piezoelectric bimorph 11 and 17 and make it be returned to initial condition.The circulation said process can realize that the output shaft precision of piezoelectricity stepping rotating mechanism rotates counterclockwise continuously.Change the frequency and the amplitude of piezoelectric bimorph control voltage, can realize the continuous rotation of mechanism's output shaft different rotating speeds and different step angles (every group of angle that interior output shaft of piezoelectric bimorph one action cycle turns over).
(2) clockwise rotate
When clutch driving link and the driven member adhesive fixed with fork, and another clutch driving link and driven member make the piezoelectric bimorph actuated piece drive this fork and swing clockwise when unclamping; When the fork counter-clockwise swing, make with fixed clutch driving link and the driven member of this fork and unclamp.Concrete grammar is to change duty cycle to be applied to direction of an electric field on two groups of piezoelectric bimorphs 6,23 and 11,17 when initial: when clutch driving link 22 during with driven member 20 adhesives, piezoelectric bimorph 6,23 is applied voltage, make piezoelectric bimorph 6 be bent downwardly, piezoelectric bimorph 23 is bent upwards; When clutch driving link 19 and driven member 20 adhesives, apply voltage piezoelectric bimorph 11 is bent downwardly, piezoelectric bimorph 17 is bent upwards.Adopt with the accurate tumbler output shaft of realization and rotate counterclockwise the similar course of work, promptly can realize the output that clockwise rotates of mechanism's output shaft.Change the frequency and the amplitude of piezoelectric bimorph control voltage, can realize the continuous rotation of mechanism's output shaft different rotating speeds and different step angles.
(3) the unidirectional batch (-type) of big torque rotates
The implementation procedure that unidirectional batch (-type) rotates counterclockwise is as follows:
Make clutch driving link 22,19 and driven member 20 adhesives simultaneously, piezoelectric bimorph 6,23,11,17 is applied voltage, make piezoelectric bimorph 6,11 be bent upwards, piezoelectric bimorph 23,17 is bent downwardly, and drives group plate 5,8,9,13 and clutch driving link 22,19 etc. and rotates counterclockwise; Because clutch driving link 22,19 and driven member 20 adhesives, thereby driven member 20 drive output shafts 14 rotate counterclockwise; When the voltage on being applied to piezoelectric bimorph reaches maximum, clutch driving link 22,19 and driven member 20 unclamp, shedding the voltage that acts on the piezoelectric bimorph 6,23,11,17 makes it be returned to initial condition, driven output shaft 14 and rotated counterclockwise a step this moment, finished a period of motion of mechanism.Because four piezoelectric bimorphs drive output shaft simultaneously, thereby can export bigger torque.The circulation said process can realize that the unidirectional batch (-type) of output shaft of piezoelectricity stepping rotating mechanism rotates counterclockwise.
The implementation procedure that unidirectional batch (-type) clockwise rotates is as follows:
Make clutch driving link 22,19 and driven member 20 adhesives simultaneously, piezoelectric bimorph 6,23,11,17 is applied voltage, make piezoelectric bimorph 6,11 be bent downwardly, piezoelectric bimorph 23,17 is bent upwards.According to the above-mentioned course of work, can realize that the unidirectional batch (-type) of output shaft of piezoelectricity stepping rotating mechanism clockwise rotates.

Claims (4)

1. the precision rotation mechanism that piezoelectric bimorph drives is characterized in that, contains two groups of piezoelectric bimorph actuated pieces, two groups of forks, two clutches, an output shaft and a base;
Described output shaft is supported on the base by sliding bearing, form two clutches by two clutch driving links and a driven member, described driven member and output shaft are fixed, and described two clutch driving links lay respectively at the both sides of driven member, and are enclosed within on the output shaft;
Described two groups of forks lay respectively at the both sides of described two clutches, each group fork all contains two dials plate and a sleeve, dial the two ends that plate is separately fixed at sleeve for two, described sleeve and output shaft constitute revolute pair, and one of them is dialled plate and fixes with its close clutch driving link;
Described two groups of piezoelectric bimorph actuated pieces lay respectively at the both sides of described two clutches, each group piezoelectric bimorph actuated piece is by piezoelectric bimorph and bearing pin is fixed constitutes, one end and the bearing pin of piezoelectric bimorph are fixed, the other end is fixed on the base, described bearing pin cooperates formation plane higher pair with groove on dialling plate, and described piezoelectric bimorph actuated piece and fork are formed swing mechanism a little.
2. the accurate tumbler that drives of a piezoelectric bimorph is characterized in that, it contains an output shaft, four piezoelectric bimorph actuated pieces, two forks, two clutches, two sliding bearings and base;
Described output shaft is supported on the base by two sliding bearings; Form two clutches by two clutch driving links and a driven member, described clutch driving link under "on" position with the driven member adhesive, under off-position, separate with driven member; Described driven member and output shaft are fixed, and two driving links lay respectively at the both sides of driven member;
Described two forks are connected to the both sides of two driving links, and each fork dials plate by two and a sleeve is formed, and dial the two ends that plate is cemented in sleeve for two, and the sleeve sky is enclosed within on the output shaft, constitute revolute pair with output shaft; Described one group of plate and this driving link near driving link is fixed; Have groove dialling the end of plate away from output shaft;
Described four piezoelectric bimorph actuated pieces are divided into two groups of both sides that are positioned at described clutch driving link respectively, and each group contains two piezoelectric bimorph actuated pieces, and the axis of these two relative output shafts of piezoelectric bimorph actuated piece is symmetrically distributed; Each piezoelectric bimorph actuated piece is made up of piezoelectric bimorph and bearing pin, piezoelectric bimorph is fixed near an end and the base of output shaft, an end and bearing pin away from output shaft are fixed, insert in two grooves of dialling on the plate at described bearing pin two ends, constitutes two-freedom plane higher pair removable and that rotate with group plate.
3. the accurate tumbler that piezoelectric bimorph as claimed in claim 2 drives is characterized in that described clutch driving link is made up of electromagnetic core, coil and shell, coil on iron core, when coil electricity, clutch driving link and driven member adhesive.
4. the accurate tumbler that piezoelectric bimorph as claimed in claim 2 drives is characterized in that, described piezoelectric bimorph be by jig and screw on base.
CN200610088848XA 2006-07-20 2006-07-20 Precision rotation mechanism driven by piezoelectric double-chip and its device Expired - Fee Related CN1913329B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200610088848XA CN1913329B (en) 2006-07-20 2006-07-20 Precision rotation mechanism driven by piezoelectric double-chip and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200610088848XA CN1913329B (en) 2006-07-20 2006-07-20 Precision rotation mechanism driven by piezoelectric double-chip and its device

Publications (2)

Publication Number Publication Date
CN1913329A CN1913329A (en) 2007-02-14
CN1913329B true CN1913329B (en) 2010-11-10

Family

ID=37722139

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200610088848XA Expired - Fee Related CN1913329B (en) 2006-07-20 2006-07-20 Precision rotation mechanism driven by piezoelectric double-chip and its device

Country Status (1)

Country Link
CN (1) CN1913329B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI482417B (en) * 2013-04-22 2015-04-21 Univ Nat Sun Yat Sen Energy-recycling device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109660147A (en) * 2019-01-31 2019-04-19 南京航空航天大学 A kind of miniature multi-channel piezoelectricity steering engine

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4600854A (en) * 1984-03-05 1986-07-15 International Business Machines Corp. Piezoelectric stepping rotator
CN1434563A (en) * 2003-02-25 2003-08-06 吉林大学 Piezo electric inertia impact type multi-freedom degree precision driver

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4600854A (en) * 1984-03-05 1986-07-15 International Business Machines Corp. Piezoelectric stepping rotator
CN1434563A (en) * 2003-02-25 2003-08-06 吉林大学 Piezo electric inertia impact type multi-freedom degree precision driver

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
KAZUMASA OHNISHI, MIKIO UMED,MINORU KUROSAWA,SADAYUKI UEHA.Rotary Inchworm-Type Piezoelectric Actuator.Electricl Engineering in Japan110 3.1990,110(3),107-114.
KAZUMASA OHNISHI, MIKIO UMED,MINORU KUROSAWA,SADAYUKI UEHA.Rotary Inchworm-Type Piezoelectric Actuator.Electricl Engineering in Japan110 3.1990,110(3),107-114. *
张宏壮,曾平,华顺明,程光明,杨志刚.压电双晶片型惯性冲击式旋转精密驱动器研究.光学精密工程13 3.2005,13(3),298-304.
张宏壮,曾平,华顺明,程光明,杨志刚.压电双晶片型惯性冲击式旋转精密驱动器研究.光学精密工程13 3.2005,13(3),298-304. *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI482417B (en) * 2013-04-22 2015-04-21 Univ Nat Sun Yat Sen Energy-recycling device

Also Published As

Publication number Publication date
CN1913329A (en) 2007-02-14

Similar Documents

Publication Publication Date Title
US7378783B2 (en) Electroactive polymer torsional device
CN100581042C (en) Plane multi-freedom altrasonic electric machine of single vibrator longtitude bend sandwich changer type
CN103023374A (en) Inertia type piezoelectric linear motor
CN111181436B (en) Secondary excitation friction piezoelectric rotary driver
CN109980990A (en) Piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device and control method
CN115441769B (en) Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving
CN112383241B (en) Bidirectional inertia linear piezoelectric motor
CN115566931B (en) Two rotational degree of freedom executor based on piezoelectric wafer drive
CN1913329B (en) Precision rotation mechanism driven by piezoelectric double-chip and its device
CN1633022A (en) Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor
CN206894533U (en) Piezo-electric type multiple degrees of freedom hybrid-driven driver
CN110798094B (en) Piezoelectric linear precision driving device based on parasitic inertia principle
CN113131783B (en) Clamp-controlled inertia linear piezoelectric motor
CN205490235U (en) Asymmetric piezoelectricity rotary actuator of applied change normal pressure
Pan et al. Resonant-type piezoelectric inertial drive mechanism with asymmetric inertial masses
CN110912444A (en) Bionic creeping type piezoelectric actuator
CN103023373A (en) Two-freedom-degree rotation-line motion micro ultrasonic motor
CN110995058A (en) Novel piezoelectric rotation precision driving platform based on parasitic inertia principle
CN214480332U (en) Differential inertia type piezoelectric rotary driver
CN110912448A (en) Novel efficient piezoelectric rotation precision driving platform based on asymmetric triangular arc flexible hinge mechanism
CN105846715B (en) A kind of mutative damp piezoelectric drive motors
CN209545463U (en) Piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device
CN210225279U (en) Piezoelectric driver for improving performance based on four-foot coupling motion mode
CN202385031U (en) Piezoelectric ceramic driver driven by asymmetric voltage
CN201022181Y (en) Piezoelectricity inertia stepping driving device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101110

Termination date: 20130720