Gas and liquid concentration testing sensor and detection system
Technical field the present invention relates to a kind of pick-up unit, and particularly a kind of gas and liquid concentration testing sensor reach by its detection system of forming, and are applicable to rigorous analysis and field of measuring technique.
Background technology obtained using quite widely based on the sensor of surface plasma resonance (SPR), optical waveguide and optical fiber technology since the 1980s.Easy to use, simple in structure, the dependable performance of this class sensor, and can survey a plurality of parameters of testing sample.Their common feature is the evanescent field region that testing sample is in resonant mode (surface plasma-wave and optical guided wave).Also be referred to as the evanescent field sensor.Be applicable to of the measurement of fields such as physics, chemistry, biology, medical science to a plurality of parameters.At present, the research of this class sensor is had the gesture that is doubled and redoubled, existing a lot of all class sensors have been realized commercialization.And the sensitivity of this evanescent field sensor is mainly determined by the product of following two factors: the width of (1) resonant mode attenuated total reflection (ATR) absorption peak, and the absorption peak width is narrow more, and then sensitivity is high more.(2) resonant mode is big more in the luminous energy density of detecting area, and then sensitivity is high more.For sensor based on leakage optical waveguide and optical fiber technology, the width of resonant mode ATR absorption peak may be very narrow, but its sample is usually as the overlayer of optical waveguide or optical fiber, and the luminous energy in the overlayer only accounts for the minimum part of resonant mode luminous energy, and detection efficiency is very low.Therefore, can not do very highly usually based on the sensitivity of the evanescent field sensor of revealing optical waveguide and optical fiber technology.And,, have higher detection efficiency though there is luminous energy to be in the detecting area scope greater than half for SPR type sensor, because the absorption of metal film causes the width of its ATR absorption peak very big, be difficult to reach very high detection sensitivity equally.Use requires the characteristic wavelength of testing sample must be in the low loss window of Optical Fiber Transmission based on the Fibre Optical Sensor of optical fiber technology, and therefore the sample type that makes sensor to survey is confined in the long scope of a certain standing wave.This all is the fatal shortcoming that the evanescent field sensor is difficult to widespread use.
Summary of the invention the purpose of this invention is to provide a kind of novel optical waveguide oscillating field gas of double-sided metal coating optical waveguide structure and liquid concentration testing sensor of adopting and reaches by its detection system of forming, and is suitable for detecting the concentration of harmless or harmful all gases and liquid.
The present invention is achieved by the following technical solutions; Low-angle low index prisms that tightly be bonded on the gas liquid chamber by sealing, bottom deposit has the upper strata metallic film and sealing tightly are bonded under the gas liquid chamber and with draft tube and escape pipe and seal the novel optical waveguide oscillating field gas concentration detecting sensor that the lower metal piece that links constitutes double-sided metal coating optical waveguide structure, and the latter is positioned on the platen.
Adopt the detection system of double-sided metal coating optical waveguide type gas concentration detecting sensor, comprise sensor and light source and photoelectric receiving arrangement; The laser instrument that is positioned on the Plate support of gas concentration detecting sensor upper left side is connected coaxial with the optics aperture, optical axis points to the center of gas concentration detecting sensor upper strata metallic film, and the light that the center of assurance gas concentration detecting sensor upper strata metallic film and laser instrument send is in same level height; Also by the central shaft symmetry at its center, their position all is adjustable with the vertical metal film for photodetector and laser instrument.Photodetector is connected with computing machine by lead, and photodetector receives by laser instrument through the emission of optics aperture, through the light intensity value of double-sided metal coating optical waveguide type gas concentration detecting sensor reflection; When gas concentration value to be measured changes in the gas compartment, photodetector detects the light intensity value that the gas concentration detecting sensor reflects and changes, by computing machine the size of light intensity value is gathered, changes, analyzed and stores, just can measure and show the numerical value and the situation of change thereof of gas concentration.
Useful technique effect of the present invention is: 1. clad is a metal, can not be restricted as the sample refractive index of waveguide core sublayer, and both can be liquid, also can be gas; 2. core layer thickness can reach the submillimeter magnitude, has not only enlarged the parking space of sample, and for the superelevation rank guided mode of exciting light waveguide provides may; 3. though clad adopts metallic film, can cause absorption, theory points out, absorbing thickness along with core layer increases and reduce, and in this structure, the width of ATR absorption peak reduces 1-2 magnitude than spr sensor; 4. the propagation constant of superelevation rank guided mode is very responsive to the variation of the refractive index (sample concentration and absorption) of sample; 5. sample is in the great oscillating field of luminous energy density, and detection efficiency is high; 6. the existing evanescent field sensor of the remolding sensitivity of optical guided wave resonant mode is high one more than the order of magnitude; 7. can utilize high order guided modes, and high order guided modes is a polarization irrelevant, therefore need pass through polarization manipulation, greatly made things convenient for the use of this sensor light source.The present invention with new method realize to the detection of gas and liquid and analysis, simple in structure, cost is low, be easy to processing and make up and do not need the single polarization source, low to gas and liquid refractive index area requirement, the detection sensitivity height, practical, vast market prospect is arranged.
The present invention is further described below in conjunction with drawings and Examples for description of drawings.
Fig. 1 is the structural representation of gas and liquid concentration testing sensor.
Fig. 2 is the left view of Fig. 1
Fig. 3 is the vertical view of Fig. 1
Fig. 4 is a detection system synoptic diagram of the present invention
Embodiment
Embodiment 1 is as Figure 1-3: a kind of double-sided metal coating optical waveguide type gas that is positioned on the platen (11), gas and liquid concentration testing sensor (10) tightly are bonded at the low-angle low index prisms (1) on the gas liquid chamber (3) and are sealed lower metal piece (4) formation that tightly is bonded under the gas liquid chamber (3) by sealing; Bottom deposit in low-angle low index prisms (1) has upper strata metallic film (2), and lower metal piece (4) links with draft tube (5) and escape pipe (6) sealing.The present invention has the novel optical waveguide oscillating field of double-sided metal coating optical waveguide, this oscillating field sensor structurally, thickness as the ducting layer of sample space can reach the submillimeter magnitude, and can excite the submillimeter scale metal to coat high-order mode in the waveguide easily, used laser does not need the single polarization source yet.On method for sensing, utilize the characteristic absorption of gas to be measured, can realize selective measurement to sample.In addition, can use the general semiconductor laser instrument, therefore the sensitivity that can further reduce cost, improve instrument simultaneously as light source.
Embodiment 2 is as shown in Figure 4: a kind of detection system that adopts embodiment 1 described gas and liquid concentration testing sensor, comprise that sensor and light source and photoelectric receiving arrangement is characterized in that: be positioned at laser instrument (7) on gas concentration detecting sensor (10) the upper left side Plate support (8) and connect coaxially with optics aperture (9), optical axis points to the center (0) of metallic film (2); Also by the central shaft symmetry at its center (0), their position all is adjustable with vertical metal film (2) for photodetector (14) and laser instrument (7).Photodetector (14) is connected with computing machine (12) by lead (13).Photodetector (14) receives by the light intensity value of laser instrument (7) through optics aperture (9) emission and double-sided metal coating optical waveguide type gas concentration detecting sensor (10) reflection, when gas concentration value to be measured changes in the gas compartment, photodetector (14) detects the light intensity value that double-sided metal coating optical waveguide type gas concentration detecting sensor (10) reflects and changes, by computing machine (12) size of light intensity value is gathered, changes, analyzed and stores, just can measure and show the numerical value and the situation of change thereof of gas concentration.Because the present invention can adopt the general semiconductor laser instrument, laser incides the double-sided metal coating optical waveguide after by filtering, the position of adjusting photodetector is mapped on this photodetector the light through the reflection of double-sided metal coating optical waveguide, this detector will detect the guided wave peak in this reflective light intensity, and analytical instrument can be read the minimum point light intensity at guided wave peak.When sample gas enters gas compartment by air intake opening, because the absorption of gas, obvious variation will take place in the light intensity value of guided wave peak minimum point, just can be finally inversed by the concentration value variation of gas by the light intensity value of monitoring minimum point.