CN1862435A - Device and method for controlling atmosphere components and pressure balance in negative pressure container - Google Patents
Device and method for controlling atmosphere components and pressure balance in negative pressure container Download PDFInfo
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- CN1862435A CN1862435A CN 200610005558 CN200610005558A CN1862435A CN 1862435 A CN1862435 A CN 1862435A CN 200610005558 CN200610005558 CN 200610005558 CN 200610005558 A CN200610005558 A CN 200610005558A CN 1862435 A CN1862435 A CN 1862435A
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000007789 gas Substances 0.000 claims description 68
- 230000000087 stabilizing effect Effects 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 2
- 150000002910 rare earth metals Chemical class 0.000 abstract description 2
- 230000001276 controlling effect Effects 0.000 description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000003723 Smelting Methods 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 230000000171 quenching effect Effects 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000001996 bearing alloy Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention discloses a device and a method for controlling atmosphere components and pressure balance in a negative pressure container required by rare earth permanent magnet material manufacturing. The method of the invention is easy to operate, and the control device has simple structure and good effect.
Description
Technical field
The invention belongs to the thermal treatment field, be specifically related to air pressure balance and atmosphere control method and control device thereof in a kind of negative pressure closed container, its be mainly used in vaccum sensitive stove in rare earth permanent-magnetic material alloy, the hydrogen bearing alloy manufacture process, smelting furnace, electric arc melting quick quenching furnace, continuously dynamic crystallization, continuously in the negative pressure Technology for Heating Processing such as inducting remolten quick quenching furnace.
Background technology
Because the extensive utilization of flash set technology in fields such as amorphous, microcrystallizing alloy magnetic material.Its processing and manufacturing technology more and more comes into one's own.
At present, in the design of quick cooling and quenching, induction melting furnace, dynamic crystallization stove etc. and utilization, having following problem, at first is that gaseous tension varies with temperature and changes in the furnace chamber, influences product quality.In addition, with the production time increase, gaseous impurities content increases in the furnace chamber, and time length can have a strong impact on even block production, influences the quality of production.Because the domestic smelting furnace production time is all shorter, between 2 to 4 hours, the variation of gaseous tension size also can not have a strong impact on product quality in the furnace chamber mostly.At second problem, domestic production technology mostly adopts clean raw-material method to solve, bigger to raw-material waste like this, and for the high vacuum seal environment, this method can only be used the short time, along with the growth of time, impurity in the starting material still can influence atmosphere in the furnace chamber, growth in time degenerates gradually, and the foreign gas in the furnace chamber can get more and more, and becomes the most important factor that influences product quality.
To the control of atmosphere content in the container, generally all adopt to charge into satisfactory inert gas, simultaneously the undesirable gas of internal tank is discharged, reach the purpose of control composition.Negative reaction container (as continuous vacuum smelting furnace, gas-solid reaction stove, gas-solid, gas-liquid reaction container) all needs the atmosphere content and the pressure of container are controlled.Under positive pressure, in the inflation exhaust process, keep the container inner pressure balance comparatively simple, gas can directly be discharged by valve, but under condition of negative pressure, container inner pressure is less than ambient pressure, and gas can not directly be discharged, can only discharge by vacuum pump, because the speed of exhaust of vacuum pump is constant, under the condition that flow of aerating air changes, keep extraction flow and flow of aerating air balance, reach the condition of pressure stability, only depend on the vacuum pump exhaust of directly bleeding to reach requirement.
Summary of the invention
In order to control atmosphere composition and pressure equilibrium in the negative-pressure container, the invention provides atmosphere content and pressure equilibrium control device and method in a kind of negative-pressure container, reach the purpose of interior atmosphere content of control negative-pressure container and pressure stability.
The device that is used for interior atmosphere composition of negative-pressure container and control method for pressure balance of the present invention, comprise furnace chamber, charging valve, controlling valve, automatic control ratio valve, voltage stabilizing vacuum pump, valve, minipump, vacuum valve, gas analyzer and PLC controller, be provided with pressure transducer P in the furnace chamber; Furnace chamber is connected with charging valve, controlling valve, vacuum valve respectively, furnace chamber is also with valve, voltage stabilizing vacuum pump, the control ratio valve is connected successively with gas analyzer automatically, minipump is connected with gas analyzer, automatically the control ratio valve is connected with the voltage stabilizing vacuum pump with furnace chamber, and the PLC controller is connected with controlling valve, automatic control ratio valve, pressure transducer P, gas analyzer respectively.
Controlling valve can be set to manual controlling valve or regulate proportioning valve automatically.
Atmosphere composition and control method for pressure balance in a kind of negative-pressure container of the present invention are characterized in may further comprise the steps:
A. open vacuum valve, furnace chamber is vacuumized, reach or less than 5 * 10 up to vacuum tightness with vacuum pump or lobe pump
-1During Pa, close vacuum valve then;
B. open charging valve filling with inert gas in the furnace chamber during to 0.4Pa～0.5Pa, is closed charging valve;
C. open the controlling valve that is used to control gaseous impurities content in the furnace chamber, automatic control ratio valve, voltage stabilizing vacuum pump, valve, minipump, gas analyzer simultaneously;
D. control the flow and the interior harmful gas amount of furnace chamber of inert gas by the folding size of controlling valve, the controlling valve Control Flow, by constantly charging into the inert gas of certain flow, take away the harmful gas oxygen in the furnace chamber, keep in the furnace chamber at harmful gas content at 0～50ppm, the controlling valve flow strengthens when harmful gas content is high in the furnace chamber, and a harmful gas oxygen content hour controlling valve flow reduces;
E. control the folding size control furnace chamber internal gas pressure of automatic control ratio valve by PLC, automatically the control ratio valve is the PLC drain tap of control automatically, PLC detects furnace chamber internal gas pressure situation at any time by pressure transducer P, when the furnace chamber internal gas pressure raises, PLC controls automatic control ratio valve, its flow is increased, and discharging gas flow increases, and the furnace chamber internal gas pressure is reduced; When the furnace chamber internal gas pressure reduced, PLC controlled automatic control ratio valve, its flow is reduced or closes, and the regulating action by controlling valve makes that gas pressure intensity increases in the furnace chamber, and the gas pressure intensity in the furnace chamber is remained in 0.4Pa～0.5Pa scope;
F. open valve, the minipump that is connected with valve is extracted into the gas in the furnace chamber in the gas analyzer, can observe the situation of harmful gas oxygen in the furnace chamber by the reading of gas analyzer, for the flow size of regulating controlling valve provides foundation.
Adopted the pump valve linkage technique among the present invention, utilized the air capacity of automatic control ratio valve control vacuum pump,, reached the balance of inlet and outlet amount, thereby reach the purpose of steady pressure according to charge flow rate size control ratio opening of valves degree.Increase monitoring at any time such as injection section, discharge portion, gas analyzer and regulate atmosphere in the container, controlling valve or automatic control ratio valve are set, be used to control gaseous impurities content in the furnace chamber.Voltage stabilizing vacuum pump and automatic control ratio valve are set, are used for controlling the pressure equilibrium of negative pressure closed container.Gas analyzer, minipump and valve are set are used for analytical furnace intracavity gas impurity content, its signal passes by the automatic collection analysis of PLC, and gaseous impurities content provides reference in the furnace chamber in order to regulate automatically.Gas pressure sensor P is set, and its signal is by the automatic collection analysis of PLC, for control furnace chamber internal pressure balance provides reference.
The present invention is by being provided with controlling valve, automatic control ratio valve, gas analyzer and gas pressure sensor, effectively gaseous impurities content in the control negative-pressure container reaches pressure balanced purpose in the control negative-pressure container, the method easy operating, simple in structure, effective.
Below in conjunction with accompanying drawing the present invention is described specifically
Description of drawings
Fig. 1 is the structural representation that is used for the embodiment of interior atmosphere content of negative-pressure container and pressure equilibrium control device of the present invention
Among the figure, 1. charging valve 2. controlling valves 3. automatic control ratio valve 4. voltage stabilizing vacuum pumps
5. valve 6. minipumps 7. gas analyzers 8. vacuum valves 9. furnace chambers
Embodiment
Embodiment 1
Among Fig. 1, a kind of interior atmosphere content of negative-pressure container and pressure equilibrium control device of being used for, control device comprises furnace chamber 9, charging valve 1, controlling valve 2, automatic control ratio valve 3, voltage stabilizing vacuum pump 4, valve 5, minipump 6, vacuum valve 8, gas analyzer 7 and PLC controller, is provided with pressure transducer P in the furnace chamber 9; Furnace chamber 9 is connected with charging valve 1, controlling valve 2, vacuum valve 8 respectively, and furnace chamber 9 also is connected successively with valve 5, voltage stabilizing vacuum pump 4, gas analyzer 7, and minipump 6 is connected with gas analyzer 7; Automatically control ratio valve 3 is connected with furnace chamber 9, voltage stabilizing vacuum pump 4, and the PLC controller is connected with pressure transducer P with controlling valve 2, automatic control ratio valve 3, gas analyzer 7 respectively.Controlling valve 2 is manual controlling valve.
In the present embodiment, the step of atmosphere composition and control method for pressure balance is as follows in the negative-pressure container: furnace chamber 9 is places of total system production work, at first by vacuum valve 8 usefulness vacuum pumps or lobe pump furnace chamber 9 is vacuumized, and vacuum tightness reaches or less than 5 * 10
-1During Pa, close vacuum valve 8; By 1 pair of furnace chamber 9 filling with inert gas of charging valve, when reaching pressure and be 0.4Pa～0.5Pa, close charging valve 1.After charging valve 1 is closed, open controlling valve 2 simultaneously, regulate proportioning valve 3, voltage stabilizing vacuum pump 4, valve 5, minipump 6 and analyser 7 automatically.Control the amount of the flow and the furnace chamber 9 interior harmful gases of inert gases by controlling valve 2.Controlling valve 2 is the gas filling valve of manual Control Flow, it mainly acts on: by constantly charging into entering and flowing out of inert gas, take away the harmful gas oxygen in the furnace chamber 9, atmosphere in the maintenance furnace chamber 9 within the specific limits, controlling valve 2 flows strengthen when the harmful gas oxygen content is high in the furnace chamber 9, and harmful gas oxygen content hour controlling valve 2 flows reduce.Control the folding size of automatic control ratio valve 3 by PLC and control furnace chamber 9 internal gas pressures, the air pressure in the furnace chamber 9 are remained in the scope of 0.4Pa～0.5Pa.Automatically control ratio valve 3 is PLC drain taps of control automatically, it mainly acts on: PLC detects furnace chamber 9 internal gas pressure situations at any time by pressure transducer P, when furnace chamber 9 internal gas pressures raise, PLC controls automatic control ratio valve 3, its flow is increased, the discharge gas flow increases, and furnace chamber 9 internal gas pressures are reduced; When furnace chamber 9 internal gas pressures reduce, PLC controls automatic control ratio valve 3, its flow is reduced or close, the regulating action by automatic control ratio valve 3 remains on the numerical value of regulation the gas pressure intensities in the furnace chamber 9, thereby has guaranteed normally carrying out of system works.Open valve 5, minipump 6 is extracted into gas analyzer 7 the insides with the gases in the furnace chamber 9, can know the situation of seeing harmful gases in the furnace chamber 9 by the reading of gas analyzer 7, thereby provides foundation for the flow size adjustment of controlling valve 2.
A kind of interior atmosphere content of negative-pressure container and pressure equilibrium control device of being used for, the basic structure of device is identical with embodiment 1 with control method, difference is, controlling valve is set to regulate automatically proportioning valve, data in the gas analyzer are connected to PLC air inlet is controlled, regulate the furnace gas composition automatically.The data of gas analyzer are imported PLC into, are judged and the difference that requires atmosphere by PLC, regulate the switch size of regulating proportioning valve automatically by PLC then, just can regulate atmosphere in the furnace chamber automatically; By the data of pressure transducer P, control the switch size of automatic control ratio valve automatically by PLC, thereby keep furnace chamber internal pressure unanimity.
Claims (3)
1. one kind is used for atmosphere composition and pressure equilibrium control device in the negative-pressure container, it is characterized in that: described device comprises furnace chamber (9), charging valve (1), controlling valve (2), automatic control ratio valve (3), voltage stabilizing vacuum pump (4), valve (5), minipump (6), vacuum valve (8), gas analyzer (7) and PLC controller, and furnace chamber is provided with pressure transducer P in (9); Furnace chamber (9) is connected with charging valve (1), controlling valve (2), vacuum valve (8) respectively, also with valve (5), voltage stabilizing vacuum pump (4), control ratio valve (3), gas analyzer (7) are connected successively automatically, minipump (6) is connected with gas analyzer (7) furnace chamber (9); Automatically control ratio valve (3) is connected with voltage stabilizing vacuum pump (4) with furnace chamber (9), and the PLC controller is connected with controlling valve (2), automatic control ratio valve (3), pressure transducer P, gas analyzer (7) respectively.
2. atmosphere composition and control method for pressure balance in the negative-pressure container is characterized in that may further comprise the steps:
A. open vacuum valve (8), with vacuum system furnace chamber (9) is vacuumized, vacuum tightness reaches or less than 5 * 10
-1During Pa, close vacuum valve (8);
B. open charging valve (1), filling with inert gas in furnace chamber (9) when pressure reaches 0.4Pa～0.5Pa, is closed charging valve (1);
C. open the controlling valve (2) that is used to control the interior gaseous impurities content of furnace chamber (9), automatic control ratio valve (3), voltage stabilizing vacuum pump (4), valve (5), minipump (6), gas analyzer (7) simultaneously;
D. control the flow of inert gas and the amount of the interior harmful gas of furnace chamber (9) by the folding size of controlling valve (2);
E. control folding size control furnace chamber (9) internal gas pressure of automatic control ratio valve (3) by PLC, the gas pressure intensity in the furnace chamber (9) is remained in the scope of 0.4Pa～0.5Pa;
F. open valve (5), the minipump (6) that is connected with valve (5) is extracted into the gas in the furnace chamber (9) in the gas analyzer (7), reading by gas analyzer (7) is observed the interior harmful gas situation of furnace chamber (9), and regulates the flow size of controlling valve (2).
3. atmosphere composition and pressure equilibrium control device in a kind of negative-pressure container according to claim 1 is characterized in that: described controlling valve is manual controlling valve or regulates in the proportion valve any automatically.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100055584A CN100470434C (en) | 2006-01-12 | 2006-01-12 | Device and method for controlling atmosphere components and pressure balance in negative pressure container |
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| CNB2006100055584A CN100470434C (en) | 2006-01-12 | 2006-01-12 | Device and method for controlling atmosphere components and pressure balance in negative pressure container |
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| CN1862435A true CN1862435A (en) | 2006-11-15 |
| CN100470434C CN100470434C (en) | 2009-03-18 |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102067056A (en) * | 2008-06-23 | 2011-05-18 | 罗伯特.博世有限公司 | Control arrangement having a pressure limiting valve |
| CN101789359B (en) * | 2009-12-31 | 2012-03-07 | 北京七星华创电子股份有限公司 | Low-oxygen control system |
| CN102566613A (en) * | 2011-12-07 | 2012-07-11 | 青岛四方车辆研究所有限公司 | Air charging and discharging control device for air spring supporting system |
| CN102586723A (en) * | 2012-03-09 | 2012-07-18 | 江苏丰东热技术股份有限公司 | Method and device for automatically controlling vacuum pressure of ion chemical heat treatment furnace |
| CN101706297B (en) * | 2009-08-10 | 2012-10-17 | 浙江鼎立实业有限公司 | Digital display micropressure and micro-flow comprehensive test bed |
| CN103021252A (en) * | 2012-11-16 | 2013-04-03 | 哈尔滨工程大学 | Real-time negative pressure simulation device |
| CN103031417A (en) * | 2012-12-29 | 2013-04-10 | 江苏丰东热技术股份有限公司 | Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace |
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- 2006-01-12 CN CNB2006100055584A patent/CN100470434C/en not_active Expired - Fee Related
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| CN102067056A (en) * | 2008-06-23 | 2011-05-18 | 罗伯特.博世有限公司 | Control arrangement having a pressure limiting valve |
| CN101706297B (en) * | 2009-08-10 | 2012-10-17 | 浙江鼎立实业有限公司 | Digital display micropressure and micro-flow comprehensive test bed |
| CN101789359B (en) * | 2009-12-31 | 2012-03-07 | 北京七星华创电子股份有限公司 | Low-oxygen control system |
| CN102566613A (en) * | 2011-12-07 | 2012-07-11 | 青岛四方车辆研究所有限公司 | Air charging and discharging control device for air spring supporting system |
| CN102586723B (en) * | 2012-03-09 | 2014-08-27 | 江苏丰东热技术股份有限公司 | Method for automatically controlling vacuum pressure of ion chemical heat treatment furnace |
| CN102586723A (en) * | 2012-03-09 | 2012-07-18 | 江苏丰东热技术股份有限公司 | Method and device for automatically controlling vacuum pressure of ion chemical heat treatment furnace |
| CN103021252A (en) * | 2012-11-16 | 2013-04-03 | 哈尔滨工程大学 | Real-time negative pressure simulation device |
| CN103031417B (en) * | 2012-12-29 | 2014-12-10 | 江苏丰东热技术股份有限公司 | Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace |
| CN103031417A (en) * | 2012-12-29 | 2013-04-10 | 江苏丰东热技术股份有限公司 | Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace |
| CN104503497A (en) * | 2014-11-21 | 2015-04-08 | 京东方科技集团股份有限公司 | Pressure protection system for etching equipment and pressure protection method |
| CN104503497B (en) * | 2014-11-21 | 2017-12-05 | 京东方科技集团股份有限公司 | Pressure protective system and pressure protection method for etching apparatus |
| CN105549639A (en) * | 2015-12-09 | 2016-05-04 | 国家电网公司 | Pressure vessel auxiliary equipment control method based on PLC control |
| CN105549639B (en) * | 2015-12-09 | 2019-01-08 | 国家电网公司 | A method of the pressure vessel ancillary equipment control based on PLC control |
| CN107675145A (en) * | 2017-11-23 | 2018-02-09 | 湖南顶立科技有限公司 | A kind of vacuum equipment pressure regulator control system and vacuum equipment |
| CN107675145B (en) * | 2017-11-23 | 2019-09-17 | 湖南顶立科技有限公司 | A kind of vacuum equipment pressure regulator control system and vacuum equipment |
| CN111536803A (en) * | 2020-05-08 | 2020-08-14 | 北京汇磁粉体材料有限公司 | Precise vacuum atmosphere heat treatment furnace with precise control |
| CN112578824A (en) * | 2020-11-13 | 2021-03-30 | 云南国钛金属股份有限公司 | Reactor pressure stability control device and method |
| CN112578824B (en) * | 2020-11-13 | 2022-11-18 | 云南国钛金属股份有限公司 | Reactor pressure stability control device and method |
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| CN100470434C (en) | 2009-03-18 |
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