CN103031417B - Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace - Google Patents

Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace Download PDF

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Publication number
CN103031417B
CN103031417B CN201210589795.5A CN201210589795A CN103031417B CN 103031417 B CN103031417 B CN 103031417B CN 201210589795 A CN201210589795 A CN 201210589795A CN 103031417 B CN103031417 B CN 103031417B
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gas
vacuum
thermal treatment
valve
vacuum oven
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CN103031417A (en
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杨晔
陈红进
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Dafeng District Productivity Promotion Center Yancheng City
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Jiangsu Fengdong Thermal Technology Co Ltd
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Abstract

The invention discloses a furnace gas balancing replacement system and a balancing replacement method for a vacuum heat treatment furnace. The furnace gas balancing replacement system for the vacuum heat treatment furnace comprises a gas inlet system and an exhaust system, wherein the gas inlet system comprises a gas inlet pipeline; a control device is arranged on the gas inlet pipeline; the exhaust system comprises an exhaust pipeline; a vacuum pumping device is arranged on the exhaust pipeline; the balancing replacement system of the furnace gas for the vacuum heat treatment furnace further comprises a sealed space; and the gas inlet system is connected with the exhaust system through the sealed space. The furnace gas balancing replacement system for the vacuum heat treatment furnace can ensure that oil gas, dirt and the like volatized when a workpiece treated by the vacuum heat treatment furnace is heated are continuously replaced out of the heated sealed space, and ensures that the quality of the workpiece on which a surface smoothness requirement is high is qualified; and the pressure of inert gas in the furnace can be maintained at a stable numerical value all the time in a whole heating process.

Description

A kind of thermal treatment vacuum oven furnace gas balance exchange system and balance method of replacing
Technical field
The present invention relates to a kind of thermal treatment vacuum oven furnace gas balance exchange system and balance method of replacing, belong to metal heat treatment equipment technical field.
Background technology
Vacuum oven is used as one of equipment of the heat treatment industry renewal and renovation of equipment replacement, its major reason is that product parts surface-brightening, low or non oxidizing, the performance of vacuum oven processing is good, precision is high, in vacuum oven production run, easily realize energy-conservation, lower consumption, subtract dirt, belong to cleaner production equipment, meet the requirement of current environmental protection.In vacuum, gas molecule is few, and it is large that the free path of molecule becomes, and therefore can produce light rare metal, refractory metal, rare metal and other special alloy material etc. that under normal pressure, cannot obtain.
Vacuum metallurgy has the advantages such as less energy-consumption, the rate of recovery be high, pollution-free, good in economic efficiency compared with traditional metallurgy, therefore be more and more subject to people's attention.But the research of vacuum metallurgy process depends on the exploitation of vacuum metling equipment to a great extent.Along with the development of vacuum metallurgy technology, vacuum metling equipment needs constantly perfect, improves level of automation, makes vacuum metling equipment to intellectuality, integrated direction development.Temperature is the important technical parameter of Metal smelting, in Metal smelting process, the accurate control of temperature has often been determined to the quality of product.Along with the development of electronics, computer and network technologies, automation control system has experienced combination type analog Controlling System, centralized digital control system, dcs, develops into field bus control system and Ethernet system stage.The development of Controlling System presents to the direction of decentralized, networking, intelligent development.Wherein, especially remarkable with aspect networking tendency such as Automation of Manufacturing Process, instrument monitoring diagnosis.Distributed control is exactly that local computer is monitored and controlled remote equipment by network system, comprises data gathering, monitoring and the maintenance of equipment.The distributed control of system is one of gordian technique of main equipment safe and stable operation, is also to improve Mechatronic Systems working efficiency and reliability, carries out the basis of Predictive Maintenance and precognition management.
Thermal treatment requires high workpiece by the surface smoothness of vacuum oven processing, and what before conventionally requiring, cleaning will be very is clean, but owing to being subject to many-sided factor such as cleaning equipment cleansing power, the shape of workpiece own, is difficult to workpiece surface to clean up.Workpiece is in the time of heat, and oily vapour, steam and other dirt on surface all evaporate, and at high temperature with workpiece surface generation chemical reaction, thereby pollutes workpiece surface, makes the defective or performance of workpiece quality of processing can not get effective lifting.
Summary of the invention
In view of the problem that above-mentioned prior art exists, the present invention is proposed.
Therefore one of them the technical problem that, the present invention will solve is that the surface smoothness that how to overcome thermal treatment vacuum oven processing in prior art requires the defect of high cleaning equipment for work-piece cleansing power deficiency.
For solving the problems of the technologies described above, the invention provides following technical scheme:
Vacuum oven furnace gas balance exchange system for a kind of thermal treatment, comprises inlet system and exhaust system,
Described inlet system comprises intake ducting, on described intake ducting, is provided with control device;
Described exhaust system comprises gas exhaust duct, is provided with extracting vacuum device on described gas exhaust duct;
Described thermal treatment also comprises an enclosed space with vacuum oven furnace gas balance exchange system, and described inlet system is connected by described enclosed space with described exhaust system.
A kind of preferred version as thermal treatment of the present invention with vacuum oven furnace gas balance exchange system, wherein: on described intake ducting, be also provided with mass flow controller.
A kind of preferred version as thermal treatment of the present invention with vacuum oven furnace gas balance exchange system, wherein: described control device comprises reducing valve, automatically controlled on-off valve, is close to road flowrate control valve and main road flowrate control valve.
A kind of preferred version as thermal treatment of the present invention with vacuum oven furnace gas balance exchange system, wherein: on described gas exhaust duct, be also provided with gas filter.
A kind of preferred version as thermal treatment of the present invention with vacuum oven furnace gas balance exchange system, wherein: on described gas exhaust duct, be also provided with control device, described control device comprises automatically controlled on-off valve He Bang road flowrate control valve.
A kind of preferred version as thermal treatment of the present invention with vacuum oven furnace gas balance exchange system, wherein: described extracting vacuum device is vacuum pump.
In addition, the technical problem that the present invention further will solve is how to utilize thermal treatment vacuum oven furnace gas balance exchange system workpiece to be cleared up to the problem of balance displacement.
For solving the problems of the technologies described above, the invention provides following technical scheme: a kind of balance method of replacing that utilizes thermal treatment vacuum oven furnace gas balance exchange system, first described enclosed space is pumped into high vacuum state, in the time that thermal treatment reaches high vacuum by the enclosed space vacuum tightness of vacuum oven heating, to the rare gas element that pours certain pressure in it; Then control the air input of inlet system and the free air delivery of exhaust system, make air inlet speed and deflation rate substantially equal, thereby realized the balance displacement of gas.
A kind of preferred version as thermal treatment of the present invention with the balance method of replacing of vacuum oven furnace gas balance exchange system, wherein: the air input of described inlet system is carried out real-time control inputs by mass flow controller is set.
A kind of preferred version as thermal treatment of the present invention with the balance method of replacing of vacuum oven furnace gas balance exchange system, wherein: the free air delivery of described exhaust system is controlled by flowrate control valve is set.
Oil gas, the dirt etc. that thermal treatment of the present invention can ensure the processing of thermal treatment vacuum oven workpiece with vacuum oven furnace gas balance exchange system evaporates in the time of heating is constantly displaced the enclosed space of heating, ensured that effects on surface smooth finish requires high workpiece quality qualified; Meanwhile, in whole heat-processed, can remain that the pressure of rare gas element in stove maintains a stable numerical value.It provides the furnace gas balance exchange system of a kind of thermal treatment vacuum oven, can constantly replace the gas in enclosed space, keeps pressing equilibrium of forces simultaneously.
The present invention provides a kind of corresponding balance method of replacing simultaneously, and its tool has the following advantages:
(l) steady running of guarantee equipment, improves operational efficiency;
(2) reduce failure rate, ensure security, the work-ing life of extension device;
(3) control mode is flexible, controls quality and improves, and quality product is obviously improved;
(4) automatization control, reduces labor intensity, and raises the management level.
Brief description of the drawings
Fig. 1 is the structural representation of one embodiment of the invention thermal treatment vacuum oven furnace gas balance exchange system.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Be exemplary below by the embodiment being described with reference to the drawings, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In figure, exhaust system 1, inlet system 2 and enclosed space 3; Exhaust system 1 comprises vacuum pump 101, corrugated tube 102, automatically controlled on-off valve 103, is close to road flowrate control valve 104, flapper valve 105 and gas filter 106; Inlet system 2 comprises intake ducting 201, reducing valve 202, mass flow controller 203, automatically controlled on-off valve 204, is close to road flowrate control valve 205, glass rotameter 206, is close to the automatically controlled on-off valve 207 in road, main road flowrate control valve 208, the automatically controlled on-off valve 209 of main road and corrugated tube 210.
As shown in Figure 1, in this embodiment, vacuum oven furnace gas balance exchange system for this thermal treatment, inlet system 2 and exhaust system 1 are comprised, described inlet system 2 comprises intake ducting 201, on described intake ducting 201, be provided with control device and mass flow controller 203,, control the flow of rare gas element input herein the instruction accurate that mass flow controller 203 can send according to PLC.
Wherein, the control device arranging on intake ducting 201 is reducing valve 202, automatically controlled on-off valve 204, be close to road flowrate control valve 205, glass rotameter 206, be close to the automatically controlled on-off valve 207 in road, main road flowrate control valve 208 and the automatically controlled on-off valve 209 of main road.
Described exhaust system 1 comprises gas exhaust duct, is provided with extracting vacuum device on described gas exhaust duct, and in this embodiment, this extracting vacuum device is vacuum pump 101; On described gas exhaust duct, be also provided with gas filter 106, in order to filter out fouling product; On described gas exhaust duct, be also provided with control device, described control device is automatically controlled on-off valve 103, be close to road flowrate control valve 104 and flapper valve 105.
Described inlet system 2 is connected by described enclosed space 3 with described exhaust system 1.In the time that thermal treatment reaches high vacuum by enclosed space 3 vacuum tightnesss of vacuum oven heating, then to the rare gas element that pours certain pressure in it, now the pressure state in enclosed space is to have certain pressure, simultaneously again in vacuum state.Such state, the evaporation of oil gas while being conducive to heat (vacuum state, the saturated vapor pressure of oil gas reduces, volatile), the while is conducive to again the replacement cycles of gas.The more important thing is that the rare gas element in the enclosed space 3 that will make will constantly be replaced, also will keep the pressure-stabilisation of enclosed space 3 simultaneously, Surface Quality requires the final ability of high workpiece qualified like this.
This system comprises three part compositions, inlet system 2, exhaust system 1 and enclosed space 3.In the time that inlet system 2 equates from the rate of air sucked in required in enclosed space with exhaust system to the air input in enclosed space 3, just can maintain enclosed space in a constant pressure.Wherein the free air delivery of exhaust system can manually be controlled deflation rate by flowrate control valve is set, after deflation rate is determined, the air input of inlet system can be carried out real-time control inputs by mass flow controller is set, make air inlet speed and deflation rate substantially equal, thereby realized displacement and the pressure maintenance of gas.
In the enclosed space 3 of inlet system 2 heat treated with vacuum oven, pour wherein rare gas element by different flows, the rare gas element that the oil gas that exhaust system 1 is constantly evaporated by workpiece from the interior outside extraction of enclosed space 3 etc. pollutes.
Exhaust system 1 is constantly extracted the rare gas element that the oil gas that evaporated by workpiece etc. pollutes out from enclosed space 3 by vacuum pump 101, rare gas element first filters out the solid dirt in rare gas element etc. through gas filter 106, then pass through flapper valve 105, automatically controlled on-off valve 103 and corrugated tube 102, finally discharged by vacuum pump 101.Wherein be close to road flowrate control valve 104 and can be used for regulating the speed of vacuum pump 101 Exhaust Gas from enclosed space 3, the deflation rate of vacuum pump 101 is constant, close automatically controlled on-off valve 103, in rare gas element Cong Bang road flowrate control valve 104, flow through, the aperture size of being close to road flowrate control valve 104 has determined the number of vacuum pump 101 Exhaust Gas.
In inlet system 2, rare gas element is by admission passage 201, main road flowrate control valve 208, the automatically controlled on-off valve 209 of main road and corrugated tube 2010 pour fast rare gas element in enclosed space 3 greatly flow, in the time soon arriving setup pressure value, the automatically controlled on-off valve 209 of main road is closed, again by reducing valve 202, mass flow controller 203, the micrometeor pilot piping that automatically controlled on-off valve 204 and corrugated tube 210 form pours rare gas element in enclosed space 3, until arrival setup pressure value, control the flow of rare gas element input the instruction accurate that wherein mass flow controller 203 can send according to PLC.Be close to road flowrate control valve 205, the automatically controlled on-off valve 207 in glass rotameter 206He Bang road and be the emergency bypass of the micrometeor pilot piping forming as mass flow controller 203, in the time that mass flow controller 203 breaks down, it is alternative that in order not make to produce interruption, road is close in use, manually controls the size of flow by being close to road flowrate control valve 205.
In the time that the vacuum tightness of enclosed space 3 reaches high vacuum, then to the rare gas element that pours certain pressure in enclosed space 3, such as 0.5Bar, such pressure, is vacuum, the evaporation of oil gas while being conducive to heat, there is again certain pressure, be conducive to the replacement cycles of gas simultaneously.In the time that inlet system 2 equates from the rate of air sucked in required in enclosed space 3 with exhaust system 1 to the air input in enclosed space, just can maintain enclosed space 3 in a constant pressure.Wherein the free air delivery of exhaust system 1 can be by being close to road flowrate control valve 104 manual regulation, after deflation rate is determined, the air input of inlet system 2 can be carried out real-time control inputs by mass flow controller 203, make air inlet speed and deflation rate substantially equal, thereby realized displacement and the pressure maintenance of gas.
It should be noted that, above embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement technical scheme of the present invention, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of claim scope of the present invention.

Claims (4)

1. a vacuum oven furnace gas balance exchange system for thermal treatment, comprises inlet system (2) and exhaust system (1),
Described inlet system (2) comprises intake ducting, and described intake ducting is provided with control device on (201);
Described exhaust system (1) comprises gas exhaust duct, is provided with extracting vacuum device on described gas exhaust duct;
It is characterized in that: described thermal treatment vacuum oven furnace gas balance exchange system also comprises an enclosed space (3), and described inlet system (2) is connected by described enclosed space (3) with described exhaust system (1); On described intake ducting (201), be also provided with mass flow controller (203); Control the flow of rare gas element input the instruction accurate that described mass flow controller (203) can send according to PLC; Described control device comprises reducing valve (202), automatically controlled on-off valve (204), is close to road flowrate control valve (205) and main road flowrate control valve (208); On described gas exhaust duct, be also provided with control device, described control device comprises automatically controlled on-off valve (103) He Bang road flowrate control valve (104).
2. vacuum oven furnace gas balance exchange system for thermal treatment as claimed in claim 1, is characterized in that: on described gas exhaust duct, be also provided with gas filter (106).
3. vacuum oven furnace gas balance exchange system for thermal treatment as claimed in claim 1, is characterized in that: described extracting vacuum device is vacuum pump (101).
4. one kind is utilized the balance method of replacing of thermal treatment as claimed in claim 1 vacuum oven furnace gas balance exchange system, it is characterized in that: first described enclosed space (3) is pumped into high vacuum state, in the time that thermal treatment reaches high vacuum by enclosed space (3) vacuum tightness of vacuum oven heating, to the rare gas element that pours certain pressure in it; Then control the air input of inlet system (2) and the free air delivery of exhaust system (1), make air inlet speed and deflation rate substantially equal, thereby realized the balance displacement of gas; The air input of described inlet system (2) is carried out real-time control inputs by mass flow controller (203) is set; The free air delivery of described exhaust system (1) is controlled by flowrate control valve is set.
CN201210589795.5A 2012-12-29 2012-12-29 Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace Active CN103031417B (en)

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CN107215580A (en) * 2016-03-22 2017-09-29 中国石油化工股份有限公司 External floating roof tank sealing ring is monitored and protection device
CN107881306A (en) * 2017-11-24 2018-04-06 北京七星华创磁电科技有限公司 A kind of control pressurer system and control method
CN109351099A (en) * 2018-12-06 2019-02-19 江苏纵湖涂装设备产业研究院有限公司 A kind of coating waste gas processor of adjustable exhaust gas flow
CN110157882A (en) * 2019-06-11 2019-08-23 上海富驰高科技股份有限公司 A kind of stainless steel aging of middle temperature heat treatment method and its vacuum drying oven
CN113736982A (en) * 2020-05-27 2021-12-03 中国科学院上海应用物理研究所 Gas protection device for post-welding online heat treatment and use method thereof

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Effective date of registration: 20160421

Address after: Nanxiang Road 224100 Jiangsu province Dafeng Yancheng City Development Zone No. 333

Patentee after: JIANGSU FENGDONG HEAT TREATMENT AND SURFACE MODIFICATION ENGINEERING TECHNOLOGY RESEARCH CO.,LTD.

Address before: Nanxiang Road in Dafeng City, Jiangsu province 224100 Yancheng City economic and Technological Development Zone No. 333

Patentee before: JIANGSU FENGDONG THERMAL TECHNOLOGY Co.,Ltd.

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Effective date of registration: 20220419

Address after: 224100 6, Jinfeng South Street, Dafeng District, Yancheng City, Jiangsu.

Patentee after: Dafeng District Productivity Promotion Center, Yancheng City

Address before: 224100 No. 333, Nanxiang West Road, Dafeng Development Zone, Yancheng City, Jiangsu Province

Patentee before: JIANGSU FENGDONG HEAT TREATMENT AND SURFACE MODIFICATION ENGINEERING TECHNOLOGY RESEARCH CO.,LTD.

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Application publication date: 20130410

Assignee: JIANGSU FENGTAI FLUID MACHINERY TECHNOLOGY Co.,Ltd.

Assignor: Dafeng District Productivity Promotion Center, Yancheng City

Contract record no.: X2023980046390

Denomination of invention: A Vacuum Furnace Gas Balance Replacement System and Balance Replacement Method for Heat Treatment

Granted publication date: 20141210

License type: Common License

Record date: 20231113

Application publication date: 20130410

Assignee: JIANGSU YANFA MACHINERY CO.,LTD.

Assignor: Dafeng District Productivity Promotion Center, Yancheng City

Contract record no.: X2023980046385

Denomination of invention: A Vacuum Furnace Gas Balance Replacement System and Balance Replacement Method for Heat Treatment

Granted publication date: 20141210

License type: Common License

Record date: 20231113