CN107881306A - A kind of control pressurer system and control method - Google Patents
A kind of control pressurer system and control method Download PDFInfo
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- CN107881306A CN107881306A CN201711195599.9A CN201711195599A CN107881306A CN 107881306 A CN107881306 A CN 107881306A CN 201711195599 A CN201711195599 A CN 201711195599A CN 107881306 A CN107881306 A CN 107881306A
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D11/00—Process control or regulation for heat treatments
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- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The present invention provides a kind of control pressurer system, including vacuum chamber, source of the gas, multi-stage vacuum pump group and control unit；Vacuum chamber is connected by air inlet pipeline with source of the gas, and air inlet pipeline is provided with intake valve；Vacuum chamber is connected by exhaust pipe with multi-stage vacuum pump group, and exhaust pipe is provided with high vacuum valve；Intake valve, high vacuum valve and multistage vacuum pump group are connected with control unit respectively, and control unit is according to the size of target control pressure, the pumping speed of control multi-stage vacuum pump group, to realize that the pressure in vacuum drying oven is adjusted.The present invention provides a kind of compress control method, including step：Obtain target control pressure；According to target control pressure and preset value, the keying of control high pumping rate pump group and low pumping speed pump group, if target control pressure is higher than preset value, high pumping rate pump group is closed, and low pumping speed pump group is opened；If target control pressure is less than preset value, high pumping rate pump group is opened with low pumping speed pump group.Air inflow need not be changed, cost is low；And pressure control range is big.
Description
Technical field
The present invention relates to Pressure Control Technology field, and in particular to a kind of control pressurer system and control method.
Background technology
Because technical process needs in vacuum heat treatment equipment, stability contorting pressure is needed in a certain stage.Current pressure
Force control system can only realize the pressure stability control of a small range.To realize large range of Stress control, conventional solution
Method is increase air inflow.
But following defect is still suffered from by way of increasing air inflow：1) the increased amplitude of pressure control range is small, still without
Method meets the needs of pressure control range at this stage；2) because air inlet is typically chosen inert gas, air inflow increase, can cause into
This increase.
The content of the invention
(1) technical problems to be solved
It is contemplated that at least solves one of technical problem present in prior art or correlation technique.It is therefore, of the invention
A purpose be to propose that a kind of control range is big, and the low control pressurer system of cost and control method.
(2) technical scheme
In order to solve the above-mentioned technical problem, the present invention provides a kind of control pressurer system, including vacuum chamber, source of the gas, multistage
Vacuum pump group and control unit；Wherein, the vacuum chamber is connected by air inlet pipeline with the source of the gas, and on the air inlet pipeline
Provided with intake valve；The vacuum chamber is connected by exhaust pipe with the multi-stage vacuum pump group, and the exhaust pipe is provided with
High vacuum valve；The intake valve, high vacuum valve and multistage vacuum pump group are connected with described control unit respectively, described control unit
According to the size of target control pressure, the pumping speed of the multi-stage vacuum pump group is controlled, to realize that the pressure in the vacuum drying oven is adjusted
Section.
Wherein, the multi-stage vacuum pump group includes low pumping speed pump group and high pumping rate pump group, the low pumping speed pump group, high pumping rate
Pump group and high vacuum valve are sequentially connected.
Wherein, backing line, institute are provided between the air inlet of the high vacuum valve and the air inlet of the low pumping speed pump group
Backing line is stated provided with valve is taken out in advance, the connecting line between the low pumping speed pump group and high pumping rate pump group is provided with preceding step valve,
It is described pre- to take out valve and the preceding step valve is connected with described control unit respectively.
Wherein, the low pumping speed pump group includes the first vavuum pump and the second vavuum pump, and the high pumping rate pump group includes the 3rd
Vavuum pump.
Wherein, the connecting line of the high vacuum valve and the vacuum chamber is provided with the first bypass pipe, first bypass
Pipe is provided with the first atmospheric valve.
Wherein, the connecting line between first vavuum pump and second vavuum pump is provided with the second bypass pipe, institute
State the second bypass pipe and be provided with the second atmospheric valve.
Wherein, in addition to flowmeter and pressure gauge, the flowmeter is on the air inlet pipeline, for controlling air inlet
Amount, the pressure gauge are used to detecting the pressure of the vacuum chamber, and the flowmeter and the pressure gauge respectively with the control
Unit connects.
Wherein, proportioning valve is additionally provided with the exhaust pipe, the proportioning valve is connected with described control unit.
The present invention also provides a kind of compress control method, comprises the following steps：
Obtain target control pressure；According to the target control pressure and preset value, the high pumping rate pump group and institute are controlled
The keying of low pumping speed pump group is stated, it is specific as follows：
If the target control pressure is higher than the preset value, the high pumping rate pump group is closed, the low pumping speed pump group
Open；If the target control pressure is less than the preset value, the high pumping rate pump group is opened with the low pumping speed pump group.
Wherein, in addition to：Gather the real-time pressure of the vacuum chamber；According to the real-time pressure and target control pressure,
The flowmeter on the air inlet pipeline is controlled, it is specific as follows：
If the real-time pressure is higher than the target control pressure, reduce the open degree of the flowmeter；If the reality
When pressure be less than the target control pressure, then increase the open degree of the flowmeter.
(3) beneficial effect
Compared with prior art, the invention has the advantages that：
The present invention provides a kind of control pressurer system and control method, by source of the gas and multi-stage vacuum pump group into vacuum chamber
Inflation/deflation, the pressure in vacuum chamber is controlled, and avoided in heat treatment process, vacuum indoor temperature change generated in case causes shadow to pressure
Ring.In addition, size of the control unit according to target control pressure, the pumping speed of control multi-stage vacuum pump group, to realize in vacuum drying oven
Pressure regulation；When pumping speed is big, rate of air sucked in required increase, and then the pressure in vacuum chamber is maintained relatively low scope；Pumping speed hour,
Rate of air sucked in required reduces, and then improves the pressure in vacuum chamber；On the one hand, without changing air inflow, cost is low；On the other hand, it is multistage
The pumping speed adjustable extent of vacuum pump group is big, can significantly adjust the pressure of vacuum chamber, and then make target control pressure limit
Become big.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present disclosure or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some disclosed embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these figures.
Fig. 1 is a kind of structural representation of control pressurer system of the present invention；
Fig. 2 is a kind of schematic flow sheet of compress control method of the present invention；
Description of reference numerals
1- vacuum chambers；2- sources of the gas；The vavuum pumps of 3- first；The vavuum pumps of 4- second；The vavuum pumps of 5- the 3rd；6- takes out valve in advance；7- is high
Vacuum valve；Step valve before 8-；9- intake valves；10- flowmeters；11- pressure gauges；The atmospheric valves of 12- first；The atmospheric valves of 13- second.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Following instance
For illustrating the present invention, but it is not limited to the scope of the present invention.
In the description of the invention, it is necessary to explanation, unless otherwise indicated, " multiple " be meant that two or two with
On；The orientation of the instruction such as term " on ", " under ", "left", "right", " interior ", " outer ", " front end ", " rear end ", " head ", " afterbody "
Or position relationship is based on orientation shown in the drawings or position relationship, is for only for ease of the description present invention and simplifies description, and
It is not instruction or implies signified device or element there must be specific orientation, with specific azimuth configuration and operation, therefore
It is not considered as limiting the invention.In addition, term " first ", " second ", " the 3rd " etc. are only used for describing purpose, and can not
It is interpreted as indicating or implying relative importance.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
Embodiment 1：
As shown in figure 1, a kind of control pressurer system provided for the present embodiment, including vacuum chamber 1, source of the gas 2, vacuum pump group
And control unit；Wherein, vacuum chamber 1 is connected by air inlet pipeline with source of the gas 2, and air inlet pipeline is provided with intake valve 9；Vacuum chamber
1 is connected by exhaust pipe with vacuum pump group, and exhaust pipe is provided with high vacuum valve 7；Intake valve 9, high vacuum valve 7 and multistage
Vacuum pump group is connected with control unit respectively；Control unit controls multi-stage vacuum pump group according to the size of target control pressure
Pumping speed, to realize that the pressure in vacuum drying oven is adjusted.
In the present embodiment, source of the gas is filled with inert gas into vacuum chamber 1；Further, inert gas is argon gas；It is multistage true
The gas outlet of empty pump group is connected with air or exhaust gas processing device, and multi-stage vacuum pump group can realize it is continuous, continual stepless
Speed governing.
In the present embodiment, target control pressure is, it is necessary to the default pressure that pressure reaches in vacuum drying oven 1 in actual moving process
Power.
In the present embodiment, vacuum pump group includes high pumping rate pump group and low pumping speed pump group；Low pumping speed pump group, high pumping rate pump group and
High vacuum valve is sequentially connected.Further, prime pipe is provided between the air inlet of high vacuum valve and the air inlet of low pumping speed pump group
Road.Backing line is provided with and takes out valve 6 in advance.Connecting line between low pumping speed pump group and high pumping rate pump group is provided with preceding step valve.In advance
Take out valve 6 and preceding step valve 8 is connected with control unit respectively.
Further, low pumping speed pump group includes the first vavuum pump 3 and the second vavuum pump 4, and the pumping speed of the first vavuum pump 3 is less than
Second vavuum pump 4；High pumping rate pump group includes the 3rd vavuum pump 5.First vavuum pump 3, the second vavuum pump 4, the 3rd vavuum pump 5 and height
Vacuum valve 7 is sequentially connected, and the exhaust of the first vavuum pump 3 is connected with air or device for recovering tail gas.In the present embodiment, the first vacuum
Pump 3 is slide valve pump, and two-stage vacuum pump 4 is lobe pump, and the 3rd vavuum pump 5 is diffusion pump.
It should be noted that high pumping rate pump group and the quantity and type of the vavuum pump in low pumping speed pump group in the present embodiment
By way of example only, the present embodiment does not limit high pumping rate pump group and the particular number of the vavuum pump in low pumping speed pump group, this area
Technical staff can be configured according to the system requirements of reality.
Below by specific work process, further detailed description.
During work, control unit control intake valve 9 is opened, and source of the gas 2 is filled with argon gas into vacuum chamber 1, and maintain air inlet
Measure constant.
When target control pressure is low, control unit control is taken out valve 6 in advance and closed, and high vacuum valve 7 is opened with preceding step valve 8, and first
Vavuum pump 3, the second vavuum pump 4 and the 3rd vavuum pump 5 are opened, and increase rate of air sucked in required；
When target control pressure is high, control unit control high vacuum valve 7 is closed with preceding step valve 8, is taken out valve 6 in advance and is opened, and first
The vavuum pump 4 of vavuum pump 3 and second is opened, and the 3rd vavuum pump 5 is closed, and reduces rate of air sucked in required.
Further, proportioning valve is additionally provided with exhaust pipe, proportioning valve is connected with control unit.Target control hypertonia
When, control unit control high vacuum valve 7 is closed with preceding step valve 8, is taken out valve 6 in advance and is opened, the first vavuum pump 3, the second vavuum pump 4 and the
Three vavuum pumps 5 are closed, and adjust proportioning valve, reduce the latus rectum of exhaust pipe, reduce rate of air sucked in required, improve the pressure in vacuum chamber.
Further, the connecting line of high vacuum valve 7 and vacuum chamber 1 is provided with the first bypass pipe, is set on the first bypass pipe
There is the first atmospheric valve 12；Further, the connecting line between the first vavuum pump 3 and the second vavuum pump 4 is provided with the second bypass
Pipe, the second bypass pipe are provided with the second atmospheric valve 13.First atmospheric valve 12 and the second atmospheric valve 13 are safety valve.
A kind of control pressurer system of the present embodiment offer, the inflation/deflation into vacuum chamber by source of the gas and multi-stage vacuum pump group,
The pressure in vacuum chamber is controlled, and is avoided in heat treatment process, vacuum indoor temperature change generated in case impacts to pressure.In addition,
Multi-stage vacuum pump group includes high pumping rate pump group and low pumping speed pump group, and control unit controls low according to the size of target control pressure
The keying of pumping speed pump group and high pumping rate pump group, to realize that the pressure in vacuum drying oven is adjusted；When target control pressure is low, high pumping rate pump
Group is opened with low pumping speed pump group simultaneously when, rate of air sucked in required increase；When target control pressure is high, high pumping rate pump group is closed, low pumping speed pump
When group is opened, rate of air sucked in required reduces；On the one hand, without changing air inflow, cost is low；On the other hand, low pumping speed pump group and high pumping rate
Pump group coordinates, and rate of air sucked in required adjustable extent is big, can significantly adjust the pressure of vacuum chamber, and then make target control pressure limit
Become big.
Embodiment 2：
The present embodiment is substantially the same manner as Example 1, brief for description, during the description of the present embodiment, no longer
Technical characteristic same as Example 1 is described, only illustrates the present embodiment difference from Example 1：
Also include flowmeter 10 and pressure gauge 11.Flowmeter 10 is on air inlet pipeline, for controlling air inflow.Pressure gauge
11 pressure for detecting vacuum chamber 1.Flowmeter 10 and pressure gauge 11 are connected with control unit respectively.In the present embodiment, pass through
The open degree of PID control flowmeter 10；Pressure gauge 11 is on the connecting line between high vacuum valve 7 and vacuum chamber 1.
Below by specific work process, further detailed description.
Vacuum pump group adjustment finishes, and rate of air sucked in required keeps stable.Control unit is according to the feedback information and target of pressure gauge 11
Control pressure, control the open degree of flowmeter 10.Specifically, if real-time pressure is higher than target control pressure, reduce flowmeter
Open degree, reduce air inflow, and then reduce vacuum chamber in pressure, be close to target control pressure；If real-time pressure is low
In target control pressure, then increase the open degree of flowmeter, increase air inflow, and then increase the pressure in vacuum chamber, connect it
Close-target control pressure.
It should be noted that the quantity and type of the unlimited constant-pressure meter of the present embodiment, those skilled in the art can be according to true
Gas is filled with empty room 1, selects the pressure gauge 11 of respective type.
The present embodiment provides a kind of control pressurer system, under conditions of rate of air sucked in required keeps constant, by adjusting flowmeter
Open degree, adjust the air inflow of air inlet pipeline, the pressure in vacuum chamber is more nearly target control pressure, maintain vacuum drying oven
The stabilization of interior pressure.In addition, adjustment flowmeter only carries out trickle regulation to the pressure in vacuum chamber, make it closer to target control
Pressing pressure, the change of air inflow is little, is still maintained at the situation of small air inflow.
Embodiment 3：
The present embodiment provides a kind of compress control method, comprises the following steps：
S1, obtain target control pressure；
S2, according to target control pressure and preset value, the keying of control high pumping rate pump group and low pumping speed pump group, specifically such as
Under：
Intake valve 9 is opened, and source of the gas 2 is filled with argon gas into vacuum chamber 1, and maintains air inflow constant.
If target control pressure is less than preset value, valve 6 being taken out in advance and is closed, high vacuum valve 7 is opened with preceding step valve 8.First vacuum
Pump 3, the second vavuum pump 4 and the 3rd vavuum pump 5 are run；
If target control pressure is higher than preset value, high vacuum valve 7 is closed with preceding step valve 8, is taken out valve 6 in advance and is opened, the first vacuum
The vavuum pump 4 of pump 3 and second is opened, and the 3rd vavuum pump 5 is closed.
It should be noted that the present embodiment does not limit the concrete numerical value of preset value, those skilled in the art can be according to reality
Vacuum pump group and air inflow be determined.
The present embodiment provides a kind of compress control method, and when target control pressure is higher than preset value, high pumping rate pump group is closed,
Low pumping speed pump group is opened, and reduces rate of air sucked in required, and then improves the pressure in vacuum chamber, is close to target control pressure；Target control
When pressing pressure is less than preset value, high pumping rate pump group is opened with low pumping speed pump group, increases rate of air sucked in required, and then reduce in vacuum chamber
Pressure, it is close to target control pressure.On the one hand, without changing air inflow, you can realize and adjust control to the pressure of vacuum chamber
System, cost are low；On the other hand, low pumping speed pump group coordinates with high pumping rate pump group, can significantly adjust the pressure of vacuum chamber, make
Pressure control range increase in vacuum chamber.
Embodiment 4：
The present embodiment is substantially the same manner as Example 3, brief for description, during the description of the present embodiment, no longer
Technical characteristic same as Example 3 is described, only illustrates the present embodiment difference from Example 3：
A kind of compress control method that the present embodiment provides, in addition to：
S3, the real-time pressure for gathering vacuum chamber 1；
S4, according to real-time pressure and target control pressure, control the flowmeter 10 on air inlet pipeline, it is specific as follows：
If real-time pressure is higher than target control pressure, reduce the open degree of flowmeter 10, reduce air inflow, and then reduce
Pressure in vacuum chamber 1, it is close to target control pressure；If real-time pressure is less than target control pressure, increase flowmeter
10 open degree, increase air inflow, and then increase the pressure in vacuum chamber 1, be close to target control pressure.
The present embodiment provides a kind of compress control method, under conditions of rate of air sucked in required keeps constant, by adjusting flowmeter
Open degree, adjust the air inflow of air inlet pipeline, the pressure in vacuum chamber is more nearly target control pressure.In addition, air inlet
The change of the air inflow of pipeline is little, is still maintained at the situation of small air inflow, and cost is low.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
God any modification, equivalent substitution and improvements made etc., should be included in the scope of the protection with principle.
Claims (10)
1. a kind of control pressurer system, it is characterised in that including vacuum chamber, source of the gas, multi-stage vacuum pump group and control unit；Its
In, the vacuum chamber is connected by air inlet pipeline with the source of the gas, and the air inlet pipeline is provided with intake valve；The vacuum chamber
Connected by exhaust pipe with the multi-stage vacuum pump group, and the exhaust pipe is provided with high vacuum valve；The intake valve, height
Vacuum valve is connected with described control unit respectively with multistage vacuum pump group, and described control unit is big according to target control pressure
It is small, the pumping speed of the multi-stage vacuum pump group is controlled, to realize that the pressure in the vacuum drying oven is adjusted.
2. equipment according to claim 7, it is characterised in that the multi-stage vacuum pump group is taken out including low pumping speed pump group with height
Fast pump group, low pumping speed pump group, high pumping rate pump group and the high vacuum valve are sequentially connected.
3. control pressurer system according to claim 2, it is characterised in that the air inlet of the high vacuum valve with it is described low
Backing line is provided between the air inlet of pumping speed pump group, the backing line is provided with and takes out valve in advance, the low pumping speed pump group and height
Connecting line between pumping speed pump group is provided with preceding step valve, and pre- valve and the preceding step valve taken out connects with described control unit respectively
Connect.
4. control pressurer system according to claim 3, it is characterised in that the low pumping speed pump group includes the first vavuum pump
With the second vavuum pump, the high pumping rate pump group includes the 3rd vavuum pump.
5. control pressurer system according to claim 4, it is characterised in that the company of the high vacuum valve and the vacuum chamber
Adapter road is provided with the first bypass pipe, and first bypass pipe is provided with the first atmospheric valve.
6. control pressurer system according to claim 4, it is characterised in that first vavuum pump and second vacuum
Connecting line between pump is provided with the second bypass pipe, and second bypass pipe is provided with the second atmospheric valve.
7. control pressurer system according to claim 1, it is characterised in that also including flowmeter and pressure gauge, the stream
Gauge is on the air inlet pipeline, and for controlling air inflow, the pressure gauge is used for the pressure for detecting the vacuum chamber, and institute
State flowmeter and the pressure gauge is connected with described control unit respectively.
8. according to the control pressurer system described in claim any one of 1-7, it is characterised in that be additionally provided with the exhaust pipe
Proportioning valve, the proportioning valve are connected with described control unit.
9. a kind of control method of control pressurer system according to claim 1, it is characterised in that comprise the following steps：
Obtain target control pressure；According to the target control pressure and preset value, control the high pumping rate pump group with it is described low
The keying of pumping speed pump group, it is specific as follows：
If the target control pressure is higher than the preset value, the high pumping rate pump group is closed, and the low pumping speed pump group is opened；
If the target control pressure is less than the preset value, the high pumping rate pump group is opened with the low pumping speed pump group.
10. control method according to claim 9, it is characterised in that also include：
Gather the real-time pressure of the vacuum chamber；According to the real-time pressure and target control pressure, the air inlet pipeline is controlled
On flowmeter, it is specific as follows：
If the real-time pressure is higher than the target control pressure, reduce the open degree of the flowmeter；If the pressure in real time
Power is less than the target control pressure, then increases the open degree of the flowmeter.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711195599.9A CN107881306A (en) | 2017-11-24 | 2017-11-24 | A kind of control pressurer system and control method |
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| CN201711195599.9A CN107881306A (en) | 2017-11-24 | 2017-11-24 | A kind of control pressurer system and control method |
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Cited By (4)
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| TWI719807B (en) * | 2019-04-18 | 2021-02-21 | 大陸商北京七星華創流量計有限公司 | Chamber pressure control method and device, and semiconductor equipment |
| CN113739067A (en) * | 2021-09-02 | 2021-12-03 | 西北工业大学太仓长三角研究院 | Dual-cavity-based hydrogen charging control device, hydrogen charging control method and equipment |
| CN113917964A (en) * | 2021-12-13 | 2022-01-11 | 仙人长(天津)医疗科技有限公司 | Control system for maintaining stability of environment in low-pressure and low-oxygen animal model cabin |
| CN116008487A (en) * | 2023-03-27 | 2023-04-25 | 珩辉光电测量技术(吉林)有限公司 | Multi-concentration greenhouse gas calibration device with vacuum purging function |
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| CN113739067A (en) * | 2021-09-02 | 2021-12-03 | 西北工业大学太仓长三角研究院 | Dual-cavity-based hydrogen charging control device, hydrogen charging control method and equipment |
| CN113917964A (en) * | 2021-12-13 | 2022-01-11 | 仙人长(天津)医疗科技有限公司 | Control system for maintaining stability of environment in low-pressure and low-oxygen animal model cabin |
| CN116008487A (en) * | 2023-03-27 | 2023-04-25 | 珩辉光电测量技术(吉林)有限公司 | Multi-concentration greenhouse gas calibration device with vacuum purging function |
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