CN1782882A - Apparatus and method for marking an identifying code by using laser beam - Google Patents
Apparatus and method for marking an identifying code by using laser beam Download PDFInfo
- Publication number
- CN1782882A CN1782882A CN 200510125046 CN200510125046A CN1782882A CN 1782882 A CN1782882 A CN 1782882A CN 200510125046 CN200510125046 CN 200510125046 CN 200510125046 A CN200510125046 A CN 200510125046A CN 1782882 A CN1782882 A CN 1782882A
- Authority
- CN
- China
- Prior art keywords
- laser beam
- identification code
- mentioned
- printing
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
A method and device for marking an identification code on an article to be marked on a stage by means of a laser beam. The laser beam outputted from an exposure unit is so scanned as to deflect in time series in order in a direction perpendicular to the relative movement direction with respect to the stage. The irradiation is shifted synchronously in the relative movement direction. The irradiated points on the article are arranged like orthogonal coordinates. Another method and device is for marking arrays of identification codes while one exposure unit is moving by one pitch in the relative movement direction.
Description
The application is dividing an application of following application:
Denomination of invention: the Method of printing and the device that utilize the identification code of laser beam
The applying date: on October 24th, 2002
Application number: 02821192.8
Technical field
The present invention relates to be labeled Method of printing and the device of printing identification code on the article with laser beam, in more detail, relate in liquid crystal panel manufacturing process etc. Method of printing and the device of on the substrate of coating photoresist, printing the identification code that is used to carry out course management, qualitative control etc. with laser beam.
Background technology
In general, in liquid crystal panel manufacturing process, for the glass substrate that has applied photoresist (being photosensitive resin), except that circuitous pattern being exposed with image exposure apparatus, with the identification code exposure device substrate identification code, panel identification code etc. is being exposed, after perhaps utilizing peripheral exposure device that substrate periphery unwanted resist is partly partly exposed, utilize developing apparatus to carry out development treatment.Be divided into polylith by the glass substrate that will carry out such development treatment, make liquid crystal panel.
Figure 28 illustration after exposure-processed, carried out the glass substrate of development treatment as mentioned above.
Exposing so that when polylith liquid crystal panel 51 lines up multiple row on glass substrate 50, printed the substrate identification code 50a that is used to carry out course management, qualitative control etc. in substrate periphery.In addition, on glass substrate 50, also printed be divided into polylith liquid crystal panel 51 back to each liquid crystal panel 51 additional alignment numbering etc. so that the panel identification code 51a that can discern specific liquid crystal panel 51, also printed the additional disjunction positional information of each file etc. so that can be the disjunction substrate identification code 50b of each liquid crystal panel 51 of disjunction unit management with the file.
As mentioned above, large-scale glass substrate 50 is being separated into the occasion that the small-sized liquid crystal panel 51 of polylith is made, is needing disjunction substrate identification code 50b, panel identification code 51a.But, self-evident, appellations such as the substrate identification code 50a here, disjunction substrate identification code 50b, panel identification code 51a, cut apart the number etc. be an example eventually, they are with the variations such as kind of liquid crystal panel.
Now, as the method for printing aforesaid substrate identification code 50a, identification codes such as disjunction substrate identification code 50b, panel identification code 51a, adopt following method: to being fixed on the exposing unit on the constant position, utilize NC control that the platform of bearing glass substrate is moved with constant speed on one side, by means of laser beam being branched off into multi beam, making these multi-stripe laser bundles select irradiation, print identification code by this on one side to the assigned position on the glass substrate.
But, existing Method of printing since as mentioned above 1 laser beam is branched off into multi beam, when making this multi-stripe laser bundle select to shine to the assigned position on the glass substrate, be the platform of bearing glass substrate to be relatively moved on one side, carry out on one side, thereby the mutual point of irradiation of light beam often takes place depart from, because this departs from often to produce aspect beam shape, energy and disperses, and identification code can not be printed as uniform concentration, shape.
In addition, the exposing unit that existing Method of printing has had laser beam irradiation mechanism owing to one side makes and the platform of bearing substrate relatively move, shine identification code to print by column scan on one side, so when liquid crystal panel carries out miniaturization, when the panel number arranged on each piece substrate increases, scanning irradiation number of times must increase, thereby the problem that exists throughput rate to reduce.As the measure that prevents that throughput rate from reducing, though can consider to increase the number of the exposing unit that every printing equipment is provided with, number is set if just increase, then producing needs to enlarge the problem that position, device become huge that is provided with.
Summary of the invention
The object of the present invention is to provide: Yi Bian when exposing unit and platform are relatively moved, Yi Bian when printing identification code, this identification code can be printed as the Method of printing and the device of the identification code of utilizing laser beam of uniform concentration, shape with laser beam.
Another object of the present invention is to provide: do not make device huge and can print identification code expeditiously, and the Method of printing and the device of the identification code of utilizing laser beam of boosting productivity.
Reach the Method of printing of the identification code of the present invention of above-mentioned previous purpose, be that the platform that makes carrying be labeled article relatively moves with the exposing unit that disposes above this platform, utilization is labeled the method that article are printed identification code from the laser beam of above-mentioned exposing unit output above-mentioned, it is characterized in that: make from the laser beam of above-mentioned exposing unit output with the direction of the above-mentioned direction quadrature that relatively moves in chronological order successively skew ground scan, make this direction of illumination depart from the above-mentioned direction that relatively moves simultaneously, the above-mentioned point of irradiation that is labeled on the article is arranged by rectangular coordinate.
The printing equipment of the present invention of implementing said method is characterised in that, constitute above-mentioned exposing unit with the following device: carrying platform that is labeled article and the exposing unit that disposes above this platform are relatively moved, make from the laser beam of this exposing unit output with the direction of the above-mentioned direction quadrature that relatively moves on the beam deflection device that scans of skew ground successively in chronological order; And the direction of illumination of the laser beam that has made by this beam deflection device deflection departs from the apparatus for correcting direction of the above-mentioned direction that relatively moves.
In addition, reach another Method of printing of the present invention of above-mentioned previous purpose, be that the platform that makes carrying be labeled article relatively moves with the exposing unit that disposes above this platform, utilization is labeled the method that article are printed identification code from the laser beam of above-mentioned exposing unit output above-mentioned, it is characterized in that: the rectangular coordinate on the surface that is labeled article on above-mentioned platform or this platform is tilted to the above-mentioned direction that relatively moves, by means of make from the laser beam of above-mentioned exposing unit output with the direction of the above-mentioned direction quadrature that relatively moves in chronological order successively skew ground scan, the above-mentioned point of irradiation that is labeled on the article is arranged by rectangular coordinate.
The device of the present invention of implementing above-mentioned another Method of printing is characterised in that, constitute above-mentioned exposing unit with the following device: the platform that can make carrying be labeled article relatively moves with the exposing unit that disposes above this platform, the rectangular coordinate that makes the surface that is labeled article on above-mentioned platform or this platform simultaneously tilts to the above-mentioned direction that relatively moves, by means of make from the laser beam of this exposing unit output with the direction of the above-mentioned direction quadrature that relatively moves on the beam deflection device that scans of skew ground successively in chronological order; Will be by this beam deflection device deflection the projecting optical device that amplifies of laser beam; And the apparatus for correcting direction that changes the direction of illumination of the laser beam of sending from this projecting optical device.
According to above-mentioned the present invention, since make from the laser beam of exposing unit output on the direction of the direction quadrature that relatively moves of exposing unit and platform in chronological order successively deflection branch scan, and direction of illumination proofreaied and correct, so that eliminate departing from of irradiation time difference between the light beam adjacent on the direction with this direction quadrature that relatively moves, so the energy distribution of each light beam, shape do not have significantly change, can print shape, the uniform identification code of concentration.
In addition, reach the Method of printing of the identification code of the present invention of an above-mentioned back purpose, be that the platform that makes carrying be labeled article on one side relatively moves with the exposing unit that disposes above this platform, from above-mentioned exposing unit laser beam irradiation is labeled on the article above-mentioned on one side, in accordance with regulations spacing is printed as the rectangular method of multiple row with a plurality of identification codes on the direction that relatively moves, and it is characterized in that: above-mentioned 1 exposing unit move along the direction that relatively moves 1 spacing during print the identification code of multiple row.
In addition, the device of the present invention of implementing above-mentioned Method of printing is characterised in that: carrying platform that is labeled article and the exposing unit that disposes above this platform are arranged to and can be relatively moved, above-mentioned exposing unit is arranged on the rectangular laser beam irradiation mechanism that the above-mentioned spacing that is labeled on the article on the direction that relatively moves in accordance with regulations is printed as a plurality of identification codes multiple row; Simultaneously this laser beam irradiation mechanism is provided with the angle change device that the direction of illumination that makes laser beam changes on the direction of intersecting with the above-mentioned direction that relatively moves.
According to the invention described above, since utilize exposing unit relatively move 1 spacing during idle period of time print the identification code of the row of adjacency, and a plurality of row have been printed, so identical with existing Method of printing, relatively move 1 spacing during, can print the identification code of the above number of twice.Therefore, do not increase number of exposing units etc., can realize the increase of turnout yet in order to avoid install hugely.
Description of drawings
Fig. 1 is the skeleton diagram that example illustrates the printing equipment of identification code of the present invention.
Fig. 2 is the output curve diagram that an example of the laser beam of using among the present invention is shown.
(a)～(d) of Fig. 3 illustrates the key diagram that laser beam is carried out the state of deflection operation with the beam deflection mechanism in the device of the present invention.
Fig. 4 is the key diagram that the state that laser beam in the device of the present invention exposes to substrate is shown.
Fig. 5 is the key diagram that the flat mirror reflects mechanism of the direction of illumination that changes laser beam in the device of the present invention is shown.
Fig. 6 is the key diagram that another flat mirror reflects mechanism of the direction of illumination that changes laser beam in the device of the present invention is shown.
Fig. 7 is the key diagram that the another flat mirror reflects mechanism of the direction of illumination that changes laser beam is shown in the device of the present invention.
Fig. 8 be illustrate need not method of the present invention the key diagram to the exposure method of substrate.
Fig. 9 illustrates the key diagram to the exposure method of substrate that utilizes method of the present invention.
Figure 10 illustrates another the routine key diagram to the exposure method of substrate that utilizes method of the present invention.
Figure 11 is the figure of the time dependent state of deflection angle that the laser beam of the continuous output of using among the present invention is shown.
Figure 12 be illustrate do not make deflection among the present invention light beam form directional light and only it carried out the key diagram of the situation of optically focused with projecting lens.
Figure 13 is that example illustrates another routine skeleton diagram that utilizes the printing equipment of laser beam of the present invention.
Figure 14 is another routine skeleton diagram that the beam deflection mechanism that uses in the device of Figure 13 is shown.
Figure 15 is the key diagram that utilizes the identification code that the present invention prints.
Figure 16 illustrates another the routine key diagram that utilizes the identification code that the present invention prints.
Figure 17 is the skeleton diagram that example illustrates the printing equipment that is made of another example of the present invention.
Figure 18 illustrates the key diagram that the printing equipment that utilizes Figure 17 carries out the operation of multiple row printing.
Figure 19 is the key diagram that the scanning irradiation sequence when with existing method the substrate of Figure 29 being carried out the exposure of panel identification code is shown.
Figure 20 is the key diagram that the scanning irradiation sequence when with method of the present invention the substrate of Figure 29 being carried out the exposure of panel identification code is shown.
Figure 21 illustrates another routine key diagram that the printing equipment that utilizes Figure 17 carries out the operation of multiple row printing.
Figure 22 is the key diagram that the another example of the operation that utilizes method of the present invention to carry out the multiple row printing is shown.
Figure 23 is the key diagram that the another example of the operation that utilizes method of the present invention to carry out the multiple row printing is shown.
Figure 24 is the key diagram that the another example of the operation that utilizes method of the present invention to carry out the multiple row printing is shown.
Figure 25 is the key diagram that the another example of the operation that utilizes method of the present invention to carry out the multiple row printing is shown.
Figure 26 is the key diagram that the another example of the operation that utilizes method of the present invention to carry out the multiple row printing is shown.
Figure 27 is the signature image pattern of identification code.
Figure 28 is that example is illustrated in the planimetric map that has carried out the substrate of development treatment after the exposure-processed.
Figure 29 illustrates the planimetric map that the many substrates of block number has been disposed the example of identification code.
Embodiment
Fig. 1 illustration reach the identification code printing equipment that utilizes laser beam of the present invention of above-mentioned previous purpose.
The 1st, exposing unit, the 2nd, substrate 50 is remained on the platform of its upper surface.After applying photoresist (being photosensitive resin) on the surface of substrate 50, it is placed on the platform 2 as being labeled article.1 of exposing unit is provided with 2 groups that are arranged in parallel in the drawings, but can on whole Widths of substrate 50 multiple row be set.
The substrate 50 of coating photoresist is sent on the platform 2 by connecting gears such as not shown transfer robot, conveyers on the surface.When being provided with on the platform 2, make it respectively at x direction of principal axis and the independently mobile driving mechanism of y direction of principal axis when x direction of principal axis that the long side direction and the short side direction of rectangle is decided to be rectangular coordinate from the plane and y direction of principal axis; And with Surface Vertical the axle be the rotating mechanism (all not shown) that the center makes its rotation, also be provided with a plurality of attractions hole and many base plate supports legs (not shown) from the teeth outwards with manner.
Being transmitted substrate 50 that mechanism sends into is placed on from the outstanding base plate supports leg in the surface of platform 2.Then, the base plate supports leg descends, and substrate 50 drop on the platform 2, again after, utilize negative pressure to attracting the effect in hole, substrate 50 is adsorbed on the surface that remains on platform 2.
Because the position when substrate 50 is placed on platform 2 is always inconstant, so measure how many reference positions of registration in advance departed from, set the reference position according to this measured value.About the assay method of position and without particular limitation, can measure with displacement transducer or ccd video camera and by means of the determining displacement method of Flame Image Process etc.Perhaps also can be used in before substrate 50 remained on the platform 2 from laterally pushing the method that contraposition is carried out at the position that becomes benchmark.
By means of NC control, the platform 2 that has kept substrate 50 is moved to the exposure starting position of identification code according to the data of registering in advance.Register by operation in advance the exposure starting position, has made it to be in correction calculation the state of bias.
Exposing unit 1 is branched off into the laser beam 11 directly advanced and the laser beam 12 that change direction by means of beam splitter 21 with it from 1 laser beam 10 of LASER Light Source (not shown) pulse output.The pulse of laser beam 10 output for example as shown in Figure 2, at a high speed and alternatively, repeat with pulse mode during t
aLuminous A and during t
bDelustring B.
Exposing unit 1 usefulness beam splitter 21 will be branched off into 11 and 12 from 1 laser beam 10 of LASER Light Source (not shown) output, and the laser beam of directly advancing 11 is changed angle by prism 22.In addition, also can replace prism 22 as the angle change device with level crossing.The laser beam 12 and 13 that has changed angle after the branch becomes laser beam 14,14a～14f, the 14z that has been changed angle by this beam deflection mechanism 23 in chronological order by beam deflection mechanism 23 respectively.These laser beam are corrected by lens 24 and are parallel beam 15,15a～15f, 15z.
Then, parallel beam 15,15a～15f, 15z are handled by the mode of Fig. 3 (a)～(d) by transmitting filter 25, and the light beam 15 and the 15z of the unnecessary scope of cut only make the assigned position to substrate 50 shine.
Fig. 3 (a) shows not by the outgoing state of the laser beam of beam deflection mechanism 23 deflections (so-called 0 light).0 laser beam, 14 scioptics 24 that do not shine become 0 laser beam 15 of being interdicted by transmitting filter 25 with deflecting.In addition, about transmitting filter 25, so long as can be as substitute to the parts of accepting or rejecting selection by the light beam of beam deflection mechanism 23, for example also can be with aperture stop etc.In addition, transmitting filter 25 also not necessarily will be configured in the downstream of lens 24 as shown in the figure like that, as long as be configured in beam deflection mechanism 23 and can between the substrate 50 of parts as being labeled.
Fig. 3 (b)～(d) show by beam deflection mechanism 23 changed beam angle, the outgoing state of the laser beam (so-called 1 light) selecting to shine.When utilizing so-called acoustooptic effect that beam deflection mechanism 23 is applied control signal (not shown) with certain constant frequency, except that 0 laser beam of not deflection, also as Fig. 3 (b) shown in, ejaculation deflection 1 laser beam 14a.Become 1 time parallel laser beam 15a behind these 1 laser beam 14a scioptics 24, select 1 laser beam 16a shining by becoming behind the transmitting filter 25.
From the deflection angle of 1 laser beam of beam deflection mechanism 23 outgoing frequency change with the electric signal that applies.Shown in Fig. 3 (c), become 1 time parallel laser beam 15f behind 1 laser beam 14f scioptics 24 of deflection irradiation, select 1 laser beam 16f shining by becoming behind the transmitting filter 25.In addition, shown in Fig. 3 (d), become 1 the laser beam 15z that is interdicted by transmitting filter 25 behind 1 laser beam 14z scioptics 24 of deflection irradiation.
From beam deflection mechanism 23, except that can penetrating these 0 light, 1 light, can also penetrate the light that is called-1 light, 2 light etc. and the light of other modulation compositions.But, these light or interdicted by transmitting filter 25, or by the framework of self blocking, perhaps because their energy is little, that its optical processing as not ejaculation is almost no problem.
As shown in Figure 1, by means of platform 2 is moved on one side in arrow F direction with constant speed v, make on one side multi-stripe laser bundle 18a～18f in chronological order successively with the direction of this moving direction quadrature on scanning, expose, print this identification code C (15a) with this.
In the printing of this identification code, under the situation that level crossing 31 is fixed with constant angle, when laser beam 18a～18f scans in the mode with this moving direction quadrature successively for the substrate 50 that moves in arrow F direction, because staggering (time difference) of the irradiation of each laser beam moment, the exposure directions of these exposure stations a, b, c, d, e, f departs from (with reference to Fig. 8) successively obliquely to moving direction.Then, exposure station g, h, i, j, k, l during laser beam 18a～18f scanning, with and subsequent exposure station m, n, o, p, q, r also with the run-off the straight similarly of above-mentioned situation, thereby identification code C becomes skew shape.
In addition, the point that is surrounded by solid line among illustrated exposure station a, b, c...q, the r is the point of actual exposure, and is not by laser beam irradiation thereby the point that do not carry out overexposure by the point of dotted line.Exactly, the point of this dotted line is non-exposure station, and because with dashed lines shows this point, is called exposure station for convenience's sake.
In exposing unit of the present invention, because as shown in Figure 5, level crossing 31 is that the center rotates in the direction of arrows by means of level crossing rotating mechanism 32 with the turning axle 31a parallel with long side direction, so the skew successively on the moving direction F of platform 2 (substrate 50) in chronological order of the direction of illumination of the laser beam 17a that is reflected～17f.Therefore, as shown in Figure 9, moving synchronously of the direction of scanning of laser beam 18a～18f and platform 2 is offset on moving direction F successively obliquely, consequently exposure station a, b, c, d, e, the f of laser beam 18a～18f, exposure station g, h, i, j, k, l then, and exposure station m, n, o, p, q, r again are arranged in the state of rectangular coordinate.Therefore, printed and be arranged in latticed identification code C equably.
In illustrated example, as the method for the direction of scanning that makes laser beam 18a～18f to the moving direction F inclination of platform 2 (substrate 50), as shown in Figure 5, plane mirror 31 is rotated, but also can be as shown in Figure 6, turning axle 32a is installed in the mode of quadrature in centre at the long side direction of plane mirror 31, by means of level crossing rotating mechanism 32 this turning axle 31a is rotated in the direction of arrows.In addition, also can as shown in Figure 7 plane mirror be made polygon mirror 33, by means of level crossing rotating mechanism 32 with this polygon mirror 33 the axle be that turning axle makes its rotation.
In addition, also can use miscellaneous part and the above-mentioned level crossings of device replacement such as prism, biprism.
Said method all is to make the reflecting surface of level crossing variable, still, also can change 31 setting angle of exposing unit 1 or plane mirror in advance, as shown in Figure 9, the beam flying direction not with substrate moving direction quadrature, but have certain angle.Consequently, even when the light beam exposure directions is configured to substrate moving direction F quadrature, also can obtain action effect same as described above.Perhaps, also can as shown in figure 10 the moving direction F (direction relatively moves) of platform 2 (substrate 50) be tilted from the plane to the beam flying direction.
The laser beam that the present invention uses except that the laser beam of pulse output, so long as can change the light beam of deflection angle at a high speed, also can be continuously the laser beam of output.When being the laser beam of continuously output,, be t during establishing that the deflection angle θ of light beam switches if as shown in figure 11
1, be t during the deflection angle θ of light beam is indeclinable
2, then during two in illumination beams all.But, if with during t
2Compare, during t
1Enough short, and be sensitization degree to resist do not make a difference during, then can on the position of regulation, expose.
Energy distribution in the laser beam is in fact often inhomogeneous, at this moment, as long as it is abundant to give the energy of photoresist, can carry out sensitization.In addition, though because factors such as the installation accuracy of the sensitivity of actual exposure energy and photoresist, optical system, surface reflections, strictly speaking, exposure station often is not complete square, and is almost no problem aspect identification code visual.By means of the shape that changes light filter and lens, at interval, combination, the shape of light beam can freely become circle, polygon etc.
In the example of Fig. 1, to beam splitter 21 situation that 1 laser beam branches into 2 uses being illustrated, but this branches also can be more than 3, does not perhaps carry out branch and directly uses 1 light beam.In addition, about beam splitter, as long as can with light beam branch just can, be not particularly limited, also can use other devices such as half-reflecting mirror.
In addition, in the example of Fig. 1, utilize collector lens 24 will be by 23 deflections of beam deflection mechanism laser beam 14a～13f become directional light.But, in the present invention, and nonessential laser beam after the deflection is become directional light, also can be as Figure 12 be illustrative, will do not become directional light by the laser beam of beam deflection mechanism 23 broadenings, and directly reflected by level crossing 31, carry out optically focused with optical devices such as projecting lens 26, on substrate 50, shine exposure.In addition, with deflection laser beam again during line focusing employed projection optical system can be limited system or infinite system, the piece number of employed level crossing also is arbitrarily.
In the time will changing the direction of identification code, can scan by the direction that changes platform and print.Behind the identification code end exposure platform is being moved on the substrate launching position, removing absorption, the base plate supports leg is risen, substrate is being stated from the substrate transfer mechanism sends substrate., once more unexposed substrate sent into to carry out exposing operation, behind end exposure, send, repeat this a series of work thereafter.
In addition, in the example of Fig. 1,, utilize beam deflection mechanism 23 to carry out multistage deflection irradiation as device with laser-beam deflection branch.Also can be made into following structure: example as shown in figure 13 is such, and 23 in beam deflection mechanism carries out the selection irradiation of luminous and delustring, and the deflection of laser beam is manipulated by the polygon mirror 28 of level crossing rotating mechanism 30 rotations and undertaken.In addition, as polygon mirror 28 at this moment, example that also can be as shown in figure 14 is like that with level crossing 29 left rotation and right rotation.
In the example of Fig. 1, make exposing unit 1 be stationary state, make substrate keep can moving independently respectively at the x of rectangular coordinate direction of principal axis and y direction of principal axis with platform 2.But, also can concern therewith on the contrary, exposing unit 1 is moved respectively independently at the x of rectangular coordinate direction of principal axis and y direction of principal axis.
In addition, in the occasion that is arranged side by side the multiple row exposing unit, preferably, the exposure position of identification code can be changed arbitrarily by means of utilizing travel mechanism to make the interval between these exposing units can become size arbitrarily.
According to above-mentioned Method of printing of the present invention and device, since make from the laser beam of exposing unit output on the direction of the direction quadrature that relatively moves of exposing unit and platform in chronological order successively deflection branch scan, thereby proofreaied and correct direction of illumination, eliminated and the direction of this direction quadrature that relatively moves on the departing from of irradiation time difference between the adjacent light beam, do not change so the energy distribution of each light beam, shape have significantly, can print shape, the uniform identification code of concentration.
Figure 17 illustration reach the identification code printing equipment that utilizes laser beam of the present invention of an above-mentioned back purpose.
In Figure 17, exposing unit 1, platform 2, to remain on substrate that is labeled article 50 on this platform 2 etc. identical with the illustrative device of Fig. 1.Substrate 50 constitutes by applying photosensitive resin (photoresist) from the teeth outwards.
In addition, be exposed unit 1 beam splitting from 1 laser beam 10 of LASER Light Source output, make its laser beam 12,13 that branches into 2 bundles become the laser beam 14～14z that has been changed angle by beam deflection mechanism 23 in chronological order respectively, utilize lens 24 to make them become parallel beam 15～15z, carry out the such processing of Fig. 3 (a)～(d) with transmitting filter 25 again, the light beam of the unnecessary scope of cut, also all the situation with Fig. 1 is identical for these.
As mentioned above, be carried out the laser beam 16a～16f that selects by light filter 25 and changed irradiating angle by level crossing 31 change devices such as optical angle such as grade.Laser beam 17a～the 17f that has been changed angle by level crossing 31 is become laser beam 18a～18f by lens 26 optically focused, and irradiation has applied the substrate 50 of photoresist, makes photoresist sensitization.To the lens 26 general lens that are called F θ lens that use, still, also can use other lenses, also other optical components can be used in combination in addition.
In the said structure of printing equipment of the present invention, turning axle to above-mentioned level crossing 31 is installed rotating mechanism 32, rotation by means of this rotating mechanism 32 is tilted level crossing 31, makes by the direction of illumination of level crossing 31 laser light reflected bundle 17a～17f and moves on the y direction of principal axis.In addition, the other rotating mechanism 35 that has with the turning axle of the direction of the rotating shaft direct cross of rotating mechanism 32 is installed on the installing frame 34 of the L shape that supports this rotating mechanism 32, by means of making this rotating mechanism 35 rotations, can make by the direction of illumination of level crossing 31 laser light reflected bundle 17a～17f and on the x direction of principal axis, move.
The rotating mechanism 32 of above-mentioned level crossing 31 and the rotating mechanism 35 of installing frame 34 constitute the angle change device of laser beam irradiation direction in the present invention.When each rotating mechanism 32 and 35 rotates very little angle, can be as shown in figure 18, with laser beam 17a～17f, 18a～18f to the irradiation position of substrate 50 from changing to position with the oblique rear shown in the solid line with the position shown in the dot-and-dash line (among Figure 17 with the position shown in the solid line).
Secondly, illustrate use above-mentioned printing equipment of the present invention as shown in figure 29, on each piece of 12 * 12 (=144) liquid crystal panels 51 that form on the substrate 50 method of printing panel identification code 51a.Identification code is formed by literal and/or 2 dimension figures.
At first, occasion at the device that above-mentioned angular deflection device is not set, when 2 pairs of exposing units 1 of platform are relatively moved, as shown in figure 19, exposing unit 1 along scanning direction of illumination 61 with numbering (1), (2), (3) ... irradiation sequence 62 in chronological order a panel identification code 51a who be listed as is selected illuminating laser beam, the identification code 51a that arranges with constant space is exposed.At this moment, if exposing unit 1 is 1 unit, then need to carry out 12 scanning irradiations by row, if 2 exposing units are set, each unit need carry out 6 scanning irradiations by row.
But, when using above-mentioned angle change device, can in 1 scanning irradiation, print as shown in figure 20 each two row.
Promptly, when carrying out 1 scanning irradiation, on one side as Figure 18 explanation, work by means of the angle change device, make laser beam 17a～17f, 18a～18f to the irradiation position of substrate 50 with the position shown in the dot-and-dash line with submit change more with the position shown in the solid line, on one side on scanning direction of illumination 61, arrange ground and print 2 row identification code 51a (with reference to Figure 20) with constant space.Promptly, when according to penetrating (1), (2), (3) of order shown in 62 ... serial number when being odd number, make the dashdotted attitude of the anglec of rotation of angle change device for Figure 18, when serial number is even number, make the attitude of the anglec of rotation of angle change device for the solid line of Fig. 3, change in chronological order, select the direction of illumination of laser beam, arrange ground with constant space and print 2 row identification code 51a with this.
In other words, to identification code according to penetrate the order (1), (3), (5) ... tactic row, from finishing the interregnum of printing that is printed to Next (3) the individual identification code of beginning of (1) individual identification code, carry out the printing of (2) individual identification code of adjacent column, in addition, from finishing the interregnum that is printed to the printing that begins Next (5) individual identification code of (3) individual identification code, carry out the printing of (4) individual identification code of adjacent column.Also have, to identification code according to penetrate the order (2), (4), (6) ... tactic row, from finishing the interregnum of printing that is printed to Next (4) the individual identification code of beginning of (2) individual identification code, carry out the printing of (3) individual identification code of adjacent column, in addition, from finishing the interregnum that is printed to the printing that begins Next (6) individual identification code of (4) individual identification code, carry out the printing of (5) individual identification code of adjacent column.
Like this, owing to when carrying out 1 scanning irradiation, carry out the printing of identification code with the unit of a plurality of row, so if 2 exposing units 1 are set as the example of Figure 17, the scanning irradiation number of times that then 1 substrate 50 is carried out have only 3 times just passable, in addition, when having only 1 exposing unit 1, the scanning irradiation just can for 6 times.Therefore, compare, in the identical time, can carry out the printing of the identification code of number more than two times with existing Method of printing.
In above-mentioned example, to dividing the angle of 2 phasic change angle change devices, the situation of printing 2 row identification codes in 1 scanning irradiation is illustrated, but, as long as allowed by the blank time between a pitch period of mobile identification code, also can divide for 3 stages changed as shown in figure 21, perhaps divide the more stage to change.In addition, optically focused at this moment can be one as shown in Figure 21 with lens 26, also can be as the example of Figure 22, each stage is provided with collector lens 26a, 26b, 26c.At this moment, self-evident, the number of lens 26a, 26b, 26c changes with the number of the direction of illumination that is changed, and position separately can be regulated by position adjusting mechanism (not shown).
In addition, in above-mentioned example, illustrated and made exposing unit 1 be in the state that is fixed on assigned position, make substrate keep platform 2 to move at the x of rectangular coordinate direction of principal axis and y direction of principal axis, and the structure that is rotated, but can be that exposing unit 1 moves at x direction of principal axis and y direction of principal axis in contrast also, and the structure that is rotated.In addition, exposing unit 1 also can have only 1.
Show the example that rotating mechanism 32 and 35 has been carried out combination as the angle change device, but also can be as shown in figure 23, for example can will utilize 36,37 level crossing angle change mechanism of current scanning device to make up.In addition, as the angle change device, also 36,37 of current scanning device can be made configuration, combination as Figure 24, Figure 25 illustration.
In addition, as the device that laser beam is branched into multichannel, except that beam deflection mechanism 23, also can use light beam branch light filters 67 such as diffraction optical element as shown in figure 26.Laser beam 41 by these light filter 67 branches of light beam branch becomes parallel laser beam 42 by means of lens 24, and each laser beam 42 is shone angle change mechanism 68 independently.Become the laser beam 44 of selected irradiation by this angle change mechanism 68 laser light reflected bundles 43 by means of transmitting filter 25, changed angles by level crossing 31 again, become laser beam 17a～17f.In addition, as the device that makes light beam carry out branch irradiation, also can take to utilize with current scanning device or polygon mirror is method and other devices of the polygon mirror etc. of representative.
In addition, for making explanation simple, 6 stages that illustrated in example are selected 1 laser beam 16a～16z of irradiation and 1 laser beam 15z of crested.But self-evident, in printing, reality has 9 stages shown in the mark example of Figure 27 or the situation in 9 stages of less than, and segment again and become situation 10 stages more than, angle switching progression can be desirable progression arbitrarily and not hindered.
In addition, in example, illustrated laser beam 10 to be divided into 2 situation, but can be the situation that does not make it branch also, or used a plurality of beam splitters to make it to be divided into many situation.In addition, because beam splitter 21 is the devices that light carried out branch, so branch unit can certainly be other devices such as half-reflecting mirror.In addition, though show the also example of 2 exposing units 1 of row arrangement, self-evident, can utilize travel mechanism (not shown) to make their interval removable, thereby change the print position of identification code arbitrarily.
According to above-mentioned the present invention, since utilized exposing unit 1 relatively move 1 spacing during interregnum print the identification code of adjacent column, printed a plurality of row with this, thus identical with existing Method of printing, relatively move 1 spacing during can print the identification code of number more than two times.
In addition, even, also need not to increase exposing unit because the columns that should print increases, so install unlikely huge, promptly can simplification device or make equipment miniaturization.
When on the substrate of coating photoresist, printing identification code with the identification code printing equipment of Fig. 1, used as laser beam to be near the laser beam the wavelength X=335nm of 3 subharmonic of YAG laser instrument, selected resin this wavelength sensitization as being coated in photoresist on the substrate.
The pulsed frequency f of setting laser bundle is f=60kHz, the width of setting the workplace of the laser beam of optically focused to substrate the time is W=0.050mm, be spaced apart p=0.050mm between the adjacent beams, on the light beam thickness direction, make the speed v that platform moves=500mm/ second.
In addition, laser beam is by 7 grades of beam deflection mechanism deflections, and wherein the light beam of 6 directions shines on the substrate by transmitting filter 25, selects the light beam of 6 directions of irradiation with 10kHz.
According to above-mentioned setting, use in the distance D that 1 interpulse platform of laser beam moves
D＝v/f
Expression, departing between the adjacent beams is 0.0083 (mm), and being spaced apart between the next column light beam
D＝6×500/60000＝0.05(mm)
In addition, the ON time of establishing in 1 pulse is t
a, the turn-off time is t
b, definition dutycycle r is:
r＝t
a/(t
a+t
b)
When being set at r=10%, the laser irradiation time t of per 1 pulse
aFor:
t
a＝r/f
When the length d of the workplace of setting laser light was d=0.045mm, actual illumination length L was:
L＝d+v·t
a
L＝d+v·r/f
Therefore L=0.050mm can make each laser beam lithography become interval latticed of 50 μ m.
By repeating work, can form the identification code of the point-like generating writing pattern that constitutes by literal, figure as shown in figure 15.
In addition, be not limited to Figure 15, can carry out all changes to point-like figure by the sweep velocity v that changes substrate, the size of identification code.For example, the angle that can change over as shown in figure 16 is the figure of arc, circular figure or other geometric figures, and these can be familiar with as identification code.
When on substrate, printing identification code with the printing equipment of Figure 17, used laser beam as laser beam as the wavelength X=355nm of 3 subharmonic of YAG laser instrument, selected resin as being coated in photoresist on the substrate to this wavelength sensitization.
Each identification code is made of the grid of 100 of high 20 points * length, makes and be of a size of height 2mm * length 10mm separately.That is, the distance of each dot center and dot center, promptly dot spacing is 0.1mm.
The pulsed frequency f of laser beam is set at 60kHz, utilizes beam deflection mechanism 23 to make light beam in chronological order in the enterprising line displacement irradiation of the short transverse of identification code.At this moment, in order to select irradiation, on the length direction of identification code, export next pulse with 3kHz.
At this moment, be v=300mm/ second if set the translational speed of platform, identification code dot spacing dy=0.1mm in the longitudinal direction then.
If the length of the long side direction of glass substrate is Lx=650mm, the length of short side direction is Ly=550mm.
As shown in figure 29, be 12 * 12 in length and breadth to being divided into from 1 glass substrate, the length of long side direction is that the length of px=54mm, short side direction is the every panel printing identification code of py=40mm.
In the occasion that with existing mode, exposing unit 1 is 2, as shown in figure 19, carry out 6 scan exposure work.At this moment, the length of the identification code of exposure is 10mm, in the printing that exposes of the long side direction of each panel.In this occasion, the length 44mm from the end exposure position to the starting position of exposing next time is corresponding to the mobile required time.
By means of in 1 scan exposure, on 2 directions, separately carrying out work with mode of the present invention, the exposure of can be as shown in figure 20 stipulating with 3 scanning works.In addition, if be separated into 3 places as shown in figure 21 and carry out work, the then exposure that can stipulate with 2 scanning works.As increasing the quantity of exposing unit again, then can reduce the number of times of each scanning work.
Above-mentioned any situation all is to use existing mode in the time of identification code not being exposed, and adjacent row and/or other row are printed.Therefore,,,, in view of the above, can increase the processing substrate piece number of time per unit, promptly increase turnout so can shorten the processing time of per 1 substrate because the number of times of scanning irradiation reduces though the time that 1 scanning irradiation is spent is identical.
The sweep velocity v of the substrate that illustrates here, the size of identification code are an example eventually, and in fact they change with the form of using.And point-like figure also to there is no need be circular accurately, quadrilateral, become circular-arc figure at them by triangle, hexagon, other polygons and their angle, the perhaps occasion that constitutes of other geometric figures, the occasion that connects between adjacent point or independently occasion can both be familiar with as identification code.
In fact, the energy distribution in the light beam is often inhomogeneous, still, even abundant as long as give the energy of photoresist in this case, just can be by sensitization.In addition, though because factors such as the installation accuracy of the sensitivity of actual exposure energy and photoresist, optical system, surface reflection, exposure station often has not been positive square strictly speaking, and is nearly all no problem aspect the observability of identification code.
All data described in the present embodiment are an example eventually, by means of the shape that changes light filter and lens, at interval, combination, can be freely that the alteration of form of light beam is circular, polygon etc.In addition, it is not the such pulsed light beam of present embodiment that the present invention also can be applied to employed light beam, but the situation of continuous wave.
In addition, in the present embodiment the exposure on the substrate of coating photoresist is printed and be illustrated, but, the present invention not only to the kind that changes employed laser, with the situation of other wavelength exposures, and also be effective to the situation of engraving (directly printing) on the substrate of metal film, glass substrate, silicon wafer substrate.
Industrial utilizability
Above-mentioned the present invention advances with the substrate of laser beam to the coating photoresist except can be applicable to Outside the situation that the row exposure is printed, also can be applicable to by means of the kind that changes laser beam having gold When substrate, glass substrate, the silicon wafer substrate that belongs to film directly engraved (directly printing) Print.
Claims (7)
1, a kind of Method of printing that utilizes the identification code of laser beam, it is that the platform that makes carrying be labeled article on one side relatively moves with the exposing unit that disposes above this platform, from above-mentioned exposing unit laser beam irradiation is labeled on the article above-mentioned on one side, in accordance with regulations spacing is printed as the rectangular method of multiple row with a plurality of identification codes on the direction that relatively moves, and it is characterized in that:
Above-mentioned 1 exposing unit move along the direction that relatively moves 1 spacing during print the identification code of a plurality of row.
2, the Method of printing that utilizes the identification code of laser beam as claimed in claim 1 is characterized in that:
Above-mentioned exposing unit move along the direction that relatively moves 1 spacing during, the direction of illumination that makes above-mentioned laser beam is towards the direction change that intersects with the direction that relatively moves, the identification code of printing adjacent column.
3, the Method of printing that utilizes the identification code of laser beam as claimed in claim 1 or 2 is characterized in that:
Above-mentioned identification code is made of at least a in the figures of literal and 2 dimensions.
4, the Method of printing that utilizes the identification code of laser beam as claimed in claim 1 or 2 is characterized in that:
The above-mentioned article that are labeled are the substrates that apply photoresist.
5, the Method of printing that utilizes the identification code of laser beam as claimed in claim 4 is characterized in that:
The substrate of above-mentioned coating photoresist is to make the substrate that liquid crystal panel is used
6, a kind of printing equipment that utilizes the identification code of laser beam is characterized in that:
Carrying platform that is labeled article and the exposing unit that disposes above this platform are arranged to and can be relatively moved, above-mentioned exposing unit is arranged on the above-mentioned rectangular laser beam irradiation mechanism that spacing in accordance with regulations is printed as a plurality of identification codes multiple row that is labeled on the article on the direction that relatively moves; Simultaneously this laser beam irradiation mechanism is provided with the angle change device that the direction of illumination that makes laser beam changes on the direction of intersecting with the above-mentioned direction that relatively moves.
7, the printing equipment that utilizes the identification code of laser beam as claimed in claim 6 is characterized in that:
The above-mentioned article that are labeled are the substrates that apply photoresist.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001327976A JP3547418B2 (en) | 2001-10-25 | 2001-10-25 | Method and apparatus for marking liquid crystal panel by laser beam |
| JP327976/2001 | 2001-10-25 | ||
| JP013746/2002 | 2002-01-23 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028211928A Division CN1288502C (en) | 2001-10-25 | 2002-10-24 | Apparatus and method for marking an identifying code by using laser beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1782882A true CN1782882A (en) | 2006-06-07 |
| CN100461002C CN100461002C (en) | 2009-02-11 |
Family
ID=19144124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101250467A Expired - Fee Related CN100461002C (en) | 2001-10-25 | 2002-10-24 | Apparatus and method for marking an identifying code by using laser beam |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3547418B2 (en) |
| CN (1) | CN100461002C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107430269A (en) * | 2015-03-06 | 2017-12-01 | 英特尔公司 | The acousto-optics deflector and speculum manipulated for laser beam |
| CN113433794A (en) * | 2020-06-02 | 2021-09-24 | 吉佳蓝科技股份有限公司 | Transfer device capable of aligning pattern, method of manufacturing pattern substrate, and recording medium |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4664102B2 (en) * | 2005-03-18 | 2011-04-06 | 東レエンジニアリング株式会社 | Exposure apparatus and exposure method |
| JP4491444B2 (en) * | 2005-11-04 | 2010-06-30 | 株式会社オーク製作所 | Laser beam / ultraviolet irradiation peripheral exposure apparatus and method |
| JP4491446B2 (en) * | 2005-11-04 | 2010-06-30 | 株式会社オーク製作所 | Peripheral exposure apparatus and method |
| JP4533874B2 (en) * | 2005-11-04 | 2010-09-01 | 株式会社オーク製作所 | Laser beam exposure system |
| JP4491447B2 (en) * | 2005-11-04 | 2010-06-30 | 株式会社オーク製作所 | Laser beam / ultraviolet irradiation peripheral exposure apparatus and method |
| JP4491445B2 (en) * | 2005-11-04 | 2010-06-30 | 株式会社オーク製作所 | Peripheral exposure apparatus and method |
| KR100924336B1 (en) * | 2007-04-02 | 2009-10-30 | 주식회사 하이닉스반도체 | Method for fabricating photomask for suppressing haze |
| JP2011034123A (en) * | 2010-11-19 | 2011-02-17 | Toray Eng Co Ltd | Exposure apparatus and exposure method |
| CN102649376B (en) * | 2011-06-21 | 2014-04-02 | 北京京东方光电科技有限公司 | Titling method and equipment |
| JP2018189997A (en) * | 2018-09-11 | 2018-11-29 | Hoya株式会社 | Photomask substrate, photomask blank, photomask, production method of photomask substrate, production method of display device, handling method of photomask, and handling method of photomask substrate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5329090A (en) * | 1993-04-09 | 1994-07-12 | A B Lasers, Inc. | Writing on silicon wafers |
| US5855969A (en) * | 1996-06-10 | 1999-01-05 | Infosight Corp. | CO2 laser marking of coated surfaces for product identification |
| JP2905762B2 (en) * | 1997-10-31 | 1999-06-14 | 株式会社金田機械製作所 | Printing plate exposure system using tilt distortion cancellation signal |
| JP3091460B1 (en) * | 1999-12-10 | 2000-09-25 | 東レエンジニアリング株式会社 | Exposure equipment |
| JP2001199747A (en) * | 2000-01-17 | 2001-07-24 | Japan Science & Technology Corp | Method for marking glass substrate having color filter and apparatus therefor |
| JP2001265000A (en) * | 2000-03-16 | 2001-09-28 | Toray Eng Co Ltd | Laser exposure device |
-
2001
- 2001-10-25 JP JP2001327976A patent/JP3547418B2/en not_active Expired - Fee Related
-
2002
- 2002-10-24 CN CNB2005101250467A patent/CN100461002C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107430269A (en) * | 2015-03-06 | 2017-12-01 | 英特尔公司 | The acousto-optics deflector and speculum manipulated for laser beam |
| CN113433794A (en) * | 2020-06-02 | 2021-09-24 | 吉佳蓝科技股份有限公司 | Transfer device capable of aligning pattern, method of manufacturing pattern substrate, and recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003131392A (en) | 2003-05-09 |
| JP3547418B2 (en) | 2004-07-28 |
| CN100461002C (en) | 2009-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1288502C (en) | Apparatus and method for marking an identifying code by using laser beam | |
| CN101167018A (en) | Exposure method and tool | |
| CN1695076A (en) | Continuous direct-write optical lithography | |
| CN1782882A (en) | Apparatus and method for marking an identifying code by using laser beam | |
| CN1573576A (en) | Lithographic apparatus and device manufacturing method | |
| CN1766737A (en) | Lithographic apparatus and device manufacturing method | |
| GB2438600A (en) | Laser ablation method and tool | |
| JP2012049433A (en) | Exposure device | |
| KR101446484B1 (en) | Pattern forming system | |
| CN1659478A (en) | Method and device for imaging a mask onto a substrate | |
| CN109075185B (en) | Micro LED array as illumination source | |
| JP2008129248A (en) | Pattern drawing device and pattern drawing method | |
| JP4215433B2 (en) | Method and apparatus for marking identification code by laser beam | |
| CN212647263U (en) | Exposure equipment | |
| CN1292310C (en) | Method of forming optical images, diffration element for use with this method, apparatus for carrying out this method | |
| JP2004252375A (en) | Exposure apparatus and exposure method | |
| CN1828431A (en) | Automatic position aligning device and method for projection exposure device | |
| JP4801931B2 (en) | Drawing device | |
| CN112327578B (en) | Photoetching system of direct-writing photoetching machine | |
| JP2000288760A (en) | Method and device for machining ceramic green sheet | |
| CN1292312C (en) | Patten drawing device | |
| US12099308B2 (en) | Methods and apparatus for correcting lithography systems | |
| US20230144586A1 (en) | Methods and apparatus for correcting lithography systems | |
| CN112051711A (en) | Exposure equipment | |
| JP2003076030A (en) | Light irradiation device for exposure device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090211 Termination date: 20131024 |