JP2001199747A - Method for marking glass substrate having color filter and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a marking apparatus and marking method for a glass substrate having a color filter, enabling the recognition code management from the initial stage of the production process, free from the formation of recess, etc., on the glass substrate and the generation of particles such as soot and fine removed material in the formation of the recognition code, forming the recognition code in a short time and enabling the marking at a low cost. SOLUTION: A laser beam LA is applied to a glass substrate having a color filter and composed of a glass plate 1 and a color filter membrane 2 and the relative position between the irradiation position of the laser beam and the glass substrate having the color filter is changed to form a prescribed letter, figure or mark on the glass substrate having the color filter. In the above marking method, the laser beam LA has a wavelength of 500-980 nm and the marking is carried out by melting the color filter membrane 2 by the irradiation of the laser beam to change the surface form of the color filter membrane 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a liquid crystal or PDP.
(Plasma display) The present invention relates to a marking method and apparatus for forming an ID mark such as a two-dimensional code for product management on a glass substrate with a color filter which is a glass substrate constituting a panel.

[0002]

2. Description of the Related Art Conventionally, as a method for marking a bar code or a two-dimensional code for product management on a glass with a color filter of a liquid crystal or PDP panel, see Japanese Patent Application Laid-Open No. H11-101.
907, JP-A-09-192875, JP-A-10-291840, or JP-A-11-0
There is a method disclosed in Japanese Patent No. 77341. JP 0
The technique disclosed in Japanese Patent Application Laid-Open No. 9-192875 discloses a technique in which a unique identification code pattern is laser-drawn on a glass substrate with a color filter coated with a photosensitive resist to expose the photosensitive resist, and thereafter, a color filter pixel area is formed. The identification pattern is formed together with the etching process.

FIG. 9 shows a process of forming an identification code. As shown in FIG. 9A, a glass substrate with a color filter includes a glass substrate 1 and a color filter film 2, and a pixel region (B) formed by pixels of a liquid crystal panel and an identification code are formed on the color filter film 2. And a non-pixel area (A). Next, as shown in FIG. 9 (2), a photosensitive resist 3 is applied to the color filter film 2 of the glass substrate 1, and as shown in FIG. 9 (3), the non-pixel region (A) is An identification code pattern such as a barcode or a two-dimensional code is exposed by a laser (UV-LA) that emits ultraviolet light such as a He-Cd laser or an argon laser.

[0004] Thereafter, as shown in FIG. 9 (4), the glass substrate provided with the color filter coated with the photosensitive resist 3 is irradiated with ultraviolet rays using the photomask 4 so that the pixels of the liquid crystal panel are formed in the pixel area (B). The pattern is exposed. The glass substrate with the color filter in which the identification code and the pixel pattern are exposed on the photosensitive resist 3 is shown in FIG.
In the developing step shown in (5), the exposed portion of the photosensitive resist is dissolved in the developing solution, and the photosensitive pattern C of the identification code and the photosensitive pattern D of the pixel pattern are formed in the non-pixel region A and the pixel region B, respectively. Is done. The glass substrate with the color filter on which the photosensitive resist pattern 301 is formed is subjected to an etching treatment, and the resist is further stripped.
As shown in FIG. 9 (6), the color filter film 2 becomes a color filter film 201 having the same identification code and pixel pattern as the photosensitive resist pattern 301.

As described above, the identification mark is formed together with the pixel pattern, and in the subsequent processes, the manufacturing process and the product are managed by the identification code. According to the technique disclosed in Japanese Patent Application Laid-Open No. 09-192875, the color filter film 2 on a glass substrate with a color filter is turned downward as shown in FIG.
The color filter film 2 is directly irradiated with the rF excimer laser beam LA from below to perform processing such as marking. The identification code can be formed relatively easily by changing the irradiation position of the laser using a movable stage, a galvanometer mirror, or the like. At this time, soot and fine removals 202 generated when the laser beam LA is applied to the color filter film 2
Have fallen downward due to gravity or have been collected by the gas suction means 5.

With the above-described marking configuration, an identification code can be formed by directly irradiating a color filter film with a KrF or ArF excimer laser. Also,
In the technique disclosed in Japanese Patent Application Laid-Open No. 10-291840, a carbon dioxide laser is irradiated onto the surface of glass, and a plurality of carbon dioxide lasers adjusted to have an intensity that does not cause cracks exceeding the line width imprinted on the engraved portion are provided. It was to scan repeatedly. On a glass substrate with a color filter, a glass surface without a color filter film was directly irradiated with a carbon dioxide gas laser in the same manner to mark an identification code such as a two-dimensional code.

Further, in the technique disclosed in Japanese Patent Application Laid-Open No. H11-077341, an identification code made of a film of metal or the like is formed on glass using a transfer plate for laser marking. FIG. 11 shows a process of the marking method, in which a laser marking transfer plate 6 including a metal film 601 such as a chromium thin film and a laser transmitting body 602 such as glass is attached to a glass substrate 1 constituting a glass substrate with a color filter. The YAG laser YLA is irradiated from the back of the transfer plate for laser marking, and the metal film 601 of the transfer plate for laser marking is heated and instantaneously evaporated. Or sublimation, the transfer plate 6 for laser marking
The upper metal film is transferred in a desired marking shape onto the surface of the glass substrate 1 to be marked.

The YAG laser YLA is controlled by a galvanomirror (not shown) and its control device to draw an arbitrary trajectory, and can form a marking shape into a desired identification code. When the transfer plate for laser marking is separated from the glass substrate 1 with a color filter, the crow substrate 1
The mark 603 in the shape of an identification code such as a two-dimensional code is formed on the surface of the glass substrate 1. As described above, techniques for forming an identification code on a glass substrate with a color filter include a method of exposing a photosensitive resist, a method of excimer laser processing of a color filter film, a method of repeatedly irradiating a glass surface with a carbon dioxide laser, and a method of laser marking. There are four typical methods of performing transfer marking with a transfer plate for use.

[0009]

However, the above-described method of exposing a photosensitive resist has the following problems. (1) Since the identification code and the pixel pattern are simultaneously developed, etched, and stripped of the resist, the identification mark actually exists on the glass substrate with the color filter only after the development and etching steps of the pixel pattern. do not do. Therefore, manufacturing control of the resist temperature and spin-rotation speed in the photosensitive resist coating process, manufacturing control of the exposure amount or exposure time in the pixel pattern exposure process, manufacturing control of the developing solution temperature and developing time in the developing process, etching process etchant Production control of temperature, concentration, and etching time cannot be performed. That is, the production control items of the resist coating step, the exposure step, the development step, and the etching step cannot be managed by the identification code.

Further, the method of excimer laser processing of a color filter film disclosed in Japanese Patent Application Laid-Open No. 09-192875 cannot completely remove fine removals generated. There were serious problems. (1) In general, a liquid crystal panel and a PDP panel are manufactured in a clean room because they are manufactured by a microfabrication process such as photolithography. Particles are generated during the production, which may lower the cleanliness of the cream room, and may worsen the yield of the liquid crystal panel and the PDP panel in the worst case. (2) Further, in the method, the finely removed matter generated by the gas suction means cannot be completely removed, and the finely removed matter may remain on the glass substrate with the color filter. Particularly, in a liquid crystal panel line having a fine pattern width, this effect is large, and is one of the major factors for lowering the yield. (3) In the method, since a depression is formed in the glass substrate, the bending strength of the glass substrate may be reduced.

The method disclosed in Japanese Patent Application Laid-Open No. 10-291840, in which a glass surface is repeatedly irradiated with a carbon dioxide laser, has the following problems. (1) When forming an identification code or the like, it is necessary to overwrite at least about 10 times. Therefore, the marking time is ten times longer than when the identification code is formed by one laser beam irradiation. As a two-dimensional code used for a liquid crystal panel line, a code of about 20 × 20 segments is often used, and it takes about 3 to 5 times to scan the two-dimensional code for one time. Therefore, in this method, a laser beam scanning for ten times of the two-dimensional code is required, and thus a manufacturing time of 30 to 50 seconds is required. (2) In addition, this method also has a case where the bending strength of the glass substrate is reduced because a depression is formed in the glass substrate.

Further, the method of transfer marking with a transfer plate for laser marking disclosed in Japanese Patent Application Laid-Open No. 11-077341 has the following problems. (1) Although it is a marking method in which the generation of soot is small, it cannot be used for a glass substrate with a color filter of a liquid crystal panel using fine wiring because generated particles cannot be completely removed. (2) The transfer plate for laser marking used in the present method uses a chromium film deposited on a glass substrate, and the marking cost is high due to its high price. For example, the cost of forming a barcode is about 100 yen for the conventional technique, and about 5 yen for the method of exposing a photosensitive resist.
The method of excimer laser processing of the color filter film was about 5 yen, and the method of repeatedly irradiating the glass surface with a carbon dioxide laser was about 3 yen. That is, the cost was more than 20 times higher than other marking methods.

The present invention solves the above-mentioned problems of the conventional marking method, and can manage an identification code from an early stage of a manufacturing process, and generate particles such as soot and finely removed matter at the time of forming the identification code. It is an object of the present invention to provide a marking device and a marking method for a glass substrate with a color filter, which does not form dents or the like on a glass substrate, has a short identification code formation time, and can be marked at a low cost. is there.

[0014]

SUMMARY OF THE INVENTION Accordingly, a method of marking a glass substrate with a color filter according to the present invention is to irradiate a laser beam to a glass substrate with a color filter comprising a glass plate and a color filter film. In a marking method for changing a relative position with respect to a glass substrate with a color filter and forming a predetermined character, figure or symbol on the glass substrate with a color filter, the wavelength of the laser beam is set to 500 to 980 nm, and the color filter film is formed. The marking is performed by melting by irradiation of the laser beam and changing the surface shape of the color filter film.

Thus, the identification code can be managed from the beginning of the manufacturing process, so that particles such as soot and finely removed matter are not generated at the time of formation of the identification code, and no depression or the like is formed on the glass substrate, and the identification code is not formed. The code forming time is short, and marking can be performed at low cost. In addition, by using a semiconductor laser as the laser oscillator, which is the light source of the laser beam, the identification code can be managed from the beginning of the manufacturing process, so that particles such as soot and fine removal are not generated when the identification code is formed, and the glass substrate is not generated. No markings or the like are formed, and the identification code forming time is short, so that marking can be performed at low cost. By forming the characters, figures or symbols into a matrix type two-dimensional code, particles such as soot and finely removed matter are not generated at the time of forming the identification code, which is effective for a method of marking a fine identification code such as a two-dimensional code. It is. By using an acrylic resin or a polyimide resin for the color filter film, it is particularly effective in reducing the generation of particles such as soot and finely removed matter when forming the identification code.

A marking apparatus for a glass substrate with a color filter according to the present invention is a laser marking apparatus comprising a laser oscillator for emitting a laser beam, a scanner for scanning the laser beam, and an Fθ condensing lens for condensing the laser beam. A transfer mechanism comprising a transfer mechanism for transferring a glass substrate with a color filter comprising a glass plate and a color filter film and a positioning mechanism for positioning the glass substrate with a color filter at a predetermined position; By irradiating a laser beam to a predetermined position, characters, figures,
Alternatively, in the apparatus for marking a glass substrate with a color filter for forming a mark composed of a symbol, the laser oscillator is a semiconductor laser that emits light having a laser wavelength of 500 to 980 nm. As a result, the identification code can be managed from the beginning of the manufacturing process, so that particles such as soot and finely removed matter are not generated at the time of forming the identification code, no dents or the like are formed on the glass substrate, and the identification code formation time is reduced. , And can be marked at a lower cost.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the examples and the results shown in the drawings. FIG. 1 shows the configuration of an embodiment of the present invention.
Reference numeral 7 shown in FIG. 1 denotes a semiconductor laser which emits a laser beam LA having a wavelength of 808 nm. The laser beam LA is converted into parallel light by the collimator lens 8, reflected by the mirrors 91 and 92, and introduced into a galvano scanner including the scanner motors 12a and 12b and the scanner mirrors 13a and 13b. Further, the laser beam LA emitted from the galvano scanner is condensed by the Fθ condensing lens 14 and irradiates the color filter film 2 made of an acrylic resin on a glass substrate with a color filter. The scanner motors 12a and 12b sequentially rotate at a predetermined rotation angle by a scanner motor driver (not shown), and simultaneously the scanner mirrors 13a and 13b rotate. As a result, the color filter film 2
The laser beam focused above is scanned in the x and y directions.

In this embodiment, a galvano scanner is used as a means for changing the relative position between the irradiation position of the laser beam and the glass substrate with the color filter (the color filter film 2 and the glass substrate 1). The glass substrate with the color filter may be fixed and attached to an XY table or the like, and the XY table may be moved to change the relative position between the irradiation position of the laser beam and the glass substrate with the color filter. In this embodiment, the laser beam LA is converted to a two-dimensional code such as a QR code, a data code, and a vericode.
Is scanned, the two-dimensional code segment becomes
It is formed on the color filter film 2 as a concave depression. In FIG. 1, reference numeral 10 denotes a laser power detection head that detects light leaked from the mirror 91 to sense the power of the laser beam LA. Reference numeral 11 denotes a marker for visually confirming a marking position on the color filter film. It is a laser (wavelength 680 nm).

In the marking configuration of this embodiment,
It has been found that a two-dimensional code on a color filter film can provide a special marking state that cannot be achieved by conventional marking methods. FIG. 2 shows the result of measuring the marking shape obtained by irradiating the semiconductor laser with a CW output of power of 2 W for about 0.01 second to form a dot corresponding to a segment of a two-dimensional code using a surface roughness meter. The dot has a dent at a portion corresponding to the center portion of the laser, and the dot rises in a convex shape at the outer peripheral portion of the spot diameter of the laser beam.

FIG. 3 is a block diagram of a reflection illumination reader for recognizing a two-dimensional code. In FIG.
22 is an illumination, 23 is an aperture provided with an opening for transmitting a part of the light from the illumination 22, 24 is a lens for condensing the light into parallel light, 25 is between the lens 24 and the glass substrate 1 with a color filter. The light reflected from the glass substrate 1 with the color filter is reflected by the half mirror 25 and is observed by the CCD camera 21. When the dots of the shape formed in the above embodiment are viewed by the CCD camera 21 having the reflection illumination shown in FIG. 3, in the area not affected by the heat of the laser as shown in FIG.
It looks white due to the reflected light and also looks white at the top of the protrusion. Other portions appear black because light is less likely to be reflected. That is, the dot mark has a white ring B within a black circle. The data code formed by the dot marks is as shown in FIG. 5 and can be sufficiently recognized by a code reader.

Further, it has been found that the dot marks shown in the present embodiment do not emit any dust which has been a problem in the prior art. In this method, a data code was created without using dust removing means, and immediately thereafter, the surface of the color filter film was observed with a field emission scanning electron microscope. However, no dust was generated by laser marking. The reason why the marking of this embodiment does not generate dust is not clear, but the molten portion is expanded by the pressure of the laser beam irradiation while the color filter film maintains the molten state by the laser irradiation, and FIG. It is assumed that such a marking shape is obtained. In addition, there is a concern that the semiconductor laser may affect the glass substrate. However, since the laser beam having a wavelength of 808 nm is hardly absorbed by the glass substrate,
There is no damage such as cracks on the glass substrate.

As described above, the marking method of the present invention
Since there is no generation of dust, there is no reduction in cleanliness in the cream room and no reduction in the production yield of the liquid crystal panel, which are problems in the prior art. Further, since the glass substrate is not processed, there is no decrease in bending strength of the glass substrate. In addition, since the marking can be directly performed on the color filter film, the identification code can be formed before the exposure step of the pixel pattern, and the production control of the glass substrate with each color filter can be performed from the initial stage of the production.

Further, since the color filter film can be formed by irradiating a laser beam for a short time, a conventional technique (Japanese Patent Laid-Open No.
291840), there is no need to overwrite.
An identification code can be formed in a short time. Further, since there is no need to use a transfer plate or the like, the marking cost is only the running cost of the laser, which is extremely low. In the present embodiment, the data code is taken as an example, but the mark may be a character such as an alphanumeric character, a figure such as an identification code including a company logo mark, a trademark mark and a bar code, or a symbol.

In this embodiment, the wavelength of the semiconductor laser is 808 nm.
A data code having a similar segment shape could be formed by using a semiconductor laser of 970 nm and 970 nm. Also,
Similarly, a data code could be formed with a half-wavelength laser (SHG-YAG laser) of a YAG laser.

According to the marking method of the present invention, since no soot is generated when the laser beam is irradiated on the color filter film and the glass substrate is not processed, a wavelength of 500 nm or more near the lower limit where the glass substrate is not processed. A wavelength 98 at which soot is not generated from the color filter film which is an organic substance.
It is considered that the range is about 0 nm or less. At present, the only relatively high-power lasers corresponding to this wavelength are semiconductor lasers and SHG-YAG lasers, but in the future,
Obviously, high power lasers with wavelengths between 500 and 980 nm that would be found can be used.

In the above embodiment, an embodiment in which a data code is used has been described. However, it will be described below that a character, a graphic or a symbol is particularly effective when it is a matrix type two-dimensional code.

As described above, there are some problems when the marking is performed by the above four conventional methods. In addition,
When a matrix type two-dimensional code is formed on a glass substrate with a color filter using a general-purpose YAG laser, the removed material remains on the glass substrate with a color filter, which causes a reduction in yield. FIG. 6 is a photograph of a data code formed by directly irradiating a color filter film with a YAG laser (wavelength: 1064 nm). As can be seen from the picture, the contrast of the code is not a problem, but as shown in the enlarged picture on the left, Y
In the AG laser, many particles scattered around. In addition to the problem of decreasing the yield, the particles scatter light when read by a reader. Therefore, a segment that is originally black may be determined as a white segment depending on the location of the particles. This effect is larger as the segment of the matrix type two-dimensional code becomes smaller, and the formation of the matrix type two-dimensional code on the color filter film by the YAG laser cannot be applied.

However, the marking method using a semiconductor laser according to the present invention is particularly effective for forming a fine matrix type two-dimensional code because the color filter film is melted and particles are not generated. Further, the identification code can be managed from the beginning of the manufacturing process, and no depression or the like is formed on the glass substrate. Further, the identification code formation time is short, and marking can be performed at a low cost.

In this embodiment, the acrylic resin is used for the color filter film of the glass substrate with the color filter. However, the black matrix (B
M) also uses a chromium film. When such a chromium film is irradiated with a semiconductor laser, a marking shape different from that of the present embodiment is obtained, and the chromium film is sublimated and removed by the heat of the semiconductor laser. However, particles of 1 micron or less were generated and remained on the glass substrate with a color filter. In this case, although the particle size is small, it can be used when the line width of the liquid crystal pattern is 10 microns or more.
In a liquid crystal panel process having a pattern line width of 10 microns or more, application becomes difficult.

Therefore, the marking method of the present invention is extremely effective for a glass substrate with a color filter whose color filter film is made of an acrylic resin or the like. Further, it has been clarified from the results of the experiments that the same marking can be performed on a glass substrate with a color filter using a polyimide resin color filter film instead of the acrylic resin color filter film. That is, the present invention is effective in reducing soot and particles when forming an identification code when the color filter film is made of a resin.

The marking device according to the present invention is a marking device for a glass substrate with a color filter for realizing the marking method of the present invention. As shown in FIG. 7, the configuration of the laser unit is the same as that shown in FIG. It is almost the same configuration as. The laser beam collimated by the collimator lens as shown in FIG. 7 passes through a cold mirror 93 and is introduced into a scanning mechanism including a galvano scanner. The cold mirror 93 is 808 perpendicular to the mirror surface.
pass through the mirror surface and enter at 45 ° from the mirror surface.
80 nm light has the property of being reflected. Further, the marking device for a glass substrate with a color filter has a transport mechanism 16 including a roller 15 and a gantry 150, and a transport device including a positioning mechanism (not shown) for positioning the glass substrate with a color filter at a predetermined position. .

FIG. 8 is a sectional view of the positioning mechanism.
The glass substrate 1 with the color filter, which is made up of the glass substrate 1 and the color filter film 2 that has been conveyed by rolling, is stopped by the vertically movable fixing pins 17 and at the same time stops the roller rolling operation. Subsequently, the movable pin 18
To fix the glass substrate with color filter
Press on 7. One set of the fixed pin and the movable pin is installed in each of the X direction and the Y direction. When the positioning of the glass substrate with the color filter is completed, the laser is emitted,
An identification code such as a predetermined data code is formed on the color filter film. When the identification code marking is completed,
The fixing pins 17 are lowered, and the rollers 15 rotate, and the glass substrate with the color filter flows to the next resist coating process.

According to the apparatus for marking a glass substrate with a color filter of the present embodiment, the above marking method is of high quality and has no dust, so that the cleanliness in the cream room is reduced and the production yield of the liquid crystal panel is reduced. There is no drop. Further, since the glass substrate is not processed, there is no decrease in bending strength of the glass substrate. In addition, since the marking can be directly performed on the color filter film, the identification code can be formed before the exposure step of the pixel pattern, and the production control of the glass substrate with each color filter can be performed from the initial stage of the production. Further, since the color filter film can be formed by short-time laser beam irradiation, the related art (Japanese Patent Application Laid-Open No. 10-291840) is used.
Thus, the identification code can be formed in a short time without overwriting. Furthermore, since there is no need to use a transfer plate,
The marking cost is only the running cost of the laser, which is extremely low.

[0034]

According to the method and apparatus for marking a glass substrate with a color filter according to the present invention, the color filter is maintained while the laser beam has a wavelength of 500 to 980 nm and the color filter film is kept in a molten state by irradiation with the laser beam. By marking by changing the surface shape of the film, no dust is generated, so that the cleanliness in the cream room is not reduced and the production yield of the liquid crystal panel is not reduced. In addition, by using a laser having the above wavelength, the glass substrate is not processed, so that the bending strength of the glass substrate does not decrease.

Further, since the color is directly marked on the color filter film without processing the glass substrate, an identification code can be formed before the exposure step of the pixel pattern, and the production control of the glass substrate with each color filter can be performed from the initial stage of production. . Further, since the color filter film can be formed by irradiating the laser beam in a short time, it is not necessary to overwrite as in the prior art, and the identification code can be formed in a short time. Further, since there is no need to use a transfer plate or the like, the marking cost is only the running cost of the laser, which is extremely low.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a marking method of the present invention.

FIG. 2 is a diagram showing a surface shape of a segment dot formed on a color filter film by the marking method of the present invention.

FIG. 3 is a configuration diagram of a reflection illumination reader for recognizing a two-dimensional code.

FIG. 4 is a diagram showing a surface image of a segment dot and an image of a mark formed on a color filter film by the marking method of the present invention.

FIG. 5 is a diagram showing a two-dimensional code formed by the marking method of the present invention.

FIG. 6 shows a data code formed on a color filter film by a YAG laser.

FIG. 7 is a perspective view showing a marking device of the present invention.

FIG. 8 is a diagram showing a positioning mechanism of the marking device of the present invention.

FIG. 9 is a schematic view showing a manufacturing configuration of a conventional marking method by exposure.

FIG. 10 is a schematic view showing a cross section of a conventional marking method using an excimer laser.

FIG. 11 is a schematic view showing a process of a conventional marking method using a transfer plate for laser marking.

[Explanation of symbols]

1: glass substrate 2: color filter film 201: color filter film pattern 202: removed material 3: photosensitive resist 301: photosensitive resist pattern 4: photomask 5: gas suction means 6: transfer plate for laser marking 601: chromium film Metal film 602: Laser transmitting body 603: Mark 7: Semiconductor laser 8: Collimator lens 91 and 92: Mirror 10: Laser power detection head 11: Marker laser 12a and 12b: Scanner motor 13a and 13b: Scanner mirror 14: Fθ condensing lens 15: roller 16: gantry 16: transport device 17: fixing pin 18: pressing pin 21: CCD camera 22: illumination 23: aperture 24: lens 25: half mirror

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Yasushi Yoshida 2-1 Kurosaki Castle Stone, Yawatanishi-ku, Kitakyushu-city, Fukuoka Prefecture Inside Yaskawa Electric Co., Ltd. No. Yaskawa Electric Co., Ltd. F-term (reference) 2H048 BA11 BB14 BB42 4E068 AB01 CA01 CA04 DA11 DB10 4G059 AA01 AB05 AC08

Claims (5)

[Claims] 1. A laser beam is applied to a glass substrate with a color filter comprising a glass plate and a color filter film,
In a marking method of changing a laser beam irradiation position and a relative position between the glass substrate with a color filter and a predetermined character, figure or symbol on the glass substrate with a color filter, the wavelength of the laser beam is set to 500 to 980 nm. And a method of marking a glass substrate with a color filter, characterized in that the color filter film is melted by irradiation with the laser beam and the surface shape of the color filter film is changed to perform marking. 2. The method for marking a glass substrate with a color filter according to claim 1, wherein the laser as a light source of the laser beam is a semiconductor laser. 3. The method for marking a glass substrate with a color filter according to claim 1, wherein the character, figure or symbol is a matrix type two-dimensional code. 4. The method for marking a glass substrate with a color filter according to claim 1, wherein the color filter film is made of an acrylic resin or a polyimide resin. 5. A laser oscillator for emitting a laser beam,
A laser marking device comprising a scanner for scanning a laser beam, an Fθ focusing lens for focusing the laser beam, a transport mechanism for transporting a glass substrate with a color filter comprising a glass plate and a color filter film, and the glass with a color filter A mark formed of characters, graphics, or symbols on a glass substrate with a color filter by irradiating a laser beam to a predetermined position of the glass substrate with a color filter by a transfer device including a positioning mechanism for positioning the substrate at a predetermined position. In the apparatus for marking a glass substrate with a color filter, the laser oscillator has a laser wavelength of 500 to 980n.
m. A marking device for a glass substrate with a color filter, wherein the marking device is a semiconductor laser that emits light of m.