CN1759993A - 2D shifting unit - Google Patents
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- CN1759993A CN1759993A CN 200510110190 CN200510110190A CN1759993A CN 1759993 A CN1759993 A CN 1759993A CN 200510110190 CN200510110190 CN 200510110190 CN 200510110190 A CN200510110190 A CN 200510110190A CN 1759993 A CN1759993 A CN 1759993A
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Abstract
A planar moving mechanism for robot and planar bench is composed of a flat square frame, a cross-shaped plate with 4 ends fixed to 4 corners of said flat square frame, and several piezoelectric ceramics respectively stuck on 4 side bars of said flat square frame, and the front and back surfaces of said cross-shaped plate. Its advantages are high moving speed and high locating precision.
Description
Technical field
The invention belongs to a kind of voltage driven type multiple degrees of freedom drive unit that utilizes piezo-electric effect or electrostriction effect, particularly belong to a kind of and can be used for the miniature planar mobile device that microrobot is walked automatically or is used for the table positions operation.
Background technology
In the precision optical machinery field, as active detecting, X-Y precision stage, laser and optical fiber relevant device, and the walking driving of plane motion microrobot etc., the miniature planar motion motor that needs cramped construction and accurately move.The type motor mainly is to add the screw mandrel transmission by electromagnetic machine at present, or adopts the mode of linear electromagnetic machine to realize.Its structure is difficult to microminaturization.The piezoelectric micromotion driver that in ultra precise workbench, adopts can only 1mm with down stroke in output movement.
The present 2 D shifting unit based on piezoelectricity or electrostriction effect driving mainly is to rely on the static deformation of piezoelectric ceramics/electrostriction element under the voltage effect to drive mobile device to do translational motion.Prior art can be enumerated three patents of invention:
1) Chinese invention patent, the applicant: Tsing-Hua University, title: miniature monoblock precisive plane moving mechanism and device thereof, application number: 99107784.9, the applying date: on May 28th, 1999.
This patent of invention has proposed a kind of precisive plane moving mechanism and device of being made up of motion table top, flexible hinge leverage, clamping piece and fixed base plate thereof.Flexible hinge leverage wherein is formed by connecting by flexible hinge by piezoelectric actuated piece, center connecting piece, four support lever, four frame levers and four frame connecting pieces.The implementation of drive actions is: utilize the electromagnetic attraction effect to make a part of clamping piece and fixed base plate adhesive, all the other clamping pieces then keep pine position state; The piezoelectric actuated piece activates; Make four frame generation plane deformations by lever and linkage; The clamping piece that is in the pine position produces relative displacement along certain direction; Utilize the electromagnetic attraction effect to make once more to have advanced the clamping piece of a step pitch to be pull-in on the base plate, allow simultaneously original adhesive the clamping piece dead electricity and be in pine position state; Shed the voltage that is added on the piezoelectric actuated piece and make it return back to original length, drive step pitch of clamping piece follow-up of pine position; The circulation said process can realize that the wriggling of entire mechanism moves.As seen its motion feature belongs to low frequency creeping motion type stepping type, is suitable for little feeding location of point-to-point.
2) Japanese patent of invention, applicant: green hill Shang Zhi etc., title: mobile device goes out to be willing to designation: specially permit out hope 2001-54837, go out to be willing to day: February 28 calendar year 2001.
This patent of invention has proposed the mobile device of a kind of XY of having θ direction 3DOF self-movement.Its elemental motion principle and top patent basically identical, its motion feature also belongs to low frequency creeping motion type stepping type.Both differences of project organization.Top patent is provided with the piezoelectric actuated piece in the centre of quadrilateral frame, and mechanism makes frame deformation with lever hinge, drives the clamping piece motion.This patent is on piezoelectric actuated the four edges that is arranged at quadrilateral frame, and four clamping pieces are arranged at respectively on the end of two U-shaped framves of intersection, and two U-shaped framves are bound up by four piezoelectric actuated, form the quadrilateral frame shelf structure.Compare with top patent, this patent has increased actuated piece, move more nimbly and freely, but not only translation is also rotatable.
3) Chinese invention patent, the applicant: Tsing-Hua University, title: a kind of planar motion mechanism of micro robot and device thereof, application number: 200410068971.6, the applying date: on July 15th, 2004.
This patent of invention has proposed a kind of by four connecting rods, four planar motion mechanism and devices thereof that contiguous block, clamping piece and piezoelectric actuated piece are formed.Operating principle and the 1st patent are similar.Four connecting rods and four contiguous blocks constitute flexible diamond structure by flexible hinge, and the piezoelectric actuated piece is arranged on the diagonal of rhombus.Four clamping pieces connect firmly with four four contiguous blocks that are positioned at the rhombus summit respectively.The clamping action of clamping piece adsorbs on fixed base plate or unclamps with electromagnet in also being.
By above analysis as seen, the present 2 D shifting unit based on piezoelectricity or electrostriction effect driving belongs to clamp creeping motion type motion mode substantially, and the subject matter of this mode is translational speed slow (about general 1mm/s); Power consumption is bigger; The control logic complexity; Because the requirement of clamp is to surperficial restricted (such as with electromagnet time necessarily require base plate that magnetic conductivity is arranged) of work; The mechanical action of clamping piece can send the sound.These problems have limited the further expansion of 2 D shifting unit application.
Summary of the invention
The object of the present invention is to provide a kind of can be along the plane or the comprehensive mobile 2 D shifting unit of major diameter spherical surface two-freedom, it has flattening micro-miniature structures characteristics, can high-speed mobile also can accurately locate at a slow speed, be convenient to SERVO CONTROL, power consumption is little, low noise, cost is low, and type Micro-Robot and XY planar working table drive and the needs of control from walking to adapt to.
Operation principle of the present invention is as follows:
2 D shifting unit of the present invention is to move along two mutually orthogonal diagonals respectively.For producing this motion, must be two of square flat frame to inspire rotation direction consistent and along the elliptic vibration of diagonal at relative place, summit.This vibration can be synthetic and obtain with the phase differences of 90 degree by the in plane vibration vibration of the diagonal of quadra (promptly along) and the flexural vibrations vibration of plane, quadra place (promptly perpendicular to).Arranged totally six groups piezoelectric actuated at the four edges of quadra and the both sides of cross plate respectively for this reason.To these six groups of piezoelectric actuated high-frequency ac voltages that apply certain frequency and phase difference, can inspire 1st terrace internal vibration mode and the 2nd rank flexural vibration mode of the edge of 2 D shifting unit integral body to the angular direction.Because this vibration is resonance,, be enough to produce the amplitude of driving effect thereby produce so piezoelectric actuated the miniature deformation under electric field action amplified fully at two pairs of angle point places of quadra.When being placed on the smooth plane, under the effect of frictional force between four summits of quadra and supporting plane, just can produce the plane motion that needs to 2 D shifting unit.The structural design of 2 D shifting unit integral body should make the resonant frequency of above-mentioned in plane vibration and flexural vibrations reach consistent, so that device is worked under same stimulating frequency.Be positioned on the cross plate two groups piezoelectric actuated and be the 1st terrace internal vibration mode that is used for the excitation plane mobile device.Two groups of piezoelectric actuated mutually orthogonal both sides that are arranged in cross plate, in another shortening of the next elongation of extra electric field effect, impel 2 D shifting unit to produce the face internal resonance of rhombus, this moment, two pairs of angle points of quadra were made the horizontal vibration that phase place mutual deviation 180 is spent along diagonal.Four groups piezoelectric actuated that is positioned on quadra four limits is used for excitation plane mobile device the 2nd rank flexural vibration mode.Wherein two groups of piezoelectric actuated adjacent elongations under the extra electric field effect, impel these two limits to recessed song, and two groups of piezoelectric actuated shortenings in addition impel two limits at its place to raise up, and so just inspire the flexural resonance of the shape of 2 D shifting unit as a complete sine wave curve.Two pairs of angle points that this moment, quadra was on the crooked plane of symmetry are done the vertical vibration that phase place mutual deviation 180 is spent.When above-mentioned two kinds of vibrations excite that mutual deviation 90 is spent on phase place the time, just on two of quadra relative summits, obtained the elliptic vibration of rotation direction unanimity, 2 D shifting unit will move along the line direction on two summits.When needing to be the motion of 90 degree directions therewith, be applied on the quadra four groups piezoelectric actuated electric field as long as exchange, selection and above-mentioned two different adjacent edges are done same excitation and are got final product.
The technical scheme that the present invention utilizes:
1. a 2 D shifting unit comprises square flat frame and piezoelectric ceramic piece, it is characterized in that having a cross plate, and its four ends are connected with the Corner Strapped of described square flat frame; Respectively paste a slice piezoelectric ceramic piece on the four edges frame of described square flat frame, the front and back of described cross plate is respectively pasted a slice piezoelectric ceramic piece
2. 2 D shifting unit according to claim 1, it is characterized in that four ends of described cross plate with the structure that square flat frame Corner Strapped is connected are: upper surface or lower surface that described square flat frame is four jiaos have the groove that matches with cross plate along diagonal angle side, bonding at this bottom portion of groove of four jiaos with four ends of adhesive and cross plate, perhaps use four ends of four screws and cross plate fastening, perhaps bonding at bottom portion of groove earlier with four ends of adhesive and cross plate, use four screws fastening again.
3. 2 D shifting unit according to claim 1 and 2, it is characterized in that four piezoelectric ceramic pieces on the described square flat frame four edges frame polarize along thickness direction, stick on four edges frame upper surface or lower surface four limits middle part respectively with adhesive, the polarization positive direction that should make four piezoelectric ceramics during stickup all upwards or all downward.
4. 2 D shifting unit according to claim 1 and 2, two piezoelectric ceramic pieces that it is characterized in that described cross plate front and back polarize along thickness direction, stick on the middle part of cross plate positive and negative respectively with adhesive, the polarised direction that makes them during stickup in the same way, the long limit of two piezoelectric ceramic pieces is interlaced, and respectively with cross plate longitudinal and transverse two to parallel.
5. 2 D shifting unit according to claim 4 is characterized in that the positive and negative of described cross plate pastes the piezoelectric ceramic piece of four weak points again, and its polarised direction is opposite with two piezoelectric ceramic pieces having pasted.
6. 2 D shifting unit according to claim 1, four corners that it is characterized in that described square flat frame, all oriented lower convexity portion constitutes the output of moving movement, and four lug boss end faces must be after deliberation, to guarantee four same flatnesses of lug boss.
7. 2 D shifting unit according to claim 2, it is characterized in that four screws on four jiaos of the described square flat frame extend the output that a segment length constitutes moving movement downwards, four screw lower surfaces must be after deliberation, to guarantee four same flatnesses of screw end face.
8. 2 D shifting unit according to claim 1 is characterized in that being useful on four jiaos of sides of described square flat frame the aperture of revising fine setting.
9. 2 D shifting unit according to claim 1, it is characterized in that described square flat frame is by the fixedly connected formation of four shapes identical " L " shape gusset, four piezoelectric ceramic pieces on the described four edges frame are placed in the seam of joint of four " L " shape gussets.
10. 2 D shifting unit according to claim 9, the fixedly connected structure that it is characterized in that described four " L " shape gussets is: all there is flange upwards at the two ends of every block of " L " shape gusset, on the described flange screw is arranged, fixedly connected with two flanges that screw will dock, and between two flanges the clamping piezoelectric ceramic piece; And the bottom has a square deckle board fixedly connected at four jiaos of places of framework with four trip bolts.
The present invention compared with prior art has following conspicuous substantive outstanding feature and remarkable advantage:
1. compact conformation, microminaturization, flattening;
2. control logic is simple, is convenient to SERVO CONTROL;
3. utilize resonance principle work, power consumption is little;
4. can produce bigger output propulsive force and pace;
5. can high-speed mobile also can accurately locate at a slow speed;
6. simple in structure, use common actuation device, cost is lower;
7. can be along the plane or the major diameter spherical surface two-freedom is comprehensive moves;
8. quietization operation.
Description of drawings
Fig. 1 is a mobile device motion key diagram of the present invention
Fig. 2 is perspective view of an embodiment of the present invention
Fig. 3 is the top front view of Fig. 2
Fig. 4 is the side view of Fig. 2
Fig. 5 is the bottom front view of Fig. 2
Fig. 6 is the stereogram of another embodiment of the present invention
Fig. 7 is the top front view of Fig. 6
Fig. 8 is the side view of Fig. 6
Fig. 9 is the bottom front view of Fig. 6
Figure 10 is mobile device beam mode figure of the present invention
Figure 11 is a mobile device in plane vibration ideograph of the present invention
Figure 12 is the top front view of Figure 11
The specific embodiment
Embodiment 1:(is referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5)
The total following part of present embodiment is formed: square flat frame 5, cross plate 6, stick on framework 5 piezoelectric ceramic piece 1,2,3 and 4 all around, trip bolt 7a, 7b, 7c and 7d stick on the piezoelectric ceramic piece 8 in cross plate 6 fronts and the piezoelectric ceramic piece 11 at its back side.
The groove that matches with cross plate 6 is opened to the angular direction in upper surface edge at framework 5, and cross plate 6 is embedded in wherein, at the trench bottom epoxy resin bonding, uses trip bolt 7 fastening again.Four piezoelectric ceramic pieces 1,2,3 and 4 are along the thickness direction polarization, stick on the middle part, four limits of framework 5 upper surfaces respectively with epoxy resin, the polarization positive direction of four piezoelectric ceramics are all made progress (or all downward).Piezoelectric ceramic piece 8 and 11 is along thickness direction polarization, sticks on the tow sides of cross plate 6 respectively with epoxy resin, the polarised direction that makes them during stickup in the same way, long limit is interlaced, respectively with cross plate longitudinal and transverse two to parallel.For strengthening this mobile device travel direction, can also paste the piezoelectric ceramic piece of four weak points at the tow sides of cross plate 6 again, polarised direction with above-mentioned two opposite, paste position is shown among Fig. 19,10.Bonding evenly firm for guaranteeing, all adhesive surfaces require to carry out Surface Finishing, to guarantee that adhesive surface is smooth smooth.The downward lug boss 13 that is positioned at four corners with framework 5 contacts with the smooth base plate of supporting moving device as the moving movement output, and lug boss 13 must be through grinding, to guarantee its flatness.Also can make the length of trip bolt 7 exceed the face at lug boss place, allow the end of screw contact with base plate as the output of moving movement.The benefit of a kind of mode in back is to obtain bigger plane motion speed.The square flat frame 5 usefulness brass of present embodiment are made, and cross plate 6 usefulness duralumin are made, and piezoelectric ceramic piece all adopts emission type PZT material.
Motion principle: design each size of this device, make the model frequency of integrally-built flexural vibration mode (as shown in figure 10) and in plane vibration mode (as Figure 11 with shown in 12) consistent.Method for designing belongs to prior art, for example adopts finite element method.Fine setting when aperture 12 can be used for structural modifications.Owing to just paste piezoelectric ceramics,, can impel the leg of frame generation bending downward or upward at its place so under the extra electric field effect, do when elongating or shortening distortion when piezoelectric ceramics at the upper surface of framework 5.Piezoelectric ceramic piece 1 ~ 4 and piezoelectric ceramic piece 8,11 are applied high frequency pumping voltage respectively, and frequency is identical with above-mentioned model frequency, and phase place mutual deviation 90 degree inspire above-mentioned two resonance modes, and synthesize the required elliptic motion of driving at the motion output.When the driving voltage phase place mutual deviation 180 of the driving voltage of piezoelectric ceramic piece 1 and 2 and piezoelectric ceramic piece 3 and 4 is spent, mobile device walking before and after the Y direction among Fig. 1; When the driving voltage phase place mutual deviation 180 of the driving voltage of piezoelectric ceramic piece 2 and 3 and piezoelectric ceramic piece 1 and 4 is spent, mobile device walking before and after the directions X among Fig. 1.
Embodiment 2:(is referring to Fig. 6, Fig. 7, Fig. 8 and Fig. 9)
The total following part of present embodiment is formed: the identical L shaped framework 14,15,16 and 17 of four shapes that is formed by a complete square flat frame cutting, cross plate 18, by the piezoelectric ceramic piece 21,22,23 and 24 of L shaped framework clamping in twos, trip bolt 19a, 19b, 19c and 19d, clamp screws 26, stator 27 sticks on the piezoelectric ceramic piece 20 in cross plate 6 fronts and the piezoelectric ceramic piece 28 at its back side.
The piezoelectric ceramic piece that the maximum characteristics of this embodiment are to be arranged in quadra four limits need not be pasted and with the mode of clamping.Its benefit: can make the overall structure miniaturization on the one hand, the mode of operation of piezoelectric ceramics makes thickness mode into by original transverse mode on the other hand, and electromechanical conversion efficiency improves.Open the groove that matches with cross plate 18 at the upper surface of four L shaped frameworks 14,15,16 and 17 along 45 degree directions, two of L shaped framework is designed to have projection 25 upwards in conjunction with end face.Four L shaped frameworks are surrounded square, junction clamping piezoelectric ceramic piece 21,22,23 and 24.Cross plate 18 is embedded in wherein,, uses trip bolt 19 fastening again, make four L shaped frameworks be unified into an integral body at the trench bottom epoxy resin bonding.Four groups of piezoelectric ceramic pieces 21,22,23 and 24 are formed by two piezoelectric ceramic pieces along the thickness direction polarization, make every group the polarization of two piezoelectric ceramics just relative during with L shaped framework clamping.Make four groups of piezoelectric ceramic pieces 21,22,23 and 24 keep certain pretightning force with clamp screws 26 and stator 27.Piezoelectric ceramic piece 20 and 28 is along thickness direction polarization, sticks on the tow sides of cross plate 18 respectively with epoxy resin, the polarised direction that makes them during stickup in the same way, long limit is interlaced, respectively with cross plate longitudinal and transverse two to parallel.Bonding evenly firm for guaranteeing, all adhesive surfaces require to carry out Surface Finishing, to guarantee that adhesive surface is smooth smooth., contact as the moving movement output with the end of trip bolt 19 with the smooth base plate of supporting moving device.L shaped framework 14 ~ 17 usefulness brass of present embodiment are made, and cross plate 18 usefulness mild steel are made, and piezoelectric ceramic piece all adopts emission type PZT material.
Motion principle: similar to embodiment 1, design each size of this device, make integrally-built flexural vibration mode consistent with the model frequency of in plane vibration mode.Fine setting when the semicircle orifice of opening in the corner of L shaped framework 29 can be used for structural modifications.Because by the piezoelectric ceramic piece group 21 ~ 24 of L shaped framework 14 ~ 17 clamping in twos, chucking power is inconsistent up and down for it, the top is bigger than normal, so when piezoelectric ceramics is done thickening or attenuation distortion under the extra electric field effect, can be applied with down the pressure of skewness to the end face of L shaped framework, form moment of flexure, impel the leg of frame generation bending downward or upward at its place.Piezoelectric ceramic piece 21 ~ 24 and piezoelectric ceramic piece 20,28 are applied high frequency pumping voltage respectively, and frequency is identical with above-mentioned model frequency, and phase place mutual deviation 90 degree inspire above-mentioned two resonance modes, and synthesize the required elliptic motion of driving at the motion output.When the driving voltage phase place mutual deviation 180 of the driving voltage of piezoelectric ceramic piece 21 and 22 and piezoelectric ceramic piece 23 and 24 is spent, mobile device walking before and after the upper left of accompanying drawing 7 and the lower-right diagonal position direction; When the driving voltage phase place mutual deviation 180 of the driving voltage of piezoelectric ceramic piece 22 and 23 and piezoelectric ceramic piece 21 and 24 was spent, mobile device was along accompanying drawing 7 lower-lefts and upper right to walking before and after the angular direction.
Claims (10)
1. a 2 D shifting unit comprises square flat frame (5) and piezoelectric ceramic piece (1,2,3,4,8,11), it is characterized in that having a cross plate (6), and its four ends are connected with the Corner Strapped of described square flat frame (5); Respectively paste a slice piezoelectric ceramic piece (1,2,3,4) on the four edges frame of described square flat frame (5), the front and back of described cross plate (6) is respectively pasted a slice piezoelectric ceramic piece (8,11).
2. 2 D shifting unit according to claim 1, it is characterized in that (6) four ends of described cross plate with the structure that square flat frame (5) Corner Strapped is connected are: upper surface that described square flat frame is (5) four jiaos or lower surface have the groove that matches with cross plate (6) along diagonal angle side, bonding at this bottom portion of groove of four jiaos with four ends of adhesive and cross plate (6), perhaps use four screws (7) fastening with four ends of cross plate (6), perhaps bonding at bottom portion of groove earlier with four ends of adhesive and cross plate (6), use four screws (7) fastening again.
3. 2 D shifting unit according to claim 1 and 2, it is characterized in that four piezoelectric ceramic pieces (1,2,3,4) on described square flat frame (5) the four edges frame polarize along thickness direction, stick on four edges frame upper surface or lower surface four limits middle part respectively with adhesive, the polarization positive direction that should make four piezoelectric ceramics during stickup all upwards or all downward.
4. 2 D shifting unit according to claim 1 and 2, two piezoelectric ceramic pieces (8,11) that it is characterized in that described cross plate (6) front and back polarize along thickness direction, stick on the middle part of cross plate (6) positive and negative respectively with adhesive, the polarised direction that makes them during stickup in the same way, the long limit of two piezoelectric ceramic pieces is interlaced, and respectively with cross plate (6) longitudinal and transverse two to parallel.
5. 2 D shifting unit according to claim 4 is characterized in that the positive and negative of described cross plate (6) pastes the piezoelectric ceramic piece of four weak points (9,10) again, and its polarised direction is opposite with two piezoelectric ceramic pieces (8,11) of having pasted.
6. 2 D shifting unit according to claim 1, four corners that it is characterized in that described square flat frame (5), all oriented lower convexity portion (13) constitutes the output of moving movement, four lug bosses (13) end face must be after deliberation, to guarantee the same flatness of four lug bosses (13).
7. 2 D shifting unit according to claim 2, it is characterized in that four screws (7) on (5) four jiaos of the described square flat frame extend the output that a segment length constitutes moving movement downwards, four screws (7) lower surface must be after deliberation, to guarantee the same flatness of four screws (7) end face.
8. 2 D shifting unit according to claim 1 is characterized in that being useful on four jiaos of sides of described square flat frame (5) aperture (12) of revising fine setting.
9. 2 D shifting unit according to claim 1, it is characterized in that described square flat frame (5) is by the fixedly connected formation of four shapes identical " L " shape gussets (14,15,16,17), four piezoelectric ceramic pieces (21,22,23,24) on the described four edges frame are placed in the seam of joint of four " L " shape gussets (14,15,16,17).
10. 2 D shifting unit according to claim 9, the fixedly connected structure that it is characterized in that described four " L " shape gussets (14,15,16,17) is: all there is flange (25) upwards at the two ends of every block of " L " shape gusset (14,15,16,17), described flange has screw on (25), fixedly connected with two flanges (25) that screw (26) will dock, and between two flanges (25) clamping piezoelectric ceramic piece (21,22,23,24); And the bottom has a square deckle board (27) fixedly connected at four jiaos of places of framework with four trip bolts (19).
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101101903A CN100357069C (en) | 2005-11-10 | 2005-11-10 | 2D shifting unit |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101101903A CN100357069C (en) | 2005-11-10 | 2005-11-10 | 2D shifting unit |
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| CN1759993A true CN1759993A (en) | 2006-04-19 |
| CN100357069C CN100357069C (en) | 2007-12-26 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104369181A (en) * | 2014-10-27 | 2015-02-25 | 南京理工大学 | Self-formed flexible robot driven by electric field |
| CN108322086A (en) * | 2018-01-09 | 2018-07-24 | 长春理工大学 | Piezoelectric vibrator |
| CN112290826A (en) * | 2020-10-09 | 2021-01-29 | 中国科学技术大学 | X-electrode segmentation cross multi-dimensional piezoelectric motor, control method and scanning probe microscope |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100439049C (en) * | 2004-07-15 | 2008-12-03 | 清华大学 | Plane movement mechanism and its device for micro robot |
| CN1305644C (en) * | 2004-07-30 | 2007-03-21 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
-
2005
- 2005-11-10 CN CNB2005101101903A patent/CN100357069C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104369181A (en) * | 2014-10-27 | 2015-02-25 | 南京理工大学 | Self-formed flexible robot driven by electric field |
| CN104369181B (en) * | 2014-10-27 | 2016-04-20 | 南京理工大学 | Utilize the flexible robot that is certainly shaped of electric field driven |
| CN108322086A (en) * | 2018-01-09 | 2018-07-24 | 长春理工大学 | Piezoelectric vibrator |
| CN112290826A (en) * | 2020-10-09 | 2021-01-29 | 中国科学技术大学 | X-electrode segmentation cross multi-dimensional piezoelectric motor, control method and scanning probe microscope |
| CN112290826B (en) * | 2020-10-09 | 2024-02-09 | 中国科学技术大学 | X-electrode split cross multidimensional piezoelectric motor and scanning probe microscope |
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