CN1740769A - Micro-measuring method, apparatus and use on microscope - Google Patents

Micro-measuring method, apparatus and use on microscope Download PDF

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Publication number
CN1740769A
CN1740769A CN 200510029966 CN200510029966A CN1740769A CN 1740769 A CN1740769 A CN 1740769A CN 200510029966 CN200510029966 CN 200510029966 CN 200510029966 A CN200510029966 A CN 200510029966A CN 1740769 A CN1740769 A CN 1740769A
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microscope
sample
chuck
stretching
heat
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CN100386619C (en
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于伟东
刘晓艳
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Donghua University
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Abstract

The micro- measurement device is formed from fixed holder with force sensor, movable holder which can be horizontally-moved and turned, manual and electric mechanism for driving movable holder to make it be horizontally-moved and turned, universal template base, temperature cover and temperature sensor, electrodes respectively mounted on two holders, magnetic coil, semiconductor heating device, refrigerating device, external radiation light source and computer with signal-collecting card, data processing module and control module. Said invention also provides the concrete steps of said micro-measurement method and its application.

Description

A kind of micro-measuring method, device and purposes that is used on the microscope
Technical field:
Patent of the present invention relates to a kind of enforcement power, light, heat, the electricity on the microscope, micro-measuring method, device and purposes of the action of a magnetic field of being used for, and this device is a kind of micrometering amount device that is used for fiber original position on the optical microscope stressed and temperature, electric field, magnetic field and illumination effect.
Background technology:
At present microscope comprises visible, infrared, ultraviolet, fluorescence, polarizing microscope, only is used for optical observation usually, can't be given in original position observation of characteristics and evaluation under different power, heat, electricity, magnetic, the thermal effect.This is to material, microtexture especially, and variation and behavior in practical environment are beyond expression.Though the part special microscope has the selection of power apparatus and Re Tai, complex structure, heaviness, not easy to assemble and mobile, mostly be the accessory of special plane special use.Device of the present invention is can be general on microscope, removable and the micro mechanism of simple environment.It not only can carry out power and above-mentioned other physical action, and can examine under a microscope the dynamic process variation and the static nature of record sample simultaneously, in situ.As be installed under the infrared microscope, remove the exterior appearance can observe fiber and change, can also draw the externally variation of inner structure under the change condition of sample by infared spectrum.
Carry out some home position observation records with good conditionsi about microscopically, domestic have some inventions.1988 annuity Jianglings have been invented the multi-functional loading sample stage of scanning electron microscope (CN87214469U), can utilize SEM clearly to sample as stretchings, cross section bending, surface curvature (compression) or shearing (compression) condition under online observation, and can output record load and the relation of distortion.
For observing silicate reaction directly, on a macro scale, people such as Wang Guirong designed the hot platform of heating microscope (CN2388611Y) in 1999, and it comprises switch board, heating furnace, capture and image processing apparatus.
Chen Jing orchids in 2000 etc. have been invented a sample measuring platform (CN2444231Y), and fractographic sample is changed in-149~200 ℃ of scopes.
Abroad also have, also utilize on SEM as people such as Chiron R é mi and a puller system to be installed to come in-situ test fibre property (USP5606168.In situ tensile testing machine and sample for ascanning electron microscope.1997, February 25).People such as Rogers CH invention has temperature controlled strain device (USP 4043292.Microscope slide staining apparatus havingtemperature control.1977, August 23), people such as Hiroshi K had also invented heating microscope (USP 4705366.High temperature microscope in 1987,1987, November 10).People such as Tadami T have invented heating microscope (USP 4186305 High-temperature microscope).Simultaneously, Middlebrook TF invention heatable stage microscope (USP 4888463.Thermal microscope stage.1989December 19).
(commonly visible light and the ultraviolet light) that also has the research microscope light source to change: people such as Nobuhiro K had made ultraviolet microscope (USP 5481401.Ultraviolet microscope.1996, January 2) in 1996.2002, Atsushi T invention had the microscope (USP 6337767 Microscopewith visible and ultraviolet light illumination systems.2002, January 8) of visible light and ultraviolet source.
But all can be looked into and as can be known result and patent show, direct mode clamping multifunction sample platform with microslide, and the in site measurement principle of combining ability, heat, light, electricity, magnetic and observation by light microscope, method and device all occur.Therefore, the present invention not only microslide formula of original microscope accessories patches method, and the micrometering measuring mechanism of the original power of having, heat, light, electricity, magnetic action.
Summary of the invention:
The purpose of this invention is to provide a kind of former bit pattern micro-measuring method that is used for enforcement power on the microscope, light, heat, electricity, magnetic action, promptly a kind of being used on the microscope stage can apply power, heat, light, electricity, magnetic action, original position micro-measuring method.
Purpose of the present invention also provides a kind of former bit pattern micrometering amount device that is used for enforcement power on the microscope, light, heat, electricity, magnetic action.
Another object of the present invention provides the purposes of above-mentioned micrometering amount device.
Device of the present invention can be used for fiber and optical signature and the mechanical behavior of film material under power, heat, electricity, magnetic, thermal effect measured.Simultaneously, when swing holder, can carry out the observation of different angles to sample; During mobile sample, can observe the sample different parts.All functions are integrated on the template base of this micrometering amount device, and this device can be directly installed on the plugging mode of modular on the various microscopical objective tables.
This measurement mechanism is decided chuck 2 by what have a force transducer 1, the moving chuck 3 that can move horizontally and rotate around transverse axis, rotating unit 4, template base 5, stretching driver element 6, field action chamber 7, radiating light source 9, the CCD digital vedio recording device 94 of moving chuck 3, and the computing machine that has data acquisition card, data processing module and a control module is formed.
Describedly decide chuck 2, link to each other, be contained on the window formula template base 5 with force transducer 1.Deciding chuck 2 can not move horizontally, but can drive-200~200 ° rotation of sensor 1 by the hand rotation button.Described moving chuck 3 is loaded on the sliding seat 44, both can have been driven by the stretching driver element 6 or the rotating disc 65 that manually stretches to move horizontally, and finishes the stretching to sample; Can drive around horizontal rotational shaft by rotating micromotor 43 again, finish twisting action and angular setting sample 8.Describedly decide the effect that chuck 2 and moving chuck 3 have electrode concurrently.
Described field action chamber 7 can directly mount on drive screw 63 and slide bar 53, and by temperature sensor 75, semiconductor refrigerating heat-producing machine 72, heat-transfer metal plate 73, magnetic field magnetic coil 74 constitute.Enforcement is to the field action of fiber in the cavity or membrane material.Described temperature sensor 75 by (left side 751, in 752 and right 753 3 temperature sensors form; Described semiconductor refrigerating heat-producing machine 72 is made up of a left side 721 and right 722 2 semiconductor refrigerating heat-producing machines; Described heat-transfer metal plate 73 is made up of a left side 731 and right 732 2 the heat-transfer metal chips electrode of holding concurrently; Described magnetic field magnetic coil 74 is made up of a left side 741 and right 742 2 coils.
Described take-up housing 44 is loaded on slide bar 53 and the stretching driver element 6, and described stretching driver element 6 is made of stretching micromotor 61, clutch coupling 62, drive screw 63, screw bolt seat 64 and the rotating disc 65 that manually stretches, and finishes moving horizontally take-up housing 44.
Described radiating light source 9 is made of infra red radiation light source 91, uv radiation source 92 and visible light source 93; The CCD digital vedio recording device 94 of described record sample pattern device directly links to each other with microscope ocular or camera interface, or adopts general video camera device.
Described window formula template base 5 and microscope be with common microslide form and consistent size, can be directly be loaded on the microscope with the plugging mode of microslide.
Whole apparent size (length * wide * height) multi-functional, that patch sample bench is equal to or less than 80 * 28 * 25mm in the device of the present invention.
Characteristics of the present invention are:
A) controlling fiber or film sample are finished external force and combined actions such as heat, electricity, magnetic, radiation and intense light source on microscope stage efficiently and accurately, make ordinary optical microscope can carry out multi-functional analysis to measure.
B) apparatus of the present invention function is reasonable, has at least one can move horizontally in two chucks, and two chucks can controlled rotation and positioning of rotating, finishes that fiber draws, turns round, pressure effect and measurement, and the microexamination under this condition.Can be according to the wavelength needs light source in the changing device more.
C) can articulate field action chamber and external toggle lights easily, realize the simulation of environment.
D) apparatus of the present invention parts are simple, compact conformation; Light small and exquisite, be convenient to install and displacement, can be used for having on the microscope of objective table.
Description of drawings:
Fig. 1 is the multi-functional sample bench that patches of the main body mechanism of apparatus of the present invention: Fig. 1-the 1st, the front view of this sample bench; Fig. 1-2 is the left view of this sample bench; Fig. 1-the 3rd, the vertical view of sample bench.
Fig. 2 is the structural representation in this device field action chamber 7: Fig. 2-the 1st, the right view of front view A-A section; Fig. 2-the 2nd, the front view in field action chamber 7; Fig. 2-the 3rd, the left view in field action chamber 7.
Fig. 3 is the position of multifunction sample platform on microscope and the synoptic diagram of radiating light source configuration: Fig. 3-the 1st, front elevation, Fig. 3-the 2nd, left view.
Fig. 4 is the circuit and the control principle figure of this device.
Fig. 5 is the photo under wool fiber normality and the stretching: the sample wool (a) does not stretch; (b) photo that stretched 30% o'clock.
Fig. 6 is stretch a interference fringe picture when not stretching of high-strength polyester fiber: (a) be the terylene that do not stretch; (b) be the terylene after stretching.
Fig. 7 is a polyster fibre and is not having stress strain curve figure under the action of a magnetic field.
Fig. 8 is a polyster fibre and is not having stress strain curve figure under the electric field action.
Among the figure:
1---force transducer
2---decide chuck: the 21-chuck electrode of holding concurrently; 22-decides base of the carrier head; 23-decides chuck ratchet knob (± 180 °)
3---moving chuck (electrode of holding concurrently)
4---rotating unit: 41-connecting rod; The 42-connecting rod rack; 43-rotates micromotor; The 44-sliding seat
5---template base: 51-window formula template base; The 52-slider block; The 53-slide bar
6---stretching driver element: 61-stretching micromotor; The 62-clutch coupling; The 63-drive screw; The 64-screw bolt seat; The 65-rotating disc that manually stretches
7---field action chamber: 71-insulation crust frame; 72-semiconductor refrigerating heat-producing machine wherein 721,722 is respectively left and right sides semiconductor refrigerating heat-producing machine; 73-heat-transfer metal plate wherein 731,732 is respectively the left and right sides heat-transfer metal chip electric field electrode chip of holding concurrently; The 74-solenoid, 741,742 are respectively left and right sides coil; The 75-temperature sensor, 751,752 and 753 be respectively a left side, right temperature sensor neutralizes; The movable slide of 76-, wherein 761 is upper cover plate, 762 is lower cover slip.
8---tested sample comprises fiber and film sample
9---radiation source and image-generating unit: 91-infrared radiation lamp; 92-uv radiation source (containing catoptron); 93-visible light source (containing reflective mirror and condenser); 94-CCD digital vedio recording device.
Embodiment:
To help to understand the present invention by following examples, but not limit content of the present invention.
Adopt device of the present invention, shown in accompanying drawing 1,2 and 3, the description of this device as previously mentioned.Fiber is sandwiched in decides to have the multifunction sample table apparatus of fiber samples then on chuck 2 and the moving chuck 3, directly patch on the objective table of ordinary optical microscope, as shown in Figure 3.Adjust microscope and reach picture rich in detail, applied field effect, or power stretching action, or apply synchronously.Observe the pattern of fiber simultaneously, analyze morphological feature and the mechanical behavior of fiber under power, heat, light, electricity, magnetic action thus.Shown in the following example of detailed process.
Embodiment 1
Get one of wool fiber, adopt the aforesaid operations step, it is sandwiched in decides in chuck 2 and the moving chuck 3, start stretching micromotor 61 and make straightening of fibers, reaching pretension is that 5mgf stops micromotor 61, sees Fig. 5 (a) with the shape appearance figure that microscope and CCD digital vedio recording device 94 get fiber.Start stretching micromotor 61 these fibers of continuation stretching then and reach 30% length growth rate, clap the fiber pattern again, as Fig. 5 (b).Obviously, elongation of fiber and refinement are high-visible at microscopically.
Embodiment 2
Field action chamber 7 is mounted on drive screw 63 and slide bar 53, open the upper cover plate 761 of movable slide 76, the wool fiber of getting embodiment 1 is sandwiched in to be decided to cover upper cover plate 761 in chuck 2 and the moving chuck 3.Room temperature (20 ± 2 ℃, 65 ± 3%) down and start semiconductor refrigerating heat-producing machine 72 be heated to 120 ℃ and keep 10min after, survey the tensile property of wool respectively by force transducer 1; By deciding the conduction property of chuck 2, moving chuck 3 electrodes survey wool, the result is as shown in table 1.Obviously all there is notable difference in intensity, length growth rate, resistance and the form diameter under the condition of different temperatures.
The measurement result of 1 pair of wool fiber of table 1 example
Condition and index Intensity cN/tex Length growth rate Resistance value * 109 Ω g/cm3 Diameter μ m when not drawing 30% length growth rate diameter μ m
20℃±2℃ 120℃ 3.54 2.03 36.2 48.4 51.14 8.25 20.01 20.22 19.17 18.14
Variance rate (%) -42.66 33.70 -83.87 1.05 -5.37
Embodiment 3
Get high-strength polyester fiber, adopt abovementioned steps that fiber is sandwiched in and decide in chuck 2 and the moving chuck 3, and be positioned under the polarizing microscope.Start stretching micromotor 61 and reach pretension 6mgf, make straightening of fibers; And the 43 rotation fibers of the micromotor by rotating unit 4, eliminate reversing of fiber itself.At this moment clap interference fringe shown in Fig. 6 (a).Then, drawing of fiber reaches 20gf, clap Fig. 6 (b) interference fringe picture.Obviously there be moving of extinction fringe, illustrate that orientation changes, but less.
Embodiment 4
High-strength polyester fiber among the embodiment 3 is compared at no the action of a magnetic field and the stress strain curve when the action of a magnetic field is arranged, see Fig. 7; There being the stress strain curve under electric field and the no electric field action to compare, see Fig. 8, illustrate that magnetic field and electric field influence in the starting stage to some extent to the stretch behavior of high-strength polyester, promptly to the modulus of fiber with surrender the influence that decline is all arranged; In the fibre breakage stage effect is arranged also, little to the fracture strength influence, and influential to the elongation at break value.
Embodiment 5
Get the wool fiber of embodiment 1, fiber is sandwiched in decides in chuck 2 and the moving chuck 3, start stretching micromotor 61 and make the fiber constant load be stretched to 1.5gf to stop micromotor 61, keep the elongate fiber amount constant.Give infrared and ultraviolet light irradiation by infrared radiation lamp 91 and uv radiation source 92 respectively, and contrast with the result who does not give photoirradiation, its fiber measured result is as shown in table 2.Ultraviolet irradiation is lax little to power, but fracture strength and length growth rate after lax and 30min photo-irradiation treatment obviously descend; Infrared light irradiation is obvious to the lax influence of power, but fracture strength and elongation change after lax and 30min photo-irradiation treatment are little.The damage of fiber and mechanical behavior influence are apparent.
The photoirradiation measurement result contrast of table 2 wool fiber
Figure A20051002996600091

Claims (9)

1, a kind of former bit pattern micro-measuring method that is used for enforcement power on the microscope, light, heat, electricity, magnetic action, it is characterized in that with the sample bench base it being that a kind of modular patches sample bench, it is consistent with general microslide shape and size, adopts the mode identical with the microslide placement to patch this sample bench; Described sample bench has and applies power at the same time or separately and stretch and reverse, photoirradiation, change temperature, apply the effect in electric field and magnetic field, measures on the microscope morphological feature of tested sample under power, light, heat, electricity, the action of a magnetic field being observed with mechanical behavior and measures.
2, according to the measurement mechanism of the described micro-measuring method of claim 1, it is characterized in that this measurement mechanism decides chuck 2 by what have a force transducer 1, the moving chuck 3 that moves horizontally and rotate around transverse axis, rotating unit 4, template base 5, stretching driver element 6, field action chamber 7, radiating light source 9, the CCD digital vedio recording device 94 of moving chuck 3, and the computing machine that has data acquisition card, data processing module and a control module is formed.
3, according to the described device of claim 2, it is characterized in that the described chuck 2 of deciding, link to each other with force transducer 1, be contained on the window formula template base 5, this decides chuck 2 is undertaken-200~200 ℃ by the hand rotation button rotation; Described moving chuck 3 is loaded on the sliding seat 44, is driven by stretching driver element 6 or the rotating disc 65 of manually stretching and moves horizontally the stretching of finishing sample, or by micromotor 43 driven rotary of rotating unit 4, finish twisting action and angular setting to sample; Describedly decide the effect that chuck 2 and moving chuck 3 have electrode concurrently.
4, according to the described device of claim 2, it is characterized in that described window formula template base 5 and microscope with common microslide form and consistent size, can be directly be loaded on the microscope with the plugging mode of microslide.
5,, it is characterized in that described field action chamber 7 directly mounts on drive screw 63 and slide bar 53, and by temperature sensor 75, semiconductor refrigerating heat-producing machine 72, heat-transfer metal plate 73 and magnetic field magnetic coil 74 constitute according to the described device of claim 2.
6,, it is characterized in that described take-up housing 44 is loaded on slide bar 53 and the stretching driver element 6 according to the described device of claim 3; Described stretching driver element 6 is made of stretching micromotor 61, clutch coupling 62, drive screw 63, screw bolt seat 64 and the rotating disc 65 that manually stretches.
7,, it is characterized in that described radiating light source 9 is made of infra red radiation light source 91, uv radiation source 92 and visible light source 93 according to the described device of claim 2; The CCD digital vedio recording device 94 of described record sample pattern device directly links to each other with below microscope ocular or camera interface or video camera device.
8,, it is characterized in that the described whole overall dimensions that patches sample bench is equal to or less than 80 * 28 * 25mm according to the described device of claim 2.
9, according to the purposes of the described device of claim 2, the observation that it is characterized in that being used for form, the microtexture of fiber and membrane material is measured, and power, heat, light, electricity, magnetic separately and the observation during compound action measure.
CNB2005100299669A 2005-09-23 2005-09-23 Micro-measuring method, apparatus and use on microscope Expired - Fee Related CN100386619C (en)

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CN101158629B (en) * 2007-10-26 2010-06-02 北京工业大学 Scanning electron microscope electron back scattering diffraction in-situ stretching device and measuring method
CN102103148A (en) * 2010-07-23 2011-06-22 燕山大学 Sample table for scanning electron microscope in-situ observation of stress corrosion cracking of metal material
CN102128752A (en) * 2010-11-26 2011-07-20 中国科学院力学研究所 Micro-torque mechanical testing machine and method
CN103105510A (en) * 2013-01-31 2013-05-15 上海纳米技术及应用国家工程研究中心有限公司 Film sample stretching device used for being matched with atomic force microscope (AFM)
CN103116039A (en) * 2013-01-31 2013-05-22 上海纳米技术及应用国家工程研究中心有限公司 Film sampling compressing device used with atomic force microscopes
CN103512803A (en) * 2013-09-26 2014-01-15 吉林大学 Multi-load and multi-physics coupling material micromechanical performance in-situ testing instrument
CN106769686A (en) * 2016-12-16 2017-05-31 北京服装学院 A kind of tester and method for textile aqueous water imbibition rapid-curing cutback performance
CN109612998A (en) * 2019-01-30 2019-04-12 重庆大学 A kind of micro-manipulation device and its control method of multifactor collaboration
CN109883839A (en) * 2019-03-28 2019-06-14 广东工业大学 A kind of stretcher of material sample and system for infrared spectrum analysis
WO2020224002A1 (en) * 2019-05-08 2020-11-12 苏州昇特智能科技有限公司 Device for measuring mechanical properties of micro-nano scale fibers

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CN101158629B (en) * 2007-10-26 2010-06-02 北京工业大学 Scanning electron microscope electron back scattering diffraction in-situ stretching device and measuring method
CN102103148B (en) * 2010-07-23 2014-03-05 燕山大学 Sample table for scanning electron microscope in-situ observation of stress corrosion cracking of metal material
CN102103148A (en) * 2010-07-23 2011-06-22 燕山大学 Sample table for scanning electron microscope in-situ observation of stress corrosion cracking of metal material
CN102128752A (en) * 2010-11-26 2011-07-20 中国科学院力学研究所 Micro-torque mechanical testing machine and method
CN102128752B (en) * 2010-11-26 2012-09-05 中国科学院力学研究所 Micro-torque mechanical testing machine and method
CN103116039B (en) * 2013-01-31 2015-09-09 上海纳米技术及应用国家工程研究中心有限公司 The supporting film sample compression set of atomic force microscope
CN103116039A (en) * 2013-01-31 2013-05-22 上海纳米技术及应用国家工程研究中心有限公司 Film sampling compressing device used with atomic force microscopes
CN103105510A (en) * 2013-01-31 2013-05-15 上海纳米技术及应用国家工程研究中心有限公司 Film sample stretching device used for being matched with atomic force microscope (AFM)
CN103105510B (en) * 2013-01-31 2015-10-28 上海纳米技术及应用国家工程研究中心有限公司 The supporting film sample stretching device of atomic force microscope
CN103512803A (en) * 2013-09-26 2014-01-15 吉林大学 Multi-load and multi-physics coupling material micromechanical performance in-situ testing instrument
CN103512803B (en) * 2013-09-26 2016-08-17 吉林大学 Multi-load multiple physical field coupling material Micro Mechanical Properties in-situ test instrument
CN106769686A (en) * 2016-12-16 2017-05-31 北京服装学院 A kind of tester and method for textile aqueous water imbibition rapid-curing cutback performance
CN106769686B (en) * 2016-12-16 2023-10-24 北京服装学院 Instrument and method for testing liquid water absorption and quick drying performance of textile
CN109612998A (en) * 2019-01-30 2019-04-12 重庆大学 A kind of micro-manipulation device and its control method of multifactor collaboration
CN109883839A (en) * 2019-03-28 2019-06-14 广东工业大学 A kind of stretcher of material sample and system for infrared spectrum analysis
CN109883839B (en) * 2019-03-28 2022-04-19 广东工业大学 Material sample stretching device and system for infrared spectroscopy
WO2020224002A1 (en) * 2019-05-08 2020-11-12 苏州昇特智能科技有限公司 Device for measuring mechanical properties of micro-nano scale fibers

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