CN109612998A - A kind of micro-manipulation device and its control method of multifactor collaboration - Google Patents
A kind of micro-manipulation device and its control method of multifactor collaboration Download PDFInfo
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- CN109612998A CN109612998A CN201910089174.2A CN201910089174A CN109612998A CN 109612998 A CN109612998 A CN 109612998A CN 201910089174 A CN201910089174 A CN 201910089174A CN 109612998 A CN109612998 A CN 109612998A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
A kind of micro-manipulation device of multifactor collaboration comprising master control system, micromanipulation module, observational record module, power module, thermal module, modular pressure and displacement module.Master control system is configured to acquire the signal of above-mentioned modules, and sends control signal to them.Micromanipulation module executes required operation and/or detection to the sample being carried on objective table.Observational record module is arranged to the working region of micromanipulation module being included in its observational record within sweep of the eye, for being observed record to the process of operation and/or detection.Power module is used to provide master control system, micromanipulation module, observational record module, thermal module, modular pressure and displacement module power supply, and power module further includes the electric field applying unit for current field condition needed for applying operation and/or detection.Displacement module is connected with the objective table, and in response to the control signal of master control system and driving objective table is subjected to displacement.
Description
Technical field
The invention belongs to precision instruments, microtechnique technical field, and in particular to a kind of micromanipulation of multifactor collaboration
Device and its control method.
Background technique
With the development of the technologies such as material, biology, many new function materials and technology, the inspection for its performance have been emerged in large numbers
It surveys and the analysis of mechanism is also constantly from macroscopic view to microcosmic deep.Although existing test platform mostly can be on a microscopic scale
Sample is centainly operated, but its application environment condition is single, detection opereating specification is limited, and carries out not to material
When with performance detection test, needs switching platform to operate, not only make complicated for operation, inefficiency.It is continuous for needing to carry out
The sample of the test of a variety of environmental factor variables can also occur destroying sample in handoff procedure or introduce the feelings of disturbing factor
Condition, so that test result has certain error.For needing to carry out the sample of multifactor cooperation detection, rarely has detection device energy
Enough meet test request.
Backward detection technique will directly restrict the research of new material, especially for developing swift and violent electric power now
Insulation and the material technologies such as electronic sensor, need that its micro-property detect under the environment such as heat, electric field, pressure or
Operation is badly in need of one kind and is capable of the micro-manipulation device of multifactor collaborative work to promote current detection level.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides a kind of micro-manipulation device of multifactor collaboration,
Multifactor collaboration is carried out by the coupled arrangement between different function units or module in structure in the micro-manipulation device
Apply, to realize in complex environment to the micromanipulation of sample and/or detection.
On the one hand, the present invention provides a kind of micro-manipulation device comprising master control system, micromanipulation module, observation note
Record module, power module, thermal module, modular pressure and displacement module.The master control system is configured to acquire the micro- behaviour
Make module, the observational record module, the power module, the thermal module, the modular pressure and the displacement module
Signal, and to they send control signal.The micromanipulation module executes the measuring samples being carried on objective table
Required operation and/or detection.The observational record module is arranged to for being included in the working region of the micromanipulation module
Its observational record within sweep of the eye, makes it possible to be observed note to the operation of the micromanipulation module and/or detection process
Record.The power module is used for the master control system, the micromanipulation module, the observational record module, the temperature
Module, the modular pressure and the displacement module provide power supply, the power module include for apply the operation and/
Or the electric field applying unit of current field condition needed for detection process.The displacement module is connected with the objective table, and rings
The control signal of master control system described in Ying Yu and drive the objective table to be subjected to displacement.
Preferably, the electric field applying unit, the thermal module and the modular pressure are configured to each independently
Apply corresponding electric field, temperature and pressure.
Preferably, the electric field applying unit, the thermal module and the modular pressure are configured to mutually synergistically
Apply corresponding electric field, temperature and pressure, wherein successively applying temperature, pressure, electric field in order.
Preferably, the thermal module is configured to the control signal of the master control system and applies described in execution
Temperature needed for operation and/or detection, the temperature that can apply are 20~400 DEG C.
Preferably, the modular pressure is configured to the control signal of the master control system and applies described in execution
Pressure needed for operation and/or detection, the pressure that can apply are 0~900MPa.
Preferably, the thermal module includes thermal insulation layer and heating layer, wherein the thermal insulation layer is located on the objective table
Side, the heating layer are located on the thermal insulation layer.The electric field applying unit includes ceramic insulating layer and ground electrode, wherein institute
It states ceramic insulating layer to be laminated on the heating layer, the ground electrode is located on the ceramic insulating layer, the ground electrode configuration
At can carry measuring samples and be equipped with the temperature sensor of sensing temperature.The modular pressure includes high-voltage probe, pressure survey
Module and pressure module are measured, the high-voltage probe is configured to the pressure needed for applying to the measuring samples, the pressure measurement
Module is configured to the pressure that is applied on the measuring samples by the high-voltage probe of measurement, the pressure module for from
The master control system receives signal and drives the high-voltage probe to exert a force based on the signal received.
Preferably, the micromanipulation module is configured to the control signal based on the master control system and is being manually operated
It works under mode or automatic operation mode.
On the other hand, the present invention also provides a kind of methods for controlling above-mentioned micro-manipulation device, which comprises
The power module is adjusted to working condition by step (I), is the master control system, the micromanipulation mould
Block, the observational record module, the thermal module, the modular pressure and the displacement module provide 12V work electricity
Source；
Step (II), the master control system send control signal, the micromanipulation module to the micromanipulation module
Measuring samples are operated and/or detected under automatic operation mode in response to control signal；
Step (III), the master control system send control signal, the observational record mould to the observational record module
Block carries out micro objective focus adjustment in response to the control signal, and by industrial camera and image processing program in institute
It states in operation and/or detection process and obtains real time video signals；
Step (IV), the master control system send control signal to the displacement module, and the displacement module is in response to this
It controls signal and sample region to be checked is adjusted to position appropriate, the master control system carries out one or more of control:
Operating temperature and Cooling rate based on setting control the thermal module to provide operation and/or detect required temperature；
Applied electric field type and electric field strength numerical value based on setting, according to the electrode system of high-voltage probe and grounding electrode composition
Type and the distance between the high-voltage probe and grounding electrode calculate required operating voltage and rate of pressure rise, control
The electric field applying unit increases the operating voltage of voltage to setting, in order to provide operating and/or detecting required electric field；With
And operating pressure and regulations speed based on setting, it controls the modular pressure and carrys out the operating pressure that pressure is adjusted to setting
Pressure needed for detection is provided；
Step (V), the command code that the master control system transmission has been set are described micro- to the micromanipulation module
Operation module executes micromanipulation, the detection operation of complete paired samples under automatic operation mode.
Compared with prior art, micro-manipulation device of the invention provide a variety of environment such as temperature, pressure, electric field because
The Collaborative Control of element is that the single factor test in new material R&D process acts on, under multifactor successively effect, multifactor synergistic effect
Test provide good platform, high-precision displacement module and observational record module realize operation, in detection process
High-precision visualizes, and improves operation precision, improves detection efficiency.
The present apparatus efficient, convenient, accurately can carry out micro- behaviour to sample under varying environment factor synergistic effect
Make, is conducive to the technology development for pushing the microscopic performance test of new material or biological sample.
Detailed description of the invention
Fig. 1 shows a kind of figure of the micro-manipulation device structural principle of multifactor collaboration of the application.
Fig. 2 shows electric field applying units in the micro-manipulation device of Fig. 1, the arrangement side of thermal module and modular pressure
Formula.
Fig. 3 is the figure for showing the details of modular pressure mesohigh probe, pressure measuring module and the module that presses.
Specific embodiment
Micro-manipulation device and its control below in conjunction with the drawings and specific embodiments to multifactor collaboration of the invention
Method is further described.
Fig. 1 shows a kind of figure of the micro-manipulation device structural principle of multifactor collaboration of the application, wherein specifically showing
The connection relationship in micro-manipulation device between each formant is gone out.
As shown in Figure 1, the micro-manipulation device generally includes master control system 1, micromanipulation module 2, observational record mould
Block 3, power module 4, thermal module 5, modular pressure 6 and displacement module 7.Wherein, micromanipulation module 2, thermal module 5, pressure
Electric field applying unit in power module 6 and power module 4 is located in the (not shown) of sample operation room.
Master control system 1 be configured to acquisition micromanipulation module 2, observational record module 3, power module 4, thermal module 5,
The signal of modular pressure 6 and displacement module 7, and control signal is sent to above-mentioned modules.Master control system 1 is preferably based on
LabVIEW is developed made of Environment Design, is carried out communication connection by USB data line, can be counted to more hardware devices
According to the execution circuit for acquiring and sending control signals to respective modules, being analyzed by the initial data come up to acquisition can
To obtain significant result and show output.The Parameter Switch that master control system 1 is configured to input graphical interfaces is at data
Signal is sent to the execution circuit of corresponding module.
Micromanipulation module 2 be configured to can in response to master control system 1 control signal and automatic or manual operate mould
It works under formula.Wherein, manual operation mode is only limitted to without the case where progress that applies electric field, micromanipulation mould under the mode
Block 2 and the automatic regulation function of observational record module 3 release, by manually adjusting the adjusting knob in micromanipulation module 2
(not shown) is operated.
In micro-manipulation device shown in Fig. 1, observational record module 3 is arranged in can be by the work of micromanipulation module 2
The position within the vision of its observational record is included in region, makes it possible to operation and/or detection to the micromanipulation module 2
Process is observed record.Observational record module 3 can obtain video, picture signal, edit to the picture signal of preservation
It saves, for the picture signal Jing Guo range correction, the size of object in image can also be measured, can be used for micro-
The operation of operation module 2 and detection process are observed and record, and result is transferred to master control system 1 and is edited and is protected
It deposits.The precision of observational record module 3 is determined by the resolution ratio of industrial camera, preferably can achieve 20,000,000 pixels.
Power module 4 includes electric field applying unit.On the one hand, power module 4 is configured as master control system 1, micromanipulation
Module 2, observational record module 3, thermal module 5, modular pressure 6 and displacement module 7 provide the working power of 12V.Another party
Face, power module 4 are configured to the control signal of master control system 1 and electric field applying unit are utilized to apply measuring samples
Required electric field.
Thermal module 5 is configured to the control signal of master control system 1 and provides for the operation and/or detection of sample
Required temperature condition.
Modular pressure 6 is configured to the control signal of master control system 1 and provides for the operation and/or detection of sample
Required pressure condition.
Displacement module 7 is connected with the objective table (not shown) of carrying measuring samples, is configured to master control system 1
Control signal and moving stage, and then measuring samples are moved to specified area of visual field, in order to micromanipulation module 2
It is operated and/or is detected, observational record module 3 is observed record.The displacement accuracy of displacement module 7 is preferably on 5 microns of left sides
It is right.
In order to realize in the operation and/or detection process to sample coordinated control electric field, temperature, pressure etc. it is a variety of because
Element completes micromanipulation and/or detection in complex environment to sample, applies in structure to the electric field in power module 4 single
Member, thermal module 5 and modular pressure 6 have carried out reasonable design.Specifically, thermal module 5, electric field applying unit and pressure
Module 6 is successively arranged from bottom to up.Thermal module 5 and electric field applying unit are located on the upside of objective table.Fig. 2 shows micro- behaviour
Make the arrangement of electric field applying unit in device, thermal module 5 and modular pressure 6.It, can for the considerations of simplifying structure
To collectively act as the objective table of carrying measuring samples by thermal module 5 and electric field applying unit.
As shown in Fig. 2, thermal module 5 includes thermal insulation layer 8 and the heating layer 9 on thermal insulation layer 8, the setting of thermal insulation layer 8 exists
On objective table.Electric field applying unit includes ceramic insulating layer 10 and the grounding electrode 11 on ceramic insulating layer 10, and ceramics are absolutely
Edge layer 10 is located at 9 top of heating layer, and grounding electrode 11 is configured to carrying measuring samples 12.Sample is operated and/or is examined
When survey, measuring samples 12 are placed on grounding electrode 11, and the heat of heating layer 9 passes through ceramic insulating layer 10 and grounding electrode 11
It is transferred to sample 12, the temperature sensor of detection temperature is installed on grounding electrode 11.
Modular pressure 6 includes high-voltage probe 13, pressure measuring module 14 and pressure module 15.High-voltage probe 13 be located to
Measuring samples 12 can be applied pressure by way of pushing towards measuring samples 12 by 12 top of sample product.Pressure measurement
Module 14 is used to measure the pressure value that measuring samples 12 are applied to by high-voltage probe 13, and pressure module 15 is configured to from master control
System 1 receives control signal, then high-voltage probe 13 is driven to exert a force downwards.Fig. 3 show 6 mesohigh probe 13 of modular pressure,
The details of pressure measuring module 14 and pressure module 15, as shown, high-voltage probe 13 passes through end clamp and pressure measurement mould
Block 14 is connected, and pressure measuring module 14 further includes pressure sensor, and pressure module 15 drives pressure measurement by transmission system
Module 14 and high-voltage probe 13 move, to apply required pressure to measuring samples 12.
13 another aspect of high-voltage probe can be used for forming various electrode system types with grounding electrode 11.High-voltage probe
13 can use various suitable planforms, such as needle-shaped, column or spherical, can correspondingly be formed with grounding electrode 11
Needle to board electrode system, pole-board electrode system or ball-plate electrode system.The pressure pattern acted on measuring samples 12 depends on
In the planform of high-voltage probe 13.
Electric field applying unit be arranged to directly to carry measuring samples 12 and by ceramic insulating layer 10 and other devices into
Row electric field isolation, it is ensured that the only effect of the receiving of measuring samples 12 electric field, other devices are hardly by the work of electric field
With facilitating the service life for extending micro-manipulation device to reduce the possibility of device voltage ageing in micro-manipulation device.Temperature
The lower section of measuring samples 12 and electric field applying unit is arranged in module 5, carries out heating and by electric field applying unit from below
Ceramic insulating layer 10 and grounding electrode 11 transfer heat to measuring samples, can farthest guarantee to treat sample in this way
The effect that product 12 heat, ceramic insulating layer 10 not only may be implemented thermally conductive function but also can reduce electric field applying unit and temperature mould
Influencing each other between block 5.
Arrangement based on above-mentioned electric field applying unit, thermal module 5 and modular pressure 6, when needs are at the same time by electricity
When sample being operated and/or detected in the complex environment that field, temperature and pressure condition are constituted, electric field, temperature and pressure item
The application sequence of part is followed successively by temperature, pressure and electric field.In view of safe operation to prevent electric shock accidents, electric field is applied
Adding should carry out finally, and voltage adjusting must be carried out except safe distance, to guarantee the personal safety of operator.
When needing temperature and pressure factor to act synergistically, it is contemplated that the time needed for thermal module 5 is heated to set temperature compares
It is longer, and the overlong time that presses may damage sample, therefore thermal module 5 is first heated, setting temperature to be achieved
After degree, pressure is adjusted to as quickly as possible by required numerical value by modular pressure 6, then measuring samples 12 are carried out accordingly
Operation and/or detection.
It is described below by control method of the embodiment to above-mentioned micro-manipulation device.
Embodiment 1: basic micromanipulation control method
Basic micromanipulation is without applying the conditions such as electric field, temperature, pressure, only the basic function operating process of device.
Firstly, power module 4 is adjusted to working condition, 12V work is provided for other each units of micro-manipulation device
Make power supply.
Next, selecting or switching the operation mode of micromanipulation module 2 by master control system 1.With automatic operation mode
For, after being chosen to be automatic operation mode by master control system 1, observational record module 3 is sent in response to master control system 1
It controls signal and carries out micro objective focus adjustment, obtained on host computer by industrial camera and image processing program
Real time video signals in sample operation room.
Then, objective table is adjusted to position appropriate in response to control signal that master control system 1 is sent by displacement module 7
It sets, the centre coordinate of objective table is denoted as (x, y, z) at this time.
Next, master control system 1, which sends control signal to micromanipulation module 2, carries out micromanipulation, specifically, master control
Parameter Switch that graphical interfaces inputs is sent to the execution circuit of micromanipulation module 2 by system 1 at data-signal.Observation note
It records module 3 and obtains whole operation and/or the video in detection process, picture signal, editor guarantor is carried out to the picture signal of preservation
It deposits.
Embodiment 2: the micromanipulation control method under temperature factor independent role
Firstly, power module 4 is adjusted to working condition, 12V work is provided for other each units of micro-manipulation device
Make power supply.
Next, selecting or switching the operation mode of micromanipulation module 2 by master control system 1.With automatic operation mode
For, after being chosen to be automatic operation mode by master control system 1, observational record module 3 is sent in response to master control system 1
It controls signal and carries out micro objective focus adjustment, obtained on host computer by industrial camera and image processing program
Real time video signals in sample operation room.
Then, objective table is adjusted to position appropriate in response to control signal that master control system 1 is sent by displacement module 7
It sets.
Next, work temperature is arranged in master control system 1workWith temperature rise rate Δ T, thermal module 5 is in response to master
The control signal of control system 1 and the work temperature that temperature is risen to settingwork。
Next, master control system 1 sends the control signal for executing sample detection to micromanipulation module 2, it is specifically, main
Control system 1 can send control signals to micro- in such a way that the Parameter Switch for inputting graphical interfaces is at data-signal
The execution circuit of operation module 2.Micromanipulation module 2 carries out sample inspection based on control signal transmitted by master control system 1
It surveys.Observational record module 3 obtains whole operation and/or the video in detection process, picture signal, to the picture signal of preservation
Carry out editor's preservation.
Embodiment 3: the micromanipulation control method under electric field factor independent role
Firstly, power module 4 is adjusted to working condition, 12V work is provided for other each units of micro-manipulation device
Make power supply.
Next, selecting or switching the operation mode of micromanipulation module 2 by master control system 1.With automatic operation mode
For, after being chosen to be automatic operation mode by master control system 1, observational record module 3 is sent in response to master control system 1
It controls signal and carries out micro objective focus adjustment, obtained on host computer by industrial camera and image processing program
Real time video signals in sample operation room.
Then, objective table is adjusted to position appropriate in response to control signal that master control system 1 is sent by displacement module 7
It sets.
Next, applied electric field type E is arranged in master control system 1workAnd electric field strength numerical value Evalue, master control system
The electrode system type and high-voltage probe 13 and grounding electrode 11 that system 1 is formed according to high-voltage probe 13 and grounding electrode 11 it
Between distance d, calculate required operating voltage UxorkAnd rate of pressure rise Δ U, power module 4 are sent in response to master control system 1
Control signal and bring the voltage up to the operating voltage U of settingwork.For the response speed for accelerating system, deposit in the database
The field distribution data for having stored up Different electrodes system, as input service type of electric field EworkAnd electric field strength numerical value EvalueAfterwards,
Automatically the field distribution data for transferring corresponding electrode system determine operating voltage range using look-up table, recycle interpolation method
Required operating voltage U is calculatedwork.Usually pass through Δ U=Uwork/ 10 calculate rate of pressure rise Δ U, when calculated
Uwork/ 10 more than 500V/s when Δ U take 500V/s, when calculating Uwork/ 10 Δ U when being less than 200V/s take 200V/s, boosting speed
Rate Δ U's ranges preferably from 200V/s~500V/s.
Next, master control system 1 sends the control signal for executing sample detection to micromanipulation module 2, it is specifically, main
Control system 1 can send control signals to micro- in such a way that the Parameter Switch for inputting graphical interfaces is at data-signal
The execution circuit of operation module 2.Micromanipulation module 2 carries out sample inspection based on the control signal that master control system 1 is sent to it
It surveys.Observational record module 3 obtains whole operation and/or the video in detection process, picture signal, to the picture signal of preservation
Carry out editor's preservation.
Embodiment 4: the micromanipulation control method under pressure factor independent role
Firstly, power module 4 is adjusted to working condition, 12V work is provided for other each units of micro-manipulation device
Make power supply.
Next, selecting or switching the operation mode of micromanipulation module 2 by master control system 1.With automatic operation mode
For, after being chosen to be automatic operation mode by master control system 1, observational record module 3 is sent in response to master control system 1
It controls signal and carries out micro objective focus adjustment, obtained on host computer by industrial camera and image processing program
Real time video signals in sample operation room.
Then, objective table is adjusted to position appropriate in response to control signal that master control system 1 is sent by displacement module 7
It sets.
Next, the setting setting operating pressure P in master control system 1workWith regulations speed Δ P, modular pressure 6 is responded
The control signal transmitted by master control system 1 and pressure is adjusted to the operating pressure P of settingwork, regulations speed Δ P is preferred
For Δ P≤Pwork× 5%.
Next, master control system 1 sends the control signal for executing sample detection to micromanipulation module 2, it is specifically, main
Control system 1 can send control signals to micro- in such a way that the Parameter Switch for inputting graphical interfaces is at data-signal
The execution circuit of operation module 2.Micromanipulation module 2 carries out sample inspection based on the control signal that master control system 1 is sent to it
It surveys.Observational record module 3 obtains whole operation and/or the video in detection process, picture signal, to the picture signal of preservation
Carry out editor's preservation.
Embodiment 5: the micromanipulation control method under temperature, pressure and electric field factor synergistic effect
Firstly, power module 4 is adjusted to working condition, 12V work is provided for other each units of micro-manipulation device
Make power supply；
Next, selecting or switching the operation mode of micromanipulation module 2 by master control system 1.With automatic operation mode
For, after being chosen to be automatic operation mode by master control system 1, observational record module 3 is sent in response to master control system 1
It controls signal and carries out micro objective focus adjustment, obtained on host computer by industrial camera and image processing program
Real time video signals in sample operation room.
Then, objective table is adjusted to position appropriate in response to control signal that master control system 1 is sent by displacement module 7
It sets.
Next, in master control system 1 by the application of temperature, pressure and electric field and/or adjusting sequence be arranged to be successively
Temperature → pressure → electric field, and it is relevant that temperature, pressure and electric field are respectively set referring to embodiment 2~4 in master control system 1
Parameter value sends control signal, temperature to thermal module 5, modular pressure 6 and power module 4 based on the various parameter values of setting
Module 5, modular pressure 6 and power module 4 are started to work respectively responsive to control signal transmitted by master control system 1, so that
Temperature, pressure and electric pulse field parameter in detection environment respectively reach setting value.
Next, master control system 1 sends the control signal for executing sample detection to micromanipulation module 2, it is specifically, main
Control system 1 can send control signals to micro- in such a way that the Parameter Switch for inputting graphical interfaces is at data-signal
The execution circuit of operation module 2.Micromanipulation module 2 carries out sample inspection based on the control signal that master control system 1 is sent to it
It surveys.Observational record module 3 obtains whole operation and/or the video in detection process, picture signal, to the picture signal of preservation
Carry out editor's preservation.
Applicant combines Figure of description to be described in detail and retouch a specific embodiment of the invention and embodiment
It states, it will be appreciated by those skilled in the art that above embodiments are only the preferred embodiments of the invention.Detailed explanation
It is intended merely to that reader is helped to more fully understand spirit of the invention, it is not intended to limit the protection scope of the present invention.On the contrary, any
It should all be fallen within the scope and spirit of the invention based on any improvement or modification made by spirit of the invention.
Claims (8)
1. a kind of micro-manipulation device of multifactor collaboration comprising master control system (1), micromanipulation module (2), observational record
Module (3), power module (4), thermal module (5), modular pressure (6) and displacement module (7),
The master control system (1) is configured to acquire the micromanipulation module (2), the observational record module (3), the power supply
Module (4), the thermal module (5), the modular pressure (6) and the displacement module (7) signal, and to they send
Signal is controlled,
The micromanipulation module (2) executes required operation and/or detection to the sample being carried on objective table,
The observational record module (3) is arranged to the working region of the micromanipulation module (2) being included in its observational record
Within sweep of the eye, for being observed record to the process of the operation and/or detection,
The power module (4) is used for the master control system (1), the micromanipulation module (2), the observational record module
(3), the thermal module (5), the modular pressure (6) and the displacement module (7) provide power supply, the power module (4)
It further include the electric field applying unit for current field condition needed for applying the operation and/or detection,
The displacement module (7) is connected with the objective table, and drives in response to the control signal of the master control system (1)
The objective table is subjected to displacement.
2. the micro-manipulation device of multifactor collaboration according to claim 1, it is characterised in that:
The electric field applying unit, the thermal module (5) and the modular pressure (6) are configured to apply electricity each independently
Field, temperature and pressure.
3. micro-manipulation device according to claim 1, it is characterised in that: the electric field applying unit, the temperature mould
Block (5) and the modular pressure (6) be configured to mutually synergistically apply electric field, temperature and pressure, wherein the sequence applied according to
Secondary is temperature, pressure and electric field.
4. the micro-manipulation device of multifactor collaboration according to claim 2 or 3, it is characterised in that:
The thermal module (5) be configured to the control signal of the master control system (1) and apply execute it is described operation and/
Or temperature needed for detection, the temperature that can apply are 20~400 DEG C.
5. the micro-manipulation device of multifactor collaboration according to claim 2 or 3, it is characterised in that:
The modular pressure (6) be configured to the control signal of the master control system (1) and apply execute it is described operation and/
Or pressure needed for detection, the pressure that can apply are 0~900MPa.
6. the micro-manipulation device of multifactor collaboration according to claim 2 or 3, it is characterised in that:
The thermal module includes thermal insulation layer (8) and heating layer (9), wherein the thermal insulation layer (8) is located above the objective table,
The heating layer (9) is located on the upside of the thermal insulation layer (8),
The electric field applying unit includes ceramic insulating layer (10) and grounding electrode (11), wherein the ceramic insulating layer (10) position
Above the heating layer (9), the grounding electrode (11) is located on the ceramic insulating layer (10), the grounding electrode (11)
It is configured to carrying measuring samples (12) and is equipped with the temperature sensor of sensing temperature,
The modular pressure (6) includes high-voltage probe (13), pressure measuring module (14) and pressure module (15), and the high pressure is visited
Needle (13) is configured to the pressure needed for applying to the measuring samples (12), and it is logical that the pressure measuring module (14) is configured to measurement
The pressure that the high-voltage probe (13) is applied on the measuring samples (12) is crossed, the pressure module (15) is used for from the master
Control system (1) receives signal and drives the high-voltage probe (13) to exert a force based on the signal received.
7. the micro-manipulation device of multifactor collaboration according to claim 1, it is characterised in that:
The micromanipulation module (2) be configured to the control signal based on the master control system (1) and in manual operation mode or
It works under automatic operation mode.
8. a kind of method for the micro-manipulation device for controlling multifactor collaboration described in claim 1, which comprises
The power module (4) is adjusted to working condition by step (I), is the master control system (1), the micromanipulation mould
Block (2), the observational record module (3), the thermal module (5), the modular pressure (6) and the displacement module (7)
12V working power is provided；
Step (II), master control system (1) the Xiang Suoshu micromanipulation module (2) send control signal, the micromanipulation mould
Block (2) is operated and/or is detected to measuring samples under automatic operation mode in response to the control signal；
Step (III), the master control system (1) send control signal to observational record module (3), and the observational record module is rung
Micro objective focus adjustment should be carried out in the control signal, and by industrial camera and image processing program in the operation
And/or real time video signals are obtained during detection；
Step (IV), master control system (1) the Xiang Suoshu displacement module (7) send control signal, the displacement module in response to
The control signal and sample region to be checked is adjusted to position appropriate, the master control system (1) successively carry out it is following a kind of or
Various control:
Operating temperature and Cooling rate based on setting control the thermal module (5) to provide needed for operation and/or detection
Temperature；And/or
Operating pressure and regulations speed based on setting control the work pressure that pressure is adjusted to setting by the modular pressure (6)
Power come provide operation and/or detection needed for pressure；And
Applied electric field type and electric field strength numerical value based on setting, according to the electrode system of high-voltage probe and grounding electrode composition
Type of uniting and the distance between the high-voltage probe and the grounding electrode calculate required operating voltage and boosting speed
Rate controls the operating voltage that the electric field applying unit increases voltage to setting, in order to provide operating and/or detecting required electricity
?；And
Step (V), the command code that master control system (1) transmission has been set are described micro- to the micromanipulation module (2)
Operation module (2) executes micromanipulation, the operation and/or detection of complete paired samples under automatic operation mode.
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Cited By (1)
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| CN113390868A (en) * | 2020-03-12 | 2021-09-14 | 平湖莱顿光学仪器制造有限公司 | Method and system for presenting target microscopic image |
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