CN1701641A - 有源矩阵型有机el显示体制造方法及其装置和有源矩阵型有机el显示体、液晶阵列制造方法和液晶阵列、滤色片衬底制造方法及其装置和滤色片衬底 - Google Patents
有源矩阵型有机el显示体制造方法及其装置和有源矩阵型有机el显示体、液晶阵列制造方法和液晶阵列、滤色片衬底制造方法及其装置和滤色片衬底 Download PDFInfo
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Images
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- Ink Jet (AREA)
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- Electroluminescent Light Sources (AREA)
Abstract
Description
微粒直径 | 喷嘴直径 | |||
Φ0.4μm | Φ1μm | Φ4μm | Φ8μm | |
Φ50nm | × | △ | △ | △ |
Φ30nm | ○ | ○ | ○ | ○ |
Φ10nm | ○ | ○ | ○ | ○ |
Φ3nm | ○ | ○ | ○ | ○ |
喷嘴直径(μm) | 间隔(μm) | 变动率(%) | |
100 | 2000 | ||
0.2 | 2.001×10^9 | 2.00005×10^9 | 0.05 |
0.4 | 1.001×10^9 | 1.00005×10^9 | 0.09 |
1 | 0.401002×10^9 | 0.40005×10^9 | 0.24 |
8 | 0.0510196×10^9 | 0.05005×10^9 | 1.94 |
20 | 0.0210476×10^9 | 0.0200501×10^9 | 4.98 |
50 | 0.00911111×10^9 | 0.00805×10^9 | 13.18 |
滴落精度 | 喷出难易度 | 干燥速度 | 滴落次数 | |||
液滴体积 | 已有例 | 本发明 | 已有例 | 本发明 | 本发明 | 本发明 |
0.1pl | × | ○ | × | ○ | ◎ | △ |
1pl | × | ◎ | × | ◎ | ◎ | ○ |
10pl | ○ | - | ○ | - | - | - |
粘度 | 已有例 | 本发明 |
2cP | ◎ | ◎ |
10cP | ○ | ◎ |
20cP | △ | ◎ |
70cP | × | ◎ |
喷出难易度 | 干燥速度 | 滴落次数 | ||
浓度 | 已有例 | 本发明 | 本发明 | 本发明 |
低 | ○ | ◎ | △ | △ |
中 | × | ◎ | ○ | ○ |
同 | × | ◎ | ◎ | ◎ |
浓度 | 粘度 | 生产效率 | 表面平滑性 | |
α=1 | 2% | 50cP以上 | ◎ | △ |
α=2 | 1% | 20cP | ◎ | △ |
α=10 | 0.2% | 2.3cP | ○ | ◎ |
α=100 | 0.02% | 2.2cP | ○ | ◎ |
α=1000 | 0.002% | 2.2cP | △ | ◎ |
初始喷出液滴直径 | φ0.4μm | φ1μm | φ3μm | |||
平均喷出速度 | 喷出稳定性 | 滴落精度 | 喷出稳定性 | 滴落精度 | 喷出稳定性 | 滴落精度 |
5m/s | ×(未滴落到) | △ | △ | ○ | △ | |
10m/s | ○ | ○ | ○ | ○ | ○ | ○ |
20m/s | ○ | ◎ | ○ | ◎ | ○ | ◎ |
30m/s | ○ | ◎ | ○ | ◎ | ○ | ◎ |
40m/s | ○ | ◎ | ○ | ◎ | ○ | ◎ |
50m/s | ×(产生薄雾) | ×(产生薄雾) | ×(产生薄雾) |
初始喷出液滴直径 | 喷嘴直径(μm) | ||
φ1 | φ3 | φ5 |
(μm) | 偏差 | 喷出稳定性 | 偏差 | 喷出稳定性 | 偏差 | 喷出稳定性 |
φ1 | △ | ○ | × | × | ||
φ1.5 | ◎ | ◎ | × | × | ||
φ2 | ◎ | ◎ | × | × | ||
φ3 | ◎ | ○ | △ | △ | × | |
φ5 | ○ | △ | ◎ | ◎ | △ | △ |
φ7 | × | ◎ | ○ | ◎ | ○ | |
φ10 | × | △ | ○ | ◎ | ◎ | |
φ15 | × | △ | △ | ○ | ○ | |
φ20 | × | × | ○ | △ |
浓度 | 粘度 | 生产效率 | 表面平滑性 | |
α=1 | 2% | 高 | ◎ | △ |
α=2 | 20% | 高 | ◎ | ○ |
α=10 | 4% | 中 | ○ | ◎ |
α=100 | 0.4% | 低 | ○ | ◎ |
α=1000 | 0.04% | 低 | △ | ◎ |
Claims (40)
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JP2002278217 | 2002-09-24 | ||
JP278217/2002 | 2002-09-24 | ||
JP278221/2002 | 2002-09-24 | ||
JP281828/2002 | 2002-09-26 |
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CN1701641A true CN1701641A (zh) | 2005-11-23 |
CN100490212C CN100490212C (zh) | 2009-05-20 |
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CN102082151A (zh) * | 2009-09-30 | 2011-06-01 | 卡西欧计算机株式会社 | 薄膜晶体管阵列基板、发光面板及其制造方法和电子设备 |
CN102115025A (zh) * | 2011-01-07 | 2011-07-06 | 山东理工大学 | 采用超声聚焦微喷制备聚苯乙烯微球微阵列的方法 |
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CN104183548B (zh) * | 2013-05-28 | 2019-01-01 | 三星显示有限公司 | 制造有机电致发光设备的方法 |
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CN107614124B (zh) * | 2015-04-02 | 2021-07-23 | 玛太克司马特股份有限公司 | 流体的喷射方法以及流体的成膜方法 |
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CN112236238B (zh) * | 2019-04-25 | 2022-04-08 | Sij技术株式会社 | 液滴喷出装置和液滴喷出方法 |
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