CN1648019A

CN1648019A - Transport system of glass base

Info

Publication number: CN1648019A
Application number: CNA200410054444XA
Authority: CN
Inventors: 降幡昌昭; 武井和彦
Original assignee: MITSUTOMEYASU MACHINE CO Ltd
Current assignee: MITSUTOMEYASU MACHINE CO Ltd
Priority date: 2004-01-28
Filing date: 2004-07-22
Publication date: 2005-08-03
Also published as: TW200524800A; JP4436689B2; JP2005212943A; KR20050077714A

Abstract

To provide a transporting system for transporting glass substrates one by one from exchangers to a manufacturing line without transfer from one stationarily installed conveyor to another, capable of performing delivery and reception simultaneously and establishing an efficient transportation without loss of the tact time. The glass board transporting system is to make cassette transport of glass substrates from an automated warehouse to a plurality of exchangers laid parallel and then transport them one by one from the exchangers to the manufacturing line, wherein each exchanger is furnished internally with a conveyor to load or unload glass substrate on/from a cassette rising and falling within the exchanger, and on that side of each exchanger which makes loading and unloading of glass substrates, a delivery conveyor to deliver the glass substrates to the manufacturing line and a reception conveyor to receive the glass substrate discharged from the manufacturing line are installed at a certain spacing in the vertical direction in such a way as capable of running independently without interference, and further the conveyor installed inside the exchanger is made possible to rise and fall corresponding to the levels of the delivery conveyor and the reception conveyor.

Description

The conveyer of glass substrate

Technical field

The present invention relates to the conveyer of LCD (Liquid Crystal Display), PDP (Plasma DisplayPanel), EL glass substrates such as (E1ectro Luminescence).

Background technology

So far, be used for the manufacturing line of LCD for example in the manufacturing line of etching, photoresistance etc. with glass substrate from the automated warehouse conveyance to the manufacturing line side, again the glass substrate that will dispose at manufacturing line with the mode conveyance an of a slice to this automated warehouse side, in the so-called one chip handling system, between automated warehouse and manufacturing line side, be provided with various conveyers.

In the aforementioned conveyer, conveyance delivery system shown in Figure 22 is for example arranged.This conveyer, be along automated warehouse A ' and be provided with the heap high formula hoisting crane B ', the road and be provided with many and (have 3 in the drawing of advancing along the high formula hoisting crane of this heap, 1 in the centre is standby in advance) exchanger (exchanger) C ' and cross conveyor (becoming 90 ° of transfers with the straight line conveyance) G ', repetitiousness carries out conveyance, floats, 90 ° of transfers etc., to carry out to the payment of manufacturing line and from the acceptance of manufacturing line.

Constitute the exchanger of above-mentioned conveyer, be to possess a kind of mechanism, be used for and the high formula hoisting crane of heap between accept, pay in order to glass substrate is collected and the cable-styled casket (wirecassette) of interim storage (is opened the casket that is provided with rope, be used for glass substrate is supported to horizontal multistage shape with set interval), and to cable-styled casket loading glass substrate or from cable-styled casket unloading glass substrate.

In addition, the glass substrate conveyance in the automated warehouse is supplied to the manufacturing line side and from the manufacturing line side glass substrate conveyance of handling is accommodated to the action of automated warehouse side by this conveyer, is to carry out with the process shown in the diagram of circuit of Figure 23.In addition, in the (a) and (b) of Figure 23, left lateral is represented the action of glass substrate etc., the machinery of this action of right lateral representative carrying out etc.

For example, in the occasion that the glass substrate conveyance is supplied to the manufacturing line side, to pile high formula hoisting crane B ' the cable-styled casket F ' in the automated warehouse A ' is inserted the exchanger C ' that is positioned at left end, the cross conveyor G ' of left end accepts glass substrate from exchanger, make the glass substrate of this acceptance, the start of this cross conveyor of mat G ' and floating, cross conveyor G ' by middle cross conveyor G ' and past right-hand member under its quick condition upward carries, after the cross conveyor G ' of right-hand member accepts glass substrate, this cross conveyor start, glass substrate is descended, the roller type conveyer start that makes cross conveyor G ' again with the glass substrate conveyance to manufacturing line P ' side.

Yet, when the center O of exchanger and the center O of manufacturing line ' when consistent, glass substrate must be transferred in regular turn and accepted, pays from conveyer toward conveyer, and in accepting the process of paying, do the floating of cross conveyor, conveyance, stop, the action of degradation complexity down.

Moreover, when the center O of exchanger and the center O of manufacturing line ' when inconsistent, not only in the process of accept paying, must make the compound action as above-mentioned, and must do running control etc. to conveyer, so can't avoid the waste of work-hours, damage that glass substrate is caused etc. for centering adjustment.In addition, when exchanger saw through cross conveyor toward manufacturing line side conveyance glass substrate, the glass substrate conveyance that can't will dispose in the manufacturing line side with cross conveyor was to the exchanger side.That is cross conveyor is to carry out the payment and the acceptance of glass substrate simultaneously.

Moreover, in the manufacturing line side, sometimes the input direction that requires glass substrate for the state that is contained in exchanger internal rope casket relatively through half-twist, 180 °, 270 ° direction, just must do more complicated action (inchings of the contraposition all around of the rotation of conveyer, glass substrate etc.) in this case.

In addition, if utilize the acceptance/payment of cable-styled casket of exchanger or consistent with the opportunity of the input of the glass substrate of manufacturing line side, output, just can in the specific time, accept/pay not wasting under the work-hours, but, under this opportunity unmatched situation, just must make the glass substrate standby on arbitrary limit, cause production efficiency to reduce.In addition, also can consider to be provided with the private space that cushions usefulness and eliminate standby time, but, just need additional space relatively, especially as described later, in the maximization of glass substrate, will cause always being provided with the problem of enlarged areas.

Moreover the LCD glass substrate is tending towards maximizing year by year, now even have so-called the 7th a generation glass size (2200 * 2000).Glass substrate is fragile originally, and along with the size change of glass substrate is big, this fragile degree also raises.Therefore, if carry out complicated action in the conveyance process as above-mentioned, the damage problem of large-scale glass substrate will be bigger.

Summary of the invention

The present invention finishes in view of the above problems, its purpose is to provide a kind of conveyer to solve above-mentioned existing bad situation, this handling system, can carry out the payment and the acceptance of glass substrate in the mode of not changing to the Locating Type conveyer simultaneously for the conveyance piecewise between exchanger and manufacturing line, can not waste conveyance expeditiously under the work-hours thus, and cheap.

Another object of the present invention is to provide a kind of conveyer, this conveyer can carry out these operations in the conveyance process of the glass substrate between exchanger and manufacturing line making the glass substrate rotation or doing under the situation of centrally aligned.

The conveyer of this LCD glass substrate of the present invention is to be used for carrying out the box conveyance between automated warehouse and many and the exchanger established, and carries out conveyance piecewise between exchanger and manufacturing line; It is characterized in that: in this exchanger, configuration is used for to the conveyer of the casket loading or unloading glass substrate of oscilaltion in the exchanger, side in the load/unload glass substrate of exchanger, the payment dedicated transport machine that glass substrate is given the manufacturing line side will be used for paying, and the dedicated transport machine of accepting that is used for accepting the glass substrate of discharging from the manufacturing line side is configured to be separated with along the vertical direction at interval, and can independently not advance intrusively mutually, and make conveying function corresponding payment dedicated transport machine that is disposed in the exchanger and the height oscilaltion of accepting the dedicated transport machine (claim 1) freely.

Casket to above-mentioned exchanger supply/taking-up, be to be used for glass substrate is accommodated into the cable-styled casket of horizontal multistage shape, be used for the Suo Ze of support glass substrate to be separated with set interval, parallel and mode that be separated with set interval along the vertical direction with along continuous straight runs and to open and establish and constitute; And the roller (axle) that roller type conveyer (be used for load/unload glass substrate) is arranged in the rope of this above-below direction to each other.

One side of the load/unload glass substrate of above-mentioned exchanger is meant a side of inserting the side subtend with the casket of exchanger, that is piles the opposition side of high formula hoisting crane.

Above-mentioned dedicated transport machine and the payment dedicated transport machine accepted, be if only to certain orientation conveyance glass substrate, and just enough to manufacturing line side this conveyer under the situation of conveyance under the state that maintains the original state, but, sometimes must be in response to the processing operation rotary glass substrate of manufacturing line side.Under situation, make this accept the dedicated transport machine and pay the dedicated transport facility to be equipped with alignment device (claim 2) in response to this requirement.

This alignment device be to have the rotating mechanism that glass substrate is horizontally rotated, the micro-regulating mechanism that reaches left and right directions (orthogonal directions of the conveyance direction of conveyer), and these two mechanisms can not adjust (claim 3) at 1 place simultaneously under not disturbing mutually.

In addition, accept the dedicated transport machine and pay the dedicated transport machine and come under the situation of conveyance glass substrate, adjust the stop position of the conveyance that this conveyer produces, just can carry out the inching of the fore-and-aft direction (conveyance direction) of glass substrate in driving.

Above-mentioned rotating mechanism, it is the rotating mechanism of this alignment device, be in the outer peripheral face of the swivel of glass substrate supporting with bearing glass substrate, the shoestring that one bendability is good is reeled from a left side, the shoestring that another bendability is good is reeled from the right side, and an end of each shoestring is fixed in this swivel, the other end of shoestring is fixed in the moving body that straight line moves, the crank motion by this moving body makes this swivel rotation (claim 4).

His end of left and right sides shoestring is to see through pulley to turn back, and is used for the moving body of the affixed end that this is turned back, so long as the mode that ball screw mode, rack pinion mode, air cylinder isoline move, recognize a kind of mode all can, but, be good in the mode of no backlash.Again, the winding angle on the swivel of left and right sides shoestring is roughly 300 °, and the anglec of rotation of the swivel that crank motion produced of moving body is more than 270 °.Thus, make glass substrate can half-twist, 180 °, 270 °.

Above-mentioned alignment device, it is the glass substrate that is supported by the conveyance roller of roller type conveyer in order to make, float and rotation and/or left and right sides inching from the conveyance roller surface, with the glass substrate supporting be disposed at the conveyance roller of conveyance glass substrate the summit, and be connected with this conveyance roller the axle between, when necessary rotation or left and right sides inching glass substrate, mat up and down mechanism can make the glass substrate supporting rise to, the position (claim 5) that the glass substrate that supported by the conveyance roller is floated from this conveyance roller summit

Mechanism up and down, air cylinder is an actv., disposes aforementioned swivel in concentrically ringed mode around it.Beyond the air cylinder other are the means of mechanism up and down, and motor type is for example arranged.

In addition, the glass substrate supporting is to be positioned at than the position of below more, the summit of conveyance roller, and can projects upwards the summit of conveyance roller in case of necessity, therefore, is formed with the opening that can pass the conveyance roller in this glass substrate supporting.In addition, the rotation adjustment of glass substrate has fixed on 90 °, 180 °, 270, therefore, the installation interval in length and breadth of the conveyance roller of roller type conveyer, and the offering at interval of the opening of glass substrate supporting, be to be set at uniform distances, make the glass substrate supporting all can pass the conveyance roller in this unspecified angle rotation.

Thus, even if make glass substrate rotate set angle (90 °, 180 °, 270 °), and the state that maintains the original state after rotation descends, still can pass not running under the conveyance roller, so can be concealed in the conveyance roller the summit, and the conveyance roller spool between.

Again, this rotating mechanism is that mounting is fixed in that be supported for can relative fixed on the movable mold that horizontally slips of frame, and the mat driving body makes the movable mold can be along the orthogonal directions inching of the conveyance direction of the conveyer with alignment device (claim 6) freely.The driving body that movable mold is slided for example is motor, air cylinder etc.

Thus, because of the movable mold that mounting had rotating mechanism along the left and right directions inching, so can make the action of glass substrate rotation in the same place, and with the action of glass substrate along left and right directions (orthogonal directions of the conveyance direction of conveyer) inching.In addition, certainly, the scope of inching is the degree that the opening of glass substrate supporting can pass the conveyance roller.Therefore, if strengthen the size of the opening that is opened in the glass substrate supporting, then the scope of inching just relatively becomes wide.

According to the present invention, as above-mentioned, will and exchanger between accept, pay the conveyer of glass substrate, be divided into and accept the dedicated transport machine and pay the dedicated transport machine, and both can independently be advanced down non-interfering, thus, even if deviation is arranged the opportunity of the opportunity of exchanger or manufacturing line side, still can come correspondence, so can remove readiness for action by these dedicated transport machines.Therefore, can remove the waste of work-hours, seek the raising (claim 1) of production efficiency.

In addition, according to

request item

2,3,6, in the time must and/or doing the inching of left and right directions, can in moving, advancing of conveyer carry out actions such as this rotation, so can save work-hours with the glass substrate rotation.Secondly, so far, in must the process of rotation, all be make conveyer rotation itself or in takeing in processing procedure after the mat robot wait and rotate, but just can not need this robot etc. by this device, also can save the space.

Moreover, so far, all be that repetitiousness carries out the floating of cross conveyor, conveyance, stops, descending when the inching that must do all around, and glass substrate is caused damage, dirt, but this device of mat is done inching at 1 place, thus can not cause damage to glass substrate, and the energy save space, again can cost-cutting owing to do not need robot etc., shorten working hours.

Again, according to

claim

4,5, alignment device can be made slim, can easily be configured to two sections up and down thus, load onto the state that HEPA (High-Efficiency Particulate Air) filter remains in the carrying channel of glass substrate cleaning the dedicated transport machine of accepting of this alignment device being housed and paying the dedicated transport machine.In addition, direct drive motor mode is arranged in the hand of rotation, but the direct drive motor itself has the thickness of specific degrees, so relative thickening of device proper, two sections conveyer also becomes greatly up and down, and the stroke that moves up and down that causes the conveyer in the exchanger is also elongated, influences work-hours.

Description of drawings

Fig. 1 is the planning chart of the summary of expression conveyer of the present invention.

Fig. 2 is that expression is offloaded to the front elevation that shuttle conveyer is paid the state of dedicated transport machine with glass substrate from exchanger.

Fig. 3 is that expression is with accept the front elevation that dedicated transport machine be loaded into the state of exchanger cable-styled casket of glass substrate from shuttle conveyer.

Fig. 4 is the front elevation of expression exchanger summary.

Fig. 5 is that expression is used so that the local breach front elevation of the lifting unit of the cable-styled casket oscilaltion of exchanger.

Fig. 6 is the lateral plan that Fig. 5 is correlated with.

Fig. 7 is the local breach front elevation that expression is provided to the roller type conveyer of exchanger.

Fig. 8 is the drawing in side sectional elevation of (8)-(8) line of Fig. 7.

Fig. 9 is the lateral plan of Fig. 7.

Figure 10, be moving up and down of expression roller type conveyer, (a) being expression and the relevant lateral plan of Fig. 9 of the corresponding position of height of the dedicated transport machine of accepting of shuttle conveyer, (b) is the relevant lateral plan of representing with the corresponding position of height of the payment dedicated transport machine of shuttle conveyer of Fig. 9.

Figure 11 is the payment dedicated transport machine of expression shuttle conveyer and the block diagram of accepting the dedicated transport machine.

Figure 12 is the local breach birds-eye view that the dedicated transport machine is paid in expression.

Figure 13, be Figure 12 (13)-(13) line section-drawing and want portion's enlarged drawing.

Figure 14 is the enlarged drawing of the conveyance of expression glass substrate.

Figure 15 is the section-drawing that expression makes the state that glass substrate floats from the conveyance roller.

Figure 16 is the amplification profile of the state that floats of glass substrate supporting.

Figure 17 is the block diagram of expression rotating mechanism summary.

Figure 18 is the spinning movement of expression glass substrate, (a) is 0 ° constitution diagram, (b) is the constitution diagram through half-twist.

Figure 19 (a) is constitution diagram through Rotate 180 °, (b) for through rotating 270 ° constitution diagram.

Figure 20 is the drive division of expression left and right sides micro-regulating mechanism, the birds-eye view of the state before (a) expression is moved, the birds-eye view of the state after (b) expression is moved.

Figure 21 is the payment dedicated transport machine of expression shuttle conveyer and the local breach front elevation of accepting the dedicated transport machine.

Figure 22 is the planning chart of the summary of the existing conveyer of expression.

Figure 23 is the diagram of circuit of the conveyance action of the existing conveyer of expression.

Figure 24 is the diagram of circuit of the conveyance action of expression conveyer of the present invention.

The specific embodiment

Example according to graphic explanation conveyer of the present invention.Wherein, the glass substrate a that shows in graphic for the ease of the adjustment of derotation or left and right directions, makes breach with the part in bight and represents.

Constitute automated warehouse A, heap high formula hoisting crane B, the exchanger C of conveyer and accept dedicated transport machine D1 with pay the conveyer that dedicated transport machine D2 constituted (below, be called shuttle conveyer) configuration relation of D, as shown in Figure 1, the road and be provided with 3 exchanger C of advancing along the high formula hoisting crane B of heap, dispose shuttle conveyer D abreast in a side, and be provided with and be used for carrying out to the sending into of manufacturing line side P, from the conveyance conveyer G that sends of manufacturing line P side in taking out of the position and moving into the position of shuttle conveyer D to this exchanger C load/unload glass substrate a.In addition, conveyance conveyer G also can directly move into manufacturing line P side from shuttle conveyer D owing to not being provided with the relation of manufacturing line side P.

Exchanger C, as Fig. 2～shown in Figure 3, can will be used for accommodating cable-styled casket F supply or the taking-up that glass substrate a becomes the multistage shape with the Y-piece of piling high formula hoisting crane B, and the glass substrate a in the cable-styled casket F is offloaded to the payment dedicated transport machine D2 of shuttle conveyer D, and glass substrate a is loaded in the empty cable-styled casket F from accepting dedicated transport machine D1.

Below, according to graphic explanation exchanger C, as shown in Figure 3, in device frame 1, accommodate and dispose the lifting unit 2 that can carry cable-styled casket F oscilaltion, the roller type conveyer 3 that reaches conveyance glass substrate a, can pass through the action of this lifting unit 2 and roller type conveyer 3 cable-styled casket F load/unload glass substrate a.In addition, this roller type conveyer 3, in the roughly midway location of the short transverse of device frame 1, can corresponding be disposed at the payment dedicated transport machine D2 up and down of aftermentioned shuttle conveyer D and accept dedicated transport machine D1, between " loaded " position and unloading position, move up and down by purpose.

Device frame 1, shown in Fig. 5,6, by the platform frame 1a that overlooks essentially rectangular, stand be fixed in platform frame 1a relatively to the strut support 1b on 2 limits, 1b ' and be used for linking strut support 1b, linkage frame 1c between the upper end of 1b ' constitutes, in platform frame 1a with runners 4 be mounted to can up-down adjustment freely, can be regardless of inclination that bed surface is set thus or concavo-convexly all device frame 1 is arranged to level.In addition, cable-styled casket F, the Y-piece that can pass through the high formula hoisting crane B of heap are from strut support 1b, and the side between 1b ' is supplied or taken out.

Be used for making the lifting unit 2 of cable-styled casket F oscilaltion, shown in Fig. 5,6, by being used for carrying the bearing support 5 of the bottom of supporting cable-styled casket F and being used for making these bearing support about 5 synchronous lifting drive divisions 6 up and down to be constituted.

Bearing support 5 is to use the metallic cornue to wait to form and overlooks rectangular-shapedly, is connected with the L cartridge font support 5 ' that is used for deciding supporting the bottom four corner portions of cable-styled casket F above bearing support 5.Thus, cable-styled casket F is positioned bearing support 5 by registration device (not shown), by mounting supporting very unchangeably.

Make the lifting drive division 6 of above-mentioned bearing support about in the of 5, be shown in Fig. 5,6, by the L font load-carrying element 7 above the central authorities of the left and right sides side that is installed on aforementioned bearing support 5, the ball screw mechanism 8 and the guiding elements 9 that make these load-carrying element 7 oscilaltions, and drive about servomotor 10 and the rotation of propulsion source of ball screw mechanism 8 connection shaft 11, coupling 12, the helical teeth roller box 13 that are passed to the ball screw mechanism about aforementioned with this servomotor 10 constituted.

About ball screw mechanism 8 and guiding elements 9, shown in Fig. 5,6, the vertical strut support 1b that is disposed at device frame 1, the inboard of 1b ', the spiral shell width of cloth member 8b that screws togather in the screw rod 8a with ball screw mechanism 8 is connected with the vertical edges portion of aforementioned load-carrying element 7, and spiral shell width of cloth member 8b then is linked to the saddle of guiding elements 9.Thus, by the rotation of screw rod 8a, the nut component 8b that is connected with load-carrying element 7 just moves along the vertical direction owing to the guiding function of guiding elements 9.In addition, guiding elements 9, be good with the LM guiding element.

Again, by the scope that is used for making bearing support 5 oscilaltions of lifting drive division 6, be be carried on bearing support 5 cable-styled casket F glass substrate in addition discharged starting position (upper limit position), and glass substrate is loaded between the starting position (lower position) of cable-styled casket F.

Roller type conveyer 3 to the cable-styled casket F load/unload glass substrate a of oscilaltion by above-mentioned lifting unit 2, be as Fig. 7～shown in Figure 9, by to be contained in the conveying frame 14 that is the broach shape that cable-styled casket F in the aforementioned device frame 1 can embedding under not contacting, be installed on comb teeth shape the frame 14a that respectively stands top conveyance roller 15 and be used for respectively the stand drive source 16 of conveyance roller 15 of frame 14a of driven in rotation and constituted.

Make the reason of carrying frame 14 to be the broach shape, it is the form that is glass substrate is accommodated the casket that supports to horizontal multistage shape, when glass substrate a when unloading that will be contained in the multistage shape in the cable-styled casket F, and when glass substrate a being loaded into the cable-styled casket F of sky with the multistage shape, cable-styled casket F, the aforementioned lifting unit of mat and oscilaltion, but do not hindering under this oscilaltion glass substrate a load/unload.That is, in the frame 14a crack each other of standing of carrying frame 14, cable-styled casket F's and the rope f ' that establishes can under not contacting, embed and pass through.

Being used for driven in rotation is disposed at the drive division 16 of each conveyance roller 15 of carrying frame 14 tops, and motor 16a is arranged, and can be with the rotation of this motor 16a, and the noncontact power delivery mode that repels with the attraction that utilizes magnet is passed to the axle of each conveyance roller 15.Thus, can produce dust hardly, so can under the environment of cleaning, carry out the conveyance of glass substrate.

In addition, as the roller type conveyer 3 that constitutes as above-mentioned, be two sections accept dedicated transport machine D1 and pay the height of dedicated transport machine D2 up and down that can corresponding be disposed at shuttle conveyer D, move up and down (with reference to Fig. 9,10) by conveyer lifting unit 17.

Conveyer lifting unit 17, extremely shown in Figure 10 as Fig. 7, by the crank arm 17a at 4 places, bottom that support to carry frame 14 and the lifting with gear case of the crank arm 17a turn at these 4 places is constituted with motor 17b and guiding element 17c along vertical direction guiding conveying frame 14, the lifting rotation of motor 17b, be to see through gear case and connection shaft is passed to aforementioned crank arm 17a, the synchronous start of crank arm 17a at 4 places and make the roller type conveyer about in the of 3.In addition, the distance that roller type conveyer 3 moves up and down is with the dedicated transport machine of accepting of aftermentioned shuttle conveyer and to pay the interval of dedicated transport machine identical, is decided at interval by this.

Shuttle conveyer D, as shown in figure 11, by than and establish many also long device frame 18 of the total length of an exchanger C (having 3 in graphic), in this device frame 18, be separated with set arranged spaced become up and down two sections the dedicated transport machine of accepting D1 with pay dedicated transport machine D2 and make these accept dedicated transport machine D1 with pay dedicated transport machine D2 can under not disturbing mutually, independently advance freely the travel mechanism 19 of advancing, 19 ' constitute.

Device frame 18, as shown in figure 11, be the shape of growing crosswise along exchanger C, upper-lower position in this device frame 18 disposes the travel mechanism 19,19 ' of advancing, paying dedicated transport machine D2 is supported to sagging by the travel mechanism 19 of advancing of upside, accept dedicated transport machine D1 by the travel mechanism's 19 ' carrier of advancing of downside, it is mobile independently to advance respectively.That is, the payment dedicated transport machine D2 of upside, be in the position of waiting to supply the exchanger C of cable-styled casket F by the Y-piece of the high formula hoisting crane B of heap, and pay to the manufacturing line top-cross between the position of glass substrate a and move back and forth, the dedicated transport machine of the accepting D1 of downside, be from the drain position of the glass substrate a of manufacturing line side, and exchanger C by the Y-piece cable-styled casket F to be removed of the high formula hoisting crane B of heap between move back and forth.

Accept dedicated transport machine D1 and pay dedicated transport machine D2, be to constitute by the roller type conveyer, conveyance roller 60 in order to carrying and conveyance glass substrate a, as shown in figure 12, dispose vertically to reach the horizontal identical mode in interval, and conveyance rollers of these each row are the rotations with motor 20, are passed to the axle of each conveyance roller and rotate with the non-contacting Poewr transmission mechanism 21 that utilizes attraction to repel.Graphic Poewr transmission mechanism 21, be the rotation of motor 20 to be seen through gear row 21e be passed to the axle drive shaft 21b that magnet ring 21a is installed, end in the axle 21c of the conveyance roller 60 that forms with this axle drive shaft 21b orthogonal configuration is connected with magnet ring 21d, this magnet ring 21d is to be configured to be separated with both fixed gap and quadrature with aforementioned magnet ring 21a.Thus, the rotation of motor 20 is to see through gear row 21e to be passed to axle drive shaft 21b, and the axle 21c of the conveyance roller 60 that forms with this axle drive shaft 21b orthogonal configuration is rotated by the effect of mat magnet ring 21a and magnet ring 21d.

In addition, constitute the roller type conveyer of accepting dedicated transport machine D1 and paying dedicated transport machine D2, be in the situation that needn't make the glass substrate a rotation of waiting to accept or paying, that is under the situation that needn't load onto alignment device E, may not make the vertical and horizontal interval of conveyance roller identical, also can use vertically and the horizontal different general roller type conveyer in interval.In this occasion, the type of drive of conveyance roller is also with similarly above-mentioned, and it is good utilizing the non-contacting Poewr transmission mechanism of magnet with employing.The relevant non-contacting Poewr transmission mechanism (roller type conveyer) that utilizes magnet, the formation that for example can utilize Japanese kokai publication hei 7-177725 communique to be put down in writing.

Accept dedicated transport machine D1 and pay dedicated transport machine D2 as what constitute as above-mentioned, as shown in Figures 2 and 3, be installed on load-carrying element 22,22 ' respectively, this load-carrying element 22,22 ' advanced travel mechanism 19,19 ' horizontal support and advance mobile.

This

travel mechanism

19,19 of advancing, constituted by rack and pinion mechanism 23 and guide 24, the tooth bar 23a of rack and pinion mechanism 23, be to be arranged in the drive division receiver 25 that is fixed in device frame 18 front portions, with this tooth bar 23a ingear miniature gears 23b, be fixed in the output shaft of motor 27 with reductor, 27 in this motor sees through the lateral margin (cephalolateral margin) that adapter plate 26 is fixed in aforementioned load-carrying element 22.

Again, in the adapter plate 26 ' of accepting dedicated transport machine D1 and pay the adapter plate 26 that the motor 27 with reductor is installed of dedicated transport machine D2 and be installed on another lateral margin (posterior lateral margin) of load-carrying element 22 guide 24 is installed, guide 24 is used for moving at drive division receiver 25,25 ' the guiding straight line of the front and rear part that is fixed in device frame 18 respectively.

Thus, accept dedicated transport machine D1 and pay dedicated transport machine D2, the start of the motor 27 of miniature gears 23b by having reductor is rotated, and rotates on tooth bar 23a and advance.

In addition, in order to support the above-mentioned load-carrying element 22,22 ' of accepting dedicated transport machine D1 and paying dedicated transport machine D2, locking except the direction of moving into/take out of glass substrate a, in this load-carrying element 22,22 ' be communicated be equipped with this load-carrying element 22,22 ' in the blast pipe (ducttube) 28,28 ' that is communicated with, this blast pipe 28,28 ' the other end, with be equipped on load-carrying element 22,22 ' HEPA filter 29,29 ' is connected, to guarantee clean state (with reference to Figure 21).

Under the situation that must make the glass substrate a rotation (horizontally rotating) of accepting dedicated transport machine D1 and payment dedicated transport machine D2 that is supplied to above-mentioned shuttle conveyer D, as shown in figure 12, in aforementioned conveyer, be equipped with alignment device E.

This alignment device E, constituted by rotating mechanism E1 and micro-regulating mechanism E2, this rotating mechanism E1, be to be used for making sending the glass substrate a that accepts dedicated transport machine D1 or pay dedicated transport machine D2 to, state (supposing that this state is 0 °) when the conveyance roller surface is floated and this is sent to relatively horizontally rotates 90 °, 180 °, 270 °, this micro-regulating mechanism E2 is to be used for glass substrate a is carried out accepting dedicated transport machine D1 or paying the inching of orthogonal directions of the conveyance direction of dedicated transport machine D2.

In addition, it is identical to be provided to the alignment device E that accepts dedicated transport machine D1 and payment dedicated transport machine D2, therefore, below, just be provided to the alignment device E that accepts dedicated transport machine D1 and be illustrated, the explanation that is provided to the alignment device E that pays dedicated transport machine D2 is then omitted.

Rotating mechanism E1, be by make on the conveyance roller 60 glass substrate a from this conveyance roller surface float and with the glass substrate supporting 30 of this substrate a carrying, this glass substrate supporting 30 is floated upward from the summit of conveyance roller or from the summit of conveyance roller to the mechanism up and down 31 of sinking, make the swivel 32 that the glass substrate supporting 30 that floated upward from the summit of conveyance roller by the start of mechanism 31 up and down horizontally rotates and the drive division 33 of these swivel 32 driven in rotation constituted.

Glass substrate supporting 30, have and the flexure deformation of glass substrate a can be suppressed at the area that Min. is come horizontal support, before and after rotation, can pass the opening 34 of the conveyance roller of formation roller type conveyer in being formed with of this supporting 30 comprehensively, moreover, in the surface of glass substrate a subtend (above) be studded with the resin system supporting mass 35 of support glass substrate a.In addition, this glass substrate supporting 30, be disposed at the conveyance roller of roller type conveyer the summit, and affixed this conveyance roller the axle between, so to be the diameters with this conveyance roller identical or than the diameter of this conveyance roller circular port of path slightly for the size of aforementioned opening 34, vertical and the horizontal interval of these openings 34 is set for identical, so that these openings 34 are all corresponding with the position of conveyance roller before and after rotation.In addition, opening 34 is not limited to circular port, also can be square opening.

Make the mechanism up and down 31 of glass substrate supporting 30 liftings, as shown in figure 13, see through bearing 37 in the periphery of the rod member 36a of air cylinder 36 and be equipped with and can rotate and freely installation tube 38 up and down, the top of this installation tube 38 is fixed in the center of aforementioned glass substrate supporting 30.Therefore, when air supply to air cylinder 36 push away side the time rod member 36a just move, installation tube 38 also sees through bearing 37 and then rising/declines.

Above-mentioned air cylinder 36 is positioned at the downside of the conveyance roller of conveyer, and is fixed in the movable mold 42 that is supported by stay (stay) member 41 support of conveyer (itself and this link).

Shell periphery in the above-mentioned air cylinder 36 of mechanism 31 up and down is equipped with the swivel 32 that can rotate freely through bearing 39, across the flange 32a of this swivel 32, with stretch out toward aforementioned installation tube 38 outer radial and the outstanding flange 38a that forms, across being interval with a plurality of guide body 40 (having 4 among the figure), be passed to aforementioned installation tube 38 along Zhou Fangxiang in order to the rising/decline of guiding installation tube 38 and with the rotation of swivel 32.

Drive division 33 with swivel 32 driven in rotation, as Figure 12 and shown in Figure 17, the 2 ribbon bodies that good bandability is arranged in the outer peripheral face of this swivel 32, timing belt 43 is for example arranged, 43 ', one timing belt 43 be with base end part be fixed in swivel 32 the first half outer peripheral face and reel along anticlockwise direction from this bearing, another timing belt 43 ' is base end part to be staggered with the position identical with the fixed position of the base end part of aforementioned shoestring 43 be fixed in rotation and change the outer peripheral face of 32 lower part and reel along clockwise direction from this bearing, two shoestring 43,43 ' end side be in about the pulley 45 of turning back, 45 ' (seeing through pulley installing frame 44 is rotatably mounted on the aforementioned movable mold 42) reeled and turned back, two shoestring 43 that this is turned back, 43 ' terminal part is to be fixed in the moving body 46 that straight line moves.Thus, be wound in the shoestring 43,43 ' of swivel 32 with two sections, become (ring-type) state for no reason, straight line by moving body 46 moves, just make aforementioned swivel 32 toward the left and right directions rotation, about the pulley 45,45 ' of turning back, be installed on pulley installing frame 44 for seeing through tension adjustment mechanism 50, shoestring 43,43 ' coiling can be adjusted at best tension state.In addition, shoestring 43,43 ' coiling direction also can be opposite with above-mentioned example.

Fix the moving body 46 of two shoestring 43,43 ' terminal part in order to binding, be the nut component 48a that is fixed in the ball screw mechanism 48 that is driven by motor 47, moreover, nut component 48a is linked to guide body 49, and this guide body 49 is disposed on the aforementioned pulley installing frame 44 in the mode parallel with aforementioned ball screw mechanism 48.Thus, moving body 46 is start and the guide body 49 by ball screw mechanism 48, make endless shoestring 43,43 ' about the pulley 45 of turning back, 45 ' intercropping straight line move, and rotational force is put on swivel 32 (with reference to Figure 17,18,19).

In addition, swivel 32, be by above-mentioned rotating mechanism can half-twist, 180 °, 270 °, in addition, the detection of its anglec of rotation be by be disposed at this swivel around

sensor

51a, 51b, 51c and the flag (flag) 52 that is installed on swivel 32 carry out.In addition, the detection of the anglec of rotation is not limited to graphic form, also can be undertaken by the additive method of present employing.

The rotation of the glass substrate a that rotating mechanism E1 produces is described according to Figure 18 and Figure 19, move into the glass substrate a of payment dedicated transport machine D2 of shuttle conveyer D under the situation of 90 ° of right-hand revolutions making with 0 ° direction shown in Figure 18 (a), make moving body 46 right-hand mobile on the drawing if make ball screw mechanism 48 starts, swivel 32 is just toward 90 ° of right-hand revolutions, and the glass substrate a that is supported by glass substrate supporting 30 just rotates 90 ° shown in Figure 18 (b).The detection of 90 ° of rotations is flags 52 of being fixed in swivel 32 with the rotation of swivel 32 moves and is positioned on the sensor 51a that is configured in 90 ° of detection usefulness around the swivel toward clockwise direction and detect.Moreover, make swivel 32 toward 90 ° of right-hand revolutions if make ball screw mechanism 48 starts, flagpole 52 is just corresponding with sensor 51b, glass substrate a just becomes the state shown in Figure 19 (a) of Rotate 180 ° from the state of origin position, moreover, if toward 90 ° of right-hand revolutions, flag 52 is just corresponding with sensor 51c, glass substrate a just becomes the state shown in the Figure 19 (b) that has rotated 270 °.In addition, spinning movement is not limited to graphic mode, that is, the position of the moving body 46 when making 0 ° is positioned at pulley 45 sides of turning back, and the pulley 45 ' side of turning back that makes moving body move to opposition side from this position is rotated.Also can be for example, 3 five equilibriums are made in the position of the moving body 46 when assigning to stroke 3 grades of ball screw with 0 °, do 90 °, 180 ° rotation from 1: 2 position to can 2 directions that move rotating, and get back to reference position and move toward reversing sense and do 270 ° rotation.

Micro-regulating mechanism E2 as another mechanism of alignment device E, be as shown in figure 12, the glass substrate a that is used for that mat accepted dedicated transport machine D1 or pays conveyer D2 conveyance does the mechanism of inching along the orthogonal directions (left and right directions in the drawing) of the conveyance direction of these conveyers, and comprise glass substrate supporting 30, make carrying keep the movable mold 42 of aforementioned rotating mechanism E1 to move as straight line.

Relevant above-mentioned concrete formation, in stay member 41 movable mold 42 is installed with the conveyer bridge binding, see through guide body 53 movable mold 42 be mounted to and can slide along the orthogonal directions of conveyer conveyance direction, and with this movable mold 42 by ball screw mechanism 54, and the servomotor 55 that drives this ball screw mechanism 54 constitute.

Again, by the above-mentioned detection that constitutes the mobile limit of the movable mold 42 of sliding, be to be separated with in movable mold 42 upper edge direction of slips initial point detecting sensor 56a, left-limit detecting sensor 56b, limit on the right-right-hand limit detecting sensor 56c are set at interval, on the other hand, on the portable cord of fixing stay member 41 aligning sensor as aforementioned, flag 57a is installed, 57b, 57c, movable mold 42 begins to move from origin position, left-limit detecting sensor 56b or limit on the right-right-hand limit detecting sensor 56c are covered by flag, just can detect.

In addition, make binding, and the binding of the ball screw mechanism 54 of micro-regulating mechanism E2 and servomotor 55 of ball screw mechanism 48 that the moving body 46 of aforementioned rotating mechanism E1 moves and motor 47, all use the coupling of no backlash to link, even both axle core off normals still can be passed to ball screw with the rotation of motor.

By the conveyer as the above-mentioned formation with the glass substrate a conveyance in the cable-styled casket F be supplied to manufacturing line P side operation, and be subject to processing the glass substrate and the conveyance that finish from manufacturing line P side joint and accommodate to the operation of cable-styled casket F, under the situation of no alignment device, be shown in the diagram of circuit of Figure 24.

For example, with regard to the operation that the glass substrate a conveyance in the cable-styled casket F is supplied to manufacturing line P side, when the cable-styled casket F that contains glass substrate a is inserted into the exchanger C that is positioned at left end by the high formula hoisting crane B of heap, just by the roller type conveyer 3 in this exchanger C, and the action of cable-styled casket F lifting unit 2 is up and down unloaded glass substrate a in each 1 mode, this is come the both allocation (middle position) of conveyance to this conveyer through discharged glass substrate a by the rotation of the payment dedicated transport machine D2 of shuttle conveyer D, the conveyance action stops at allocation.Glass substrate a is after conveyance stops on the payment dedicated transport machine D2, this payment dedicated transport machine D2 itself advances toward right-hand (input position) and moves and stop on the line of centers O ' of manufacturing line P side line, conveyer is driven, the glass substrate a of carrying is seen through conveyance conveyer G conveyance to manufacturing line P side, pay action and finish.In addition, dispose the dedicated transport machine of the accepting D1 that differs from above-mentioned payment dedicated transport machine D2 in above-mentioned shuttle conveyer D, and this is accepted dedicated transport machine D1 and is configured to be separated with at interval above payment dedicated transport machine D2 and with it, and both can not disturbed mutually, independently advance, therefore, differ from above-mentioned conveyance, the glass substrate a that finishes dealing with in manufacturing line P side, be to accept by accepting the conveyance conveyer G of dedicated transport machine D1 from outgoing position at the left end of shuttle conveyer D, after the acceptance, this is accepted dedicated transport machine D1 and just moves and stop on the line of centers O line of the exchanger C of right-hand member toward right-hand advancing, conveyer driven and with in the cable-styled casket F of glass substrate conveyance to the exchanger C, by making cable-styled casket F lifting unit 2 up and down in the exchanger C, and the action of roller type conveyer 3 is loaded.After the loading of cable-styled casket was finished, this cable-styled casket F was just by piling high formula hoisting crane B from exchanger C toward the automated warehouse transfer.

According to the conveyer as above-mentioned formation, take out of to the unloading operation of manufacturing line side in each 1 mode the glass substrate a in the cable-styled casket F and will accommodate to the loading operation of cable-styled casket F from the glass substrate a that disposes that the manufacturing line side is taken out of, can accepting dedicated transport machine D1 and paying dedicated transport machine D2 by shuttle conveyer D, no matter under the opportunity of opportunity of exchanger, manufacturing line side, absorb the deviation on aforementioned opportunity, eliminate readiness for action, carry out expeditiously.

In addition, wait to unload and treat cargo-carring glass substrate a rotation if must make, just can be by the alignment device E that accepts dedicated transport machine D1 and payment dedicated transport machine D2 that is provided to aforementioned shuttle conveyer D, accept dedicated transport machine D1, pay in the moving of dedicated transport machine D2 be rotated, the operation of left and right sides inching, and can save work-hours.Therefore, big contribution can be arranged for the raising of capacity rating.

Conveyer of the present invention, compared to existing conveyer, the process number is few, alleviates the damage that glass substrate is caused relatively, and the time shortens, and these advantages of the present invention are learnt more easily from existing and diagram of circuit of the present invention.

In the above-mentioned example,,, the transmission member of bendings such as steel band, chain is used for replacing timing belt so long as all making though the shoestring of rotating mechanism E1 uses timing belt.

Claims

1. the conveyer of a glass substrate is used for carrying out the box conveyance between automated warehouse and many and the exchanger established, and carries out conveyance piecewise between exchanger and manufacturing line; It is characterized in that:

In this exchanger, configuration is used for to the conveyer of the casket loading or unloading glass substrate of oscilaltion in the exchanger, side at the load/unload glass substrate of exchanger, glass substrate is given the payment dedicated transport machine of manufacturing line side and the dedicated transport machine of accepting of the glass substrate that is used for accepting discharging from the manufacturing line side is configured to be separated with along the vertical direction at interval and can independently not advance intrusively mutually with being used for paying, and makes conveying function corresponding payment dedicated transport machine that is disposed in the exchanger and the height oscilaltion of accepting the dedicated transport machine freely.

2. the conveyer of glass substrate as claimed in claim 1 is characterized in that: this is accepted the dedicated transport machine and pays the dedicated transport machine, possesses alignment device.

3. the conveyer of glass substrate as claimed in claim 2 is characterized in that: this alignment device, have rotating mechanism that glass substrate is horizontally rotated, and about micro-regulating mechanism, and this two mechanism can not adjust at 1 place under not disturbing mutually simultaneously.

4. the conveyer of glass substrate as claimed in claim 3, it is characterized in that: the rotating mechanism of this alignment device, outer peripheral face at the swivel of glass substrate supporting with bearing glass substrate, the shoestring of one good bandability is reeled from a left side, the shoestring of another good bandability is reeled from the right side, and an end of each shoestring is fixed in this swivel, the other end of shoestring is fixed in the moving body that straight line moves, the crank motion by this moving body makes this swivel rotation.

5. the conveyer of glass substrate as claimed in claim 4, it is characterized in that: the glass substrate supporting of this alignment device, be disposed at the conveyance roller of conveyance glass substrate the summit, and be connected with this conveyance roller the axle between, and be formed on the opening that arbitrary anglec of rotation all can be passed the conveyance roller in the glass substrate supporting, when necessary rotation or left and right sides inching glass substrate, make the glass substrate supporting rise to a position by mechanism up and down, the glass substrate that is supported by the conveyance roller is floated from conveyance roller summit.

6. the conveyer of glass substrate as claimed in claim 3, it is characterized in that: this rotating mechanism, mounting is fixed in that be supported for can relative fixed on the movable mold that horizontally slips of frame, and makes this movable mold can be along the orthogonal directions inching freely of the conveyance direction of the conveyer with alignment device by driving body.