CN1672068A - Production line system and automated warehouse used in the system - Google Patents

Abstract

A production line system (1) comprises a core apparatus (10) of a stacker crane form and various processing lines (20, ..., 110) for performing various processes on a glass substrate that is received in a substrate receiving cassette stored in the core apparatus (10) and connected at plural loading/unloading positions (C1, C2) of the core apparatus (10) through a substrate loading/unloading mechanism (16a, 16b). At this time, the processing lines (20, ..., 90) are production lines that are used to perform various process for producing color filters, wherein the processing lines (20, ..., 70) are main screen-making lines for performing the processing steps including photolithography process, while the processing line (90) is a reserve screen-making line for performing the same process. Further, processing line (100) is a substrate inspection line that inspects a processed glass substrate that has been processed in the processing lines (20, ..., 90), and the processing line (110) is a substrate regeneration line that regenerates a glass substrate in which a defect was detected. Further, in a conveying path (15) of the processing lines (30, ..., 70), common defect inspection machines (39-77) are arranged for inspecting a common defect occurring at the same position in a plurality of glass substrates of the processed object. Further, the cassette that is stored and conveyed by the core apparatus (10) is preferably a frame line type cassettes that uses a plurality of frame lines suspending between left and right frames to support the substrate in a horizontal status.

Description

Line production system and the automated warehouse that in this system, uses

Technical field

The present invention relates to a kind of line production system of making color filter sheet class plate-shaped products, particularly, relate to a kind of utilization and take in the various logistics devices (automated warehouse of stacking hoisting way or substrate storing apparatus, substrate discharger) that the box body of many pieces of substrates (board-like material) is made the line production system of plate-shaped products and used in this system.

Background technology

For the manufacturing process of color filter sheet, include and be called a plurality of treatment process of formation of formation, (6) ITO layer of formation, (5) column of formation, (4) protective seam of dyed layer that (1) chromium film forming, the formation of (2) black matrix", (3) have (red, green and blue) of all kinds of predetermined pattern.

At this,, used a kind of one on a plurality of processing lines of above-mentioned each treatment process of will realizing to write the shape tandem type line production system that connects in upright arrangement usually as the line production system of realizing manufacturing process like this in the past.In addition, have the whole bag of tricks for the manufacture method of color filter sheet, but the most general manufacture method is to utilize photoetching (photomechanical printing) method, at this moment, the treatment process of above-mentioned (2)～(5) realizes as the treatment process (plate-making process) that comprises lithography process.In addition, in plate-making process, need carry out the processing of coating, drying, prebake, exposure, development, flushing, drying and the back complexity of drying of photoresists (color resist).

; in the manufacturing process that utilizes photolithographic color filter sheet; plate-making process as the treatment process that comprises lithography process contains a plurality of; according to the kind of the goods of making as the color filter sheet, the occasion that the configuration structure of realizing a plurality of plate-making lines of these a plurality of plate-making process need be changed is more.Promptly; in color filter sheet in recent years; exist different style (having or not of black matrix" or having or not etc. of the having or not of the having or not of the kind (chromium or resin) of black matrix", protective seam, column, ITO layer) for each goods; when these goods are made with same line production system; need to substitute the sequence number of a plurality of plate-making process that contain in the manufacturing process, or eliminate specific plate-making process.In addition, in nearest color filter sheet, also exist the goods that the complicated shape of column uprightly is set on the restraining barrier of MVA, goods like this and common goods one are coexisted when making on the same line production system, need in manufacturing process, add new plate-making process.

But, in the line production system of above-mentioned tandem type in the past, connect because a plurality of processing lines of each treatment process of realization are in upright arrangement, can not will realize the simple problems that change such as configuration structure of a plurality of plate-making lines of plate-making process so exist.And this moment, although also can be adapted to the suitable bypass of configuration between each plate-making line, only take the remaining area that is provided with of bypass degree this moment, exists the excessive problem of all occupied areas of line production system.

In addition, in the manufacturing process that utilizes photolithographic color filter sheet, the treatment process (plate-making process) that contains lithography process usually is attached to the generation of the product defect (common defective etc.) of photomask due to first-class or the fault of device because of foreign matter, must stop temporarily realizing that the situation of plate-making line of plate-making process is more.In addition, owing to make when the goods of the different style (usability luminescent material or live width, thickness etc.) of plate-making process, need in advance the decision processing conditions (even since because of photosensitive material wait in batches also have delicate not simultaneously, the processing conditions that also needs every day and confirm the same day), in the plate-making line of realizing plate-making process, after previous goods manufacturing finishes fully, must carry out fixing really in addition the processing of the processing conditions of a goods.In addition, plate-making process needs many processing times usually, all becomes speed decision class easily for line production system.

; in the line production system of above-mentioned tandem type; owing to realize the connection in upright arrangement of a plurality of processing lines of each treatment process; when the plate-making line at the specific plate-making process of realization stops, determining that the processing of processing conditions is carried out in this plate-making line; this plate-making line becomes the occasion of speed decision class, exists the problem that can influence all running rate reductions of all processing lines and line production system.

In addition, utilize the manufacturing process of photolithographic color filter sheet to constitute, in any one processing (the particularly processing of each in the plate-making process), exist the problem that defective takes place goods easily as above-mentioned processing by a plurality of complexity.Particularly, the size of color filter sheet in recent years is very big, exists the easy problem that reduces of accepted product percentage of goods.

In the past, in the manufacturing process of this color filter sheet, hand level as the qualification rate that improves goods, usually used the processing of the service condition of improving the device that uses in each processing etc. to improve the hand level, but its improvement degree is limited, in the manufacturing of larger-size color filter sheet, exist the problem that can not improve the qualification rate of goods fully.For this reason, proposed a kind of for example fit-up inspection machine in line production system,, improved the technology hand level (with reference to Japanese kokai publication hei 7-281171 communique) of the qualification rate of goods by removing the bad goods that detect defective by inspection machine in the past.

, in the method that above-mentioned Japanese kokai publication hei 7-281171 communique is put down in writing, although the qualification rate of goods can have raising to a certain degree, its scope of examination is a prerequisite with indivedual defectives mainly, exists the limited problem of its raising degree.In addition, the structure of line production system that is equipped with inspection machine is owing to be to connect a plurality of treatment process are in upright arrangement, in the occasion that detects defective by inspection machine, in order to find out reason that defective takes place or eliminating etc., it is a lot of temporarily to stop all situations of line production system, therefore exists the problem of the high running rate difficulty of keeping production line.

Summary of the invention

The present invention has overcome above-mentioned problem, and its purpose is to provide a kind of line production system that the configuration structure etc. of a plurality of plate-making lines of realizing containing the treatment process (plate-making process) of lithography process can be carried out the high running rate of flexible change.

In addition, another object of the present invention is to provide a kind of and can keep the high running rate of production line, the line production system that the while is especially improved the qualification rate of goods.

Another purpose of the present invention be to provide a kind of breakage that can prevent substrate in the manufacture process effectively etc., simultaneously again can with the flexible corresponding line production system of the dimension modifying of substrate.

In addition, a further object of the present invention is to provide the production interval time in a kind of that can use, the outbound operation that can shorten box body in line production system, simple in structure simultaneously and the little automated warehouse of restriction that device is arranged.

Further purpose of the present invention be to provide a kind of that can in line production system, use, can shorten substrate reception or discharge substrate storing apparatus and the substrate discharger of the production interval time in the operation.

As the 1st solution of the present invention, the box body that provides a kind of utilization to take in many pieces of substrates is made the line production system of color filter sheet, it is characterized in that, have: as the core device that the box body behind a plurality of substrate receptions that will take in many pieces of substrates or empty box body are taken care of, this device has the material storing box of a plurality of box bodys of keeping and a plurality of stakcer cranes fetching and delivering position and arbitrarily between box body storage position carry of the box body in this material storing box in this material storing box certainly; With described core device described respectively fetch and deliver the position be connected, with respect to being accommodated in a plurality of processing lines that are used to make the various processing of color filter sheet by the substrate in the box body behind the substrate reception of described core device keeping; And with described core device described respectively fetch and deliver the corresponding setting in position, with the position is corresponding respectively handles one piece of one piece of discharge of line with respect to respectively fetching and delivering with this box body of substrate after being positioned this substrate reception of respectively fetching and delivering the position, perhaps will respectively handle the substrate conveyer mechanism that one piece of one piece of ground of substrate that processing that line carried out handling finishes is taken in the box body that is positioned this sky of respectively fetching and delivering the position at this; Described a plurality of processing line includes a plurality of main plate-making lines that realization contains the treatment process of lithography process.

In addition, in the 1st above-mentioned solution, described a plurality of processing lines preferably contain the plate-making line of the preparation that realizes the treatment process identical with described each main plate-making line.

In addition, in the 1st above-mentioned solution, the common defect inspection machine that the common defective that takes place on the same position to a plurality of substrates of becoming process object is detected preferably is housed in the described a plurality of main plate-making lines that contain at least one in described a plurality of processing lines.

In addition, in the 1st above-mentioned solution, described a plurality of processing lines preferably include the substrate regeneration line that the substrate of measuring common defective by the described common defect inspection machine examination that contains in the described main plate-making line is regenerated.

Moreover, in the 1st above-mentioned solution, described a plurality of processing line preferably includes and will respectively handle the inspecting substrate line that substrate that processing that line carried out handling finishes is checked by this, and this inspecting substrate line has indivedual defect inspection machines that indivedual defectives of taking place on the diverse location with a plurality of substrates are detected.At this, described inspecting substrate line preferably also has the substrate correcting device that indivedual defectives of described each substrate that will be measured by described indivedual defect inspection machine examinations are revised.

In addition, in the 1st above-mentioned solution, described a plurality of processing lines preferably include and will measure the substrate regeneration line that the substrate of common defective or indivedual defectives is regenerated by the described common defect inspection machine that contains in the described main plate-making line or by the described indivedual defect inspection machine examinations that contain in the described inspecting substrate line.

In addition, in the 1st above-mentioned solution, described core device preferably has a plurality of described material storing box and a plurality of described stakcer crane, at least dispose a stakcer crane in described each material storing box, described each material storing box interconnects via the connection device that carries out the box body handing-over between the stakcer crane in being disposed at this each material storing box.At this, described connection device is preferably as the stakcer crane that is arranged at the replacement machine performance function of the stakcer crane on described each material storing box.And described a plurality of material storing box preferably is arranged to the geese flying in a line-brothers shape.

As the 2nd solution of the present invention, the box body that provides a kind of utilization to take in many pieces of substrates is made the line production system of plate-shaped products, it is characterized in that, have: as the core device that the box body behind a plurality of substrate receptions that will take in many pieces of substrates or empty box body are taken care of, this device has the material storing box of a plurality of box bodys of keeping and a plurality of stakcer cranes fetching and delivering position and arbitrarily between box body storage position carry of the box body in this material storing box in this material storing box certainly; With described core device described respectively fetch and deliver the position be connected, with respect to being accommodated in a plurality of processing lines that carry out various processing by the substrate in the box body behind the substrate reception of described core device keeping; And with described core device described respectively fetch and deliver the corresponding setting in position, with the position is corresponding respectively handles one piece of one piece of discharge of line with respect to respectively fetching and delivering with this box body of substrate after being positioned this substrate reception of respectively fetching and delivering the position, perhaps will respectively handle the substrate conveyer mechanism that one piece of one piece of ground of substrate that processing that line carried out handling finishes is taken in the box body that is positioned this sky of respectively fetching and delivering the position at this; Many wire rope that have the left and right side framework and be set up between these left and right side frameworks, extend along multistage surface level by keeping of described core device and the described box body carried with the differing heights of many pieces of substrates of horizontality supporting.

In addition, in the 2nd above-mentioned solution, described a plurality of processing lines are preferably made the various processing of color filter sheet.

As the 3rd solution of the present invention be, a kind of automated warehouse that the box body of taking in many pieces of substrates is disposed is provided, it is characterized in that, have: the material storing box of many pieces of box bodys of keeping, with box body the stakcer crane fetching and delivering position and arbitrarily between box body storage position carry this material storing box in of keeping in material storing box, fetch and deliver the corresponding setting in position with described material storing box described, relatively substrate carrying mechanism is located the box body detent mechanism of this box body to carry out discharging from the substrate of this box body or substrate being taken in towards box body between described substrate carrying mechanism, and between described material storing box and described box body detent mechanism the box body conveying mechanism of conveying box body; Described material storing box described fetch and deliver the position have from material storing box take out of the outbound position of box body and box body is moved into to material storing box, independently put the position in storage with described outbound position; Described box body detent mechanism move to the corresponding box body in the described outbound position of described material storing box supply with the position and with the corresponding box body drain position in described warehouse-in position in arbitrary position, supply with the position at described box body, draw in box body from described box body conveying mechanism, at described box body drain position, box body is sent to described box body conveying mechanism.

In addition, in the 3rd above-mentioned solution, preferably, the mechanism of described box body for will described many pieces of substrates being the level of state and taking in, described box body detent mechanism for with the box body jacking gear of taking in the described box body of the corresponding spacing lifting in interval of substrate.

As the 4th solution of the present invention be, provide a kind of with the substrate storing apparatus of substrate reception in box body, it is characterized in that, have that the box body that box body is moved to the supply of carrying out box body is supplied with the position, the box body that carries out substrate reception position that substrate takes in and the recovery of carrying out box body in box body reclaims the arbitrary locational box body travel mechanism in the position, and, carry out the substrate that substrate is taken in the box body by described box body travel mechanism location is moved into mechanism in described substrate reception position.

As the 5th solution of the present invention be, a kind of substrate discharger that substrate is discharged from box body is provided, it is characterized in that, have that the box body that box body is moved to the supply of carrying out box body is supplied with the position, the box body that carries out substrate drain position that substrate discharges and the recovery of carrying out box body from box body reclaims the arbitrary locational box body travel mechanism in the position, and, carry out the substrate that substrate is discharged from the box body by described box body travel mechanism location is taken out of mechanism at described substrate drain position.

According to the 1st solution of the present invention, the core device of taking in a plurality of box bodys of many pieces of glass substrates via substrate conveyer mechanism and keeping owing to a plurality of processing lines of the various processing of making the color filter sheet is connected, can easily change the configuration formation of a plurality of plate-making lines etc., these a plurality of plate-making lines are used to realize including the treatment process (plate-making process) of the lithography process of the formation of carrying out black matrix" or formation of dyed layer of all kinds etc., can be according to the kind of the goods of making as the color filter sheet, the order that substitutes these a plurality of plate-making process is perhaps added or is eliminated specific plate-making process.

In addition, according to the 1st solution of the present invention, because the core device of stacking hoisting way is connected with the plate-making line of the preparation of the same treatment process of the main plate-making line of realization and each, even in comprising the treatment process of lithography process (plate-making process), defective (common defective etc.) takes place in goods, in the time of the plate-making line of realizing its plate-making process temporarily need being stopped, also can preventing the reduction of the running rate that line production system is all.In addition, by in plate-making process, use the plate-making line of preparation to determine necessary processing conditions, determining the processing conditions of next goods with the time parallel ground of the manufacturing of preceding goods, on the plate-making line of this preparation, the manufacturing of next goods can be continued, the reduction of the running rate that line production system is all can be prevented.In addition, realize on the plate-making line of preparation, can separate removal rates decision class, can prevent the reduction of the running rate that line production system is all by will also coexisting at plate-making process that the plate-making line that becomes speed decision class is realized with this line one of making a plate.

In addition, according to the 1st solution of the present invention, by in processing line as production line, realize including the common defect inspection machine that the common defective that takes place on the same position of packing in the processing line (plate-making line) of treatment process of lithography process to a plurality of substrates of becoming process object is detected, the common defective of the occurrence cause that becomes bad goods can be detected as far as possible in early days, the qualification rate of goods can be improved.At this moment, according to the 1st technical scheme of the present invention, owing to be connected via the core device of substrate conveyer mechanism with the stacking hoisting way of a plurality of box bodys of taking in many pieces of glass substrates certainly as the processing line of production line, even under the arbitrary situation in the treatment process (plate-making process) of the lithography process that includes the formation of carrying out black matrix" or formation of dyed layer of all kinds etc., when common defective being taken place in adhering to of photomask etc. because of foreign matter, when the treatment process that this common defective only will take place stops just can removing problem fast, can use and carry out other treatment process up to for the processing of the treatment process before certainly in the material storing box of core device, the glass substrate that processing finishes continues to make.For this reason, when can keep the high running rate of production line, improve the qualification rate of goods.

Moreover, according to the 1st solution of the present invention, the core device with will be connected by the processing line (inspecting substrate line) that the glass substrate that the processing handled as the processing line of production line finishes is checked, detected by indivedual defectives that will on the diverse location of a plurality of glass substrates, take place by indivedual defect inspection machines, even the occurrence cause for the indivedual defectives different with common defective also can suitably be got rid of, can improve the qualification rate of goods.In addition, in handling line (inspecting substrate line), by the substrate correcting device, indivedual defectives of each glass substrate that will be measured by indivedual defect inspection machine examinations are revised, and can improve the yield rate of the essence of goods.

In addition, according to the 1st solution of the present invention, by the core device with will measure the processing line (substrate regeneration line) that the glass substrate of common defective or indivedual defectives regenerated by common defect inspection machine or indivedual defect inspection machine examination and be connected, even under situation about can not measure by indivedual defect inspection machine examinations by indivedual defectives of substrate correcting device correction, this glass substrate also can improve the substantial yield rate of goods by the substrate regenerating unit regeneration of handling line (substrate regeneration line).In addition, even when measuring common defective, also can improve the substantial yield rate of goods by this glass substrate is regenerated by the substrate regenerating unit of handling line (substrate regeneration line) by common defect inspection machine examination.And, at this moment, can not send into a back operation owing to become the glass substrate of final bad goods, prevented that unnecessary load from putting on the operation of back, can improve all substantial running rates of line production system.

In addition, according to the 1st solution of the present invention, by with the core device of stacking hoisting way by interconnective a plurality of material storing box constitutes by means of the connection device that carries out the box body handing-over, can be provided with the different processing line of area with the minimal equipment of necessity and arbitrarily configuration structure just can be provided with flexibly.And this moment, as connection device, by using as the stakcer crane that is arranged at the replacement machine performance function of the stakcer crane on described each material storing box, even when stakcer crane breaks down, also can use the processing of stakcer crane continuation in each material storing box, can improve all stability of line production system as this replacement machine.

According to the 2nd solution of the present invention, because as the box body of taking care of and carrying by the core device of line production system, used by a plurality of wire rope between the lateral frame about being set up in supporting rope formula box body that substrate is the level of state, vibration by the conveying box bodys such as stakcer crane of core device the time can be absorbed effectively by wire rope, even when using large substrate to make color filter sheet etc., also can prevent to be accommodated in the damaged or damage of substrate in the box body.In addition, can take in substrate in the box body to foldable maximum sized arbitrary dimension, even when using same line production system to make the color filter sheet etc. of multiple class, also needn't change box body mutually suitablely with the size of substrate, can be effectively corresponding to the manufacturing of a small amount of many kinds.In addition, compare with box body of pin formula etc. and can take in more substantial substrate,, can further improve the corresponding ability that treatment process temporarily stops as the advantage of line production system with core device.

According to the 3rd solution of the present invention, because in the automated warehouse that can in line production system, use, make relative substrate carrying mechanism location box body between automated warehouse and described substrate carrying mechanism, to carry out from the substrate discharge of this box body or the box body detent mechanism that substrate is taken in towards box body, and the corresponding box body in the outbound position of material storing box supply with the position and and the corresponding box body drain position in warehouse-in position between move, supply with the position at box body, when drawing in box body from the box body conveying mechanism, at the box body drain position box body is sent to the box body conveying mechanism, can be during the relative box body of substrate be discharged or is taken in, make next box body in abutting connection with and be in holding state, can shorten box body and go into productive temp time in the outbound operation.In addition, since by and the corresponding box body in the outbound position of material storing box supply with the position with and the corresponding box body drain position in warehouse-in position between the moving of box body detent mechanism, carry out the handing-over of box body, the special direction throw-over gear that needn't have the moving direction of conversion box body, and, because the photoelectricity printing machine also can only be supplied with the position with box body and corresponding 2 positions of box body drain position are corresponding, can arrange with less ground of simple structure confining device.In addition, since carry out box body that box body accepts supply with box body detent mechanism mobile between position and box body drain position with the pallet of basal plate conveyer one on the structure that relatively moves, with directly being connected with the occasion of avoiding both to interfere with basal plate conveyer, the box body conveying mechanism compares, structure is simpler, and maintainability also is improved.

According to the 4th solution of the present invention, in can be used for the substrate storing apparatus of line production system, by box body travel mechanism, box body is moved to box body to be supplied with position, substrate reception position and box body and reclaims on arbitrary position in the position, and in the substrate reception position, move into mechanism by substrate, substrate is taken in the box body by box body travel mechanism location.For this reason, because substrate only stops during box body moves towards only taking in of box body, and take in moment of end towards box body at substrate, box body reclaims the position when moving from the substrate reception position to box body, box body is supplied with the position from box body and is moved to the substrate reception position, can shorten the productive temp time in the operation of taking in of substrate.

According to the 5th solution of the present invention, in can be used for the substrate discharger of line production system, by box body travel mechanism, box body is moved to box body to be supplied with position, substrate drain position and box body and reclaims on arbitrary position in the position, and at the substrate drain position, take out of mechanism by substrate, substrate is discharged from the box body by box body travel mechanism location.For this reason, because the discharge from the substrate of box body only only stops during box body moves, and discharge the moment that finishes from box body at substrate, box body reclaims the position when moving from the substrate drain position to box body, box body reclaims the position from the box body drain position to box body and moves, and can shorten the productive temp time in the substrate discharge operation.

Description of drawings

Fig. 1 is for schematically illustrating all pie graphs of the line production system of the present invention the 1st embodiment.

Fig. 2 is for schematically illustrating the vertical view of wanting portion to constitute of line production system shown in Figure 1.

Fig. 3 is for schematically to illustrate along the cut-open view of the III-III line of line production system shown in Figure 2.

Fig. 4 is for schematically to illustrate along the cut-open view of the IV-IV line of line production system shown in Figure 2.

Fig. 5 is the key diagram of the basal plate conveyer action in the line production system shown in Figure 2.

Fig. 6 is for schematically illustrating all pie graphs of the line production system of the 2nd embodiment of the present invention.

Fig. 7 is the view that layout design one example of Fig. 1 and line production system shown in Figure 6 is shown.

Fig. 8 is another routine view of layout design that Fig. 1 and line production system shown in Figure 6 are shown.

Fig. 9 and Figure 10 are another example that the connection status between the material storing box in the core device shown in Figure 8 (the core device with a plurality of material storing box) is shown.

Figure 11 is the vertical view of wanting portion to constitute that the line production system of the present invention the 3rd embodiment schematically is shown.

Figure 12 is stakcer crane that line production system shown in Figure 11 at length is shown and the side view of taking in the box body of glass substrate.

Figure 13 is the positive view of stakcer crane shown in Figure 12.

Figure 14 is the skeleton view that substrate conveyer mechanism one example of line production system shown in Figure 11 is shown.

Figure 15 is another routine skeleton view of substrate conveyer mechanism that line production system shown in Figure 11 is shown.

Figure 16 is the vertical view that the automated warehouse of the 4th embodiment of the present invention schematically is shown and glass substrate is taken out of state.

Figure 17 is for schematically illustrating the side view of automated warehouse shown in Figure 16.

Figure 18 is the vertical view that the automated warehouse of the 4th embodiment of the present invention schematically is shown and glass substrate is moved into state.

Figure 19 is for schematically illustrating the side view of automated warehouse shown in Figure 180.

Figure 20 is the vertical view that the substrate storing apparatus of the 5th embodiment of the present invention schematically is shown and glass substrate is moved into state.

Figure 21 is the vertical view that the substrate discharger of the 6th embodiment of the present invention schematically is shown and glass substrate is taken out of state.

Embodiment

Below, with reference to accompanying drawing embodiments of the invention are illustrated.

The 1st embodiment

As shown in Figure 1, the line production system 1 of the present invention the 1st embodiment has a plurality of core devices 10 of taking in the stacking hoisting way that box body behind the substrate or empty box body taken care of that will take in many pieces of glass substrates, core device 10 a plurality of are fetched and delivered position (take out of position C1 and move into position C2) is connected respectively and make a plurality of processing lines 20 of the various processing of color filter sheet with respect to the glass substrate of taking in the box body behind the substrate reception that will take care of in the core device 10,30, ... 70,90.In addition, core device 10 is provided with in linearity extension mode on the face of being horizontally disposed with, and each handles line 20,30 ... 70,90 being provided with the sidepiece from core device 10 is provided with in the horizontal overhanging mode of the word of falling U shape on the face.

At first, use Fig. 1, to processing line 20,30 ... 70,90 formation describes.As shown in Figure 1, each handles line 20,30 ... 70,90 have the carrying path 15 that constitutes by the conveyor of under horizontality, carrying glass substrate etc., be arranged at the various treating apparatus 21,31 on each carrying path 15 ... 96.

Wherein, handle line 20 for carry out the processing line of chromium film forming on glass substrate, treating apparatus (chromium film formation device 21) is arranged on the carrying path 15.

Handle line 30 for will be on glass substrate the chromium of film forming form pattern and form the processing line of black matrix", treating apparatus (photoresists apparatus for coating 31, prebake device 32, exposure device 33, developing apparatus 34, cleaning device 35, Etaching device 36, stripping off device 37 and back drying unit 38) is arranged on the carrying path 15.In addition, when black matrix" is made of resin, implement the processing of being undertaken by photoresists apparatus for coating 31, prebake device 32, exposure device 33, developing apparatus 34, cleaning device 35 and back drying unit 38.In addition, handle line 30 and processing line 40R described later, 40G, 40B, 50,60 together constitute the main plate-making line that realization comprises the treatment process of photoetching.

Handle line 40R, 40G, 40B is respectively the processing line of the dyed layer of (red, green or blue) of all kinds that be formed with predetermined pattern on glass substrate, treating apparatus (photoresists (color resist) apparatus for coating 41, prebake device 42, exposure device 43, developing apparatus 44, cleaning device 45 and back drying unit 46) is arranged on the carrying path 15.

Handling line 50 is the processing line that forms protective seam on glass substrate; with processing line 40R, 40G, 40B is same; treating apparatus (photoresists apparatus for coating 51, prebake device 52, exposure device 53, developing apparatus 54, cleaning device 55 and back drying unit 56) is arranged on the carrying path 15.

Handling line 60 is the processing line that forms column on glass substrate, with processing line 40R, 40G, 40B is same, treating apparatus (photoresists apparatus for coating 61, prebake device 62, exposure device 63, developing apparatus 64, cleaning device 65 and back drying unit 66) is arranged on the carrying path 15.

Handling line 70 is the processing line that forms the ITO layer on glass substrate, and treating apparatus (ITO film formation device 71) is arranged on the carrying path 15.In addition, when making the color filter sheet of STN type, the pattern that need carry out the ITO layer forms, at this moment, handle line 70 and can be provided with and handle the same treating apparatus (apparatus for coating, prebake device, exposure device, developing apparatus, cleaning device, Etaching device, stripping off device and back drying unit) of line 30.

Handle line 90 for realizing and handling line 40R, 40G, 40B, 50, the plate-making line of the preparation of 60 same treatment process, on carrying path 15, be provided with and handle line 40R, 40G, 40B, 50,60 same treating apparatus (apparatus for coating 91, prebake device 92, exposure device 93, developing apparatus 94, cleaning device 95 and back drying unit 96).In addition, handling line 90 can be as handling line 40R, 40G, and 40B, beyond 50,60 replacement line used, the interpolation line of necessity used in the time of also can be as the goods of making the column shape on the restraining barrier of MVA.And during the latter, realize by handling the processing that line 50,60,90 carries out.

In addition, as the processing line that is connected with core device 10, except above-mentioned processing line 20,30 ..., beyond 70,90, can be provided with and cut off glass substrate, carry out various inspections and make outer other of glass substrate regeneration handle lines.

Below, with Fig. 2～Fig. 5, the core device 10 in the line production system shown in Figure 11 and the formation of substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism) are described.

As shown in Figure 2, core device 10 has the material storing box 11 of a plurality of box bodys 81 of keeping, the stakcer crane 12 that the box body 81 of keeping in material storing box 11 carried in material storing box 11.

At this, material storing box 11 has a plurality of frame 11a that make mounting box body 81 and is configured to 2 grades structure up and down as shown in Figure 3 and Figure 4.In addition, stakcer crane 12 is, by in walking to left and right direction on the track 13 that extends along material storing box 11, make lifting frame (not shown) towards upper and lower to moving, material storing box 11 in, respectively to fetch and deliver position (take out of position C1 and move into position C2) and conveying box body 18 between the frame arbitrarily (box body storage position arbitrarily) among 2 grades the frame 11a up and down.At this, although be provided with 1 material storing box 11, be not limited to this at track 13 one-sided, 2 material storing box 11 can be set in the both sides of track 13.In addition, although the frame 11a of material storing box 11 is configured to 2 grades up and down, be not limited to this, the frame 11a opening of material storing box 11 can be configured to up and down more than 3 grades.In addition,, be not limited to this, in the stakcer crane walking that can have on the track 13 more than 2 although on track 13, have only 12 walkings of 1 stakcer crane.

At this, the position (take out of position C1 and move into position C2) of respectively fetching and delivering in material storing box 11 is respectively equipped with substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism), as shown in Figures 2 and 3, take out of the 16a of mechanism by each substrate, in the box body 81 behind the substrate reception that is positioned respectively to take out of position C1, with respect to respectively take out of corresponding one piece one piece on line (carrying path 15) ground of respectively handling of position C1 and discharge glass substrate 82, simultaneously, as Fig. 2 and shown in Figure 4, move into the 16b of mechanism by each substrate, the 82 1 pieces of one piece of ground of glass substrate that will manage throughout after line (carrying path 15) is handled are accommodated in the box body 81 of the sky of respectively moving into position C2 location.

In addition, each substrate takes out of that the 16a of mechanism has the box body jacking gear 17a that makes box body 81 liftings and from the one piece one piece basal plate conveyer 18a that takes out of glass substrate 82 in carrying path 15 that takes in the box body 81 behind the substrate by box body jacking gear 17a lifting.In addition, each substrate is taken out of the 16a of mechanism and is had between the outbound position A1 that takes out of position C1 or warehouse-in position B1 and box body jacking gear 17a and carry out the box body conveying device (not shown) that box body 81 joins.

In addition, each substrate moves into that the 16b of mechanism has the box body jacking gear 17b that makes box body 81 liftings and from carrying path 15 one piece one piece basal plate conveyer 18b that moves into glass substrate 82 to by the box body 81 of box body jacking gear 17b lifting.In addition, each substrate is moved into the 16b of mechanism and is had between the outbound position A2 that moves into position C2 or warehouse-in position B2 and box body jacking gear 17b and carry out the box body conveying device (not shown) that box body 81 joins.

In addition, as shown in Figure 5, basal plate conveyer 18a, 18b have bearing support 87 and the roller 88 that is arranged on the bearing support 87.In addition, box body 81 has upper plate 83, lower plate 84, connect a plurality of pillars 85 that these upper plates 83 and lower plate 84 modes are installed, with stride at about 85 on pillar (perpendicular to the direction of the paper of Fig. 5) around a plurality of wire rope 86, by being arranged on a plurality of wire rope 86 of sustained height, under state shown in Figure 5, take in a plurality of glass substrates 82.In addition, box body 81 is by box body jacking gear (with reference to Fig. 2) lifting, the basal plate conveyer 18a that enters by the opening 84a that is formed on the lower plate 84, the roller 88 of 18b contacted with the following of glass substrate 82 in being accommodated in box body 81, glass substrate 82 is taken out of to carrying path 15 from box body 81, or moves into to box body 81 from carrying path 15.

Below, by Fig. 1 to Fig. 5, the action of the line production system 1 of formation like this is described.In addition, core device 10 and each are handled line 20,30 ..., 70,90 are connected with control device (not shown), and following action is automatically carried out.

At first, as A-stage, in the material storing box 11 of core device 10, keeping has take in untreated many pieces of glass substrates 82 a plurality of to take in the box body 81 behind the substrate and the box body 81 of a plurality of skies.

Under this state, each handles line 20,30, ..., 70,90 stakcer cranes 12 by core device 10 are taken in box body 81 specific in the box body 81 behind the substrate (box body that will be taken in up to the glass substrate of the processing of carrying out desirable treatment process) taking-up with keeping in material storing box 11 in, be positioned to take out of position C1.In addition, each handles line 20,30 ..., 70,90 stakcer cranes 12 by core device 10 are positioned the box body 81 of taking care of the sky in material storing box 11 for move into position C2.

At this moment, the manufacturing of color filter sheet is respectively handled line 20,30 by using, ..., 70,90, glass substrate 62 order is according to the rules carried out processed in sequence and is realized relatively, manage line 20 throughout, 30 ..., 70,90 take out of C1 place, position, with keeping taking in the box body 81 behind the substrate, carry out locating selectively in material storing box 11 up to the box body 81 that the glass substrate of the processing of before treatment process is taken in.In addition; handle line 20; 30; ...; 70; the Production Example of 90 color filter sheet is as according to (1) chromium film forming (handle line 20); (2) formation of black matrix" (handling line 30); (3) formation of red colored layer (handling line 40R); (4) formation of green coloring layer (handling line 40G); (5) formation of blue-colored layer (handling line 40B); (6) formation of protective seam (handling line 50); (7) formation of column (handling line 60); the order of (8) formation of ITO layer (handling line 70) is carried out; at this moment; manage line 20 throughout; 30; ...; 70; 90 take out of C1 place, position, take in keeping taking in the box body 81 behind the substrate in material storing box 11; located selectively from the order of above-mentioned (1)～(8) box body 81 that carries out up to the glass substrate of the processing of present treatment process of looking.

At this, manage line 20,30 throughout, ..., in 70,90, take out of mechanism 16 by being arranged at the substrate of taking out of C1 place, position, handle one piece one piece ground of line (carrying path 15) relatively in the box body 81 behind the substrate and discharge glass substrate 82 from being positioned to take out of taking in of position C1, manage line 20,30 throughout, ..., 70,90 places, glass substrate 82 carries out predetermined process relatively.

Be specially, as shown in Figure 2, at first, will carry to the outbound position A1 that takes out of position C1 from the box body of taking in behind the substrate 81 that the particular chassis 11a of material storing box 11 takes out by the stakcer crane 12 of core device 10.At this, the box body of taking in behind the substrate 81 that arrives outbound position A1 is carried to box body jacking gear 17a by box body conveying device (not shown).Then, box body jacking gear 17a is under state shown in Figure 5, when box body 81 each grade one-levels ground is descended, contact with the following of glass substrate 82 that is positioned at box body 81 subordinates by roller 88 basal plate conveyer 18a, with from box body 81 in carrying path 15 one piece of one piece of ground take out of glass substrate 82.At this moment, take out of glass substrate 82 from box body 81 during, the other box body of taking in behind the substrate 81 that next should discharge glass substrate 82 is carried towards outbound position A1, and is in holding state.

In addition, when the box body 81 of taking out of the sky of all glass substrates 82 rises by box body jacking gear 17a, before warehouse-in position B1, move, and, carry to warehouse-in position B1 from box body jacking gear 17a by box body conveying device (not shown).Then, take in the box body of usefulness to box body 81 conducts of the sky of putting position B1 conveying in storage, by means of stakcer crane 12, in the frame 11a of the sky of keeping in material storing box 11.

In addition, manage line 20,30 throughout, ..., in 70,90, move into the 16b of mechanism by being arranged at the substrate of moving into C2 place, position, the 82 1 pieces of one piece of ground of glass substrate after the processing that processing line (carrying path 15) is handled finishes are accommodated in the box body 81 that is positioned at the sky of moving into position C2.

Be specially, as shown in Figure 2, at first, will carry to the outbound position A2 that moves into position C2 from the box body 81 of the sky of the particular chassis 11a taking-up of material storing box 11 by the stakcer crane 12 of core device 10.At this, the box body 81 that arrives the sky of outbound position A2 is carried to box body jacking gear 17b by box body conveying device (not shown).Then, box body jacking gear 17b is under state shown in Figure 5, when box body 81 each grade one-levels ground is risen, the glass substrate 82 that acceptance is moved into from carrying path 15, contact with the following of glass substrate 82 by roller 88, to move into glass substrate 82 from carrying path 15 one piece of one piece of ground to box body 81 with basal plate conveyer 18a.At this moment, with glass substrate 82 be accommodated in the box body 81 during, next should take in the box body 81 of the other sky of glass substrate 82 and carry, and be in holding state towards outbound position A2.

In addition, the box body of taking in behind the substrate 81 of taking in all glass substrates 82 moves before warehouse-in position B2 by box body jacking gear 17b, and by box body conveying device (not shown), carries to warehouse-in position B2 from box body jacking gear 17b.Then, take in box body 81 behind the substrate by means of stakcer crane 12, in the frame 11a of the sky of keeping in material storing box 11 to what warehouse-in position B2 carried.

According to the 1st embodiment like this of the present invention, owing to will take in the core device 10 of the stacking hoisting way that a plurality of box bodys 81 of many pieces of glass substrates 82 are taken care of, by substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism), a plurality of processing lines 20 with the various processing of making the color filter sheet, 30, ..., 70,90 connect, thereby processing line 40R to the realization of the treatment process (plate-making process) of the lithography process of the formation that comprises black matrix" or formation of dyed layer of all kinds etc., 40G, 40B, 50,60 configuration constitutes and can easily change, and according to the kind of the goods of making as the color filter sheet, the order of replaceable these a plurality of plate-making process and interpolation or eliminate specific plate-making process.

In addition, according to the 1st embodiment of the present invention, because the core device 10 of stacking hoisting way is with realizing that the processing line (the plate-making line of preparation) 90 with handling line (the main line of making a plate) 40R, 40G, 40B, 50,60 same treatment process is connected, thereby in comprising the treatment process of lithography process (plate-making process), even on goods, produce defective (common defective etc.), in the time of the plate-making line of realizing this plate-making process temporarily need being stopped, also can in handling line 90, continue this plate-making process, can prevent the reduction of the running rate that line production system is all.In addition, in plate-making process, by carrying out determining of necessary processing conditions with handling line 90, with the goods manufacturing while of front, aspect the processing conditions of determining next goods, can handle in the line 90 at this, continue the manufacturing of next goods, can prevent the reduction of the running rate that line production system is all.In addition, the plate-making process of realizing in the plate-making line that becomes speed decision class also coexists to handle in the line 90 with this plate-making line one and realizes, can eliminate the speed decision stage, can prevent to reduce all running rates of line production system.

In addition, in the 1st above-mentioned embodiment, just handle line (the plate-making line of preparation) 90 and 10 these a pair of connections of core device, handle line 90 by this, as required, realize and each plate-making line 40R, 40G, 40B, 50,60 same treatment process, but be not limited to this, can be provided with the plate-making line of the preparation of arbitrary number, for example, each make a plate line 40R, 40G, 40B, 50,60 each is connected with the plate-making line of preparation, by the plate-making line of each preparation, realize and each line 40R that makes a plate, 40G, 40B, 50,60 same treatment process.

In addition, in the 1st above-mentioned embodiment, core device 10 is made of a material storing box 11, but is not limited to this, and core device 10 can be made of a plurality of material storing box.

In addition, in the 1st above-mentioned embodiment, as taking out of glass substrate 82 for 15 1 pieces one piece to carrying path from the box body of taking in behind the substrate 81, perhaps from carrying path 15 to 81 1 pieces of one piece of substrate carrying mechanisms of moving into glass substrate 82 of box body, used basal plate conveyer 18a shown in Figure 5,18b, but be not limited to this, can use the robot of band arm, glass substrate 82 is loaded on the arm, and insert from the front of box body 81, by glass substrate 82 is shifted to wire rope 86 from arm, glass substrate 82 is taken on one piece of one piece of ground, in addition, insert arm from the front of box body 81,, discharge glass substrate 82 with one piece one piece ground by glass substrate 82 is transferred on the arm from wire rope 86.

The 2nd embodiment

Below, with Fig. 6 the 2nd embodiment of the present invention is described.In addition, the 2nd embodiment of the present invention except (1) in the plate-making line of the treatment process that realizes containing lithography process, be equipped with aspect the common defect inspection machine that detects the common defective that takes place at the same position of a plurality of glass substrates that become process object, (2) be provided with and handle the inspecting substrate line aspect that substrate that processing that line handles finishes is checked (being revised as required) by each, (3) be provided with the substrate regeneration line aspect that the substrate of common defective that indivedual defect inspection machine examinations of containing in the common defect inspection machine that will contain in the line by plate-making or the inspecting substrate line measure or indivedual defectives is regenerated, other and above-mentioned the 1st embodiment are roughly the same.In the 2nd embodiment of the present invention, the part identical with above-mentioned the 1st embodiment is marked with identical symbol, omits its detailed description at this.

As shown in Figure 6, the line production system 1 ' of the 2nd embodiment of the present invention has a plurality of core devices 10 of taking in the stacking hoisting way that box body behind the substrate or empty box body taken care of that will take in many pieces of glass substrates, fetch and deliver the processing line 20 that position (take out of position C1 and move into position C2) is connected, carries out various processing with respect to the glass substrate of being taken in the box body behind the substrate reception that will keeping have in the core device 10 with core device 10 a plurality of respectively, 30, ..., 70,90,100,110.In addition, handle line 20,30 ..., 70,90 is the manufacturing line of making the various processing of color filter sheet, and handling line 100 is will be by handling line 20,30, ..., the inspecting substrate line that the glass substrate that 70,90 processing of handling finish is checked is handled the substrate regeneration line that glass substrate that line 110 will detect various defectives (the indivedual defectives that produce common defective or produce in the different position of substrate at the same position of glass substrate) is regenerated.In addition, core device 10 is in the linearly extension ground setting on the face that is provided with of level, and each handles line 20,30 ..., 70,90,100,110 are being provided with on the face, from the sidepiece of core device 10, are the horizontal overhanging setting of reverse U shape.

At first, use Fig. 6, to processing line 20,30 ..., 70,90,100,110 formation is illustrated.As shown in Figure 6, each handles line 20,30 ..., 70,90,100,110 have the carrying path 15 that conveyor that glass substrate is carried etc. constitutes and are arranged on various treating apparatus 21,31 on each carrying path 15 under horizontality ..., 101,102,111.

At this, handle line 20,30, ..., 70,90 basic comprising is identical with the 1st above-mentioned embodiment, but handling line 30,40R, 40G, 40B, 50,60, on 70 the carrying path 15, be equipped with the common defective that on the same position of a plurality of glass substrates that become process object, to produce detected common defect inspection machine 39,47 in addition, 57,67,77.

Wherein, with the common defect inspection machine 39 that fits in the processing line 30 that forms black matrix", carry out the relevant complete inspection of inspection item (face size, penetrance and visual examination etc.) with regulation.In addition, visual examination is by image processing apparatus etc., and relatively the difference of the pixel image of adjacency forms.

In addition, with the processing line 40R that fits into the dyed layer that forms (red, green or blue) of all kinds, the common defect inspection machine 47 among 40G, the 40B, carry out the relevant sampling check (for example 10 pieces of ratios of getting 1 piece) of inspection item (visual examination etc.) with regulation.In addition, visual examination is by image processing apparatus etc., and the difference of relatively more suitable with the matrix part of adjacency image forms.

In addition, with the common defect inspection machine 57 that fits in the processing line 50 that forms protective seam, carry out relevant complete inspection or the sampling check of inspection item (spot inspection and common defect inspection etc.) with regulation.In addition, the spot inspection is by image processing apparatus etc., and with reflected light with see through light and carry out the AD conversion, and relatively the difference of the adjacency section image under the large tracts of land (longer cycle) forms.In addition, common defect inspection is by image processing apparatus etc., and with reflected light with see through light and carry out the AD conversion, and relatively the difference of the adjacency section image under the small size (than the short period) of a pixel degree forms.

In addition, with the common defect inspection machine 67 that fits in the processing line 60 that forms column, carry out relevant complete inspection or the sampling check of inspection item (inspection etc. that comes off of dimension inspection and column) with regulation.In addition, the coming off of column checked by image processing apparatus etc., and relatively the difference of the column image of adjacency forms.

And with the common defect inspection machine 77 that fits in the processing line 70 that forms the ITO layer, the inspection item of regulation (the staggering of the formation state of bubble, assigned position, dichroism, plate resistance power and thickness etc.) is carried out complete inspection or sampling check.

In addition, by common defect inspection machine 39,47,57,67,77 check results that obtain are managed to have with the corresponding form of each glass substrate in control device (not shown), and, determine the processing (continuation of processing or the regeneration of glass substrate etc.) afterwards of each glass substrate according to this check result.At this, according to check result, the processing line that common defective takes place is stopped, carrying out finding out or eliminating etc. of common defective occurrence cause.Concrete example as, when illustrating for example, when the pattern formation of the color filter sheet of making the STN type, carry out changing after the cleaning of photomask with the processing line 70 that forms the ITO layer.In addition, when forming (whole of expression portion is the film and the pattern that taking-up portion is outer, peripheral part does not the form ITO formation of removing electrode) at the pattern of the color filter sheet of making the TFT type, the cleaning of the carrier that uses when carrying out the ITO film forming or replacing.

On the other hand, handle line 100 and be by processing line 20,30, ..., 70, the inspecting substrate line that 90 glass substrates after handling are checked is being provided with treating apparatus (detect indivedual defect inspection machines 101 of the indivedual defectives that produce on the diverse location of a plurality of glass substrates, and the substrate correcting device 102 that will be revised by indivedual defectives of indivedual defect inspection machine 101 detected each glass substrate) on the carrying path 15.

At this,, the inspection item (spot inspection, visual examination, flaw height mensuration, coordinate are observed) of regulation is checked individually with indivedual defect inspection machines 101 of handling line 100.

The detailed content of each inspection item is as follows.

(1) spot inspection: by monochromatic (homochromy) image of taking-ups such as image processing apparatus, detecting can not detected deep or light defective by the common defect inspection to a pixel.In addition, area, direction (vertical and horizontal) by changing inspection method or comparison field all can detect from little defective to spot defects.

(2) visual examination: take out through light image by image processing apparatus,, detect blank or foreign matter, black matrix" defective, the inside glass wound, the inside glass dirt etc. by more homochromy difference in abutting connection with pixel image.In addition, take out reflected light image, in abutting connection with pixel image, detect projection or face and peel off etc. by more homochromy by image processing apparatus etc.

(3) flaw height is measured: use the height of the determinator mensuration of contact pin type by the detected projection of the visual examination of above-mentioned (2) (under reflected light image, projection is because of the observed one-tenth black of diffuse reflection).

(4) coordinate is observed: according to by the detected result of the visual examination of above-mentioned (2), and the defective of judging in the time of need measuring by microexamination and the coordinate at position.Thus, definite processing (need not to revise, need correction and impossible correction etc.) afterwards.

Handling line 110 is will be by common defect inspection machine 39,47,57,67,77 or indivedual defect inspection machine 101 detect the substrate regeneration line that the glass substrate of common defective or indivedual defectives is regenerated, on carrying path 15, be provided with treating apparatus (will detect the substrate regenerating unit 111 that the glass substrate of common defective or indivedual defectives is regenerated).

In addition, as the processing line that is connected with core device 10, except above-mentioned processing line 20,30 ..., beyond 70,90,100,110, other that also can be provided for cutting off glass substrate are handled lines.

At this, so the action of the line production system 1 ' that constitutes is identical with the 1st above-mentioned embodiment, with core device 10 and respectively handle line 20,30 ..., 70,90, under the control of 100,110 control device (not shown) that connect, automatically carry out relevant various processing such as manufacturing, inspection and regeneration with the color filter sheet.

Be specially, the manufacturing of color filter sheet is by using the processing line 20 as production line, 30 ..., 70, relative glass substrate 82 order is according to the rules carried out sequential processes and is formed, manage line 20,30 throughout ..., 70 take out of C1 place, position, with in the box body 81 behind the substrate reception of keeping in material storing box 11, carry out locating selectively up to the box body 81 that the glass substrate of the processing of before treatment process is taken in.In addition; handle line 20,30 ...; the Production Example of the color filter sheet due to 70 is as according to (1) chromium film forming (handle line 20); (2) formation of black matrix" (handling line 30), the formation of (3) red colored layer (handling line 40R), the formation of (4) green coloring layer (handling line 40G); (5) formation of blue-colored layer (handling line 40B); (6) formation of protective seam (handling line 50), the formation of (7) column (handling line 60), the order of the formation of (8) ITO layer (handling line 70) is carried out.

In addition, processing line 20 as production line, 30, ..., in 70, realize containing the common defect inspection machine 39,47,57 of detecting of packing among processing line (plate-making line) 40R, 40G, the 40B, 50,60 of the treatment process of lithography process in the common defective that same position took place of a plurality of glass substrates 82 that become process object, 67, to check according to the inspection item of above-mentioned regulation.And, according to this check result, the processing line that produces common defective is stopped, carrying out the finding out or eliminating etc. of occurrence cause of common defective.At this moment, for the processing line beyond the processing line that stops, using keeping in the material storing box 11 of core device 10 in, carry out glass substrate 82 up to the processing end of the processing of treatment process before, make.

In addition, as the processing line 20,30 of production line ..., after 70 processing is all over, or in its way, by processing line 20,30 ..., the glass substrate 82 that 70 processing of handling finish is sent into and is handled line (inspecting substrate line) 100.Then, by indivedual defect inspection machines 101, detect indivedual defectives that the diverse location at a plurality of glass substrates 82 produces according to the inspection item of afore mentioned rules, as required, by substrate correcting device 102, revise indivedual defectives by indivedual defect inspection machine 101 detected each glass substrate 82.

In addition, as the processing line 20,30 of production line ..., after 70 processing is all over, or in its way, by common defect inspection machine 39,47,57,67,77 or indivedual defect inspection machine 101 glass substrate 82 of detecting common defective or indivedual defectives send into substrate regeneration line (handling line 110).Then, by substrate regenerating unit 111, to be immersed in bronsted lowry acids and bases bronsted lowry solution medium and remove with being formed at various layer on the glass substrate 82, with repeat glass substrate 82.

Structure like this according to the 2nd embodiment of the present invention, because processing line 20 as production line, 30, ..., in 70, realize containing the common defect inspection machine 39 of detecting of packing in the processing line (plate-making line) 30,40R, 40G, 40B, 50,60,70 of the treatment process of lithography process in the common defective that same position took place of a plurality of glass substrates 82 that become process object, 47,57,67,77, the common defective that becomes a large amount of unacceptable products generation reasons can be detected as far as possible early, can improve the qualification rate of goods.At this moment, according to the 2nd embodiment of the present invention, because in the core device 10 of the stacking hoisting way that a plurality of box bodys 81 that will take in many pieces of glass substrates 82 are taken care of, by substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism), with processing line 20 as production line, 30, ..., 70 connect, thereby in the treatment process (plate-making process) that includes the formation of carrying out black matrix" or formation of dyed layer of all kinds etc. under any one operation, even when common defective being taken place in adhering to of photomask etc. because of foreign matter, when the treatment process that only stops to take place this common defective was fast removed problem, other treatment process can use processing to finish, carry out continuing manufacturing process up to the glass substrate 82 of the processing of taking care of the treatment process in the material storing box 11 of core device 10.For this reason, when keeping the high running rate of production line, can improve the qualification rate of goods.

In addition, according to the 2nd embodiment of the present invention, since core device 10 be used for by processing line 20 as production line, 30, ..., the processing line that the glass substrate 82 after 70 processing of handling is checked (inspecting substrate line) 100 connects, and is detected indivedual defectives of the diverse location generation of a plurality of glass substrates 82 by indivedual defect inspection machines 101, even thereby also can suitably get rid of for the occurrence cause of indivedual defectives different with common defective, can improve the qualification rate of goods.In addition, in handling line (inspecting substrate line) 100, owing to use the indivedual defectives of substrate correcting device 102 corrections by indivedual defect inspection machine 101 detected each glass substrate 82, thus can improve the substantial yield rate of goods.

In addition, according to the 2nd embodiment of the present invention, since core device 10 be used for by common defect inspection machine 39,47,57,67,77 or indivedual defect inspection machine 101 detect processing line (substrate regeneration line) 110 connections that the glass substrate 82 of common defective or indivedual defectives regenerate, even thereby the indivedual defectives that can not revise by substrate correcting device 102 by indivedual defect inspection machine 101 detected situations under, by by substrate regenerating unit 111 these glass substrates 82 of regeneration of handling line (substrate regeneration line) 110, also can improve the substantial yield rate of goods.In addition, even detect the occasion of common defective,, also can improve the substantial yield rate of goods by by substrate regenerating unit 111 these glass substrates 82 of regeneration of handling line (substrate regeneration line) 110 by common defect inspection machine 39,47,57,67,77.And owing to the glass substrate 82 that becomes final unacceptable product can not sent into subsequent handling, can prevent to apply unwanted load in subsequent handling this moment, can improve all substantial running rates of line production system.

In addition, in the 1st and the 2nd above-mentioned embodiment, Fig. 1 and line production system 1,1 ' shown in Figure 6 can import by following layout design in the factory of reality.Below, be that example is illustrated with the occasion of line production system 1 ' shown in Figure 6.

The view of the layout design example when Fig. 7 and Fig. 8 illustrate the factory that line production system shown in Figure 61 ' importing is actual.In addition; in Fig. 7 and Fig. 8; show only with processing line 20 shown in Figure 6; 30; ..., 70,90; in 100,110, chromium film forming line 20, black matrix" form line 30, dyed layer and form line 40R, 40G, 40B, protective seam and form line 50, column and form occasion on the floor 150 that line 60, inspecting substrate line 100 and substrate regeneration line 110 be arranged on factory.

As shown in Figure 7, when carrying out the layout design of line production system 1 ', with the relation of the raw material capacity of needs etc., aspect the size of the material storing box 11 of determining core device 10, consider the area or the shape on floor 150, determine to handle line 20,30 ..., 60,100,110 configuration structure.

At this moment, handle line 20,30 ..., 60,100,110 according to its kind, and the area difference is set, in addition, even at the processing line 30 of same conduct plate-making line ..., in 60, for example in black matrix" forms line 30, need form line 40R than dyed layer, 40G, 40B is big is provided with area.In addition, except making the processing line 20,30 as production line of color filter sheet ..., beyond 60, also with check or other of the inspecting substrate line 100 of correcting process and the substrate regeneration line 110 of repeat glass substrate etc. are handled lines and are connected.

For this reason, the different all processing lines 20 of area so are set, 30, ..., 60,100,110 when being connected with the core device 10 that is made of a material storing box 11, layout design as shown in Figure 7 is such, handle between line (black matrix" forms line 30 and substrate regeneration line 110) and the core device 10 and can not directly be connected in a part by substrate conveyer mechanism shown in Figure 2 (substrate is taken out of the 16a of mechanism and moved into the 16b of mechanism with substrate), generation need be carried the invalid path (with reference to 121,122) of glass substrate by the conveying carrier of AGV or RGV, CV etc.

To this, if core device 10 is made of a plurality of material storing box, can minimal equipment it just can be set flexibly the different processing line 20,30 of area is set with configuration structure arbitrarily ..., 60,100,110.Be specially, as shown in Figure 8, by with a plurality of material storing box 11,11 ' with wild goose shape (height shape straggly) configuration, includes all processing lines 20,30 that black matrix" forms line 30 and substrate regeneration line 110, ..., 60,100,110 with core device 10 between can only directly be connected by substrate conveyer mechanism shown in Figure 2 (substrate is taken out of the 16a of mechanism and moved into the 16b of mechanism with substrate).

At this, in core device 10 shown in Figure 8, each material storing box 11,11 ' is provided with a stakcer crane 12,12 '.In addition, material storing box 11,11 ' coupling part is provided with at stakcer crane 12, carries out the stakcer crane (connection device) 19 of box body handing-over between 12 '.Can use device arbitrarily as connection device like this, if replace stakcer crane 12 but use, the stakcer crane 19 of 12 ' function, even then at stakcer crane 12,12 ' when breaking down, use instead that the stakcer crane 19 of machinery also can continue at material storing box 11, the processing in 11 '.

In addition, in core device 10 shown in Figure 8, a plurality of material storing box 11,11 ' with wild goose shape (height shape straggly) setting, but can be any configuration structure of the shape of base area plate or the number of handling line etc., for example, as Fig. 9 and shown in Figure 10, can be by connection device 130 with a plurality of material storing box 11,11 ', 11 " be T font configuration.

The 3rd embodiment

Below, by Figure 11 to Figure 15, the 3rd embodiment of the present invention is described.In addition, the present invention the 3rd embodiment is except the formation difference of core device, and other and above-mentioned the 1st and the 2nd embodiment are roughly the same.In the 3rd embodiment of the present invention, the part identical with the above-mentioned the 1st and the 2nd embodiment is marked with identical symbol, in this omission it explained.

The above-mentioned the 1st and the line production system 1 of the 2nd embodiment, in 1 ', as by core device 10 keeping and the box body 81 carried, also can use by from the left and right side framework to the outstanding a plurality of fulcrum posts of horizontal direction and with substrate be the level of state supporting, so-called pin formula box body.In addition, in the pin formula box body, will be multistage setting with the outstanding to the inside a plurality of fulcrum posts row of sustained height,, take in a plurality of glass substrates by the supporting that 1 piece of glass substrate is the level of state with many fulcrum posts of one-level from the left and right side frame.

, in pin formula box body, when carrying box body, owing to can apply bigger vibration, exist the problem of the damaged easily or damage of the substrate that is accommodated in the box body to box body with the stakcer crane of core device etc.Particularly in recent years, the color filter sheet of making as goods etc. are very huge, and along with the increase of its weight, the problems referred to above manifest more.

In addition, in pin formula box body, owing to determine the range of size of foldable substrate, surpass the substrate of this scope, exist the problem that needs to change the box body of fitting mutually with the size of substrate for size by the length of fulcrum post etc.Particularly in recent years, the kind of the color filter sheet of making as goods etc. is very many, and the problems referred to above are more outstanding.

The purpose of the present invention the 3rd embodiment mainly is to have solved above-mentioned technical matters, same during with the above-mentioned the 1st and the 2nd embodiment, as by core device 10 keeping and the box body 81 carried, use by be erected between the framework of left and right side a plurality of wire rope and with the rope formula box body of substrate supporting in horizontality.

Below, by Figure 11 to Figure 15, to the line production system 1 of the present invention the 3rd embodiment " in core device 10 and the structure of substrate conveyer mechanism (216a of mechanism taken out of by substrate and substrate is moved into the 216b of mechanism) describe.

As shown in Figure 11, core device 10 has the material storing box 211 of a plurality of box bodys 81 of keeping and the stakcer crane 212 carried of the box body 81 in this material storing box 211 certainly in material storing box 211.

At this, material storing box 211 is 2 both sides that are listed in the walking path of stakcer crane 212 and extends setting, and a plurality of frame 211a that each row of material storing box 211 have mounting box body 81 are the structure (with reference to Figure 13) of 2 grades of configurations up and down.

In addition, stakcer crane 212 is as Figure 12 and shown in Figure 13, under the state of mounting box body 81, along material storing box 211 walkings, by make lifting frame 213 towards upper and lower to moving, with respectively fetching and delivering position (take out of position C1 and move into position C2) and up and down between any frame (box body storage position arbitrarily) among 2 grades of frame 211a, carrying box body 81 in material storing box 211.

At this, as Figure 12 and shown in Figure 13, have upper plate 183 by core device 10 keeping and the box body 81 carried, uprightly be arranged at the left and right side framework 184,185 on the upper plate 183 and be set up in the many wire rope 186 of 184,185 of these left and right side frameworks.At this, many wire rope 186 extend along the multistage surface level of differing heights, and by the many wire rope 186 with one-level glass substrate 82 are supported on horizontality.In addition, illustrate better by Figure 14 and Figure 15, about lateral frame 184,185 have respectively by screw-nut etc. and are anchored on 8 pillar 184a on the upper plate 183,185a, these pillars 184a is among the 185a, mutual aspectant pillar interconnects by many bracing bars 187.In addition, if wire rope 186 has the be the level of state tension force of abundance of supporting of glass substrate 82, then can use any kind of synthetic resin system or metallic etc.In addition, the radical in the surface level of wire rope 186 can be radical arbitrarily in the scope that glass substrate 82 can be supported on fully in the surface level.In addition, the radical of the growth direction of wire rope 186 can be taken under glass substrate 82 mutual hands-off states in the scope of desirable glass substrate 82 and can be radical arbitrarily.

In addition, the position (take out of position C1 and move into position C2) of respectively fetching and delivering in material storing box 211 is respectively equipped with substrate conveyer mechanism (216a of mechanism taken out of by substrate and substrate is moved into the 216b of mechanism), as shown in figure 11, take out of the 216a of mechanism by each substrate, the box body 81 of glass substrate 82 after being arranged in the substrate reception of respectively taking out of position C1, one piece of one piece of ground to respectively take out of the corresponding line (carrying path 15) of respectively handling of position C1 and discharge, simultaneously, move into the 216b of mechanism by each substrate, make and manage line (carrying path 15) throughout even 82 1 pieces of one piece of ground of the glass substrate of the processing of handling are accommodated in the position in respectively moving into the sylphon body 81 of position C2.

At this, each substrate is taken out of the 216a of mechanism and is moved into the 216b of mechanism with each substrate and have identical structure basically, as shown in figure 14, have possess be accommodated in box body 81 in the basal plate conveyer 218 of a plurality of rollers 190 of contacting of the lower surface of glass substrate 82, and make box body 81 liftings with the box body jacking gear 217 (for driving mechanism not shown) of box body 81 with the relative position relationship change of basal plate conveyer 218.In addition, as shown in figure 11, taking out of C1 place, position, box body 81 when each substrate is taken out of the 216a of mechanism conveying, is taken out of the 216a of mechanism from each substrate and is carried to warehouse-in position B1 from outbound position A1 by box body conveying device (not shown).In addition, moving into C2 place, position, box body 81 when each substrate is moved into the 216b of mechanism conveying, is moved into the 216b of mechanism from each substrate and is carried to warehouse-in position B2 from outbound position A2 by box body conveying device (not shown).

In addition, as shown in Figure 14, each substrate is taken out of the 216a of mechanism and each substrate and is moved into the basal plate conveyer 218 of the 216b of mechanism and have uprightly being arranged at pillar 191 upper ends on the face of setting and be configured to scaffold 188 from about the sandwich box body 81 in fixing, 188, with a plurality of axles 189 that can be installed on freely to rotate on this left and right sides scaffold 188,188.In addition, each equally spaced is provided with 6 rollers 190 on 189.In addition, driving mechanism (not shown) is housed at these axles on 189, each 189 can turn round towards desirable direction.

Take out of the 216a of mechanism and substrate is moved among the 216b of mechanism at like this substrate, box body 81 is by 217 liftings of box body jacking gear, when box body 81 one-level one-levels being descended by box body jacking gear 217, the roller 190 of basal plate conveyer 218 contacted with the following of glass substrate 82 of below in being accommodated in box body 81, the glass substrates at different levels 82 that are accommodated in the box body 81 can be discharged (shown in the solid arrow of Figure 14) to carrying path 15.In addition, by box body jacking gear 217, when box body 81 one-level one-levels were risen, the roller 190 of basal plate conveyer 218 contacted below the glass substrate 82 that can move into from carrying path 15, glass substrate 82 can be accommodated in (shown in Figure 14 dotted arrows) at different levels of box body 81.

In addition, taking out of the 216a of mechanism at each substrate shown in Figure 14 moves among the 216b of mechanism with each substrate, be that fixing base conveyor 218 is also by box body jacking gear 217, make box body 81 liftings, if but the box body 81 and the relative position relation of basal plate conveyer 218 are changed, be not limited to make the structure of box body 81 side liftings, also can take to make the structure of basal plate conveyer 218 side liftings, perhaps make the structure of basal plate conveyer 218 and 81 liang of square liftings of box body.

In addition, each substrate is taken out of the 216a of mechanism and each substrate and is moved into the 216b of mechanism and can take the outer structure for example shown in Figure 15 of structure shown in Figure 14, that is the structure that basal plate conveyer 218 ' can be entered from the below of box body jacking gear 217 ' (not shown for driving mechanism).In addition, basal plate conveyer 128 ' shown in Figure 15 has the supporting frame 192 that is positioned on the face of setting, be fixed to the framework 194 of a plurality of コ fonts on the supporting frame 192 and can be installed on a pair of leading section 194a of framework 194 freely to rotate by transverse slat 193, a plurality of axles 189 on the 194b.In addition, equally spaced be provided with 6 rollers 190 at each on 189.And, at these motor 195 as driving mechanism is housed on 189, transmission shaft 196a, 196b and gear 197 etc. can make each 189 towards desirable direction revolution.

At this, like this line production system 1 that constitutes " action identical during with the above-mentioned the 1st and the 2nd embodiment; handling line 20 with core device 10 and each; 30; ...; under the control of the control device (not shown) of 70 connections, automatically carry out the relevant various processing such as manufacturing, inspection and regeneration of color filter sheet.

According to the 3rd embodiment like this of the present invention, as the box body 81 of taking care of and carrying by the core device 10 of line production system 1, owing to used by being set up in left and right side framework 184, a plurality of wire rope 186 of 185 and rope formula box body that glass substrate 82 is supported with being the level of state, vibration when carrying box body 81 by the stakcer crane 212 of core device 10 can be absorbed effectively by wire rope 186, even using large-scale glass substrate (for example glass substrate of instrument size (thickness as 0.7mm about)) when making the color filter sheet, also can prevent to be accommodated in the glass substrate 82 damaged or damages in the box body 81.

In addition, according to the 3rd embodiment of the present invention, as by line production system 1 " 10 keepings of core device and the box body of carrying 81; owing to use the box body of above-mentioned rope formula; can be; even, also needn't change the box body suitable mutually with the size of glass substrate using same line production system to make under the situation of color filter sheet etc. of multiple class with in the glass substrate that can take in maximum sized wherein arbitrary dimension is accommodated in box body 81, can be a small amount of effectively and multiple class ground make.

In addition, according to the 3rd embodiment of the present invention, as by line production system 1 " 10 keepings of core device and the box body of carrying 81; owing to use the box body of above-mentioned rope formula; can take in more substantial glass substrate with the box body of pin formula etc., can have the core device line production system advantage, further improve the corresponding ability that temporarily stops of relative treatment process.

The 4th embodiment

Below, according to Figure 16 to Figure 19, the 4th embodiment of the present invention is described.

Line production system 1 at the 1st to the 3rd above-mentioned embodiment, 1 '; 1 " in, core device 10 is at material storing box 11, have a plurality of positions (take out of position C1 and move into position C2) of fetching and delivering in 211, be positioned at the box body 81 of taking out of position C1 or moving into position C2 relatively, glass substrate 82 taken in or glass substrate 82 one piece one piece ground from box body 81 is discharged to 81 1 pieces of one piece of ground of box body by substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism).In addition, taking out of position C1 or moving into the outbound position A1 that position C2 has separate setting respectively in the material storing box 11,211 of core device 10, A2 and warehouse-in position B1, B2.

At this, line production system 1 at above-mentioned the 1st to the 3rd embodiment, 1 '; 1 " in core device 10, since the outbound position A1 of the box body 81 in the material storing box 11,211, A2 and warehouse-in position B1, B2 is different mutually, by the glass substrate 82 due to the substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism) towards box body 81 take in operation and glass substrate 82 can carry out respectively independently from the discharge operation of box body 81, change the required productive temp time thereby can shorten box body 81, can suppress glass substrate 82 and be trapped in and respectively handle line 20,30, ..., 70,90, on 100,110 the carrying path 15.

; in the core device 10 that so constitutes; especially take out of among the 16a of mechanism at substrate; in order between the outbound position A1 that takes out of position C1 or warehouse-in position B1 and box body jacking gear 17a, to carry out the handing-over of box body 81, must be provided with possessing the box body conveying device (not shown) of direction throw-over gear etc.Equally, in order between the outbound position A2 that moves into position C2 or warehouse-in position B2 and box body jacking gear 17b, to carry out the handing-over of box body 81, also must be provided with possessing the box body conveying device (not shown) of direction throw-over gear etc.For this reason, exist the mechanical mechanism complexity of box body conveying device, the big problem of restriction that device is arranged.

The purpose of the present invention the 4th embodiment has been to solve above-mentioned problem, is used to change the line production system 1,1 ', 1 of above-mentioned the 1st to the 3rd embodiment " in the structure of core device 10.

Extremely shown in Figure 19 as Figure 16, the automated warehouse that core device 10 is handled for the many pieces of glass substrates 82 that will take in, have the material storing box 11 of a plurality of box bodys 81 of keeping and the stakcer crane 12 in material storing box 11, carried of the box body 81 in this material storing box 11 certainly.

At this, a plurality of frame 11a that material storing box 11 has mounting box body 81 are configured to 2 grades structure up and down.In addition, stakcer crane 12 is by in walking to left and right direction on the track 13 that extends along material storing box 11, make lifting frame (not shown) towards upper and lower to moving, and material storing box 11 in, respectively fetch and deliver position (take out of position C1 and move into position C2) and conveying box body 81 between any frame (box body storage position arbitrarily) among 2 grades the frame 11a up and down.At this, although be provided with 1 material storing box 11, be not limited to this at track 13 one-sided, 2 material storing box can be set in the both sides of track 13.In addition, the frame 11a of material storing box 11 is that 2 grades of modes dispose up and down, but is not limited to this, and the frame 11a of material storing box 11 can be configured to up and down more than 3 grades.In addition, 1 stakcer crane 12 of on track 13, only walking, but be not limited to this, can be at the stakcer crane of walking more than 2 on the track 13.

In the core device of structure like this, the outside of taking out of position C1 at material storing box 11, as Figure 16 and shown in Figure 17, be provided with box body jacking gear (box body detent mechanism) 317, with the taking at interval under the corresponding spacing of glass substrate 82, make the carrying path 15 of box body 81 with respect to basal plate conveyer (substrate carrying mechanism) etc., in above-below direction (perpendicular to the direction on paper surface) lifting, and can with respect to box body jacking gear 317 in abutting connection with the carrying path 15 that is provided with, from box body 81, discharge glass substrate 82.In addition, between material storing box 11 and box body jacking gear 317, be provided with the box body conveyor (box body conveying mechanism) 318,319 of carrying box body between the two.

At this, the position C1 that takes out of in the material storing box 11 has the outbound position A1 that will take out of from the box body 81 of material storing box 11 and box body 81 is moved into and independently put position B1 in storage with outbound position A1 to material storing box 11.In addition, box body jacking gear 317 is arranged in the box body crossbeam portion 316, move to obtain with the corresponding box body supply position D1 of the outbound position A1 of material storing box 11 with the mode of putting any one position of the corresponding box body drain position of position B1 E1 in storage, supply with D1 place, position at box body, draw in box body 81 from box body conveyor 318, simultaneously, at box body drain position E1 place, box body 81 is sent to box body conveyor 318.

In addition, in core device 10, the outside of moving into position C2 at material storing box 11, as Figure 18 and shown in Figure 19, be provided with and make the carrying path 15 of box body 81 with respect to basal plate conveyer (substrate carrying mechanism) etc., at the box body jacking gear (box body detent mechanism) 317 of above-below direction (perpendicular to the direction on paper surface) lifting, and can the glass substrate of supplying with 82 be taken in towards box body 81 from it in abutting connection with the carrying path 15 that is provided with.In addition, between material storing box 11 and box body jacking gear 317, be provided with the box body conveyor (box body conveying mechanism) 318,319 of carrying box body between the two.

At this, the position C2 that moves in the material storing box 11 has the outbound position A2 that will take out of from the box body 81 of material storing box 11 and box body 81 is moved into and independently put position B2 in storage with outbound position A2 to material storing box 11.In addition, box body jacking gear 317 is arranged in the box body crossbeam portion 316, move to obtain with the corresponding box body supply position D2 of the outbound position A2 of material storing box 11 with the mode of putting any one position of the corresponding box body drain position of position B2 E2 in storage, supply with D2 place, position at box body, draw in box body 81 from box body conveyor 318, simultaneously, at box body drain position E2 place, box body 81 is sent to box body conveyor 318.

In addition, as Figure 16 and shown in Figure 180, the position relation of outbound position A1 and warehouse-in position B1 is opposite with the position relation of outbound position A2 and warehouse-in position B2.

Below, by Figure 16 and Figure 17, to being illustrated from the action that the box body 81 behind the substrate discharges glass substrates 82 of taking in of taking in glass substrate.

At this moment, the box body 81 behind the substrate reception of keeping in the frame 11a of material storing box 11 is carried by the outbound position A1 that takes out of position C1 of stakcer crane 12 in material storing box 11.

Then, the box body 81 that arrives outbound position A1 is supplied with box body jacking gear 317 conveyings at D1 place, position by box body conveyor 318 to being positioned box body.

So with the box body behind the substrate reception 81 after box body is supplied with position D1 location, the box body 81 behind substrate reception is discharged glass substrates 82.At this moment, by box body jacking gear 317, the box body 81 one-level one-levels ground behind the substrate reception descends, and passes through basal plate conveyer (not shown) etc., and glass substrate 82 is taken out of to 15 1 pieces of one piece of ground of carrying path from box body 81.

In addition, so discharge glass substrate 82 during, next should discharge the position of box body 81 in face of box body is supplied with position D1 behind the other substrate reception of glass substrate and carry and be in holding state.

Afterwards, the box body 81 that the discharge of glass substrate 82 finishes and change is empty is at box body crossbeam portion 316 places, and by box body jacking gear 317, when rising to the height of regulation, E1 moves to the box body drain position.So, send to box body conveyor 319 by box body jacking gear 317, and carry to the warehouse-in position of material storing box 11 B1 to the sylphon body 81 that box body drain position E1 moves.In addition, the sylphon body 81 that so arrives warehouse-in position B1 is taken care of by stakcer crane 12 in the frame 11a of the sky in material storing box 11 as taking in the box body of usefulness.

In addition, box body jacking gear 317 returns box body and supplies with position D1, and the box body 81 that next should discharge behind the substrate reception of glass substrate is drawn in from box body conveyor 318.

After, carry out above-mentioned action repeatedly.

Below, by Figure 18 and Figure 19, the action that glass substrate 82 is accommodated in the empty box body 81 describes.

At this moment, at first, the sylphon body 81 of keeping in the frame 11a of material storing box 11 carried by the outbound position A2 that moves into position C2 of stakcer crane 12 in material storing box 11.

Then, the box body 81 that arrives outbound position A2 is supplied with box body jacking gear 317 conveyings at D2 place, position by box body conveyor 318 to being positioned box body.

Afterwards, after empty box body 81 was disposed at box body jacking gear 317, at box body crossbeam portion 316 places, by box body jacking gear 317, when box body 81 was dropped to the height of regulation always, E2 moved to the box body drain position.

So with the box body 81 of sky behind box body drain position E2 location, glass substrate 82 is taken in to the box body 81 of sky.At this moment, by box body jacking gear 317, empty box body 81 descends in one-level one-level ground mode, and passes through basal plate conveyer (not shown) etc., from carrying path 15 glass substrate 82 is moved into to 81 1 pieces of one piece of ground of box body.

In addition, so take in glass substrate 82 during, the position of box body 81 in face of box body is supplied with position D2 that next should take in the other sky of glass substrate carried and is in holding state.

Afterwards, the box body 81 behind the substrate reception of taking in end of glass substrate 82 is sent to box body conveyor 319 by box body jacking gear 317, and carries to the warehouse-in position of material storing box 11 B2.In addition, so the box body 81 behind the substrate reception of arrival warehouse-in position B2 is taken care of by stakcer crane 12 in the frame 11a of the sky in material storing box 11.

In addition, box body jacking gear 317 returns box body and supplies with position D2, next should take in the box body 81 of the sky of glass substrate and be drawn in from box body conveyor 318.

After, carry out above-mentioned action repeatedly.

According to the 4th embodiment like this of the present invention, because line production system 1 at the 1st to the 3rd above-mentioned embodiment, 1 '; 1 " in the middle core device 10 that uses, 15 of the carrying paths of basal plate conveyer (substrate carrying mechanism) etc., with respect to from the discharge of the glass substrate 82 of box body 81 or glass substrate 82 the carrying path of taking in 15 to box body 81, the box body jacking gear 317 that makes these box body 81 liftings with the outbound position A1 of material storing box 11, the corresponding box body of A2 is supplied with position D1, D2, together with warehouse-in position B1, the corresponding box body drain position of B2 E1 moves between E2, supplies with position D1 at box body, the D2 place, when will draw in, at box body drain position E1, E2 place from the box body 81 of box body conveyor 318, box body 81 is sent to box body conveyor 319, thereby carry out taking in of glass substrate 82 or between expulsive stage at relative box body 81, can with next box body 81 in connection with being in holding state, can shorten the productive temp time in the outbound operation of going into of box body 81.In addition, since by make box body jacking gear 317 with the outbound position A1 of material storing box 11, the corresponding box body of A2 is supplied with position D1, D2, with the warehouse-in position B1, the corresponding box body drain position of B2 E1, move between E2, class is accepted box body 81, need not to change the special direction throw-over gear of the moving direction of box body 81, in addition, because the photoelectricity printing machine also can only with corresponding to box body be supplied with position D1, D2 and box body drain position E1,2 positions of this of E2 are corresponding, simple in structure, and the restriction that device is arranged is few.In addition, owing to supply with position D1 at the box body of accepting box body 81, D2 and box body drain position E1, the box body jacking gear 317 that moves between E2, its structure can relatively move on the pallet identical with the carrying path 15 of basal plate conveyer (substrate carrying mechanism) etc., directly be connected with the occasion of avoiding both to interfere with carrying path 15 and compare box body conveyor 318,319 and basal plate conveyer (substrate carrying mechanism) etc., simple in structure and be convenient to maintenance.

In addition, in the 4th above-mentioned embodiment, as box body 81 by 10 keepings of core device and conveying, can use except the rope formula box body that substrate is supported with being the level of state by being set up in a plurality of wire rope between the framework of left and right side, can use by from the left and right side framework to the outstanding a plurality of fulcrum posts of horizontal direction and with the pin formula box body of substrate layer horizontality supporting.

In the 4th above-mentioned embodiment, as at 317 box body conveying mechanisms of carrying box body 81 of material storing box 11 and box body jacking gear, used box body conveyor 318,319, but can use the AGV that can carry box body or the conveying mechanism arbitrarily of RGV, CV etc.

In addition, the core device of above-mentioned the 4th embodiment is applicable to the line production system 1,1 ', 1 of above-mentioned the 1st to the 3rd embodiment "; but be not limited to this, can be widely applicable for the automated warehouse of the stacking hoisting way that the box body of taking in many pieces of substrates is disposed usually.

The 5th embodiment

Below, with Figure 20 the 5th embodiment of the present invention is described.

Line production system 1 at the 1st to the 4th above-mentioned embodiment, 1 '; 1 " in, with respect to being positioned at the box body 81 of fetching and delivering position (take out of position C1 or move into position C2), by substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism) with glass substrate 82 in box body 81 one piece one piece take in, perhaps with glass substrate 82 one piece of one piece of discharge from box body 81.

; in the substrate conveyer mechanism (16a of mechanism taken out of by substrate and substrate is moved into the 16b of mechanism) of structure like this; the box body that carries out the supply of box body 81 supplies with the position, carry out glass substrate 82 is taken in box body 81 or will fetch and deliver the position from the substrate that the glass substrate 82 of box body 81 is discharged, carry out the box body recovery position that box body 81 reclaims is not independently; be on a position, carry out the taking in or the recovery of discharge, box body 81 of supply, glass substrate 82 of box body 81.For this reason, exist the problem of taking in or discharging the productive temp time length in the operation of glass substrate 82.

The purpose of the present invention the 5th embodiment has been to solve above-mentioned problem, be used to change the line production system 1 of above-mentioned the 1st to the 4th embodiment, 1 '; 1 " in the structure of substrate conveyer mechanism (particularly substrate is moved into the 16b of mechanism), a kind of substrate storing apparatus of taking in as the glass substrate of sheet-like material 416 is provided.

As shown in Figure 20, the substrate storing apparatus 416 of the present invention the 5th embodiment has box body travel mechanism 419, box body jacking gear 417 and glass substrate mobile device 418.

Wherein, box body travel mechanism 419 makes box body 81 move to box body and supplies with any one position among position F1, substrate reception position G1 and the box body recovery position H1.

In addition, box body is supplied with position F1 for supplying with the position of box body 81.For this reason, the box body of supplying with to this position 81 is generally the box body of the sky of not taking in glass substrate 82.Substrate reception position G1 for glass substrate 82 to position that box body 81 is taken in.For this reason, be disposed at this locational box body 81 for taking in the box body in the taking in of glass substrate 82.Box body reclaims the position of position H1 for the box body 81 of taking in glass substrate 82 back handovers being reclaimed.For this reason, the box body 81 that reclaims from this position is generally and takes in the box body that the substrate reception behind the glass substrate 82 finishes.In addition, box body is supplied with position F1, substrate reception position G1 and box body recovery position H1 is arranged to row with the state that adjoins each other.

As shown in Figure 20, box body travel mechanism 419 will supply with sylphon body 81 that position F1 supplies with to box body and supply with position F1 from box body and move to substrate reception position G1.Thus, become box body in the taking in of carrying out that glass substrate 82 takes in to the sylphon body 81 that substrate reception position G1 moves.

Afterwards, glass substrate 82 taking in when finishing in box body 81, the box body 81 in taking in becomes the box body behind the substrate reception of taking in glass substrate 82.At this moment, the box body 81 of box body travel mechanism 419 after with this substrate reception reclaims position H1 from substrate reception position G1 to box body and moves.

The box body 81 that is positioned behind the substrate reception that box body reclaims H1 place, position reclaims position H1 recovery from box body.

So box body travel mechanism 419 will be positioned box body and supply with the sylphon body 81 of position F1 and supply with position F1 from box body and move to substrate reception position G1, and the box body 81 that will be positioned in the taking in of G1 place, substrate reception position moves to box body recovery position H1.

In addition, two kinds due to the above-mentioned box body travel mechanism 419 mobile can be used as independently to move and carries out respectively.But much less change sky in the position of moving earlier (substrate reception position G1 or box body reclaim position H1) is a precondition.

In addition, two kinds due to the above-mentioned box body travel mechanism 419 move can be interrelated movably interlock carry out.For example, 2 box bodys 81 are moved simultaneously, produce empty zone at substrate reception position G1 and will be positioned box body 81 that box body supplies with position F1 simultaneously and move in the mode in the zone of inserting this sky.But,, be to reclaim position H1 with the box body of mobile destination to become sky be precondition even in this case.

In addition, box body jacking gear 417 is at G1 place, substrate reception position, box body 81 that will be by box body travel mechanism 419 location with glass substrate 82 take at interval corresponding spacing towards upper and lower to (perpendicular to the direction of paper) lifting, so that the supply position consistency of the glass substrate 82 in the carrying path (not shown) of reception position of the glass substrate 82 in the box body 81 (a plurality of of taking in the place) and basal plate conveyer etc.

In addition, glass substrate mobile device 418 is at G1 place, substrate reception position, under the state of the supply position consistency of the glass substrate 82 in the carrying path (not shown) of reception position that makes the glass substrate 82 in the box body 81 by box body jacking gear 417 and basal plate conveyer etc., to move to box body 81 by the glass substrate 82 that the carrying path (not shown) of basal plate conveyer etc. is supplied with, and be accommodated in this box body 81.

In addition, constitute substrate by box body jacking gear 417 and glass substrate mobile device 418 and move into mechanism.

Then, by Figure 20, the action of the substrate storing apparatus 416 of formation like this is described.In addition, in Figure 20, the moving direction of arrow " → " expression box body, the direction of the supply of arrow "  " expression glass substrate.

As shown in figure 20, glass substrate 82 take in operation the time, during glass substrate 82 taken in, position the recovery of reclaiming the box body 81 of position H1 in box body in box body 81.

In addition,,, make the box body 81 that is positioned substrate reception position G1 move to empty box body and reclaim position H1 towards the taking in the finish time of the box body 81 at G1 place, substrate reception position at glass substrate 82 by box body travel mechanism 419.

In addition, the box body 81 that is positioned box body supply position F1 is moved to by so moving the G1 place, substrate reception position that becomes empty.

At this moment, move into the box body jacking gear 417 of mechanism and glass substrate mobile device 418 just in time is positioned substrate reception position G1 at the box body 81 that is positioned box body supply position F1 the moment, beginning glass substrate 82 taking in as substrate to box body 81.

Therebetween, Kong box body 81 is supplied with position F1 supply to becoming empty box body.

According to the 5th embodiment like this of the present invention, by box body travel mechanism 419, make box body 81 move to box body and supply with any one position among position F1, substrate reception position G1 and the box body recovery position H1, and at G1 place, substrate reception position, by box body jacking gear 417 and the glass substrate mobile device 418 of moving into mechanism as substrate, carry out glass substrate 82 taking in the box body 81 of locating by box body travel mechanism 419.For this reason, glass substrate 82 taking in only in the box body 81 stops during box body moves, and in the moment of taking in end of glass substrate 82 towards box body 81, since box body 81 from substrate reception position G1 when box body reclaims position H1 and moves, carry out box body 81 and supply with position F1 towards the moving of substrate reception position G1, can shorten the productive temp time in the operation of taking in of glass substrate 82 from box body.

The 6th embodiment

Below, with Figure 21 the 6th embodiment of the present invention is described.

The purpose of the 6th embodiment of the present invention is to have solved the problem same with the occasion of above-mentioned the 5th embodiment, be used to change the line production system 1 of above-mentioned the 1st to the 4th embodiment, 1 '; 1 " in the structure of substrate conveyer mechanism (particularly substrate is taken out of the 16a of mechanism), the substrate discharger 516 of a kind of discharge as the glass substrate of sheet-like material is provided.

As shown in Figure 21, the substrate discharger 516 of the present invention the 6th embodiment has box body travel mechanism 519, box body jacking gear 517 and glass substrate mobile device 518.

Wherein, box body travel mechanism 519 makes box body 81 move to box body and supplies with any one position among position F2, substrate drain position G2 and the box body recovery position H2.

In addition, box body is supplied with position F2 for supplying with the position of box body 81.For this reason, the box body of supplying with to this position 81 is generally the box body after the substrate reception of glass substrate 82 is taken in end.Substrate drain position G2 is the position that will discharge from the glass substrate 82 of box body 81.For this reason, be disposed at this locational box body 81 and be the box body in the discharge of discharging glass substrate 82.It is the position that the box body 81 of discharging glass substrate 82 back handovers can be reclaimed that box body reclaims position H2.For this reason, the box body 81 that reclaims from this position is generally the sylphon body of not taking in glass substrate 82.In addition, box body is supplied with position F2, substrate drain position G2 and box body recovery position H2 is arranged to row with the state that adjoins each other.

As shown in Figure 21, box body travel mechanism 519 will supply with position F2 from box body to the box body 81 after box body is supplied with the substrate reception of position F2 supply and move to substrate drain position G2.Thus, the box body 81 behind the substrate reception that substrate drain position G2 moves becomes the box body in the discharge of carrying out glass substrate 82 discharges.

Afterwards, in the time of will finishing from the discharge of the glass substrate 82 of box body 81, the box body 81 in the discharge becomes the sylphon body of not taking in glass substrate 82.At this moment, box body travel mechanism 519 moves from substrate drain position G2 this sylphon body 81 to box body recovery position H2.

Be positioned box body and reclaim the sylphon body 81 at H2 place, position from box body recovery position H2 recovery.

So box body travel mechanism 519 will be positioned box body and supply with box body 81 behind the substrate reception of position F2 and supply with position F2 from box body and move to substrate drain position G2, and the box body 81 that will be positioned in the discharge at substrate drain position G2 place moves to box body recovery position H2.

In addition, two kinds due to the above-mentioned box body travel mechanism 519 mobile can be used as independently to move and carries out respectively.But, much less be that position (substrate drain position G1 or box body reclaim position H1) the change sky with mobile destination is a precondition.

In addition, two kinds due to the above-mentioned box body travel mechanism 519 move can be interrelated movably interlock carry out.For example, 2 box bodys 81 are moved simultaneously, produce empty zone at substrate drain position G2 and will be positioned box body 81 that box body supplies with position F2 simultaneously and move in the mode in the zone of inserting this sky.But,, also be to reclaim position H2 with the box body of mobile destination to become sky be precondition even in this case.

In addition, box body jacking gear 517 is at substrate drain position G2 place, box body 81 that will be by box body travel mechanism 519 location with glass substrate 82 take at interval corresponding spacing towards upper and lower to (perpendicular to the direction of paper) lifting, so that the supply position consistency of the glass substrate 82 in the carrying path (not shown) of reception position of the glass substrate 82 in the box body 81 (a plurality of of taking in the place) and basal plate conveyer etc.

In addition, glass substrate mobile device 518 is at substrate drain position G2 place, under the consistent state of the drain position of the glass substrate 82 in the carrying path (not shown) of the reception position that makes the glass substrate 82 in the box body 81 by box body jacking gear 517 and basal plate conveyer etc., the glass substrate 82 that is accommodated in the box body 81 is moved from the carrying path (not shown) of box body 81 to basal plate conveyer etc., and from this box body 81, discharge.

In addition, constitute substrate by box body jacking gear 517 and glass substrate mobile device 518 and move into mechanism.

Then, by Figure 21, the action of the substrate discharger 516 of formation like this is described.In addition, in Figure 21, the moving direction of arrow " → " expression box body, the discharge direction of arrow "  " expression glass substrate.

As shown in figure 21, when the discharge operation of glass substrate 82, will from the glass substrate of box body 81 between 82 expulsive stages, position the recovery of reclaiming the box body 81 of position H2 in box body.

In addition, the discharge finish time from the glass substrate 82 of the box body 81 at substrate drain position G2 place,, make the box body 81 that is positioned substrate drain position G2 move to empty box body and reclaim position H2 by box body travel mechanism 519.

In addition, the box body 81 that is positioned box body supply position F2 is moved to by so moving the substrate drain position G2 place that becomes empty.

At this moment, move into the box body jacking gear 517 of mechanism and glass substrate mobile device 518 just in time is positioned substrate drain position G2 at the box body 81 that is positioned box body supply position F2 the moment as substrate, beginning is from the discharge of the glass substrate 82 of box body 81.

Therebetween, Kong box body 81 is supplied with position F2 supply to becoming empty box body.

According to the 6th embodiment like this of the present invention, by box body travel mechanism 519, make box body 81 move to box body and supply with any one position among position F2, substrate drain position G2 and the box body recovery position H2, and at substrate drain position G2 place, by the box body jacking gear 517 and the glass substrate mobile device 518 of taking out of mechanism as substrate, carry out the discharge of glass substrate 82 of the box body 81 of in the future free box body travel mechanism 519 location.For this reason, discharge from the glass substrate 82 of box body 81 only stops during box body 81 moves, and in moment that the discharge from the glass substrate 82 of box body 81 finishes, since box body 81 from substrate drain position G2 when box body reclaims position H2 and moves, carry out box body 81 and supply with position F2 towards the moving of substrate drain position G2, can shorten the productive temp time in the discharge operation of glass substrate 82 from box body.

In addition, in the 5th and the 6th above-mentioned embodiment, as the box body of disposing by substrate storing apparatus 416 and substrate discharger 516 81, can use except the rope formula box body that substrate is supported with being the level of state by being set up in a plurality of wire rope between the framework of left and right side, can use by from the left and right side framework to the outstanding a plurality of fulcrum posts of horizontal direction and with the pin formula box body of substrate layer horizontality supporting.

In addition, the substrate storing apparatus 416 of the 5th and the 6th above-mentioned embodiment and substrate discharger 516 are suitable among the 1st to the 4th above-mentioned embodiment employed, but be not limited to this, can be widely applicable for substrate storing apparatus that substrate is taken in towards box body and the substrate discharger that substrate is discharged from box body usually.

Moreover, 516 pairs of sheet-like materials that are accommodated in the box body 81 of the substrate storing apparatus 416 of the 5th and the 6th above-mentioned embodiment and substrate discharger use glass substrate to be illustrated as example, but be not limited to this, can use the sheet-like material arbitrarily that can be accommodated in the box body 81.

Claims (16)

1. the utilization box body of taking in many pieces of substrates is made the line production system of color filter sheet, it is characterized in that,

Have: as the core device that the box body behind a plurality of substrate receptions that will take in many pieces of substrates or empty box body are taken care of, this device has the material storing box of a plurality of box bodys of keeping and a plurality of stakcer cranes fetching and delivering position and arbitrarily between box body storage position carry of the box body in this material storing box in this material storing box certainly; With described core device described respectively fetch and deliver the position be connected, with respect to being accommodated in a plurality of processing lines that are used to make the various processing of color filter sheet by the substrate in the box body behind the substrate reception of described core device keeping; And with described core device described respectively fetch and deliver the corresponding setting in position, with the position is corresponding respectively handles one piece of one piece of discharge of line with respect to respectively fetching and delivering with this box body of substrate after being positioned this substrate reception of respectively fetching and delivering the position, perhaps will respectively handle the substrate conveyer mechanism that one piece of one piece of ground of substrate that processing that line carried out handling finishes is taken in the box body that is positioned this sky of respectively fetching and delivering the position at this;

Described a plurality of processing line includes a plurality of main plate-making lines that realization contains the treatment process of lithography process.

2. according to the described line production system of claim 1, it is characterized in that described a plurality of processing lines contain the plate-making line of the preparation that realizes the treatment process identical with described each main plate-making line.

3. according to claim 1 or 2 described line production systems, it is characterized in that, the common defect inspection machine that the common defective that takes place on the same position to a plurality of substrates of becoming process object is detected is housed at least one in the described a plurality of main plate-making lines that contain in described a plurality of processing lines.

4. according to the described line production system of claim 3, it is characterized in that described a plurality of processing lines include the substrate regeneration line that the substrate of measuring common defective by the described common defect inspection machine examination that contains in the described main plate-making line is regenerated.

5. according to the described line production system of claim 3, it is characterized in that, described a plurality of processing line includes and will respectively handle the inspecting substrate line that substrate that processing that line carried out handling finishes is checked by this, and this inspecting substrate line has indivedual defect inspection machines that indivedual defectives of taking place on the diverse location with a plurality of substrates are detected.

6. according to the described line production system of claim 5, it is characterized in that described inspecting substrate line also has the substrate correcting device that indivedual defectives of described each substrate that will be measured by described indivedual defect inspection machine examinations are revised.

7. according to claim 5 or 6 described line production systems, it is characterized in that described a plurality of processing lines include and will measure the substrate regeneration line that the substrate of common defective or indivedual defectives is regenerated by the described common defect inspection machine that contains in the described main plate-making line or by the described indivedual defect inspection machine examinations that contain in the described inspecting substrate line.

8. according to the described line production system of claim 1, it is characterized in that, described core device has a plurality of described material storing box and a plurality of described stakcer crane, at least dispose a stakcer crane in described each material storing box, described each material storing box interconnects via the connection device that carries out the box body handing-over between the stakcer crane in being disposed at this each material storing box.

9. according to the described line production system of claim 8, it is characterized in that described connection device is arranged at the stakcer crane of the replacement machine performance function of the stakcer crane on described each material storing box for conduct.

10. according to claim 8 or 9 described line production systems, it is characterized in that described a plurality of material storing box are arranged to the geese flying in a line-brothers shape.

11. the box body that many pieces of substrates are taken in a utilization is made the line production system of plate-shaped products, it is characterized in that,

Have: as the core device that the box body behind a plurality of substrate receptions that will take in many pieces of substrates or empty box body are taken care of, this device has the material storing box of a plurality of box bodys of keeping and a plurality of stakcer cranes fetching and delivering position and arbitrarily between box body storage position carry of the box body in this material storing box in this material storing box certainly; With described core device described respectively fetch and deliver the position be connected, with respect to being accommodated in a plurality of processing lines that carry out various processing by the substrate in the box body behind the substrate reception of described core device keeping; And with described core device described respectively fetch and deliver the corresponding setting in position, with the position is corresponding respectively handles one piece of one piece of discharge of line with respect to respectively fetching and delivering with this box body of substrate after being positioned this substrate reception of respectively fetching and delivering the position, perhaps will respectively handle the substrate conveyer mechanism that one piece of one piece of ground of substrate that processing that line carried out handling finishes is taken in the box body that is positioned this sky of respectively fetching and delivering the position at this;

Many wire rope that have the left and right side framework and be set up between these left and right side frameworks, extend along multistage surface level by keeping of described core device and the described box body carried with the differing heights of many pieces of substrates of horizontality supporting.

12., it is characterized in that described a plurality of processing lines are made the various processing of color filter sheet according to the described line production system of claim 11.

13. the automated warehouse that the box body of taking in many pieces of substrates is disposed is characterized in that,

Have: the material storing box of many pieces of box bodys of keeping, with box body the stakcer crane fetching and delivering position and arbitrarily between box body storage position carry this material storing box in of keeping in material storing box, with described material storing box described fetch and deliver the corresponding setting in position, substrate carrying mechanism is located the box body detent mechanism of this box body to carry out discharging from the substrate of this box body or substrate being taken in towards box body between described substrate carrying mechanism relatively, and between described material storing box and described box body detent mechanism the box body conveying mechanism of conveying box body;

Described material storing box described fetch and deliver the position have from material storing box take out of the outbound position of box body and box body is moved into to material storing box, independently put the position in storage with described outbound position;

Described box body detent mechanism move to the corresponding box body in the described outbound position of described material storing box supply with the position and with the corresponding box body drain position in described warehouse-in position in arbitrary position, supply with the position at described box body, draw in box body from described box body conveying mechanism, at described box body drain position, box body is sent to described box body conveying mechanism.

14. according to the described automated warehouse of claim 13, it is characterized in that, the mechanism of described box body for will described many pieces of substrates being the level of state and taking in, described box body detent mechanism for with the box body jacking gear of taking in the described box body of the corresponding spacing lifting in interval of substrate.

15. one kind with the substrate storing apparatus of substrate reception in box body, it is characterized in that having:

With the box body that box body moves to the supply of carrying out box body supply with the position, the box body that carries out substrate reception position that substrate takes in and the recovery of carrying out box body in box body reclaims the arbitrary locational box body travel mechanism in the position;

In described substrate reception position, carry out the substrate that substrate is taken in the box body by described box body travel mechanism location is moved into mechanism.

16. the substrate discharger that substrate is discharged from box body is characterized in that having:

With the box body that box body moves to the supply of carrying out box body supply with the position, the box body that carries out substrate drain position that substrate discharges and the recovery of carrying out box body from box body reclaims the arbitrary locational box body travel mechanism in the position;

At described substrate drain position, carry out the substrate that substrate is discharged from the box body by described box body travel mechanism location is taken out of mechanism.

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