WO2004010171A1

WO2004010171A1 - Production line system and automated warehouse used in the system

Info

Publication number: WO2004010171A1
Application number: PCT/JP2003/009279
Authority: WO
Inventors: Takehiko Ichise; Kensaku Suzuki; Takashi Yoshimura; Nobunari Nadamoto; Minoru Nakanishi; Satoshi Shimizu
Original assignee: Dai Nippon Printing Co., Ltd.
Priority date: 2002-07-22
Filing date: 2003-07-22
Publication date: 2004-01-29
Also published as: KR100711317B1; TW200415096A; TWI272229B; CN100365443C; CN1672068A; KR20050027988A

Abstract

A production line system comprises a core apparatus (10) of a stacker crane form in which system a glass substrate-receiving cassette is stored and transported, and comprises various processing lines for producing color filters, including main screen-making lines (20-70) that execute processing steps including a photolithography process which lines are connected, at plural loading/unloading positions (C1, C2) of the core apparatus, through a substrate loading/unloading mechanism for loading/unloading a glass substrate to and from a cassette on one-by-one basis. At the end of each of the processing steps, defect inspection machines (39-77) can be assembled in it. Lines such as a line (100) for inspecting a processed substrate, a line (110) for regenerating a substrate in which a defect was detected, and a reserve screen-making line (90) can be installed.

Description

Description Manufacturing line system and automatic warehouse technology used in the system

The present invention relates to a production line system for producing plate products such as color filters, and more particularly to a production line for producing plate products using a cassette for accommodating a plurality of substrates (plate materials). System related to various logistics devices used in the system (automatic warehouses with stacker cranes, substrate storage devices, substrate unloading devices). Background technology

The color filter manufacturing process includes (1) chromium film formation, (2) formation of a black matrix, (3) formation of a colored layer of each color (red, green and blue) having a predetermined pattern, (4) A number of processing steps are included, such as formation of a protective layer, (5) formation of pillars, and ( ⁶ ) formation of an ITO layer.

Here, as a manufacturing line system for realizing such a manufacturing process, an in-line type manufacturing line system in which a plurality of processing lines for realizing each of the above-described processing steps are connected in series in a single-stroke pattern has been generally used. It is used regularly. In addition, there are various methods for manufacturing a color filter, and the most common manufacturing method uses a photolithography method. In this case, the method described in (2) to (5) above is used. The processing step is realized as a processing step (plate making step) including a photolithography process. In the plate making process, complex processes such as application of photoresist (colored photosensitive material), drying, pre-beta, exposure, development, rinsing, drying and post baking are required.

By the way, the manufacturing process of a color filter using a photolithography method includes a plurality of plate making processes, which are processing steps including a photolithography process, and depending on the type of a product manufactured as a color filter, In many cases, it is necessary to change the arrangement and the like of a plurality of plate making lines that realize these multiple plate making processes. In other words, recent color filters have different specifications (products) for each product. The presence of a rack matrix, the type of black matrix (chromium or resin), the presence of a protective layer, the presence of pillars, the presence of an ITO layer, etc. exist. In the case of manufacturing by using, it is necessary to change the order of a plurality of plate making processes included in the manufacturing process or to delete a specific plate making process. In recent color filters, there are products with complicated shapes, such as pillars standing on the barrier of MVA, and such products are manufactured on the same production line as ordinary products. When manufacturing with a system, it is necessary to add a new plate making process during the manufacturing process.

However, in the conventional in-line type manufacturing line system described above, since a plurality of processing lines for realizing each processing step are connected in series, it is easy to arrange a plurality of plate making lines for realizing the plate making process. There is a problem that cannot be changed. In this case, it is possible to cope with this problem by arranging an appropriate bypass path between the plate making lines.However, in this case, an extra installation area is required for the bypass path, and the production line There is a problem that the occupied area of the entire system becomes excessive.

In addition, in the process of manufacturing a color filter using a photolithography method, a processing step including a photolithography process (a plate making step) generally involves the generation of defects (common defects, etc.) of a product due to the attachment of foreign matter to a photomask. In many cases, it is necessary to temporarily stop the plate making line that realizes the plate making process due to equipment trouble. In addition, the plate making process requires the process conditions to be determined in advance when manufacturing products with different specifications (sensitized material used ゃ line width, film thickness, etc.). Therefore, it is necessary to check the process conditions on that day every day.) In the plate making line that realizes the plate making process, it is necessary to determine the process conditions for the next product after the production of the previous product has been completed. Processing must be performed separately. In addition, the plate making process usually takes a lot of processing time, and tends to be the rate-determining stage for the entire production line system.

However, in the above-described in-line type production line system, since a plurality of processing lines for realizing each processing step are connected in series, the plate making line for implementing a specific plate making step may be stopped, To determine process conditions on the plate making line When the processing is performed or when the plate making line reaches the rate-determining stage, all the processing lines are affected, and the operation rate of the entire production line system is reduced.

Further, as described above, the manufacturing process of a color filter using a photolithography method is composed of a number of complicated processes, and any one of the processes (particularly, each process during the plate making process) has a defect in a product. There is a problem that it is easy to occur. In particular, the size of a color filter in recent years has become extremely large, and there is a problem that the non-defective product rate is likely to decrease.

Conventionally, in such a color filter manufacturing process, as a method for improving the non-defective product ratio, a process improvement method for improving a use condition of an apparatus used in each process is generally used. However, there is a certain limit to the degree of improvement, and there is a problem in the production of large-sized color filters that the yield of non-defective products cannot be sufficiently improved. For this reason, in the past, for example, there has been proposed a method of improving a product non-defective rate by incorporating an inspection machine into a production line system and removing defective products whose defects have been detected by the inspection machine ( Japanese Patent Laid-Open No. 7-2811171).

However, although the method described in Japanese Patent Application Laid-Open No. Hei 7-2811171 can improve the non-defective product ratio to some extent, the inspection content is mainly based on individual defects. However, there is a problem that the degree of improvement is limited. In addition, since the manufacturing line system incorporating the inspection machine has a configuration in which a plurality of processing steps are connected in series, if a defect is detected by the inspection machine, the cause of the defect is investigated and eliminated. In many cases, the entire production line system must be temporarily stopped for such reasons as the above, and there is a problem that it is difficult to maintain a high line operation rate. '' Disclosure of the invention

The present invention has been made in view of such a point, and the arrangement and the like of a plurality of plate making lines for realizing a processing step (plate making step) including a photolithographic process can be flexibly changed. To provide a production line system with uptime Aim.

Another object of the present invention is to provide a production line system capable of significantly improving the non-defective product rate while maintaining a high line operation rate.

A further object of the present invention is to provide a manufacturing line system that can effectively prevent breakage of a substrate in a manufacturing process and can flexibly respond to a change in the size of a substrate.

Furthermore, the present invention is an automatic warehouse that can be used in a production line system, and can reduce the tact time in the loading / unloading operation of cassettes, and has a simple configuration and restrictions on equipment layout. The aim is to provide a small automated warehouse.

Furthermore, the present invention relates to a substrate storage device and a substrate discharge device that can be used in a production line system, and a substrate storage device and a substrate that can shorten a tact time in a substrate storage or discharge operation. It is intended to provide a discharge device.

The present invention provides, as a first solution, a manufacturing line system for manufacturing a color filter using a cassette containing a plurality of substrates, wherein a cassette containing a plurality of substrates and containing a plurality of substrates is stored. A core device for storing empty cassettes, a stocker for storing a plurality of cassettes, and a plurality of cassettes stored in the stocker for a plurality of loading / unloading positions in the stocker and an arbitrary cassette storage position. A core device having a stacker crane for transporting between the core device and a substrate stored in a force set that is connected to each of the loading / unloading positions of the core device and stored in the core device. A plurality of processing lines for performing various processes for manufacturing a color filter, and A single substrate is ejected from the cassette containing the substrates located at the respective loading / unloading positions to the respective processing lines corresponding to the respective loading / unloading positions, or the processing is performed at the respective processing lines. And a substrate loading / unloading mechanism for storing the processed substrates one by one in an empty cassette positioned at each of the loading / unloading positions, wherein the plurality of processing lines implement a processing step including a photolithography process. Characterized by including a main plate making line Offer.

In the above-described first solution, the plurality of processing lines preferably include a spare plate making line that realizes a processing step similar to each of the main plate making lines. Further, in the first solving means described above, at least one of the plurality of main plate making lines included in the plurality of processing lines includes a common line generated at the same position on the plurality of substrates to be processed. It is preferable to incorporate a common defect inspection machine for detecting defects.

Further, in the first solving means, the plurality of processing lines include a substrate reproduction line for reproducing a substrate in which a common defect is detected by the common defect inspection device included in the main plate making line. Is preferred.

Further, in the first solution described above, the plurality of processing lines include a substrate inspection line for inspecting a processed substrate processed by each of the processing lines, and the substrate inspection line is It is preferable to have an individual defect inspection machine for detecting individual defects occurring at different positions on a plurality of substrates. Here, it is preferable that the substrate inspection line further includes a substrate repair device for repairing an individual defect of each of the substrates detected by the individual defect inspection machine.

Further, in the above-described first solution, the plurality of processing lines may be a common defect or an individual defect by the common defect inspection device included in the main plate making line or the individual defect inspection device included in the substrate inspection line. It is preferable to include a substrate regeneration line for regenerating a substrate on which a defect has been detected.

Further, in the above-described first solution, the core device includes a plurality of the stockers and the stacker cranes, and at least one stacker crane is disposed in each of the stockers; It is preferable that they are connected to each other via a transfer device that transfers cassettes between the stacker cranes arranged in the car. Here, it is preferable that the transfer device is a stacker crane that functions as a substitute for the stacker crane arranged in each of the stockers. Further, it is preferable that the plurality of tockers are arranged in a shape of a goose.

This endeavor is a second solution to accommodate multiple substrates. A core device for storing a plurality of substrate-stored cassettes or empty cassettes storing a plurality of substrates, and a stocker for storing a plurality of cassettes. A core device having a stacker crane for transporting cassettes stored in the stocker between a plurality of loading / unloading positions in the stocker and an arbitrary cassette storage position; and a core device at each of the loading / unloading positions of the core device. A plurality of processing lines connected to perform various kinds of processing on substrates stored in a cassette stored in the core device and stored in the core device, and provided in correspondence with the respective loading / unloading positions of the core device. And the processing lines corresponding to the respective loading / unloading positions from the cassettes in which the substrates are stored at the respective loading / unloading positions. A substrate loading / unloading mechanism that discharges substrates one by one, or stores processed substrates processed in each processing line one by one in empty cassettes positioned at the respective loading / unloading positions. The cassette stored and transported by the core device includes left and right side frames, and a plurality of stages having different heights for supporting a plurality of substrates in a horizontal state, being stretched between the left and right side frames. A plurality of wires extending along a horizontal plane of the manufacturing line system.

In the second solution, it is preferable that the plurality of processing lines perform various processes for manufacturing a color filter.

The present invention provides, as a third solution, a stocker for storing a plurality of cassettes, and a cassette stored in the stocker in an automatic warehouse that handles cassettes for storing a plurality of substrates. A stacker crane for transporting between the loading / unloading position in the stocker and an arbitrary cassette storage position, and discharging or cassette of the substrate from the cassette between the stocker and the substrate transporting mechanism, which is provided corresponding to the loading / unloading position of the stocker. A cassette positioning mechanism that positions the cassette with respect to the substrate transport mechanism so that the substrate is stored in the cassette; and a cassette transport mechanism that transports the cassette between the stocker and the cassette positioning mechanism. The loading / unloading position is a loading position for unloading the cassette from the stocker and To scan Tokka for carrying the cassette, and a goods receipt position and independent from said unloading position, the cassette positioning mechanism, said stocker The cassette is moved so as to take any one of a cassette supply position corresponding to the unloading position and a cassette discharge position corresponding to the storage position, and draws a cassette from the cassette transport mechanism at the cassette supply position. An automatic warehouse is provided, wherein a cassette is sent out to the cassette transport mechanism at the cassette discharge position.

In the above-described third solution, the cassette stores the plurality of substrates in a horizontal state, and the cassette positioning mechanism moves the cassette up and down at a pitch corresponding to a storage interval of the substrates. Preferably, it is a lifting device. '

This effort includes, as a fourth solution, a substrate supply position where a cassette is supplied, a substrate storage position where a substrate is stored in a cassette, and a substrate storage position where a substrate is stored in a cassette. A cassette moving mechanism for moving the cassette so as to take any of the cassette collecting positions for collecting the cassette; and a cassette moving mechanism for moving the cassette to the cassette positioned by the cassette moving mechanism in the substrate storing position. A substrate storage device comprising: a substrate loading mechanism for storing a substrate.

According to a fifth aspect of the present invention, as a fifth aspect of the present invention, there is provided a substrate discharging apparatus for discharging a substrate from a cassette, comprising: a cassette supply position where a cassette is supplied; a substrate discharging position where a substrate is discharged from the cassette; and a collection of the cassette. A cassette moving mechanism for moving the cassette so as to take any of the cassette recovery positions to be performed; and a substrate for discharging a substrate from the cassette positioned by the cassette moving mechanism at the substrate discharging position. A substrate discharging device provided with a carry-out mechanism.

According to the first solution of the present invention, a stacker crane type core device for storing a plurality of cassettes accommodating a plurality of glass substrates is provided with a substrate removing mechanism for manufacturing a color filter. Since multiple processing lines for performing various types of processing are connected, a processing step (plate making step) including a photolithography process for forming black matrices and forming a colored layer for each color is realized. It is possible to easily change the arrangement of multiple plate making lines, etc. Depending on the type of product that is manufactured as a filter, the order of these multiple plate-making steps can be changed, or specific plate-making steps can be added or deleted. Further, according to the first solution of the present invention, since a spare plate making line for realizing the same processing steps as each main plate making line is connected to the core device of the stacker crane type, the photolithography process is performed. Even if a defect (common defect, etc.) occurs in the product during the process (including the plate making process), and the plate making line that realizes the plate making process needs to be temporarily stopped, the plate making process is continued in the spare plate making line. It is possible to prevent the operation rate of the entire production line system from decreasing. In addition, by determining the process conditions required for the plate making process using a spare plate making line, the process conditions for the next product are determined in parallel with the production of the previous product, and The production of the next product can be continued on the plate making line, and it is possible to prevent a reduction in the operation rate of the entire production line system. Furthermore, by realizing the plate-making process realized by the plate-making line, which is the rate-determining stage, on the spare plate-making line together with the plate-making line, it is possible to eliminate the rate-determining stage and reduce the operation rate of the entire production line system. Can be prevented.

Further, according to the first solution of the present invention, a plurality of glass substrates to be processed are placed on a processing line (plate making line) for realizing a processing step including a photolithography process among processing lines as a manufacturing line. By incorporating a common defect inspection machine to detect common defects that occur at the same position, common defects that cause the generation of a large number of defective products can be detected as early as possible, and the percentage of non-defective products Can be improved. In this case, according to the first solution of the present invention, the processing as a production line is performed via a substrate loading / unloading mechanism via a stacker crane type core device for storing a plurality of cassettes accommodating a plurality of glass substrates. Since the lines are connected, a photomask is used in any of the processing steps (plate making steps) that include a photolithography process for forming black matrices and forming colored layers for each color. Even if a common defect occurs due to the attachment of foreign matter to the surface, only the processing step in which the common defect occurred is immediately stopped to resolve the problem, and the other processing steps are stored in the stocker of the core unit. Process immediately before Production can be continued using the glass substrate that has been processed in step _c. Therefore, the non-defective product rate can be improved while maintaining a high line operation rate. .

Further, according to the first solution of the present invention, a processing line (substrate inspection line) for inspecting a processed glass substrate processed by a processing line as a manufacturing line is connected to the core device. By detecting individual defects that occur at different positions on multiple glass substrates using an individual defect inspection machine, it is possible to appropriately eliminate the causes of individual defects that differ from common defects, and The rate can be further improved. In addition, in the processing line (substrate inspection line), the individual defect of each glass substrate detected by the individual defect inspection device is corrected by the substrate correction device, so that the actual yield of the product can be improved.

Further, according to the first solution of the present invention, a processing line (substrate regeneration line) for regenerating a glass substrate in which a common defect or an individual defect is detected by a common defect inspection device or an individual defect inspection device is provided in a core device. ), Even if an individual defect that cannot be corrected by the substrate repair device is detected by the individual defect inspection machine, the glass substrate can be recycled by the substrate recycling device on the processing line (substrate regeneration line). Thus, the actual yield of products can be improved. Further, even when a common defect is detected by the common defect inspection machine, the glass substrate is reclaimed by a substrate reclaiming apparatus on a processing line (substrate reclaim line), whereby a substantial yield of products can be improved. At this time, since the glass substrate that eventually becomes defective is not sent to the subsequent process, unnecessary load is prevented from being applied to the subsequent process, and the actual operation rate of the entire production line system is improved. be able to.

Further, according to the first solution of the present invention, the stacker crane type core device is constituted by a plurality of stockers connected to each other via a transfer device for transferring cassettes, so that the installation area is different. The processing line can be flexibly installed with the minimum necessary equipment and any arrangement. At this time, by using a stacker crane that functions as a substitute for the stacker crane placed in each stocker as a transfer device, even if the stacker crane fails, the stacker crane as the substitute machine can be used. Each stocker using Processing can be continued, and the stability of the entire production line system can be improved.

According to the second solution of the present invention, as a cassette stored and transported by a core device of a production line system, a wire for horizontally supporting a substrate by a plurality of wires stretched between left and right side frames. Since a cassette of the type is used, the vibration when the cassette is transported by a core machine, such as a stucker crane, can be effectively absorbed by the wire, and a large-sized substrate is used to manufacture a color filter etc. Even in such a case, it is possible to prevent the substrate stored in the cassette from being damaged or damaged. In addition, substrates of any size up to the maximum size that can be stored in a cassette can be stored, and even if multiple types of color filters are manufactured using the same manufacturing line system, the size of the substrates can be reduced. There is no need to change cassettes at the same time, and it is possible to effectively cope with the production of small quantities and many types. Furthermore, it can store a larger amount of substrates compared to a pin-type cassette, etc., and further improves the ability to respond to a temporary stop of the processing process, which is an advantage of a production line system equipped with a core device. be able to.

According to the third solution of the present invention, in an automatic warehouse that can be used in a production line system, a substrate is discharged from a cassette or stored in a cassette with a substrate transport mechanism. The cassette positioning mechanism that positions the cassette relative to the substrate transport mechanism is moved between the cassette supply position corresponding to the unloading position of the stocker and the cassette discharge position corresponding to the loading position, and the cassette transport mechanism is moved at the cassette supply position. The cassette is pulled out of the cassette and the cassette is sent out to the cassette transport mechanism at the cassette discharge position, so the next cassette stands by while discharging or storing substrates in the cassette. Can reduce the tact time in cassette loading and unloading operations. Shortening can be achieved. In addition, since the cassette is transferred by moving the cassette positioning mechanism between the cassette supply position corresponding to the stocking position of the stocker and the cassette discharge position corresponding to the storage position, the moving direction of the cassette is changed. No special re-orientation mechanism is required, and the footprint is also in the cassette supply position and force set discharge position. Since only the positions corresponding to the two positions are required, the configuration is simple and the restrictions on the device layout are small. Further, since a cassette positioning mechanism that moves between a force cecit supply position for transferring a cassette and a cassette discharge position is configured to relatively move on the same frame as the substrate transfer conveyor, the cassette transfer mechanism is provided. The structure is simpler than in the case where the substrate and the substrate transport conveyor are directly connected to avoid interference between them, and the maintainability is also improved. According to a fourth solution of the present invention, in a substrate storage device that can be used in a production line system, a cassette moving mechanism is used to control any one of a cassette supply position, a substrate storage position, and a cassette collection position. Then, the cassette is moved so as to take up the substrate, and at the substrate storing position, the substrate loading mechanism stores the substrate in the cassette positioned by the cassette moving mechanism. For this reason, the storage of the substrates in the cassette is stopped only while the cassette is moving, and when the storage of the substrates in the cassette is completed, the cassette is moved from the substrate storage position to the cassette collection position. Since the cassette is moved from the cassette supply position to the substrate storage position at the same time as the movement of the substrate, the tact time in the substrate storage operation can be shortened.

According to a fifth aspect of the present invention, in a substrate discharging apparatus usable in a production line system, the cassette moving mechanism is configured to control any one of a cassette supply position, a substrate discharging position, and a cassette collecting position. Then, the cassette is moved so that the substrate is discharged, and at the substrate discharge position, the substrate is unloaded from the cassette positioned by the cassette moving mechanism by the substrate unloading mechanism. For this reason, the ejection of the substrate from the cassette stops only while the cassette is moving, and when the ejection of the substrate from the cassette is completed, the cassette is moved from the substrate ejection position to the force set collection position. At the same time, the cassette is moved from the cassette supply position to the substrate discharge position, so that the tact time in the substrate discharge operation can be shortened. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 shows an overall configuration of a manufacturing line system according to a first embodiment of the present invention. T JP2003 / 009279

FIG.

FIG. 2 is a schematic plan view showing a configuration of a main part of the production line system shown in FIG. FIG. 3 is a schematic cross-sectional view of the production line system shown in FIG. 2 along the line III-III.

FIG. 4 is a schematic sectional view of the production line system shown in FIG. 2 taken along the line IV-IV. FIG. 5 is a diagram for explaining the operation of the board transfer conveyor in the production line system shown in FIG.

FIG. 6 is a schematic diagram showing an entire configuration of a manufacturing line system according to the second embodiment of the present invention.

FIG. 7 is a diagram showing an example of a layout design of the manufacturing line system shown in FIGS. 1 and 6.

FIG. 8 is a diagram showing another example of the layout design of the manufacturing line system shown in FIGS.

FIGS. 9 and 10 are diagrams showing another example of the connection mode between the stockers in the core device (the core device having a plurality of stockers) as shown in FIG.

FIG. 11 is a schematic plan view showing a configuration of a main part of a production line system according to the third embodiment of the present invention.

FIG. 12 is a side view showing details of a stacker crane of the production line system shown in FIG. 11 together with a cassette containing glass substrates.

FIG. 13 is a front cross-sectional view of the stacker crane shown in FIG.

FIG. 14 is a perspective view showing an example of the substrate loading / unloading mechanism of the production line system shown in FIG.

FIG. 15 is a perspective view showing another example of the substrate loading / unloading mechanism of the production line system shown in FIG.

FIG. 16 is a schematic plan view showing an automatic warehouse according to the fourth embodiment of the present invention, together with a state in which a glass substrate is carried out.

FIG. 17 is a schematic side view of the automatic warehouse shown in FIG.

FIG. 18 is a schematic plan view showing an automatic warehouse according to the fourth embodiment of the present invention, together with a state in which a glass substrate is carried in. FIG. 19 is a schematic side view of the automatic warehouse shown in FIG.

FIG. 20 is a schematic plan view showing a substrate storage device according to a fifth embodiment of the present invention together with a state in which a glass substrate is loaded.

FIG. 21 is a schematic plan view showing a substrate discharge device according to a sixth embodiment of the present invention together with a state in which a glass substrate is carried out. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

First embodiment

As shown in FIG. 1, a production line system 1 according to a first embodiment of the present invention includes a plurality of substrate-stored cassettes storing a plurality of glass substrates or a stacker for storing empty cassettes. The crane-type core device 10 is connected to each of a plurality of loading / unloading positions (loading position C 1 and loading position C 2) of the core device 10, and the substrate stored in the core device 10 is already stored. A plurality of processing lines 20, 30,..., 70, 90 for performing various kinds of processing for manufacturing a color filter on the glass substrate housed in the cassette are provided. The core device 10 is installed so as to extend linearly on a horizontal installation surface, and each processing line 20, 30,..., 70, 90 is mounted on the installation surface. It is installed so that it protrudes laterally in an inverted U shape from the side.

First, the configuration of the processing lines 20, 30, ..., 70, 90 will be described with reference to FIG. As shown in FIG. 1, each processing line 20, 30,..., 70, 90 has a transport path 15 composed of a conveyor for transporting glass substrates in a horizontal state, 5 and various processing devices 21, 31,..., 96 arranged above.

Among them, the processing line 20 is a processing line for forming a chromium film on a glass substrate, and a processing device (a chromium film forming device 21) is provided on the transfer path 15. The processing line 30 is a processing line for patterning chromium formed on a glass substrate to form a black matrix, and a processing device (photoresist coating device 31, Pre-beta unit 32, Exposure unit 33, Developing unit 34, Cleaning unit 35, Etching unit 36, Stripping unit 37, and Bost baking unit 38) is provided. When the plaque matrix is made of a resin, processing is performed by a photoresist coating device 31, a pre-beta device 32, an exposure device 33, a developing device 34, a cleaning device 35, and a post-beta device 38. The processing line 30, together with the processing lines 4OR, 40G, 40B, 50, and 60 described later, constitutes a main plate making line for realizing the processing steps including photolithography. Each of the processing lines 40R, 40G, and 40B is a processing line for forming a colored layer of each color (red, green, or blue) having a predetermined pattern on a glass substrate. (Photoresist (coloring material) coating device 41, pre-baking device 42, exposure device 43, developing device 44, cleaning device 45, and post-baking device 46) are provided.

The processing line 50 is a processing line for forming a protective layer on a glass substrate. Like the processing lines 4OR, 4OG and .4OG, a processing device (photoresist coating device 5 1, Pre-bake unit 5, Exposure unit 53, Developing unit 54, Cleaning unit 55 and Post beta unit 56) are provided.

The processing line 60 is a processing line for forming a columnar body on a glass substrate. Like the processing lines 4 OR, 4 OG, and 4 OB, a processing device (photoresist coating device 61, A pre-bake device 62, an exposure device 63, a developing device 64, a cleaning device 65, and a Boss beta device 66) are provided.

The processing line 70 is a processing line for forming an ITO layer on a glass substrate, and a processing apparatus (ITO film forming apparatus 71) is provided on the transport path 15. In the case of manufacturing an STN type color filter, it is necessary to pattern the ITO layer. In this case, the processing line 70 is provided with the same processing equipment as the processing line 30 (coating equipment, pre-beta equipment, An exposure device, a developing device, a cleaning device, an etching device, a peeling device, and a bost baking device) may be provided.

The processing line 90 is a spare plate making line that realizes the same processing steps as the processing lines 40R, 40G, 40B, 50, and 60. The processing line 40R, 40G, 40B, The same processing equipment as 50 and 60 (coating equipment 91, prebake equipment 92, exposure equipment 93, developing equipment 94, cleaning equipment 95, and post-beta equipment 96) is provided. The processing line 90 is a processing line 40R, 40G, It can be used as an alternative line for 40B, 50, 60, or as an additional line required when manufacturing products with pillars on MVA barriers. In the latter case, the processing is performed by the processing lines 50, 60, 90.

In addition to the processing lines 20, 30,..., 70, 90 described above, the processing line connected to the core device: L 0 may be used to cut a glass substrate or perform various inspections. And other processing lines can be installed to recycle glass substrates.

Next, the configurations of the core device 10 and the substrate loading / unloading mechanism (the substrate unloading mechanism 16a and the substrate loading mechanism 16b) in the production line system 1 shown in FIG. 1 will be described with reference to FIGS.

As shown in FIG. 2, the core device 10 includes a stocker 11 for storing a plurality of cassettes 81 and a cassette 81 stored in the stocker 11. And a stacker crane 12 to be transported inside.

Here, as shown in FIGS. 3 and 4, the stocker 11 has a structure in which a plurality of racks 11a on which the cassettes 81 are placed are arranged in upper and lower tiers. The stacker crane 12 travels left and right on a rail 13 extending along the stocker 11 and moves a lifting frame (not shown) up and down to move each of the stockers 11 內. The cassette 81 is transported between the loading / unloading position (unloading position C1 and loading position C2>) and any of the two upper and lower racks 11a (any cassette storage position). Here, one stocker 11 is installed on one side of the rail 13, but the present invention is not limited to this, and two stockers may be installed on both sides of the rail 13. In addition, the racks 11a of the stocker 11 are arranged in two upper and lower tiers, but this is not a limitation, and the racks 11a of the stocker 11 may be arranged in three or more upper and lower tiers. 1 Stacker crane on 3 1 Although only 2 travels, the present invention is not limited to this, and two or more stacker cranes may travel on the rail 13.

Here, each of the loading / unloading positions (unloading position C1 and loading position C2) in the stocker 11 is provided with a substrate loading / unloading mechanism (a substrate loading mechanism 16a and a substrate loading mechanism 16). b) is provided, and as shown in FIGS. 2 and 3, each board unloading mechanism 16a moves each unloading position from the cassette 81 that has been stored at the unloading position C1 and has stored the substrate. The glass substrates 82 are discharged one by one to each processing line (transfer path 15) corresponding to the device C 1, and as shown in FIG. 2 and FIG. The processed glass substrates 82 processed on the processing line (transport path 15) are stored one by one in the empty cassettes 81 positioned at the loading positions C 2.

Each substrate unloading mechanism 16a is composed of a cassette elevating device 17a for elevating and lowering the cassette 81, and a glass substrate from the cassette 81 with the substrates stored therein, which is raised and lowered by the cassette elevating device 17a, to the transfer path 15 And a substrate transfer conveyor 18a for unloading the substrates 82 one by one. Further, each substrate unloading mechanism 16a is provided with a cassette transport device (shown in the figure) for transferring a cassette 81 between the unloading position A1 or the unloading position B1 at the unloading position C1 and the cassette lifting device 17a. Zu). '

In addition, each substrate loading mechanism 16 b includes a cassette elevating device 17 b for elevating and lowering the cassette 81, and a glass substrate 82 from the transport path 15 to the cassette 81 which is moved up and down by the cassette elevating device 17 b. And a substrate transport conveyer 18b for carrying in one by one. Further, each substrate loading mechanism 16b is provided with a cassette transport device (shown in the drawing) for transferring cassettes 81 between the loading position A2 or the loading position B2 at the loading position C2 and the cassette lifting device 17b. Zu).

As shown in FIG. 5, the substrate transport conveyors 18a and 18b have a support frame 87 and a roller 88 provided on the support frame 87. On the other hand, the cassette 81 includes an upper plate 83, a lower plate 84, a plurality of struts 85 connected to connect the upper plate 83 and the lower plate 84, and a plurality of struts 8. As shown in Fig. 5, there are a plurality of wires 86 that are stretched left and right (in a direction perpendicular to the paper of Fig. 5) between the five wires, and a plurality of wires 86 arranged at the same height. In such a state, a plurality of glass substrates 82 are stored. The cassette 81 is moved up and down by a cassette elevating device (see FIG. 2), and the substrate transport conveyer 18 a entered through an opening 84 a formed in the lower plate 84. The glass substrate 82 comes into contact with the lower surface of the glass substrate 82 stored in the cassette 81, The cartridge 81 is carried out to the transport path 15, or is carried in from the transport path 15 to the cassette 81.

Next, the operation of the manufacturing line system 1 having such a configuration will be described with reference to FIGS. A control device (not shown) is connected to the core device 10 and each of the processing lines 20, 30,..., 70, 90, and the following operations are automatically performed. .

First, as an initial state, in the stocker 11 of the core device 10, a plurality of substrate-containing cassettes 81 storing a plurality of unprocessed glass substrates 82 and a plurality of empty cassettes 81 are stored. It shall be kept.

In this state, each of the processing lines 20, 30,..., 70, 90 is processed by the stacker crane 12 of the core unit 10 out of the cassettes 81 in which the substrates are stored in the stocker 11 Take out a specific cassette 81 (a cassette containing glass substrates that have been processed up to the desired processing step) and position it at the unloading position C1. , 70, and 90, the empty cassette 81 stored in the stocking force 11 is positioned at the loading position C2 by the stacker crane 12 of the core device 10. '

At this time, the production of the color filter is realized by sequentially processing the glass substrate 62 in a predetermined order using the processing lines 20, 30,..., 70, 90. At the unloading position C 1 of the lines 20, 30,…, 70, 90, the glass substrate that has been processed up to the immediately preceding processing step in the cassette 81 in which the substrate is stored in the stocker 11 is stored. The stored cassette 81 is selectively positioned. The production of color filters by processing lines 20, 30,..., 70, 90 includes, for example, (1) chromium film formation (processing line 20), (2) formation of black matrix (processing line 30), ( 3) formation of red coloring layer (processing line 40R), (4) formation of green coloring layer (processing line 40G), (5) formation of blue coloring layer (processing line 40B), ( ⁶ ) The protective layer is formed (processing line 50), (7) the pillars are formed (processing line 60), and ( ⁸ ) the ITO layer is formed (processing line 70). Lines 20, 30,..., 70, 90 are located at unloading position C 1 among cassettes 8 1 containing substrate stored in stocker 1 1 In view of the above-described order of (1) to (8), the cassette 81 containing the glass substrate on which the processing up to the immediately preceding processing step has been performed is selectively positioned.

Here, in each of the processing lines 20, 30,..., 70, 90, the substrate unloading mechanism 16 a provided at the unloading position C 1 collects the substrate stored at the unloading position C 1. The glass substrates 82 are discharged one by one from the loaded cassette 81 to the processing line (transport path 15), and the glass substrate is processed in each of the processing lines 20, 30,. A predetermined process is performed on the plate 82.

Specifically, as shown in FIG. 2, first, the cassette 81 with the substrate stored therein taken out from the specific rack 11 a of the stocker 11 by the stacker crane 12 of the core device 10 is moved to the unloading position C. It is conveyed to 1 outgoing position A1. Here, the cassette 81 with the substrates stored at the unloading position A1 is stored in the cassette transport device.

(Not shown) and is conveyed to the cassette elevating device 17a. Then, the cassette elevating device 17a lowers the rollers 81 of the substrate transport conveyor 18a in the state shown in FIG. The glass substrates 82 are unloaded one by one from the cassette 81 to the transport path 15 by making contact with the lower surface of the glass substrate 82 located at. At this time, while the glass substrate 82 is being unloaded from the cassette 81, another cassette 81 in which another glass substrate 82 from which the glass substrate 82 is to be discharged is transported to the unloading position A1. Keep waiting.

The empty cassette 81 from which all the glass substrates 82 have been carried out moves to the front of the storage position B1 while being raised by the cassette elevating device 17a, and is moved by the cassette carrying device (not shown). It is transported from the cassette elevating device 17a to the receiving position B1. Then, the empty cassette 81 sent to the storage position B1 is stored as a storage cassette in the empty rack 11a in the stocker 11 by the stacker crane 12.

On the other hand, in each processing line 20, 30,..., 70, 90, the processing is performed on the processing line (transport path 15) by the substrate loading mechanism 16 b provided at the loading position C 2. The processed glass substrates 82 are stored one by one in the empty force set 81 positioned at the loading position C2. '

Specifically, as shown in Fig. 2, first, the stacker crane 1 of the core device 10 The empty cassette 81 taken out from the specific rack 11a of the stocker 11 by 2 is transferred to the unloading position A2 at the loading position C2. Here, the empty cassette 81 arriving at the unloading position A2 is conveyed to the cassette elevating device 17b by a cassette conveying device (not shown). Then, the cassette elevating device 17b receives the glass substrate 82 loaded from the transport path 15 while raising the cassette 81 step by step in the state shown in FIG. By contacting the roller 88 of 8a with the lower surface of the glass substrate 82, the glass substrates 82 are loaded one by one from the transport path 15 into the cassette 81. While the glass substrate 82 is being stored in the cassette 81, another empty cassette 81 in which the glass substrate 82 is to be stored is transported to the unloading position A2, where the cassette 81 stands by. deep.

The cassette 81 with all the glass substrates 82 stored therein is moved to the front of the storage position B2 by the force set elevating device 17b, and is moved by the cassette transport device (not shown). It is transported from the cassette lifting device 17b to the storage position B2. Then, the cassette 81 having stored the substrates transported to the storage position B2 is stored in the empty rack 11a in the stocker 11 by the stacker crane 12.

As described above, according to the first embodiment of the present invention, the substrate loading / unloading mechanism (the core loading / unloading mechanism (10) is provided in the core device 10 of the stucker crane type that stores the plurality of cassettes 81 that store the plurality of glass substrates 82. Through the substrate unloading mechanism 16a and the substrate unloading mechanism 16b), a plurality of processing lines 20 0, 30,. Since 0 is connected, processing lines 40 R, 40 G, and 40 G, which realize a processing step (plate making step) including a photolithography process for forming a black matrix, forming a colored layer of each color, and the like. It is possible to easily change the arrangement and configuration of 40B, 50, 60, etc., depending on the type of product manufactured as a color filter, changing the order of the multiple plate making processes, Add or remove specific platemaking steps Can be

Further, according to the first embodiment of the present invention, a processing line (main plate making line) 40 R, 40 G, 40 B, 50, 60 is provided in the core device 10 of the stacker crane system. Connects a processing line (spare plate making line) 90 that realizes the same processing steps as Therefore, even if a defect (common defect, etc.) occurs in the product in the processing process (plate making process) including the photolithography process, it is necessary to temporarily stop the plate making line to realize the plate making process. Can be continued in the processing line 90, and it is possible to prevent the operation rate of the entire manufacturing line system from being lowered. In addition, by determining the process conditions required for the plate making process using the processing line 90, the process conditions for the next product are determined in parallel with the manufacture of the previous product in time. The production of the next product can be continued on the line 90, and the operation rate of the entire production line system can be prevented from being reduced. Furthermore, by realizing the plate-making process realized by the plate-making line, which is the rate-limiting step, on the processing line 90 together with the plate-making line, the rate-limiting step can be eliminated, and the operating rate of the entire production line system decreases. Can be prevented.

In the first embodiment described above, only one processing line (preliminary plate making line) 90 is connected to the core device 10, and each of the plate making lines 4 is connected by the processing line 90 as necessary. OR, 4 OG, 40 B, 50, 60 The same processing steps as those described above are realized, but not limited to this, and an arbitrary number of spare plate-making lines are provided. A spare plate making line is connected for each of the lines 40 R, 40 G, 40 B, 50, 60, and each plate making line 4 OR, 40 G, 4 OB, 50 , 6◦ may be realized. Further, in the above-described first embodiment, the core device 10 is constituted by one stocker 111, but is not limited to this. The core device 1◦ may be constituted by a plurality of stockers. It may be.

Furthermore, in the first embodiment described above, the glass substrates 82 are carried out one by one from the cassette 81 in which the substrates are stored to the transport path 15, or the glass substrates 8 are transported to the cassette 81 from the transport path 15. As shown in Fig. 5, a substrate transport mechanism that transports the substrates 2 one by one uses the substrate transport conveyors 18a and 18b. The force is not limited to this. 2 is placed on the arm and inserted from the front of the cassette 8 1, and the glass substrate 8 2 is transferred from the arm to the wire 86 to store the glass substrates 8 2 one by one, while the front of the cassette 8 1 Arm from The glass substrate 82 may be discharged from the wire 86 by transferring the glass substrate 82 from the wire 86 to the arm.

Second embodiment

Next, a second embodiment of the present invention will be described with reference to FIG. In the second embodiment of the present invention, (1) a common defect that occurs at the same position on a plurality of glass substrates to be processed is provided on a plate making line that realizes a processing step including a photolithography process. Incorporating a common defect inspection machine for detection; (2) Providing a substrate inspection line for inspecting (correcting as necessary) processed substrates that have been processed by each processing line; (3) Except for the provision of a substrate regeneration line for regenerating a substrate on which a common defect or individual defect is detected by a common defect inspection machine included in the plate making line or an individual defect inspection machine included in the substrate inspection line. The other components are substantially the same as those of the first embodiment. In the second embodiment of the present invention, the same portions as those in the above-described first embodiment are denoted by the same reference numerals, and detailed description is omitted.

As shown in FIG. 6, the production line system according to the second embodiment of the present invention is a staggered crane that stores a plurality of cassettes containing a plurality of glass substrates and a plurality of cassettes containing a plurality of substrates or empty force sets. The core device 10 is connected to each of the multiple loading / unloading positions (loading position C 1 and loading position C 2) of the core device 10, and is stored in the cassette containing the substrates stored in the core device 10. , 70, 90, 100, and 110 for performing various types of processing on the glass substrate stored in the glass substrate. Processing lines 20, 30,..., 70, 90 are manufacturing lines for performing various types of processing for manufacturing a color filter, and processing line 100 is a processing line 20, 30,. , 70, 90 is a substrate inspection line for inspecting the processed glass substrate. The processing line 110 is used to inspect various types of defects (common defects occurring at the same position on the glass substrate, This is a substrate regeneration line for regenerating a glass substrate in which an individual defect occurring at a different position on the substrate has been detected. The core device 10 is installed so as to extend linearly on a horizontal installation surface, and each of the processing lines 20, 30, '..., 70, 90, 100, 110 is installed on the installation surface. It is installed so that it protrudes laterally in the shape of an inverted U from the side of 10. First, according to Fig. 6, processing lines 20, 30, ..., 70, 90, 100, 110 Will be described. As shown in FIG. 6, each of the processing lines 20, 30,..., 70, 90, 100, and 110 has a transport path 15 composed of a conveyor or the like that transports the glass substrates in a horizontal state, and ., 101, 102, and 111, which are disposed on the reference numeral 15.

Here, the basic configuration of the processing lines 20, 30,..., 70, 90 is the same as in the first embodiment described above, but the processing lines 30, 40R, 40G, 40B, 50, Common defect inspection machines 39, 47, 57, 67 and 77 for detecting common defects occurring at the same position on multiple glass substrates to be processed are installed on the transfer paths 15 of 60 and 70. Have been.

Of these, the common defect inspection machine 39 incorporated in the processing line 30 for forming black matrices performs a 100% inspection of predetermined inspection items (edge dimensions, transmittance, appearance inspection, etc.). The appearance inspection is performed by comparing the difference between adjacent pixel images by an image processing device or the like.

In addition, the common defect inspection machine 47 incorporated in the processing lines 40R, 40G, and 40B for forming a colored layer of each color (red, blue, or green) performs sampling inspection on predetermined inspection items (appearance inspection, etc.). (For example, 1 out of 10). The appearance inspection is performed by using an image processing device or the like to compare differences between images corresponding to adjacent matrix portions.

In addition, the common defect inspection machine 57 incorporated in the processing line 50 for forming the protective layer performs 100% inspection or sampling inspection on predetermined inspection items (such as unevenness inspection and common defect inspection). The unevenness inspection is performed by AD-converting the reflected light and the transmitted light using an image processing device or the like, and comparing the differences between adjacent images in a large area (long period). In addition, the common defect inspection is performed by AD-converting the reflected light and transmitted light using an image processing device or the like, and comparing the difference between adjacent images in a small area (short-term cycle) of about one pixel.

In addition, the common defect inspection machine 67 incorporated in the processing line 60 for forming the columnar body performs a 100% inspection or a sampling inspection on predetermined inspection items (dimension inspection, inspection for dropping the columnar body, etc.). The dropout inspection of the pillars is performed by comparing the difference between the images of the adjacent pillars using an image processing device or the like. 03009279

23 In addition, the common defect inspection machine 77 incorporated in the processing line 70 for forming the ITO layer performs predetermined inspection items (pinhole formation state, deviation from a predetermined position, spectral characteristics, sheet resistance and film thickness). Etc.) for 100% inspection or sampling inspection.

The inspection results obtained by the common defect inspection equipment 39, 47, 57, 67, 77 are managed in a control device (not shown) in a form corresponding to each glass substrate. Subsequent processing of each glass substrate (continuation of processing, regeneration of glass substrate, etc.) is determined based on the above. Here, depending on the inspection result, the processing line where the common defect is generated is stopped, and the cause of the common defect is investigated or eliminated. Specifically, for example, taking the processing line 70 for forming an ITO layer as an example, when forming a pattern for manufacturing an STN type color filter, the photomask is cleaned. Or exchange. In addition, when performing pattern formation for manufacturing a TFT type color filter (pattern formation such that the display portion is an entire surface film and no ITO is formed on the outer peripheral portion excluding the electrode lead-out portion), the I T

洗浄 Clean and replace the carrier used for film formation.

On the other hand, the processing line 100 is a substrate inspection line for inspecting the processed glass substrates that have been processed by the processing lines 20, 30,..., 70, 90. Processing equipment (Individual defect inspection machine 101 for detecting individual defects occurring at different positions on a plurality of glass substrates, and for correcting individual defects on each glass substrate detected by individual defect inspection machine 101) A board repairing device 1022) is installed and the board is repaired.

Here, the individual defect inspection machine 101 of the processing line 101 performs an individual inspection on predetermined inspection items (mura inspection, appearance inspection, defect height measurement, coordinate review). Details of each inspection item are as follows.

(1) Unevenness inspection: A monochrome (same color) image is taken out by an image processing device or the like, and a dark / dark defect that cannot be detected by a common defect detection for one pixel is detected. By changing the inspection method and the area and direction (vertical and horizontal) of the comparison area, small defects to uneven defects can be detected.

(2) Visual inspection: The transmitted light image is taken out by the image processing device, and the difference between adjacent pixel images of the same color is compared. P Akira 00 279

24 Detects back glass flaws, back glass stains, etc. Also, the reflected light image is extracted by an image processing device or the like, and the difference between adjacent pixel images of the same color is compared to detect protrusions, film peeling, and the like.

(3) Defect height measurement: The height of the protrusion detected in the appearance inspection in (2) above (the protrusion is observed as black due to diffuse reflection in the reflected light image) is measured by a stylus-type measuring device.

-(4) Coordinate review: Based on the results detected in the visual inspection described in (2) above, the coordinates of the defect and the site that are determined to need to be measured are inspected using a microscope. As a result, the subsequent processing (correction unnecessary, correction required, and correction impossible) is determined. The processing line 110 is a substrate regeneration line for regenerating a glass substrate on which a common defect or an individual defect has been detected by the common defect inspection device 39, 47, 57, 67, 77 or the individual defect inspection device 101. A processing apparatus (a substrate reproducing apparatus 1 1 1 for reproducing a glass substrate in which a common defect or an individual defect is detected) is provided on the transport path 15. The processing lines connected to the core device 10 include, besides the processing lines 20, 30,..., 70, 90, 100, and 11 ◦ described above, for cutting glass substrates. Processing line can be installed.

Here, the operation of the manufacturing line system 1 'having such a configuration is the same as that of the first embodiment described above, and the core device 10 and the processing lines 20, 30, 70, 90, 100, 110 Under the control of a control device (not shown) connected to the printer, various processes relating to the manufacture, inspection, and reproduction of the color filters are automatically performed.

Specifically, the production of the color filter is realized by sequentially processing the glass substrate 82 in a predetermined order using the processing lines 20, 30,... At the unloading position C1 of lines 20, 30,…, 70, the glass substrate that has been processed up to the processing process immediately before the substrate storage cassette 81 stored in the stocker 11 is stored. Cassette 81 is selectively positioned. The production of color filters by the processing lines 20, 30, '··, 70 includes, for example, (1) chromium film formation (processing line 20), (2) formation of black matrix (processing line 30), and (3) red color. Of colored layer (processing line 4 OR), (4) formation of green colored layer (processing line 40G), (5) formation of blue colored layer (processing line 40B), ( ⁶ ) formation of protective layer (processing line 50), columnar shape The formation of the body (processing line 60) and the formation of (8) 1 TO layer (processing line 70) are performed in this order. -Of the processing lines 20, 30,..., 70 as production lines, the processing lines (plate making lines) 40R, 40G, 40B, 50, and 60 that realize the processing steps including the photolithography process Are common defect inspection machines 39, 47, 57, and 57 for detecting common defects occurring at the same position on a plurality of glass substrates 82 to be processed.

67 is built in and performs inspection according to the above-mentioned predetermined inspection items. Then, based on the inspection result, the processing line where the common defect is generated is stopped, and the cause of the occurrence of the common defect is investigated or eliminated. At this time, for the processing lines other than the stopped processing line, the processed glass substrate 82 that has been processed up to the immediately preceding processing step stored in the stocker 11 of the core device 10 is used. Production will continue. ·

Also, after all the processing by the processing lines 20, 30,…, 70 as the production line is completed, or during the processing, the processed lines processed by the processing lines 20, 30,. The glass substrate 82 is sent to a processing line (substrate inspection line) 100. Then, the individual defect inspection device 101 detects individual defects occurring at different positions of the plurality of glass substrates 82 in accordance with the above-described predetermined inspection items. If necessary, the individual defect inspection device 101 The individual defect of each glass substrate 82 detected by 101 is corrected. .

Further, after or after all the processing by the processing lines 20, 30,..., 70 as the manufacturing line is completed, the common defect inspection machines 39, 47, 57, 67,

The glass substrate 82 on which the common defect or the individual defect has been detected by 77 or the individual defect inspection machine 101 is sent to a substrate recycling line (processing line 110). Then, the glass substrate 82 is regenerated by removing various layers formed on the glass substrate 82 by immersing the layers in an acid or alkali solution or the like by the substrate regenerating device 111.

As described above, according to the second embodiment of the present invention, the processing steps including the photolithography process among the processing lines 20, 30,... Realized processing line (plate making line) Common for detecting common defects occurring at the same position on multiple glass substrates 82 to be processed at 30, 40 R, 40 G, 40 B, 50, 60, and 70 Defect inspection machines · 39, 47, 57, 67, 77 are incorporated, so common defects that cause the generation of a large number of defective products can be detected as early as possible, improving the yield of non-defective products. Can be done. In this case, according to the second embodiment of the present invention, a substrate loading / unloading mechanism (a substrate unloading mechanism 16) is provided in a stacker crane type core device 10 for storing a plurality of cassettes 81 for accommodating a plurality of glass substrates 82. a, and the substrate loading mechanism 16 b), the processing lines 20, 30,..., 70 as the manufacturing line are connected, so that the black matrix and the colored layers of each color are formed. If a common defect occurs due to the attachment of foreign matter to a photomask in any of the processing steps (plate making process) that include the photolithography process for performing the process, only the processing step in which the common defect has occurred The process is stopped immediately to solve the problem, and the other processing steps are processed glass that has been processed up to the immediately preceding processing step stored in the stocker 11 of the core device 10. It is possible to continue the production using a plate 82. As a result, the non-defective product rate can be improved while maintaining a high line operation rate.

Further, according to the second embodiment of the present invention, the core device 10 is provided with the processed glass substrate 82 that has been processed by the processing lines 20, 30,..., 70 as manufacturing lines. A processing line (substrate inspection line) 100 for inspection is connected, and individual defect inspection machines 101 detect individual defects that occur at different positions on a plurality of glass substrates 82. Can appropriately eliminate the causes of different individual defects, and can further improve the non-defective product rate. Further, in the processing line (substrate inspection line) 100, the individual defect of each glass substrate 82 detected by the individual defect inspection device 101 is corrected by the substrate repair device 102, so that the actual product Yield can be improved.

Furthermore, according to the second embodiment of the present invention, a common defect or an individual defect is detected in the core device 10 by the common defect inspection device 39, 47, 57, 67, 77 or the defect inspection device 101 according to the present invention. The processing line (substrate regeneration line) 1 10 for regenerating the glass substrate 82 is connected. Even when an individual defect that cannot be corrected is detected by the individual defect inspection device 101, the glass substrate 82 is reproduced by the substrate reproduction device 111 of the processing line (substrate reproduction line) 110. However, the actual yield of products can be improved. Further, even when a common defect is detected by the common defect inspection equipment 39, 47, 57, 67, 77, the glass substrate 82 is processed on the processing line (substrate regeneration line) 110. Reproduction by the device 111 can improve the substantial yield of the product. At this time, since the glass substrate 82 that eventually becomes defective is not sent to the post-process, unnecessary load is prevented from being applied to the post-process, and the actual operation rate of the entire manufacturing line system is reduced. Can be improved.

In the first and second embodiments described above, the production line system 1 shown in FIGS. 1 and 6 can be introduced in an actual factory under the following layout design. Hereinafter, the case of the production line system 1 ′ shown in FIG. 6 will be described as an example.

7 and 8 are diagrams showing an example of a layout design when the manufacturing line system 1 'shown in FIG. 6 is introduced into an actual factory. 7 and 8, in the processing lines 20, 30,..., 70, 90, 100, 110 shown in FIG. 3 0, colored layer forming line 4 OR, 4 OG, 40 B, protective layer forming line 50, columnar body forming line 60, substrate inspection line 100, and substrate recycling line 110 only factory floor 15 It shows the case where it is installed on 0.

As shown in Fig. 7, when designing the layout of the production line system 1 ', the size of the stocker 11 of the core unit 10 is determined based on the required stock capacity and the like, and then the floor 15 The layout configuration of the processing lines 20, 30, ..., 60, 100, 110 is determined in consideration of the area and shape of 0.

At this time, the processing lines 20, 30,..., 60, 100, and 110 have different installation areas according to their types, and the processing lines 30,. However, for example, the black matrix forming line 30 requires a larger installation area than the colored layer forming lines 40R, 40G, and 40B. In addition to the processing lines ²⁰ , 30,…, 60, which are production lines for producing color filters, Other processing lines, such as a substrate inspection line 100 for performing inspection and correction processing, and a substrate reproduction line 110 for recycling glass substrates, are connected.

Therefore, if it is attempted to connect all the processing lines 20, 30,..., 60, 100, and 1 10 having different installation areas to the core device 10 composed of one stocker 11, FIG. As shown in the layout design shown in Fig. 7, a substrate loading / unloading mechanism (substrate unloading mechanism) as shown in Fig. 2 is provided between some processing lines (black matrix forming line 30 and substrate recycling line 110) and core device 10. Direct connection is not possible only by 16a and substrate loading mechanism 16b), and a wasteful route (see 121, 122) is required to transport the glass substrate by a transport cart such as AGV, RGV, CV, etc. .

On the other hand, if the core device 10 is composed of a plurality of stockers, the processing lines 20, 30, ·····, 60, 100, 110 with different installation areas can be installed with the minimum necessary equipment and optional. With this arrangement, it is possible to flexibly install the apparatus. More specifically, as shown in FIG. 8, by arranging a plurality of stockers 11 and 11 in a goose row (stepped shape), all processes including the black matrix forming line 30 and the reproduction line 110 can be performed. Lines 20, 30,-·, 60, 100, 1 10 and the core device 10 can be directly connected only by the board loading / unloading mechanism (board unloading mechanism 16a and board loading mechanism 16b) as shown in Fig. 2. It becomes possible.

Here, in the core device 10 shown in FIG. 8, one stacker crane 12, 12 'is arranged on each stocker 11', 11 '. Further, a stat force crane (transfer device) 19 for transferring a cassette between the stacker cranes 12 and 12 'is arranged at a connection portion of the stockers 11 and 11'. Although any transfer device can be used, any stacker crane 19 can be used as a substitute for the stacker cranes 12 and 12 '. Even when the 12, 12 'breaks down, it becomes possible to continue the processing in each stocker 11, 11' using the stacker crane 19 as an alternative machine.

In the core device 10 shown in Fig. 8, a plurality of stockers 11 1 and 11 'are arranged in a goose (stepped shape), but depending on the shape of the floor and the number of processing lines, etc. For example, as shown in FIG. 9 and FIG. 10, a plurality of stockers 11 1, 11 ′, and 11 ″ can be formed in a T-shape or the like via a transfer device 130. It may be arranged.

Third Embodiment ''

Next, a third embodiment of the present invention will be described with reference to FIGS. The third embodiment of the present invention is substantially the same as the above-described first and second embodiments except that the configuration of the core device is different. In the third embodiment of the present invention, the same portions as those in the above-described first and second embodiments are denoted by the same reference numerals, and detailed description is omitted.

In the production line systems 1 and 1 ′ according to the first and second embodiments described above, the cassette 81 stored and transported by the core device 10 protrudes horizontally from the left and right side frames. It is also possible to use a so-called pin type cassette which supports the substrate in a horizontal state with a plurality of support pins. The pin-type cassette has multiple rows of support pins protruding inward at the same height from the left and right side frames at the same height. : A plurality of glass substrates are accommodated by supporting one glass substrate in a horizontal state by a plurality of support pins in the same stage.

However, in the case of a pin type cassette, large vibrations are applied to the cassette when a force set is conveyed by a stacker crane or the like of a core device. is there. In particular, in recent years, color filters and the like manufactured as products have become extremely large, and the above-mentioned problems have become more prominent as their weight has increased.

In the case of a pin-type cassette, the size of the board that can be stored is determined by the length of the support pins, etc., so if the board size exceeds that range, replace the cassette according to the size of the board. There is a problem that needs to be done. In particular, in recent years, the types of color filters and the like manufactured as products have become very large, and the above-mentioned problems have become more apparent.

The third embodiment of the present invention is mainly intended to solve such a problem, and as in the first and second embodiments described above, a core device is provided. As the cassette 81 stored and transported by the device 10, a wire-type cassette that supports a substrate in a horizontal state by a plurality of wires stretched between left and right side frames is used.

Hereinafter, FIGS. 11 to 15 show that the core device 10 and the substrate loading / unloading mechanism (the substrate unloading mechanism 2 16a and the substrate loading mechanism 2) in the manufacturing line system 1 according to the third embodiment of the present invention. The configuration of 16b) will be described.

As shown in FIG. 11, the core device 10 includes a stocker 2 1 1 for storing a plurality of cassettes 8 1, and a cassette 8 1 stored in the stocker 2 1 1 in the stocker 2 1 1. And a stacker crane 2 1 2 to be carried by the

Here, the stockers 2 1 1 extend in two rows on both sides of the traveling path of the stacker crane 2 1 2, and each row of the stockers 2 1 1 has a plurality of racks 2 on which the cassettes 8 1 are placed. It has a structure in which 11a are arranged in two stages above and below (see Fig. 13).

Further, as shown in FIGS. 12 and 13, the stacker crane 2 1 2 travels along the stocker 2 1 1 with the cassette 8 1 placed thereon. By moving 3 vertically, each rack (unloading position C1 and loading position C2) in the stocker 211 and any of the two upper and lower racks 211a (optional) The cassette 81 is transported to and from the cassette storage position.

Here, as shown in FIGS. 12 and 13, the cassette 81 stored and transported by the core device 10 is composed of an upper plate 18 3 and left and right side surfaces erected on the upper plate 18 3. It has frames 184 and 185 and a plurality of wires 186 stretched between these left and right side frames 184 and 185. Here, the plurality of wires 186 extend along a plurality of horizontal planes having different heights, and the plurality of wires 186 at the same level support the glass substrate 82 in a horizontal state. Has become. As shown better in FIGS. 14 and 15, the left and right side frames 18 4 and 18 5 each have eight columns 1 attached to the upper plate 18 3 by screws or the like. 184a, 185a, and of these columns 184a, 185a, the columns facing each other are connected to each other via a plurality of stays 187. Note that the wire 1886 is made of synthetic resin as long as it has sufficient tension to support the glass substrate 82 in a horizontal state. Any material such as a product made of a fat or a metal can be used. The number of wires 186 in the horizontal plane can be any number as long as glass substrate 82 can be sufficiently supported in the horizontal plane. Further, the number of wires 186 in the vertical direction can be any number as long as a desired glass substrate 82 can be accommodated without the glass substrates 82 interfering with each other.

At each loading / unloading position (loading position C1 and loading position C2) in the stocker 211, a substrate loading / unloading mechanism (board loading mechanism 216a and substrate loading mechanism 2'16b) is provided. As shown in Fig. 11, each substrate unloading mechanism 2 16a causes each substrate unloading position C1 from the substrate stored cassette 81 positioned at each unloading position C1 to correspond to each unloading position C1. The glass substrates 82 are discharged one by one to the processing line (transport path 15), and the processing performed on each processing line (transport path 15) by each substrate loading mechanism 2 16 b. The used glass substrates 82 are stored one by one in an empty cassette 81 positioned at each loading position C2.

Here, each substrate unloading mechanism 2 16a and each substrate unloading mechanism 2 16b have basically the same configuration, and as shown in FIG. 14, the glass substrate housed in the cassette 81 Elevator 8 moves up and down so as to change the relative positional relationship between cassette 8 and substrate conveyor 2 and cassette 8 and substrate conveyor 2 and 8, which have a plurality of rollers 19 that come into contact with the lower surface of 8 2. Cassette elevating device 2 17 (the drive mechanism is not shown). As shown in FIG. 11, at the unloading position C1, the cassette 81 is transported from the unloading position A1 to each substrate unloading mechanism 216a by a cassette transport device (not shown). Then, each of the substrate unloading mechanisms 2 16 a is transported to the storage position B 1. At the loading position C2, the cassette 81 is transported from the unloading position A2 to each of the substrate loading mechanisms 2 16b by a cassette transport device (not shown), and the respective substrate loading mechanisms 2 16 It is transported from b to the receiving position B2.

As shown in Fig. 14, the board transfer conveyors 2 18 of each board unloading mechanism 2 16 a and each board loading mechanism 2 16 b are provided at the upper ends of the columns 19 1 erected on the installation surface. And the left and right support frames 1888, 188, which are fixed so as to sandwich the cassette 81 from both sides, and are rotatable to these left and right support frames 1888, 188. And a plurality of shafts 18 9 attached thereto. Rollers 190 are arranged on each shaft 189 at regular intervals of 6 mm. A drive mechanism (not shown) is attached to these shafts 189 so that each shaft 189 can be rotated in a desired direction.

In such a substrate unloading mechanism 2 I 6 a and a substrate loading mechanism 2 16 b, the cassette 81 is lifted and lowered by the cassette lifting device 2 17, and the cassette lifting device 2 17 By lowering the cassette 81 one step at a time, the rollers 190 of the substrate transport conveyor 218 are brought into contact with the lower surface of the lowermost glass substrate 82 stored in the cassette 81, thereby making the cassette The glass substrate 82 stored in each stage in the tray 81 can be discharged to the transport path 15 (see the solid arrow in FIG. 14). In addition, while raising the cassette 81 one step by one step by the cassette elevating device 2 17, the rollers 190 of the substrate transfer conveyor 218 are brought into contact with the lower surface of the glass substrate 82, which is carried in from the transfer path 15. By making contact, the glass substrate 82 can be stored in each stage of the cassette 81 (see the dotted arrow in FIG. 14).

In each board unloading mechanism 2 16a and each board loading mechanism 2 16b shown in Fig. 14, the board transfer conveyor 2 18 is fixed and the force is set by the cassette lifting device 2 17 8 1 is moved up and down, but the cassette 8 1 and the board transfer conveyor 2

If it is possible to change the relative positional relationship with the cassette 8, not only the configuration in which the cassette 81 is moved up and down, but also the configuration in which the board transport conveyor 2 18 is raised and lowered, and the board transport conveyor 2 It is also possible to adopt a configuration in which both the cassette 18 and the cassette 81 are raised and lowered.

Further, each of the substrate unloading mechanisms 2 16 a and each of the substrate unloading mechanisms 2 16 b may have a configuration as shown in FIG. 15 in addition to the configuration as shown in FIG. It is possible to adopt a configuration in which the substrate transfer conveyor 2 18 ^/ is entered from below the device 2 17 ′ (the drive mechanism is not shown). The substrate transport conveyor 2 18 ′ shown in FIG. 15 was fixed to the support frame 19 2 provided on the installation surface and the support frame 19 2 via a horizontal plate 19 3. A plurality of U-shaped frames 1994, and a plurality of chassis rotatably mounted on a pair of end portions 1994a, 1994b of the frame 1994. It has a foot 189. In addition, six rollers 190 are arranged at equal intervals in each shaft 189. A motor 195, a transmission shaft 196a, 196b, a gear 197, etc. are attached to these shafts 189 as drive mechanisms. It can be rotated in a desired direction.

Here, the operation of the manufacturing line system 1 having such a configuration is the same as that of the above-described first and second embodiments, and the core device 10 and each processing line 20, 30,. ································································ カラーカラーカラーカラーカラーカラーカラーカラーカラー. As described above, according to the third embodiment of the present invention, the cassette 81 stored and transported by the core device 10 of the manufacturing line system 1 is stretched between the left and right side frames 18 4 and 18 5. Since a wire-type cassette that supports the glass substrate 82 in a horizontal state by a plurality of bridged wires 1886 is used, when the cassette 81 is transported by the stacker crane 2 1 2 of the core device 10. The vibration can be effectively absorbed by the wires 186, and even when a color filter or the like is manufactured using a large glass substrate (for example, a glass substrate of a meter size (about 0.7 mm thick)). The glass substrate 82 stored in the cassette 81 can be prevented from being damaged or damaged.

According to the third embodiment of the present invention, the above-described wire-type cassette is used as the cassette 81 stored and transported by the core device 10 of the production line system 1. Therefore, glass substrates of any size up to the maximum size that can be stored in the cassette 81 can be stored, and even if multiple types of color filters etc. are manufactured using the same manufacturing line system, There is no need to change cassettes according to the size, and it is possible to effectively cope with the production of many kinds of small quantities.

Furthermore, according to the third embodiment of the present invention, since the above-described wire-type cassette is used as the cassette 81 stored and transported by the core device 10 of the production line system 1 ", It can store a larger amount of glass substrates than pin-type cassettes, which is an advantage of a production line system equipped with a core device. Therefore, the ability to respond to a temporary stop of the processing step can be further improved. Fourth embodiment

Next, a fourth embodiment of the present invention will be described with reference to FIGS. In the production line systems 1, 1, 1 "according to the above-described first to third embodiments, the core device 10 includes a plurality of loading / unloading positions (the unloading positions C1 and C1) in the stockers 11 and 211. A substrate loading / unloading mechanism (a substrate unloading mechanism 16a and a substrate loading mechanism 16b) is provided for the cassette 81 having the loading position C2) and being positioned at the unloading position C1 or the loading position C2. The glass substrates 82 are stored one by one into the cassette 81, and the glass substrates 82 are discharged one by one from the cassette 81. The stockers 1 1, 2 1 1 of the core device 10 The unloading position C1 or the unloading position C2 has the unloading positions A1 and A2 and the unloading positions B1 and B2, respectively, arranged independently of each other.

Here, in the core device 10 in the manufacturing line systems 1, 1 ', 1 "according to the above-described first to third embodiments, the stocking positions A1, A2 and the storage positions B1 and B2 are different from each other, and the glass substrate 82 is stored in the cassette 81 by the substrate loading / unloading mechanism (substrate unloading mechanism 16a and substrate loading mechanism 16b). And the work of discharging the glass substrate 82 to the cassette 81 can be performed independently, so that the tact time required for replacing the cassette 81 can be reduced, and the glass substrate 82 can be removed. , 70, 90, 100, 110 can be prevented from staying on the transport path 15 of each processing line 20, 30,...

However, in the core device 10 having such a configuration, in the substrate unloading mechanism 16a, the unloading position A1 or the unloading position B1 of the unloading position C1 and the cassette elevating device 17a are connected. It is necessary to provide a cassette transfer device (not shown) provided with a direction change mechanism and the like in order to transfer the cassette 81 between them. Similarly, in the substrate loading mechanism 16b, the direction is changed to transfer the cassette 81 between the loading position A2 at the loading position C2 or the loading position B2 and the cassette lifting device 17b. Cassette transfer device with mechanism, etc. (not shown) Force S must be provided. For this reason, the mechanical mechanism of the cassette transfer device becomes complicated, and There is a problem that the constraints of the game are large. ■

The fourth embodiment of the present invention aims to solve such a problem, and the production line systems 1, 1 ^/ , 1 "according to the first to third embodiments described above. Is a modification of the configuration of the core device 10 in FIG.

As shown in FIGS. 16 to 19, the core device 10 is an automatic warehouse that handles a cassette 81 that stores a plurality of glass substrates 82, and is a stocker for storing a plurality of cassettes 81. 1 and a stacker crane 12 for transporting the cassette 81 stored in the stocker 11 in the stocker 11.

Here, the stocker 11 has a structure in which a plurality of racks 11a on which the cassettes 81 are placed are arranged in upper and lower two stages. In addition, the stacker crane 12 travels left and right on a rail 13 extending along the stocker 11 and moves a lifting frame (not shown) up and down to move the stocker crane 1 up and down. The cassette 81 should be transported between each loading / unloading position (unloading position C1 and loading position C2) in 1 and any rack (any cassette storage position) among the two upper and lower racks 11a. It has become. Note that, here, one stocker 11 is installed on one side of the rail 13, but the present invention is not limited to this, and two stockers may be installed on both sides of the rail 13. Further, although the racks 11a having the stocking force 11 are arranged in two upper and lower tiers, the present invention is not limited to this, and the racks 11a of the stockers 11 may be arranged in three or more tiers. Furthermore, although only one stacker crane 12 runs on the rail 13, the invention is not limited to this, and two or more stat cranes run on the rail 13. Is also good.

In such a core device 10, outside of the unloading position C 1 of the stocker 11, as shown in FIGS. 16 and 17, a transfer path 15 such as a substrate transfer conveyor (substrate transfer mechanism) is provided. A cassette elevating device (cassette positioning mechanism) 317 that moves the cassette 81 up and down (in a direction perpendicular to the paper) at a pitch corresponding to the storage interval of the glass substrates 82 is disposed adjacent to the cassette elevating device. The glass substrate 82 can be discharged from the force set 81 with respect to the transport path 15 arranged in the vertical direction. Further, between the stocker 11 and the cassette elevating / lowering device 3 17, there are provided cassette transport conveyers (cassette transport mechanism) 3 18 and 3 19 for transporting cassettes between them. I have.

Here, the unloading position C1 in the stocker 1.1 is the unloading position A1 for unloading the cassette 81 from the stocker 111, and the unloading position A for unloading the cassette 81 from the stocker 111. 1 and has a receiving position B 1 that is independent. The cassette elevating device 3 17 is located in the cassette traverse section 3 16 and has a cassette supply position D 1 corresponding to the unloading position A 1 of the stocker 11 and a cassette discharging position corresponding to the loading position B 1. Move to take any position of E1, draw cassette 8 from cassette transport conveyor 3 1 8 at cassette supply position D 1, and transport cassette 3 1 8 at cassette discharge position E 1. The cassette 81 is sent out.

On the other hand, in the core device 10, outside the loading position C 2 of the stocker 11, as shown in FIGS. 18 and 19, a transfer path 15 such as a substrate transfer conveyor (substrate transfer mechanism) is provided. On the other hand, a cassette elevating device (force setting positioning mechanism) 3 17 that elevates and lowers the cassette 81 in the vertical direction (the direction perpendicular to the paper surface) is provided, and is supplied from the transport path 15 arranged adjacent to it. The glass substrate 82 thus placed can be stored in the cassette 81. Further, between the stocker 11 and the cassette elevating / lowering device 3 17, there are provided cassette transport conveyors (cassette transport mechanism) 3 18 and 3 19 for transporting cassettes between them.

Here, the carry-in position C 2 in the stocker 11 is a take-out position A 2 for carrying out the cassette 8 1 from the stocker 11 1 and a take-out position A 2 for carrying the cassette 8 1 into the stocker 11 1. And has a separate receiving position B2. The cassette elevating device 3 17 is located in the cassette traverse section 3 16 and has a cassette supply position D 2 corresponding to the unloading position A 2 of the stocker 11 and a cassette discharging position corresponding to the loading position B 2. Move to take any position of E2, draw cassette 8 from cassette transport conveyor 3 18 at cassette supply position D2, and transport cassette 3 1 8 at cassette discharge position E2. The cassette 81 is sent out. As shown in FIGS. 16 and 18, the positional relationship between the unloading position A1 and the receiving position B1 is opposite to the positional relationship between the unloading position A2 and the receiving position B2. '

Next, an operation of discharging the glass substrate 82 from the cassette 81 in which the glass substrate is stored will be described with reference to FIGS. 16 and 17.

In this case, first, the cassette 81 containing the substrates stored in the rack 11a of the stocker 11 is moved to the unloading position A1 of the unloading position C1 in the stocker 11 by the stacker crane 12. Conveyed.

Next, the cassette 81 arriving at the unloading position A 1 is transported by the cassette transport conveyor 318 to the cassette lifting device 317 located at the cassette supply position D 1.

After positioning the cassette 81 in which the substrate is stored in this way to the cassette supply position D1, the glass substrate 82 is discharged from the cassette 81 in which the substrate is stored. At this time, the cassette 81 with the substrates stored therein is moved down by one step S by the cassette elevating device 3 17, and the glass substrate is moved from the cassette 81 to the transfer path 15 by a substrate transfer conveyor (not shown) or the like. Are carried out one by one.

While the glass substrate 82 is being discharged in this way, the cassette 81 containing another substrate from which the glass substrate k should be discharged next is transported to a position before the cassette supply position D1. And wait.

Thereafter, the cassette 81, which has been emptied after the discharge of the glass substrate 82, is moved up to a predetermined height by the cassette elevating device 317 in the cassette traverse section 316, and the cassette discharge position E is raised. Move to 1 The empty cassette 81 moved to the cassette discharge position E 1 in this way is sent out from the cassette elevating device 3 17 to the cassette transport conveyor 3 19 and then to the storage position B 1 of the stocker 11. Conveyed. The empty cassette 81 that has arrived at the storage position B1 in this way is stored as a cassette for storage in the empty rack 11a in the stocker 11 by the stucker crane 12. .

The cassette elevating device 3 1 7 returns to the cassette supply position D 1, and then the cassette 81 on which the glass substrates are to be discharged is stored on the cassette transport conveyor 3 1 Pull in from 8.

Thereafter, the above operation is repeated.

Next, an operation of storing the glass substrate 82 in the empty cassette 81 will be described with reference to FIGS.

In this case, first, the empty force set 8 1 stored in the rack 11 a of the stocker 11 is transported by the stacker crane 12 to the unloading position A 2 at the loading position C 2 in the stocker 11. You.

Next, the cassette 81 arriving at the unloading position A2 is transported by the cassette transport conveyor 318 to the cassette elevating device 317 located at the cassette supply position D2. '

Then, after the empty cassette 81 is placed in the cassette elevating device 3 17, the cassette evacuation position is lowered in the cassette traverse section 3 16 while lowering the cassette 81 to a predetermined height by the cassette elevating device 3 17. Move to E2. After the empty cassette 81 is positioned at the cassette discharge position E2 in this way, the glass substrate 82 is stored in the empty cassette 81. At this time, the empty cassette 81 is moved down by one stage by the cassette elevating device 3 17, and the glass substrate 82 is transferred from the transfer path 15 to the cassette 81 by a substrate transfer conveyor (not shown). They are loaded one by one. ·

While the glass substrate 82 is being stored in this way, another empty cassette 81 for storing the glass substrate is transported to a position just before the cassette supply position D2 and made to stand by. Keep it. · After that, the cassette 81 with the glass substrate 82 stored therein is sent out to the cassette transfer conveyor 3 19 from the force set elevating device 3 17 and transferred to the storage position B 2 of the stocker 11. You. The cassette 81 that has received the substrate and arrived at the storage position B2 in this manner is stored in the empty rack 11a in the stocker 11 by the stacker crane 12.

On the other hand, the cassette elevating device 317 returns to the cassette supply position D2, and then draws an empty cassette 81 for storing glass substrates from the cassette transfer conveyor 318. Thereafter, the above operation is repeated.

As described above, according to the fourth embodiment of the present invention, in the core device 10 used in the manufacturing line systems 1, 1 ', 1 "according to the above-described first to third embodiments, The transfer path 15 is set so that the glass substrate 82 is discharged from the cassette 81 or the glass substrate 82 is stored in the cassette 81 with the transfer path 15 such as a substrate transfer conveyor (substrate transfer mechanism). On the other hand, the cassette elevating device 3 17 for raising and lowering the cassette 81 is moved to the cassette supply positions D 1 and D 2 corresponding to the unloading positions A 1 and A 2 of the stocker 11 1 and the loading positions B 1 and B 2. The cassette 81 is moved between the corresponding cassette discharge positions E 1 and E 2, the cassette 81 is pulled in from the cassette transfer conveyor 318 at the cassette supply positions D 1 and D 2, and the cassette discharge positions E 1 and E 2 are moved. E2 to cassette conveyor 3 1 9 Since the set 81 is sent out, the next cassette 81 can be made to stand by adjacent to the cassette 81 while the glass substrate 82 is being stored or ejected. In addition, it is possible to shorten the tact time in the loading and unloading work of the cassettes. Also, it corresponds to the cassette supply positions D1, D2 corresponding to the unloading positions A1, A2 of the stocker 11 and the loading positions B1, B2. Since the cassette 81 is being transferred by moving the cassette elevating device 3 17 between the cassette discharge positions E 1 and E 2 to be changed, a special direction change for changing the moving direction of the cassette 81 is performed. No mechanism is required, and the footprint only needs to correspond to the two positions corresponding to the cassette supply positions Dl and D2 and the force set discharge positions E1 and E2. The cassette lifting device 3 17 that moves between the cassette supply positions D 1 and D 2 for transferring the cassette 81 and the cassette discharge positions E 1 and E 2 Since it is configured to move relatively on the same gantry as the transfer path 15 such as a transfer conveyor (substrate transfer mechanism), the cassette transfer conveyors 3 18 and 3 19 and the substrate transfer conveyor (substrate transfer The structure is simpler than in the case where the transfer path 15 such as a transfer mechanism is directly connected to avoid interference between them, and the maintainability is also improved.

In the fourth embodiment described above, the cassette 81 stored and transported by the core device 10 includes a plurality of wires stretched between left and right side frames. In addition to using a wire-type cassette that supports the substrate in a horizontal state, a pin-type cassette that supports the substrate in a horizontal state using a plurality of support pins that project horizontally from the left and right side frames can be used. it can.

Further, in the above-described fourth embodiment, as the cassette transport mechanism for transporting the cassette 81 between the stocker 11 and the cassette elevating device 3 17, the cassette transport conveyors 3 18 and 3 19 are used. However, any transport mechanism such as AGVRGV or CV can be used as long as the cassette can be transported.

Further, the core device according to the fourth embodiment described above is suitably used in the production line systems 1, 1 ′, 1 ″ according to the first to third embodiments. The present invention is not limited to this, and can be widely used in general stucker crane type automatic warehouses that handle cassettes accommodating a plurality of substrates.

Next, a fifth embodiment of the present invention will be described with reference to FIG.

In the production line systems 1, 1, 1 "according to the above-described first to fourth embodiments, the substrate 81 is mounted on the cassette 81 positioned at the loading / unloading position (the unloading position C1 or the loading position C2). The glass substrates 82 are stored one by one into the cassette 81 by the loading / unloading mechanism (substrate unloading mechanism 16a and the substrate loading mechanism 16b), and the glass substrates 82 are discharged one by one from the cassette 81. Or

However, in the substrate loading / unloading mechanism having such a configuration (the substrate unloading mechanism 16a and the substrate loading mechanism 16b), the cassette supply position where the cassette 81 is supplied and the glass substrate 8 to the cassette 81 are provided. The substrate loading / unloading position at which the glass substrate 82 is stored from the cassette 81 or the cassette 81 and the cassette collection position at which the cassette 81 is recovered are not independent. The cassette 81 is supplied, the glass substrate 82 is stored or discharged, and the cassette 81 is collected. For this reason, there is a problem that the tact time in the storing or discharging operation of the glass substrate 82 becomes long.

The fifth embodiment of the present invention is mainly intended to solve such problems, and the production line systems 1, 1 ', and 1' according to the first to fourth embodiments described above. Configuration of the substrate loading / unloading mechanism at 1 "(particularly substrate loading mechanism 16b) A substrate storage device 416 for storing a glass substrate as a thin plate-shaped material is provided.

As shown in FIG. 20, the substrate storage device 4 16 according to the fifth embodiment of the present invention includes a cassette moving mechanism 4 19, a cassette elevating device 4 17, and a glass substrate moving device 4 18. Have.

Of these, the cassette moving mechanism 419 moves the cassette 81 so that it takes one of the cassette supply position F1, the board storage position G1, and the cassette collection position H1. is there.

The cassette supply position F1 is a position where the cassette 81 is supplied. For this reason, the cassette 81 supplied to this position is usually an empty cassette in which the glass substrate 82 is not stored. The substrate storage position G 1 is a position where the glass substrate 82 is stored in the cassette 81. For this reason, the cassette 81 arranged at this position is the cassette in which the glass substrate 82 is stored. The cassette collecting position H1 is a position where the cassette 81 transferred after the glass substrate 82 is stored is collected. For this reason, the cassette 81 collected from this position is usually a cassette in which the glass substrate 82 has already been stored and the substrate is already stored. The cassette supply position F1, the substrate storage position G1, and the cassette collection position H1 are arranged in a row adjacent to each other.

As shown in FIG. 20, the cassette moving mechanism 4 19 moves the empty cassette 81 supplied to the cassette supply position F 1 from the cassette supply position F 1 to the substrate storage position G 1. Let it. As a result, the empty cassette 81 that has moved to the substrate storage position G 1 becomes a cassette in which the glass substrate 82 is stored.

After that, when the glass substrate 82 is stored in the cassette 81, the stored cassette 81 becomes a force set in which the glass substrate 82 is stored. At this time, the cassette moving mechanism 419 moves the cassette 81 having stored the substrate from the substrate storing position G1 to the cassette collecting position H1.

Cassette recovery cassette H 1 Recovered from cassette recovery position H1.

As described above, the cassette moving mechanism 4 19 moves the empty cassette 81 positioned at the cassette supply position F 1 from the cassette supply position F 1 to the substrate storage position G 1, and the substrate storage position G 1 Move the cassette 81 stored in the cassette to the cassette recovery position H1.

Note that the two types of movement by the cassette moving mechanism 419 as described above can be individually performed as independent movements. However, it is a prerequisite that the destination position (board storage position G1 or cassette collection position HI) be vacant.

Also, the two types of movement by the cassette moving mechanism 419 as described above can be performed in conjunction with each other as movements related to each other. For example, the two cassettes 81 can be moved at the same time, and the cassette 81 positioned at the cassette supply position F1 can be moved so as to fill the empty area while generating an empty area at the substrate storage position G1. However, even in this case, it is a prerequisite that the cassette recovery position H1, which is the destination, is empty. ′ In addition, in the substrate storage position G 1, the cassette lifting / lowering device 4 17 moves the cassette 8 1 positioned by the cassette moving mechanism 4 19 at a pitch corresponding to the storage interval of the glass substrate 8 2 in the vertical direction (paper surface). (In the direction perpendicular to the vertical direction), and the glass substrate 8 in the cassette 81 (one of a plurality of storage locations) and the glass substrate 8 in the transport path (not shown) such as a substrate transport conveyor. This is to match the supply position of 2.

Further, in the substrate storage position G1, the glass substrate moving device 4 18 moves the storage position of the glass substrate 82 in the cassette 8 1 by the force set elevating device 4 17 and the transfer path of the substrate transfer conveyor (not shown). The glass substrate 82 supplied from a transfer path (not shown) such as a substrate transfer conveyor is moved toward the cassette 81 in a state where the supply position of the glass substrate 82 in FIG. 8 Stored in 1.

Note that a substrate loading mechanism is constituted by the cassette lifting device 4 17 and the glass substrate moving device 4 18. Next, referring to FIG. 20, the operation of the substrate storage device 416 having such a configuration will be described. In FIG. 20, an arrow “→” indicates the moving direction of the cassette, and an arrow “→” indicates the supply direction of the glass substrate.

As shown in dig 20, when the glass substrate 82 is being stored, while the glass substrate 82 is being stored in the cassette 81, the cassette 81 positioned at the cassette recovery position HI is stored. Recovery is performed.

When the glass substrate 82 is stored in the cassette 81 in the substrate storage position G1, the empty cassette recovery position H1 and the substrate storage position G1 are moved by the cassette moving mechanism 419. Move the positioned cassette 8 1.

On the other hand, the cassette 81 positioned at the cassette supply position F1 is moved to the substrate storage position G1 vacated by such movement.

At this time, the cassette elevating device 4 17 and the glass substrate moving device 4 18 as the substrate carrying-in mechanism are moved immediately when the cassette 81 positioned at the cassette supply position F 1 is positioned at the substrate storage position G 1. Then, the storage of the glass substrate 82 in the cassette 81 is started.

In the meantime, an empty cassette 81 is supplied to the empty cassette supply position F1.

As described above, according to the fifth embodiment of the present invention, the position of any one of the cassette supply position F1, the substrate storage position G1, and the cassette collection position HI is controlled by the cassette moving mechanism 419. The cassette 81 was moved so as to take a position, and at the substrate storage position G1, the cassette was moved by the cassette moving mechanism 419 by the cassette lifting / lowering device 417 and the glass substrate moving device 418 as the substrate loading mechanism. The glass substrate 82 is stored in the cassette 81. For this reason, the storage of the glass substrate 82 in the cassette 81 only stops while the cassette 81 is moving, and when the storage of the glass substrate 82 in the cassette 81 is completed. Since the cassette 81 is moved from the substrate storage position G1 to the cassette recovery position H1 at the same time as the cassette 81 is moved from the substrate storage position G1 to the cassette collection position H1, the glass substrate 82 is moved from the cassette supply position F1 to the substrate storage position G1. Storage work Can reduce the tact time.

Sixth embodiment

Next, a sixth embodiment of the present invention will be described with reference to FIG.

The sixth embodiment of the present invention aims at solving the same problems as those in the fifth embodiment described above, and the sixth embodiment of the present invention has the same features as the first to fourth embodiments. The configuration of the substrate loading / unloading mechanism (particularly, substrate transporting mechanism 16a) in the production line systems 1, 1 ', 1 is changed, and a substrate discharging device 516 for discharging a glass substrate as a thin plate material is provided. I do.

As shown in FIG. 21, the substrate discharging device 5 16 according to the sixth embodiment of the present invention includes a cassette moving mechanism 5 19, a cassette elevating device 5 17, and a glass substrate moving device 5 1

Has eight.

Among them, the cassette moving mechanism 511 moves the cassette 81 so as to take any one of the cassette supply position F2, the substrate discharge position G2, and the cassette collection position H2. .

The cassette supply position F2 is a position where the cassette 81 is supplied. For this reason, the cassette 81 supplied to this position is usually a cassette in which the glass substrate 82 has already been stored and in which the substrate is already stored. The substrate outgoing position G 2 is a position where the glass substrate 82 is discharged from the cassette 81. For this reason, the cassette 81 arranged at this position is a cassette being discharged from which the glass substrate 82 has been discharged. The cassette collection position H2 is a position where the cassette 81 transferred after the glass substrate 82 is discharged is collected. For this reason, the cassette 81 recovered from this position is usually an empty cassette in which the glass substrate 82 is not stored. The cassette supply position F2, the substrate discharge position G2, and the cassette recovery position H2 are arranged in a row adjacent to each other.

As shown in FIG. 21, the cassette moving mechanism 5 19 moves the cassette 81 containing the substrates supplied to the cassette supply position F 2 from the cassette supply position F 2 to the substrate discharge position G 2. Move. As a result, the cassette 81 containing the substrates moved to the substrate discharge position G2 discharges the glass substrates 82. This is the cassette being ejected.

Thereafter, when the ejection of the glass substrate 82 from the cassette 81 is completed, the force set 81 during ejection becomes an empty cassette in which the glass substrate 82 is not stored. At this time, the cassette moving mechanism 5 19 moves the empty cassette 81 from the substrate discharge position G 2 to the cassette recovery position H 2.

The empty cassette 81 located at the cassette recovery position H2 is recovered from the cassette recovery position H2.

In this way, the cassette moving mechanism 5 19 moves the cassette 81 with the substrates stored at the cassette supply position F 2 from the cassette supply position F 2 to the substrate exit position G 2, and discharges the substrate. The discharging cassette 81 positioned at the position G2 is moved to the cassette collecting position H2.

Note that the two types of movement by the cassette moving mechanism 519 as described above can be performed individually as independent movements. However, it is a prerequisite that the destination position (basic storage position G1 and cassette collection position H1) be vacant.

Further, the two types of movement by the cassette moving mechanism 519 as described above can be performed in conjunction with each other as movements related to each other. For example, the two cassettes 81 can be moved at the same time, and the cassette 81 positioned at the cassette supply position F2 can be moved so as to fill the empty area while generating an empty area at the substrate discharge position G2. However, even in this case, the precondition is that the cassette recovery position H2 to which the cartridge is to be moved is vacant.

In addition, the cassette elevating / lowering device 517 moves the cassette 81 positioned by the cassette moving mechanism 519 at the substrate discharge position G2 at a pitch corresponding to the storage interval of the glass substrate 82 (in the vertical direction). (In a vertical direction), and the glass substrate 82 in the cassette 81 is placed in one of a plurality of storage locations (one of a plurality of storage locations) and in a transport path (not shown) such as a substrate transport conveyor. This is to match the discharge position.

Further, the glass substrate moving device 5 18 moves the storage position of the glass substrate 8 2 in the cassette 8 1 by the force set elevating device 5 17 at the substrate discharge position G 2, The glass substrates 82 stored in the cassette 81 are transferred from the cassette 81 to the substrate transport conveyor or the like in a state in which the discharge position of the glass substrates 82 in the transport path (not shown) of the substrate transport conveyor or the like is aligned. To be transported to a transfer path (not shown), and then discharged from the cassette 81.

Note that a substrate unloading mechanism is constituted by the cassette elevating device 517 and the glass substrate moving device 518.

Next, referring to FIG. 21, the operation of the substrate discharge device 516 having such a configuration will be described. In FIG. 21, the arrow “→” indicates the moving direction of the cassette, and the arrow “→” indicates the discharging direction of the glass substrate.

As shown in FIG. 21, during the discharging operation of the glass substrate 82, while the glass substrate 82 is being discharged from the cassette 81, the cassette 81 positioned at the cassette collecting position H 2 is discharged. Is collected.

At the time when the discharge of the glass substrate 82 from the cassette 81 at the substrate discharge position G2 is completed, the cassette moving mechanism 511 transfers the glass substrate 82 to the empty cassette recovery position H2 and the substrate discharge position G2. Move the positioned cassette 81.

On the other hand, the cassette 81 positioned at the cassette supply position F2 is moved to the board discharge position G2 which has been vacated by such movement.

At this time, the cassette lifting / lowering device 5 17 as a substrate unloading mechanism and the glass substrate moving device 5 18 move at the time when the cassette 8 1 positioned at the cassette supply position F 2 is positioned at the substrate discharge position G 2. Immediately, the discharge of the glass substrate 82 from the cassette 81 is started.

In the meantime, an empty cassette 81 is supplied to the empty cassette supply position F2.

As described above, according to the fifth embodiment of the present invention, the cassette moving mechanism 519 allows any one of the cassette supply position F2, the substrate discharge position G2, and the cassette recovery position H2. The cassette 81 is moved to take the position of, and at the substrate discharge position G2, it is positioned by the cassette elevating device 5 17 and the glass substrate moving device 5 18 as the substrate unloading mechanism and the cassette moving mechanism 5 19 by the glass substrate moving device 5 18. The glass substrate 82 is discharged from the loaded cassette 81. For this reason, the discharge of the glass substrate 82 from the cassette 81 stops only while the cassette 81 is moving, and the discharge of the glass substrate 82 from the cassette 81 ends. At the time, the cassette 81 is moved from the substrate discharge position G2 to the cassette recovery position G2, and simultaneously, the cassette 81 is moved from the cassette supply position F2 to the substrate exit position G2. 82 Tact time in outgoing work can be shortened.

In the above-described fifth and sixth embodiments, the cassette 81 handled by the substrate storage device 416 and the substrate discharge device 516 includes a plurality of cassettes stretched between left and right side frames. In addition to using a wire-type force set that supports the substrate horizontally with the same wire, a pin-type cassette that supports the substrate horizontally with multiple support pins that protrude horizontally from the left and right side frames Can be used.

The substrate storage device 4 16 and the substrate discharge device 5 16 according to the fifth and sixth embodiments described above are preferably used in the first to fourth embodiments. The present invention is not limited to this, and can be widely used in general for a substrate storage device that stores substrates in a cassette and a substrate discharge device that discharges substrates from a force set.

Furthermore, the substrate storage device 4 16 and the substrate discharge device 5 16 according to the fifth and sixth embodiments described above use a glass substrate as the thin plate material stored in the cassette 81 as an example. Although described above, any material can be used as long as it is a thin plate material that can be stored in the cassette 81.

Claims

The scope of the claims

1. In a production line system that manufactures color filters using a cassette that stores multiple substrates,

A core device for storing a cassette containing a plurality of substrates or a cassette containing a plurality of substrates or an empty cassette, comprising: a stocker for storing a plurality of cassettes; and a cassette stored in the stocker. A core device having a stacker crane for transporting between a plurality of loading / unloading positions in the stocker and an arbitrary cassette storage position;

A plurality of substrates that are connected to each of the loading / unloading positions of the core device and perform various processes for manufacturing a color filter on a substrate stored in a substrate-stored cassette stored in the core device; Processing line,

A substrate is provided corresponding to each of the loading / unloading positions of the core device, and a substrate is discharged one by one from a cassette in which the substrate is stored and positioned at each of the loading / unloading positions to each processing line corresponding to the respective loading / unloading position, Or a substrate loading / unloading mechanism for storing the processed substrates processed in each of the processing lines one by one in an empty cassette positioned at each of the loading / unloading positions,

The manufacturing line system, wherein the plurality of processing lines include a plurality of main plate making lines for realizing a processing step including a photolithography process.

2. The manufacturing line system according to claim 1, wherein the plurality of processing lines include a spare plate making line that realizes the same process as each of the main plate making lines.

3. At least one of the plurality of main plate-making lines included in the plurality of processing lines is a common defect for detecting a common defect occurring at the same position on a plurality of substrates to be processed. 3. The production line system according to claim 1, wherein an inspection machine is incorporated.

4. The plurality of processing lines include a substrate regeneration line for 'regenerating a substrate having a common defect detected by the common defect detector included in the main plate making line'. Production according to 3:

5. The plurality of processing lines include a substrate inspection line for inspecting a processed substrate processed by each of the processing lines, and the substrate inspection lines are generated at different positions of the plurality of substrates. 4. The production line system according to claim 3, further comprising an individual defect inspection machine for detecting individual defects.

6. The manufacturing line system according to claim 5, wherein the board inspection line further includes a board repair device for repairing an individual defect of each of the boards detected by the individual defect inspection machine. .

7. The plurality of processing lines are for regenerating a substrate on which a common defect or an individual defect is detected by the common defect inspection device included in the main plate making line or the individual defect inspection device included in the substrate inspection line. 7. The production line system according to claim 5, further comprising a substrate recycling line. '

8. The core device includes a plurality of the stockers and the stacker cranes, at least one stacker crane is arranged at each of the stockers, and each of the stockers is a stacker crane arranged at each of the stockers. 2. The production line system according to claim 1, wherein the production line systems are connected to each other via a transfer device that transfers cassettes between them.

9. The color filter production line system according to claim 8, wherein the delivery device is a stacker crane that functions as a substitute for a stacker crane arranged in each of the stockers.

10. The manufacturing line system according to claim 8, wherein the plurality of stockers are arranged in a shape of a goose. 10.

1 1. In a manufacturing line system that manufactures plate products using a cassette that stores multiple substrates,

A core device for storing a plurality of substrate-stored cassettes containing a plurality of substrates or an empty cassette, comprising: a stocker for storing a plurality of cassettes; and a cassette stored in the stocker. A core device having a stacker crane for transporting between a plurality of loading / unloading positions and an optional cassette storage position;

Connected to each of the loading / unloading positions of the core device, and stored in the core device A plurality of processing lines for performing various types of processing on substrates stored in a cassette in which

The cassette to be stored and transported by the core device includes left and right side frames, and a plurality of stages of different heights which are stretched between the left and right side frames to support a plurality of substrates in a horizontal state. A production line system comprising: a plurality of wires extending along a horizontal plane.

12. The manufacturing line system according to claim 11, wherein the plurality of processing lines perform various types of processing for manufacturing a color filter.

1 3. A stocker for storing a plurality of cassettes in an automatic warehouse that handles cassettes for storing a plurality of substrates,

A stacker crane for transporting a cassette stored in the stocker between a loading / unloading position in the stocker and an arbitrary cassette storage position;

The cassette is provided with respect to the loading / unloading position of the stocker, and positions the cassette with respect to the go board transport mechanism so as to discharge the substrate from the cassette or store the substrate in the cassette between the cassette transport mechanism and the board transport mechanism. Cassette positioning mechanism,

A cassette transport mechanism that transports a cassette between the stocker and the cassette positioning mechanism;

The loading / unloading position of the stocker has an unloading position for unloading a cassette from the stocker, and an unloading position independent of the unloading position for loading a cassette into the stocker,

The cassette positioning mechanism moves to take one of a cassette supply position corresponding to the unloading position of the stocker and a cassette discharge position corresponding to the storage position. The cassette is pulled in from the cassette transport mechanism, Sending the force set to the force set transfer mechanism in a state.

14. The cassette is for storing the plurality of substrates in a horizontal state, and the cassette positioning mechanism is a cassette lifting device that raises and lowers the cassette at a pitch corresponding to a storage interval of the substrates. The automatic according to claim 13

1 5. In a substrate storage device that stores substrates in a cassette,

A cassette that moves the cassette to any of the cassette supply position where the cassette is supplied, the substrate storage position where the substrates are stored in the cassette, and the cassette collection position where the set is collected. Moving mechanism,

A substrate loading mechanism for storing a substrate in a cassette positioned by the cassette moving mechanism at the substrate storage position.

1 6. In a substrate discharge device that discharges substrates from a cassette,

A cassette that moves the cassette to one of the cassette supply position where the cassette is supplied, the substrate discharge position where the substrates are discharged from the cassette, and the cassette recovery position where the cassette is recovered. A moving mechanism;

A substrate unloading mechanism for discharging the substrate from a cassette positioned by the cassette moving mechanism at the substrate discharging position.