CN1645103A - Microfriction testers - Google Patents
Microfriction testers Download PDFInfo
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- CN1645103A CN1645103A CN 200510023642 CN200510023642A CN1645103A CN 1645103 A CN1645103 A CN 1645103A CN 200510023642 CN200510023642 CN 200510023642 CN 200510023642 A CN200510023642 A CN 200510023642A CN 1645103 A CN1645103 A CN 1645103A
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Abstract
A device for testing microfriction consists of 2-D force test sensor horizontal and vertical bent beams vertical to each other and formed by two parallel elastic bodies, suspension arm with one end fixed and another end set with tested object and friction head, and probe fixed on 2-D movable platform. The friction force is measured by foil gauge sticked on vertical bent beam and load is measured by displacement sensor. Both of load and friction force in micromilli N grade can be measured by the device simultaneously.
Description
Technical field
The present invention relates to a kind of microfriction testers, relate in particular to a kind of ball disc type microfriction testers that is used to evaluate various nano surface lubricating films (or coating) tribological property.
Background technology
Along with MEMS (micro electro mechanical system) (MEMS) application is increasingly extensive, the rubbing wear problem that it embodies is also more and more outstanding.It is to improve the effective way of its little tribological property that control improves the micromechanics character of surface, can significantly reduce wearing and tearing by nano surface film (or coating) and take place with adherent phenomenon, thus the serviceable life of improving micromechanics.Little friction testing is significant for the tribological property of these surface lubrication films of assessment.Yet existing frictional wear experiment equipment generally is operated in more than the ox level as pin disc type friction wear testing machine, four-ball friction and wear test machine etc., does not all reach the required milli ox class precision of little friction testing.Document [Yang Mingchu, Luo Jianbin, Wen Shizhu. the magnetic recording Micro Lub is learned the development of ability meter. Tsing-Hua University's journal (natural science edition), 2000,40 (8): 36-40] and [Li Haiwen, Jia Hongguang, Wu Yihui, Deng. the research of little friction testing instrument force transducer. optical precision engineering, 2002,10 (4), 388-391] in little friction testing instrument of mentioning all be to adopt on elastic body, to paste foil gauge, utilize resistance strain effect that the load and the elastic body strain that causes that rubs are converted into resistance variations, further convert voltage signal to by electric bridge then, thereby measure the size of load and friction force indirectly.In these proving installations, the loading of load realizes by changing elastomeric strain size, but because the elastic body dependent variable is extremely little, need adopt expensive high precision micron order displacement platform to realize for obtaining higher load loading resolution, for example adopt the piezoelectric ceramics draw-tube to realize micrometric displacement, this just causes cost to improve; In addition, it is very high that the levelness of motion platform need reach, and can avoid so just that the load changes in amplitude is unlikely to too big in little friction testing.
Summary of the invention
The objective of the invention is at the problems referred to above, a kind of economical and practical microfriction testers is provided, can not only measure the friction force and the normal load of micro milli-newton grade simultaneously, and have higher load loading resolution.
For realizing such purpose, the technical solution adopted in the present invention is: fix a two-dimentional force cell that adopts cantilever design on the two-dimension displacement platform, in the two dimension force cell, orthogonal horizontal bent beam and vertical bent beam are fixed together by contiguous block, horizontal bent beam is formed by two parallel elastic bodys with vertical bent beam, cantilever one end is fixed, and the other end is the cantilever front end, is fixed with tested cylinder and friction head on the cantilever front end.The probe of non-contact displacement sensor is installed directly over the tested cylinder, is fixed on the two-dimentional mobile platform by the rigidity overarm.Be pasted with foil gauge on the vertical bent beam and be used for the friction force measurement, the measurement of load then realizes indirectly by displacement transducer.
Among the present invention, can be in the horizontal direction realize fixing a two-dimentional force cell on the two-dimension displacement platform of micrometric displacement with vertical direction.The two dimension force cell adopts the elastic body cantilever design, comprises cantilever and overarm of the rigidity directly over the cantilever and the displacement sensor probe be made up of horizontal bent beam, contiguous block, vertical bent beam etc.Vertical bent beam is made up of two parallel elastic bodys respectively with horizontal bent beam, and the square contiguous block connects orthogonal vertical bent beam and horizontal bent beam at length direction, forms the cantilever agent structure.Four foil gauge symmetries are pasted on the arbitrary elastomeric pros and cons of vertical bent beam, and form full-bridge circuit, and the position is near two-dimentional mobile platform.Cantilever end links to each other with horizontal bent beam as the free end of cantilever.The cantilever end bottom is fixed with friction ball, and the tested cylinder at top is as the reference tested surface of its top displacement sensor probe.Displacement sensor probe is positioned at an end of rigidity overarm, and the other end of rigidity overarm is fixed on the two-dimentional mobile platform.Be used to place the friction testing sample on the coaxial sample stage that links to each other of buncher.
During frictional experiment, buncher drives sample stage and makes ball disc type fricting movement, and the HeiFin knob of regulating two-dimentional mobile platform can change the strain size of the horizontal bent beam on the cantilever, thereby changes the magnitude of load that acts on the testing sample.Effect when friction ball is subjected to load and friction force, strain deformation all takes place in vertical bent beam and horizontal bent beam, the distance of displacement sensor probe and tested cylinder also changes, wherein vertical bent beam only is subjected to friction force effect generation strain deformation, and displacement sensor probe is only relevant with magnitude of load with the distance of tested cylinder.Utilize resistance strain effect that the elastic strain sheet strain that friction force causes is converted into the foil gauge resistance variations, further convert voltage signal to by electric bridge then, thereby measure the size of load and friction force indirectly; Utilize the pop one's head in distance of measured circle styletable face of non-contact displacement sensor can obtain magnitude of load indirectly.
The present invention adopts non-contact displacement sensor to measure magnitude of load, and the high resolving power that need not to adopt the high-precision micro displacement platform just can realize load loads, and has guaranteed the dynamometry precision simultaneously.The two dimension force cell is fixed on the two-dimentional mobile platform, can change magnitude of load and rubbing contact point position by level on the two-dimentional mobile platform and HeiFin knob, can not only measure micro milli-newton grade load and friction force simultaneously, and have higher load loading resolution.
The present invention is simple in structure, good reliability, and cost is low simultaneously, can be widely used in the little frictional behaviour assessment of various films (or coating) test.
Description of drawings
Fig. 1 is a structure principle chart of the present invention.
Among Fig. 1,1. WidFin knob, 2. two-dimension displacement platform, 3. HeiFin knob, 4. rigidity overarm, 5. displacement sensor probe, 6. sample, 7. sample stage, 8. buncher, 13. horizontal bent beams, 14. contiguous blocks, 15. vertical bent beams.
Fig. 2 is a two-dimentional force cell perspective view of the present invention.
Among Fig. 2,4. rigidity overarm, 5. displacement sensor probe, 9. stiff end, 10. tested cylinder, 11. friction balls, 12. cantilever ends, 13. horizontal bent beams, 14. contiguous blocks, 15. vertical bent beams, 16. foil gauges
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
Structural principle of the present invention as shown in Figure 1, two-dimension displacement platform 2 is realized micrometric displacement with vertical direction in the horizontal direction by the WidFin knob 1 of lower-left and the HeiFin knob 3 at top, a side of two-dimension displacement platform 2 is fixed two-dimentional force cell.The structure of two dimension force cell comprises cantilever and overarm 4 of the rigidity directly over the cantilever and the displacement sensor probe of being made up of horizontal bent beam 13, contiguous block 14, vertical bent beam 15 etc. 5.Rigidity 4 one ends of hanging oneself from a beam are fixed on the two-dimentional mobile platform, and the other end is placed displacement sensor probe 5.With placement friction testing sample 6 on the buncher 8 coaxial sample stage that link to each other 7.
Two-dimentional force cell adopts the elastic body cantilever design among the present invention, as shown in Figure 2.Vertical bent beam 15 is made up of two parallel elastic bodys respectively with horizontal bent beam 13, and square contiguous block 14 connects orthogonal vertical bent beam 15 and horizontal bent beam 13 at length direction, forms the cantilever agent structure.Four foil gauge 16 symmetries are pasted on vertical bent beam 15 arbitrary elastomeric pros and cons, and form full-bridge circuit, and the position is near the stiff end 9 that connects two-dimentional mobile platform 2.Cantilever end 12 links to each other with horizontal bent beam 13 as the free end of cantilever.Cantilever end 12 bottoms are fixed with friction ball 11, and the tested cylinder 10 at top is as the reference tested surface of its top displacement sensor probe 5.Displacement sensor probe 5 is positioned at an end of rigidity overarm 4, and the other end of rigidity overarm 4 is fixed on the two-dimentional mobile platform.
Provide the principle of work of microfriction testers of the present invention below.
Friction testing sample 6 be placed on the buncher 8 coaxial sample stage that link to each other 7 on.Buncher 8 drives sample stage 7 and makes ball disc type fricting movement, and the HeiFin knob 3 of regulating two-dimentional mobile platform 2 can change the strain size of the horizontal bent beam 13 on the cantilever 9, thereby changes the magnitude of load that acts on the testing sample 6.Non-contact displacement sensor probe 5 has reflected the load change situation with tested cylinder 10 variable in distance.During frictional experiment, effect when friction ball 11 is subjected to load and friction force, strain deformation all takes place in vertical bent beam 15 and horizontal bent beam 13, displacement sensor probe 5 also changes with the distance of tested cylinder 10, wherein vertical bent beam 15 only is subjected to friction force effect generation strain deformation, and displacement sensor probe 5 is only relevant with magnitude of load with the distance of tested cylinder 10.This is explanation just: certain strain size of the corresponding vertical bent beam 15 of certain friction force; The certain distance of corresponding displacement sensor probe 5 of certain load and tested cylinder 10.Thereby, can utilize resistance strain effect that elastic strain sheet 16 strains that friction force causes are converted into the foil gauge resistance variations, further convert voltage signal to by electric bridge then, thereby measure the size of load and friction force indirectly; Utilize non-contact displacement sensor probe 5 distances can obtain magnitude of load indirectly to tested cylinder 10 end faces.
In one embodiment of the invention, vertical bent beam 15 is made up of the two parallel elastic bodys of long 40mm, wide 10mm, thick 0.34mm, two parallel elastic body spacing 2mm; Horizontal bent beam 13 by long 30mm, widely form two parallel elastic body spacing 2mm for the two parallel elastic bodys of 10mm, thick 0.1mm.The length of side that connects the square contiguous block 14 of orthogonal vertical bent beam 15 and horizontal bent beam 13 is 10mm, the model of non-contact displacement sensor probe 5 is the ST-1-05 of Beijing foundation for a great undertaking point development in science and technology company limited production, be positioned at tested cylinder 10 directly over 1.5mm.The ST-1-05 displacement transducer has the big linear range of 1.5mm, and promptly load is from zero to maximum, and the perpendicular displacement of two-dimension displacement platform 12 can reach 1.5mm, adopts common displacement platform, just can realize high-resolution load loading.
Claims (1)
1, a kind of microfriction testers, it is characterized in that two-dimension displacement platform (2) passes through WidFin knob (1) and HeiFin knob (3) is realized micrometric displacement with vertical direction in the horizontal direction, in the two-dimentional force cell that two-dimension displacement platform (2) one sides are fixed, square contiguous block (14) connects orthogonal vertical bent beam (15) and horizontal bent beam (13) at length direction, form the cantilever agent structure, vertical bent beam (15) is made up of two parallel elastic bodys respectively with horizontal bent beam (13), four foil gauges (16) symmetry is pasted on the arbitrary elastomeric pros and cons of vertical bent beam (15), and composition full-bridge circuit, the position is near two-dimentional mobile platform (2), cantilever end (12) links to each other with horizontal bent beam (13) as the free end of cantilever, the bottom of cantilever end (12) is fixed with friction ball (11), cantilever end (12) top is fixed with tested cylinder (10), displacement sensor probe (5) directly over the tested cylinder (10) is positioned at an end of rigidity overarm (4), the other end of rigidity overarm (4) is fixed on the two-dimentional mobile platform, friction testing sample (6) be placed on the coaxial sample stage that links to each other of buncher (8) (7) on.
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| CNB2005100236424A CN1297813C (en) | 2005-01-27 | 2005-01-27 | Microfriction testers |
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| CNB2005100236424A CN1297813C (en) | 2005-01-27 | 2005-01-27 | Microfriction testers |
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