CN1540192A - 控制质量流的阀装置及其制造方法和采用该装置的热交换器 - Google Patents
控制质量流的阀装置及其制造方法和采用该装置的热交换器 Download PDFInfo
- Publication number
- CN1540192A CN1540192A CNA2004100327700A CN200410032770A CN1540192A CN 1540192 A CN1540192 A CN 1540192A CN A2004100327700 A CNA2004100327700 A CN A2004100327700A CN 200410032770 A CN200410032770 A CN 200410032770A CN 1540192 A CN1540192 A CN 1540192A
- Authority
- CN
- China
- Prior art keywords
- permanent magnet
- flow control
- valve member
- fluid passage
- control valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 22
- 239000012530 fluid Substances 0.000 claims abstract description 122
- 238000006073 displacement reaction Methods 0.000 claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 238000001816 cooling Methods 0.000 claims abstract description 6
- 238000005530 etching Methods 0.000 claims description 27
- 238000005452 bending Methods 0.000 claims description 26
- 239000003795 chemical substances by application Substances 0.000 claims description 19
- 238000005057 refrigeration Methods 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 239000011159 matrix material Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 238000012856 packing Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000006200 vaporizer Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000009834 vaporization Methods 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000006386 neutralization reaction Methods 0.000 claims 1
- 230000004907 flux Effects 0.000 description 20
- 230000006698 induction Effects 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000005415 magnetization Effects 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
- F16K31/0651—One-way valve the fluid passing through the solenoid coil
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
- F16K31/0655—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
- F16K31/082—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet using a electromagnet and a permanent magnet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
- F16K99/0009—Lift valves the valve element held by multiple arms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0046—Electric operating means therefor using magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
- F25B41/31—Expansion valves
- F25B41/34—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators
- F25B41/345—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators by solenoids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
- F25B41/31—Expansion valves
- F25B41/34—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators
- F25B41/35—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators by rotary motors, e.g. by stepping motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Dispersion Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Fluid Mechanics (AREA)
- Magnetically Actuated Valves (AREA)
- Flow Control (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR25004/2003 | 2003-04-21 | ||
KR10-2003-0025004A KR100528561B1 (ko) | 2003-04-21 | 2003-04-21 | 전자기력 구동 유량 제어 밸브 및 그의 제조방법과 이를이용한 열 교환 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1540192A true CN1540192A (zh) | 2004-10-27 |
Family
ID=36973949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2004100327700A Pending CN1540192A (zh) | 2003-04-21 | 2004-04-21 | 控制质量流的阀装置及其制造方法和采用该装置的热交换器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7086245B2 (ko) |
EP (1) | EP1471264B1 (ko) |
JP (1) | JP2004324886A (ko) |
KR (1) | KR100528561B1 (ko) |
CN (1) | CN1540192A (ko) |
DE (1) | DE602004001906T2 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106740771A (zh) * | 2017-01-25 | 2017-05-31 | 天津英创汇智汽车技术有限公司 | 一种用于汽车电子稳定控制系统中的吸入阀 |
CN107191657A (zh) * | 2016-03-15 | 2017-09-22 | 盾安美斯泰克股份有限公司 | 基于mems的电磁阀 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7754148B2 (en) * | 2006-12-27 | 2010-07-13 | Progentech Limited | Instrument for cassette for sample preparation |
US7727473B2 (en) | 2005-10-19 | 2010-06-01 | Progentech Limited | Cassette for sample preparation |
KR100705223B1 (ko) * | 2005-10-28 | 2007-04-06 | 엘지전자 주식회사 | 공기조화기의 부분 과부하 해소방법 |
US7615151B2 (en) * | 2007-01-25 | 2009-11-10 | Cummins Filtration Ip Inc. | Filter with installation integrity and magnetic flow-control |
DE102007004377A1 (de) * | 2007-01-29 | 2008-08-07 | Diener Precision Pumps Ltd. | Elektromagnetisch zu betätigendes Ventil |
EP2916054A2 (fr) * | 2007-03-28 | 2015-09-09 | Fillon Technologies | Valve de dosage |
WO2010124754A1 (de) * | 2009-04-28 | 2010-11-04 | Rudolf Lonski | Ventil zur fluidleitung sowie dosiervorrichtung |
DE102010008744B4 (de) * | 2010-02-20 | 2013-12-24 | Kuhnke Automotive Gmbh & Co. Kg | Proportionalventil |
KR20160088958A (ko) | 2010-02-23 | 2016-07-26 | 루미넥스 코포레이션 | 일체화된 샘플 제조, 반응 및 검출을 위한 장치 및 방법 |
DE102010028703A1 (de) * | 2010-05-06 | 2011-11-10 | BSH Bosch und Siemens Hausgeräte GmbH | Kältegerät mit einem elektrischen Ventil |
DE102010025370A1 (de) * | 2010-06-28 | 2011-12-29 | Schaeffler Technologies Gmbh & Co. Kg | Fluidschaltventil, insbesondere Sitzventil |
DE102010027456A1 (de) * | 2010-07-08 | 2012-01-12 | Az Industrietechnik | Magnetimpulsventil |
KR101041839B1 (ko) * | 2010-10-06 | 2011-06-17 | 한국기계연구원 | 유량 조절부를 구비하는 맥동관 냉동기 |
JP5550601B2 (ja) * | 2011-04-27 | 2014-07-16 | 株式会社鷺宮製作所 | 温度膨張弁 |
EP2705130B1 (en) | 2011-05-04 | 2016-07-06 | Luminex Corporation | Apparatus and methods for integrated sample preparation, reaction and detection |
US20140107589A1 (en) * | 2012-10-17 | 2014-04-17 | Farid Amirouche | Electromagnetically actuated valve and related methods of use |
JP6023609B2 (ja) * | 2013-02-26 | 2016-11-09 | 株式会社リード | 飲料サーバシステムにおける飲料注出制御装置 |
US9490149B2 (en) * | 2013-07-03 | 2016-11-08 | Lam Research Corporation | Chemical deposition apparatus having conductance control |
CN104515335B (zh) * | 2013-10-08 | 2017-09-26 | 翰昂汽车零部件有限公司 | 车辆用热泵系统 |
GB2519171B (en) * | 2013-10-14 | 2016-02-17 | Redd & Whyte Ltd | Micro-Valve |
BR112017000230B1 (pt) * | 2014-07-07 | 2022-11-29 | Nanotech Analysis S.R.L.S. | Dispositivo de controle de fluxo gasoso, sistemas e métodos que empregam o dispositivo |
CN108825796A (zh) * | 2018-08-31 | 2018-11-16 | 韩沐霖 | 通液电磁阀 |
DE102019103164B4 (de) * | 2019-02-08 | 2021-05-27 | Az Vermögensverwaltung Gmbh & Co. Kg | Sicherheitsventil |
US11434122B1 (en) * | 2021-12-10 | 2022-09-06 | Cana Technology, Inc. | Dispense system for a fluid mixture dispensing device |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US744543A (en) * | 1903-04-18 | 1903-11-17 | Milton Henoch | Bicycle-support. |
DE2020334A1 (de) | 1970-04-25 | 1971-11-11 | Reifenhaeuser Kg | Kunststoffschneckenpresse |
US4524797A (en) * | 1982-02-25 | 1985-06-25 | Robert Bosch Gmbh | Solenoid valve |
US4744543A (en) | 1985-08-26 | 1988-05-17 | Siemens Aktiengesellschaft | Electro-magnetically actuated valve arrangement |
US4690371A (en) * | 1985-10-22 | 1987-09-01 | Innovus | Electromagnetic valve with permanent magnet armature |
US5529281A (en) * | 1994-08-24 | 1996-06-25 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space | Dual-latching solenoid-actuated valve assembly |
FR2729003B1 (fr) * | 1994-12-30 | 1997-03-21 | Crouzet Automatismes | Micro-electroaimant a circuit magnetique et bobine integres |
DE20203342U1 (de) * | 2002-02-19 | 2002-08-08 | AWECO APPLIANCE SYSTEMS GmbH & Co. KG, 88099 Neukirch | Bistabiles elektromagnetisches Ventil |
US6957655B2 (en) * | 2002-09-20 | 2005-10-25 | Advanced Neuromodulation Systems, Inc. | Apparatus for dosage control |
-
2003
- 2003-04-21 KR KR10-2003-0025004A patent/KR100528561B1/ko not_active IP Right Cessation
-
2004
- 2004-04-21 EP EP04009389A patent/EP1471264B1/en not_active Expired - Lifetime
- 2004-04-21 JP JP2004125583A patent/JP2004324886A/ja active Pending
- 2004-04-21 DE DE602004001906T patent/DE602004001906T2/de not_active Expired - Fee Related
- 2004-04-21 CN CNA2004100327700A patent/CN1540192A/zh active Pending
- 2004-04-21 US US10/828,212 patent/US7086245B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107191657A (zh) * | 2016-03-15 | 2017-09-22 | 盾安美斯泰克股份有限公司 | 基于mems的电磁阀 |
CN107191657B (zh) * | 2016-03-15 | 2020-04-14 | 盾安美斯泰克股份有限公司 | 基于mems的电磁阀 |
CN106740771A (zh) * | 2017-01-25 | 2017-05-31 | 天津英创汇智汽车技术有限公司 | 一种用于汽车电子稳定控制系统中的吸入阀 |
CN106740771B (zh) * | 2017-01-25 | 2023-07-25 | 天津英创汇智汽车技术有限公司 | 一种用于汽车电子稳定控制系统中的吸入阀 |
Also Published As
Publication number | Publication date |
---|---|
EP1471264B1 (en) | 2006-08-16 |
DE602004001906T2 (de) | 2007-09-06 |
US7086245B2 (en) | 2006-08-08 |
KR20040091248A (ko) | 2004-10-28 |
DE602004001906D1 (de) | 2006-09-28 |
US20040222395A1 (en) | 2004-11-11 |
EP1471264A1 (en) | 2004-10-27 |
KR100528561B1 (ko) | 2005-11-16 |
JP2004324886A (ja) | 2004-11-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1540192A (zh) | 控制质量流的阀装置及其制造方法和采用该装置的热交换器 | |
JP4061044B2 (ja) | 基板移動装置 | |
EP2015376B1 (en) | Method of controlling regulating hole | |
US7007917B2 (en) | Electromagnetic control valve | |
CN101055040A (zh) | 电动排气阀及血压计 | |
Deulin et al. | Mechanics and physics of precise vacuum mechanisms | |
JP2008536304A (ja) | 高強度の径方向の磁場を持つ磁気アクチュエータ | |
EP0672224A1 (en) | Magnetorheological valve and devices incorporating magnetorheological elements | |
EP3447404B1 (en) | Control valve | |
JP2005214059A (ja) | 可変容量圧縮機用制御弁 | |
CN1875453A (zh) | 等离子体处理衬底的设备和方法 | |
JP2019143727A (ja) | 流量制御弁および冷凍サイクルシステム | |
JP2007303645A (ja) | Mr流体バルブ | |
EP3783777A1 (en) | Motor operated valve | |
CN109648584A (zh) | 基于磁流体的软球机器人的控制平台 | |
KR101564341B1 (ko) | 자성 유체 씰링 장치 | |
CN101251204B (zh) | 气体流量调节阀 | |
CN108571596A (zh) | 电动阀以及冷冻循环系统 | |
WO2010084894A1 (ja) | 磁性光硬化樹脂で作成した回転構造体およびそれを使用した磁気駆動マイクロアクチュエータ | |
CN1643284A (zh) | 电磁阀 | |
KR20220024449A (ko) | 콤팩트한 컨트롤 밸브 | |
JP2004150657A (ja) | 膨張弁 | |
JP4563086B2 (ja) | 流体制御弁 | |
US20240125319A1 (en) | Piston unit for compressor | |
CN1211813C (zh) | 电磁驱动装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |