CN1505693A - 利用氟化酮作为蒸汽反应器的湿清洗剂 - Google Patents

利用氟化酮作为蒸汽反应器的湿清洗剂 Download PDF

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Publication number
CN1505693A
CN1505693A CNA028087798A CN02808779A CN1505693A CN 1505693 A CN1505693 A CN 1505693A CN A028087798 A CNA028087798 A CN A028087798A CN 02808779 A CN02808779 A CN 02808779A CN 1505693 A CN1505693 A CN 1505693A
Authority
CN
China
Prior art keywords
fluorinated ketone
fluorinated
ketone
reactor
cleaning agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA028087798A
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English (en)
Chinese (zh)
Inventor
S・克萨里
S·克萨里
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN1505693A publication Critical patent/CN1505693A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D11/00—Special methods for preparing compositions containing mixtures of detergents
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/175—Saturated compounds containing keto groups bound to acyclic carbon atoms containing ether groups, groups, groups, or groups
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
    • C07C45/78—Separation; Purification; Stabilisation; Use of additives
    • C07C45/85—Separation; Purification; Stabilisation; Use of additives by treatment giving rise to a chemical modification
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
    • C07C49/167—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen containing only fluorine as halogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Detergent Compositions (AREA)
  • Chemical Vapour Deposition (AREA)
CNA028087798A 2001-04-24 2002-02-12 利用氟化酮作为蒸汽反应器的湿清洗剂 Pending CN1505693A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/841,340 US6394107B1 (en) 2001-04-24 2001-04-24 Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components
US09/841,340 2001-04-24

Publications (1)

Publication Number Publication Date
CN1505693A true CN1505693A (zh) 2004-06-16

Family

ID=25284615

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028087798A Pending CN1505693A (zh) 2001-04-24 2002-02-12 利用氟化酮作为蒸汽反应器的湿清洗剂

Country Status (6)

Country Link
US (1) US6394107B1 (https=)
EP (1) EP1381709A1 (https=)
JP (1) JP4160403B2 (https=)
KR (1) KR20030090784A (https=)
CN (1) CN1505693A (https=)
WO (1) WO2002086191A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084353A (zh) * 2011-10-31 2013-05-08 朗姆研究公司 铝质等离子体室部件的清洁方法
CN103597565A (zh) * 2011-05-24 2014-02-19 施耐德电器工业公司 十氟-2-甲基丁-3-酮和载气的混合物作为中电压中的电绝缘和/或灭弧介质

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US6540930B2 (en) * 2001-04-24 2003-04-01 3M Innovative Properties Company Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
US6423673B1 (en) * 2001-09-07 2002-07-23 3M Innovation Properties Company Azeotrope-like compositions and their use
JP3958080B2 (ja) * 2002-03-18 2007-08-15 東京エレクトロン株式会社 プラズマ処理装置内の被洗浄部材の洗浄方法
US6923278B2 (en) * 2002-05-06 2005-08-02 Pride Mobility Products Corporation Adjustable anti-tip wheels for power wheelchair
US7250114B2 (en) * 2003-05-30 2007-07-31 Lam Research Corporation Methods of finishing quartz glass surfaces and components made by the methods
US20050011859A1 (en) * 2003-07-15 2005-01-20 Bing Ji Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications
US20050161061A1 (en) * 2003-09-17 2005-07-28 Hong Shih Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system
US7252780B2 (en) * 2004-05-26 2007-08-07 E.I. Du Pont De Nemours And Company 1,1,1,2,2,4,5,5,5-nonafluoro-4-(trifluoromethyl)-3-pentanone refrigerant and heat transfer compositions comprising a fluoroether
JP4573874B2 (ja) 2005-07-29 2010-11-04 三井・デュポンフロロケミカル株式会社 ハイドロフルオロカーボンを用いた放射性物質の除染用溶剤組成物及び除染材、並びに放射性物質の除染方法
US7385089B2 (en) * 2005-12-23 2008-06-10 3M Innovative Properties Company Fluorochemical ketone compounds and processes for their use
ES2642570T3 (es) * 2006-02-28 2017-11-16 The Chemours Company Fc, Llc Composiciones azeotrópicas que comprenden compuestos fluorados para aplicaciones de limpieza
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
JP4884180B2 (ja) * 2006-11-21 2012-02-29 東京エレクトロン株式会社 基板処理装置および基板処理方法
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
BRPI0924862A2 (pt) 2009-06-12 2016-08-23 Abb Technology Ag meio de isolação dielétrica
DE202009018239U1 (de) 2009-06-12 2011-06-01 Abb Technology Ag Schalteinrichtung mit dielektrischem Isolationsmedium
DE202009018213U1 (de) 2009-06-12 2011-06-09 Abb Technology Ag Dielektrisches Isolationsmedium
DE202009009305U1 (de) 2009-06-17 2009-11-05 Ormazabal Gmbh Schalteinrichtung für Mittel-, Hoch- oder Höchstspannung mit einem Füllmedium
WO2011029488A1 (en) 2009-09-11 2011-03-17 Abb Research Ltd Transformer comprising a heat pipe
ES2540817T3 (es) 2009-10-19 2015-07-13 Abb Technology Ag Transformador
KR20130128433A (ko) 2010-12-14 2013-11-26 에이비비 리써치 리미티드 유전성 절연 매질
DK2652752T3 (en) 2010-12-14 2016-01-11 Abb Technology Ag Dielectric INSULATION MEDIUM
RU2567754C2 (ru) * 2010-12-16 2015-11-10 Абб Текнолоджи Аг Диэлектрическая изолирующая среда
RU2472767C1 (ru) * 2011-11-25 2013-01-20 Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" Способ получения перфторэтилизопропилкетона
WO2013087700A1 (en) 2011-12-13 2013-06-20 Abb Technology Ag Sealed and gas insulated high voltage converter environment for offshore platforms
RU2607897C1 (ru) * 2015-09-10 2017-01-11 Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" Способ получения перфторэтилизопропилкетона
US20170282220A1 (en) * 2016-04-01 2017-10-05 Tyco Fire & Security Gmbh Method and System for Liquid Cleaning of Smoke Sensor Heads
EP3689980A1 (en) * 2019-01-31 2020-08-05 3M Innovative Properties Company Fluoropolymer compositions

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185734A (en) * 1960-10-25 1965-05-25 Du Pont Novel polyfluoro-substituted ketones and their preparation from polyfluoro acid fluorides
NL7711424A (nl) * 1976-10-23 1978-04-25 Hoechst Ag Werkwijze voor de bereiding van fluor bevattende ketonen.
WO1990006296A1 (en) * 1988-12-02 1990-06-14 Minnesota Mining And Manufacturing Company Direct fluorination process for making perfluorinated organic substances
JP2763083B2 (ja) * 1993-06-01 1998-06-11 工業技術院長 フッ素系洗浄溶剤組成物
US5466877A (en) * 1994-03-15 1995-11-14 Minnesota Mining And Manufacturing Company Process for converting perfluorinated esters to perfluorinated acyl fluorides and/or ketones
JP2869432B2 (ja) * 1996-10-04 1999-03-10 工業技術院長 溶剤及びそれを用いる物品表面の清浄化方法
JP2952414B2 (ja) * 1997-09-22 1999-09-27 工業技術院長 溶剤及びそれを用いる物品表面の清浄化方法
US5998671A (en) * 1998-05-15 1999-12-07 Alliedsignal Inc. Fluorinated ketones and method for making same
EP1083219B1 (en) * 1998-05-26 2006-08-30 Tokyo Electron Limited Cleaning fluid and cleaning method for component of semiconductor-treating apparatus
JP3141325B2 (ja) * 1999-01-14 2001-03-05 工業技術院長 溶剤およびそれを用いる物品表面の清浄化方法
JP4322346B2 (ja) * 1999-02-26 2009-08-26 東京エレクトロン株式会社 成膜装置のクリーニング方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103597565A (zh) * 2011-05-24 2014-02-19 施耐德电器工业公司 十氟-2-甲基丁-3-酮和载气的混合物作为中电压中的电绝缘和/或灭弧介质
CN103597565B (zh) * 2011-05-24 2017-01-18 施耐德电器工业公司 十氟‑2‑甲基丁‑3‑酮和载气的混合物作为中电压中的电绝缘和/或灭弧介质
CN103084353A (zh) * 2011-10-31 2013-05-08 朗姆研究公司 铝质等离子体室部件的清洁方法
CN103084353B (zh) * 2011-10-31 2016-06-08 朗姆研究公司 铝质等离子体室部件的清洁方法

Also Published As

Publication number Publication date
WO2002086191A1 (en) 2002-10-31
JP2005507954A (ja) 2005-03-24
US6394107B1 (en) 2002-05-28
KR20030090784A (ko) 2003-11-28
EP1381709A1 (en) 2004-01-21
JP4160403B2 (ja) 2008-10-01

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