CN1476065A - Image sensor packaging method - Google Patents

Image sensor packaging method Download PDF

Info

Publication number
CN1476065A
CN1476065A CNA031297544A CN03129754A CN1476065A CN 1476065 A CN1476065 A CN 1476065A CN A031297544 A CNA031297544 A CN A031297544A CN 03129754 A CN03129754 A CN 03129754A CN 1476065 A CN1476065 A CN 1476065A
Authority
CN
China
Prior art keywords
image sensor
pcb circuit
circuit substrate
crystal grain
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA031297544A
Other languages
Chinese (zh)
Inventor
王鸿仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CNA031297544A priority Critical patent/CN1476065A/en
Publication of CN1476065A publication Critical patent/CN1476065A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Solid State Image Pick-Up Elements (AREA)

Abstract

The method includes setting image transducer on a PCB circuit base board which has conductive layer and a window on one surface, making window specification similar to sensing size of transducer crystal grain, forming multipin on the conductive layer, coverting electric-connection media at weld pad position and partial pin, joining crystal grain with PCB circuit base board through SMT preparation to form electric-connection, cleaning surface of image transducer crystal grain to remove odd parts, using glass and glue to seal and cover crystal grain in crystal grain sensing region and filling glue material arround crystal grain and glass to form air tightness and to finish packaging.

Description

The image sensor package method
Technical field
The present invention relates to a kind of CMOS/CCD (complementary metal oxide semiconductor/electric charge or photoelectric coupling element) image sensor package method.
Background technology
Common image sensor (Image sensor) IC mounting technology is pottery assembling (CLCC), Figure 15, plastic base assembling (PLCC) shown in Figure 16, L/F plastics ejaculation assemblings (KLCC) shown in Figure 17, the main common trait of these mounting technologies is to carry out routing (Wire bonding) again after crystal grain is inserted crystal cup (Die pad), yet extensively reach under the leading of general consumption electronic products in the image sensor application, volume restrictions to assembly cost and assembly more and more is tending towards strict, so there are the following problems for aforementioned mounting technology;
(1) pottery assembling (CLCC) required substrate is burning technology production and is difficult for causing assembly cost too high, only is used on the product that requires high power and high-reliability usually.
(2) plastic base assembling shown in Figure 15 (PLCC) needs to penetrate (Pre-mold) side wall 80a at pcb board; the substrate 80b that the L/F plastics penetrate assembling (KLCC) needs to penetrate with lead frame; these two kinds of assembling method processing procedures need to be equipped with in addition jetting mold; so processing procedure is numerous and diverse and the only ceramic assembling of cost is low; and both packaging body poor heat radiation easily cause crystal grain or the product warpage (Warpage) and the problem of making moist, and cause the reliability of product relatively poor.
(3) plastic base shown in Figure 16 assembles (PLCC), and its substrate mainly is to fold another pcb board of frame again and glue together to form above the pcb board 81b of tool wiring, so its processing procedure is complicated, and can cause two-layer pcb board to peel off because of gluing together flaw.
(4) plastic base assembling (PLCC) and L/F plastics penetrate the processing procedure that assembling increases lead frame (Leadfram) 81,82, though but automation is made in a large number, but need to consider that lead frame precision overcomes the reliability issues that routing engages, and be difficult for being applied in the Chip Packaging of high I/O.
All need carry out routing (Wire bonding) based on aforementioned mounting technology, except increasing equipment, be difficult for enhancing productivity, and the demand that is subject to substrate makes its final packaging body volume excessive, so for mobile phone, PDA, the mobile electronic product of network camera etc. and so on still belongs to excessive, so, the trend of mounting technology is towards covering crystalline substance (Flip chip) packaged type at present, this kind processing procedure needs to be provided with long projection (Bump) on wafer (Wafer), engage with circuit junction on the substrate again, therefore need the crystal grain end face towards substrate, so limited the prerequisite that the sensing area of image sensor must be opened, so, have the best opering characteristic of electric apparatus though cover crystalline substance, good and the less package dimension of crystal grain heat radiation, this technology still has difficulty in the application of image sensor, as shown in figure 18, be existing a kind of image sensor crystal covering type assembly structure 9, glass plate 91 inner faces of its top are to utilize light shield etching technique framework to go out circuit 910, so its processing procedure is rather complicated and may make moist etc. and to influence its encapsulating products reliability because of glass plate and intercrystalline filler shortcoming influence optical characteristics or crystal grain.
Summary of the invention
In order to overcome the above-mentioned shortcoming that existing image sensor package method exists, the invention provides a kind of image sensor package method of exempting from lead frame, can finish assembling with SMT (surface mount) assembly equipment, with simplification required plant equipment of processing procedure and lifting production reliability, and encapsulation volume is significantly reduced more to meet the compact market demand of product.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of image sensor package method, it is characterized in that, may further comprise the steps: at least one surface of a PCB circuit substrate has conductive layer, it is offered a window is through to another correspondence from the surface of tool conductive layer surface, the sensing area size of the specification of window and an image sensor is close, and is covered with veil around the wall edge of window; This PCB circuit substrate is carried out light shield etching (Etching) make this conductive layer form a plurality of pins (Lead), pin and outer pin two positions in each pin (Lead) comprises in window side; Covering tool conductivity and connecting medium in the pin part in each at the PCB circuit substrate; One image sensor crystal grain (Chip) is being covered the electric connection media location with pin in its weld pad correspondence to be engaged to the PCB circuit substrate and to constitute electric connection with covering brilliant method; Clean image sensor grain surface (Spin dry) with removing residues; Around the crystal grain and and the PCB circuit substrate between slit filling (Underfill) glue material airtight so as to constituting; Capping is glued together with a glass in corresponding image sensor crystal grain position.
Aforesaid image sensor package method, wherein glass is another the surperficial the window's position of PCB circuit substrate that is covered in corresponding crystal grain.
Aforesaid image sensor package method, wherein the crystal grain induction zone of corresponding image sensor is with the capping of glass gummed.
Aforesaid image sensor package method wherein is covered with the veil mode around the wall edge of window and comprises and coat welding resisting layer (Solder mask) or gold-plated covering.
Aforesaid image sensor package method, wherein the PCB circuit substrate in each pin to cover tool conductivity connection medium be elargol, the mode of covering is with the coating of wire mark method, dotting glue method or needle-like tool transfer printing, toasts joint and put to continue after on the interior pin at image sensor crystal grain.
Aforesaid image sensor package method, wherein the PCB circuit substrate in each pin to cover tool conductivity connection medium be tin cream, the mode of covering be with the wire mark method apply, with dotting glue method or needle-like tool transfer printing, carry out reflow (Reflow) joint and image sensor crystal grain places in, continue after on the pin.
Aforesaid image sensor package method wherein carries out light shield etching (Etching) at this PCB circuit substrate and makes this conductive layer after window side forms a plurality of pins (Lead), coats welding resisting layer (Solder mask) at least between each pin (Lead).
Aforesaid image sensor package method, wherein slit filling glue material (Underfill) is a UV glue around the crystal grain and between the PCB circuit substrate, the glass that is covered in the window's position is to go filling glue material with UV glue point glue rear seal-cover again at glass periphery, and UV glueds joint and continuously hardens with ultraviolet irradiation everywhere.
Aforesaid image sensor package method wherein utilizes a machine or SMT equipment that glass is covered in PCB circuit substrate the window's position.
Aforesaid image sensor package method, wherein glass gives plated film earlier, and one side is plated AR film another side plating IR film.
Aforesaid image sensor package method, wherein PCB circuit substrate both side surface all has conductive layer, make this PCB circuit substrate carry out after the light shield etching (Etching) wherein a conductive layer window side form a plurality of in pin (Inner lead), in each pin be electrically connected to another conductive layer the window side etching form a plurality of outside pin (Out lead).
The invention has the beneficial effects as follows, can finish assembling,, and encapsulation volume is significantly reduced more to accord with the demands of the market with simplification required plant equipment of processing procedure and lifting production reliability with SMT (surface mount) assembly equipment.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is required PCB circuit substrate schematic diagram in the package method of the present invention.
Fig. 2 opens the schematic diagram of a window for PCB circuit substrate in the package method of the present invention.
Fig. 3 is the schematic diagram that forms pin in the package method of the present invention after the etching of PCB circuit substrate conductive layer light shield.
Fig. 4 is covering the front view that electrically connects medium for the pin of PCB circuit substrate in the package method of the present invention.
Fig. 4 A is covering the vertical view that electrically connects medium for the pin of PCB circuit substrate in the package method of the present invention.
Fig. 5 is engaged to the front view of PCB circuit substrate the window's position for an image sensor crystal grain in the package method of the present invention.
Fig. 5 A is engaged to the vertical view of PCB circuit substrate the window's position for an image sensor crystal grain in the package method of the present invention.
Fig. 6 be behind hookup 5 processing procedures around the crystal grain schematic diagram of filling glue material.
Fig. 7 is the schematic diagram of PCB circuit substrate another side the window's position in the package method of the present invention with the capping of glass gummed.
The schematic diagram of one of image sensor embodiment that Fig. 8 finishes for package method of the present invention.
Fig. 9 is applied in image sensor shown in Figure 8 in the schematic diagram of one printed circuit module.
Two schematic diagrames of the image sensor embodiment that Figure 10 finishes for package method of the present invention.
Three schematic diagrames of the image sensor embodiment that Figure 11 finishes for package method of the present invention.
Four schematic diagrames of the image sensor embodiment that Figure 12 finishes for package method of the present invention.
Five schematic diagrames of the image sensor embodiment that Figure 13 finishes for package method of the present invention.
Six schematic diagrames of the image sensor embodiment that Figure 14 finishes for package method of the present invention.
Figure 15, Figure 16 are the schematic diagram of existing plastic base assembling (PLCC) image sensor.
Figure 17 penetrates the schematic diagram of assembling (KLCC) image sensor for existing C/F plastics.
Figure 18 is the existing schematic diagram that covers crystalline substance (Flip chip) encapsulation image sensor.
Embodiment
Cooperate the flow process of Fig. 1, comprising to explanation shown in Figure 8 image sensor package method of the present invention:
Step 1: as shown in Figure 1 and Figure 2, a window 12 is offered on PCB circuit substrate 10 surfaces that have a conductive layer 11 on a surface, this window is through to the surface of another correspondence of PCB circuit substrate, the specification of window is comparable to the sensing area size (shown in Fig. 5 label 21) of an image sensor, and coats veils 121 such as welding resisting layer (Solder mask) or gold-plated covering around the wall edge of window and fall into the image sensor grain surface to prevent the dust fall after the substrate processing.
Step 2: as shown in Figure 3, aforementioned PCB circuit substrate is carried out light shield etching (Etching) make this conductive layer form a plurality of pins (Lead) 110, pin 110a and outer pin 110b two positions in each pin is set at and comprises in window side.
Step 3: as shown in Figure 4, at least coat welding resisting layer (Solder mask) between each pin (Lead) at the PCB circuit substrate, carry out each interior pin part according to image sensor crystal grain (Chip) bond pad locations again and covering tool conductivity connection medium 13, dielectric material comprises elargol, tin cream or has the joint glue material of conductive characteristic, and the part is covering that mode can utilize then that the wire mark method applies, needle-like tool transfer printing or form a solder joint at interior pin with dotting glue method.
Step 4: as shown in Figure 5, with SMT equipment pin in the corresponding PCB circuit substrate of one image sensor crystal grain (Chip), 20 weld pads is covered electric connection medium 13 positions and covering brilliant method joint formation electrically connect, and in image sensor crystal grain places on the pin after, looking then and electrically connecting medium is that elargol or tin cream are selected to toast and engaged or reflow (Reflow) engages.
Step 5: with centrifugal cleaning (Spin dry) with image sensor grain surface removing residues.
Step 6: as shown in Figure 6, around the crystal grain and and the PCB circuit substrate between slit filling (Underfill) UV glue material 201 airtight to constitute, harden with ultraviolet irradiation then.
Step 7: as shown in Figure 7, around another surface window 12 of the PCB circuit substrate of corresponding crystal grain with utilizing last slice machine or SMT equipment behind the UV glue point glue again with a glass 3 capping the window's positions, filling UV glue material 31 is airtight to constitute around glass then, hardens with ultraviolet irradiation again.
Figure 8 shows that the image sensor structure of finishing according to aforementioned package method of the present invention, and can find out significantly by aforementioned processing procedure, this image sensor utilizes the PCB circuit substrate to replace plastics and penetrates substrate, light shield etching conductive layer is made pin to replace old lead frame, so having equally, the encapsulation quality covers the best opering characteristic of electric apparatus that brilliant method possesses, advantages such as the good and less package dimension of crystal grain heat radiation, compare with other image sensor mounting technology, the present invention reduces the packaging cost except designs simplification, also outside device requirement or committee, reduce many especially on the time-histories of foundry, compare with general Flip Chip, also not be used in the crystal grain upper surface and carry out filling (Underfill), more guarantee production reliability.
In application facet, the image sensor that package method of the present invention is finished can utilize the outer pin of its PCB circuit substrate to be fixed in printed circuit board (PCB) in the surface mount mode, printed circuit board (PCB) 4 as shown in Figure 9 can be reserved an opening 41, and lens mount (Holder) 51 then can be located at outside the PCB circuit substrate of image sensor in the opening so the crystal grain of image sensor can be embedded.
In addition, the image sensor packaged glass can give plated film earlier in its previous operations, one side is plated the AR film, another side plating IR film, the height of lens group can increase light and run through rate and reduce the light reflection preventing that strong illumination from making the white mist of image, preventing ghost, thereby omit filters in the lens group 5 are set, so can reduce again, and then significantly reducing the printed circuit board (PCB) whole height, this has remarkable benefit for the application that improves subsequent product.
Because package method of the present invention can all have conductive layer (shown in Figure 10,11) in PCB circuit substrate both side surface, make this PCB circuit substrate carry out after the light shield etching (Etching) wherein a conductive layer window side form a plurality of in pin 111a, in each pin be electrically connected to another conductive layer the window side etching form a plurality of outside pin 111b, so can utilize double-layer printing circuit board in application facet.
Figure 12 shows that another image sensor package, mainly be to utilize package method of the present invention to change wherein step, after discrepancy is that crystal grain sensing area 21 peripheries of image sensor are coated with UV glue, 6 in glass is placed into and directly binds in the PCB circuit substrate window at grain surface, behind the peripheral filling UV of glass glue 61, carry out UV irradiation curing again and finish the gummed capping, this way can be omitted thickness of glass especially and take up space, and is applicable to the electronic product of mobile phone and so on.
Glass shown in Figure 13,14 is placed into equally and directly binds in the PCB circuit substrate window at grain surface, difference is that PCB circuit substrate both side surface all has conductive layer, wherein a conductive layer window side form a plurality of in pin 12a, 13a, pin is electrically connected to a plurality of outer pin 12b, the 13b that another conductive layer forms in the window side etching in each, and these two kinds of pattern image sensors can supply the position of sticking together of subsequent applications carry out different choice.

Claims (11)

1. an image sensor package method is characterized in that, may further comprise the steps:
At least one surface of one PCB circuit substrate has conductive layer, and it is offered a window is through to another correspondence from the surface of tool conductive layer surface, and the sensing area size of the specification of window and an image sensor is close, and is covered with veil around the wall edge of window;
This PCB circuit substrate is carried out the light shield etching make this conductive layer form a plurality of pins, pin and outer pin two positions in each pin comprises in window side;
Covering tool conductivity and connecting medium in the pin part in each at the PCB circuit substrate;
One image sensor crystal grain is being covered the electric connection media location with pin in its weld pad correspondence to be engaged to the PCB circuit substrate and to constitute electric connection with covering brilliant method;
Clean the image sensor grain surface with removing residues;
Around the crystal grain and and the PCB circuit substrate between slit filling glue material airtight so as to constituting;
Capping is glued together with a glass in corresponding image sensor crystal grain position.
2. image sensor package method according to claim 1 is characterized in that described glass is another the surperficial the window's position of PCB circuit substrate that is covered in corresponding crystal grain.
3. image sensor package method according to claim 1, the crystal grain induction zone that it is characterized in that described corresponding image sensor is with the capping of glass gummed.
4. according to claim 2 or 3 described image sensor package methods, it is characterized in that being covered with around the wall edge of described window the veil mode and comprise and coat welding resisting layer or gold-plated covering.
5. image sensor package method according to claim 4, it is characterized in that it is elargol that each interior pin of described PCB circuit substrate is covering tool conductivity connection medium, the mode of covering is with the coating of wire mark method, dotting glue method or needle-like tool transfer printing, toasts joint and put to continue after on the interior pin at image sensor crystal grain.
6. image sensor package method according to claim 4, it is characterized in that it is tin cream that each interior pin of described PCB circuit substrate is covering tool conductivity connection medium, the mode of covering be with the wire mark method apply, with dotting glue method or needle-like tool transfer printing, carry out the reflow joint and image sensor crystal grain places in, continue after on the pin.
7. according to claim 1,5 or 6 described image sensor package methods, it is characterized in that carrying out the light shield etching at this PCB circuit substrate makes this conductive layer after window side forms a plurality of pins, coats welding resisting layer at least between each pin.
8. image sensor package method according to claim 7, it is characterized in that around the described crystal grain and the PCB circuit substrate between slit filling glue material be a UV glue, the glass that is covered in the window's position is to go filling glue material with UV glue point glue rear seal-cover again at glass periphery, and UV glueds joint and continuously hardens with ultraviolet irradiation everywhere.
9. image sensor package method according to claim 8 is characterized in that utilizing a machine or SMT equipment that glass is covered in PCB circuit substrate the window's position.
10. image sensor package method according to claim 9 is characterized in that described glass gives plated film earlier, and one side is plated AR film another side plating IR film.
11. according to claim 1 or 10 described image sensor package methods, it is characterized in that described PCB circuit substrate both side surface all has conductive layer, make this PCB circuit substrate carry out after the light shield etching wherein a conductive layer window side form a plurality of in pin, in each pin be electrically connected to another conductive layer the window side etching form a plurality of outside pin.
CNA031297544A 2003-05-15 2003-05-15 Image sensor packaging method Pending CN1476065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA031297544A CN1476065A (en) 2003-05-15 2003-05-15 Image sensor packaging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA031297544A CN1476065A (en) 2003-05-15 2003-05-15 Image sensor packaging method

Publications (1)

Publication Number Publication Date
CN1476065A true CN1476065A (en) 2004-02-18

Family

ID=34153661

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA031297544A Pending CN1476065A (en) 2003-05-15 2003-05-15 Image sensor packaging method

Country Status (1)

Country Link
CN (1) CN1476065A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100359699C (en) * 2004-12-30 2008-01-02 南亚电路板股份有限公司 Method for fabricating image sensor in CMOS
CN100438087C (en) * 2005-05-08 2008-11-26 日月光半导体制造股份有限公司 Photoelectric element package process
CN101221930B (en) * 2007-01-10 2010-06-09 日月光半导体制造股份有限公司 Chip packaging structure and its packaging method
CN102201376A (en) * 2010-03-22 2011-09-28 精材科技股份有限公司 Optical cover plate with improved solder mask dam on galss for image sensor package and fabrication method thereof
CN103579277A (en) * 2013-11-14 2014-02-12 华进半导体封装先导技术研发中心有限公司 Packaging structure and method based on inverted imaging sensor chips
CN109873004A (en) * 2019-03-01 2019-06-11 烟台睿创微纳技术股份有限公司 A kind of infrared imaging detection element and preparation method thereof, a kind of infrared detecting set

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100359699C (en) * 2004-12-30 2008-01-02 南亚电路板股份有限公司 Method for fabricating image sensor in CMOS
CN100438087C (en) * 2005-05-08 2008-11-26 日月光半导体制造股份有限公司 Photoelectric element package process
CN101221930B (en) * 2007-01-10 2010-06-09 日月光半导体制造股份有限公司 Chip packaging structure and its packaging method
CN102201376A (en) * 2010-03-22 2011-09-28 精材科技股份有限公司 Optical cover plate with improved solder mask dam on galss for image sensor package and fabrication method thereof
TWI495113B (en) * 2010-03-22 2015-08-01 Xintec Inc Optical cover plate with improved solder mask dam on galss for image sensor package and fabrication method thereof
CN102201376B (en) * 2010-03-22 2015-10-14 精材科技股份有限公司 The optics cover plate, image sensing part packaging body and preparation method thereof of encapsulation
US9653500B2 (en) 2010-03-22 2017-05-16 Xintec Inc. Optical cover plate with improved solder mask dam on glass for image sensor package and fabrication method thereof
CN103579277A (en) * 2013-11-14 2014-02-12 华进半导体封装先导技术研发中心有限公司 Packaging structure and method based on inverted imaging sensor chips
CN103579277B (en) * 2013-11-14 2016-02-03 华进半导体封装先导技术研发中心有限公司 Based on encapsulating structure and the method for packing of upside-down mounting image sensor chip
CN109873004A (en) * 2019-03-01 2019-06-11 烟台睿创微纳技术股份有限公司 A kind of infrared imaging detection element and preparation method thereof, a kind of infrared detecting set

Similar Documents

Publication Publication Date Title
CN1193583C (en) Image sensor module and making method thereof
EP0790652B1 (en) Solid-state image pickup device and its manufacture
US6737292B2 (en) Method of fabricating an image sensor module at the wafer level and mounting on circuit board
JP3956199B2 (en) Manufacturing method of solid-state imaging device and mask used in the manufacturing method
CN101075624A (en) Structure and method for packing crystal-coated viewfinder module
CN1719590A (en) The ultrathin module and the manufacture method thereof that are used for semiconductor device
CN101262002A (en) Image sensor package with grain receiving opening and method of the same
CN1591884A (en) Manufacturing method of solid-state image sensing device
CN101056358A (en) Camera module
TWI755718B (en) Lens packaging module and method for manufacturing the same
CN1921125A (en) Packaging structure for optical sensing assembly and method of manufacture
CN1450651A (en) Image sensor package structure and image taking module using said sensor
CN1873992A (en) Package of image sensor, and packaging procedure
JPH02278872A (en) Image sensor
CN1476065A (en) Image sensor packaging method
CN110071129A (en) Image sensor apparatus and correlation technique with flexible interconnection layer
US20040070076A1 (en) Semiconductor chip package for image sensor and method of the same
CN1649163A (en) Semiconductor element for solid state image sensing device and solid state image sensing device using the same
CN1921126A (en) Photo-sensor packaging structure
CN1921128A (en) Packaging structure for optical sensing chip
CN2648606Y (en) Image sensor chip size package structure
TW566067B (en) Package method of CMOS/CCD image sensor
CN1178288C (en) Method for packaging thin semiconductor device with reversely mounted chip
KR100840153B1 (en) Camera module
TW200423305A (en) Image sensor package and image pickup module using the image sensor

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
AD01 Patent right deemed abandoned
C20 Patent right or utility model deemed to be abandoned or is abandoned