CN1336785A - X射线检测板 - Google Patents
X射线检测板 Download PDFInfo
- Publication number
- CN1336785A CN1336785A CN01121679A CN01121679A CN1336785A CN 1336785 A CN1336785 A CN 1336785A CN 01121679 A CN01121679 A CN 01121679A CN 01121679 A CN01121679 A CN 01121679A CN 1336785 A CN1336785 A CN 1336785A
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- CN
- China
- Prior art keywords
- mentioned
- ray
- out console
- electrode film
- transport layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title description 3
- 238000001514 detection method Methods 0.000 claims abstract description 138
- 239000011669 selenium Substances 0.000 claims abstract description 44
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 35
- IHBMMJGTJFPEQY-UHFFFAOYSA-N sulfanylidene(sulfanylidenestibanylsulfanyl)stibane Chemical compound S=[Sb]S[Sb]=S IHBMMJGTJFPEQY-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 230000005855 radiation Effects 0.000 claims description 22
- 238000009413 insulation Methods 0.000 claims description 19
- 210000000352 storage cell Anatomy 0.000 claims description 19
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000012163 sequencing technique Methods 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 239000000969 carrier Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 102
- 230000000052 comparative effect Effects 0.000 description 34
- 239000010409 thin film Substances 0.000 description 15
- 230000014509 gene expression Effects 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 4
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- QWUZMTJBRUASOW-UHFFFAOYSA-N cadmium tellanylidenezinc Chemical compound [Zn].[Cd].[Te] QWUZMTJBRUASOW-UHFFFAOYSA-N 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 229910004611 CdZnTe Inorganic materials 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 229910001370 Se alloy Inorganic materials 0.000 description 1
- 229910001215 Te alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 208000012839 conversion disease Diseases 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000010200 validation analysis Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/02—Dosimeters
- G01T1/10—Luminescent dosimeters
- G01T1/105—Read-out devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14676—X-ray, gamma-ray or corpuscular radiation imagers
Landscapes
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
第1电极膜 | 电荷传输层 | X射线检测层 | 测定结果 | ||||||
暗电流(PA/cm2) | 信号电流(nA/cm2) | 下降时间(秒) | 上升时间(秒) | ||||||
材料 | 材料 | 膜厚(μm) | 电阻率(Ω·cm) | 膜厚(μm) | |||||
第1实施例 | ITO | Sb2S1 | 3.0 | 108 | 500 | 10 | 80 | 0.05 | 0.05 |
第2实施例 | 金 | Sb2S3 | 3.0 | 108 | 500 | 10 | 80 | 0.05 | 0.05 |
第3实施例 | 铝 | Sb2S3 | 3.0 | 108 | 500 | 10 | 80 | 0.06 | 0.05 |
第4实施例 | ITO | Sb2S3 | 3.0 | 108 | 1000 | 10 | 80 | 0.05 | 0.05 |
第5实施例 | ITO | Sb2S3 | 0.01 | 108 | 500 | 50 | 80 | 0.05 | 0.05 |
第6实施例 | ITO | Sb2S3 | 40.0 | 108 | 500 | 5 | 70 | 0.05 | 0.05 |
第7实施例 | ITO | CdZnTe | 30 | 1011 | 500 | 20 | 80 | 0.05 | 0.05 |
第1比较实施例 | ITO | 无 | - | - | 500 | 2000 | 80 | 0.05 | 0.05 |
第2比较实施例 | 金 | 无 | - | - | 500 | 5000 | 80 | 0.05 | 0.05 |
第3比较实施例 | 铝 | 无 | - | - | 500 | 1000 | 80 | 0.05 | 0.05 |
第4比较实施例 | ITO | CdS | 3.0 | 80 | 500 | 800 | 80 | 0.08 | 0.08 |
第5比较实施例 | ITO | CeO2 | 30 | 105 | 500 | 300 | 80 | 0.50 | 0.50 |
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP90992/2000 | 2000-03-29 | ||
JP2000090992A JP2001284628A (ja) | 2000-03-29 | 2000-03-29 | X線検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1336785A true CN1336785A (zh) | 2002-02-20 |
CN1157796C CN1157796C (zh) | 2004-07-14 |
Family
ID=18606513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB011216794A Expired - Fee Related CN1157796C (zh) | 2000-03-29 | 2001-03-28 | X射线检测板 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6642534B2 (zh) |
EP (1) | EP1139429A3 (zh) |
JP (1) | JP2001284628A (zh) |
KR (1) | KR100687512B1 (zh) |
CN (1) | CN1157796C (zh) |
CA (1) | CA2342648A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020143484A1 (zh) * | 2019-01-11 | 2020-07-16 | 惠科股份有限公司 | 感光器件、x射线探测器及显示装置 |
CN114724735A (zh) * | 2022-06-09 | 2022-07-08 | 中国工程物理研究院激光聚变研究中心 | 一种icf中x射线图像信息准在线读取系统和读取方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003101060A (ja) * | 2001-09-20 | 2003-04-04 | National Institute Of Advanced Industrial & Technology | 有機光電流増幅素子及びその製造方法 |
JP2005101193A (ja) * | 2003-09-24 | 2005-04-14 | Shimadzu Corp | 放射線検出器 |
US7589326B2 (en) * | 2003-10-15 | 2009-09-15 | Varian Medical Systems Technologies, Inc. | Systems and methods for image acquisition |
WO2006076788A1 (en) * | 2005-01-18 | 2006-07-27 | University Of Saskatchewan | Dark current reduction in metal/a-se/metal structures for application as an x-ray photoconductor layer in digital image detectors |
EP1780800A3 (en) * | 2005-11-01 | 2007-07-11 | Fujifilm Corporation | Photoconductive layer forming radiation image taking panel and radiation image taking panel |
JP2008227346A (ja) * | 2007-03-15 | 2008-09-25 | Fujifilm Corp | 放射線検出装置 |
US8237126B2 (en) * | 2007-08-17 | 2012-08-07 | Csem Centre Suisse D'electronique Et De Mictrotechnique Sa | X-ray imaging device and method for the manufacturing thereof |
US7608833B2 (en) * | 2007-09-28 | 2009-10-27 | Fujifilm Corporation | Radiation image detector |
JP5070031B2 (ja) * | 2007-12-25 | 2012-11-07 | 富士フイルム株式会社 | 放射線画像検出器 |
JP2009164215A (ja) * | 2007-12-28 | 2009-07-23 | Fujifilm Corp | 放射線画像検出装置および放射線画像検出器の製造方法 |
JP5235119B2 (ja) * | 2008-09-29 | 2013-07-10 | 富士フイルム株式会社 | 放射線画像検出器 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5335420A (en) * | 1976-09-14 | 1978-04-01 | Sony Corp | Pick up tube target |
JPS5670673A (en) * | 1979-11-14 | 1981-06-12 | Hitachi Ltd | Photoelectric converter |
JPS56146143A (en) * | 1980-04-15 | 1981-11-13 | Ricoh Co Ltd | Electrophotographic receptor |
JPS57833A (en) * | 1980-06-04 | 1982-01-05 | Ricoh Co Ltd | Target for image pick-up tube |
JPS60140636A (ja) * | 1983-12-28 | 1985-07-25 | Toshiba Corp | 撮像管の光導電タ−ゲツトおよびその製造方法 |
GB9414639D0 (en) * | 1994-07-20 | 1994-09-07 | Philips Electronics Uk Ltd | An image detector |
US5962856A (en) * | 1995-04-28 | 1999-10-05 | Sunnybrook Hospital | Active matrix X-ray imaging array |
US5818052A (en) * | 1996-04-18 | 1998-10-06 | Loral Fairchild Corp. | Low light level solid state image sensor |
US5994713A (en) * | 1997-06-25 | 1999-11-30 | Quantum Imaging Corp. | Filmless photon imaging apparatus |
CA2242743C (en) * | 1998-07-08 | 2002-12-17 | Ftni Inc. | Direct conversion digital x-ray detector with inherent high voltage protection for static and dynamic imaging |
JP4059463B2 (ja) | 1998-12-10 | 2008-03-12 | 株式会社島津製作所 | 放射線検出装置 |
JP3436196B2 (ja) * | 1999-09-06 | 2003-08-11 | 株式会社島津製作所 | 2次元アレイ型検出装置 |
-
2000
- 2000-03-29 JP JP2000090992A patent/JP2001284628A/ja active Pending
-
2001
- 2001-03-23 US US09/814,831 patent/US6642534B2/en not_active Expired - Lifetime
- 2001-03-27 EP EP01107599A patent/EP1139429A3/en not_active Withdrawn
- 2001-03-28 CN CNB011216794A patent/CN1157796C/zh not_active Expired - Fee Related
- 2001-03-28 KR KR1020010016249A patent/KR100687512B1/ko not_active IP Right Cessation
- 2001-03-29 CA CA002342648A patent/CA2342648A1/en not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020143484A1 (zh) * | 2019-01-11 | 2020-07-16 | 惠科股份有限公司 | 感光器件、x射线探测器及显示装置 |
US11476379B2 (en) | 2019-01-11 | 2022-10-18 | HKC Corporation Limited | Photosensitive device, X-ray detector and display device |
CN114724735A (zh) * | 2022-06-09 | 2022-07-08 | 中国工程物理研究院激光聚变研究中心 | 一种icf中x射线图像信息准在线读取系统和读取方法 |
CN114724735B (zh) * | 2022-06-09 | 2022-08-16 | 中国工程物理研究院激光聚变研究中心 | 一种icf中x射线图像信息准在线读取系统和读取方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1157796C (zh) | 2004-07-14 |
JP2001284628A (ja) | 2001-10-12 |
KR100687512B1 (ko) | 2007-02-27 |
US6642534B2 (en) | 2003-11-04 |
EP1139429A3 (en) | 2005-10-26 |
CA2342648A1 (en) | 2001-09-29 |
US20010032942A1 (en) | 2001-10-25 |
EP1139429A2 (en) | 2001-10-04 |
KR20010093745A (ko) | 2001-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHINDENMOTO INDUSTRY CO LTD; XINDIANYUAN SENSOR D Free format text: FORMER OWNER: SHINDENMOTO INDUSTRY CO LTD; YAMANASHI ELECTRONICS INDUSTRY CO., LTD.; SHIMADZU SCISAKUSHO LTD. Effective date: 20061215 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20061215 Address after: Tokyo, Japan, Japan Co-patentee after: Shindengen induction device Co. Patentee after: Shindengen Industrial Co., Ltd. Co-patentee after: Shimadzu Corp. Address before: Tokyo, Japan, Japan Co-patentee before: Shindengen Electric Manufacturing Co., Ltd. Patentee before: Shindengen Industrial Co., Ltd. Co-patentee before: Shimadzu Corp. |
|
ASS | Succession or assignment of patent right |
Owner name: SHIMADZU SOISAKUSHO LTD. Free format text: FORMER OWNER: SHINDENGEN INDUSTRIAL CO., LTD. Effective date: 20110105 Free format text: FORMER OWNER: SHINDENGEN SENSORS SHIMADZU SOISAKUSHO LTD. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20110105 Address after: Tokyo, Japan, Japan Patentee after: Shimadzu Corp. Address before: Tokyo, Japan, Japan Co-patentee before: Shindengen induction device Co. Patentee before: Shindengen Industrial Co., Ltd. Co-patentee before: Shimadzu Corp. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040714 Termination date: 20190328 |