CN1335485A - Space linearity measurer adopting ring optical grating method - Google Patents
Space linearity measurer adopting ring optical grating method Download PDFInfo
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- CN1335485A CN1335485A CN 01114387 CN01114387A CN1335485A CN 1335485 A CN1335485 A CN 1335485A CN 01114387 CN01114387 CN 01114387 CN 01114387 A CN01114387 A CN 01114387A CN 1335485 A CN1335485 A CN 1335485A
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Abstract
The space linearity measurer incldues laser, beam-expanding collimotor lens, conical lens and ring grating. The ring grating is fixed via a 2D adjusting mount onto the measured object and is perpendicular to moving direction of the measured object. The beam-expanding collimator lens and the conical lens are set between the laser and the ring grating and in the optical path of the laser. The measurer may have also video camera and computer. The ring grating is made to react with light spot to produce Moire pattern, and the density of both grating and the light spot may be increased simultaneously resulting in high measurement resolution. In addition, the present invention has the advantages of interruptable measurement signal, continuous measurement position, and high laser beam drift resistance. The present invention is one space linearity measurer with excellent space linearity.
Description
Technical field
The present invention relates to a kind of space linearity measurer, specifically, is that a kind of method of utilizing circular grating to form Moire fringe is carried out the device that space linearity is measured.
Background technology
The method of the linearity of Measuring Object motion at present has three kinds: interferometric method, energy barycenter method and diffraction pattern method.Introduce in " two-frequency laser interferometer " (Beijing, China Measuring Press, in March, 1987), the employed measurement mechanism of interferometric method comprises laser instrument, polarization splitting prism, corner reflector, polaroid, photodetector and numeration circuit etc.Its working mechanism is: the light that laser instrument sends resolves into the orthogonal two-beam in polarization direction behind polarization splitting prism, this two-beam is behind the corner reflector vertical reflection, return by former road, go into photodetector through beam splitter and polaroid are laggard, two-beam forms interference fringe on photodetector.In the motion process of testee, if corner reflector moves up and down, then interference fringe will change, and this variation will be noted by the numeration circuit, thereby measure linearity.This device exists numeration and can not interrupt, and just measuring-signal must continuous problem.
" PSD laser linearity measuring instrument " (" sensor technology ",, 16 volumes, 2 phases, 21 pages in 1997) have been introduced the energy barycenter method.The employed measurement mechanism of energy barycenter method comprises parts such as laser instrument, four picture limit photoelectric cells.The working mechanism of this device is: the light that laser instrument sends is mapped on the four picture limit photoelectric cells, be radiated at the size of the amount of four parts of battery according to hot spot, the electric signal of output can obtain the position signalling of the relative light beam of photoelectric cell after combination, thereby measures the linearity of object of which movement.This device has overcome the necessary successional defective of the desired measuring-signal of interferometric method, and the beam intensity pattern can not change and the problem of anti-laser beam drift difference but this device exists.
In " high-precision laser collimates and may use " (" laser ",, 7 volumes, 3 phases, 54 pages in 1980) literary composition, introduced the pattern method of spreading out.The employed measurement mechanism of diffraction pattern method is made up of parts such as laser instrument, diverging lens, zone plate and cross diffraction patterns.Its working mechanism is: the light that laser instrument sends is diffused on the zone plate through lens, the shape of the euphotic zone of zone plate is according to diffraction theory and particular design, so in some certain location, can form the cross diffraction pattern, the center of these a series of crosses forms straight line in the space, the position of testee is compared with the cross center, just can draw linearity.This device has overcome the defective of above-mentioned two kinds of devices, and its measuring-signal can interrupt, and anti-laser beam drift is good.But because this device diffraction pattern is clearly just arranged, so the measuring position is discontinuous only in some certain location.
There are the not high problem of resolution in energy barycenter method and diffraction pattern method.All there is the big or bigger defective of electrical noise influence in three kinds of methods.
Summary of the invention
The object of the present invention is to provide a kind of new space linearity measurer that can overcome above-mentioned three kinds of measurement mechanism defectives.This measurement device signal can interrupt, and the measuring position is continuous, and anti-laser beam drift is good, and the electrical noise influence is little, is a kind of space linearity measurer of good combination property.
For achieving the above object, ring optical grating method space linearity measurer of the present invention, comprise laser instrument, beam-expanding collimation lens, conscope and circular grating, circular grating is fixed on the testee by two-dimentional adjustment rack and is basically perpendicular to testee direction of motion, beam-expanding collimation mirror and conscope are seated between laser instrument and the circular grating successively, and all are on the laser light path.
As improvement of the present invention, also can be provided with and the joining video camera of computing machine at the described circular grating opposite side relative with described laser instrument.
The present invention is owing to produce Moire fringe with circular grating and hot spot effect, and the density of grating and hot spot can increase simultaneously, and therefore theoretical Measurement Resolution can be suitable with interferometric method.The present invention compares with interferometric method, mainly has the continuous advantage of measuring-signal.Compare with the energy barycenter method, the present invention has the resolution height, anti-laser beam drift is good and electrical noise influences advantages such as little.The present invention compares with the diffraction pattern method, has resolution height, the continuous advantage in measuring position.In a word, the present invention is a kind of space linearity measurer of good combination property.
Description of drawings
The present invention is further detailed explanation below in conjunction with accompanying drawing.
Fig. 1 is a kind of structural representation of ring optical grating method space linearity measurer of the present invention.
The specific embodiment
As shown in Figure 1, present embodiment is selected the He-Ne laser instrument, and laser instrument 1 also can be The laser instrument of other type, semiconductor laser for example, but use single mode He-Ne laser instrument, This measurement mechanism better effects if. The beam-expanding collimation lens can be the Keplers who is made of two positive lens Telescope or the Galilean telescope that is consisted of by a negative lens and a positive lens. Laser instrument 1 sends Light behind beam-expanding collimation lens 2 beam-expanding collimations, become directional light, become by conscope 3 again Diffraction light-free, at this moment beam cross section is a series of light and dark equidistant concentric circles, these are concentric The center propagation trajectories of circle is a natural straight line. Circular grating 4 by two-dimentional adjustment rack 5 admittedly Fix on the testee 6, and make circular grating 4 be basically perpendicular to the motion side of testee To. Two dimension adjustment rack 5 can be adjusted stop position, so that grating is positioned on the laser light path. Circular grating 4 moves with testee. Diffraction light-free is radiated on the circular grating, works as nothing When the diffraction ring center overlaps substantially with the circular grating center (deviation is less than a pitch), at light Moire fringe to occur on the grid, the shape of striped is determined by the center deviation residual quantity.
At this moment, directly can be according to the shape estimation diffraction light-free ring center of Moire fringe with human eye And the deviation between the circular grating, this deviation is diffraction light-free ring center trace and tested just Deviation between the object lateral attitude; If regulate two-dimentional adjustment rack, make the shape of Moire fringe Being concentric circles, and the regulated value of record x and y both direction, also can obtain in the diffraction light-free ring Deviation between centroid and the testee lateral attitude; If with video camera 7 with Moire fringe Image is passed to computer, can more accurately calculate between diffraction light-free center and the circular grating partially Difference.
Obtained the deviation between diffraction light-free ring center trace and the testee lateral attitude, also Just obtain the linearity of object of which movement.
Claims (3)
1. ring optical grating method space linearity measurer, comprise laser instrument and beam-expanding collimation lens, it is characterized in that: this device also comprises conscope (3) and circular grating (4), circular grating (4) is fixed in by two-dimentional adjustment rack (5) that testee (6) is gone up and perpendicular to the direction of motion of testee (6), beam-expanding collimation mirror (2) and conscope (3) are seated between laser instrument (1) and the circular grating (4) successively and are on laser instrument (1) light path.
2. laser linearity measurement mechanism according to claim 1 is characterized in that: also be provided with and the joining video camera of computing machine (8) (7) at described circular grating (4) opposite side relative with described laser instrument (1).
3. laser linearity measurement mechanism according to claim 1 and 2 is characterized in that: described laser instrument is He-Ne laser instrument or semiconductor laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01114387 CN1335485A (en) | 2001-07-26 | 2001-07-26 | Space linearity measurer adopting ring optical grating method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 01114387 CN1335485A (en) | 2001-07-26 | 2001-07-26 | Space linearity measurer adopting ring optical grating method |
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| CN1335485A true CN1335485A (en) | 2002-02-13 |
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| CN 01114387 Pending CN1335485A (en) | 2001-07-26 | 2001-07-26 | Space linearity measurer adopting ring optical grating method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1300552C (en) * | 2002-03-08 | 2007-02-14 | 华中科技大学 | No-diffraction light space linearity reference generation device |
| CN101922919A (en) * | 2010-09-07 | 2010-12-22 | 西安工业大学 | Non-contact measurement method for geometric parameters of optical part and measuring device thereof |
| CN110487219A (en) * | 2019-08-15 | 2019-11-22 | 卢振武 | A kind of detection system and its detection method of movement mechanism straightness |
| CN111397542A (en) * | 2020-03-09 | 2020-07-10 | 天地科技股份有限公司 | System and method for monitoring straightness of scraper conveyor based on weak reflection grating |
-
2001
- 2001-07-26 CN CN 01114387 patent/CN1335485A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1300552C (en) * | 2002-03-08 | 2007-02-14 | 华中科技大学 | No-diffraction light space linearity reference generation device |
| CN101922919A (en) * | 2010-09-07 | 2010-12-22 | 西安工业大学 | Non-contact measurement method for geometric parameters of optical part and measuring device thereof |
| CN101922919B (en) * | 2010-09-07 | 2013-06-19 | 西安工业大学 | Non-contact measurement method for geometric parameters of optical part and measuring device thereof |
| CN110487219A (en) * | 2019-08-15 | 2019-11-22 | 卢振武 | A kind of detection system and its detection method of movement mechanism straightness |
| CN111397542A (en) * | 2020-03-09 | 2020-07-10 | 天地科技股份有限公司 | System and method for monitoring straightness of scraper conveyor based on weak reflection grating |
| CN111397542B (en) * | 2020-03-09 | 2021-07-06 | 天地科技股份有限公司 | System and method for monitoring straightness of scraper conveyor based on weak reflection grating |
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