CN1333312C - 依据批量与工具可用状态计划生产批次的方法与装置 - Google Patents

依据批量与工具可用状态计划生产批次的方法与装置 Download PDF

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Publication number
CN1333312C
CN1333312C CNB028235436A CN02823543A CN1333312C CN 1333312 C CN1333312 C CN 1333312C CN B028235436 A CNB028235436 A CN B028235436A CN 02823543 A CN02823543 A CN 02823543A CN 1333312 C CN1333312 C CN 1333312C
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China
Prior art keywords
upstate
instrument
product
metric
batch
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Expired - Fee Related
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CNB028235436A
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English (en)
Chinese (zh)
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CN1596390A (zh
Inventor
M·S·吕斯科斯基
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GlobalFoundries Inc
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Advanced Micro Devices Inc
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Publication of CN1596390A publication Critical patent/CN1596390A/zh
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Publication of CN1333312C publication Critical patent/CN1333312C/zh
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
CNB028235436A 2001-12-12 2002-10-31 依据批量与工具可用状态计划生产批次的方法与装置 Expired - Fee Related CN1333312C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/021,676 2001-12-12
US10/021,676 US6978187B1 (en) 2001-12-12 2001-12-12 Method and apparatus for scheduling production lots based on lot and tool health metrics

Publications (2)

Publication Number Publication Date
CN1596390A CN1596390A (zh) 2005-03-16
CN1333312C true CN1333312C (zh) 2007-08-22

Family

ID=21805525

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028235436A Expired - Fee Related CN1333312C (zh) 2001-12-12 2002-10-31 依据批量与工具可用状态计划生产批次的方法与装置

Country Status (9)

Country Link
US (1) US6978187B1 (fr)
EP (1) EP1454200B1 (fr)
JP (1) JP4662711B2 (fr)
KR (1) KR100970493B1 (fr)
CN (1) CN1333312C (fr)
AU (1) AU2002348125A1 (fr)
DE (1) DE60208236T2 (fr)
TW (1) TWI269347B (fr)
WO (1) WO2003050628A2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10235816A1 (de) * 2002-08-05 2004-02-26 Infineon Technologies Ag Verfahren zum Vorgeben einer Bearbeitungsreihenfolge und zugehörige Einheiten
US7139629B2 (en) * 2003-04-28 2006-11-21 Palo Alto Research Center Incorporated Planning and scheduling for failure recovery system and method
US7925365B2 (en) * 2003-10-30 2011-04-12 Agency For Science, Technology And Research Rough-cut capacity planning with production constraints and dynamic bottleneck considerations
US7206653B1 (en) * 2005-11-29 2007-04-17 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer-based planning methods and systems for batch-based processing tools
US7487003B1 (en) 2006-03-09 2009-02-03 Rockwell Automation Technologies, Inc. Automatic tracking of a lot of items through virtual sublots
US8160736B2 (en) * 2007-01-31 2012-04-17 Globalfoundries Singapore Pte. Ltd. Methods and apparatus for white space reduction in a production facility
US8041518B2 (en) * 2007-05-08 2011-10-18 Globalfoundries Inc. Determining die test protocols based on process health
US7908023B2 (en) * 2008-01-14 2011-03-15 International Business Machines Corporation Method of establishing a lot grade system for product lots in a semiconductor manufacturing process
US8095230B2 (en) * 2008-06-24 2012-01-10 International Business Machines Corporation Method for optimizing the routing of wafers/lots based on yield
US8155770B2 (en) * 2009-03-31 2012-04-10 Globalfoundries Inc. Method and apparatus for dispatching workpieces to tools based on processing and performance history
US10295979B2 (en) * 2015-09-15 2019-05-21 Applied Materials, Inc. Scheduling in manufacturing environments
JP6584927B2 (ja) 2015-11-13 2019-10-02 住友重機械イオンテクノロジー株式会社 イオン注入装置、およびイオン注入装置の制御方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN88100316A (zh) * 1987-01-20 1988-08-10 R·J·雷诺兹烟草公司 计算机集成化制造系统
CN1086009A (zh) * 1992-07-29 1994-04-27 普拉塞尔技术有限公司 化学过程最佳化方法
US5444632A (en) * 1994-04-28 1995-08-22 Texas Instruments Incorporated Apparatus and method for controlling and scheduling processing machines
US5940787A (en) * 1993-12-10 1999-08-17 U.S. Tech Corporation Apparatuses and methods of monitoring the condition of tools and workpieces
CN1253851A (zh) * 1998-09-16 2000-05-24 Basf公司 以生产计划为基础的离散化化学工艺的生产控制方法
US6260427B1 (en) * 1997-07-28 2001-07-17 Tri-Way Machine Ltd. Diagnostic rule tool condition monitoring system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06246599A (ja) * 1993-02-22 1994-09-06 Okuma Mach Works Ltd Ｆｍｓにおける加工スケジュール制御方法
US5787000A (en) * 1994-05-27 1998-07-28 Lilly Software Associates, Inc. Method and apparatus for scheduling work orders in a manufacturing process
US6415196B1 (en) * 1997-08-28 2002-07-02 Manugistics, Inc. Manufacturing scheduling process with improved modeling, scheduling and editing capabilities for solving finite capacity planning problems
JPH1195805A (ja) * 1997-09-17 1999-04-09 Sumitomo Metal Ind Ltd 生産計画作成方法及び生産計画作成装置
US6128588A (en) 1997-10-01 2000-10-03 Sony Corporation Integrated wafer fab time standard (machine tact) database
US6105520A (en) * 1999-02-26 2000-08-22 L&P Property Management Company Quilt making automatic scheduling system and method
US6456894B1 (en) * 1999-06-01 2002-09-24 Applied Materials, Inc. Semiconductor processing techniques
US6952656B1 (en) 2000-04-28 2005-10-04 Applied Materials, Inc. Wafer fabrication data acquisition and management systems

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN88100316A (zh) * 1987-01-20 1988-08-10 R·J·雷诺兹烟草公司 计算机集成化制造系统
CN1086009A (zh) * 1992-07-29 1994-04-27 普拉塞尔技术有限公司 化学过程最佳化方法
US5940787A (en) * 1993-12-10 1999-08-17 U.S. Tech Corporation Apparatuses and methods of monitoring the condition of tools and workpieces
US5444632A (en) * 1994-04-28 1995-08-22 Texas Instruments Incorporated Apparatus and method for controlling and scheduling processing machines
US6260427B1 (en) * 1997-07-28 2001-07-17 Tri-Way Machine Ltd. Diagnostic rule tool condition monitoring system
CN1253851A (zh) * 1998-09-16 2000-05-24 Basf公司 以生产计划为基础的离散化化学工艺的生产控制方法

Also Published As

Publication number Publication date
KR100970493B1 (ko) 2010-07-16
TWI269347B (en) 2006-12-21
AU2002348125A1 (en) 2003-06-23
WO2003050628A2 (fr) 2003-06-19
CN1596390A (zh) 2005-03-16
DE60208236D1 (de) 2006-01-26
EP1454200A2 (fr) 2004-09-08
WO2003050628A3 (fr) 2003-11-27
JP2005512221A (ja) 2005-04-28
EP1454200B1 (fr) 2005-12-21
KR20040066891A (ko) 2004-07-27
TW200301918A (en) 2003-07-16
US6978187B1 (en) 2005-12-20
JP4662711B2 (ja) 2011-03-30
DE60208236T2 (de) 2006-07-13

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Patentee after: Globalfoundries Semiconductor Inc.

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Granted publication date: 20070822

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