CN1295169C - 制造光纤预型件的方法 - Google Patents

制造光纤预型件的方法 Download PDF

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Publication number
CN1295169C
CN1295169C CNB99815119XA CN99815119A CN1295169C CN 1295169 C CN1295169 C CN 1295169C CN B99815119X A CNB99815119X A CN B99815119XA CN 99815119 A CN99815119 A CN 99815119A CN 1295169 C CN1295169 C CN 1295169C
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CN
China
Prior art keywords
layer
plasma
silicon dioxide
target
concentration
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Expired - Fee Related
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CNB99815119XA
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English (en)
Chinese (zh)
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CN1332702A (zh
Inventor
M·I·古斯科夫
E·B·达尼洛夫
M·A·阿斯拉米
D·吴
J·E·马蒂森
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FIBERTUBE Inc
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FIBERTUBE Inc
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Publication of CN1332702A publication Critical patent/CN1332702A/zh
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01861—Means for changing or stabilising the diameter or form of tubes or rods
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C03B37/01426—Plasma deposition burners or torches
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01466—Means for changing or stabilising the diameter or form of tubes or rods
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02152—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating involving moving the fibre or a manufacturing element, stretching of the fibre
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/32—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2203/00—Fibre product details, e.g. structure, shape
    • C03B2203/10—Internal structure or shape details
    • C03B2203/22—Radial profile of refractive index, composition or softening point

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
CNB99815119XA 1998-04-10 1999-04-09 制造光纤预型件的方法 Expired - Fee Related CN1295169C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5820798A 1998-04-10 1998-04-10
US09/058,207 1998-04-10

Publications (2)

Publication Number Publication Date
CN1332702A CN1332702A (zh) 2002-01-23
CN1295169C true CN1295169C (zh) 2007-01-17

Family

ID=22015362

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB99815119XA Expired - Fee Related CN1295169C (zh) 1998-04-10 1999-04-09 制造光纤预型件的方法

Country Status (10)

Country Link
EP (1) EP1086053A4 (enExample)
JP (1) JP4375902B2 (enExample)
KR (1) KR20010081941A (enExample)
CN (1) CN1295169C (enExample)
AU (1) AU750390B2 (enExample)
BR (1) BR9909569B1 (enExample)
CA (1) CA2328143A1 (enExample)
RU (1) RU2235071C2 (enExample)
WO (1) WO1999052832A1 (enExample)
ZA (1) ZA992666B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10035951C2 (de) * 2000-07-21 2002-06-27 Heraeus Quarzglas Verfahren zur Herstellung eines Bauteils für die Herstellung optischer Fasern, sowie Verwendung des Bauteils
JP2002326834A (ja) * 2001-04-27 2002-11-12 Sumitomo Electric Ind Ltd 光ファイバコア母材及び光ファイバ母材の製造方法
US20030027054A1 (en) * 2001-08-01 2003-02-06 Ball Laura J. Method for making photomask material by plasma induction
US6769275B2 (en) * 2002-03-15 2004-08-03 Fibercore, Inc. Method for making optical fiber preform using simultaneous inside and outside deposition
FR2847893B1 (fr) * 2002-12-02 2006-05-05 Cit Alcatel Procede et dispositif de recharge par plasma d'une preforme pour fibre optique, a oxydes d'azote reduits
JP4349148B2 (ja) * 2003-03-03 2009-10-21 住友電気工業株式会社 ガラス加工方法及びガラス加工装置
DE10316487B4 (de) 2003-04-09 2005-03-31 Heraeus Tenevo Ag Verfahren zur Herstellung einer Vorform für optische Fasern
WO2007079127A2 (en) * 2005-12-29 2007-07-12 Silica Tech, Llc Plasma torch for making synthetic silica
JP5550903B2 (ja) * 2006-07-07 2014-07-16 シリカ テック リミテッド ライアビリティ カンパニー 多結晶シリコンを作製するためのプラズマ堆積装置及び方法
NL1032463C2 (nl) * 2006-09-08 2008-03-11 Draka Comteq Bv Werkwijze voor het vervaardigen van een optische voorvorm.
DE102009010497A1 (de) * 2008-12-19 2010-08-05 J-Fiber Gmbh Mehrdüsiger rohrförmiger Plasma-Abscheidebrenner zur Herstellung von Vorformen als Halbzeuge für optische Fasern
EP2226301A1 (en) * 2009-02-22 2010-09-08 Silitec Fibers SA Method for producing and processing a preform, preform and optical fiber
RU2543006C2 (ru) * 2010-12-13 2015-02-27 Учреждение Российской Академии Наук Научный Центр Волоконной Оптики Ран Способ производства преформ с заданным профилем показателя преломления, преформа и оптическое волокно
RU2547032C1 (ru) * 2014-03-31 2015-04-10 Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) Способ изготовления многомодовых малодисперсионных световодов
WO2018098810A1 (zh) * 2016-12-02 2018-06-07 中天科技精密材料有限公司 光纤预制棒的制造设备及其制造方法
CN107098578B (zh) * 2017-04-27 2019-06-25 烽火通信科技股份有限公司 用于制造多层结构光纤的光纤预制棒及制造光纤的方法
CN107082558B (zh) * 2017-04-27 2019-12-03 烽火通信科技股份有限公司 一种采用光纤预制棒制造单模光纤的方法
CN111847866A (zh) * 2020-07-14 2020-10-30 复旦大学 低损耗光纤预制棒外包层及制备设备和制备方法及光纤

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04231336A (ja) * 1990-12-27 1992-08-20 Fujikura Ltd 光ファイバ母材の製造方法
US5522007A (en) * 1993-12-14 1996-05-28 Alcatel Fibres Optiques Method of building up an optical fiber preform by plasma deposition, and an optical fiber obtained from the preform built up by the method
CN1169399A (zh) * 1996-06-10 1998-01-07 三星电子株式会社 用于制造光学纤维的设备和方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4162908A (en) * 1975-08-16 1979-07-31 Heraeus Quarzschmelze Gmbh Method of producing synthetic quartz glass, apparatus for the practice of the method, and use of the synthetic quartz glass
US4629485A (en) * 1983-09-26 1986-12-16 Corning Glass Works Method of making fluorine doped optical preform and fiber and resultant articles
JPS63248733A (ja) * 1987-04-06 1988-10-17 Hitachi Cable Ltd シングルモ−ド光フアイバ母材の製造法
SU1766043A1 (ru) * 1990-05-07 1996-10-10 Научно-производственное объединение "Кварц" Устройство для получения заготовок волоконно-оптических световодов
RU2035408C1 (ru) * 1992-02-28 1995-05-20 Акционерное общество "Стеквар" Люминесцирующее кварцевое волокно
KR950000588A (ko) * 1993-06-18 1995-01-03 쿠라우찌 노리타카 싱글모드광파이버모재의 제조방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04231336A (ja) * 1990-12-27 1992-08-20 Fujikura Ltd 光ファイバ母材の製造方法
US5522007A (en) * 1993-12-14 1996-05-28 Alcatel Fibres Optiques Method of building up an optical fiber preform by plasma deposition, and an optical fiber obtained from the preform built up by the method
CN1169399A (zh) * 1996-06-10 1998-01-07 三星电子株式会社 用于制造光学纤维的设备和方法

Also Published As

Publication number Publication date
RU2235071C2 (ru) 2004-08-27
BR9909569B1 (pt) 2010-07-27
EP1086053A4 (en) 2008-03-05
CN1332702A (zh) 2002-01-23
JP2003510234A (ja) 2003-03-18
BR9909569A (pt) 2002-11-05
WO1999052832A1 (en) 1999-10-21
CA2328143A1 (en) 1999-10-21
ZA992666B (en) 1999-10-13
AU750390B2 (en) 2002-07-18
JP4375902B2 (ja) 2009-12-02
AU3488499A (en) 1999-11-01
KR20010081941A (ko) 2001-08-29
WO1999052832A8 (en) 1999-12-29
WO1999052832A9 (en) 2000-02-17
EP1086053A1 (en) 2001-03-28

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