CN1264768C - 脆性材料基片的划线装置以及划线方法 - Google Patents

脆性材料基片的划线装置以及划线方法 Download PDF

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Publication number
CN1264768C
CN1264768C CNB028084691A CN02808469A CN1264768C CN 1264768 C CN1264768 C CN 1264768C CN B028084691 A CNB028084691 A CN B028084691A CN 02808469 A CN02808469 A CN 02808469A CN 1264768 C CN1264768 C CN 1264768C
Authority
CN
China
Prior art keywords
crack
material substrate
brittle material
glass substrate
aforementioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028084691A
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English (en)
Chinese (zh)
Other versions
CN1525944A (zh
Inventor
若山治雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN1525944A publication Critical patent/CN1525944A/zh
Application granted granted Critical
Publication of CN1264768C publication Critical patent/CN1264768C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/386—Removing material by boring or cutting by boring of blind holes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/703—Cooling arrangements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
CNB028084691A 2001-07-18 2002-07-18 脆性材料基片的划线装置以及划线方法 Expired - Fee Related CN1264768C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001218572 2001-07-18
JP218572/2001 2001-07-18

Publications (2)

Publication Number Publication Date
CN1525944A CN1525944A (zh) 2004-09-01
CN1264768C true CN1264768C (zh) 2006-07-19

Family

ID=19052739

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028084691A Expired - Fee Related CN1264768C (zh) 2001-07-18 2002-07-18 脆性材料基片的划线装置以及划线方法

Country Status (6)

Country Link
JP (1) JP4133812B2 (ja)
KR (1) KR100551526B1 (ja)
CN (1) CN1264768C (ja)
HK (1) HK1069377A1 (ja)
TW (1) TW592868B (ja)
WO (1) WO2003008352A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110416155A (zh) * 2019-07-05 2019-11-05 佛山市国星半导体技术有限公司 一种led晶圆切割劈裂方法及led芯片

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4175636B2 (ja) * 2003-10-31 2008-11-05 株式会社日本製鋼所 ガラスの切断方法
BRPI0515667A (pt) * 2004-10-01 2008-07-29 Mitsuboshi Diamond Ind Co Ltd método de inscrição para material frágil e equipamento de inscrição
KR100881466B1 (ko) * 2004-12-28 2009-02-06 미쓰보시 다이야몬도 고교 가부시키가이샤 취성재료 기판의 절단방법 및 기판절단 시스템
JP5011048B2 (ja) * 2007-09-27 2012-08-29 三星ダイヤモンド工業株式会社 脆性材料基板の加工方法
CN101234850B (zh) * 2008-02-20 2010-12-08 友达光电股份有限公司 玻璃基板的激光切割方法
CN102026926B (zh) * 2008-04-14 2013-06-05 三星钻石工业股份有限公司 脆性材料基板的加工方法
JP2009294461A (ja) * 2008-06-05 2009-12-17 Toshiba Mobile Display Co Ltd 液晶表示装置及びその製造方法
JP5443851B2 (ja) * 2009-06-29 2014-03-19 三星ダイヤモンド工業株式会社 薄板ガラス基板のスクライブ方法およびスクライブ装置
EP2450169A4 (en) * 2009-07-03 2012-11-21 Asahi Glass Co Ltd CUTTING METHOD AND CUTTING DEVICE FOR A SUBSTRATE OF SPRING MATERIAL AND VEHICLE GLASS OBTAINED IN THIS CUTTING METHOD
US8932510B2 (en) 2009-08-28 2015-01-13 Corning Incorporated Methods for laser cutting glass substrates
CN102596831B (zh) * 2009-11-03 2015-01-07 康宁股份有限公司 具有非恒定速度的移动玻璃带的激光刻划
US8946590B2 (en) 2009-11-30 2015-02-03 Corning Incorporated Methods for laser scribing and separating glass substrates
JP5237318B2 (ja) * 2010-03-19 2013-07-17 三星ダイヤモンド工業株式会社 基板分断装置
JP5500377B2 (ja) * 2010-08-30 2014-05-21 日本電気硝子株式会社 ガラスフィルムの製造方法及び製造装置
TWI513670B (zh) 2010-08-31 2015-12-21 Corning Inc 分離強化玻璃基板之方法
US9938180B2 (en) 2012-06-05 2018-04-10 Corning Incorporated Methods of cutting glass using a laser
US9610653B2 (en) 2012-09-21 2017-04-04 Electro Scientific Industries, Inc. Method and apparatus for separation of workpieces and articles produced thereby
JP6500917B2 (ja) * 2015-02-03 2019-04-17 セントラル硝子株式会社 脆性材料の切断方法、脆性材料の切断装置、切断脆性材料の製造方法及び切断脆性材料
JP6775822B2 (ja) * 2016-09-28 2020-10-28 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法並びに分断装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI255934B (en) * 1998-12-04 2006-06-01 Samsung Electronics Co Ltd A substrate and a liquid crystal display panel capable of being cut by using a laser and a method for manufacturing the same
JP2001176820A (ja) * 1999-12-15 2001-06-29 Hitachi Cable Ltd 基板の加工方法及びその加工装置
JP2002100590A (ja) * 2000-09-22 2002-04-05 Sony Corp 割断装置及びその方法
KR100673073B1 (ko) * 2000-10-21 2007-01-22 삼성전자주식회사 레이저 빔을 이용한 비금속 기판의 절단 방법 및 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110416155A (zh) * 2019-07-05 2019-11-05 佛山市国星半导体技术有限公司 一种led晶圆切割劈裂方法及led芯片
CN110416155B (zh) * 2019-07-05 2021-10-15 佛山市国星半导体技术有限公司 一种led晶圆切割劈裂方法及led芯片

Also Published As

Publication number Publication date
JPWO2003008352A1 (ja) 2004-11-04
WO2003008352B1 (en) 2003-03-20
JP4133812B2 (ja) 2008-08-13
CN1525944A (zh) 2004-09-01
TW592868B (en) 2004-06-21
KR100551526B1 (ko) 2006-02-13
WO2003008352A1 (en) 2003-01-30
KR20040010588A (ko) 2004-01-31
HK1069377A1 (en) 2005-05-20

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