CN1261737C - Measuring devices - Google Patents
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- CN1261737C CN1261737C CN 200310118256 CN200310118256A CN1261737C CN 1261737 C CN1261737 C CN 1261737C CN 200310118256 CN200310118256 CN 200310118256 CN 200310118256 A CN200310118256 A CN 200310118256A CN 1261737 C CN1261737 C CN 1261737C
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- 230000007246 mechanism Effects 0.000 claims abstract description 233
- 239000000758 substrate Substances 0.000 claims abstract description 82
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 92
- 239000000284 extract Substances 0.000 claims description 77
- 238000000605 extraction Methods 0.000 claims description 64
- 238000005259 measurement Methods 0.000 claims description 51
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 32
- 210000000056 organ Anatomy 0.000 claims description 32
- 239000011889 copper foil Substances 0.000 claims description 24
- 230000003760 hair shine Effects 0.000 claims description 5
- 230000005855 radiation Effects 0.000 abstract 1
- 238000007689 inspection Methods 0.000 description 23
- 238000000034 method Methods 0.000 description 9
- 238000005476 soldering Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- IXSZQYVWNJNRAL-UHFFFAOYSA-N etoxazole Chemical compound CCOC1=CC(C(C)(C)C)=CC=C1C1N=C(C=2C(=CC=CC=2F)F)OC1 IXSZQYVWNJNRAL-UHFFFAOYSA-N 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- -1 this Chemical compound 0.000 description 2
- 238000003556 assay Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Image Input (AREA)
- Image Processing (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A measure device is provided, in which even if a curvature etc. exists in a substrate, the physical correction is not performed and a more correct measure can still be performed. A 3-dimensional measure device 1 includes a radiation means 5 for 3-dimensional measure; a CCD camera 6, which can move upwards and downwards by means of a Z-axis moving mechanism; and a main control means 7. At first, as for the photography and the measure at the photography area, in the specified photography area the offset amount in the height direction with respect to a pre-determined basis-height position is measured. If the offset amount is within a pre-determined allowable range, the relative height relation is kept and the photography for a measure at said area is performed, when moving to the next photography area, only the relative height relation for the offset amount portion is compensated. If the offset amount is not within a pre-determined allowable range, the relative height relation only for the offset amount portion is compensated and then the photography for a measure is performed.
Description
Technical field
The present invention relates to the determinator of substrate etc., more particularly, the present invention relates to be used to measure the determinator of the determination object of paste scolding tin of being arranged on the printed circuit board (PCB) etc.
Background technology
In the manufacture process of printed circuit board (PCB), have as main step, the step of electronic unit is installed on substrate.When electronic unit is installed, at first, printing paste scolding tin on the electrode pattern that is arranged at the regulation on the printed circuit board (PCB).Then, according to the viscosity of this paste scolding tin, electronic unit is temporarily fixed on this printed circuit board (PCB).Then, above-mentioned printed circuit board (PCB) is sent to reverberatory furnace,, thus, welds through the reflection steps of regulation.Be sent to the preliminary stage of reverberatory furnace, must checking the printing state of paste scolding tin, when above-mentioned inspection, adopting three directional measuring device.
In recent years, people propose the so-called contactless three directional measuring device of various employing light, and the mode as being adopted when measuring has exemplified phase-shift method, light cross-section method, space code method, focusing etc.
But, when three-dimensional measurement, to measure at the state of substrate warpage, the position relation of scolding tin etc. changes, and correct mensuration is counteracted.Thus, must after correcting (compensation), the warpage to substrate measure.
In the past,, under the state of the end of supporting the fixing substrate that is provided with according to horizontality, from the below upward, will go up distribution and be pressed against on the substrate bottom surface, and realize lifting, thus, the warpage of substrate be corrected in order to correct such warpage.But the rectification of such physics not necessarily can correctly be remedied to formation state with substrate.In addition, also have and necessarily require the mechanism that is used to correct, device is complicated, the danger that overall dimensions is bigger.
Relative therewith, have by sensing head is moved along Z axle (highly) direction, when measuring, the technology that amount of warpage is compensated (such as, with reference to patent documentation 1).In this technology, by making the relative printed circuit board (PCB) of sensing head, scan along the XY direction of principal axis, obtain altitude information, when the average bits of this altitude information is in setting range, the height control of the Z axle travel mechanism when not carrying out the scanning of next sensing head at the certain state of the spacing of printed circuit board (PCB) and sensing head, is carried out scan control.On the other hand, in the occasion of mean value outside setting range of altitude information, when the scanning of the sensing head of next time, carry out the height control of Z axle travel mechanism.
Patent documentation 1
The open communique of No. 156425/2001 application for a patent for invention of Japan
Summary of the invention
But, in above-mentioned technology,, then have the situation that can not suitably reflect this height residual quantity in next time if having rapid difference of height (such as step etc.) at substrate surface.In addition, when first mensuration, have the occasion of above-mentioned difference of height,, then have the danger of the situation that can't suitably reflect in the mensuration that is created in next time if it is compensated according to the mode of dwindling.In addition, when in the end measuring, have under the occasion of rapid difference of height etc.,, also have the rough sledding that can't suitably reflect this height residual quantity owing to be in final state.In such occasion, has the danger of under the state of not focusing, measuring.Consequently, has the danger that correct mensuration is counteracted.
In addition,, and all produce carrying out the occasion that two dimension measures equally not only at the three-dimensional measurement that must comprise elevation measurement in above-mentioned rough sledding.
The present invention be directed to above-mentioned situation and propose, a fundamental purpose of the present invention is to provide a kind of determinator, even this determinator does not carry out the rectification of physics under the situation of substrate generation warpage etc., still can carry out more correct mensuration.
Below the feature scheme that can realize above-mentioned purpose is described.In addition, for each scheme, as required, the effect and the effect of feature is described.
Scheme 1 relates to a kind of determinator, and this determinator comprises measuring uses irradiation means, and this mensuration can be to being arranged at the determination object on the substrate, the light of irradiation regulation with irradiation means; Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each; Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out two dimension and measures or three-dimensional measurement;
It is characterized in that it is provided with:
Travel mechanism, this travel mechanism can adjust the relative height relation of above-mentioned substrate and above-mentioned photographic unit; Departure is measured mechanism, and this departure mensuration mechanism follows above-mentioned shooting and the mensuration at each shooting area, at the shooting area of regulation, measures the departure of the short transverse of predetermined relatively datum grade; Decision mechanism, this decision mechanism are judged by above-mentioned departure and are measured the departure of the short transverse that mechanism measures whether in the allowed band of being scheduled to;
This determinator constitutes like this, promptly, judging the occasion of above-mentioned departure in predetermined allowed band by above-mentioned decision mechanism, state in the relative height relation that keeps above-mentioned substrate and above-mentioned photographic unit, carry out the shooting of mensuration usefulness of the shooting area of this regulation, when transferring to next shooting area, above-mentioned control gear is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated;
By above-mentioned decision mechanism, judge the not occasion in above-mentioned allowed band of above-mentioned departure, above-mentioned travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, at the shooting area of this regulation, carry out the shooting that said determination is used.
According to such scheme 1, use irradiation means by measuring, to being arranged at the determination object on the substrate, the light of irradiation regulation by photographic unit, at a plurality of shooting areas each, is taken light-struck determination object of regulation.In addition,,,, carry out two dimension and measure or three-dimensional measurement by the photographic unit shot image data according at least at determination object by measuring mechanism.In addition, measure mechanism, follow the above-mentioned shooting and the mensuration of each shooting area,, measure the departure of the short transverse of predetermined relatively absolute altitude at the regulation shooting area by departure.By decision mechanism, judge whether the departure of the short transverse of measuring by departure mensuration mechanism is positioned at predetermined allowed band.Then, judging that by decision mechanism departure is positioned at the occasion of predetermined allowed band,, carry out shooting in the mensuration usefulness of the shooting area of this regulation at the state of the relativeness that keeps substrate and photographic unit.Then, when transferring to the shooting area of next time, travel mechanism is controlled,, the relative height relation of substrate and photographic unit is compensated according to above-mentioned departure.Thus, and at each shooting area, adjust the such occasion of relative height relation and compare, guarantee the high speed of measuring.In addition,, judge that departure is not positioned at the occasion of allowed band, travel mechanism is controlled,, relative height relation is compensated, carry out shooting then in the mensuration usefulness of the shooting area of this regulation according to above-mentioned departure by decision mechanism.Therefore,, have under the situation on rapid difference of height (such as the slope etc. of breaking), apace relative height relation was compensated at that time even in the shooting area of regulation, thus, can be at that time, reflection height residual quantity is measured.Consequently, at each shooting area, can correctly measure at the state of focusing.
In addition, also can adopt following proposal, promptly " judging that by decision mechanism above-mentioned departure is not positioned at the occasion of allowed band; above-mentioned travel mechanism is controlled; according to above-mentioned departure; above-mentioned relative height relation is compensated; then; once more, measure mechanism by above-mentioned departure, the measurement deviation amount, and by above-mentioned decision mechanism, judge that this departure whether in predetermined allowed band, is being positioned at the occasion of allowed band, carry out the shooting of using at the said determination of the shooting area of this regulation "; in addition; also can adopt following proposal, promptly ", judge the not occasion in above-mentioned allowed band of above-mentioned departure by above-mentioned decision mechanism, above-mentioned travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, once more, measure mechanism by above-mentioned departure, the measurement deviation amount, and, by above-mentioned decision mechanism, judge that this departure whether in predetermined allowed band, judging the not occasion in the stipulated number allowed band, misjudgment.”
Scheme 2 relates to a kind of determinator, and this determinator comprises measuring uses irradiation means, and this mensuration can be to being arranged at the determination object on the substrate, the light of irradiation regulation with irradiation means; Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each; Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out two dimension and measures or three-dimensional measurement;
It is characterized in that it is provided with:
Z-direction travel mechanism, this Z-direction travel mechanism can adjust the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
XY direction of principal axis travel mechanism, this XY direction of principal axis travel mechanism can adjust the relative position relation between above-mentioned substrate and the photographic unit, so that switch shooting area;
Departure is measured mechanism, and this departure mensuration mechanism follows above-mentioned shooting and the mensuration at each shooting area, at each shooting area, measures the departure of the short transverse of predetermined relatively datum grade;
Decision mechanism, this decision mechanism are judged by above-mentioned departure and are measured the departure of the short transverse that mechanism measures whether in the allowed band of being scheduled to;
Control gear, this control gear is in the 1st shooting area, by above-mentioned decision mechanism, judge the occasion of above-mentioned departure in above-mentioned allowed band, state in the relative height relation that keeps above-mentioned substrate and above-mentioned photographic unit, permission is in the shooting of the mensuration usefulness of the 1st shooting area, when above-mentioned XY direction of principal axis travel mechanism is controlled, when shooting area is switched to the 2nd shooting area, above-mentioned Z-direction travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated;
In the 1st shooting area, by above-mentioned decision mechanism, judge the not occasion in above-mentioned allowed band of above-mentioned departure, above-mentioned Z-direction travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, at the 1st shooting area, the shooting that allows said determination to use.
According to this scheme 2,, adjust the relative height relation of substrate and photographic unit by Z-direction travel mechanism.In addition,, adjust the relative position relation of substrate and photographic unit, thus, switch shooting area by XY direction of principal axis travel mechanism.In addition, measure mechanism, follow the shooting and the mensuration of each photographic unit,, measure the departure of the short transverse of predetermined relatively datum grade,, judge that this departure is whether in predetermined allowed band by decision mechanism at each shooting area by departure.In addition, in the 1st shooting area, judge the occasion of above-mentioned departure in predetermined allowed band by decision mechanism, passing through control gear, the state that keeps the relative height relation of substrate and above-mentioned photographic unit allows the shooting in the mensuration usefulness of the 1st shooting area.In addition, travel mechanism controls to the XY direction of principal axis, and shooting area is switched to the 2nd shooting area, and at this moment, travel mechanism controls to Z-direction, according to departure, relative height relation is compensated.Thus, and at each shooting area, adjust the such occasion of relative height relation and compare, guarantee the high speed of measuring.In addition, in the 1st shooting area, pass through decision mechanism, judge the not occasion in allowed band of above-mentioned departure, travel mechanism controls to Z-direction, according to departure, relative height relation is compensated, then, allow the shooting of the mensuration usefulness of the 1st shooting area.Therefore,, still apace relative height relation is compensated, thus, can reflect the height difference, measure then and there then and there even in the 1st shooting area, have under the situation on rapid difference of height (such as the slope etc. of breaking).Consequently, can under focusing state, correctly measure at each shooting area.
Scheme 3 relates to the described determinator of such scheme 2, it is characterized in that in above-mentioned the 1st shooting area, by above-mentioned decision mechanism, judge the not occasion in above-mentioned allowed band of above-mentioned departure, above-mentioned Z-direction travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, the shooting that permission is used at the said determination of the 1st shooting area, above-mentioned XY direction of principal axis travel mechanism is controlled, when shooting area is switched to the 2nd shooting area, keep above-mentioned relative height relation.
According to such scheme 3, the occasion that in to the 1st shooting area, compensates significantly, when switching to the 2nd shooting area, the relative height relation that temporarily keeps this to compensate.Therefore, in the 2nd shooting area,, then can guarantee the high speed of measuring more further as not compensating.
Scheme 4 relates to any one the described determinator in the such scheme 1～3, it is characterized in that it follows above-mentioned shooting and mensuration at above-mentioned each shooting area, the determination object that extracts determination object is set extracts mechanism.
According to scheme 4, extract mechanism by determination object and extract determination object, then, carry out the shooting and the mensuration of each shooting area.Thus, can carry out more correct mensuration at determination object.
Scheme 5 relates to scheme 4 described determinators, it is characterized in that above-mentioned substrate is a printed circuit board (PCB), the said determination object is the paste scolding tin that is arranged on the Copper Foil of printed circuit board (PCB), the said determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is with from can carry out blueness on above-mentioned printed circuit board (PCB), or the light-struck extraction of wavelength region may that meets this color with the rayed of irradiation means at above-mentioned printed circuit board (PCB), take by above-mentioned photographic unit and to obtain.
According to scheme 5, measure at the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB).Use irradiation means by extracting, on printed circuit board (PCB) here,, carry out blueness or meet the rayed of the wavelength region may of this color, extract mechanism by determination object,, extract the zone of paste scolding tin according to this shadow surface being taken the view data that obtains by photographic unit.Usually, in printed circuit board (PCB), Copper Foil has the color of red system, and paste scolding tin has the color of blue system.Thus, the relative Copper Foil part of the light of blue system, only deepening, and do not reflect.Thus, the Copper Foil part is darker, and the difference of light and shade increases.Therefore, can more correctly extract paste scolding tin, then, take, measure.
According to scheme 6, the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) is measured.Here, use irradiation means by extracting, on printed circuit board (PCB), carry out redness simultaneously or meet the rayed of small incident of the wavelength region may of this color, with blue or meet the rayed of big incident angle of the wavelength region may of this color, extract mechanism by determination object, according to this shadow surface being taken the view data that obtains, extract the zone of paste scolding tin by photographic unit.Usually, in printed circuit board (PCB), Copper Foil has the color of red system, and paste scolding tin has the color of blue system.So, the only deepening of the relative paste scolding tin part of the light of red system, and do not reflect, the relative Copper Foil part of the light of blue system, only deepening, and do not reflect.Thus, as blue image, the deepening more of Copper Foil part, as red image, the deepening more of paste scolding tin, like this, the difference of the light and shade of each color image increases.Therefore, can more correctly extract paste scolding tin, then, take, measure.
Scheme 7 relates to scheme 4 described determinators, it is characterized in that above-mentioned departure measures mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is by above-mentioned photographic unit, and the light of taking the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation obtains.
According to scheme 7, measure mechanism by departure, according to irradiation means the light of the regulation of irradiation face tilt ground irradiation being taken the view data that obtains by photographic unit,, the departure of relative datum height is carried out computing according to the principle of triangulation by compensation.Thus, do not make complex structure, can be by better simply structure, the measurement deviation amount.
Scheme 8 relates to scheme 7 described determinators, it is characterized in that the regulation light that is shone with irradiation means by above-mentioned compensation is linear light.
According to scheme 8,, thus, be easier to grasp the departure of relative datum height by the only linear light of compensation with the regulation of irradiation means irradiation.
Scheme 9 relates to scheme 4 described determinators, it is characterized in that above-mentioned departure measures mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is by above-mentioned photographic unit, shooting is obtained by the linear light of the regulation that compensation is shone above-mentioned substrate surface obliquely with irradiation means, and the linear light of afore mentioned rules is different from the light in the light wavelength zone of being shone when extracting mechanism's extraction determination object by the said determination object for its wavelength region may.
According to scheme 9, since the linear light of the regulation of substrate surface being shone obliquely with irradiation means by compensation for its wavelength region may with extracting the regional different light of light wavelength that shines when mechanism extracts determination object by determination object, even under the situation of the light the when linear light of event irradiation regulation at the same time and extraction determination object, photographic unit still can be distinguished such difference in color such as color camera, at this moment, can be easier to distinguish both.Thus, can carry out the extraction of determination object and the computing of departure simultaneously by 1 time shooting.Consequently, can further shorten minute, reduced data.
Scheme 10 relates to scheme 5 described determinators, it is characterized in that above-mentioned departure measures mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is to obtain by the linear light that above-mentioned photographic unit is taken the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation, and the linear light of afore mentioned rules is to be different from from above-mentioned extraction with the green of the irradiates light of irradiation means or meet the light of the wavelength region may of this color.
According to scheme 10, the linear light of the regulation of substrate surface being shone obliquely with irradiation means by compensation is green or meets the light of the wavelength region may of this color, with different by the light wavelength zone of extracting with the blue system of irradiation means irradiation or blue and red system.Thus, even the light when shining linear light at the same time and extracting determination object, photographic unit still can be distinguished such difference in color such as color camera, then can more easily distinguish both.So,, can carry out the extraction of determination object and the computing of departure simultaneously by 1 time shooting.Consequently, can further shorten minute, reduced data.
Scheme 11 relates to scheme 4 described determinators, it is characterized in that above-mentioned substrate is a printed circuit board (PCB), the said determination object is the paste scolding tin that is arranged on the Copper Foil of printed circuit board (PCB), the said determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is with from can be on above-mentioned printed circuit board (PCB), the light-struck extraction of the wavelength region may of stipulating at above-mentioned printed circuit board (PCB), is taken by above-mentioned photographic unit and to be obtained with the rayed of irradiation means;
In addition, above-mentioned departure is measured mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is to obtain by the linear light that above-mentioned photographic unit is taken the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation, and the linear light of afore mentioned rules is different from the light in the light wavelength zone of being shone with irradiation means by above-mentioned extraction for its wavelength region may.
According to scheme 11, can carry out the extraction of determination object and the computing of departure simultaneously by 1 time shooting.Consequently, can further shorten minute, reduced data.
In addition, above-mentioned departure is measured mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is to obtain by the linear light that above-mentioned photographic unit is taken the regulation of obliquely above-mentioned substrate surface being shone with irradiation means from compensation, and the linear light of afore mentioned rules is to be different from by the light 1st, 2nd wavelength region may, 3rd wavelength region may of above-mentioned extraction with the light of irradiation means irradiation.
According to scheme 12,, can carry out the extraction of determination object and the computing of departure simultaneously by 1 shooting.Consequently, can further shorten minute, reduced data.In addition, particularly, can extract paste scolding tin more clearly by the 1st wavelength region may and the 2nd wavelength region may being set in the wavelength region may of the color that is fit to above-mentioned Copper Foil, scolding tin as determination object.
According to 13 schemes, owing to can shine the regulation light of self compensation at the same time, after using the light of irradiation means, in fact take, so realize above-mentioned action effect more really by photographic unit from extraction with irradiation means.
Measure and use irradiation means, this mensuration can be to being arranged at the light of the determination object irradiation regulation on the substrate with irradiation means;
Compensation irradiation means, this compensation can be shone obliquely above-mentioned substrate surface with irradiation means and be different from the pattern light of said determination with the wavelength region may of the regulation of the light of irradiation means;
Photographic unit, this photographic unit can be taken the determination object that has shone afore mentioned rules light and pattern light simultaneously in a plurality of shooting areas each;
Mensuration mechanism, this measures the view data of mechanism according to the regulation light of taking by above-mentioned photographic unit, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
The departure arithmetical organ, this departure arithmetical organ carries out computing according to the view data of taking the above-mentioned pattern light that obtains by above-mentioned photographic unit to the departure of relative datum height.
According to scheme 14 described schemes, to being arranged at the determination object on the substrate, by the light of measuring with irradiation means irradiation regulation.In addition, with irradiation means substrate surface is shone obliquely the pattern light of the wavelength region may that is different from the regulation of measuring the light of using irradiation means by compensation.In addition, the determination object that has shone the light of regulation and pattern light simultaneously is by photographic unit, takes in a plurality of shooting areas each.Then, according to the view data of the light of the regulation of taking by photographic unit, by measuring mechanism, at determination object, carry out that two dimension is measured and three-dimensional measurement at least one mensuration.In addition, according to the view data of taking the above-mentioned pattern light that obtains, the departure of relative datum height is carried out computing by the departure arithmetical organ by photographic unit.Thus, can by better simply structure, departure be measured not making under the baroque situation.In addition, can reflect this departure, measure.In addition, in this programme, irradiation comes self compensation with the pattern light of irradiation means and the light of using irradiation means from mensuration at the same time, then, in fact takes by photographic unit.Thus, with respect in the past, have to after the shooting of carrying out repeatedly, to measure the situation with the computing of departure, can take by 1 time, add mensuration through the departure of calculation process.Consequently, can further shorten minute.In addition, because the light of regulation is respectively different with the wavelength region may of light pattern,, be difficult to departure computing and mensuration are counteracted so distinguish both easily.
Scheme 15 relates to a kind of determinator, and this determinator comprises:
Measure and use irradiation means, this mensuration can be to being arranged at the light of the determination object irradiation regulation on the substrate with irradiation means;
Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, in the shooting area of regulation, by the compensation irradiation means of the pattern light of the wavelength region may that can shine regulation, obliquely above-mentioned substrate surface is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of said determination object, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, can be on above-mentioned substrate, the light-struck extraction of carrying out the wavelength region may different with the wavelength region may of afore mentioned rules,, is taken it and to be obtained by above-mentioned photographic unit at above-mentioned substrate with the rayed of irradiation means;
Shine at the same time from the pattern light of above-mentioned compensation, after using the light of irradiation means,, take by above-mentioned photographic unit from above-mentioned extraction with irradiation means.
According to scheme 15, use irradiation means by extracting, on substrate, carry out rayed, extract mechanism by determination object, according to take the view data that this shadow surface obtains by photographic unit, the zone of determination object is extracted.Therefore, can after more correctly determination object be extracted, take, measure.In addition, measure mechanism by departure,, substrate surface is shone obliquely the pattern light of the wavelength region may of regulation according to using irradiation means by compensation, by photographic unit shadow surface is taken the view data that obtains, the departure of relative datum height is carried out computing.Thus, can be not making under the baroque situation, by better simply structure, the measurement deviation amount.In addition, can reflect departure, measure.In addition, in this scheme, irradiation simultaneously comes the pattern light of self compensation with irradiation means, with the light of using irradiation means from extraction, in fact by photographic unit, takes then.Therefore, with respect to in the past, have to after repeatedly taking, extract the situation with the computing of departure, can carry out the extraction in determination object zone and the computing of departure by 1 time shooting, consequently, can further shorten minute, reduced data.In addition, because each light wavelength zone is different respectively, so extraction, computing are not counteracted.
Scheme 16 relates to a kind of determinator, and this determinator comprises:
Measure and use irradiation means, this mensuration can be to the light of the irradiation of the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) regulation with irradiation means;
Photographic unit, this photographic unit can be taken the light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, in the shooting area of regulation, by the compensation irradiation means of the pattern light of the wavelength region may that can shine regulation, obliquely above-mentioned substrate surface is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, to use the rayed of irradiation means at above-mentioned printed circuit board (PCB) from the light-struck extraction that can on above-mentioned printed circuit board (PCB), carry out the wavelength region may different with the wavelength region may of afore mentioned rules, by above-mentioned photographic unit, it is taken obtain;
Shine at the same time from the pattern light of above-mentioned compensation, after using the light of irradiation means, take by above-mentioned photographic unit from above-mentioned extraction with irradiation means.
According to this scheme 16, use irradiation means by extracting, on printed circuit board (PCB), carry out rayed, extract mechanism by determination object, according to take the view data that this shadow surface obtains by photographic unit, extract the zone of paste scolding tin.Therefore, can after more correctly extract paste scolding tin, take, measure.In addition, measure mechanism by departure, according to by the compensation with irradiation means to substrate surface, the pattern light of the wavelength region may of irradiation regulation obliquely, this shadow surface is taken the view data that obtains by photographic unit, according to the principle of triangulation, the departure of relative datum height is carried out computing.Thus, can be not making under the baroque situation, by better simply structure, the measurement deviation amount.In addition, can reflect this departure, measure.In addition, in this programme, irradiation simultaneously comes self compensation with the pattern light of irradiation means and the light of using irradiation means from extraction, then, in fact takes by photographic unit.Thus, with respect in the past, have to after the shooting of carrying out repeatedly, extract the situation with the computing of departure, can carry out the extraction of paste soldering tin and the computing of departure by once taking, consequently, can further shorten minute, reduced data.In addition, because each light wavelength zone is different respectively, so extract operation is not counteracted.
Scheme 17 relates to a kind of determinator, and this determinator comprises:
Measure and use irradiation means, this mensuration can be to the light of the irradiation of the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) regulation with irradiation means;
Photographic unit, this photographic unit can be taken the light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, in the shooting area of regulation, by the compensation irradiation means of the pattern light that can shine the 3rd wavelength region may, obliquely above-mentioned printed circuit board (PCB) face is shone this pattern light, take by above-mentioned photographic unit and obtain;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, can on above-mentioned printed circuit board (PCB), carry out the rayed of the small incident of 1st wavelength region may different simultaneously with above-mentioned the 3rd wavelength region may, with light-struck extraction of the big incident angle of 2nd wavelength region may different with the above-mentioned the 3rd and the 1st wavelength region may with the rayed of irradiation means at above-mentioned printed circuit board (PCB), by above-mentioned photographic unit it is taken and to obtain;
Shine at the same time from the pattern light of above-mentioned compensation usefulness irradiation means and from behind the above-mentioned extraction usefulness light of irradiation means, take by above-mentioned photographic unit.
According to scheme 17, by extracting the rayed of on printed circuit board (PCB), carrying out the small incident of the 1st wavelength region may with irradiation means simultaneously, the rayed of incident angle greatly with the 2nd wavelength region may, extract mechanism by determination object, according to following view data, extract the zone of paste scolding tin, this view data is taken this shadow surface by the determination object photographic unit and is obtained.Usually and since present with printed circuit board (PCB) on the Copper Foil color different with paste scolding tin, so, can extract paste scolding tin part clearly by making suitably suitable these colors of each wavelength region may.Therefore, can more correctly extract paste scolding tin, then, take, measure.In addition, measure mechanism by departure, according to view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data be by compensation with irradiation means to substrate surface irradiation pattern light obliquely, take by photographic unit that this shadow surface obtains.Thus, can be not making under the baroque situation, with better simply structure, the measurement deviation amount.In addition, can reflect this departure, measure.In addition, in this programme, irradiation simultaneously comes the pattern light of self compensation with irradiation means, with the light of using irradiation means from extraction, then, in fact takes by photographic unit.Thus, can carry out the extraction of paste scolding tin and the computing of departure by 1 shooting.Consequently, can further shorten determination data, reduced data.In addition, because each light wavelength zone is different respectively, so extraction, computing are not counteracted.
Scheme 18 relates to a kind of determinator, and this determinator comprises:
Measure and use irradiation means, this mensuration can be to the light of the irradiation of the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) regulation with irradiation means;
Photographic unit, this photographic unit can be taken the light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, at the shooting area of regulation, by shining green or meeting the compensation irradiation means of the pattern light of this color, obliquely above-mentioned substrate surface is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, will be from can on above-mentioned printed circuit board (PCB), carrying out simultaneously with red or meet the rayed of small incident of the wavelength region may of this color, with blue or light-struck extraction of big incident angle of wavelength region may of meeting this color with the rayed of irradiation means at above-mentioned printed circuit board (PCB), by above-mentioned photographic unit, it is taken obtain; Shine at the same time from the pattern light of above-mentioned compensation, after using the light of irradiation means, take by above-mentioned photographic unit from above-mentioned extraction with irradiation means.
According to scheme 18, use irradiation means by extracting, the rayed of the small incident of the wavelength region may of on printed circuit board (PCB), carrying out redness simultaneously or meeting with this color, rayed with the big incident angle of wavelength region may blue or that meet with this color, by the determination object photographic unit, according to following view data, extract the zone of paste scolding tin, this view data is taken shadow surface by the determination object photographic unit and is obtained.Usually, because on printed circuit board (PCB), Copper Foil has the color of red system, paste scolding tin has the color of blue system.So, the relative paste scolding tin of the light of red system part, only deepening, and do not reflect, the relative Copper Foil part of the light of blue system, only deepening, and do not reflect.Thus, because as blue image, the Copper Foil part is darker, as red image, paste scolding tin part is darker, so the difference of the light and shade of shades of colour image increases.Therefore, can more correctly extract paste scolding tin, then, take, measure.In addition, measure mechanism by departure, according to view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data be by compensation with irradiation means to substrate surface irradiation pattern light obliquely, by photographic unit this shadow surface is taken and to be obtained.Thus, can be not making under the baroque situation, by better simply structure, the measurement deviation amount.In addition, can reflect this departure, measure.In addition, in this programme, irradiation simultaneously comes the pattern light of self compensation with irradiation means, and from extracting with the unify light of blue system of the red colour system of irradiation means, in fact passes through photographic unit then, takes.Thus, can carry out the extraction of paste soldering tin and the computing of departure, consequently, can further shorten determination data, reduced data by 1 shooting.In addition, because each light wavelength zone is different respectively, so extraction, computing are not counteracted.
Scheme 19 relates to any one the described determinator in the scheme 14～18, it is characterized in that it according to the operation result according to above-mentioned departure arithmetical organ, and the mode of adjusting the relative height relation of above-mentioned substrate and above-mentioned photographic unit constitutes.
According to scheme 19, owing to can in fact adjust mensuration after the relative height relation, so can guarantee more correct mensuration.
Scheme 20 relates to any one the described determinator in 14～18, it is characterized in that the pattern light that is shone with irradiation means by above-mentioned compensation is linear light.
According to scheme 20, be easier to grasp the departure of relative datum height.
In addition, in above-mentioned each scheme, measure the mensuration of mechanism and also can when the transfer of shooting area, carry out.In this occasion, do not wait the situation that finishes shooting area is shifted to be determined.Thus, can effectively measure, can shorten total minute.
In addition, also can be by following testing fixture specific implementation, it has and is provided with the determinator of describing in above-mentioned each scheme, and according to the measurement result according to said determination mechanism, whether good judgment mode constitutes to carry out the said determination object.If when carrying out whether good inspection, realize like this, with the corresponding action effect of above-mentioned each scheme.
Description of drawings
Fig. 1 is for representing the skeleton view of the determinator of an embodiment in a schematic way;
Fig. 2 extracts the synoptic diagram of forming with the configuration of irradiation means etc. with irradiation means and the compensation of Z axle for expression scolding tin;
Fig. 3 is the synoptic diagram that is used to illustrate the design when side-play amount is calculated;
Fig. 4 is the block scheme of the electric composition of explanation main control mechanism etc.;
Fig. 5 (a), Fig. 5 (b) are the figure of view data etc. of each inspection area that expression is used to illustrate the action effect of embodiment.
Embodiment
With reference to the accompanying drawings, an embodiment is described.
Fig. 1 is the profile composition diagram of the three directional measuring device 1 of the determinator of representing present embodiment in a schematic way.In addition, in the present embodiment, this three directional measuring device 1 is by printing state testing fixture specific implementation, and this printing state testing fixture is used for checking the printing state that is printed in the paste scolding tin (main composition determination object) on the printed circuit board (PCB) K (Copper Foil).
This three directional measuring device 1 has pedestal 2, and on this pedestal 2, is provided with X-axis travel mechanism 3 and y-axis shift actuation mechanism 4.On Y mobility motivation structure 4, be provided with guide rail 10, on this guide rail 10, be provided with printed circuit board (PCB) K as substrate.In addition, by X-axis travel mechanism 3 and 4 actions of y-axis shift actuation mechanism, printed circuit board (PCB) K can move along X-direction and Y direction.This X-axis travel mechanism 3 and y-axis shift actuation mechanism 4 constitute the XY axial moving mechanism.
This three directional measuring device 1 comprises as the three-dimensional measurement irradiation means of measuring with irradiation means 5; CCD camera (color camera) 6 as image mechanism; The main control mechanism 7 that is electrically connected with this CCD camera 6.Three-dimensional measurement constitutes from the mode that oblique upper shines the light pattern of regulation according to the surface to printed circuit board (PCB) K with irradiation means 5.This CCD camera 6 be arranged at printed circuit board (PCB) K directly over, can take the part that light pattern shone on this printed circuit board (PCB) K.In addition, in main control mechanism 7, by the three-dimensional measurement method of regulation, according to by above-mentioned CCD camera 6 shot image data, carry out Flame Image Process, carry out the inspection of the printing state of the three-dimensional measurement (being mainly elevation measurement) of paste scolding tin and paste scolding tin.That is, main control mechanism 7 has according to the height of paste scolding tin (volume), checks the inspection body 8 (with reference to Fig. 4) of printing state.In addition, when the three-dimensional measurement of present embodiment, be fit to adopt assay method arbitrarily such as phase-shift method, light cross-section method, space code method, focusing.
In the present embodiment, above-mentioned CCD camera 6 is installed in the Z axle travel mechanism 9.That is,, this CCD camera 6 is moved along the vertical direction by driving Z axle travel mechanism 9.Thus, can change the relation of the relative height of printed circuit board (PCB) K and CCD camera 6.
In addition, the three directional measuring device 1 of present embodiment has when above-mentioned 3 dimensions are measured (following), is used to extract mechanism's (determination object extracts mechanism) in the zone that is provided with paste scolding tin.This mechanism comprises that scolding tin extracts with irradiation means 11.This scolding tin extracts with irradiation means 11 and follows the irradiation of three-dimensional measurement with the light pattern of irradiation means 5, to printed circuit board (PCB) K, and the light of irradiation regulation.If more particularly, then scolding tin extracts with irradiation means 11 as shown in Figure 2, a pair of annular lamp 12,13 about having.
The annular lamp 12 on top is according to can small incident realizing rayed, and the mode that can shine red light constitutes.The annular lamp 13 of bottom is according to can big incident angle realizing light-struck while, and the mode that can shine blue light constitutes.Usually, in printed circuit board (PCB) K, owing on this substrate K, the Copper Foil of red system is set, print the paste scolding tin of blue system thereon,, and do not reflect so the relative paste scolding tin of red light part is only darker, the relative Copper Foil part of blue light, darker, and do not reflect.Thus, darker as the Copper Foil part of blue image, darker as the paste scolding tin part of red image, like this, the contrast of the light and shade of versicolor image increases.Therefore, in the present embodiment, follow three-dimensional measurement, according to the mode of the region extraction of the paste scolding tin that carries out determination object, by two annular lamp 12,13, the red blue light of irradiation by CCD camera 6, is taken this shadow surface, in main control mechanism 7, can specify the operation of the setting area of (extraction) paste scolding tin.
In addition, the three directional measuring device 1 of present embodiment has when above-mentioned three-dimensional measurement (to be followed), is used for the mechanism that the warpage to printed circuit board (PCB) K compensates.This mechanism comprises Z axle compensation irradiation means 14.This Z axle compensation is followed the irradiation of above-mentioned three-dimensional measurement with the light pattern of irradiation means 5 with irradiation means 14, carries out the irradiation that above-mentioned scolding tin extracts the light of using irradiation means 11, and relative printed circuit board (PCB) K, and irradiation is as the linear light of the pattern light of regulation.More particularly, the compensation of this Z axle can be shone the pattern light pattern light of green (in the present embodiment, for) of the wavelength region may different with annular lamp 12,13 with irradiation means 14.
Carry out the irradiation of this Z axle compensation with the linear light of the green of irradiation means 14, the warpage of printed circuit board (PCB) K causes so that grasp, " height offset " of relative datum height.Promptly, as shown in Figure 3, with irradiation means 14, shine linear light, by this Z axle compensation by CCD camera 6, this light is taken, in this occasion, if at certain shooting area, as shown in the diagram, the absolute altitude difference of printed circuit board (PCB) K, then the position of the linear light of taking by CCD camera 6 is along the left and right directions difference.In the present embodiment, in main control mechanism 7,,, the height offset of printed circuit board (PCB) K is carried out computing according to the principle of triangulation according to the position of above-mentioned linear light.That is, main control mechanism 7 comprises Z axle offset amount arithmetical organ 15 (with reference to the Fig. 4) that measure mechanism as the side-play amount of the height offset of printed circuit board (PCB) K being carried out computing.
Electric composition is described to being the three directional measuring device 1 at center with this main control mechanism 7 below.
As shown in Figure 4, CCD camera 6 is electrically connected with main control mechanism 7.This main control mechanism 7 comprises inspection body 8 and Z axle offset amount arithmetical organ 15 as above-mentioned.In addition, also comprise the departure decision mechanism 16 as decision mechanism, whether this mechanism is fit to judge to " departure " according to the operation result of Z axle offset amount arithmetical organ 15.
Main control mechanism 7 is connected with irradiation control gear 21.This irradiation control gear 21 extracts irradiation means 11 (annular lamp 12 with above-mentioned three-dimensional measurement with irradiation means 5, scolding tin, 13), Z axle compensation connects with irradiation means 14, according to the control signal from above-mentioned main control mechanism 7, each irradiation means 5 of switching controls, 11,14 irradiation.
Main control mechanism 7 moves control gear 22 with X-axis and is connected with the moving control gear 23 of y-axis shift.This X-axis moves control gear 22 and the moving control gear 23 of y-axis shift suitably carries out drive controlling to above-mentioned X-axis travel mechanism 3 and y-axis shift actuation mechanism 4, so that switch each shooting area.Thus, printed circuit board (PCB) K is suitably moved towards X-direction, Y direction.
In addition, main control mechanism 7 is connected with the mobile control gear 24 of Z axle.The mobile control gear of this Z axle 24 is according to from main control mechanism 7, and the input signal of departure decision mechanism 16 particularly carries out drive controlling to the travel mechanism 9 of above-mentioned Z axle.Thus, can adjust the relative height relation (, it being compensated) of CCD camera 6 and printed circuit board (PCB) K having the occasion of warpage.
Be the center with the control content of being undertaken by main control mechanism 7 below, the action effect of the above-mentioned such three directional measuring device that constitutes 1 of object is described.
This main control mechanism 7 at first, in the 1st shooting area by above-mentioned irradiation control gear 21, two annular lamp 12 using irradiation means 11 are extracted in irradiation from scolding tin, 13 light, and irradiation is from the linear light of Z axle compensation with irradiation means 14, so that carry out the extraction of paste soldering tin and the mensuration of height tolerance amount.Then, by CCD camera 6, the irradiates light of extraction usefulness and the 1st shooting area of linear light irradiation are taken.At this moment, about the view data that obtains by shooting, be mixed with red blue light and the linear light that compensates from the Z axle with the green of irradiation means 14 from two annular lamp 12,13.But, because each light wavelength zone is different respectively, so, still can distinguish these data easily even under the situation that is 1 view data.In addition, according to above-mentioned view data, carry out the extraction of paste soldering tin.
Then, this main control mechanism 7 (Z axle departure arithmetical organ 15) according to the linear light of the green in the above-mentioned view data, Za carries out computing to the height tolerance amount.Such as, in Fig. 5 (a), linear light relative datum absolute altitude (if there is not situation such as warpage, linear light will arrive the position of this position), deviation takes place in amount (occasion in the drawings is α) according to the rules.In this Z axle departure arithmetical organ 15,,, calculate the departure Za of the Z-direction (short transverse) of relative datum absolute altitude according to the principle of above-mentioned triangulation according to the departure of this regulation.
Then, whether main control mechanism 7 (departure decision mechanism 16) is judged in predetermined reference range above-mentioned departure Za.Then, according to this judged result, carry out following control.
(1) in the occasion of departure Za in predetermined reference range
In the occasion of departure Za in reference range, this main control mechanism 7 carries out three-dimensional measurement at the above-mentioned paste soldering tin that has extracted in the 1st shooting area.That is, by irradiation control gear 21, by the light pattern of three-dimensional measurement with irradiation means 5 irradiation regulations.Then, take the light pattern that shines by CCD camera 6.
After shooting finishes, this main control mechanism 7 is according to move the moving control gear 23 of control gear 22 and y-axis shift by X-axis, X-axis travel mechanism 3 and y-axis shift actuation mechanism 4 are driven, and the mode that shooting area is switched to next shooting area (the 2nd shooting area) is controlled.
Then, in the way of the switching of this shooting area, this main control mechanism 7 drives Z axle travel mechanism 9 by the mobile control gear 24 of Z axle, makes CCD camera 6 move above-mentioned departure Za, and this absolute altitude is compensated (adjustment).Thus, at next shooting area, the departure in the allowed band of the shooting area of last time is compensated, in more occasion, CCD camera 6 is suitable with the absolute altitude relation on printed circuit board (PCB) K surface.
In addition, between the transfer period of this shooting area, main control mechanism 7 (inspection body 8) carries out three-dimensional measurement (high computational of paste scolding tin and volume calculation) according to the extracted data and the view data of above-mentioned the 1st shooting area, carries out the judgement whether printing state of paste scolding tin is fit to.Like this, can effectively measure, can shorten total minute by between the transfer of shooting area, measuring (computing).
(2) occasion in the reference range that departure Za be not scheduled to
On the other hand, in the above-mentioned departure Za occasion in reference range not, main control mechanism 7 is at the 1st shooting area, and is at first, remarkable in the phenomenons such as warpage of printed circuit board (PCB) K, the occasion that must compensate apace, follow three-dimensional measurement,, Z axle travel mechanism 9 is driven by the mobile control gear 24 of Z axle, make CCD camera 6 move above-mentioned departure Za, its absolute altitude is compensated (adjustment).Thus,, apace departure is compensated at the 1st shooting area, the special circumstances such as unusual of short of CCD camera 6, CCD camera 6 is fit to the absolute altitude relation on printed circuit board (PCB) K surface.
After compensation, this main control mechanism 7 is once more by irradiation control gear 21, and irradiation is from the light of scolding tin extraction with two annular lamp 12,13 of irradiation means 11, and irradiation is from the linear light of Z axle compensation with irradiation means 14.In addition, in CCD camera 6, take the irradiates light of extraction usefulness and the 1st shooting area of linear light irradiation, carry out the extraction of paste soldering tin once more.
In addition, at the moment, because by above-mentioned compensation, the absolute altitude relation is fit to, thus needn't confirm departure once more basically, but be careful, also can be once more according to above-mentioned linear light calculation deviation amount Za.In addition, break away from the such occasion of allowed band, also can be used as and produce unusual situation, carry out false judgment at the departure Za (repeatedly) that calculates once more.
But because basically, by above-mentioned compensation, the absolute altitude relation in the 1st shooting area is suitable, so main control mechanism 7 then allows the carrying out of three-dimensional measurement.That is, by irradiation control gear 21, by the light pattern of three-dimensional measurement with irradiation means 5 irradiation regulations.Then, take the light pattern that shines by CCD camera 6.After shooting finishes, main control mechanism 7 is according to move the moving control gear 23 of control gear 22 and y-axis shift by X-axis, X-axis travel mechanism 3 and y-axis shift actuation mechanism 4 are driven, and the mode that shooting area is switched to next shooting area (the 2nd shooting area) is controlled.
Then, when this shooting area switched, shooting area was switched in that Z axle travel mechanism 9 is driven under the situation of (the absolute altitude position to CCD camera 6 does not compensate) in this main control mechanism 7.Its reason is that at above-mentioned the 1st shooting area compensation finishes.
Between the transfer period of above-mentioned shooting area, main control mechanism 7 (inspection body 8) is according to the extracted data once more and the view data of above-mentioned the 1st shooting area, carry out three-dimensional measurement (high computational of paste scolding tin and volume calculation), judge whether the printing state of paste scolding tin is fit to.Like this,, measure (computing), can effectively measure, can shorten total minute by during the transfer of shooting area.
In the present embodiment, by main control mechanism 7, at each shooting area, carry out above-mentioned operation repeatedly, in addition, in the moment that whole shooting area inspections finishes, three-dimensional measurement and inspection finish.
As top specifically described, in the present embodiment, follow the three-dimensional measurement of each shooting area, measure the departure Za of the short transverse of predetermined relatively datum grade, judging the occasion of this departure Za in allowed band, state in the relative height relation that keeps printed circuit board (PCB) K and CCD camera 6 carries out the shooting of this shooting area.Then, when transferring to next shooting area, Z axle travel mechanism 9 is controlled,, the absolute altitude relation is compensated according to above-mentioned departure Za.
Such as, as shown in Fig. 5 (a), in the inspection area (shooting area) A, the departure Za of relative datum absolute altitude is the α in allowed band.In this occasion,, under situation the about height of CCD camera 6 not being compensated, carry out the shooting that three-dimensional measurement is used at this inspection area A.Then, when transferring to the follow-on check area B, carry out computing, inspection,, the height of CCD camera 6 is compensated with the value of above-mentioned α.Then, in the follow-on check area B, carry out same processing.When transferring to inspection area B, because the absolute altitude of CCD camera 6 is compensated, so in more occasion, the departure of relative datum absolute altitude is less.
Thus, and at each shooting area, adjust the such occasion of relative height relation and compare, guarantee the high speed of measuring.
In addition,, Z axle travel mechanism 9 is controlled, thus,, the absolute altitude relation is compensated at once according to above-mentioned departure Za judging the not occasion in allowed band of departure Za.Carry out the shooting and the mensuration of this shooting area thereon.
Such as, as shown in Fig. 5 (b), at inspection area A, the departure Za of relative datum height is the α in allowed band.In this occasion,,, under situation the about height of CCD camera 6 not being compensated, carry out the shooting that three-dimensional measurement is used at this inspection area A as above-mentioned.Then, when transferring to the follow-on check area B, carry out computing, inspection, and according to the value of above-mentioned α, the height of CCD camera 6 is compensated.Then, in the follow-on check area B, carry out same processing.At this moment, in the B of this inspection area, if having rapid difference of height, then this departure Za breaks away from allowed band.In this occasion, in the present embodiment,, the absolute altitude of CCD camera 6 is compensated at this inspection area B.
Therefore, even, herein, still carry out the compensation of relative elevation apace,, measure so can reflect the height residual quantity herein owing to be that the regulation shooting area exists under the situation of rapid difference of height.Consequently, at each shooting area, can correctly measure at the state of focusing.
In addition, as shown in Fig. 5 (b), at inspection area B, the occasion that significantly compensates, when switching to follow-on check zone (shooting area), the relative relation that at first keeps this to compensate.In other words, in the way of switching, absolute altitude is not compensated.Therefore, if needn't compensate, then will guarantee the high speed of measuring further in the follow-on check zone.
In addition, in the present embodiment, follow shooting and mensuration, extract determination object in each inspection area.Thus, can carry out more correct mensuration to determination object.
Also have, because the irradiates light of this extraction usefulness is different with the wavelength region may of the linear light that is used for calculation deviation amount Za, even under the irradiates light of the former extraction of irradiation at the same time usefulness and the situation of linear light,, then can more easily distinguish both if CCD camera 6 can be distinguished the difference of color.Thus, by once taking, can carry out the extraction of paste scolding tin and the calculating of departure Za simultaneously.Consequently, can further shorten minute, reduction data volume.
Simultaneously, in the present embodiment, can when shifting, shooting area carry out the high computational and the inspection of paste scolding tin.That is, end to be determined such as do not have, the situation that shooting area is shifted.Thus, can effectively measure, can shorten total minute.
In addition, also can be not limited to the record content of the foregoing description, also comparable as if following such enforcement.
(a) in the above-described embodiments, it is at the occasion specific implementation that mainly is paste scolding tin, elevation measurement (three-dimensional measurement), still, also can measure such as the two dimension of the area estimation that carries out paste scolding tin etc.In this occasion, also can adopt the extraction of paste scolding tin and two dimension to measure simultaneously.In other words, also can omit the extraction operation, carry out irradiation that the departure computing uses and the irradiation of measuring usefulness simultaneously, then, take,, carry out the computing of departure, it is reflected and measures according to this view data.
(b), but except the CCD camera of the such shooting area of the foregoing description, also can be line formula camera as photographic unit.In addition, also can be such as, CMOS camera etc., can be the camera that area-shaped or wire are taken, and be not necessarily limited to the CCD camera.
(c) in the above-described embodiments, extract the paste soldering tin, then, carry out three-dimensional measurement, still, also can omit relevant extraction mechanism.
(d) light source that constitutes each irradiation means 5,11,14 both can be Halogen lamp LED, also can be LED.In addition, but also can adopt the irradiation means of irradiating laser.
(e) in the above-described embodiments, along the XY direction of principal axis, CCD camera 6 is along the mobile respectively scheme of Z-direction at printed circuit board (PCB) K in employing, but both also can relatively move, such as, printed circuit board (PCB) K can be along moving up and down, and CCD camera 6 can move along the XY direction of principal axis.
(f) in the above-described embodiments, be that the testing fixture of the printing state by being used to check paste scolding tin is realized.Relative therewith, the device specific implementation of other that the manufacturing that above-mentioned such scheme also can be by substrate etc. are relevant.Such as, also can realize by the testing fixture that has or not that is used to check the installment state that is installed on the electronic unit on the substrate, defective etc.
(g) in the above-described embodiments, with the green linear light of irradiation means 14 irradiations, still,, then be not necessarily limited to green occasion if be the wavelength region may different with the irradiates light that is used to extract by the compensation of Z axle, such as, also can be and can shine infrared ray, ultraviolet scheme.In addition, if take, then also can shine the light of the wavelength region may identical with the light that extracts usefulness for being independent of the irradiates light that is used to extract usefulness.
(h) in the above-described embodiments, shine linear lights by the compensation of Z axle with irradiation means 14, still, this linear light both can be one, also can be many.In the occasion that is many linear lights, they also can distinguish keeping parallelism, also can have (mutually intersect like that) regulation angle (such as, also can be vertically).In addition, the width of corresponding linear light both can be the width above shooting area, also can sufficiently be shorter than this width, such as being a little.But,, then can more positively comprise the part that can stably measure the height tolerance amount such as Copper Foil portion etc. if for covering the width of inspection area.
Claims (19)
1. determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to being arranged at the determination object on the substrate, the light of irradiation regulation with irradiation means;
Photographic unit, this photographic unit can be taken the light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out two dimension and measures or three-dimensional measurement;
It is characterized in that it is provided with:
Travel mechanism, this travel mechanism can adjust the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
Departure is measured mechanism, and this departure mensuration mechanism follows above-mentioned shooting and the mensuration at each shooting area, at the shooting area of regulation, measures the departure of the short transverse of predetermined relatively datum grade;
Decision mechanism, this decision mechanism are judged by above-mentioned departure and are measured the departure of the short transverse that mechanism measures whether in the allowed band of being scheduled to;
This determinator constitutes like this, promptly, passing through above-mentioned decision mechanism, judge the occasion of above-mentioned departure in predetermined allowed band,, carry out the shooting of using at the said determination of the shooting area of this regulation at the state of the relative height relation that keeps above-mentioned substrate and above-mentioned photographic unit, when transferring to next shooting area, above-mentioned control gear is controlled,, above-mentioned relative height relation is compensated according to above-mentioned departure;
By above-mentioned decision mechanism, judge the not occasion in above-mentioned allowed band of above-mentioned departure, above-mentioned travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, at the shooting area of this regulation, carry out the shooting that said determination is used.
2. determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to being arranged at the determination object on the substrate, the light of irradiation regulation with irradiation means;
Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out two dimension and measures or three-dimensional measurement;
It is characterized in that it is provided with:
Z-direction travel mechanism, this Z-direction travel mechanism can adjust the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
XY direction of principal axis travel mechanism, this XY direction of principal axis travel mechanism can adjust the relative position relation between above-mentioned substrate and the photographic unit, so that switch shooting area;
Departure is measured mechanism, and this departure is measured above-mentioned shooting and the mensuration that mechanism follows each shooting area, measures the departure of the short transverse of predetermined relatively datum grade at each shooting area;
Whether decision mechanism, this decision mechanism are judged the departure of measuring the short transverse that mechanism measures by above-mentioned departure, in the allowed band of being scheduled to;
Control gear, this control gear is at the 1st shooting area, by above-mentioned decision mechanism, judge the occasion of above-mentioned departure in predetermined allowed band, state in the relative height relation that keeps above-mentioned substrate and above-mentioned photographic unit, the shooting that permission is used at the said determination of the 1st shooting area, when above-mentioned XY direction of principal axis travel mechanism is controlled, when shooting area is switched to the 2nd shooting area, above-mentioned Z-direction travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated;
In the 1st shooting area, by above-mentioned decision mechanism, judge the not occasion in above-mentioned allowed band of above-mentioned departure, above-mentioned Z-direction travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, control gear is set, the shooting that this control gear permission is used at the said determination of the 1st shooting area.
3. determinator according to claim 2, it is characterized in that in above-mentioned the 1st shooting area, by above-mentioned decision mechanism, judge the not occasion in above-mentioned allowed band of above-mentioned departure, above-mentioned Z-direction travel mechanism is controlled, according to above-mentioned departure, above-mentioned relative height relation is compensated, then, the shooting that permission is used at the said determination of the 1st shooting area, above-mentioned XY direction of principal axis travel mechanism is controlled, when shooting area is switched to the 2nd shooting area, keep above-mentioned relative height relation.
4. according to any one the described determinator in the claim 1～3, it is characterized in that following above-mentioned shooting and mensuration, the determination object that extracts determination object is set extracts mechanism at above-mentioned each shooting area.
5. determinator according to claim 4, it is characterized in that above-mentioned substrate is a printed circuit board (PCB), the said determination object is the paste scolding tin that is arranged on the Copper Foil of printed circuit board (PCB), the said determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is by can carrying out blue light-struck extraction irradiation means on above-mentioned printed circuit board (PCB), above-mentioned printed circuit board (PCB) is shone, and takes by above-mentioned photographic unit to obtain.
6. determinator according to claim 4, it is characterized in that above-mentioned substrate is a printed circuit board (PCB), the said determination object is the paste scolding tin that is arranged on the Copper Foil of printed circuit board (PCB), the said determination object extracts mechanism extracts above-mentioned paste scolding tin according to following view data zone, this view data is by carrying out red rayed and carry out blue light-struck extraction irradiation means with big incident angle with small incident simultaneously on above-mentioned printed circuit board (PCB), above-mentioned printed circuit board (PCB) is shone, take by above-mentioned photographic unit and obtain.
7. determinator according to claim 4, it is characterized in that above-mentioned departure measures mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is by above-mentioned photographic unit, and the light of taking the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation obtains.
8. determinator according to claim 7 is characterized in that the regulation light that shines with irradiation means from above-mentioned compensation is linear light.
9. determinator according to claim 4, it is characterized in that above-mentioned departure measures mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is by above-mentioned photographic unit, shooting is obtained by the linear light of the regulation that compensation is shone above-mentioned substrate surface obliquely with irradiation means, and the linear light of afore mentioned rules is different from the light in the light wavelength zone of being shone when extracting mechanism's extraction determination object by the said determination object for its wavelength region may.
10. determinator according to claim 5, it is characterized in that above-mentioned departure measures mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is to obtain by the linear light that above-mentioned photographic unit is taken the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation, the linear light of afore mentioned rules is green light, with different with the light of irradiation means from above-mentioned extraction.
11. determinator according to claim 4, it is characterized in that above-mentioned substrate is a printed circuit board (PCB), the said determination object is the paste scolding tin that is arranged on the Copper Foil of printed circuit board (PCB), the said determination object extracts mechanism extracts above-mentioned paste scolding tin according to following view data zone, this view data is by can be in light-struck extraction irradiation means of the fixed wavelength region may of the enterprising professional etiquette of above-mentioned printed circuit board (PCB), above-mentioned printed circuit board (PCB) is shone, take by above-mentioned photographic unit and obtain;
In addition, above-mentioned departure is measured mechanism according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is to obtain by the linear light that above-mentioned photographic unit is taken the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation, and the linear light of afore mentioned rules is different from the light in the light wavelength zone of being shone with irradiation means by above-mentioned extraction for its wavelength region may.
12. determinator according to claim 4, it is characterized in that above-mentioned substrate is a printed circuit board (PCB), the said determination object is the paste scolding tin that is arranged on the Copper Foil of printed circuit board (PCB), the said determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is by carrying out the 1st wavelength region may rayed and the light-struck extraction irradiation means of the 2nd wavelength region may that is different from the 1st wavelength region may with big incident angle with small incident simultaneously on above-mentioned printed circuit board (PCB), above-mentioned printed circuit board (PCB) is shone, take by above-mentioned photographic unit and obtain;
In addition, above-mentioned departure is measured mechanism according to the principle of following view data according to triangulation, departure to the relative datum height is carried out computing, this view data is to obtain by the linear light that above-mentioned photographic unit is taken the regulation of obliquely above-mentioned substrate surface being shone with irradiation means by compensation, and the linear light of afore mentioned rules is to be different from by the light of above-mentioned extraction with the 3rd wavelength region may of the 1st, the 2nd wavelength region may of the light of irradiation means irradiation.
13. determinator according to claim 11, it is characterized in that shining simultaneously from above-mentioned compensation with the light of the regulation of irradiation means with from above-mentioned extraction with behind the light of irradiation means, take by above-mentioned photographic unit.
14. a determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to being arranged at the light of the determination object irradiation regulation on the substrate with irradiation means;
Compensation irradiation means, this compensation can be shone obliquely above-mentioned substrate surface with irradiation means and be different from the pattern light of said determination with the provision wavelengths zone of the light of irradiation means;
Photographic unit, this photographic unit can be taken and shine the light of afore mentioned rules and the determination object of pattern light simultaneously in a plurality of shooting areas each;
Mensuration mechanism, this measures the view data of mechanism according to the light of the afore mentioned rules of taking by above-mentioned photographic unit, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
The departure arithmetical organ, this departure arithmetical organ carries out computing according to the view data of taking the above-mentioned pattern light that obtains by above-mentioned photographic unit to the departure of relative datum height;
Travel mechanism according to the operation result of above-mentioned departure arithmetical organ, adjusts the relative height relation of above-mentioned substrate and above-mentioned photographic unit.
15. a determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to being arranged at the determination object on the substrate, the light of irradiation regulation with irradiation means;
Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, shooting area in regulation, from the compensation irradiation means of the pattern light of the wavelength region may that can shine regulation, obliquely above-mentioned substrate surface is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of said determination object, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, by the light-struck extraction irradiation means that can on above-mentioned substrate, carry out the wavelength region may different with the wavelength region may of afore mentioned rules, above-mentioned substrate is shone, by above-mentioned photographic unit it is taken and obtain;
Travel mechanism according to the operation result of above-mentioned departure arithmetical organ, adjusts the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
After shining pattern light and the above-mentioned extraction usefulness light of irradiation means at the same time, take by above-mentioned photographic unit from above-mentioned compensation usefulness irradiation means.
16. a determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to the light of the irradiation of the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) regulation with irradiation means;
Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, at the shooting area of regulation, by the compensation irradiation means of the pattern light of the wavelength region may that can shine regulation, obliquely above-mentioned printed circuit board (PCB) face is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
The said determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is to follow the above-mentioned shooting and the mensuration of above-mentioned each shooting area, to use the rayed of irradiation means at above-mentioned printed circuit board (PCB) from the light-struck extraction that can on above-mentioned printed circuit board (PCB), carry out the wavelength region may different with the wavelength region may of afore mentioned rules, by above-mentioned photographic unit, it is taken obtain;
Travel mechanism according to the operation result of above-mentioned departure arithmetical organ, adjusts the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
Shine at the same time from the pattern light of above-mentioned compensation usefulness irradiation means and from behind the above-mentioned extraction usefulness light of irradiation means, take by above-mentioned photographic unit.
17. a determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) with irradiation means, the light of irradiation regulation; Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, in the shooting area of regulation, by the compensation irradiation means of the pattern light that can shine the 3rd wavelength region may, obliquely above-mentioned printed circuit board (PCB) face is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, by can on above-mentioned printed circuit board (PCB), carrying out the 1st wavelength region may rayed different and carry out the 2nd wavelength region may light-struck extraction irradiation means different with small incident simultaneously with the above-mentioned the 3rd and the 1st wavelength region may with big incident angle with above-mentioned the 3rd wavelength region may, above-mentioned printed circuit board (PCB) is shone, by above-mentioned photographic unit it is taken and obtain;
Travel mechanism according to the operation result of above-mentioned departure arithmetical organ, adjusts the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
Shine at the same time from the pattern light of above-mentioned compensation usefulness irradiation means and from behind the above-mentioned extraction usefulness light of irradiation means, take by above-mentioned photographic unit.
18. a determinator, this determinator comprises:
Measure and use irradiation means, this mensuration can be to the paste scolding tin on the Copper Foil that is arranged at printed circuit board (PCB) with irradiation means, the light of irradiation regulation;
Photographic unit, this photographic unit can be taken light-struck determination object of afore mentioned rules in a plurality of shooting areas each;
Measure mechanism, this measures mechanism according at least by above-mentioned photographic unit shot image data, at the said determination object, carries out at least one mensuration in two dimension mensuration and the three-dimensional measurement;
It is characterized in that this determinator is provided with:
The departure arithmetical organ, this departure arithmetical organ is according to following view data, principle according to triangulation, departure to the relative datum height is carried out computing, this view data is above-mentioned shooting and the mensuration of following at each shooting area, in the shooting area of regulation, by the compensation irradiation means that can shine green pattern light, obliquely above-mentioned printed circuit board (PCB) face is shone this pattern light, by above-mentioned photographic unit this shadow surface is taken and obtained;
Determination object extracts mechanism, this determination object extracts mechanism according to following view data, extract the zone of above-mentioned paste scolding tin, this view data is above-mentioned shooting and the mensuration of following at above-mentioned each shooting area, by can on above-mentioned printed circuit board (PCB), carrying out carrying out blue light-struck extraction irradiation means with small incident simultaneously with red rayed with big incident angle, above-mentioned printed circuit board (PCB) is shone, by above-mentioned photographic unit it is taken and obtain;
Travel mechanism according to the operation result of above-mentioned departure arithmetical organ, adjusts the relative height relation of above-mentioned substrate and above-mentioned photographic unit;
Shine at the same time from the pattern light of above-mentioned compensation usefulness irradiation means and from behind the above-mentioned extraction usefulness light of irradiation means, take by above-mentioned photographic unit.
19., it is characterized in that the pattern light that is shone with irradiation means by above-mentioned compensation is linear light according to any one the described determinator in the claim 14～18.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP363771/02 | 2002-12-16 | ||
| JP363771/2002 | 2002-12-16 | ||
| JP2002363771A JP3872007B2 (en) | 2002-12-16 | 2002-12-16 | Measuring device and inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1510393A CN1510393A (en) | 2004-07-07 |
| CN1261737C true CN1261737C (en) | 2006-06-28 |
Family
ID=32761829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200310118256 Expired - Lifetime CN1261737C (en) | 2002-12-16 | 2003-12-08 | Measuring devices |
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| Country | Link |
|---|---|
| JP (1) | JP3872007B2 (en) |
| CN (1) | CN1261737C (en) |
| TW (1) | TWI228023B (en) |
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|---|---|---|---|---|
| WO2012058830A1 (en) * | 2010-11-04 | 2012-05-10 | 深圳市华星光电技术有限公司 | Linewidth measuring device |
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-
2002
- 2002-12-16 JP JP2002363771A patent/JP3872007B2/en not_active Expired - Fee Related
-
2003
- 2003-12-04 TW TW92134122A patent/TWI228023B/en not_active IP Right Cessation
- 2003-12-08 CN CN 200310118256 patent/CN1261737C/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012058830A1 (en) * | 2010-11-04 | 2012-05-10 | 深圳市华星光电技术有限公司 | Linewidth measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004198129A (en) | 2004-07-15 |
| JP3872007B2 (en) | 2007-01-24 |
| CN1510393A (en) | 2004-07-07 |
| TW200418352A (en) | 2004-09-16 |
| TWI228023B (en) | 2005-02-11 |
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