CN1256191C - Universal fixture in use for supersound cleaning - Google Patents

Universal fixture in use for supersound cleaning Download PDF

Info

Publication number
CN1256191C
CN1256191C CN 200410016972 CN200410016972A CN1256191C CN 1256191 C CN1256191 C CN 1256191C CN 200410016972 CN200410016972 CN 200410016972 CN 200410016972 A CN200410016972 A CN 200410016972A CN 1256191 C CN1256191 C CN 1256191C
Authority
CN
China
Prior art keywords
framework
slide
slide bar
sliding frame
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200410016972
Other languages
Chinese (zh)
Other versions
CN1562506A (en
Inventor
张东平
齐红基
尚淑珍
范树海
邵建达
贺洪波
范正修
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN 200410016972 priority Critical patent/CN1256191C/en
Publication of CN1562506A publication Critical patent/CN1562506A/en
Application granted granted Critical
Publication of CN1256191C publication Critical patent/CN1256191C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

The present invention relates to a universal fixture for supersound cleanness, which is composed of a slide framework, a fixed framework, four sliding rods, a plurality of clamping elements and a water guide supporting stick, wherein the slide framework and the fixed framework are the same rectangular framework, the same four corner positions of the framework have circular holes, and an upper outer edge and a lower outer edge of the two frameworks are both provided with sliding grooves; one end of each sliding rod is fixed with the fixed framework; the slide framework is sheathed on the sliding rod by the circular holes at four corners, and the position of the slide framework corresponding to the sliding rod has four screw holes in total; both ends of the water guide supporting stick also has circular holes, and the water guide supporting stick is sheathed on two sliding rods at the lower part and is positioned between the slide framework and the fixed framework; the clamping elements have a 'C'-shaped structure, and the back faces of the clamping elements form a convex shape; the upper end and the lower end are provided with the screw holes, and the clamping elements can be freely arranged on the slide framework or the fixed framework by fastening screws. The present invention can enhance the effect and the efficiency of the supersound cleanness of a plated film substrate and enhance the quality of the plated film.

Description

The ultrasonic cleaning universal chuck
Technical field
The present invention is relevant with coating film on glass, and particularly a kind of ultrasonic cleaning universal chuck both can be used for the ultrasonic cleaning of coating film on glass substrate, also can be used for the ultrasonic cleaning of other industry workpiece.
Background technology
Because the substrate of coating film on glass is after a lot of individual manufacturing procedures through cutting, polishing etc., can stay as residues such as polishing powders on the surface, simultaneously in transportation, also can produce a lot of pollutions, totally just not be easy in film, form microdefect if these surperficial pollutants are not removed.A large amount of now experiments show that the microdefect that substrate surface impurity forms is one of main reason that causes the membrane laser damage, suppresses the formation of microdefect in film, the performance of film just can improve greatly.The quality that substrate cleans is the quality of the influence film that is coated with directly, and is most important to the raising of membrane laser damage threshold especially.The cleaning of film plating substrate now mainly contains artificial scouring and two kinds of methods of ultrasonic cleaning.Clean manually that not only efficient is low, and can in scouring, pollute again, can not adapt to the requirement of high-quality plated film; In the present ultrasonic cleaning, what have spreads gauze at the bottom of ultrasonic cleaner, directly substrate is lain in top ultrasonic cleaning, and the not only limited amount of each substrate capable of washing, and substrate upper and lower surface cleans very inhomogeneous, cleans the substrate that finishes and takes out also inconvenient.And for the ultrasonic cleaning of using anchor clamps, generally will be with different anchor clamps to the substrate of different size, this obviously can not satisfy the Protean requirement of substrate specification, causes very big waste.In addition, when present anchor clamps are used the isopropyl alcohol wide slow moving water-removal in the ultrasonic cleaning final step, can stay a little cleaning fluid, will leave the marking at substrate surface after the cleaning fluid volatilization like this in the substrate bottom.Other field such as precision optical machinery, microelectronics or the like also have a lot of machine components or silicon chip etc. to need to clean, and equally also exist and the same problem of coating thin film substrate ultrasonic cleaning.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the shortcoming in the above-mentioned existing ultrasonic cleaning, and a kind of ultrasonic cleaning universal chuck is provided, and to improve the effect and the efficient of film plating substrate ultrasonic cleaning, improves the quality of the film that is coated with.
Technical solution of the present invention is as follows:
A kind of universal chuck that is used for ultrasonic cleaning, be characterized in, these anchor clamps are by sliding frame, fixed frame, four slide bars, some folders and a water guide support stick are formed, described sliding frame and fixed frame are the rectangular frame with same size, its four jiaos of same positions are provided with circular hole, and two outsides up and down of this two framework are equipped with chute, four slide bars insert respectively in the circular hole of fixed frame and are fixing, described sliding frame is nested with on this slide bar by four jiaos of circular holes, the upper and lower end face of this sliding frame is provided with four screws altogether with respect to the position of slide bar, the two ends of described water guide support stick also are provided with circular hole, be set on following two slide bars, be between sliding frame and the fixed frame, described folder has that " [" shape structure, its ridge are convex, both sides have " " v notch v groove, there is screw at two ends up and down, pass this screw by trip bolt, this folder can be installed on sliding frame or the fixed frame.
Being shaped as of described slide bar is circular or square; Corresponding circular hole or the square hole of fixing this slide bar that on fixed frame, be provided with; Described slide bar directly vertically is welded on four jiaos of fixed frames; Corresponding sliding frame is provided with circular hole or the square hole that is nested with this slide bar.
The ridge of described water guide support stick is square or " ∩ " shape.
Technique effect of the present invention:
1, can on slide bar, be free to slide and fix owing to sliding frame in the anchor clamps of the present invention, folder can be free to slide along the chute of framework again and be fixing, can realize that two-dimensional directional is adjustable continuously, like this to different-thickness, different sizes, difform substrate is effectively clamping all;
2, these anchor clamps will make substrate carry out ultrasonic cleaning under the setting situation, and the cleaning performance of two faces of substrate is identical, avoid keeping flat when cleaning, and the two sides is cleaned uneven situation and taken place; Area occupied significantly reduced when the vertical placement ratio of this substrate kept flat in addition, can clean the multi-disc substrate simultaneously at every turn, had improved operating efficiency;
3, this jig Design the water guide support stick, when ultrasonic cleaning final step wide slow moving water-removal, because the capillary effect of liquid, cleaning fluid will flow down along this rod like this, not can because of the residual a small amount of cleaning fluid in substrate bottom and stay the marking, improved cleaning performance;
4, the folder in these anchor clamps can be installed several as required, can clean the clamping simultaneously of onesize multi-disc substrate, increases work efficiency;
5, these anchor clamps not only can be used for the ultrasonic cleaning of the preceding substrate of plated film, also can be used for the field that need carry out the workpiece ultrasonic cleaning as other industries such as machine components, microelectronics silicon chips.
6, apparatus of the present invention are used simple, easy to operate.
Description of drawings
The structural representation of one of Fig. 1 ultrasonic cleaning universal chuck of the present invention embodiment
Fig. 2 sliding frame schematic diagram of the present invention
Fig. 3 folder schematic diagram of the present invention
Fig. 4 folder of the present invention scheme of installation on framework
The specific embodiment
See also Fig. 1 earlier, Fig. 1 is the structural representation of one of ultrasonic cleaning universal chuck embodiment of the present invention, as seen from the figure, ultrasonic cleaning universal chuck of the present invention mainly consists of the following components: sliding frame 1, fixed frame 2, slide bar 3, the folder 8 of water guide support stick 5 and some is formed.Sliding frame 1 and fixed frame 2 are measure-alike rectangular frame, same position at Qi Sijiao is equipped with circular hole 7, the outward flange up and down of two frameworks 1,2 is equipped with chute 4, the upper and lower end face of sliding frame 1 is provided with four screws 6 altogether with respect to the position of slide bar 3, the diameter of four cylindrical slide bars 3 is identical with the diameter of the circular hole of 2 four jiaos of fixed frames, adopt plus tolerance, so that slide bar 3 squeezed into circular hole and be fixed on this fixed frame 2, slide bar 3 will keep vertical with fixed frame 2 planes, and four 3 of slide bars are parallel to each other.The diameter of four circular holes 7 of sliding frame 1 can be free to slide sliding frame 1 than slide bar 3 slightly larger in diameter on slide bar 3.Water guide support stick 5 two ends have two circular holes, and diameter is identical with the diameter of the circular hole 7 of 1 four jiaos of sliding frames, between sliding frame 1 and fixed frame 2, and are placed on following two slide bars 3 and can be free to slide.Folder 8 is " [" shape structure, as shown in Figure 3, its ridge is a convex, both sides have " " v notch v 9, such two folders 8 just in time form a groove when closing up, in the middle of just can being stuck in substrate, folder 8 upper and lower sides all have screw 10, trip bolt passes this screw 10 folder 8 is installed on sliding frame 1 or the fixed frame 2, prevents that folder 8 from coming off.
The installation and the using method of ultrasonic cleaning universal chuck of the present invention are as follows:
Anchor clamps of the present invention are adding man-hour four cylindrical slide bars 3 by being nested with or welding manner is fixed on the fixed frame 2, folder 8 is stuck on fixed frame 2 or the sliding frame 1 again, as shown in Figure 4, the lower end is screwed into holding screw by screw 10 thereon, prevent that it from coming off, and it can be free to slide at two frameworks, 1,2 upper edge chutes 4.Water guide support stick 5 is placed on following two slide bars 3, sliding frame 1 is through on the slide bar 3 again, water guide support stick 5 places the middle of sliding frame 1 and fixed frame 2, and fixes with holding screw.According to the size of substrate, adjust the position of sliding frame 1 on slide bar 3, tighten the holding screw on the sliding frame 1 after determining; According to the thickness of substrate, adjust distance between two folders 8 along chute, after putting well, tightens substrate the holding screw on the folder 8 more respectively.
Clean a plurality of substrates if desired simultaneously, a plurality of folders 8 can be installed on framework 1,2.A substrate is wanted four folders, and two substrates are wanted six folders, by that analogy.So just can put into ultrasonic cleaner to the anchor clamps that install substrate together and carry out ultrasonic cleaning.
Obviously, the contour structures of described slide bar 3 can be circle, square or other shapes; As long as on fixed frame, also be provided with circular hole, square hole or other shape holes of fixing this slide bar accordingly; Described slide bar also can directly vertically be welded on four jiaos of fixed frames; Also be provided with circular hole, square hole or other shape holes that is nested with this slide bar on the corresponding sliding frame.The ridge of described water guide support stick can be square, also can be " ∩ " shape or other shapes.Select for use stainless steel as making material, avoid anchor clamps in use to be subjected to the corrosion of cleaning fluid.Can realize purpose of the present invention, produce same technique effect.
Characteristics of the present invention are the folder two-dimensional movements in slide bar and chute respectively that utilize clamping substrate Realize the effective clamping of substrate to different sizes, different-thickness and different size, in order to carry out ultrasonic Clean. Experimental results show that and avoided existing anchor clamps to fix nonadjustable shortcoming.

Claims (3)

1, a kind of ultrasonic cleaning universal chuck that is used for ultrasonic cleaning, it is characterized in that these anchor clamps are by sliding frame (1), fixed frame (2), four slide bars (3), folder (8) and water guide support stick (5) are formed, described sliding frame (1) and fixed frame (2) are for having the rectangular frame of same size, its four jiaos of same positions are provided with circular hole (7), and this framework (1,2) two outsides up and down are equipped with chute (4), four slide bars (3) insert respectively in the circular hole (7) of fixed frame (2) and are fixing, described sliding frame (1) is nested with on this slide bar (3) by four jiaos of circular holes (7), the upper and lower end face of this sliding frame (1) is provided with four screws (6) altogether with respect to the position of slide bar (3), the two ends of described water guide support stick (5) also are provided with circular hole, be positioned between sliding frame (1) and the fixed frame (2), and be placed on following two slide bars (3), described folder (8) has " [" shape structure, its ridge is a convex, both sides have " " connected in star (9), there is screw (10) at two ends up and down, and the trip bolt that passes this screw (10) is installed in folder (8) on sliding frame (1) or the fixed frame (2).
2, ultrasonic cleaning universal chuck according to claim 1 is characterized in that being shaped as of described slide bar (3) is circular or square; On fixed frame (2), be provided with circular hole or the square hole of fixing this slide bar (3) accordingly; Described slide bar (3) directly vertically is welded on (2) four jiaos of fixed frames; Corresponding sliding frame (1) is provided with circular hole or the square hole that is nested with this slide bar (3).
3, ultrasonic cleaning universal chuck according to claim 1, the ridge that it is characterized in that described water guide support stick (5) is square, or " ∩ " shape.
CN 200410016972 2004-03-16 2004-03-16 Universal fixture in use for supersound cleaning Expired - Fee Related CN1256191C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200410016972 CN1256191C (en) 2004-03-16 2004-03-16 Universal fixture in use for supersound cleaning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200410016972 CN1256191C (en) 2004-03-16 2004-03-16 Universal fixture in use for supersound cleaning

Publications (2)

Publication Number Publication Date
CN1562506A CN1562506A (en) 2005-01-12
CN1256191C true CN1256191C (en) 2006-05-17

Family

ID=34478703

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200410016972 Expired - Fee Related CN1256191C (en) 2004-03-16 2004-03-16 Universal fixture in use for supersound cleaning

Country Status (1)

Country Link
CN (1) CN1256191C (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100998985B (en) * 2006-01-14 2010-07-28 鸿富锦精密工业(深圳)有限公司 Cleaning device for optical element
CN102350425B (en) * 2011-06-14 2014-12-10 无锡帝凡精工机械有限公司 Cleaning clamp
CN102305638A (en) * 2011-06-15 2012-01-04 苏州华碧微科检测技术有限公司 Product positioning jig for X-ray scanner
CN103272815A (en) * 2013-06-08 2013-09-04 江苏亚太轻合金科技股份有限公司 Flat tube cleaning material frame
CN104307829A (en) * 2014-09-01 2015-01-28 成都国光电气股份有限公司 Cleaning fixture for tubular-column-shaped parts of travelling-wave tubes
CN104438215B (en) * 2014-12-08 2016-08-24 无锡海古德新技术有限公司 Ceramic substrate ultrasonic cleaning equipment
CN105598084A (en) * 2015-12-21 2016-05-25 中国科学院长春光学精密机械与物理研究所 Ultrasonic washing flower basket used for optical substrate with large aperture
CN105598085A (en) * 2015-12-22 2016-05-25 中国科学院长春光学精密机械与物理研究所 Optical element ultrasonic cleaning device
CN105798014B (en) * 2016-05-06 2017-12-01 常州市大备智能物联网科技有限公司 A kind of sealing cleaning case of fixation
CN107866430A (en) * 2016-09-23 2018-04-03 苏州润桐专利运营有限公司 A kind of ore pulp cleaning machine frame
CN107282574B (en) * 2017-06-24 2019-08-06 安徽赛迈特光电股份有限公司 A kind of LCD LCD screen automation waterproof isolating device
CN110201961B (en) * 2019-06-06 2021-01-08 山东潍氢动力科技有限公司 Bipolar plate cleaning rack
CN112760662A (en) * 2020-12-24 2021-05-07 西部新锆核材料科技有限公司 Chemical cleaning device and method for plates

Also Published As

Publication number Publication date
CN1562506A (en) 2005-01-12

Similar Documents

Publication Publication Date Title
CN1256191C (en) Universal fixture in use for supersound cleaning
CN100377799C (en) Supersonic cleaning fixture
CN101051603A (en) Method and device for panel etching process
CN114597140A (en) Adjustable slow lifting cleaning system and drying method
CN2805959Y (en) Ultrasonic cleaning clamp
CN216174771U (en) Silicon wafer degumming device for semiconductor material processing
CN213716848U (en) Piece basket bearing device and full lifting cleaning system with same
CN107617602B (en) Clamping device for semiconductor cleaning device
CN1895801A (en) Lens cleaner and cleaning method
CN211938193U (en) Ultrasonic cleaning apparatus for semiconductor display substrate
CN108376668A (en) A kind of silicon chip clamping jaw and wafer clamping device
CN214160712U (en) Quartz silicon wafer cleaning tank mechanism
CN212759930U (en) Wafer cleaning and recycling machine
US20040154639A1 (en) Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning
CN207587717U (en) A kind of silicon chip clamping jaw and wafer clamping device
CN213026070U (en) Quartz groove wafer bearing table supporting base device of cleaning machine for silicon wafer processing
CN220556589U (en) Cleaning device for preventing monocrystalline silicon piece from being damaged
CN213001539U (en) Large-batch vacuum coating substrate cleaning device
CN2763835Y (en) Coating device
CN108500938A (en) A kind of auto repair tool rack
CN1810451A (en) Fixture
CN2831177Y (en) Cleaning tools for lens
CN217933725U (en) Novel wafer overflow trough
CN219309619U (en) Lens cleaning frame
CN212209428U (en) Cleaning tool and device for wafer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20060517

Termination date: 20100316