CN1223911C - 用于数字质量流量控制器的系统和方法 - Google Patents

用于数字质量流量控制器的系统和方法 Download PDF

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Publication number
CN1223911C
CN1223911C CNB008101841A CN00810184A CN1223911C CN 1223911 C CN1223911 C CN 1223911C CN B008101841 A CNB008101841 A CN B008101841A CN 00810184 A CN00810184 A CN 00810184A CN 1223911 C CN1223911 C CN 1223911C
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CN
China
Prior art keywords
signal
digital
derivative
flow
weighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB008101841A
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English (en)
Chinese (zh)
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CN1371491A (zh
Inventor
埃曼纽尔·瓦尔斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
Millipore Corp
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Publication of CN1371491A publication Critical patent/CN1371491A/zh
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Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Feedback Control In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
CNB008101841A 1999-07-10 2000-06-20 用于数字质量流量控制器的系统和方法 Expired - Fee Related CN1223911C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/351,120 1999-07-10
US09/351,120 US6389364B1 (en) 1999-07-10 1999-07-10 System and method for a digital mass flow controller

Publications (2)

Publication Number Publication Date
CN1371491A CN1371491A (zh) 2002-09-25
CN1223911C true CN1223911C (zh) 2005-10-19

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ID=23379659

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008101841A Expired - Fee Related CN1223911C (zh) 1999-07-10 2000-06-20 用于数字质量流量控制器的系统和方法

Country Status (10)

Country Link
US (2) US6389364B1 (https=)
EP (1) EP1214635B9 (https=)
JP (1) JP2003504749A (https=)
KR (1) KR100684539B1 (https=)
CN (1) CN1223911C (https=)
AT (1) ATE236419T1 (https=)
AU (1) AU6405400A (https=)
DE (1) DE60001977T2 (https=)
TW (1) TW434469B (https=)
WO (1) WO2001004716A1 (https=)

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Also Published As

Publication number Publication date
US6714878B2 (en) 2004-03-30
JP2003504749A (ja) 2003-02-04
EP1214635B1 (en) 2003-04-02
DE60001977D1 (de) 2003-05-08
ATE236419T1 (de) 2003-04-15
EP1214635B9 (en) 2004-01-07
US20020114732A1 (en) 2002-08-22
DE60001977T2 (de) 2003-11-06
WO2001004716A1 (en) 2001-01-18
CN1371491A (zh) 2002-09-25
TW434469B (en) 2001-05-16
EP1214635A1 (en) 2002-06-19
AU6405400A (en) 2001-01-30
KR20020039316A (ko) 2002-05-25
KR100684539B1 (ko) 2007-02-20
US6389364B1 (en) 2002-05-14

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