CN119256124A - 用于清洁拉锭器设备的提拉缆线的清洁工具及方法 - Google Patents

用于清洁拉锭器设备的提拉缆线的清洁工具及方法 Download PDF

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Publication number
CN119256124A
CN119256124A CN202380042269.3A CN202380042269A CN119256124A CN 119256124 A CN119256124 A CN 119256124A CN 202380042269 A CN202380042269 A CN 202380042269A CN 119256124 A CN119256124 A CN 119256124A
Authority
CN
China
Prior art keywords
cleaning tool
ingot
cleaning
cable
pull
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380042269.3A
Other languages
English (en)
Chinese (zh)
Inventor
何进洪
郑志凯
林政宜
蔡丰键
李东晓
Y·郑
J·Y·严
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlobalWafers Co Ltd
Original Assignee
GlobalWafers Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GlobalWafers Co Ltd filed Critical GlobalWafers Co Ltd
Publication of CN119256124A publication Critical patent/CN119256124A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/28—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/28—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking
    • B08B9/34—Arrangements of conduits or nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
CN202380042269.3A 2022-04-27 2023-04-24 用于清洁拉锭器设备的提拉缆线的清洁工具及方法 Pending CN119256124A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263335447P 2022-04-27 2022-04-27
US63/335,447 2022-04-27
PCT/US2023/019616 WO2023211834A1 (en) 2022-04-27 2023-04-24 Cleaning tools and methods for cleaning the pull cable of an ingot puller apparatus

Publications (1)

Publication Number Publication Date
CN119256124A true CN119256124A (zh) 2025-01-03

Family

ID=86424780

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380042269.3A Pending CN119256124A (zh) 2022-04-27 2023-04-24 用于清洁拉锭器设备的提拉缆线的清洁工具及方法

Country Status (7)

Country Link
US (5) US12202017B2 (enExample)
EP (2) EP4515025A1 (enExample)
JP (1) JP2025514239A (enExample)
KR (1) KR20250006212A (enExample)
CN (1) CN119256124A (enExample)
TW (1) TW202344721A (enExample)
WO (1) WO2023211834A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12202017B2 (en) * 2022-04-27 2025-01-21 Globalwafers Co., Ltd. Cleaning tools and methods for cleaning the pull cable of an ingot puller apparatus
WO2026024809A1 (en) * 2024-07-25 2026-01-29 Globalwafers Co., Ltd. Ingot puller apparatus including in-situ cable cleaner

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
JP2010013305A (ja) * 2008-07-02 2010-01-21 Sumco Corp 単結晶引き上げ用ワイヤの洗浄装置およびその洗浄方法
JP2011032142A (ja) * 2009-08-05 2011-02-17 Shin Etsu Handotai Co Ltd 単結晶引き上げ装置
TW201245517A (en) * 2011-03-29 2012-11-16 Sumco Corp Cleaning apparatus of exhaust passage for semiconductor crystal manufacturing apparatus and cleaning method thereof
JP2017109882A (ja) * 2015-12-14 2017-06-22 株式会社Sumco クリーニング装置、クリーニング方法およびシリコン単結晶の製造方法
US20190388943A1 (en) * 2017-02-02 2019-12-26 Sumco Corporation Cleaning device for monocrystal pulling apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001089295A (ja) * 1999-09-16 2001-04-03 Toshiba Ceramics Co Ltd 単結晶引上げ装置
JP3975649B2 (ja) * 2000-06-06 2007-09-12 株式会社Ｓｕｍｃｏ 単結晶引上装置
JP4092859B2 (ja) * 2000-06-06 2008-05-28 株式会社Ｓｕｍｃｏ 単結晶引上装置のクリーニング装置
JP2013147406A (ja) 2012-01-23 2013-08-01 Shin Etsu Handotai Co Ltd シリコン単結晶の製造方法
US10000863B2 (en) 2015-02-03 2018-06-19 Sumco Corporation Method for cleaning single crystal pulling apparatus, cleaning tool for use therein, and method for manufacturing single crystal
WO2018142540A1 (ja) 2017-02-02 2018-08-09 株式会社Sumco 単結晶引上装置のクリーニング装置、クリーニング方法
CN209779039U (zh) 2019-01-31 2019-12-13 常州市乐萌压力容器有限公司 一种单晶炉副室清洁器
US12202017B2 (en) 2022-04-27 2025-01-21 Globalwafers Co., Ltd. Cleaning tools and methods for cleaning the pull cable of an ingot puller apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
JP2010013305A (ja) * 2008-07-02 2010-01-21 Sumco Corp 単結晶引き上げ用ワイヤの洗浄装置およびその洗浄方法
JP2011032142A (ja) * 2009-08-05 2011-02-17 Shin Etsu Handotai Co Ltd 単結晶引き上げ装置
TW201245517A (en) * 2011-03-29 2012-11-16 Sumco Corp Cleaning apparatus of exhaust passage for semiconductor crystal manufacturing apparatus and cleaning method thereof
JP2017109882A (ja) * 2015-12-14 2017-06-22 株式会社Sumco クリーニング装置、クリーニング方法およびシリコン単結晶の製造方法
US20190388943A1 (en) * 2017-02-02 2019-12-26 Sumco Corporation Cleaning device for monocrystal pulling apparatus

Also Published As

Publication number Publication date
US12491541B2 (en) 2025-12-09
US20260070095A1 (en) 2026-03-12
US20240335863A1 (en) 2024-10-10
TW202344721A (zh) 2023-11-16
US20230347388A1 (en) 2023-11-02
WO2023211834A1 (en) 2023-11-02
US12491542B2 (en) 2025-12-09
JP2025514239A (ja) 2025-05-02
US20250091100A1 (en) 2025-03-20
EP4515025A1 (en) 2025-03-05
US12502696B2 (en) 2025-12-23
US20250121415A1 (en) 2025-04-17
US12202017B2 (en) 2025-01-21
EP4729670A2 (en) 2026-04-22
KR20250006212A (ko) 2025-01-10

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