CN118922710A - 光干涉测量装置 - Google Patents

光干涉测量装置 Download PDF

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Publication number
CN118922710A
CN118922710A CN202380033365.1A CN202380033365A CN118922710A CN 118922710 A CN118922710 A CN 118922710A CN 202380033365 A CN202380033365 A CN 202380033365A CN 118922710 A CN118922710 A CN 118922710A
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CN
China
Prior art keywords
light
optical
measurement
interference
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380033365.1A
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English (en)
Chinese (zh)
Inventor
壁谷泰宏
浦岛毅吏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN118922710A publication Critical patent/CN118922710A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN202380033365.1A 2022-04-27 2023-02-15 光干涉测量装置 Pending CN118922710A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-073302 2022-04-27
JP2022073302 2022-04-27
PCT/JP2023/005270 WO2023210116A1 (ja) 2022-04-27 2023-02-15 光干渉計測装置

Publications (1)

Publication Number Publication Date
CN118922710A true CN118922710A (zh) 2024-11-08

Family

ID=88518433

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380033365.1A Pending CN118922710A (zh) 2022-04-27 2023-02-15 光干涉测量装置

Country Status (4)

Country Link
US (1) US20250035427A1 (https=)
JP (1) JPWO2023210116A1 (https=)
CN (1) CN118922710A (https=)
WO (1) WO2023210116A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024209942A1 (https=) * 2023-04-06 2024-10-10

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10207186C1 (de) * 2002-02-21 2003-04-17 Alexander Knuettel Niederkohärenz-interferometrisches Gerät zur lichtoptischen Abtastung eines Objektes
JP4038560B2 (ja) * 2003-05-13 2008-01-30 国立大学法人 筑波大学 時間シアリング光コヒーレンストモグラフィー装置
JP5060678B2 (ja) * 2008-05-08 2012-10-31 株式会社キーエンス 光学式変位計
JP2011095197A (ja) * 2009-11-02 2011-05-12 Naoyuki Furuyama 厚み測定方法及び厚み測定装置
JP4916573B2 (ja) * 2010-01-28 2012-04-11 パナソニック株式会社 光干渉計測方法および光干渉計測装置
JP2011257160A (ja) * 2010-06-04 2011-12-22 Canon Inc 光干渉断層撮像装置、光干渉断層撮像方法、およびプログラム
JP5724133B2 (ja) * 2011-01-25 2015-05-27 国立大学法人東京農工大学 構造測定方法および構造測定装置
JP2013029317A (ja) * 2011-07-26 2013-02-07 Hitachi High-Technologies Corp 光断層画像測定装置および光断層画像測定システム
JP5984351B2 (ja) * 2011-09-14 2016-09-06 キヤノン株式会社 計測装置
EP2806246B1 (en) * 2013-05-24 2019-11-20 Attocube Systems AG Dual laser interferometer
JP2015137996A (ja) * 2014-01-24 2015-07-30 株式会社東京精密 計測システム、ファブリーペロー共振器及び計測方法
EP3213690B1 (en) * 2014-10-27 2020-02-26 FUJIFILM Corporation Light penetration depth evaluation method, performance test method using evaluation method, and optical tomography apparatus
CN104729424B (zh) * 2015-03-09 2017-10-20 南京信息工程大学 基于自混合干涉的共焦点激光显微镜及其扫描方法
JP2017049117A (ja) * 2015-09-02 2017-03-09 株式会社東京精密 寸法測定装置及び参照光路長走査装置
US10228389B2 (en) * 2015-12-02 2019-03-12 Bruker Nano, Inc. Method and apparatus for infrared scattering scanning near-field optical microscopy with background suppression
KR101746693B1 (ko) * 2015-12-15 2017-06-14 한국과학기술원 다중 두 파장 레이저 간섭계를 이용한 절대 길이 측정 장치
CA3014324A1 (en) * 2016-02-12 2017-08-17 The General Hospital Corporation Apparatus and methods for high-speed and long depth range imaging using optical coherence tomography
JP2017142192A (ja) * 2016-02-12 2017-08-17 株式会社トーメーコーポレーション 光干渉断層計
JP2017181300A (ja) * 2016-03-30 2017-10-05 国立大学法人名古屋大学 農作物観測方法、農作物観測装置および農作物の生産方法
US10753801B2 (en) * 2016-12-07 2020-08-25 UNIVERSITé LAVAL Methods for performing dual-comb interferometry using a frequency offset relation
JP6887644B2 (ja) * 2017-09-11 2021-06-16 株式会社東京精密 校正装置及び校正方法
EP3657203B1 (de) * 2018-11-22 2026-04-01 Hexagon Innovation Hub GmbH Elektrooptischer entfernungsmesser und entfernungsmessverfahren
JP2022101264A (ja) * 2020-12-24 2022-07-06 株式会社トプコン 光干渉測定装置
JP6925550B1 (ja) * 2021-01-26 2021-08-25 株式会社Xtia 光コム発生装置
CN113587844B (zh) * 2021-07-27 2022-05-27 中国科学院长春光学精密机械与物理研究所 移相干涉测量系统及测量方法

Also Published As

Publication number Publication date
WO2023210116A1 (ja) 2023-11-02
US20250035427A1 (en) 2025-01-30
JPWO2023210116A1 (https=) 2023-11-02

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