CN118648094A - 器件检查装置以及器件检查方法 - Google Patents

器件检查装置以及器件检查方法 Download PDF

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Publication number
CN118648094A
CN118648094A CN202280088906.6A CN202280088906A CN118648094A CN 118648094 A CN118648094 A CN 118648094A CN 202280088906 A CN202280088906 A CN 202280088906A CN 118648094 A CN118648094 A CN 118648094A
Authority
CN
China
Prior art keywords
inspection
probe
semiconductor device
unit
result
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280088906.6A
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English (en)
Chinese (zh)
Inventor
大仲崇之
深尾哲宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN118648094A publication Critical patent/CN118648094A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2894—Aspects of quality control [QC]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN202280088906.6A 2022-02-21 2022-02-21 器件检查装置以及器件检查方法 Pending CN118648094A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/006941 WO2023157291A1 (ja) 2022-02-21 2022-02-21 デバイス検査装置及びデバイス検査方法

Publications (1)

Publication Number Publication Date
CN118648094A true CN118648094A (zh) 2024-09-13

Family

ID=85600328

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280088906.6A Pending CN118648094A (zh) 2022-02-21 2022-02-21 器件检查装置以及器件检查方法

Country Status (4)

Country Link
US (1) US20250102566A1 (https=)
JP (1) JP7241978B1 (https=)
CN (1) CN118648094A (https=)
WO (1) WO2023157291A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102801402B1 (ko) * 2024-01-09 2025-04-29 경남대학교 산학협력단 패널접착 및 기판검사용 프레싱 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04249335A (ja) * 1991-02-05 1992-09-04 Matsushita Electron Corp プローブ検査システム
JP7219046B2 (ja) * 2018-10-12 2023-02-07 株式会社アドバンテスト 解析装置、解析方法および解析プログラム
JP2021025971A (ja) * 2019-08-08 2021-02-22 株式会社日本ロック 通電検査装置及び通電検査方法

Also Published As

Publication number Publication date
US20250102566A1 (en) 2025-03-27
JPWO2023157291A1 (https=) 2023-08-24
JP7241978B1 (ja) 2023-03-17
WO2023157291A1 (ja) 2023-08-24

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