JPWO2023157291A1 - - Google Patents
Info
- Publication number
- JPWO2023157291A1 JPWO2023157291A1 JP2022542725A JP2022542725A JPWO2023157291A1 JP WO2023157291 A1 JPWO2023157291 A1 JP WO2023157291A1 JP 2022542725 A JP2022542725 A JP 2022542725A JP 2022542725 A JP2022542725 A JP 2022542725A JP WO2023157291 A1 JPWO2023157291 A1 JP WO2023157291A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2894—Aspects of quality control [QC]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/006941 WO2023157291A1 (ja) | 2022-02-21 | 2022-02-21 | デバイス検査装置及びデバイス検査方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7241978B1 JP7241978B1 (ja) | 2023-03-17 |
| JPWO2023157291A1 true JPWO2023157291A1 (https=) | 2023-08-24 |
| JPWO2023157291A5 JPWO2023157291A5 (https=) | 2024-01-23 |
Family
ID=85600328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022542725A Active JP7241978B1 (ja) | 2022-02-21 | 2022-02-21 | デバイス検査装置及びデバイス検査方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20250102566A1 (https=) |
| JP (1) | JP7241978B1 (https=) |
| CN (1) | CN118648094A (https=) |
| WO (1) | WO2023157291A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102801402B1 (ko) * | 2024-01-09 | 2025-04-29 | 경남대학교 산학협력단 | 패널접착 및 기판검사용 프레싱 장치 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04249335A (ja) * | 1991-02-05 | 1992-09-04 | Matsushita Electron Corp | プローブ検査システム |
| JP7219046B2 (ja) * | 2018-10-12 | 2023-02-07 | 株式会社アドバンテスト | 解析装置、解析方法および解析プログラム |
| JP2021025971A (ja) * | 2019-08-08 | 2021-02-22 | 株式会社日本ロック | 通電検査装置及び通電検査方法 |
-
2022
- 2022-02-21 JP JP2022542725A patent/JP7241978B1/ja active Active
- 2022-02-21 WO PCT/JP2022/006941 patent/WO2023157291A1/ja not_active Ceased
- 2022-02-21 US US18/729,696 patent/US20250102566A1/en active Pending
- 2022-02-21 CN CN202280088906.6A patent/CN118648094A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20250102566A1 (en) | 2025-03-27 |
| JP7241978B1 (ja) | 2023-03-17 |
| CN118648094A (zh) | 2024-09-13 |
| WO2023157291A1 (ja) | 2023-08-24 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220712 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220712 |
|
| A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20220712 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221018 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221212 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230207 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230307 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 7241978 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |