CN118556179A - 具有喷射膜测试泄漏部的真空泄漏检测器和方法 - Google Patents
具有喷射膜测试泄漏部的真空泄漏检测器和方法 Download PDFInfo
- Publication number
- CN118556179A CN118556179A CN202280083782.2A CN202280083782A CN118556179A CN 118556179 A CN118556179 A CN 118556179A CN 202280083782 A CN202280083782 A CN 202280083782A CN 118556179 A CN118556179 A CN 118556179A
- Authority
- CN
- China
- Prior art keywords
- membrane
- test
- leak
- gas
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 title claims description 76
- 238000000034 method Methods 0.000 title claims description 5
- 239000007921 spray Substances 0.000 title description 10
- 239000012528 membrane Substances 0.000 claims abstract description 77
- 239000007789 gas Substances 0.000 claims description 57
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 8
- 239000001307 helium Substances 0.000 claims description 8
- 229910052734 helium Inorganic materials 0.000 claims description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 9
- 239000003570 air Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 2
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/10—Testing of membranes or membrane apparatus; Detecting or repairing leaks
- B01D65/104—Detection of leaks in membrane apparatus or modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0223—Group 8, 9 or 10 metals
- B01D71/02231—Palladium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/007—Leak detector calibration, standard leaks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/04—Characteristic thickness
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Examining Or Testing Airtightness (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102021134647.9A DE102021134647A1 (de) | 2021-12-23 | 2021-12-23 | Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren |
| DE102021134647.9 | 2021-12-23 | ||
| PCT/EP2022/087584 WO2023118490A1 (de) | 2021-12-23 | 2022-12-22 | Vakuumlecksucher mit ansprüh-membran-testleck und verfahren |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118556179A true CN118556179A (zh) | 2024-08-27 |
Family
ID=84604283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280083782.2A Pending CN118556179A (zh) | 2021-12-23 | 2022-12-22 | 具有喷射膜测试泄漏部的真空泄漏检测器和方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20250058284A1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP4453529A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2024545812A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20240127332A (cg-RX-API-DMAC7.html) |
| CN (1) | CN118556179A (cg-RX-API-DMAC7.html) |
| DE (1) | DE102021134647A1 (cg-RX-API-DMAC7.html) |
| TW (1) | TW202326089A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2023118490A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021125707A1 (de) * | 2021-10-04 | 2023-04-06 | Inficon Gmbh | Lecksuche bei viskoser Strömung |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2926112A1 (de) | 1979-06-28 | 1981-01-08 | Bosch Gmbh Robert | Testleck-sonde |
| US4845360A (en) | 1987-12-10 | 1989-07-04 | Varian Associates, Inc. | Counterflow leak detector with high and low sensitivity operating modes |
| IT1224604B (it) * | 1988-07-27 | 1990-10-04 | Varian Spa | Rivelatore perfezionato di perdite di elio |
| DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
| DE10122733A1 (de) | 2001-05-10 | 2002-11-14 | Inficon Gmbh | Testleckvorrichtung |
| DE10162126A1 (de) | 2001-12-18 | 2003-07-03 | Inficon Gmbh | Gasdurchlass mit selektiv wirkenden Gasdurchtrittsflächen |
| DE102005021909A1 (de) * | 2005-05-12 | 2006-11-16 | Inficon Gmbh | Schnüffellecksucher mit Quarzfenstersensor |
| WO2007140641A1 (de) * | 2006-06-07 | 2007-12-13 | Kistler Holding Ag | Membranschutz für einen sensor mit einer membrane und sensor mit membrane und membranschutz |
| DE102006028778A1 (de) * | 2006-06-23 | 2007-12-27 | Inficon Gmbh | Lecksuchgerät |
| DE102009009370A1 (de) * | 2009-02-18 | 2010-08-19 | Inficon Gmbh | Verfahren zur Funktionsprüfung eines Lecksuchgerätes |
| US8361196B2 (en) * | 2010-04-09 | 2013-01-29 | Inficon Gmbh | Gas-selective membrane and method of its production |
| DE102010048982B4 (de) * | 2010-09-03 | 2022-06-09 | Inficon Gmbh | Lecksuchgerät |
-
2021
- 2021-12-23 DE DE102021134647.9A patent/DE102021134647A1/de active Pending
-
2022
- 2022-12-16 TW TW111148381A patent/TW202326089A/zh unknown
- 2022-12-22 JP JP2024536147A patent/JP2024545812A/ja active Pending
- 2022-12-22 CN CN202280083782.2A patent/CN118556179A/zh active Pending
- 2022-12-22 EP EP22830278.2A patent/EP4453529A1/de active Pending
- 2022-12-22 KR KR1020247016346A patent/KR20240127332A/ko active Pending
- 2022-12-22 WO PCT/EP2022/087584 patent/WO2023118490A1/de not_active Ceased
- 2022-12-22 US US18/723,123 patent/US20250058284A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE102021134647A1 (de) | 2023-06-29 |
| EP4453529A1 (de) | 2024-10-30 |
| WO2023118490A1 (de) | 2023-06-29 |
| KR20240127332A (ko) | 2024-08-22 |
| JP2024545812A (ja) | 2024-12-12 |
| US20250058284A1 (en) | 2025-02-20 |
| TW202326089A (zh) | 2023-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |