CN1180128C - 制备三氟化氮气体的工艺方法及设备 - Google Patents
制备三氟化氮气体的工艺方法及设备 Download PDFInfo
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- CN1180128C CN1180128C CNB031223524A CN03122352A CN1180128C CN 1180128 C CN1180128 C CN 1180128C CN B031223524 A CNB031223524 A CN B031223524A CN 03122352 A CN03122352 A CN 03122352A CN 1180128 C CN1180128 C CN 1180128C
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- 239000007789 gas Substances 0.000 title claims abstract description 149
- 238000000034 method Methods 0.000 title claims abstract description 27
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 29
- 239000012535 impurity Substances 0.000 claims abstract description 29
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 6
- 230000001105 regulatory effect Effects 0.000 claims abstract description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 34
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
- 239000012043 crude product Substances 0.000 claims description 16
- 238000003672 processing method Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 15
- 239000003792 electrolyte Substances 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 8
- 238000004821 distillation Methods 0.000 claims description 6
- 238000009835 boiling Methods 0.000 abstract description 10
- 238000010924 continuous production Methods 0.000 abstract description 2
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 abstract 6
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 abstract 1
- 238000003860 storage Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000010790 dilution Methods 0.000 description 7
- 239000012895 dilution Substances 0.000 description 7
- 239000002699 waste material Substances 0.000 description 7
- 239000010405 anode material Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
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- 238000003786 synthesis reaction Methods 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
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- 238000007670 refining Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000000952 spleen Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
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- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
Description
组分名称 | NH4F+HF | CO2 | N2O | N2+O2 | CF4 | 其它 | NF3+NxFy |
浓度 | 约4% | 800ppm | 0.9% | 约22% | 18ppm | 约3% | 约70% |
组分名称 | NH4F+HF | CO2 | N2O | N2+O2 | CF4 | 其它 | NF3+NxFy |
浓度 | 约0.1% | 400ppm | 0.8% | 约22% | 18ppm | 约3% | 约74% |
组分名称 | NH4F+HF | CO2 | N2O | N2+O2 | CF4 | 其它 | NF3+NxFy |
浓度 | 约400ppm | 200ppm | 0.3% | 约1% | 22ppm | 约0.7% | 约98% |
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB031223524A CN1180128C (zh) | 2003-04-30 | 2003-04-30 | 制备三氟化氮气体的工艺方法及设备 |
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CNB031223524A CN1180128C (zh) | 2003-04-30 | 2003-04-30 | 制备三氟化氮气体的工艺方法及设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1450202A CN1450202A (zh) | 2003-10-22 |
CN1180128C true CN1180128C (zh) | 2004-12-15 |
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CNB031223524A Expired - Lifetime CN1180128C (zh) | 2003-04-30 | 2003-04-30 | 制备三氟化氮气体的工艺方法及设备 |
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CN (1) | CN1180128C (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1328159C (zh) * | 2005-07-27 | 2007-07-25 | 中国船舶重工集团公司第七一八研究所 | 用氨和氟化氢为原料制备三氟化氮的设备及工艺方法 |
CN101798689A (zh) * | 2010-03-18 | 2010-08-11 | 黎明化工研究院 | 连续电解法制备三氟化氮工艺及设备 |
CN101973535A (zh) * | 2010-08-30 | 2011-02-16 | 天津市泰源工业气体有限公司 | 一种将熔盐法制备的三氟化氮用精馏及吸附方法提纯制备高纯三氟化氮的技术 |
CN102092692A (zh) * | 2010-08-30 | 2011-06-15 | 天津市泰旭物流有限公司 | 一种电解法制备的三氟化氮用精馏及吸附方法提纯制备高纯三氟化氮的技术 |
US8945367B2 (en) | 2011-01-18 | 2015-02-03 | Air Products And Chemicals, Inc. | Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride |
CN103093848B (zh) * | 2011-10-28 | 2015-12-09 | 原子高科股份有限公司 | 85Kr源的制备及回收工艺 |
US20140110267A1 (en) * | 2012-10-19 | 2014-04-24 | Air Products And Chemicals, Inc. | Anodes for the Electrolytic Production of Nitrogen Trifluoride and Fluorine |
CN103575918A (zh) * | 2013-10-28 | 2014-02-12 | 邯郸派瑞节能控制技术有限公司 | 一种检测三氟化氮的装置和方法 |
CN104947135B (zh) * | 2015-06-09 | 2017-10-13 | 中国船舶重工集团公司第七一八研究所 | 一种制备三氟化氮气体的装置及应用 |
CN111056540B (zh) * | 2019-12-25 | 2023-09-15 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种电解nf3连续预纯化装置及连续预纯化方法 |
CN111039267B (zh) * | 2019-12-29 | 2023-09-08 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种预纯化电解制备的三氟化氮粗品的装置及方法 |
CN111185070B (zh) * | 2019-12-30 | 2022-04-08 | 中船(邯郸)派瑞特种气体股份有限公司 | 利用低温hf去除nf3电解气中杂质的系统及方法 |
CN113606820B (zh) * | 2021-08-27 | 2022-09-23 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种直接与间接制冷相结合的三氟化氮电解气超低温冷阱装置 |
CN113893663B (zh) * | 2021-11-15 | 2023-05-16 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种三氟化氮生产排污设备及工艺方法 |
CN114524421A (zh) * | 2022-03-08 | 2022-05-24 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种从冷阱排污气体中回收三氟化氮并制备氢氟酸的方法 |
CN114715862A (zh) * | 2022-03-28 | 2022-07-08 | 开封中新洁能科技有限公司 | 一种三氟化氮提纯工艺 |
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2003
- 2003-04-30 CN CNB031223524A patent/CN1180128C/zh not_active Expired - Lifetime
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Effective date of registration: 20190708 Address after: 057550 No. 1 Weiwu Road, Chemical Industry Agglomeration Area, Feixiang County, Handan City, Hebei Province Patentee after: PERIC SPECIAL GASES Co.,Ltd. Address before: 056027 17 Exhibition Road, Handan, Hebei Patentee before: Handan Purifying Equipment Research Institute |
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Addressee: Wang Hongqin Document name: Notification of Passing Examination on Formalities |
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Address after: 057550 No. five Weir Road, chemical industry gathering area, Feixiang District, Handan, Hebei, 1 Patentee after: China shipbuilding (Handan) Perry Special Gas Co.,Ltd. Address before: No.1 Weiwu Road, chemical industry gathering area, Feixiang County, Handan City, Hebei Province Patentee before: PERIC SPECIAL GASES Co.,Ltd. |
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