CN117781689A - 加热处理装置 - Google Patents

加热处理装置 Download PDF

Info

Publication number
CN117781689A
CN117781689A CN202311016243.XA CN202311016243A CN117781689A CN 117781689 A CN117781689 A CN 117781689A CN 202311016243 A CN202311016243 A CN 202311016243A CN 117781689 A CN117781689 A CN 117781689A
Authority
CN
China
Prior art keywords
heater
plate
cassette
chamber
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311016243.XA
Other languages
English (en)
Chinese (zh)
Inventor
石原淳司
矶明典
増田浩一
福田丈二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of CN117781689A publication Critical patent/CN117781689A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H05B3/66—Supports or mountings for heaters on or in the wall or roof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7621—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting two or more semiconductor substrates
CN202311016243.XA 2022-09-29 2023-08-14 加热处理装置 Pending CN117781689A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022156267A JP7810625B2 (ja) 2022-09-29 2022-09-29 加熱処理装置
JP2022-156267 2022-09-29

Publications (1)

Publication Number Publication Date
CN117781689A true CN117781689A (zh) 2024-03-29

Family

ID=90384129

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311016243.XA Pending CN117781689A (zh) 2022-09-29 2023-08-14 加热处理装置

Country Status (3)

Country Link
JP (2) JP7810625B2 (https=)
KR (1) KR102850976B1 (https=)
CN (1) CN117781689A (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142082A (ja) * 1988-11-24 1990-05-31 Matsushita Electric Ind Co Ltd シーズヒーターの接地装置
JP3328763B2 (ja) * 1995-10-30 2002-09-30 エヌティティエレクトロニクス株式会社 縦型ウエハボートのウエハ支持構造
JP3312873B2 (ja) * 1998-07-01 2002-08-12 日本アビオニクス株式会社 減圧オーブンのヒータ装置
EP1976337A1 (en) * 2005-12-22 2008-10-01 Harison Toshiba Lighting Corp. Heater lamp
JP5467743B2 (ja) 2008-08-29 2014-04-09 光洋サーモシステム株式会社 ヒータユニットおよび熱処理装置
JP6940541B2 (ja) 2018-04-16 2021-09-29 芝浦メカトロニクス株式会社 有機膜形成装置

Also Published As

Publication number Publication date
JP2024049807A (ja) 2024-04-10
KR102850976B1 (ko) 2025-08-26
JP7810625B2 (ja) 2026-02-03
JP2025122208A (ja) 2025-08-20
KR20240045100A (ko) 2024-04-05

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