CN117517735B - Probe card convenient for replacing test probes - Google Patents

Probe card convenient for replacing test probes Download PDF

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Publication number
CN117517735B
CN117517735B CN202410013684.2A CN202410013684A CN117517735B CN 117517735 B CN117517735 B CN 117517735B CN 202410013684 A CN202410013684 A CN 202410013684A CN 117517735 B CN117517735 B CN 117517735B
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probe
plate
limiting
test
test probe
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CN117517735A (en
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江波
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Suzhou Dick Microelectronics Co ltd
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Suzhou Dick Microelectronics Co ltd
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Priority to CN202410013684.2A priority Critical patent/CN117517735B/en
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Abstract

The invention relates to a probe card convenient for replacing a test probe, belonging to the technical field of semiconductor test; it comprises the following steps: the surface of the connecting plate is provided with a mounting groove for embedding the mounting plate, the surface of the guide plate is in fit connection with the clamping plate, the joint surfaces of the guide plate and the clamping plate are provided with limiting grooves, the limiting ring consists of a plurality of mutually sleeved annular rings, the surface of the limiting ring is provided with a bulge, the other side of the limiting ring corresponding to the bulge is provided with a slot, the inside of the slot is in sliding connection with the pressing block, and the surface of the test probe is provided with a plurality of clamping grooves which are uniformly distributed; according to the invention, the fixing plate and the clamping plate are adopted to carry out the plug-in fixation of the probe, the movable pressing block is arranged in the slot to be matched with the clamping groove on the surface of the probe, so that the stable limit is realized, the clamping grooves are arranged on the two sides of the probe, the probe can be pulled out only by lightly rotating the probe during replacement, the stable limit can be ensured, the probe can be conveniently and quickly taken out, the stable connection between the tail part of the probe and the metal wire is ensured, and the electrical detection performance of the probe is improved.

Description

Probe card convenient for replacing test probes
Technical Field
The invention discloses a probe card convenient for replacing a test probe, and belongs to the technical field of semiconductor test.
Background
The probe card is a test interface and is used for testing the bare chip, and the test probe is connected with the tester and the chip to complete writing data into the bare chip and reading data from the bare chip, so that the bare chip test is completed.
Because of the large number of die patterns, it is often necessary to design a probe card for the die to be tested when testing, which makes testing costs prohibitive. However, for the chip products of the upgrade and update, most bare chips between the two generations are identical in position and function, so that the two generations of probe cards designed in a traditional manner are highly similar. Under such circumstances, if the probe card is redeveloped, unnecessary development resource waste is caused, and if the test probe can be removed and installed on the basis of the previous generation probe card, that is, the test probe is replaced again, the development period is greatly shortened, and the development cost is reduced.
The invention patent of application number 201711435569.0 provides a detachable structure of quick assembly disassembly probe card, which comprises: the PCB is provided with a 1 st through hole in the middle, and a plurality of conductive contacts are arranged on the upper surface and the lower surface of the PCB along the periphery of the 1 st through hole; one end of each probe is bent into a hook shape; the needle clamping assembly is provided with a 2 nd through hole corresponding to the 1 st through hole of the PCB, a plurality of probes are loaded in the needle clamping assembly, one end of each bent hook of each probe is arranged inwards, and the other end of each probe extends out of the needle clamping assembly; the first compression ring is used for compressing the extension part at the other end of the probe to the conductive contact on one surface of the PCB; through the detachable structural design, the probe is assembled on the PCB, so that the quick assembly, the quick disassembly and the quick replacement can be realized; through the locating hole of needle subassembly, realize high accuracy location, the quality of probe card has more ensured.
However, the stability of the test probe in the fixing process is difficult to ensure by the structure, the probe tip in the probe stretches along with the detection, the test probe is easy to loosen, the subsequent detection is difficult to accurately position when serious, and the test is failed; the test probe is effectively fixed, and the probe is not easy to take out when the probe needs to be replaced, so that the operation difficulty is increased. Therefore, the stable fixing and convenient replacement of the test probe are a pair of contradictory problems which are difficult to be compatible.
Disclosure of Invention
Aiming at the problems, the invention designs the probe card which is convenient for replacing the test probe, so that the test probe is stably fixed and is convenient to replace.
The invention solves the technical problems by the following technical proposal:
the present invention provides a probe card for facilitating replacement of a test probe, the probe card for facilitating replacement of a test probe comprising:
the surface of the connecting plate is provided with a mounting groove for embedding the mounting plate, and one side of the mounting plate far away from the connecting plate is fixedly connected with the guide plate;
the fixing plate is fixedly connected with the guide plate, a metal wire is embedded between the guide plate and the fixing plate, the surface of the fixing plate is in fit connection with the clamping plate, and limiting grooves are formed in the fit surfaces of the fixing plate and the clamping plate;
the limiting rings are composed of a plurality of annular rings which are sleeved with each other, the thickness of each limiting ring is the same, adjacent annular rings are fixedly connected through connecting blocks, a protruding part is arranged on the surface of each limiting ring, a slot is formed on the other side of each limiting ring corresponding to each protruding part, the inside of each protruding part is in sliding connection with a pressing block, and the pressing blocks are connected with the inner walls of the protruding parts through reset springs;
the test probe, a plurality of evenly distributed's draw-in groove has been seted up to test probe surface, a plurality of draw-in groove symmetric distribution extremely test probe both sides, test probe both ends all are equipped with inclusion portion, just test probe is when pegging graft, inclusion portion surface contact briquetting.
In this technical scheme, connecting plate one side surface and circuit board fixed connection, connecting plate opposite side edge evenly is equipped with a plurality of evenly distributed's soldered connection, the soldered connection is connected with the contact of circuit board, and every the soldered connection all with the metal wire welded fastening.
In this technical scheme, mounting panel edge fixedly connected with a plurality of evenly distributed's locating piece, mounting panel and locating piece all are connected with the connecting plate surface laminating, every the locating piece all with the inside gomphosis grafting of mounting groove, locating piece and connecting plate all run through with the bolt grafting, bolt tip and nut threaded connection.
In this technical scheme, the deflector is round platform shape structure, deflector edge lateral wall is connected with the metal wire laminating of slope distribution, metal wire one end is located between deflector and the fixed plate, a plurality of evenly distributed's perforation has been seted up to the fixed plate edge, every the perforation all corresponds the setting in the metal wire below, and every the perforation all communicates with the spacing inslot portion.
In this technical scheme, fixed plate edge and a plurality of evenly distributed's long screw rod fixed connection, every long screw rod all runs through with the grip block edge and pegs graft, long screw rod tip and knob threaded connection, just knob and grip block edge gomphosis are connected.
In this technical scheme, the limiting groove that the shape is the same has all been seted up to grip block and fixed plate faying surface, the limiting groove is circular structure, is located grip block and fixed plate inside wall and a plurality of stopper fixed connection of limiting groove inside, just the stopper is connected with the inside gomphosis of fluting of spacing ring.
In this technical scheme, spacing ring and the inside gomphosis of spacing groove are connected, spacing ring edge is equipped with a plurality of bellying, and is adjacent the bellying of spacing ring corresponds the distribution and the opposite orientation, bellying inner wall and a plurality of briquetting sliding connection, just be equipped with test probe between the bellying that corresponds the setting in the adjacent spacing ring, test probe is located between two briquetting, the arc groove that is used for laminating with test probe outer wall has been seted up to the briquetting adjacent end.
In the technical scheme, the number of the test probes is a plurality of, each test probe is located between the limiting rings, each test probe is inserted through the clamping plate and extends to the inside of the limiting groove, and one end of each test probe is inserted into the through hole in a jogged mode.
In this technical scheme, the inside activity of test probe has cup jointed coupling spring, coupling spring both ends respectively with tip portion and needle afterbody fixed connection, tip portion and needle afterbody all with the inside sliding connection of test probe, just tip portion and needle afterbody all with needle point fixed connection.
In the technical scheme, the test probes are uniformly distributed to the edges of the clamping plates, the inclusion parts at the two ends of each test probe are of arc-shaped structures for limiting the head part and the tail part of the needle, and the tip of the tail part of the needle is in contact with the metal wire.
On the basis of conforming to the common knowledge in the field, the above preferred conditions can be arbitrarily combined to obtain the preferred examples of the invention.
The probe card convenient for replacing the test probe has the beneficial effects that: can compromise test probe stable fixed and two problems of convenient change, adopt fixed plate and grip block to carry out the grafting of probe fixed, and set up the spacing groove between fixed plate and grip block and carry out the installation of spacing ring, make it carry out spacingly to the probe through the fluting that sets up, and set up movable briquetting and probe surface's draw-in groove at the fluting inside and cooperate, realize stable spacing, guarantee that the probe can not appear not hard up problem in the testing process, and set up the draw-in groove in the probe both sides, only need rotatory probe gently can extract it when changing, can ensure stable spacing, can conveniently take out fast, and the probe both ends set up inclusion portion can carry out spacing to the syringe needle tail when, conveniently utilize the inclusion portion to promote the briquetting to move away, rotatory messenger's briquetting and the inside gomphosis of draw-in groove realization stable installation after the probe grafting is accomplished, guarantee the stable connection of needle tail department and wire simultaneously, improve the electrical detection performance of probe.
Drawings
Fig. 1 is a schematic perspective view of a probe card of the present invention for facilitating replacement of test probes.
FIG. 2 is a cross-sectional view of a front view of a probe card of the present invention for facilitating replacement of test probes.
Fig. 3 is a schematic view of the mounting plate in a bottom view.
Fig. 4 is a schematic view showing the bottom structure of the clamping plate.
Fig. 5 is a schematic view showing the bottom structure of the fixing plate.
Fig. 6 is a schematic view of a partial enlarged structure at a in fig. 5.
Fig. 7 is a schematic view of a partial perspective structure at the limiting ring.
Fig. 8 is a schematic perspective view of the mounting plate.
Fig. 9 is a schematic diagram showing the internal three-dimensional structure of the test probe.
Fig. 10 is a schematic view of the external perspective structure of the test probe.
In the figure: 100. the device comprises a connecting plate, 101, a mounting plate, 102, a positioning block, 103, a mounting groove, 104, a bolt, 105, a nut, 106, a guide plate, 107, a metal wire, 108, a welding head, 109, a circuit board, 200, a fixing plate, 201, a perforation, 202, a long screw, 203, a clamping plate, 204, a knob, 205, a limit groove, 206, a limit block, 300, a limit ring, 301, a protruding part, 302, a slot, 303, a connecting block, 304, a return spring, 305, a pressing block, 400, a test probe, 401, a needle tail, 402, a needle head, 403, a needle tip, 404, a connecting spring, 405, an inclusion part, 406 and a clamping groove.
Detailed Description
The following detailed description of the invention will be given with reference to the accompanying drawings.
The probe card of this embodiment, which facilitates replacement of test probes, as shown in fig. 1-10, includes:
the connecting plate 100, the surface of the connecting plate 100 is provided with an installation groove 103 for embedding the installation plate 101, and one side of the installation plate 101 far away from the connecting plate 100 is fixedly connected with the guide plate 106;
the fixing plate 200 is fixedly connected with the guide plate 106, a metal wire 107 is embedded between the guide plate 106 and the fixing plate 200, the surface of the fixing plate 200 is in fit connection with the clamping plate 203, and the fit surfaces of the fixing plate 200 and the clamping plate 203 are provided with limit grooves 205;
the limiting rings 300 are composed of a plurality of annular rings which are sleeved with each other, the thickness of each limiting ring 300 is the same, adjacent annular rings are fixedly connected through a connecting block 303, a protruding portion 301 is arranged on the surface of each limiting ring 300, a groove 302 is formed in the other side of each limiting ring 300 corresponding to the protruding portion 301, the inside of each protruding portion 301 is in sliding connection with a pressing block 305, and the pressing blocks 305 are connected with the inner wall of each protruding portion 301 through a reset spring 304;
the test probe 400, a plurality of evenly distributed draw-in grooves 406 have been seted up to test probe 400 surface, a plurality of draw-in grooves 406 symmetric distribution extremely test probe 400 both sides, test probe 400 both ends all are equipped with inclusion portion 405, just when test probe 400 is pegged graft, inclusion portion 405 surface contact briquetting 305.
In this technical scheme, the surface of one side of the connecting plate 100 is fixedly connected with the circuit board 109, a plurality of evenly distributed welding heads 108 are evenly arranged on the edge of the other side of the connecting plate 100, the welding heads 108 are connected with the contacts of the circuit board 109, each welding head 108 is welded and fixed with the metal wire 107, the connection between the metal wire 107 and the circuit board 109 is realized through the connecting plate 100, and the effective electric connection of the connection position of the metal wire 107 is ensured through the welding heads 108.
In this technical scheme, mounting panel 101 edge fixedly connected with a plurality of evenly distributed's locating piece 102, mounting panel 101 and locating piece 102 all are connected with connecting plate 100 surface laminating, every locating piece 102 all with the inside gomphosis grafting of mounting groove 103, locating piece 102 and connecting plate 100 all run through with bolt 104 and peg graft, bolt 104 tip and nut 105 threaded connection can be to mounting panel 101 through setting up locating piece 102, make mounting panel 101 can gomphosis be fixed with connecting plate 100 in mounting groove 103 inside, realize the stable installation between connecting plate 100 and the fixed plate 200, improve assembly efficiency to realize the fixed of mounting panel 101 through bolt 104 and nut 105 cooperation.
In this technical scheme, deflector 106 is round platform shape structure, deflector 106 edge lateral wall is connected with the metal wire 107 laminating of slope distribution, metal wire 107 one end is located between deflector 106 and the fixed plate 200, a plurality of evenly distributed's perforation 201 has been seted up to the fixed plate 200 edge, every perforation 201 all corresponds the setting in metal wire 107 below, and every perforation 201 all communicates with spacing groove 205 is inside, and deflector 106 is used for fixing the one end of metal wire 107 between the two with the fixed plate 200 cooperation, can play metal wire 107 supporting role around the deflector 106 simultaneously, makes metal wire 107 can stably fix between deflector 106 and fixed plate 200.
In this technical scheme, fixed plate 200 edge and a plurality of evenly distributed's long screw 202 fixed connection, every long screw 202 runs through with grip block 203 edge and pegs graft, long screw 202 tip and knob 204 threaded connection, just knob 204 and grip block 203 edge gomphosis are connected, can fix grip block 203 on the fixed plate 200 surface through the cooperation of long screw 202 and knob 204, and grip block 203 and fixed plate 200 can fix a position the spacing ring 300 inside spacing groove 205 simultaneously and install, and convenient grafting of follow-up test probe 400 adopts the dismouting to carry out grip block 203 fixed, and convenient follow-up maintenance improves the convenience of use.
In this technical scheme, the limiting groove 205 that the shape is the same has all been seted up to grip block 203 and fixed plate 200 faying surface, limiting groove 205 is circular structure, is located the inside grip block 203 of limiting groove 205 and fixed plate 200 inside wall and a plurality of stopper 206 fixed connection, just the inside gomphosis of fluting 302 of stopper 206 and stop collar 300 is connected, can fix stop collar 300 between grip block 203 and fixed plate 200 through setting up limiting groove 205 to can carry out accurate positioning to stop collar 300 position through setting up stopper 206, guarantee the accurate installation of stop collar 300.
In this technical scheme, spacing ring 300 is connected with the inside gomphosis of spacing groove 205, spacing ring 300 edge is equipped with a plurality of bellying 301, and is adjacent spacing ring 300's bellying 301 corresponds the distribution and the opposite orientation, bellying 301 inner wall and a plurality of briquetting 305 sliding connection, just be equipped with test probe 400 between the bellying 301 that corresponds the setting in the adjacent spacing ring 300, test probe 400 is located between two briquetting 305, the arc groove that is used for laminating with test probe 400 outer wall is seted up to briquetting 305 adjacent end, through setting up a plurality of bellying 301 at spacing ring 300 edge, can move to between bellying 301 in the fluting 302 inside that forms of bellying 301, and can move to between the bellying 301 after test probe 400 is pegged graft to carry out spacingly to test probe 400 through briquetting 305, make the stable centre gripping spacing of realization after the probe installation, avoid the test probe 400 loose problem to appear in the testing process, guarantee the stability of hookup location.
In this technical scheme, the quantity of test probe 400 is a plurality of, every test probe 400 all is located between spacing ring 300, every test probe 400 all runs through grafting with grip block 203 and extends to the inside of spacing groove 205, test probe 400 one end and the inside gomphosis grafting of perforation 201, test probe 400 is at the installation messenger, passes from grip block 203 edge to move to the inside of spacing groove 205, make the syringe needle portion 402 of syringe needle afterbody 401 move to the inside of perforation 201, and with wire 107 accurate corresponding connection, realize stable electric connection.
By adopting such a scheme, the inside activity of test probe 400 has cup jointed coupling spring 404, coupling spring 404 both ends respectively with syringe needle portion 402 and needle afterbody 401 fixed connection, syringe needle portion 402 and needle afterbody 401 all with the inside sliding connection of test probe 400, just syringe needle portion 402 and needle afterbody 401 all with needle point 403 fixed connection, coupling spring 404 is used for promoting syringe needle portion 402 and needle afterbody 401 and removes, makes syringe needle portion 402 and needle afterbody 401 can realize stable contact when detecting.
In this technical scheme, test probe 400 evenly distributed to grip block 203 edge, every the inclusion portion 405 at test probe 400 both ends is circular arc structure in order to be used for the spacing of tip portion 402 and tip portion 401, and tip portion 401's tip 403 contacts wire 107, can carry out spacing to tip portion 402 and tip portion 401 through setting up inclusion portion 405, when producing, install tip portion 402 and tip portion 401 in test probe 400 inside, press deformation with test probe 400 both ends and form inclusion portion 405 and carry out spacing, inclusion portion 405 can push away the briquetting 305 after simultaneously, make test probe 400 surface slide to behind the corresponding position of draw-in groove 406 and briquetting 305 between briquetting 305, make briquetting 305 and draw-in groove 406 joint, reset spring 304 promotes briquetting 305 and supports draw-in groove 406 and realize the stable spacing of test probe 400 this moment, avoid taking place test probe 400 loose problem in the testing process.
The present invention is not limited to the above-described embodiments, and any changes in shape or structure thereof are intended to fall within the scope of the present invention. The scope of the present invention is defined by the appended claims, and those skilled in the art can make various changes or modifications to these embodiments without departing from the principle and spirit of the present invention, but these changes and modifications fall within the scope of the present invention.

Claims (8)

1. The probe card of convenient change test probe, its characterized in that includes:
the connecting plate (100), the surface of the connecting plate (100) is provided with an installing groove (103) for embedding an installing plate (101), and one side of the installing plate (101) far away from the connecting plate (100) is fixedly connected with a guide plate (106);
the fixing plate (200), fixed plate (200) and deflector (106) fixed connection, inlay between deflector (106) and the fixed plate (200) and be equipped with metal wire (107), fixed plate (200) surface is laminated with grip block (203) and is connected, just limiting groove (205) have all been seted up to fixed plate (200) and grip block (203) laminating face;
the limiting rings (300) are formed by a plurality of annular rings which are sleeved with each other, the thickness of each limiting ring (300) is the same, adjacent annular rings are fixedly connected through connecting blocks (303), a protruding portion (301) is arranged on the surface of each limiting ring (300), a groove (302) is formed in the other side of each limiting ring (300) corresponding to each protruding portion (301), the inside of each protruding portion (301) is in sliding connection with a pressing block (305), and the pressing blocks (305) are connected with the inner wall of each protruding portion (301) through reset springs (304);
the test probe (400), a plurality of evenly distributed clamping grooves (406) are formed in the surface of the test probe (400), the clamping grooves (406) are symmetrically distributed to two sides of the test probe (400), inclusion parts (405) are arranged at two ends of the test probe (400), and when the test probe (400) is inserted, the surfaces of the inclusion parts (405) are in contact with the pressing blocks (305);
the limiting rings (300) are connected with the inside of the limiting groove (205) in a jogged mode, a plurality of protruding portions (301) are arranged at the edges of the limiting rings (300), the protruding portions (301) of the adjacent limiting rings (300) are correspondingly distributed and face opposite directions, the inner walls of the protruding portions (301) are in sliding connection with a plurality of pressing blocks (305), a test probe (400) is arranged between the protruding portions (301) which are correspondingly arranged in the adjacent limiting rings (300), the test probe (400) is located between the two pressing blocks (305), and an arc groove which is used for being attached to the outer walls of the test probes (400) is formed in the adjacent ends of the pressing blocks (305);
the number of the test probes (400) is a plurality, each test probe (400) is located between the limiting rings (300), each test probe (400) is inserted and connected with the clamping plate (203) in a penetrating mode and extends to the inside of the limiting groove (205), and one end of each test probe (400) is inserted and connected with the inside of the through hole (201) in a jogged mode.
2. The probe card for facilitating replacement of test probes according to claim 1, wherein: the surface of one side of the connecting plate (100) is fixedly connected with the circuit board (109), a plurality of evenly distributed welding heads (108) are evenly arranged on the edge of the other side of the connecting plate (100), the welding heads (108) are connected with contacts of the circuit board (109), and each welding head (108) is fixedly welded with the metal wire (107).
3. The probe card for facilitating replacement of test probes according to claim 1, wherein: the edge of the mounting plate (101) is fixedly connected with a plurality of uniformly distributed positioning blocks (102), the mounting plate (101) and the positioning blocks (102) are all connected with the surface of the connecting plate (100) in a fitting mode, each positioning block (102) is connected with the inside of the mounting groove (103) in a fitting mode in a plugging mode, the positioning blocks (102) and the connecting plate (100) are all connected with bolts (104) in a penetrating mode in a plugging mode, and the ends of the bolts (104) are connected with nuts (105) in a threaded mode.
4. The probe card for facilitating replacement of test probes according to claim 1, wherein: the guide plate (106) is of a round table-shaped structure, the side wall of the edge of the guide plate (106) is connected with the metal wires (107) in an attached mode, one end of each metal wire (107) is located between the guide plate (106) and the fixing plate (200), a plurality of evenly distributed through holes (201) are formed in the edge of the fixing plate (200), each through hole (201) is correspondingly formed below each metal wire (107), and each through hole (201) is communicated with the inside of the limiting groove (205).
5. The probe card for facilitating replacement of test probes according to claim 1, wherein: the edge of the fixing plate (200) is fixedly connected with a plurality of uniformly distributed long screws (202), each long screw (202) is inserted and connected with the edge of the clamping plate (203) in a penetrating mode, the end portion of the long screw (202) is connected with a knob (204) in a threaded mode, and the knob (204) is connected with the edge of the clamping plate (203) in a jogged mode.
6. The probe card for facilitating replacement of test probes as recited in claim 5, wherein: limiting grooves (205) with the same shape are formed in the joint surfaces of the clamping plates (203) and the fixing plates (200), the limiting grooves (205) are of round structures, the inner side walls of the clamping plates (203) and the fixing plates (200) inside the limiting grooves (205) are fixedly connected with a plurality of limiting blocks (206), and the limiting blocks (206) are connected with grooves (302) of the limiting rings (300) in a jogged mode.
7. The probe card for facilitating replacement of test probes according to claim 1, wherein: the test probe (400) is movably sleeved with a connecting spring (404), two ends of the connecting spring (404) are fixedly connected with the needle head (402) and the needle tail (401) respectively, the needle head (402) and the needle tail (401) are slidably connected with the test probe (400), and the needle head (402) and the needle tail (401) are fixedly connected with the needle point (403).
8. The probe card for facilitating replacement of test probes according to claim 1, wherein: the test probes (400) are uniformly distributed to the edge of the clamping plate (203), the inclusion parts (405) at two ends of each test probe (400) are of circular arc structures for limiting the needle head (402) and the needle tail (401), and the needle points (403) of the needle tail (401) are in contact with the metal wires (107).
CN202410013684.2A 2024-01-04 2024-01-04 Probe card convenient for replacing test probes Active CN117517735B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410013684.2A CN117517735B (en) 2024-01-04 2024-01-04 Probe card convenient for replacing test probes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410013684.2A CN117517735B (en) 2024-01-04 2024-01-04 Probe card convenient for replacing test probes

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CN117517735A CN117517735A (en) 2024-02-06
CN117517735B true CN117517735B (en) 2024-03-15

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0164722A1 (en) * 1984-06-11 1985-12-18 Thomas Johnson Dr. Black Automatic test system
GB9705959D0 (en) * 1996-04-23 1997-05-07 Zhong George G Automatic multi-probe PWB tester
TW569017B (en) * 2002-09-13 2004-01-01 Chien Hui Chuan Vertical probe card with feedback contact force sensor
CN207832852U (en) * 2018-02-28 2018-09-07 无锡旺矽科技有限公司 A kind of automatic prober
CN111090033A (en) * 2019-12-24 2020-05-01 淮安芯测半导体有限公司 Semiconductor device and probe test method thereof
CN112858742A (en) * 2021-03-04 2021-05-28 哈尔滨桥晟科技发展有限公司 MEMS probe card test socket, MEMS probe card test method and MEMS probe card spring replacement method
CN214278247U (en) * 2020-12-30 2021-09-24 南京亚尔软件测试有限公司 Flexible connecting module of alternating current terminal
CN114034895A (en) * 2021-11-22 2022-02-11 普铄电子(上海)有限公司 High-frequency probe card for wafer test
CN217587344U (en) * 2022-04-12 2022-10-14 米心半导体(江苏)有限公司 Cantilever type probe card for low-temperature testing of chip
CN219179470U (en) * 2022-12-02 2023-06-13 昆山同兴达芯片封测技术有限责任公司 Improved probe card for wafer test

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0164722A1 (en) * 1984-06-11 1985-12-18 Thomas Johnson Dr. Black Automatic test system
GB9705959D0 (en) * 1996-04-23 1997-05-07 Zhong George G Automatic multi-probe PWB tester
TW569017B (en) * 2002-09-13 2004-01-01 Chien Hui Chuan Vertical probe card with feedback contact force sensor
CN207832852U (en) * 2018-02-28 2018-09-07 无锡旺矽科技有限公司 A kind of automatic prober
CN111090033A (en) * 2019-12-24 2020-05-01 淮安芯测半导体有限公司 Semiconductor device and probe test method thereof
CN214278247U (en) * 2020-12-30 2021-09-24 南京亚尔软件测试有限公司 Flexible connecting module of alternating current terminal
CN112858742A (en) * 2021-03-04 2021-05-28 哈尔滨桥晟科技发展有限公司 MEMS probe card test socket, MEMS probe card test method and MEMS probe card spring replacement method
CN114034895A (en) * 2021-11-22 2022-02-11 普铄电子(上海)有限公司 High-frequency probe card for wafer test
CN217587344U (en) * 2022-04-12 2022-10-14 米心半导体(江苏)有限公司 Cantilever type probe card for low-temperature testing of chip
CN219179470U (en) * 2022-12-02 2023-06-13 昆山同兴达芯片封测技术有限责任公司 Improved probe card for wafer test

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