CN117805457A - Template-based probe-free disassembly type probe array structure - Google Patents
Template-based probe-free disassembly type probe array structure Download PDFInfo
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- CN117805457A CN117805457A CN202410231114.0A CN202410231114A CN117805457A CN 117805457 A CN117805457 A CN 117805457A CN 202410231114 A CN202410231114 A CN 202410231114A CN 117805457 A CN117805457 A CN 117805457A
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- 239000000523 sample Substances 0.000 title claims abstract description 76
- 238000012360 testing method Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 7
- 238000003801 milling Methods 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 5
- 238000007906 compression Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 claims description 3
- 241001409896 Hirundapus Species 0.000 claims description 3
- 238000003672 processing method Methods 0.000 claims description 2
- 238000012827 research and development Methods 0.000 abstract description 6
- 241001136800 Anas acuta Species 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000013461 design Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000008094 contradictory effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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Abstract
The invention discloses a template-based probe-free disassembly type probe array structure, and belongs to the technical field of semiconductor test equipment; it comprises the following steps: the needle cylinder array structure, the needle tail, the spring, the needle head and the template; the needle cylinder array structure is provided with stepped through holes distributed in an array manner, the needle tail extends out of the stepped through holes, a spring is arranged immediately above the needle tail, and a needle head is arranged immediately above the spring; the upper part of the needle cylinder array structure is also provided with a mounting part for fixing a needle head, and the lower part of the needle cylinder array structure is also provided with a positioning hole and a threaded hole; according to the positions of the bumps or the contacts of the bare chip to be tested, the pin tails extend out of the test through holes and are used for electrically connecting a tester or the bare chip to be tested; the template is positioned and connected with the needle cylinder array structure; the template is designed according to the positions of the bumps or the contacts of the bare chip to be tested, so that the invention can adapt to different chips to be tested by replacing different templates under the condition of not disassembling the probe, and greatly reduces the research and development cost and the research and development period of the probe card.
Description
Technical Field
The invention discloses a template-based probe-free disassembly type probe array structure, and belongs to the technical field of semiconductor test equipment.
Background
The probe card is a test interface for testing the bare chip, and the test probes in the probe card enable the tester to be electrically connected with the chip, and the tester writes data into the bare chip and reads data from the bare chip so as to realize the test of the bare chip.
Because of the large number of die patterns and the varying number and locations of bumps or contacts, a special probe card needs to be designed for the die under test, which makes testing costs prohibitive. However, the two batches of dies with similar batches and updated and upgraded dies with most of the bumps or contacts are positioned in the same way, so that the distribution of the probes in the corresponding two-generation probe cards is also highly similar. In this case, it is not necessary to completely re-develop the probe card, resulting in unnecessary waste of development resources.
In order to solve the above problems, one idea is to design a probe card with detachable probes. For example: the invention patent of application number 201711435569.0, quick detach probe card, its structure includes: the PCB is provided with a first through hole in the middle, and a plurality of conductive contacts are arranged on the upper surface and the lower surface of the PCB along the periphery of the first through hole; one end of each probe is bent into a hook shape; the needle clamping assembly is provided with a second through hole corresponding to the first through hole of the PCB, a plurality of probes are loaded in the needle clamping assembly, one end of each bent hook of each probe is arranged inwards, and the other end of each probe extends out of the needle clamping assembly; the first compression ring is used for compressing the extension part at the other end of the probe to the conductive contact on one surface of the PCB; through the detachable structural design, the probe is assembled on the PCB, so that the quick assembly, the quick disassembly and the quick replacement can be realized; through the locating hole of needle subassembly, realize high accuracy location, the quality of probe card has more ensured.
However, the stability of the test probe in the fixing process is difficult to ensure by the structure, the probe tip in the probe stretches along with the detection, the test probe is easy to loosen, the subsequent detection is difficult to accurately position when serious, and the test is failed; the test probe is effectively fixed, and the probe is not easy to take out when the probe needs to be replaced, so that the operation difficulty is increased. Therefore, the stable fixing and convenient replacement of the test probe are a pair of contradictory problems which are difficult to be compatible. For this purpose, the invention patent of application number 202410013684.2, probe card for easy replacement of test probes, gives a solution comprising: the surface of the connecting plate is provided with a mounting groove for embedding the mounting plate, the surface of the guide plate is in fit connection with the clamping plate, the joint surfaces of the guide plate and the clamping plate are provided with limiting grooves, the limiting ring consists of a plurality of mutually sleeved annular rings, the surface of the limiting ring is provided with a bulge, the other side of the limiting ring corresponding to the bulge is provided with a slot, the inside of the slot is in sliding connection with the pressing block, and the surface of the test probe is provided with a plurality of clamping grooves which are uniformly distributed; according to the invention, the fixing plate and the clamping plate are adopted to carry out the plug-in fixation of the probe, the movable pressing block is arranged in the slot to be matched with the clamping groove on the surface of the probe, so that the stable limit is realized, the clamping grooves are arranged on the two sides of the probe, the probe can be pulled out only by lightly rotating the probe during replacement, the stable limit can be ensured, the probe can be conveniently and quickly taken out, the stable connection between the tail part of the probe and the metal wire is ensured, and the electrical detection performance of the probe is improved.
A common feature of both techniques is the ability to disassemble and assemble the probe. Since there is no specialized disassembly and assembly equipment in the market in this subdivision area, this work can only be done manually, but the probe size is small, the diameter is only a fraction of a millimeter, and the disassembly and assembly of individual probes is done in thousands of densely arranged probes, which is highly difficult.
Therefore, whether to design a structure capable of realizing different combinations without disassembling the probe is a key technical problem to be solved in the field.
Disclosure of Invention
Aiming at the technical requirements, the invention designs a template-based probe-free disassembly type probe array structure, wherein the template is designed according to the positions of the bumps or contacts of the bare chip to be tested, so that different chips to be tested can be adapted only by replacing different templates under the condition of not disassembling the probe, and the research and development cost and the research and development period of the probe card are greatly reduced.
The purpose of the invention is realized in the following way:
a template-based probe-free disassembly probe array structure comprising: the needle cylinder array structure, the needle tail, the spring, the needle head and the template;
the needle cylinder array structure is provided with stepped through holes distributed in an array manner, the needle tail comprises a first limiting end and a first tip, and the needle tail extends out of the stepped through holes according to the direction that the first tip is arranged downwards and the first limiting end is arranged upwards; a spring is arranged in the stepped through hole and is close to the upper part of the needle tail; a needle is arranged in the stepped through hole and is close to the upper part of the spring; the needle head comprises a second limiting end and a second tip end, and the second tip end is arranged above the spring in the upward direction according to the condition that the second limiting end is arranged below;
the needle cylinder array structure is characterized in that an installation part is further arranged above the needle cylinder array structure and used for fixing a needle head, and a positioning hole and a threaded hole are further formed below the needle cylinder array structure;
according to the position of the bump or the contact point of the bare chip to be tested, a test through hole is formed in the template, and a first tip of the needle tail extends out of the test through hole and is used for electrically connecting a tester or the bare chip to be tested; a positioning extending end is further arranged above the template, and is inserted into the positioning hole to realize positioning between the template and the needle cylinder array structure; the template is also provided with a mounting hole corresponding to the position of the threaded hole, and the bolt passes through the mounting hole and is in threaded connection with the threaded hole, so that the template is fixed below the needle cylinder array structure.
In the template-based probe-free disassembly type probe array structure, when the needle tail is completely extended out of the stepped through hole, the spring is in an elastic compression state; when the bottom of the first tip of the needle tail is positioned at the same level with the bottom of the needle cylinder array structure, the spring is still in an elastic compression state.
Above-mentioned probe array structure is dismantled to exempt from to probe based on template, installation department is T shape structure, is located between two adjacent ladder through-holes, the spacing end of second is worker shape structure, the opening of installation department with the opening of the spacing end of second is located same horizontal plane, and the limiting plate is followed the opening of installation department with pass in the middle of the opening of the spacing end of second, realize the spacing to the syringe needle.
The processing technology method of the template-based probe-free disassembly type probe array structure comprises the following steps of:
step a, processing through holes corresponding to the diameter of the first tip on the substrate;
b, processing a blind hole corresponding to the diameter of the first limiting end coaxially with the through hole in the step a; the through hole in the step a and the blind hole in the step b jointly form a stepped through hole;
c, milling redundant base materials on the upper surface of the base material along two array directions of the stepped through holes on a horizontal plane, and reserving a basic part of the lower mounting part;
and d, milling an inner groove along a certain array direction of the stepped through holes at the basic part of the mounting part to form the mounting part of the T-shaped structure.
The template-based probe-free disassembly type probe array structure comprises the following mounting method:
step a, placing needle tails in all stepped through holes of the needle cylinder array structure according to the direction that the first tip is arranged downwards and the first limiting end is arranged upwards;
step b, placing a spring in the stepped through hole and immediately above the needle tail;
c, placing a needle head in the step through hole in the direction that the second tip is upward and is close to the upper side of the spring according to the condition that the second limiting end is downward;
d, synchronously pressing down all the needle heads by using a pressing plate so that the notch of the mounting part and the notch of the second limiting end are positioned on the same horizontal plane;
step e, the limiting plate penetrates through the gap of the mounting part and the gap of the second limiting end, so that the limiting of the needle head is realized;
f, fixing the limiting plate on the needle cylinder array structure;
step g, removing the pressing plate;
and h, placing a template from the bottom of the syringe array structure, and fixedly mounting the template on the bottom of the syringe array structure by using bolts.
The template-based probe-free disassembly type probe array structure has the beneficial effects that: the template is designed according to the positions of the bumps or the contacts of the bare chip to be tested, so that different chips to be tested can be adapted only by replacing different templates under the condition that the probe is not dismounted, and the research and development cost and the research and development period of the probe card are greatly reduced.
Drawings
FIG. 1 is a schematic diagram of a template-based probe-free detachable probe array structure according to the present invention.
Fig. 2 is a flow chart of a process for manufacturing the syringe array structure.
Fig. 3 is a schematic view of a process for manufacturing the syringe array structure.
FIG. 4 is a flow chart of a method of installing the template-based probe-free detachable probe array structure of the present invention.
FIG. 5 is a schematic diagram of the mounting process of the template-based probe-free detachable probe array structure of the present invention.
In the figure: 1 needle cylinder array structure, 1-1 ladder through hole, 1-2 installation department, 1-3 locating hole, 1-4 screw hole, 2 needle tail, 2-1 first spacing end, 2-2 first pointed end, 3 spring, 4 syringe needle, 4-1 second spacing end, 4-2 second pointed end, 5 template, 5-1 test through hole, 5-2 location extension end, 5-3 mounting hole, 5-4 bolt, 6 limiting plate.
Detailed Description
The following describes the embodiments of the present invention in further detail with reference to the accompanying drawings.
Mode one
The following is a specific embodiment of the template-based probe-free detachable probe array structure of the present invention.
The template-based probe-free disassembly type probe array structure in this embodiment, as shown in fig. 1, includes: the needle cylinder array structure 1, the needle tail 2, the spring 3, the needle head 4 and the template 5;
the needle cylinder array structure 1 is provided with stepped through holes 1-1 distributed in an array manner, the needle tail 2 comprises a first limiting end 2-1 and a first tip end 2-2, and the needle tail 2 extends out of the stepped through holes 1-1 according to the direction that the first tip end 2-2 is arranged downwards and the first limiting end 2-1 is arranged upwards; a spring 3 is arranged in the stepped through hole 1-1 and is close to the upper part of the needle tail 2; a needle 4 is arranged in the stepped through hole 1-1 and is close to the upper part of the spring 3; the needle head 4 comprises a second limiting end 4-1 and a second tip 4-2, and the second tip 4-2 is placed above the spring 3 in the upward direction according to the condition that the second limiting end 4-1 is arranged below;
a mounting part 1-2 is further arranged above the needle cylinder array structure 1, the mounting part 1-2 is used for fixing a needle head 4, and a positioning hole 1-3 and a threaded hole 1-4 are further arranged below the needle cylinder array structure 1;
according to the position of the bump or the contact point of the bare chip to be tested, a test through hole 5-1 is formed in the template 5, and the first tip 2-2 of the pin tail 2 extends out of the test through hole 5-1 and is used for electrically connecting a tester or the bare chip to be tested; a positioning extending end 5-2 is further arranged above the template 5, and the positioning extending end 5-2 is inserted into the positioning hole 1-3 to realize positioning between the template 5 and the needle cylinder array structure 1; the template 5 is also provided with a mounting hole 5-3 corresponding to the position of the threaded hole 1-4, and the bolt 5-4 passes through the mounting hole 5-3 and then is in threaded connection with the threaded hole 1-4, so that the template 5 is fixed below the needle cylinder array structure 1.
Mode two
The following is a specific embodiment of the template-based probe-free detachable probe array structure of the present invention.
The template-based probe-free detachable probe array structure in this embodiment is further defined on the basis of the first embodiment: when the needle tail 2 is completely extended out of the stepped through hole 1-1, the spring 3 is in an elastic compression state; when the bottom of the first tip 2-2 of the needle tail 2 is at the same level as the bottom of the syringe array structure 1, the spring 3 is still in an elastically compressed state.
By the design, the needle tail 2 which is completely extended from the stepped through hole 1-1 can be ensured to have elasticity, the needle tail 2 pressed by the template 5 can be ensured to be completely extended from the stepped through hole 1-1 after the template 5 is replaced, and the needle tail 2 can be ensured to be effective under different templates 5.
Mode three
The following is a specific embodiment of the template-based probe-free detachable probe array structure of the present invention.
The template-based probe-free detachable probe array structure in this embodiment is further defined on the basis of the first embodiment: the mounting part 1-2 is of a T-shaped structure and is positioned between two adjacent stepped through holes 1-1, the second limiting end 4-1 is of an I-shaped structure, the opening of the mounting part 1-2 and the opening of the second limiting end 4-1 are positioned on the same horizontal plane, and the limiting plate 6 penetrates through the middle of the opening of the mounting part 1-2 and the opening of the second limiting end 4-1, so that the limiting of the needle head 4 is realized.
This embodiment gives a specific solution of how to fix the needle 4 in the syringe array structure 1, under which the needle 4 is fixed differently, ensuring that it is in the same horizontal plane as the top of the needle 4, facilitating the connection with the die to be tested or the tester and also facilitating the adjustment of the tail 2.
Mode four
The following is a specific embodiment of the process of the needle cylinder array structure 1 in the template-based probe-free detachable probe array structure of the present invention.
The processing method of the needle cylinder array structure 1 in this specific embodiment is shown in fig. 2, and the steps are as follows: step a, processing through holes corresponding to the diameters of the first tips 2-2 on the substrate;
b, processing a blind hole corresponding to the diameter of the first limiting end 2-1 coaxially with the through hole in the step a; the through hole in the step a and the blind hole in the step b jointly form a stepped through hole 1-1;
step c, milling redundant base materials on the upper surface of the base material along the two array directions of the stepped through holes 1-1 on a horizontal plane, and reserving a basic part of the lower mounting part 1-2;
and d, milling an inner groove along one array direction of the stepped through holes 1-1 at the basic part of the mounting part 1-2 to form the mounting part 1-2 with a T-shaped structure.
The whole process schematic diagram is shown in fig. 3.
Mode five
The following is a specific embodiment of the method for installing the template-based probe-free detachable probe array structure of the present invention.
The method for installing the template-based probe-free detachable probe array structure in the specific embodiment is shown in fig. 4, the process schematic diagram is shown in fig. 5, and the method is as follows:
step a, placing needle tails 2 in all the stepped through holes 1-1 of the needle cylinder array structure 1 according to the direction that the first tip 2-2 is arranged downwards and the first limiting end 2-1 is arranged upwards;
step b, placing a spring 3 in the stepped through hole 1-1 and immediately above the needle tail 2;
step c, placing a needle head 4 in the step through hole 1-1 in the upper direction of the second tip 4-2 according to the condition that the second limiting end 4-1 is arranged below and immediately above the spring 3;
step d, synchronously pressing down all the needle heads 4 by using a pressing plate so that the notch of the mounting part 1-2 and the notch of the second limiting end 4-1 are positioned on the same horizontal plane;
step e, the limiting plate 6 passes through the gap of the mounting part 1-2 and the gap of the second limiting end 4-1, so that the limiting of the needle head 4 is realized;
f, fixing the limiting plate 6 on the needle cylinder array structure 1;
step g, removing the pressing plate;
and h, placing a template 5 from the bottom of the syringe array structure 1, and fixedly mounting the template 5 on the bottom of the syringe array structure 1 by using bolts 5-4.
It should be noted that the above is only a specific embodiment of the present application, and is not intended to limit the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
It should be noted that, the technical features listed in the foregoing embodiments can be arranged and combined as long as they are not contradictory, and those skilled in the art can exhaust the results after each arrangement and combination according to the mathematical knowledge of the arrangement and combination learned by the senior citizen, and all the results after the arrangement and combination should be understood as being disclosed in the present application.
Claims (5)
1. Template-based probe-free disassembly type probe array structure, which is characterized by comprising: the needle cylinder array structure (1), a needle tail (2), a spring (3), a needle head (4) and a template (5);
the needle cylinder array structure (1) is provided with stepped through holes (1-1) distributed in an array manner, the needle tail (2) comprises a first limiting end (2-1) and a first tip (2-2), and the needle tail (2) extends out of the stepped through holes (1-1) in the upward direction of the first limiting end (2-1) according to the condition that the first tip (2-2) is arranged below; a spring (3) is arranged in the stepped through hole (1-1) and is close to the upper part of the needle tail (2); a needle head (4) is arranged in the stepped through hole (1-1) and is close to the upper part of the spring (3); the needle head (4) comprises a second limiting end (4-1) and a second tip (4-2), and the second tip (4-2) is placed above the spring (3) in the upward direction according to the condition that the second limiting end (4-1) is arranged below;
a mounting part (1-2) is further arranged above the needle cylinder array structure (1), the mounting part (1-2) is used for fixing a needle head (4), and a positioning hole (1-3) and a threaded hole (1-4) are further arranged below the needle cylinder array structure (1);
according to the position of the bump or the contact point of the bare chip to be tested, a test through hole (5-1) is formed in the template (5), and a first tip (2-2) of the needle tail (2) extends out of the test through hole (5-1) and is used for electrically connecting a tester or the bare chip to be tested; a positioning extending end (5-2) is further arranged above the template (5), and the positioning extending end (5-2) is inserted into the positioning hole (1-3) to realize positioning between the template (5) and the needle cylinder array structure (1); the template (5) is further provided with a mounting hole (5-3) corresponding to the threaded hole (1-4), and the bolt (5-4) penetrates through the mounting hole (5-3) and then is in threaded connection with the threaded hole (1-4) so as to fix the template (5) below the needle cylinder array structure (1).
2. Template-based probe-free disassembly probe array structure according to claim 1, characterized in that the spring (3) is in an elastically compressed state when the needle tail (2) is fully extended from the stepped through hole (1-1); when the bottom of the first tip (2-2) of the needle tail (2) and the bottom of the needle cylinder array structure (1) are positioned at the same horizontal plane, the spring (3) is still in an elastic compression state.
3. The template-based probe-free disassembly probe array structure according to claim 1, wherein the mounting portion (1-2) is of a T-shaped structure and is located between two adjacent stepped through holes (1-1), the second limiting end (4-1) is of an I-shaped structure, the notch of the mounting portion (1-2) and the notch of the second limiting end (4-1) are located on the same horizontal plane, and the limiting plate (6) penetrates through the middle of the notch of the mounting portion (1-2) and the notch of the second limiting end (4-1) to limit the needle (4).
4. The template-based probe-free disassembly probe array structure according to claim 1, wherein the processing method of the syringe array structure (1) comprises the following steps:
step a, processing through holes corresponding to the diameters of the first tips (2-2) on the substrate;
b, processing a blind hole corresponding to the diameter of the first limiting end (2-1) coaxially with the through hole in the step a; the through hole in the step a and the blind hole in the step b jointly form a stepped through hole (1-1);
c, milling redundant substrates on the upper surface of the substrate along two array directions of the stepped through holes (1-1) on a horizontal plane, and reserving a basic part of the lower mounting part (1-2);
and d, milling an inner groove along one array direction of the stepped through holes (1-1) at the basic part of the mounting part (1-2) to form the mounting part (1-2) with the T-shaped structure.
5. The template-based probe-free disassembly probe array structure according to claim 1, wherein the mounting method is as follows:
step a, placing needle tails (2) in all the step through holes (1-1) of the needle cylinder array structure (1) in the upper direction of the first limiting end (2-1) according to the condition that the first tip (2-2) is arranged downwards;
step b, placing a spring (3) in the stepped through hole (1-1) and above the needle tail (2);
step c, placing a needle head (4) in the step through hole (1-1) in the upper direction of the second tip (4-2) according to the position of the second limiting end (4-1) and immediately above the spring (3);
d, synchronously pressing down all the needle heads (4) by using a pressing plate so that the notch of the mounting part (1-2) and the notch of the second limiting end (4-1) are positioned on the same horizontal plane;
step e, a limiting plate (6) penetrates through the gap of the mounting part (1-2) and the gap of the second limiting end (4-1) to limit the needle head (4);
f, fixing the limiting plate (6) on the needle cylinder array structure (1);
step g, removing the pressing plate;
and h, placing a template (5) from the bottom of the syringe array structure (1), and fixedly mounting the template (5) on the bottom of the syringe array structure (1) by using bolts (5-4).
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| CN210487813U (en) * | 2019-06-10 | 2020-05-08 | 合肥本源量子计算科技有限责任公司 | Chip card slot box |
| CN110780096A (en) * | 2019-10-17 | 2020-02-11 | 深圳市精实机电科技有限公司 | Non-detachable channel-changing device for probe assembly in lithium battery formation and grading equipment |
| CN212780931U (en) * | 2020-08-05 | 2021-03-23 | 安徽超元半导体有限公司 | Thimble for chip test |
| CN112305278A (en) * | 2020-10-09 | 2021-02-02 | 渭南高新区木王科技有限公司 | Preparation method of small-spacing test probe module |
| CN218445809U (en) * | 2022-01-11 | 2023-02-03 | 天健创新（北京）监测仪表股份有限公司 | Circuit board detection device |
| CN217846415U (en) * | 2022-06-08 | 2022-11-18 | 儒众智能科技（苏州）有限公司 | Spring probe adopting inclined-plane inclined-edge needle head |
| CN115267277A (en) * | 2022-08-11 | 2022-11-01 | 渭南木王智能科技股份有限公司 | Double-head double-acting test probe capable of preventing needle shaft from rotating |
| CN117214484A (en) * | 2023-11-09 | 2023-12-12 | 上海泽丰半导体科技有限公司 | Chip test socket |
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