CN112858742A

CN112858742A - MEMS probe card test socket, MEMS probe card test method and MEMS probe card spring replacement method

Info

Publication number: CN112858742A
Application number: CN202110241384.6A
Authority: CN
Inventors: 王鸿亮
Original assignee: Harbin Qiaosheng Technology Development Co ltd
Current assignee: Harbin Qiaosheng Technology Development Co ltd
Priority date: 2021-03-04
Filing date: 2021-03-04
Publication date: 2021-05-28

Abstract

The invention relates to a MEMS probe card test socket, a method and a spring replacement method of the socket, belonging to the technical field of MEMS probe card test; the socket includes: the device comprises a base, a bottom plate, a reinforcing rib plate, a transparent window plate, a rotary blocking disc, a protective shell, a rocker, a lifting cylinder, a feeding trough, a top plate, a pressing block, a heating plate, a heat conducting plate, an air inlet pipe, a hose, an air pump, an air inlet cover, a filter screen, a connecting pipe, a disc cover, a sealing cover, a knob, a mounting strip, a cylinder, a connecting pipe fitting, a connecting shaft, a threaded top cover, a dry spiral vertical pipe, an outer pipe, a round rod, a spiral blade, a hollow round shell, a port, a rotating shaft, a worm wheel, a worm, an iron block, a concave hole, a magnetic block, a groove, a guide hole, a spring, a guide rod, a support plate, a temperature sensor, a through hole, a probe card to be detected, a first probe, a second probe, an ash; the test socket has the beneficial effects that the test socket is convenient for replacing and maintaining the internal spring and is dustproof and moistureproof.

Description

MEMS probe card test socket, MEMS probe card test method and MEMS probe card spring replacement method

Technical Field

The invention discloses a MEMS probe card test socket and method and a spring replacement method of the socket, and belongs to the technical field of MEMS probe card test.

Background

Most of the share in the global wafer Probe card market is still occupied by enterprises such as Form Factor, MJC, Techno Probe and the like; in the market distribution, the MEMS probe card accounts for about 60 percent, and the imported alternative space is huge; along with the rapid development of integrated circuits and the increasingly complex processes, chip designs are more diversified, corresponding test schemes are more customized, and requirements on parameters, defect detection and the like in the manufacturing process are higher and higher, so that the requirements on electronic components are continuously refined. The wafer probe card is used as a high-precision electronic element and is mainly applied to the IC before packaging, and the probe on the wafer probe card is contacted with a welding pad or a lug on a chip so as to receive a chip signal and screen out a defective product; the wafer probe card is a high-precision device with great influence in IC manufacturing and is also an important link for ensuring the yield of chips and controlling the cost. In testing a MEMS chip, it is usually necessary to attach the MEMS chip to a PCB board for testing through a test socket and communicate with the PCB board through a conductive wire (e.g., a spring probe).

The existing test socket is used for testing an MEMS chip, generally contacts with a spring probe, and is used for a long time, an internal spring repeatedly stretches and contracts, so that the damage and the loss of elasticity are easy to occur, the spring may need to be replaced, and the replacement may not be convenient; meanwhile, the test socket may lack a dustproof and moistureproof design, dust accumulation is easy to occur, and moisture is too heavy and can cause damage. At present, an MEMS probe card test socket and a test method which are convenient for replacing and maintaining internal springs and can be used for dust prevention and moisture prevention are not available.

Disclosure of Invention

In order to overcome the defects of the prior art, the application discloses a MEMS probe card test socket, a method and a spring replacement method of the socket.

A MEMS probe card test socket comprising: the device comprises a base, a bottom plate, a rotary baffle disc, a protective shell, a self-locking driving mechanism, a lifting cylinder, a top plate, a pressing block, a heating plate, a heat conducting plate, an air inlet pipe, a hose, an air pump, an air inlet cover, a filter screen, a connecting pipe, a disc cover, a sealing cover, a cylinder, a connecting pipe fitting, a connecting shaft, a threaded top cover, a drying spiral vertical pipe, a hollow circular shell, a spring, a guide rod, a support plate, a temperature sensor, a first probe, a second probe, a dust dipping inclined plate, a moisture absorption inclined plate, an impeller, a straight rod, a moisture absorption strip; the bottom of the base is fixedly connected with the bottom plate, the rotary baffle disc is arranged at the top of the base, the protective shell is fixedly connected to one side wall of the base, the self-locking driving mechanism is arranged between the protective shell and one side of the base, the output end of the self-locking driving mechanism is fixedly connected with the bottom of one side of the rotary baffle disc, the two sides of the top of the base are fixedly connected with the lifting cylinder, the output top end of the lifting cylinder is fixedly connected with the bottom of the top plate, the bottom of the top plate is fixedly connected with the pressing block, the bottom of the pressing block is fixedly connected with the heating plate, and the bottom of the heating plate is fixedly connected with the heat-conducting plate; a feeding groove is formed in the middle of the rotary blocking disc, a groove is formed in the center of the top of the base, a guide hole is formed in the base and is communicated with the bottom of the groove, the guide hole is in clearance fit connection with the guide rod, the top end of the guide rod is fixedly connected with the support plate, the support plate is located at the bottom of the feeding groove and is in clearance fit connection with the top of the groove, the spring is arranged in the guide hole and is in contact with the bottom end of the guide rod, a plurality of first probes and a plurality of second probes are fixedly connected in the groove, a plurality of through holes are formed in the surface of the support plate and are located at the top end of the first probes, the temperature sensor is fixedly connected in the middle of the support plate in an embedded mode, and is located at the top end of the second probes, a probe card to be tested is placed in the feeding groove and is placed at the top of the carrier plate; the air inlet pipe is fixedly connected to one side of the base, the air inlet pipe is communicated with one side of the groove and installed, one end of the air inlet pipe is fixedly communicated with one end of the hose, the tail end of the hose is fixedly communicated with the interface at the top of the hollow round shell, the inner cavity of the hollow round shell is communicated with the interface and installed, the bottom of the hollow round shell is communicated with and installed with a plurality of uniformly distributed drying spiral vertical pipes, the bottom of each drying spiral vertical pipe is connected with the threaded top cover, the threaded top cover is in threaded connection with the top of the cylinder, the bottom of the cylinder is fixedly connected with the connecting pipe fitting, the connecting pipe fitting is fixedly connected with the top of the sealing cover, the sealing cover is fixedly connected with the opening at the top of the disc cover, the impeller is rotatably connected to the inner part of the disc cover, and the top end of the impeller is fixedly connected with the bottom of the connecting shaft, the top end of the connecting shaft is fixedly connected with the bottom end of the straight rod, the straight rod is rotatably connected with the center of the bottom of the cylinder, the surface of the straight rod is fixedly connected with a plurality of the moisture absorbing strips at equal intervals along the length direction, the surface of the straight rod is also fixedly connected with a plurality of the ash dipping strips at equal intervals along the length direction, the dust dipping batten and the moisture absorption batten are both positioned in the cylinder, one side of the disc cover is fixedly communicated and installed with one end of the connecting pipe, the tail end of the connecting pipe is fixedly communicated and installed with the air outlet of the air pump, the air inlet of the air pump is fixedly communicated and installed with the air inlet cover, one side fixed gomphosis of air inlet cover is connected with the filter screen, the inside of air inlet cover is along vertical direction equidistant fixedly connected with a plurality of be stained with grey swash plate and a plurality of the moisture absorption swash plate, the moisture absorption swash plate is located be stained with one side of grey swash plate.

Furthermore, a plurality of mounting holes are uniformly formed in the peripheral edge of the bottom plate, and a plurality of reinforcing rib plates are fixedly connected to the connection part of the bottom plate and the base.

Furthermore, the front face of the base is fixedly connected with a transparent window plate in an embedded mode, and the transparent window plate is located on the front face of the groove.

Further, the self-locking driving mechanism comprises a worm wheel, a worm, a rotating shaft and a rocker, the worm and the rotating shaft are connected with the base in a rotating mode, the worm wheel is fixedly connected with the rotating shaft in a sleeved mode, the worm wheel is connected with the worm in a meshed mode, the top end of the rotating shaft is fixedly connected with the rotary blocking disc, the rocker is connected with one side of the protection shell in a rotating mode, and one end of the rocker is fixedly connected with one end of the worm.

Further, the shrinkage pool has been seted up at the top of base, the inside fixed gomphosis of shrinkage pool is connected with the magnetic path, the top of magnetic path is provided with the iron plate, the iron plate is connected with the fixed gomphosis in rotatory fender dish bottom.

Furthermore, the impeller is composed of a short shaft and four rotating plates, the bottom end of the short shaft is rotatably connected with the middle position of the bottom of the disc cover, and the four rotating plates are fixedly connected around the short shaft in an annular array.

Furthermore, the bottom edge of the disc cover is fixedly connected with a plurality of mounting bars, the middle position of the bottom of the disc cover is rotatably connected with a knob, and the knob is fixedly connected with the bottom end of the short shaft.

Further, dry spiral standpipe includes outer tube, round bar and helical blade, helical blade is fixed to be cup jointed on the face of cylinder of round bar, helical blade with the round bar all sets up the inside of outer tube, the inner wall of outer tube with helical blade adhesion connects.

Furthermore, a plurality of threaded holes which are uniformly distributed are formed in the bottom of the hollow round shell and the top of the threaded top cover, and the threaded holes are in threaded connection with the end part of the outer pipe.

Furthermore, the number of the connecting pipe fittings is two, and the bottoms of the two connecting pipe fittings are fixedly connected with the sealing cover through screws.

The MEMS probe card testing method comprises the following steps:

step a, putting a probe card to be tested into a feeding groove and contacting probes, putting the probe card to be tested into the feeding groove, enabling a lifting cylinder to contract to drive a top plate to move downwards, enabling a pressing block to press the probe card to be tested downwards, enabling a heat conducting fin to be contacted with the probe card to be tested to continuously press downwards, enabling the probe card to be tested to press a support plate downwards, pressing a spring downwards through a guide rod to store force and continuously move downwards, enabling a temperature sensor to be contacted with a second probe, enabling a first probe to be contacted with the probe card to be tested, and enabling the first probe and the second probe to be connected;

b, heating and testing the heating sheet, wherein the heating sheet heats, conducts heat through the heat conducting sheet, heats the probe card to be tested, conducts sensing through the temperature sensor until the preset temperature is reached, and tests and operates the sensing probe card to be tested through the contact of the first probe to realize testing;

c, real-time dust prevention during testing, air pump continuously pumps air, after filtering through filter screen, ash dipping and moisture absorption are carried out through ash dipping inclined plate and moisture absorption inclined plate, then air pump is entered, the air pump enters into disc cover through connecting pipe, air flow through connecting pipe is blown to impeller, so that impeller, connecting shaft and straight rod rotate together, meanwhile, air flow in disc cover enters into cylinder through connecting pipe fitting, when rotating straight rod rotates, moisture absorption strip plate and ash dipping strip plate rotate together, further ash dipping and moisture absorption are carried out, then air flow enters into drying spiral vertical pipe, circulation is carried out along inside drying spiral vertical pipe, spiral channel is formed through spiral blade along inside drying spiral vertical pipe, flow path is increased, meanwhile, moisture absorption is carried out on drying agent layer adhered on spiral blade, further drying is carried out, then hose is carried out, air flow enters into groove, drying is provided, Dust-free air;

and d, taking out the probe card to be tested, after testing, ascending the lifting cylinder, loosening the probe card to be tested by the pressing block, ascending the probe card to be tested through the elasticity of the spring, and manually taking out the probe card to be tested.

The spring replacing method of the MEMS probe card test socket comprises the following steps:

step a, rotating the rotary blocking disc, namely rotating the worm by shaking the rocker, driving the rotary blocking disc to rotate by the rotating shaft through the meshing transmission of the worm and the worm wheel until the blocking disc rotates forwards by an angle, and canceling the covering of the top of the support plate;

step b, taking out and replacing the spring, manually taking down the carrier plate and the guide rod integrated with the carrier plate, then picking out the spring by means of an external needle rod, and putting in a new spring;

and c, covering the carrier plate again, putting the carrier plate again, inserting the guide rod into the guide hole, reversely rotating the rocker to enable the blocking disc to reversely rotate for a certain degree, and covering the carrier plate again to finish the installation.

The application has the advantages that:

the whole MEMS probe card test socket is used for detecting the MEMS probe card, compared with the prior art, the MEMS probe card test socket is convenient for replacing a spring and cleaning the inside of a groove, the top of the groove is provided with a rotary baffle disc which can provide a blocking limit for a carrier plate and ensure the stability of the structure, meanwhile, the rotary baffle disc is connected through a self-locking driving mechanism, and can rotate at the top of a base, so that the spacing at the top of the carrier plate can be relieved, the cleaning treatment of the inside of the groove and the taking-off of the carrier plate are carried out, the replacement of the spring is further realized, the operation is realized through rotating a rocker, the operation is simple, the transmission is carried out through the self-locking driving mechanism, the rotation of the rotary baffle disc is realized, the self-locking function is realized, the use stability is ensured, meanwhile, the rotary baffle disc and an iron block are additionally arranged on the, the limiting effect is further ensured.

The whole MEMS probe card test socket can also provide ventilation for the inside of the groove to form positive pressure, and in the using process, positive pressure airflow is introduced to avoid the entering of outside air, so that the entering of dust is avoided, and the dustproof effect is achieved, wherein a filter screen is additionally arranged on the air inlet cover to filter air, the cleanness and dustless of air are ensured by matching the dust-absorbing effect of the inner dust-absorbing inclined plate, the MEMS probe card test socket further has a moisture-absorbing inclined plate which can absorb moisture and reduce the moisture of the entering air, the MEMS probe card test socket further can enter the disc cover through the connecting pipe, the impeller can be driven to rotate through the action of the airflow, so that the moisture-absorbing strip plate and the dust-absorbing strip plate rotate in the cylinder, the air enters the cylinder through the connecting pipe, the moisture-absorbing strip plate and the dust-absorbing strip plate can further absorb moisture and absorb dust, and the drying and dustless of the air are further ensured, the rotation of which is driven by the circulation of the air flow without the aid of other external drive means.

When air passes through the drying spiral vertical pipe, the air passes through the spiral channel formed by the drying spiral vertical pipe, so that the circulation path of the air is improved, moisture can be absorbed through the drying agent layers on the round rod and the spiral blade, and the moisture absorption effect is good.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:

FIG. 1 is a schematic diagram of a MEMS probe card test socket according to one embodiment of the present application;

FIG. 2 is a schematic view of the interior of the inlet cowl in the embodiment of FIG. 1;

FIG. 3 is a schematic view of the structure of the interior of the cylinder in the embodiment of FIG. 1;

FIG. 4 is a schematic structural view of the impeller in the embodiment of FIG. 1;

FIG. 5 is a schematic diagram of the configuration of a desiccant spiral standpipe of the embodiment of FIG. 1;

FIG. 6 is a schematic view of the top of the threaded cap of the embodiment of FIG. 1;

FIG. 7 is a schematic cross-sectional view of the base and the rotating shutter disk of the embodiment of FIG. 1;

FIG. 8 is a schematic diagram of the arrangement of the first and second probes in the embodiment of FIG. 1;

FIG. 9 is a schematic view of the structure of the impeller, the nozzle and the disk cover in the embodiment of FIG. 1;

fig. 10 is a schematic view of the worm wheel and worm in the embodiment of fig. 1.

The meaning of the reference symbols in the figures:

a base 101, a bottom plate 102, a reinforcing rib plate 103, a transparent window plate 104, a rotary baffle disc 105, a protective casing 106, a rocker 107, a lifting cylinder 108, a feeding trough 109, a top plate 110, a pressing block 111, a heating sheet 112, a heat conducting sheet 113, an air inlet pipe 114, a hose 115, an air pump 116, an air inlet cover 117, a filter screen 118, a connecting pipe 119, a disc cover 120, a sealing cover 121, a knob 122, a mounting bar 123, a cylinder 124, a connecting pipe 125, a connecting shaft 126, a threaded top cover 127, a dry spiral vertical pipe 128, an outer pipe 128-1, a round rod 128-2, a spiral blade 128-3, a hollow round shell 129, an interface 130, a rotating shaft 131, a worm wheel 132, a worm 133, an iron block 134, a supporting plate concave hole 135, a 136, a groove 137, a guide hole 138, a spring 139, a guide rod 140, a guide rod 141, a temperature sensor 142, a through hole 143, a probe card 144, the device comprises a moisture absorption inclined plate 148, an impeller 149, a short shaft 149-1, a rotating plate 149-2, a straight rod 150, a moisture absorption strip plate 151, an ash dipping strip plate 152 and a threaded hole 153.

Detailed Description

In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.

Furthermore, the terms "mounted," "disposed," "provided," "connected," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.

Detailed description of the invention

The following are embodiments of the MEMS probe card test socket of the present invention.

Referring to fig. 1 to 10, a MEMS probe card test socket includes: the device comprises a base 101, a bottom plate 102, a rotary baffle disc 105, a protective shell 106, a self-locking driving mechanism, a lifting cylinder 108, a top plate 110, a pressing block 111, a heating sheet 112, a heat conducting sheet 113, an air inlet pipe 114, a hose 115, an air pump 116, an air inlet cover 117, a filter screen 118, a connecting pipe 119, a disc cover 120, a sealing cover 121, a cylinder 124, a connecting pipe 125, a connecting shaft 126, a threaded top cover 127, a drying spiral vertical pipe 128, a hollow round shell 129, a spring 139, a guide rod 140, a support plate 141, a temperature sensor 142, a first probe 145, a second probe 146, a dust dipping inclined plate 147, a moisture dipping inclined plate 148, an impeller 149, a straight rod 150, a moisture dipping strip 151 and a dust.

Referring to fig. 1 to 7, as a specific solution, the bottom of the base 101 is fixedly connected to the bottom plate 102, the top of the base 101 is provided with a rotation blocking disc 105, the protection housing 106 is fixedly connected to a side wall of the base 101, the self-locking driving mechanism is arranged between the protection housing 106 and one side of the base 101, an output end of the self-locking driving mechanism is fixedly connected to the bottom of one side of the rotation blocking disc 105, the rotation blocking disc 105 is connected to the self-locking driving mechanism, which can be driven by the self-locking driving mechanism and can rotate at the top of the base 101, so that the limit or the cancellation of the limit of the carrier plate 141 can be performed, the carrier plate 141 and the guide rod 140 can be removed, so that the spring 139 can be removed, the replacement is facilitated, the self-locking function is provided, when the rotation blocking limit of the carrier plate 141 is performed, the non-artificial movement does not occur in.

Referring to fig. 1, as a specific scheme, both sides of the top of a base 101 are fixedly connected with lifting cylinders 108, the output top ends of the lifting cylinders 108 are fixedly connected with the bottom of a top plate 110, the bottom of the top plate 110 is fixedly connected with a pressing block 111, the bottom of the pressing block 111 is fixedly connected with a heating plate 112, the bottom of the heating plate 112 is fixedly connected with a heat conduction plate 113, heating is performed through the heating plate 112, heat conduction is performed through the heat conduction plate 113, when a probe card 144 to be tested is pressed, the probe card 144 to be tested is contacted with the probe card 144 to be tested, heating can be performed on the probe card 144 to be tested, and when the probe card is pressed, springs 139 can be further pressed, so that the probe card 144 to be tested and a temperature sensor.

Referring to fig. 1 and 7, as a specific scheme, a feeding groove 109 is formed in the middle of the rotary catch tray 105, the feeding groove 109 is used for placing a probe card 144 to be tested, a carrier plate 141 is used for bearing the probe card 144 to be tested, the feeding groove 109 is adapted to the probe card 144 to be tested and is used for embedding, and can descend when being pressed and contact with a first probe 145 and a second probe 146, a groove 137 is formed in the top center of the base 101, a guide hole 138 is formed in the base 101, the guide hole 138 is communicated with the bottom of the groove 137, the guide hole 138 is in clearance fit connection with a guide rod 140, the top end of the guide rod 140 is fixedly connected with the carrier plate 141, the carrier plate 141 is located at the bottom of the feeding groove 109, the carrier plate 141 is in clearance fit connection with the top of the groove 137, a spring 139 is arranged in the guide hole 138, the spring 139 is in contact with the bottom end of the guide rod 140, the groove 137 is fixedly connected, the surface of the carrier plate 141 is provided with a plurality of through holes 143, the through holes 143 are located at the top ends of the first probes 145, the middle part of the carrier plate 141 is fixedly connected with a temperature sensor 142 in an embedded manner, the temperature sensor 142 is located at the top end of the second probes 146, a probe card 144 to be tested is placed in the feeding trough 109, the probe card 144 to be tested is placed at the top part of the carrier plate 141, the through holes 143 are used for the first probes 145 to pass through and to contact with the probe card 144 to be tested, so as to realize detection, and the first probes 145 and the second probes 146 are connected with external detection equipment.

Referring to fig. 1 and 4, as a specific scheme, an air inlet pipe 114 is fixedly connected to one side of a base 101, the air inlet pipe 114 is installed in communication with one side of a groove 137, one end of the air inlet pipe 114 is installed in fixed communication with one end of a hose 115, the end of the hose 115 is installed in fixed communication with a port 130 at the top of a hollow round shell 129, an internal cavity of the hollow round shell 129 is installed in communication with the port 130, the bottom of the hollow round shell 129 is installed in communication with a plurality of uniformly distributed drying spiral standpipes 128, the bottom ends of the drying spiral standpipes 128 are connected with a threaded top cap 127, the threaded top cap 127 is in threaded connection with the top of a cylinder 124, a connecting pipe 125 is fixedly connected to the bottom end of the cylinder 124, the connecting pipe 125 is fixedly connected to the top of a sealing cap 121, the sealing cap 121 is fixedly connected to an opening at the top of a round disk cover 120, an impeller 149, the top end of the connecting shaft 126 is fixedly connected with the bottom end of a straight rod 150, the straight rod 150 is rotatably connected with the center of the bottom of a cylinder 124, the surface of the straight rod 150 is fixedly connected with a plurality of moisture absorbing strips 151 at equal intervals along the length direction, the surface of the straight rod 150 is also fixedly connected with a plurality of dust dipping strips 152 at equal intervals along the length direction, the dust dipping strips 152 and the moisture absorbing strips 151 are both positioned inside the cylinder 124, one side of a disc cover 120 is fixedly communicated and installed with one end of a connecting pipe 119, the tail end of the connecting pipe 119 is fixedly communicated and installed with an air outlet of an air pump 116, air flow enters the disc cover 120 through the connecting pipe 119, an impeller 149 can be driven to rotate under the action of the air flow, so that the moisture absorbing strips 151 and the dust dipping strips 152 rotate in the cylinder 124, air enters the cylinder 124 through a connecting pipe fitting 125, and further air moisture absorption and dust dipping are carried out through the moisture absorbing, further ensured the drying and dustless of air, the air inlet of air pump 116 and the fixed intercommunication installation of air inlet cover 117, one side fixed gomphosis of air inlet cover 117 is connected with filter screen 118, the inside of air inlet cover 117 is along the equidistant fixedly connected with ash-stained sloping plate 147 of a plurality of and a plurality of moisture absorption sloping plate 148 of vertical direction, filter screen 118 has been add on the air inlet cover 117, carry out the filtration of air, the ash-stained effect of the inside ash-stained sloping plate 147 of cooperation, the cleanness and dustless of air has been ensured, moisture absorption sloping plate 148 is located one side of ash-stained sloping plate 147, further have moisture absorption sloping plate 148, can absorb moisture, can reduce the moisture that gets into the air, one deck drying layer bonds on moisture absorption sloping plate 148 and the moisture absorption slat 151, constitute by the drier, the viscose has been scribbled on ash-stained sloping plate 147 and.

Referring to fig. 1, according to the scheme, a plurality of mounting holes are uniformly formed in the peripheral edge of the bottom plate 102, a plurality of reinforcing rib plates 103 are fixedly connected to the joint of the bottom plate 102 and the base 101, the mounting holes provide mounting holes for fixed mounting, and the reinforcing rib plates 103 improve the connection strength between the bottom plate 102 and the base 101.

Referring to fig. 1, in this arrangement, a transparent window plate 104 is fixedly fitted and connected to the front surface of the base 101, the transparent window plate 104 is located on the front surface of the recess 137, and the transparent window plate 104 is used for observing the inside of the recess 137.

Referring to fig. 7 and 10, as a specific scheme, the self-locking driving mechanism includes a worm wheel 132, a worm 133, a rotating shaft 131 and a rocker 107, the worm 133 and the rotating shaft 131 are rotatably connected with the base 101, the worm wheel 132 is fixedly sleeved with the rotating shaft 131, the worm wheel 132 is engaged with the worm 133, the top end of the rotating shaft 131 is fixedly connected with the rotary catch tray 105, the rocker 107 is rotatably connected with one side of the protective housing 106, one end of the rocker 107 is fixedly connected with one end of the worm 133, transmission is realized through engagement between the worm wheel 132 and the worm 133, and self-locking is realized through the worm wheel 132 and the worm 133 for limiting.

Referring to fig. 7, as a specific scheme, a concave hole 135 is formed in the top of the base 101, a magnetic block 136 is connected to the concave hole 135 in a fixed embedded mode, an iron block 134 is arranged on the top of the magnetic block 136, the iron block 134 is connected to the bottom of the rotary blocking disc 105 in a fixed embedded mode, magnetic adsorption is performed between the magnetic block 136 and the iron block 134, limiting is achieved, and limiting effect is improved.

Referring to fig. 4, as a specific solution, the impeller 149 is composed of a short shaft 149-1 and four rotating plates 149-2, the bottom end of the short shaft 149-1 is rotatably connected with the middle position of the bottom of the disc cover 120, the number of the rotating plates 149-2 is four, the four rotating plates 149-2 are fixedly connected around the short shaft 149-1 in an annular array for rotation driving, and when being blown by the airflow, the rotating plates 149-2 are subjected to the airflow, so that the short shaft 149-1 can rotate.

Referring to fig. 1, as a specific scheme, a plurality of mounting bars 123 are fixedly connected to the bottom edge of the disc cover 120, a knob 122 is rotatably connected to the middle position of the bottom of the disc cover 120, the knob 122 is fixedly connected to the bottom end of the short shaft 149-1, the knob 122 is used for manual rotation of the short shaft 149-1, manual adjustment is performed when the disc cover is not in use, and the moisture absorbing bar 151 and the dust adhering bar 152 are conveniently treated when maintenance is performed.

Referring to fig. 5, as a specific solution, the dry spiral vertical pipe 128 includes an outer pipe 128-1, a round bar 128-2 and a spiral blade 128-3, the spiral blade 128-3 is fixedly sleeved on the cylindrical surface of the round bar 128-2, the spiral blade 128-3 and the round bar 128-2 are both disposed inside the outer pipe 128-1, the inner wall of the outer pipe 128-1 is adhesively connected with the spiral blade 128-3, a layer of desiccant is adhered on the round bar 128-2 and the spiral blade 128-3, the inner portion of the outer tube 128-1 is formed with a spiral passage by the round bar 128-2 and the spiral vane 128-3, and when the air current circulates, contact with the round bar 128-2 and the spiral blade 128-3 is adhered with a layer of drying agent, thereby improving the circulation path of the air flow during circulation, facilitating the contact and absorbing moisture.

Referring to fig. 1 and 6, as a specific scheme, a plurality of threaded holes 153 are uniformly distributed on the bottom of the hollow round shell 129 and the top of the threaded top cap 127, the threaded holes 153 are in threaded connection with the end of the outer tube 128-1, and the threaded holes 153 are used for threaded connection with the end of the drying spiral vertical tube 128, so that installation is provided, disassembly and assembly operations are facilitated, and the use is simple.

Referring to fig. 1, in this case, the number of the connecting pipe members 125 is two, the bottoms of the two connecting pipe members 125 are fixedly connected to the cover 121 by screws, and the connecting pipe members 125 are used for connecting and installing the disk cover 120 and the cylinder 124.

According to the technical scheme, the whole MEMS probe card test socket 100 is used for detecting the MEMS probe card, compared with the prior art, the MEMS probe card test socket is convenient for replacing the spring 139 and cleaning the inside of the groove 137, the rotary catch tray 105 is arranged at the top of the groove 137 and can provide blocking limit for the carrier plate 141, the structural stability is guaranteed, meanwhile, the rotary catch tray 105 is connected through the self-locking driving mechanism, the rotary catch tray 105 can rotate at the top of the base 101, so that the limit at the top of the carrier plate 141 can be removed, the cleaning treatment in the groove 137 and the removal of the carrier plate 141 are carried out, the replacement of the spring 139 is further realized, the operation is realized through the rotating rocker 107, the operation is simple, the transmission is carried out through the self-locking driving mechanism, the rotation of the rotary catch tray 105 is realized, the self-locking function is also carried out, the use stability is guaranteed, meanwhile, the magnetic blocks 136 and the iron blocks 134 are, through magnetic adsorption, realize spacing each other, further ensured spacing effect.

The whole MEMS probe card test socket 100 can also provide ventilation for the inside of the groove 137 to form positive pressure, and in the using process, positive pressure airflow is introduced to avoid the entering of outside air, so that dust is prevented from entering, and a dustproof effect is achieved, wherein the filter screen 118 is additionally arranged on the air inlet cover 117 to filter air, the cleanness and dustless of air is ensured by matching with the dust-staining effect of the dust-staining inclined plate 147 in the air inlet cover, the moisture-absorbing inclined plate 148 is further arranged to absorb moisture, so that the moisture of the entering air can be reduced, the air can further enter the disc cover 120 through the connecting pipe 119, the impeller 149 can be driven to rotate through the action of the airflow, so that the moisture-absorbing strip 151 and the dust-staining strip 152 rotate in the cylinder 124, the air enters the cylinder 124 through the connecting pipe fitting 125, the moisture-absorbing strip 151 and the dust-staining strip 152 can further absorb and stain dust in the air, the drying and dustless of air have further been ensured, and its rotation is driven through the circulation of air current, need not to rely on other external drive device.

When air passes through the drying spiral vertical pipe 128, the air passes through the spiral channel formed by the drying spiral vertical pipe 128, so that the air flow path is improved, moisture absorption can be performed through the round rod 128-2 and the desiccant layer on the spiral blade 128-3, and the moisture absorption effect is good.

Detailed description of the invention

The following is a specific embodiment of the MEMS probe card testing method of the present invention.

The MEMS probe card testing method according to the present embodiment is implemented on the MEMS probe card testing socket according to the first embodiment, and includes the following steps:

step a, putting a probe card 144 to be tested and contacting probes, putting the probe card 144 to be tested into a feeding groove 109, contracting a lifting cylinder 108 to drive a top plate 110 to move downwards, pressing a pressing block 111 to press the probe card 144 to be tested, simultaneously contacting a heat conducting sheet 113 with the probe card 144 to be tested and continuously pressing downwards, pressing a carrier plate 141 down by the probe card 144 to be tested, pressing a spring 139 down by a guide rod 140 to accumulate force and continuously move downwards, contacting a temperature sensor 142 with second probes 146, contacting the first probes 145 with the probe card 144 to be tested, wherein the first probes 145 and the second probes 146 are connected with external test equipment;

step b, heating and testing the heating sheet 112, wherein the heating sheet 112 heats, conducts heat through the heat conduction sheet 113 to heat the probe card 144 to be tested, senses through the temperature sensor 142 until reaching a preset temperature, tests and operates the probe card 144 to be tested through the contact of the first probe 145 to realize testing;

step c, real-time dust prevention during testing, wherein the air pump 116 continuously pumps air, after the air is filtered by the filter screen 118, the dust is stained and moisture absorbed by the dust staining inclined plate 147 and the moisture absorption inclined plate 148, then the air enters the air pump 116, enters the disc cover 120 through the connecting pipe 119, and is blown to the impeller 149 through the air flow of the connecting pipe 119, so that the impeller 149, the connecting shaft 126 and the straight rod 150 rotate together, meanwhile, the air flow in the disc cover 120 enters the cylinder 124 through the connecting pipe 125, when the rotating straight rod 150 rotates, the moisture absorption strip 151 and the dust staining strip 152 rotate together, further dust staining and moisture absorption are carried out, then the air flow enters the drying spiral vertical pipe 128 and circulates along the inside of the drying spiral vertical pipe 128, a spiral channel is formed through the spiral blades 128-3 along the inside of the drying spiral vertical pipe 128, the flow path is increased, and meanwhile, a desiccant layer adhered on the spiral blades 128-3, further drying is carried out, and then the hose 115 is connected, and air flows into the groove 137 to provide dry and dust-free air;

and d, taking out the probe card 144 to be tested, after the test, moving the lifting air cylinder 108 upwards, loosening the probe card 144 to be tested by the pressing block 111, moving the probe card 144 to be tested upwards through the elastic force of the spring 139, and manually taking out the probe card 144 to be tested.

Detailed description of the invention

The following is a specific embodiment of the spring replacement method of the MEMS probe card test socket of the present invention.

The method for replacing the spring of the test socket of the MEMS probe card in this embodiment is implemented on the test socket of the MEMS probe card in the first embodiment, and the method for replacing the spring of the test socket of the MEMS probe card includes the following steps:

step a, rotating the rotary catch tray 105, namely rotating the worm 133 by shaking the rocker 107, and driving the rotary catch tray 105 to rotate by the rotating shaft 131 through the meshing transmission of the worm 133 and the worm wheel 132 until the catch tray 105 rotates 180 degrees in the forward direction, so as to cancel the covering on the top of the carrier plate 141;

step b, taking out and replacing the spring 139, manually taking down the carrier plate 141 and the guide rod 140 integrated with the carrier plate 141, then picking out the spring 139 by means of an external needle rod, and putting in a new spring 139;

and c, covering the carrier plate 141 again, putting the carrier plate 141 again, inserting the guide rod 140 into the guide hole 138, reversely rotating the rocker 107 to enable the baffle disc 105 to reversely rotate for 180 degrees, covering the carrier plate 141 again and finishing the installation.

The above description is only a specific embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

MEMS probe card test socket, characterized by:

the method comprises the following steps: a base (101), a bottom plate (102), a rotary baffle disc (105), a protective shell (106), a self-locking driving mechanism, a lifting cylinder (108), a top plate (110), a pressing block (111), a heating sheet (112), a heat-conducting sheet (113), an air inlet pipe (114), a hose (115), an air pump (116), an air inlet cover (117), a filter screen (118), a connecting pipe (119), a disc cover (120) and a sealing cover (121), the device comprises a cylinder (124), a connecting pipe fitting (125), a connecting shaft (126), a threaded top cover (127), a dry spiral vertical pipe (128), a hollow round shell (129), a spring (139), a guide rod (140), a carrier plate (141), a temperature sensor (142), a first probe (145), a second probe (146), a dust-staining inclined plate (147), a moisture-absorbing inclined plate (148), an impeller (149), a straight rod (150), a moisture-absorbing strip plate (151) and a dust-staining strip plate (152);

the bottom of the base (101) is fixedly connected with the bottom plate (102), a transparent window plate (104) is fixedly connected to the front of the base (101) in a jogged mode, the transparent window plate (104) is located on the front of the groove (137), and the top of the base (101) is provided with the rotary catch disc (105); a plurality of mounting holes are uniformly formed in the peripheral edge of the bottom plate (102), and a plurality of reinforcing rib plates (103) are fixedly connected to the joint of the bottom plate (102) and the base (101); the protective shell (106) is fixedly connected to one side wall of the base (101), the self-locking driving mechanism is arranged between the protective shell (106) and one side of the base (101), the output end of the self-locking driving mechanism is fixedly connected with the bottom of one side of the rotary baffle disc (105), the two sides of the top of the base (101) are fixedly connected with the lifting cylinder (108), the output top end of the lifting cylinder (108) is fixedly connected with the bottom of the top plate (110), the bottom of the top plate (110) is fixedly connected with a pressing block (111), the bottom of the pressing block (111) is fixedly connected with the heating plate (112), and the bottom of the heating plate (112) is fixedly connected with the heat-conducting plate (113);

a feeding groove (109) is formed in the middle of the rotary baffle disc (105), a groove (137) is formed in the center of the top of the base (101), a guide hole (138) is formed in the base (101), the guide hole (138) is communicated and mounted with the bottom of the groove (137), the guide hole (138) is in clearance fit connection with the guide rod (140), the top end of the guide rod (140) is fixedly connected with the support plate (141), the support plate (141) is located at the bottom of the feeding groove (109), the support plate (141) is in clearance fit connection with the top of the groove (137), the spring (139) is arranged in the guide hole (138), the spring (139) is in contact with the bottom end of the guide rod (140), the groove (137) is fixedly connected with a plurality of first probes (145) and a plurality of second probes (146), the surface of the carrier plate (141) is provided with a plurality of through holes (143), the through holes (143) are positioned at the top end of the first probe (145), the middle part of the carrier plate (141) is fixedly connected with the temperature sensor (142) in a embedding manner, the temperature sensor (142) is positioned at the top end of the second probe (146), a probe card (144) to be tested is placed in the feeding groove (109), and the probe card (144) to be tested is placed at the top part of the carrier plate (141);

the air inlet pipe (114) is fixedly connected to one side of the base (101), the air inlet pipe (114) is communicated with one side of the groove (137) for installation, one end of the air inlet pipe (114) is fixedly communicated with one end of the hose (115) for installation, the tail end of the hose (115) is fixedly communicated with the interface (130) at the top of the hollow round shell (129), the inner cavity of the hollow round shell (129) is communicated with the interface (130) for installation, the bottom of the hollow round shell (129) is communicated with the drying spiral vertical pipes (128) which are uniformly distributed, the bottom ends of the drying spiral vertical pipes (128) are connected with the threaded top cover (127), the threaded top cover (127) is in threaded connection with the top of the cylinder (124), the bottom end of the cylinder (124) is fixedly connected with the connecting pipe fitting (125), and the connecting pipe fitting (125) is fixedly connected with the top of the sealing cover (121), the utility model discloses a dust collector, including closing cap (121) fixed connection the open-top department of disc cover (120), the inside of disc cover (120) is rotated and is connected with impeller (149), the top of impeller (149) with the bottom fixed connection of connecting axle (126), connecting axle (126) top with straight-bar (150) bottom fixed connection, straight-bar (150) with the bottom center department of drum (124) rotates and is connected, straight-bar (150) surface is along length direction equidistant fixedly connected with a plurality of moisture absorption slat (151), straight-bar (150) surface still along length direction equidistant fixedly connected with a plurality of be stained with grey slat (152), be stained with grey slat (152) with moisture absorption slat (151) all are located the inside of drum (124), one side of disc cover (120) with the one end fixed connection installation of takeover (119), take over the end of (119) with the fixed intercommunication installation of the gas outlet of air pump (116), the air inlet of air pump (116) with the fixed intercommunication installation of cover (117) admits air, the fixed gomphosis in one side of admitting air cover (117) is connected with filter screen (118), the equidistant fixedly connected with a plurality of vertical direction is followed to the inside of admitting air cover (117) be stained with grey swash plate (147) and a plurality of moisture absorption swash plate (148), moisture absorption swash plate (148) are located be stained with one side of grey swash plate (147).
2. The MEMS probe card test socket of claim 1, wherein: the self-locking driving mechanism comprises a worm wheel (132), a worm (133), a rotating shaft (131) and a rocker (107), the worm (133) and the rotating shaft (131) are rotatably connected with the base (101), the worm wheel (132) is fixedly sleeved with the rotating shaft (131), the worm wheel (132) is meshed with the worm (133) to be connected, the top end of the rotating shaft (131) is fixedly connected with the rotary baffle disc (105), the rocker (107) is rotatably connected with one side of the protective shell (106), and one end of the rocker (107) is fixedly connected with one end of the worm (133).
3. The MEMS probe card test socket of claim 1, wherein: concave hole (135) have been seted up at the top of base (101), the inside fixed gomphosis of concave hole (135) is connected with magnetic block (136), the top of magnetic block (136) is provided with iron plate (134), iron plate (134) are connected with the fixed gomphosis in rotatory fender dish (105) bottom.
4. The MEMS probe card test socket of claim 1, wherein: the impeller (149) is composed of a short shaft (149-1) and four rotating plates (149-2), the bottom end of the short shaft (149-1) is rotatably connected with the middle position of the bottom of the disc cover (120), the number of the rotating plates (149-2) is four, and the four rotating plates (149-2) are fixedly connected to the periphery of the short shaft (149-1) in an annular array.
5. The MEMS probe card test socket of claim 1, wherein: the bottom edge of the disc cover (120) is fixedly connected with a plurality of mounting bars (123), the middle position of the bottom of the disc cover (120) is rotatably connected with a knob (122), and the knob (122) is fixedly connected with the bottom end of a short shaft (149-1).
6. The MEMS probe card test socket of claim 1, wherein: the drying spiral vertical pipe (128) comprises an outer pipe (128-1), a round rod (128-2) and a spiral blade (128-3), the spiral blade (128-3) is fixedly sleeved on the cylindrical surface of the round rod (128-2), the spiral blade (128-3) and the round rod (128-2) are both arranged inside the outer pipe (128-1), and the inner wall of the outer pipe (128-1) is connected with the spiral blade (128-3) in an adhesion mode.
7. The MEMS probe card test socket of claim 1, wherein: the bottom of the hollow round shell (129) and the top of the threaded top cover (127) are both provided with a plurality of threaded holes (153) which are uniformly distributed, and the threaded holes (153) are in threaded connection with the end part of the outer tube (128-1).
8. The MEMS probe card test socket of claim 1, wherein: the number of the connecting pipe fittings (125) is two, and the bottoms of the two connecting pipe fittings (125) are fixedly connected with the sealing cover (121) through screws.
The MEMS probe card testing method is characterized in that: the method comprises the following steps:

step a, putting a probe card (144) to be tested into contact with probes, putting the probe card (144) to be tested into a feeding groove (109), enabling a lifting cylinder (108) to contract to drive a top plate (110) to move downwards, enabling a pressing block (111) to press the probe card (144) to be tested downwards, enabling a heat conducting fin (113) to be in contact with the probe card (144) to be tested to continuously press downwards, enabling the probe card (144) to be tested to press a carrier plate (141) downwards, pressing a spring (139) downwards through a guide rod (140) to store force, continuously moving downwards, enabling a temperature sensor (142) to be in contact with a second probe (146), enabling a first probe (145) to be in contact with the probe card (144) to be tested, and enabling the first probe (145) and the second probe (146);

b, heating and testing the heating sheet (112), wherein the heating sheet (112) heats, conducts heat through the heat conduction sheet (113), heats the probe card (144) to be tested, conducts sensing through the temperature sensor (142) until the preset temperature is reached, and conducts testing and operates the sensing probe card (144) to be tested through the contact of the first probe (145) to realize testing;

step c, real-time dust prevention during testing, air pump (116) continuously pumps air, after filtering through filter screen (118), ash dipping and moisture absorption are carried out through ash dipping inclined plate (147) and moisture absorption inclined plate (148), then air pump (116) is entered, air flow through connecting pipe (119) enters into disc cover (120), air flow through connecting pipe (119) is blown to impeller (149), so that impeller (149), connecting shaft (126) and straight rod (150) rotate together, meanwhile air flow in disc cover (120) enters into cylinder (124) through connecting pipe fitting (125), when rotating straight rod (150) rotates, moisture absorption strip plate (151) and ash dipping strip (152) rotate together, ash dipping and moisture absorption are further carried out, then air flow enters into drying spiral vertical pipe (128), flow along the inside of drying spiral vertical pipe (128), and form spiral channel through spiral blade (128-3) along the inside of drying spiral vertical pipe (128), increasing the flow path while the desiccant layer adhered to the spiral blade (128-3) absorbs moisture and further dries, and then the hose (115) allows the air flow to enter the groove (137) to provide dry, dust-free air;

and d, taking out the probe card (144) to be tested, after testing, moving the lifting air cylinder (108) upwards, loosening the probe card (144) to be tested by the pressing block (111), moving the probe card (144) to be tested upwards through the elastic force of the spring (139), and manually taking out the probe card (144) to be tested.
A method for replacing springs of a MEMS probe card test socket, comprising the steps of:

step a, rotating the blocking disc 105, rotating the worm (133) by shaking the rocker (107), and driving the rotating blocking disc (105) to rotate by the rotating shaft (131) through the meshing transmission of the worm (133) and the worm wheel (132) until the blocking disc (105) rotates 180 degrees in the forward direction, so as to cancel the covering of the top of the carrier plate (141);

step b, taking out and replacing the spring (139), manually taking down the carrier plate (141) and the guide rod (140) integrated with the carrier plate (141), then picking out the spring (139) by means of an external needle rod, and putting in a new spring (139);

and c, the carrier plate (141) is covered again, the carrier plate (141) is placed again, the guide rod (140) is inserted into the guide hole (138), the rocker (107) is rotated reversely, the blocking disc (105) rotates reversely by 180 degrees, the carrier plate (141) is covered again, and the installation is finished.