CN117420741A - Exposure positioning structure and exposure machine - Google Patents
Exposure positioning structure and exposure machine Download PDFInfo
- Publication number
- CN117420741A CN117420741A CN202311743448.8A CN202311743448A CN117420741A CN 117420741 A CN117420741 A CN 117420741A CN 202311743448 A CN202311743448 A CN 202311743448A CN 117420741 A CN117420741 A CN 117420741A
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- Prior art keywords
- plate
- exposure
- assembly
- base
- driving
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- 238000000034 method Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/068—Apparatus for etching printed circuits
Abstract
The invention is applicable to the relevant technical field of exposure machines, and provides an exposure positioning structure and an exposure machine, wherein the exposure positioning structure comprises: the base and the top plate are arranged on the base through the lifting assembly, and the top plate is also provided with an exposure unit; the workbench is fixedly arranged on the base through the upright post, and a positioning groove is further formed in the workbench; the baffle is fixedly arranged on the workbench; the invention relates to a positioning mechanism arranged on a base, which comprises a positioning assembly and a fixing assembly for pressing a circuit board to be processed, wherein the positioning assembly comprises a first driving plate, a first supporting plate, a pushing plate and an elastic telescopic rod.
Description
Technical Field
The invention relates to the technical field of exposure machines, in particular to an exposure positioning structure and an exposure machine.
Background
The exposure machine is a semiconductor processing device with integrated electronic optics, mechanics, vacuum, electric and computer technology. It is a machine device that emits ultraviolet light of UVA wavelength by turning on the light to transfer image information on a film or other transparent body to a surface coated with a photosensitive substance. Under the control of a computer, an organic polymer (commonly called an electronic resist or a photoresist) is exposed by using a focused electron beam, and the physical and chemical properties of the photoresist irradiated by the electron beam are changed, so that a well-dissolved or non-well-dissolved area is formed in a certain solvent, and a fine pattern is formed on the resist. The exposure positioning structure is an important component part in the exposure machine and is mainly used for fixing and positioning materials.
The existing exposure positioning structure is generally simpler, is inconvenient to fix and position circuit boards with different sizes when the circuit boards are processed, and has certain limitations. Therefore, in view of the above situation, there is an urgent need to provide an exposure positioning structure and an exposure machine, so as to overcome the shortcomings in the current practical application.
Disclosure of Invention
The invention aims to provide an exposure positioning structure and an exposure machine, which aim to solve the problems in the background technology.
The invention is realized by an exposure positioning structure, comprising:
the device comprises a base and a top plate, wherein the top plate is arranged on the base through a lifting assembly, and an exposure unit is further arranged on the top plate;
the workbench is fixedly arranged on the base through the upright post, and a positioning groove is further formed in the workbench;
the baffle is fixedly arranged on the workbench;
the positioning mechanism comprises a positioning assembly and a fixing assembly used for pressing a circuit board to be processed, the positioning assembly comprises a first driving plate, a first supporting plate, a pushing plate and an elastic telescopic rod, a plurality of groups of guide grooves are formed in the workbench, a push-pull rod is fixedly installed on the pushing plate and is slidably installed in the guide grooves through a moving block, the first supporting plate is fixedly installed on the base, the first driving plate is rotatably installed on the first supporting plate through a first rotating shaft, the first driving plate is of an L-shaped structure, one end of the first driving plate is connected with the moving block through an expanding assembly, the other end of the first driving plate is rotatably connected with the elastic telescopic rod, one end of the elastic telescopic rod, which is far away from the first driving plate, is rotatably connected with the bottom of the workbench, and the positioning assembly is provided with three groups;
and the driving assembly is used for pressing one end of the first driving plate, which is close to the elastic telescopic rod, and is arranged on the base and is also connected with the fixing assembly.
As a further scheme of the invention: the fixed component and the baffle are positioned on the same side of the workbench.
As a further scheme of the invention: the fixing assembly includes:
the second support plates are fixedly provided with two groups on the base, and support shafts are arranged between the two groups of second support plates;
the second driving plate is provided with a limiting hole which is in sliding connection with the supporting shaft;
the adjusting screws are in threaded connection with the second driving plate, and a plurality of groups of adjusting screws are arranged;
the pressing plate is rotationally connected with the adjusting screw rod;
and one end of the linkage block is fixedly connected with the driving assembly, and the other end of the linkage block is rotationally connected with the second driving plate.
As a further scheme of the invention: the drive assembly includes:
the electric telescopic rods are fixedly arranged on the base;
and the lifting plate is fixedly connected with the telescopic end of the electric telescopic rod and is also fixedly connected with the linkage block.
As a further scheme of the invention: the expansion assembly comprises:
the second rotating shaft is arranged on the first driving plate;
the connecting rod is rotationally connected with the second rotating shaft through a connecting seat;
and one end of the extension rod, which is far away from the connecting rod, is rotationally connected with the moving block through the connecting seat.
As a further scheme of the invention: the expansion assembly further comprises an electromagnet and a magnet, the electromagnet is fixedly arranged in the connecting rod, the magnet is slidably arranged in the connecting rod, the magnet is fixedly connected with the extension rod, and a spring for elastically supporting the magnet is further arranged in the connecting rod.
As a further scheme of the invention: the push plate is internally provided with a pressure sensor.
As a further scheme of the invention: the lifting assembly comprises an internal thread column and a threaded rod, a plurality of groups of internal thread columns are fixedly arranged on the top plate, the threaded rod is rotatably arranged on the base, the threaded rod is in threaded connection with the internal thread column, and a motor for driving the threaded rod to rotate is further arranged in the base.
An exposure machine comprises the exposure positioning structure.
Compared with the prior art, the invention has the beneficial effects that:
in an initial state, the driving assembly presses one side of the first driving plate, which is close to the elastic telescopic rod, so that the first driving plate pulls the moving block to be away from the positioning groove through the expanding assembly, and the pushing plate is moved to the edge of the positioning groove, so that circuit boards to be processed with different sizes are conveniently placed in the positioning groove; when the circuit board to be processed is placed in the positioning groove, the driving assembly stops pressing one side of the first driving plate close to the elastic telescopic rod, so that the elastic telescopic rod can push the first driving plate to rotate on the first rotating shaft, one end of the first driving plate, which is far away from the elastic telescopic rod, moves towards the positioning groove, and is matched with the expanding assembly, the moving block can be pushed to move towards one side of the positioning groove, and then three groups of pushing plates are pressed to the side edge of the circuit board to be processed, so that the circuit board to be processed is positioned between the baffle plate and the three groups of pushing plates, and meanwhile, the fixing assembly is matched with the circuit board to be processed, so that the circuit board to be processed can be pressed, the positioning and fixing of the circuit board to be processed are realized, the lifting assembly can adjust the working position of the exposure unit in a mode of driving the top plate to move towards one side of the base, and the circuit board after positioning is convenient to process the circuit board; through workstation, baffle, positioning mechanism and drive assembly's cooperation setting, avoided current exposure location structure generally comparatively simple, when processing the circuit board, be inconvenient for fixing and fixing a position the circuit board of equidimension, there is the problem of certain limitation.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic structural view of a workbench and a positioning mechanism in the invention.
Fig. 3 is a schematic rear view of the structure of fig. 2.
Fig. 4 is a schematic structural view of a positioning assembly according to the present invention.
Fig. 5 is a schematic structural view of a fixing assembly in the present invention.
Fig. 6 is an enlarged schematic view of the structure at a in fig. 5.
FIG. 7 is a schematic view of a sectional view of a portion of an expansion assembly according to the present invention.
In the accompanying drawings: the device comprises a 1-base, a 2-threaded rod, a 3-internally threaded column, a 4-top plate, a 5-exposure unit, a 6-workbench, a 7-lifting plate, an 8-electric telescopic rod, a 9-first driving plate, a 10-second driving plate, an 11-first supporting plate, a 12-first rotating shaft, a 13-positioning groove, a 14-pressing plate, a 15-push plate, a 16-baffle plate, a 17-second supporting plate, a 18-linkage block, a 19-push-pull rod, a 20-moving block, a 21-guiding groove, a 22-second rotating shaft, a 23-elastic telescopic rod, a 24-connecting seat, a 25-connecting rod, a 26-extending rod, a 27-adjusting screw, a 28-limiting hole, a 29-supporting shaft, a 30-spring, a 31-magnet, a 32-electromagnet and a 33-upright post.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. Specific implementations of the invention are described in detail below in connection with specific embodiments.
Referring to fig. 1 to 7, an exposure positioning structure provided in an embodiment of the invention includes:
the device comprises a base 1 and a top plate 4, wherein the top plate 4 is arranged on the base 1 through a lifting assembly, and an exposure unit 5 is further arranged on the top plate 4;
the workbench 6 is fixedly arranged on the base 1 through a stand column 33, and the workbench 6 is also provided with a positioning groove 13;
the baffle 16 is fixedly arranged on the workbench 6;
the positioning mechanism comprises a positioning assembly and a fixing assembly used for pressing a circuit board to be processed, the positioning assembly comprises a first driving plate 9, a first supporting plate 11, a pushing plate 15 and an elastic telescopic rod 23, a plurality of groups of guide grooves 21 are formed in the workbench 6, a push-pull rod 19 is fixedly arranged on the pushing plate 15, the push-pull rod 19 is slidably arranged in the guide grooves 21 through a moving block 20, the first supporting plate 11 is fixedly arranged on the base 1, the first driving plate 9 is rotatably arranged on the first supporting plate 11 through a first rotating shaft 12, the first driving plate 9 is of an L-shaped structure, one end of the first driving plate 9 is connected with the moving block 20 through an expanding assembly, the other end of the first driving plate 9 is rotatably connected with the elastic telescopic rod 23, one end of the elastic telescopic rod 23, which is far away from the first driving plate 9, is rotatably connected with the bottom of the workbench 6, and the positioning assembly is provided with three groups;
and a driving component for pressing one end of the first driving plate 9, which is close to the elastic telescopic rod 23, wherein the driving component is arranged on the base 1 and is also connected with the fixing component.
In the embodiment of the invention, the baffle 16 and the three groups of positioning components are sequentially arranged around the four sides of the workbench 6, and in an initial state, the driving component presses one side of the first driving board 9, which is close to the elastic telescopic rod 23, so that the first driving board 9 pulls the moving block 20 away from the positioning groove 13 through the expanding component, thereby enabling the push plate 15 to move to the edge of the positioning groove 13, and facilitating the placement of circuit boards to be processed with different sizes into the positioning groove 13; when the circuit board to be processed is used, firstly, the circuit board to be processed is placed in the positioning groove 13, the driving assembly stops pressing the side, close to the elastic telescopic rod 23, of the first driving plate 9, so that the elastic telescopic rod 23 can push the first driving plate 9 to rotate on the first rotating shaft 12, one end, far away from the elastic telescopic rod 23, of the first driving plate 9 moves towards the side of the positioning groove 13, and is matched with the expanding assembly, the moving block 20 can be pushed to move towards the side of the positioning groove 13, and then the three groups of pushing plates 15 are pressed to the side edge of the circuit board to be processed, so that the circuit board to be processed is positioned between the baffle 16 and the three groups of pushing plates 15, meanwhile, the circuit board to be processed can be pressed by being matched with the fixing assembly, positioning and fixing of the circuit board to be processed are realized, and the lifting assembly can adjust the working position of the exposure unit 5 by driving the top plate 4 to move towards the side of the base 1, so that the circuit board after positioning is convenient to process; compared with the prior art, the invention avoids the problems that the existing exposure positioning structure is generally simpler, the circuit boards with different sizes are inconvenient to fix and position when being processed, and certain limitation exists through the matching arrangement of the workbench 6, the baffle 16, the positioning mechanism and the driving component.
In one embodiment of the present invention, referring to fig. 1-6, the fixing assembly is located on the same side of the table 6 as the baffle 16;
the fixing assembly includes:
the second support plates 17, wherein two groups of second support plates 17 are fixedly arranged on the base 1, and a support shaft 29 is arranged between the two groups of second support plates 17;
the second driving plate 10, the second driving plate 10 is provided with a limiting hole 28 in sliding connection with a supporting shaft 29;
the adjusting screw rods 27 are in threaded connection with the second driving plate 10, and a plurality of groups of adjusting screw rods 27 are arranged;
a pressing plate 14, wherein the pressing plate 14 is rotationally connected with an adjusting screw 27;
the linkage block 18, one end of the linkage block 18 is fixedly connected with the driving assembly, and the other end of the linkage block 18 is rotatably connected with the second driving plate 10;
the drive assembly includes:
the electric telescopic rods 8 are fixedly arranged on the base 1 in a plurality of groups;
and the lifting plate 7 is fixedly connected with the telescopic end of the electric telescopic rod 8, and the lifting plate 7 is also fixedly connected with the linkage block 18.
In this embodiment, the limiting hole 28 includes a vertical bar hole and an inclined bar hole, and the included angle between the two is an obtuse angle, so that when the limiting hole is fixed, the vertical bar hole is perpendicular to the lifting plate 7, so that after the supporting shaft 29 enters the vertical bar hole, the second driving plate 10 can move vertically and downwards, and the pressing plate 14 is conveniently driven to press and fix the circuit board to be processed; the electric telescopic rod 8 can drive the lifting plate 7 to move to one side of the base 1 by pulling the second driving plate 10 through the linkage block 18 to move on the supporting shaft 29 and match with the guiding function of the limiting hole 28, so that the second driving plate 10 is converted from inclined downward movement into vertical downward movement, the second driving plate 10 drives the pressing plate 14 to press on a circuit board to be processed, the circuit board to be processed is fixed, the adjusting screw 27 is rotated, the pressing plate 14 can be driven to move in the length direction of the adjusting screw 27, and the working position of the pressing plate 14 is convenient to finely adjust.
In one embodiment of the present invention, referring to fig. 1-7, the expansion assembly comprises:
a second rotating shaft 22, wherein the second rotating shaft 22 is arranged on the first driving plate 9;
the connecting rod 25 is rotationally connected with the second rotating shaft 22 through the connecting seat 24;
an extension rod 26 slidably mounted in the connecting rod 25, wherein one end of the extension rod 26 far away from the connecting rod 25 is rotatably connected with the moving block 20 through a connecting seat 24;
the expansion assembly further comprises an electromagnet 32 and a magnet 31, wherein the electromagnet 32 is fixedly arranged in the connecting rod 25, the magnet 31 is slidably arranged in the connecting rod 25, the magnet 31 is fixedly connected with the extension rod 26, and a spring 30 for elastically supporting the magnet 31 is further arranged in the connecting rod 25;
the push plate 15 is internally provided with a pressure sensor.
In this embodiment, the expanding assembly is in an initial state, the electromagnet 32 and the magnet 31 attract each other, when the elastic telescopic rod 23 extends to the maximum stroke and the pressure sensor in the push plate 15 still does not detect the pressure, the current direction of the electromagnet 32 is changed, so that a repulsive force is generated between the electromagnet 32 and the magnet 31, thereby pushing the magnet 31 and the extension rod 26 to be far away from the electromagnet 32, so that the moving block 20 can slide continuously, the push plate 15 can be pressed to the side edge of the circuit board to be processed, and the working stroke of the push plate 15 is enlarged.
In an embodiment of the present invention, referring to fig. 1, the lifting assembly includes an internal thread column 3 and a threaded rod 2, wherein a plurality of groups of internal thread columns 3 are fixedly installed on a top plate 4, the threaded rod 2 is rotatably installed on a base 1, the threaded rod 2 is in threaded connection with the internal thread column 3, and a motor for driving the threaded rod 2 to rotate is further provided in the base 1.
In this embodiment, the motor sets up inside base 1, and the motor can drive internal thread post 3 and remove in the length direction of threaded rod 2 through driving threaded rod 2 pivoted mode to drive roof 4 and remove, realize exposing unit 5 working height's regulation.
Referring to fig. 1, an exposure machine according to an embodiment of the present invention includes the above-mentioned exposure positioning structure.
In summary, the working principle of the invention is as follows: in an initial state, the driving assembly presses one side, close to the elastic telescopic rod 23, of the first driving plate 9, so that the first driving plate 9 pulls the moving block 20 away from the positioning groove 13 through the expanding assembly, and therefore the pushing plate 15 moves to the edge of the positioning groove 13, and circuit boards to be processed with different sizes are conveniently placed in the positioning groove 13; when the circuit board to be processed is placed in the positioning groove 13, the driving assembly stops pressing the side, close to the elastic telescopic rod 23, of the first driving plate 9, the elastic telescopic rod 23 can push the first driving plate 9 to rotate on the first rotating shaft 12, one end, far away from the elastic telescopic rod 23, of the first driving plate 9 moves towards the side of the positioning groove 13, the moving block 20 can be pushed to move towards the side of the positioning groove 13 by matching with the expanding assembly, the three groups of pushing plates 15 are pressed on the side edge of the circuit board to be processed, the circuit board to be processed is positioned between the baffle 16 and the three groups of pushing plates 15, meanwhile, the circuit board to be processed can be pressed by matching with the fixing assembly, positioning and fixing of the circuit board to be processed are achieved, and the lifting assembly can adjust the working position of the exposure unit 5 by driving the top plate 4 to move towards the side of the base 1, so that the circuit board after positioning is convenient to process.
In the present invention, unless explicitly specified and limited otherwise, the terms "slide", "rotate", "fixed", "provided" and the like are to be construed broadly, and may be, for example, welded, bolted, or integrated; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (9)
1. The utility model provides an exposure location structure, includes base and roof, the roof passes through lifting unit and installs on the base, and still is provided with exposure unit on the roof, its characterized in that still includes:
the workbench is fixedly arranged on the base through the upright post, and a positioning groove is further formed in the workbench;
the baffle is fixedly arranged on the workbench;
the positioning mechanism comprises a positioning assembly and a fixing assembly used for pressing a circuit board to be processed, the positioning assembly comprises a first driving plate, a first supporting plate, a pushing plate and an elastic telescopic rod, a plurality of groups of guide grooves are formed in the workbench, a push-pull rod is fixedly installed on the pushing plate and is slidably installed in the guide grooves through a moving block, the first supporting plate is fixedly installed on the base, the first driving plate is rotatably installed on the first supporting plate through a first rotating shaft, the first driving plate is of an L-shaped structure, one end of the first driving plate is connected with the moving block through an expanding assembly, the other end of the first driving plate is rotatably connected with the elastic telescopic rod, one end of the elastic telescopic rod, which is far away from the first driving plate, is rotatably connected with the bottom of the workbench, and the positioning assembly is provided with three groups;
and the driving assembly is used for pressing one end of the first driving plate, which is close to the elastic telescopic rod, and is arranged on the base and is also connected with the fixing assembly.
2. The exposure positioning structure according to claim 1, wherein the fixing member and the shutter are located on the same side on the stage.
3. The exposure positioning structure according to claim 1, wherein the fixing assembly includes:
the second support plates are fixedly provided with two groups on the base, and support shafts are arranged between the two groups of second support plates;
the second driving plate is provided with a limiting hole which is in sliding connection with the supporting shaft;
the adjusting screws are in threaded connection with the second driving plate, and a plurality of groups of adjusting screws are arranged;
the pressing plate is rotationally connected with the adjusting screw rod;
and one end of the linkage block is fixedly connected with the driving assembly, and the other end of the linkage block is rotationally connected with the second driving plate.
4. The exposure positioning structure according to claim 3, wherein the driving assembly includes:
the electric telescopic rods are fixedly arranged on the base;
and the lifting plate is fixedly connected with the telescopic end of the electric telescopic rod and is also fixedly connected with the linkage block.
5. The exposure positioning structure according to claim 1, wherein the expanding assembly comprises:
the second rotating shaft is arranged on the first driving plate;
the connecting rod is rotationally connected with the second rotating shaft through a connecting seat;
and one end of the extension rod, which is far away from the connecting rod, is rotationally connected with the moving block through the connecting seat.
6. The exposure positioning structure according to claim 5, wherein the expanding assembly further comprises an electromagnet and a magnet, the electromagnet is fixedly installed in the connecting rod, the magnet is slidably installed in the connecting rod and fixedly connected with the extension rod, and a spring for elastically supporting the magnet is further arranged in the connecting rod.
7. The exposure positioning structure according to claim 5, wherein the push plate incorporates a pressure sensor.
8. The exposure positioning structure according to claim 1, wherein the lifting assembly comprises an internal thread column and a threaded rod, the internal thread column is fixedly provided with a plurality of groups on the top plate, the threaded rod is rotatably mounted on the base, the threaded rod is in threaded connection with the internal thread column, and a motor for driving the threaded rod to rotate is further arranged in the base.
9. An exposure machine comprising the exposure positioning structure according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311743448.8A CN117420741B (en) | 2023-12-19 | 2023-12-19 | Exposure positioning structure and exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311743448.8A CN117420741B (en) | 2023-12-19 | 2023-12-19 | Exposure positioning structure and exposure machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117420741A true CN117420741A (en) | 2024-01-19 |
| CN117420741B CN117420741B (en) | 2024-03-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311743448.8A Active CN117420741B (en) | 2023-12-19 | 2023-12-19 | Exposure positioning structure and exposure machine |
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| CN (1) | CN117420741B (en) |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM266682U (en) * | 2004-09-10 | 2005-06-01 | C Sun Mfg Ltd | Negative film positioning device of PCB exposure machine |
| TW200907590A (en) * | 2007-04-03 | 2009-02-16 | Nsk Co Ltd | Exposure apparatus and method |
| KR20160049436A (en) * | 2014-10-27 | 2016-05-09 | 베이징 골드윈드 싸이언스 앤 크리에이션 윈드파워 이큅먼트 코.,엘티디. | Bolt fastening device |
| CN108897195A (en) * | 2018-06-14 | 2018-11-27 | 江苏盛矽电子科技有限公司 | A kind of separate type exposure device of tension type printing screen plate |
| CN208569299U (en) * | 2018-06-14 | 2019-03-01 | 江苏盛矽电子科技有限公司 | A kind of separate type exposure device of space fine-adjusting type printing screen plate |
| CN109597284A (en) * | 2019-02-02 | 2019-04-09 | 东旭（昆山）显示材料有限公司 | A kind of pre- alignment device of exposure machine and exposure machine |
| CN110007569A (en) * | 2019-05-10 | 2019-07-12 | 苏州微影激光技术有限公司 | A kind of write-through exposure machine worktable component and write-through exposure machine |
| CN110933877A (en) * | 2019-12-05 | 2020-03-27 | 广德通灵电子有限公司 | Four-layer circuit board with high production yield and manufacturing method thereof |
| CN110972402A (en) * | 2019-11-19 | 2020-04-07 | 信丰福昌发电子有限公司 | A automatic alignment exposure equipment for HDI circuit board inlayer dry film |
| CN212211545U (en) * | 2020-06-02 | 2020-12-22 | 惠州市聚真电路板有限公司 | Fixing device for exposure processing of circuit board |
| WO2022016930A1 (en) * | 2020-07-21 | 2022-01-27 | 南京昱晟机器人科技有限公司 | Industrial robot connecting base facilitating angle adjustment |
| CN114355734A (en) * | 2022-01-20 | 2022-04-15 | 深圳市欣光辉科技有限公司 | Full-automatic coiled material exposure machine |
| WO2022095178A1 (en) * | 2020-11-06 | 2022-05-12 | 扬州力创机床有限公司 | Clamp for machine tool machining with conveniently adjustable size |
| CN114675498A (en) * | 2022-02-17 | 2022-06-28 | 深圳市欣光辉科技有限公司 | Two-sided automatic exposure machine that hinders that welds |
| CN217291379U (en) * | 2021-09-28 | 2022-08-26 | 上海臻懿机械有限公司 | Machining is with supporting mechanism convenient to adjust |
| CN219087415U (en) * | 2022-12-20 | 2023-05-26 | 天长市天鼎电子有限公司 | Circuit board exposure machine clamping device |
| CN116449658A (en) * | 2023-06-15 | 2023-07-18 | 广东科视光学技术股份有限公司 | Efficient alignment exposure device and alignment method |
| CN219978692U (en) * | 2023-03-22 | 2023-11-07 | 上海探跃半导体设备有限公司 | Positioning mechanism of exposure machine |
-
2023
- 2023-12-19 CN CN202311743448.8A patent/CN117420741B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM266682U (en) * | 2004-09-10 | 2005-06-01 | C Sun Mfg Ltd | Negative film positioning device of PCB exposure machine |
| TW200907590A (en) * | 2007-04-03 | 2009-02-16 | Nsk Co Ltd | Exposure apparatus and method |
| KR20160049436A (en) * | 2014-10-27 | 2016-05-09 | 베이징 골드윈드 싸이언스 앤 크리에이션 윈드파워 이큅먼트 코.,엘티디. | Bolt fastening device |
| CN108897195A (en) * | 2018-06-14 | 2018-11-27 | 江苏盛矽电子科技有限公司 | A kind of separate type exposure device of tension type printing screen plate |
| CN208569299U (en) * | 2018-06-14 | 2019-03-01 | 江苏盛矽电子科技有限公司 | A kind of separate type exposure device of space fine-adjusting type printing screen plate |
| CN109597284A (en) * | 2019-02-02 | 2019-04-09 | 东旭（昆山）显示材料有限公司 | A kind of pre- alignment device of exposure machine and exposure machine |
| CN110007569A (en) * | 2019-05-10 | 2019-07-12 | 苏州微影激光技术有限公司 | A kind of write-through exposure machine worktable component and write-through exposure machine |
| CN110972402A (en) * | 2019-11-19 | 2020-04-07 | 信丰福昌发电子有限公司 | A automatic alignment exposure equipment for HDI circuit board inlayer dry film |
| CN110933877A (en) * | 2019-12-05 | 2020-03-27 | 广德通灵电子有限公司 | Four-layer circuit board with high production yield and manufacturing method thereof |
| CN212211545U (en) * | 2020-06-02 | 2020-12-22 | 惠州市聚真电路板有限公司 | Fixing device for exposure processing of circuit board |
| WO2022016930A1 (en) * | 2020-07-21 | 2022-01-27 | 南京昱晟机器人科技有限公司 | Industrial robot connecting base facilitating angle adjustment |
| WO2022095178A1 (en) * | 2020-11-06 | 2022-05-12 | 扬州力创机床有限公司 | Clamp for machine tool machining with conveniently adjustable size |
| CN217291379U (en) * | 2021-09-28 | 2022-08-26 | 上海臻懿机械有限公司 | Machining is with supporting mechanism convenient to adjust |
| CN114355734A (en) * | 2022-01-20 | 2022-04-15 | 深圳市欣光辉科技有限公司 | Full-automatic coiled material exposure machine |
| CN114675498A (en) * | 2022-02-17 | 2022-06-28 | 深圳市欣光辉科技有限公司 | Two-sided automatic exposure machine that hinders that welds |
| CN219087415U (en) * | 2022-12-20 | 2023-05-26 | 天长市天鼎电子有限公司 | Circuit board exposure machine clamping device |
| CN219978692U (en) * | 2023-03-22 | 2023-11-07 | 上海探跃半导体设备有限公司 | Positioning mechanism of exposure machine |
| CN116449658A (en) * | 2023-06-15 | 2023-07-18 | 广东科视光学技术股份有限公司 | Efficient alignment exposure device and alignment method |
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