CN116931380A

CN116931380A - Servo adjustment system

Info

Publication number: CN116931380A
Application number: CN202210373812.5A
Authority: CN
Inventors: 郑耀青; 邱会峰
Original assignee: Beijing Youwei Precision Measurement And Control Technology Research Co ltd; Beijing U Precision Tech Co Ltd
Current assignee: Beijing Youwei Precision Measurement And Control Technology Research Co ltd; Beijing U Precision Tech Co Ltd
Priority date: 2022-04-11
Filing date: 2022-04-11
Publication date: 2023-10-24

Abstract

The application provides a servo adjustment system, and relates to the field of semiconductor manufacturing equipment. The servo adjustment system comprises a base plate, a rotary plate and a lifting moving plate which are sequentially arranged from bottom to top, wherein a rotary servo mechanism is arranged on the base plate and can adjust the angle of the rotary plate; the lifting servo mechanism is arranged on the rotating plate, the lifting moving plate is arranged on the lifting servo mechanism in a building mode, and the lifting servo mechanism can adjust the flatness of the lifting moving plate. When the servo adjustment system is used, the lifting moving plate or the optical component on the lifting moving plate is arranged on the lifting servo mechanism, so that the rotating moving plate is driven to rotate through the rotating servo mechanism, the angle of the optical component can be adjusted, and the lifting moving plate is driven to lift through the lifting servo mechanism, so that the flatness of the optical component can be adjusted.

Description

Servo adjustment system

Technical Field

The application relates to the technical field of semiconductor manufacturing equipment, in particular to a servo adjustment system.

Background

In the prior art, the plane grating direct-writing photoetching machine has the advantages that the angle adjustment and the horizontal adjustment of the optical component are both manual adjustment, the adjustment structure is simple, the angle adjustment adopts a jacking and pulling mode, and the adjustment is carried out by using a mechanical knob; the plane adjustment is carried out by adopting four jackscrews. However, the structure size of the plane grating direct writing lithography machine is relatively large, and the manual adjustment has the problems of inconvenient operation, low adjustment precision, low adjustment efficiency and the like.

Disclosure of Invention

The application aims to provide a servo adjusting system which solves the technical problems of inconvenient operation, low adjusting precision and low adjusting efficiency in the prior art when adjusting the angle and the level of an optical component in a direct-writing photoetching machine.

The servo adjustment system comprises a base plate, a rotary plate and a lifting moving plate which are sequentially arranged from bottom to top, wherein a rotary servo mechanism is arranged on the base plate and can adjust the angle of the rotary moving plate; the lifting servo mechanism is arranged on the rotating moving plate, the lifting moving plate is arranged on the lifting servo mechanism, and the lifting servo mechanism can adjust the flatness of the lifting moving plate.

Further, the lifting servo mechanism comprises at least three lifting assemblies, each lifting assembly comprises a hinged ball, and the lifting moving plate is arranged on at least three hinged balls in a building mode.

Further, the bottom end surface of the lifting moving plate is provided with a plurality of positioning grooves, and the positioning grooves are matched with the hinge balls in a one-to-one correspondence mode.

Further, the lifting assembly further comprises a lifting servo motor, a lifting screw nut assembly, a horizontal movement wedge block and a vertical movement wedge block;

the lifting servo motor is arranged on the rotating plate, an output shaft of the lifting servo motor is fixedly connected with a screw rod of the lifting screw rod nut assembly, a nut of the lifting screw rod nut assembly is fixedly connected with the horizontal movement wedge block, the inclined surface of the vertical movement wedge block is opposite to the inclined surface of the horizontal movement wedge block up and down, and when the lifting servo motor rotates along a first direction, the horizontal movement wedge block pushes the vertical movement wedge block to ascend; the hinge ball is arranged at the top end of the vertical movement wedge block.

Further, the lifting assembly further comprises a vertical guide assembly, wherein the vertical guide assembly comprises at least one vertical guide rail, and the vertical guide rail is fixedly arranged on the rotating moving plate; the vertical movement wedge block is provided with at least one chute, and the chute is correspondingly matched and spliced with the vertical guide rail.

Further, the number of the lifting components is three, and the three lifting components are at least distributed on two sides of the lifting moving plate.

Further, the rotary servo mechanism comprises an arc-shaped guide rail assembly, and the arc-shaped guide rail assembly is arranged between the base plate and the rotary moving plate;

the rotary servo mechanism further comprises a rotary servo motor, a rotary screw nut assembly and a rotary ejector rod, an output shaft of the rotary servo motor is fixedly connected with a screw in the rotary screw nut assembly, and a nut in the rotary screw nut assembly is fixedly connected with the rotary ejector rod;

when the rotary servo motor rotates along the first direction, the rotary ejector rod can be driven to push the rotary moving plate to rotate by taking the central shaft of the arc-shaped guide rail assembly as an axis.

Further, the number of the arc-shaped guide rail assemblies is two, and the two groups of the arc-shaped guide rail assemblies are coaxially arranged.

Further, the servo adjustment system further comprises a return spring, one end of the return spring is connected with the base plate, and the other end of the return spring is connected with the rotating plate;

when the rotary servo motor rotates along the first direction, the rotary moving plate overcomes the elastic force of the return spring and rotates; when the rotary servo motor rotates in a second direction, the return spring returns the rotary moving plate, and the second direction is opposite to the first direction.

Further, the number of the reset springs is two, the two reset springs are arranged along the diagonal line of the rotary moving plate, and when the rotary ejector rod pushes the rotary moving plate to rotate, the reset springs stretch.

The servo adjustment system provided by the application has the following beneficial effects:

when the servo adjustment system provided by the application is used, the optical component is arranged on the lifting moving plate, and the lifting moving plate and the optical component on the lifting moving plate are arranged on the lifting servo mechanism together, so that the angle of the optical component can be adjusted by driving the rotary moving plate to rotate through the rotary servo mechanism, the flatness of the optical component can be adjusted by driving the lifting moving plate to lift through the lifting servo mechanism, and the lifting moving plate is arranged on the lifting servo mechanism, so that the lifting moving plate can be taken and placed very conveniently and quickly. The servo adjustment system provided by the application can realize electric leveling focusing of the optical component, is very convenient to take and place, reduces the operation difficulty of operators, and can improve the precision and efficiency of leveling focusing.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present application, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic three-dimensional structure of a servo adjustment system according to the present application;

FIG. 2 is an enlarged schematic view of the structure shown at A in FIG. 1;

FIG. 3 is a schematic diagram of a servo adjustment system according to a second embodiment of the present application;

fig. 4 is an enlarged schematic view of the structure at B in fig. 3.

Reference numerals illustrate:

100-a substrate; 200-rotating a movable plate; 300-lifting the movable plate;

400-rotating servo; 410-rotating a servo motor; 420-rotating a lead screw nut assembly; 430-rotating the ejector pin; 440-linear guide assembly; 450-arcuate guide rail assembly;

500-return spring;

600-lifting servo mechanism; 610-lifting servo motor; 620-lifting screw nut assembly; 630-horizontal movement wedge; 640-vertical movement wedge; 650-hinging the ball; 660-horizontal guide assembly; 670-vertical guide assembly.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.

The present embodiment provides a servo adjustment system, as shown in fig. 1 and 3, which includes a substrate 100, a rotating plate 200 and a lifting moving plate 300 sequentially disposed from bottom to top, a rotating servo 400 is disposed on the substrate 100, and the rotating servo 400 can adjust the angle of the rotating plate 200; the rotation plate 200 is provided with a lift servo mechanism 600, the lift servo mechanism 600 is provided to the lift movable plate 300, and the lift servo mechanism 600 can adjust the flatness of the lift movable plate 300.

In use, the servo adjustment system provided in this embodiment places the optical component on the lifting moving plate 300, and sets up the lifting moving plate 300 and the optical component thereon on the lifting moving plate 300 together with the lifting servo mechanism, so that the rotation of the rotating plate 200 is driven by the rotation servo mechanism 400 to adjust the angle of the optical component, the lifting moving plate 300 is driven by the lifting servo mechanism 600 to lift to adjust the flatness of the optical component, and the lifting moving plate 300 is set up on the lifting servo mechanism to make the lifting moving plate 300 very convenient and fast. That is, by using the servo adjustment system provided by the embodiment, the electric leveling focusing of the optical component can be realized, and the taking and placing are very convenient, so that the operation difficulty of operators is reduced, and the precision and efficiency of leveling focusing can be improved.

Specifically, in the present embodiment, the lifting servo 600 includes at least three lifting assemblies, the lifting assemblies include hinge balls 650, and the lifting moving plate 300 is mounted on the at least three hinge balls 650. In this arrangement, the plurality of hinge balls 650 form a bearing plane to support the lifting moving plate 300, and the lifting moving plate 300 is in approximate point contact with each hinge ball 650, so that assembly errors caused by surface contact can be effectively avoided, and leveling accuracy can be ensured.

Specifically, in this embodiment, three positioning grooves are provided on the bottom surface of the lifting moving plate 300, and the three positioning grooves are matched with the three hinging balls 650 in a one-to-one correspondence. In this arrangement, the positioning groove accommodates, positions and positions the hinge ball 650, thereby ensuring the position accuracy and position stability of the lifting moving plate 300, and the adjustment accuracy of the lifting moving plate 300 and the optical components thereon is also higher.

Specifically, in the present embodiment, as shown in fig. 4, the lifting assembly further includes a lifting servo motor 610, a lifting screw nut assembly 620, a horizontal movement wedge 630, and a vertical movement wedge 640; the lifting servo motor 610 is mounted on the rotating plate 200, an output shaft of the lifting servo motor 610 is fixedly connected with a screw of the lifting screw nut component 620, a nut of the lifting screw nut component 620 is fixedly connected with the horizontal movement wedge block 630, an inclined plane of the vertical movement wedge block 640 is opposite to an inclined plane of the horizontal movement wedge block 630 up and down, and when the lifting servo motor 610 rotates along a first direction, the horizontal movement wedge block 630 pushes the vertical movement wedge block 640 to ascend; a hinge ball 650 is provided at the top end of the vertical movement wedge 640. In this arrangement, when the height of a certain position of the optical component needs to be raised, the lifting servo motor 610 is started and rotates along the first direction, the lifting servo motor 610 drives the screw of the lifting screw nut component 620 to rotate, so that the screw drives the nut connected with the screw to move towards the lifting moving plate 300, and the nut moves forward and drives the horizontal moving wedge 630 to move, and the horizontal moving wedge 630 extrudes and pushes the vertical moving wedge 640 to rise, and finally drives the lifting moving plate 300 to rise. When the height of a certain position of the optical component needs to be lowered, the lifting servo motor 610 rotates in the second direction, and the lifting screw nut component 620 drives the horizontal movement wedge block 630 to move away from the lifting moving plate 300, so that the vertical movement wedge block 640, the lifting moving plate 300 and the optical component thereon and the like descend under the action of gravity.

Specifically, in this embodiment, as further shown in fig. 4, the lifting assembly further includes a vertical guiding assembly 670, where the vertical guiding assembly 670 includes at least one vertical guide rail fixedly disposed on the rotating plate 200; the vertical movement wedge 640 is provided with at least one sliding groove which is correspondingly matched and inserted with the vertical guide rail. In this arrangement, vertical guide assembly 670 serves to guide and limit vertical movement wedge 640.

More specifically, in the present embodiment, the vertical guide assembly 670 includes two vertical guide rails symmetrically disposed on two sides of the lifting screw nut assembly 620, and two sides of the vertical movement wedge 640 are respectively provided with a sliding groove. So set up, vertical guide subassembly 670 all plays direction and spacing effect to the both sides of vertical movement wedge 640, can effectively avoid the jamming phenomenon in the vertical movement wedge 640 lift, makes its lift more smooth and easy.

Specifically, in the present embodiment, as shown in fig. 1 and 3, the number of lifting assemblies is three, and the three groups of lifting assemblies are at least distributed on two sides of the lifting moving plate 300. Preferably, three sets of lifting assemblies are disposed on opposite sides of the lifting moving plate 300.

Specifically, in the present embodiment, as shown in fig. 2, the rotary servo 400 includes an arc-shaped rail assembly 450, and the arc-shaped rail assembly 450 is disposed between the base plate 100 and the rotary moving plate 200; the rotary servo mechanism 400 further comprises a rotary servo motor 410, a rotary screw nut assembly 420 and a rotary ejector rod 430, wherein an output shaft of the rotary servo motor 410 is fixedly connected with a screw in the rotary screw nut assembly 420, and a nut in the rotary screw nut assembly 420 is fixedly connected with the rotary ejector rod 430; when the rotary servo motor 410 rotates in the first direction, the rotary push rod 430 is driven to push the rotary plate 200 to rotate around the central axis of the arc-shaped guide rail assembly 450. In this arrangement, the arcuate guide rail assembly 450 supports, guides and positions the rotatable plate 200; the rotary servo motor 410 drives the screw of the rotary screw nut assembly 420 to rotate according to the instruction, so that the screw drives the nut connected with the screw to advance forwards, and the nut drives the rotary ejector rod 430 to move forwards while advancing forwards, and the rotary ejector rod 430 is abutted with the rotary moving plate 200 to push the rotary moving plate 200 to rotate.

Specifically, in the present embodiment, the number of the arc-shaped rail assemblies 450 is two, and the two arc-shaped rail assemblies 450 are coaxially disposed. In this arrangement, the two sets of arc guide rail assemblies 450 have higher supporting strength to the rotating plate 200, so that the rotating plate 200 and the components thereon have higher positional stability, which is beneficial to improving the accuracy of angle and flatness adjustment.

Preferably, the two sets of arc-shaped guide rail assemblies 450 are disposed on two opposite sides of the rotating plate 200, so that the two sets of arc-shaped guide rail assemblies 450 have more balanced supporting effects on the rotating plate 200 and the parts thereon, and thus the position stability of the rotating plate 200 and the parts thereon can be further improved.

More specifically, in this embodiment, the arc guide rail assembly 450 includes an arc guide rail and a slider, the slider is provided with an arc chute matching with the arc guide rail, the arc guide rail is fixedly disposed on the base plate 100, the slider is fixedly disposed at the bottom of the rotating plate 200, and the slider slides along the arc guide rail when the rotating rod 430 pushes the rotating plate 200.

It should be noted that, in other embodiments of the present application, an arc-shaped guide rail may be disposed at the bottom of the rotating plate 200, and a slider is disposed on the base plate 100, and when the rotating rod 430 pushes the rotating plate 200, the arc-shaped guide rail slides in an arc-shaped chute of the slider. That is, the specific arrangement of the arc-shaped rail assembly 450 is not limited in the present application as long as the rotating plate 200 can be rotated along a fixed axis.

Specifically, in the present embodiment, as shown in fig. 2, the rotary servo mechanism 400 further includes a linear guide rail assembly 440, and the linear guide rail assembly 440 is disposed between the nut of the rotary screw nut assembly 420 and the base plate 100, and plays roles of supporting, guiding and limiting the nut.

Specifically, in this embodiment, as shown in fig. 2, the servo adjustment system further includes a return spring 500, where one end of the return spring 500 is connected to the substrate 100, and the other end is connected to the rotating plate 200; when the rotary servo motor 410 rotates in the first direction, the rotary plate 200 overcomes the elastic force of the return spring 500 and rotates; when the rotary servo motor 410 rotates in a second direction, the return spring 500 returns the rotary plate 200, the second direction being opposite to the first direction.

It should be noted that, in other embodiments of the present application, the return spring 500 may be replaced by other elastic members, so long as the elastic members can store elastic potential energy and release the stored elastic potential energy to return the rotating moving plate 200 when the rotating servo motor 410 rotates in the second direction.

Specifically, in the present embodiment, the number of the return springs 500 is two, two return springs 500 are disposed along the diagonal line of the rotary plate 200, and when the rotary jack 430 pushes the rotary plate 200 to rotate, the return springs 500 are elongated. So set up, when rotary servo motor 410 rotates along the second direction, two reset springs 500 exert pulling force to the opposite both sides of rotatory board 200 respectively, can effectively avoid rotatory board 200 to rotate the phenomenon of jamming, make rotatory board 200 rotate more steadily smooth and easy.

It should be noted that, in other embodiments of the present application, two return springs 500 may be disposed along another diagonal line of the rotating plate 200, and at this time, when the rotating jack 430 pushes the rotating plate 200 to rotate, the return springs 500 contract.

Specifically, the servo adjustment system provided in this embodiment may be applied to a direct-write lithography machine, but is not limited to a direct-write lithography machine, but may also be applied to other devices that require angle adjustment and flatness adjustment.

Finally, it is further noted that relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The servo adjustment system is characterized by comprising a base plate (100), a rotary moving plate (200) and a lifting moving plate (300) which are sequentially arranged from bottom to top, wherein a rotary servo mechanism (400) is arranged on the base plate (100), and the rotary servo mechanism (400) can adjust the angle of the rotary moving plate (200); the lifting servo mechanism (600) is arranged on the rotary moving plate (200), the lifting moving plate (300) is arranged on the lifting servo mechanism (600), and the lifting servo mechanism (600) can adjust the flatness of the lifting moving plate (300).

2. The servo adjustment system according to claim 1, characterized in that the lifting servo (600) comprises at least three lifting assemblies, the lifting assemblies comprising articulation balls (650), the lifting moving plate (300) being mounted on at least three of the articulation balls (650).

3. The servo adjustment system according to claim 2, wherein the bottom end surface of the lifting moving plate (300) is provided with a plurality of positioning grooves, and a plurality of positioning grooves are matched with a plurality of hinge balls (650) in a one-to-one correspondence.

4. The servo adjustment system of claim 2, wherein the lift assembly further comprises a lift servo motor (610), a lift screw nut assembly (620), a horizontal motion wedge (630), and a vertical motion wedge (640);

the lifting servo motor (610) is mounted on the rotating plate (200), an output shaft of the lifting servo motor (610) is fixedly connected with a screw of the lifting screw nut assembly (620), a nut of the lifting screw nut assembly (620) is fixedly connected with the horizontal movement wedge block (630), an inclined plane of the vertical movement wedge block (640) is opposite to an inclined plane of the horizontal movement wedge block (630) up and down, and when the lifting servo motor (610) rotates along a first direction, the horizontal movement wedge block (630) pushes the vertical movement wedge block (640) to ascend; the articulation ball (650) is disposed on top of the vertically moving wedge (640).

5. A servo adjustment system according to claim 3, characterized in that the lifting assembly further comprises a vertical guide assembly (670), the vertical guide assembly (670) comprising at least one vertical guide rail fixedly arranged to the rotating plate (200); the vertical movement wedge block (640) is provided with at least one sliding groove, and the sliding groove is correspondingly matched and spliced with the vertical guide rail.

6. A servo-regulation system according to claim 3, wherein the number of lifting assemblies is three, the three groups of lifting assemblies being distributed at least on both sides of the lifting moving plate (300).

7. The servo adjustment system according to any one of claims 1-6, characterized in that the rotary servo (400) comprises an arcuate guide rail assembly (450), the arcuate guide rail assembly (450) being arranged between the base plate (100) and the rotary motion plate (200);

the rotary servo mechanism (400) further comprises a rotary servo motor (410), a rotary screw nut assembly (420) and a rotary ejector rod (430), an output shaft of the rotary servo motor (410) is fixedly connected with a screw in the rotary screw nut assembly (420), and a nut in the rotary screw nut assembly (420) is fixedly connected with the rotary ejector rod (430);

when the rotary servo motor (410) rotates along the first direction, the rotary ejector rod (430) can be driven to push the rotary moving plate (200) to rotate by taking the central shaft of the arc-shaped guide rail assembly (450) as an axis.

8. The servo-regulation system of claim 7, wherein the number of arcuate guide rail assemblies (450) is two, and wherein two sets of arcuate guide rail assemblies (450) are coaxially disposed.

9. The servo adjustment system according to claim 7, characterized in that the servo adjustment system further comprises a return spring (500), one end of the return spring (500) being connected to the base plate (100) and the other end being connected to the rotating plate (200);

when the rotary servo motor (410) rotates in the first direction, the rotary moving plate (200) overcomes the elastic force of the return spring (500) and rotates; when the rotary servo motor (410) rotates in a second direction, the return spring (500) returns the rotary moving plate (200), the second direction being opposite to the first direction.

10. The servo adjustment system according to claim 9, wherein the number of the return springs (500) is two, the two return springs (500) are arranged along a diagonal line of the rotary motion plate (200), and the return springs (500) are elongated when the rotary jack (430) pushes the rotary motion plate (200) to rotate.