CN117373953A - High-efficient cleaning equipment of electronic device - Google Patents
High-efficient cleaning equipment of electronic device Download PDFInfo
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- CN117373953A CN117373953A CN202311337311.2A CN202311337311A CN117373953A CN 117373953 A CN117373953 A CN 117373953A CN 202311337311 A CN202311337311 A CN 202311337311A CN 117373953 A CN117373953 A CN 117373953A
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- vibrating
- cleaning
- cleaned
- permanent magnet
- tank
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- 238000004140 cleaning Methods 0.000 title claims abstract description 115
- 239000007921 spray Substances 0.000 claims abstract description 14
- 239000002245 particle Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 5
- 230000005389 magnetism Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 239000007788 liquid Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 238000012512 characterization method Methods 0.000 description 7
- 230000006872 improvement Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000005406 washing Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000004506 ultrasonic cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
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- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention relates to high-efficiency cleaning equipment for electronic devices, which comprises a cleaning tank and a rotary table, wherein the cleaning tank comprises an electromagnetic driving tank wall and a vibrating tank bottom, a spray hole is formed in the center of the rotary table, a rotary pipe is arranged below the rotary table, and the rotary pipe is in rotary connection with the vibrating tank bottom; a plurality of drain pipes are arranged below the bottom of the vibrating tank, and the inner cavity of each drain pipe is communicated with the inner cavity of the cleaning tank; the edge of the turntable is provided with at least four magnetic clamping columns used for clamping the piece to be cleaned, and the magnetic clamping columns are driven by electromagnetic driving type groove walls to adjust the rotation angle. The high-efficiency cleaning equipment for the electronic device can effectively clean the two sides of the round and rectangular electronic device, and the magnetic clamping column driven by electromagnetic can clamp the piece to be cleaned during the two-side cleaning, so that the clamped area of the piece to be cleaned can be effectively cleaned, and the cleaning effect is good.
Description
Technical Field
The invention relates to efficient cleaning equipment for electronic devices, and belongs to the technical field of electronic devices.
Background
In the field of production and processing of electronic devices, such as production and processing of electronic devices including nixie tubes, LED display screens, wafer chips, integrated circuits and the like, cleaning is one of the indispensable steps.
At present, when a sheet (block) device is cleaned, a single-chip cleaning device is taken as an example, for example, a single-chip cleaning machine and a chuck thereof disclosed in publication No. CN108987330A are generally used for clamping only round devices, and the clamping operation of square or rectangular devices is troublesome; and, generally, can only be used for single-sided cleaning; and the clamped device has a clamped area which is shielded, is usually a cleaning dead angle and is difficult to clean, and the clamping position is usually required to be adjusted for secondary cleaning.
These limitations result in the limitation of the cleaning efficiency of the conventional cleaning machine, which cannot be further improved. Based on this, the present invention has been proposed.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention provides high-efficiency cleaning equipment for electronic devices, which comprises the following specific technical scheme:
the utility model provides an electronic device high-efficient cleaning equipment, is used for treating the cleaning piece, including the washing tank, be located the inside carousel of washing tank, the washing tank includes electromagnetic drive formula cell wall, vibrating tank bottom, the central authorities of carousel are provided with the orifice, the below of carousel is provided with the commentaries on classics pipe, the orifice communicates with the inner chamber of commentaries on classics pipe, the upper end of commentaries on classics pipe and the central fixed connection of carousel, the lower extreme of commentaries on classics pipe passes the central authorities of vibrating tank bottom and the lower extreme of commentaries on classics pipe is located the below of vibrating tank bottom, be connected for rotating between commentaries on classics pipe and the vibrating tank bottom; a plurality of drain pipes are arranged below the bottom of the vibrating tank, and the inner cavity of each drain pipe is communicated with the inner cavity of the cleaning tank; the edge of the turntable is provided with at least four magnetic clamping columns used for clamping the piece to be cleaned, and the magnetic clamping columns are driven by electromagnetic driving type groove walls to adjust the rotation angle.
The rotary table comprises an inner plate, an outer plate sleeved outside the inner plate and connecting plates used for connecting the inner plate and the outer plate, the spray holes are positioned in the center of the inner plate, at least three connecting plates are arranged, and a material passing hole is formed between every two adjacent connecting plates; the magnetic clamping columns are all arranged on the outer edge of the outer disc.
The magnetic clamping column comprises a rotating column and an elastic chuck column, wherein the rotating column is rotationally connected with the outer disc, and an annular ring structure is arranged on the outer ring of the middle part of the elastic chuck column; the elastic chuck column comprises two spike parts which are axisymmetrically arranged, the cross section of the tail end of each spike part is rectangular, the cross section of the head end of each spike part is circular, the side wall between the tail end of each spike part and the head end of each spike part is of a smoothly transitional curved surface structure, and the head ends of the upper spike part and the lower spike part are connected into a whole; the tip part positioned below is connected with the upper end of the rotary column into a whole, a rectangular first permanent magnet is embedded in the top end of the tip part positioned above, and the length direction of the first permanent magnet is parallel to the length direction of the tail end of the tip part.
In a further improvement, the piece to be cleaned is round, rectangular or square.
Further improvement, the inner wall of the electromagnetic driving type groove wall is embedded with a plurality of first electromagnets, the tail end of each first electromagnet is provided with a cambered surface matched with the inner wall of the magnetic driving type groove wall, a connecting line between the middle point of each first electromagnet and the central axis of the electromagnetic driving type groove wall is a datum line, an included angle between the length direction of each first electromagnet and the datum line is gamma, and gamma is an obtuse angle; the number of the first electromagnets is at least 18, and the first electromagnets are symmetrically distributed along the inner wall of the electromagnetic driving type groove wall.
Still further improvements, γ=129°.
Further improvement, the lower end of the rotary column is coaxially connected with a rotary shaft, a baffle is fixedly arranged on one side of the rotary shaft, a limiting groove used for limiting the movable range of the baffle is formed in the bottom of the outer disc, the baffle is positioned in the limiting groove, and an arc-shaped spring is arranged on one side of the baffle and one side of the limiting groove; the rotation angle of the baffle plate in the limiting groove is 0-180 degrees.
Further improvement, the vibrating tank bottom comprises an ultrasonic vibrator fixedly arranged below the vibrating tank bottom, a plurality of vibrating bars are arranged above the vibrating tank bottom, and the vibrating bars are symmetrically distributed in the cleaning tank; the vibrating strip comprises a fixed section, a vibrating section and a permanent magnet section, wherein the fixed section is fixedly connected with the bottom of the vibrating tank, and the included angle between the length direction of the vibrating section and the surface of the bottom of the vibrating tank is 0-3.9 degrees; the bottom of the outer disc is embedded with second permanent magnets, 1 second permanent magnet is arranged, the motion track of the second permanent magnets and a circle formed by the arrangement of the permanent magnet sections are arranged concentrically, and the motion track of the second permanent magnets is positioned right above the circle formed by the arrangement of the permanent magnet sections; the side part of the vibrating tank bottom is also embedded with a second electromagnet corresponding to the position of the permanent magnet section, the magnetism between the second permanent magnet and the permanent magnet section is in repulsive arrangement, and the second electromagnet is electrified to generate magnetic force repulsive or attractive with the permanent magnet section.
In the further improvement, when the double-sided cleaning is carried out on the piece to be cleaned, firstly pouring ice particles with the particle size smaller than or equal to 3mm into the cleaning tank, and then putting the piece to be cleaned into the cleaning tank and clamping the piece by using a magnetic clamping column; the rotating speed value of the turntable is v 0 The method comprises the steps of carrying out a first treatment on the surface of the The second electromagnet has a power-on time value of t in a single period 1 The power-off time value is t 2 The method comprises the steps of carrying out a first treatment on the surface of the The number of the vibrating bars is n 1 ，t 2 /t 1 ＝3；
When the rotating speed of the turntable is less than or equal to 1080r/min, v 0 ＝70n 1 t 2 ；
When the rotating speed of the turntable is more than 1080r/min, v 0 ＝260n 1 t 2 。
Still further improvement, the central authorities of vibrating tank bottom inlay and are equipped with bearing and elastic sleeve, the elastic sleeve cover is established in the outside of bearing, the bearing cover is established in the outside of changeing the pipe.
The invention has the beneficial effects that:
the efficient cleaning equipment for the electronic devices can effectively clean the round and rectangular electronic devices on two sides, and when the electronic devices are cleaned on two sides, the magnetic clamping columns driven by electromagnetic can clamp the cleaning piece to be cleaned, and the area to be cleaned, which is clamped by the cleaning piece, can be effectively cleaned, so that the cleaning effect is good.
Drawings
FIG. 1 is a schematic diagram of an efficient cleaning apparatus for electronic devices according to the present invention;
FIG. 2 is a schematic distribution diagram of a turntable and a magnetic clamping column according to the present invention;
FIG. 3 is a schematic view of the structure of an electromagnetic driving slot wall according to the present invention;
FIG. 4 is a cross-sectional view of the turntable and magnetic clamping post of the present invention;
FIG. 5 is a schematic view of the rotary connection of the present invention with an outer disc;
fig. 6 is a schematic structural view of the elastic chuck column according to the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
In the description of the present invention, it is to be noted that, unless otherwise indicated, the meaning of "plurality" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as an orientation or positional relationship based on that shown in the drawings, merely to facilitate description of the invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Example 1
As shown in fig. 1, the efficient cleaning apparatus for electronic devices is configured to clean a piece 40 to be cleaned, and comprises a cleaning tank 1 and a turntable 30 located inside the cleaning tank 1, wherein the cleaning tank 1 comprises an electromagnetic driving tank wall 20 and a vibrating tank bottom 10, a spray hole 311 is provided in the center of the turntable 30, a rotary pipe 33 is provided below the turntable 30, the spray hole 311 is communicated with an inner cavity of the rotary pipe 33, the upper end of the rotary pipe 33 is fixedly connected with the center of the turntable 30, the lower end of the rotary pipe 33 passes through the center of the vibrating tank bottom 10, the lower end of the rotary pipe 33 is located below the vibrating tank bottom 10, and the rotary pipe 33 is in rotary connection with the vibrating tank bottom 10; a plurality of drain pipes 11 are arranged below the vibrating tank bottom 10, and the inner cavities of the drain pipes 11 are communicated with the inner cavity of the cleaning tank 1; the rim of the turntable 30 is provided with at least four magnetic clamping posts 60 for clamping the sheet 40 to be cleaned, and the magnetic clamping posts 60 are driven by the electromagnetic driving type groove wall 20 to adjust the rotation angle.
The rotary pipe 33 is driven by a motor through a gear mechanism, and a liquid inlet pipe is connected with the rotary pipe 33 in a rotary mode. The liquid inlet pipe may be connected to the first cleaning liquid, and after passing through the liquid inlet pipe and the rotary pipe 33 in sequence, the first cleaning liquid finally sprays through the spray hole 311 against the back surface of the to-be-cleaned sheet 40, and the front surface of the to-be-cleaned sheet 40 may be cleaned by using other spraying devices (such as a conventional spray head, an ultrasonic cleaning spray head, etc.), and may be cleaned by using the second cleaning liquid.
The electromagnetic driving type groove wall 20 can drive the magnetic clamping column 60 to rotate, so that the piece 40 to be cleaned can be clamped; in the rotational cleaning process of the sheet 40 to be cleaned, especially in the high-speed rotational cleaning process (for example, the rotational speed reaches more than 1000 r/min), in order to avoid the separation of the sheet 40 to be cleaned from the magnetic clamping posts 60, the impact force generated by the jet flow ejected from the nozzle 311 must be smaller than the set value, and the impact force born by the front surface of the sheet 40 to be cleaned can be theoretically very large and can be much larger than the impact force born by the back surface of the sheet 40 to be cleaned, so that the cleaning effects of the front surface and the back surface of the sheet 40 to be cleaned may be asynchronous or quite different. To compensate for this difference, the vibrating trough bottom 10 is provided and the cleaning process of the rear side of the sheet 40 to be cleaned is improved.
The vibratory groove bottom 10 can provide vibration to enhance the cleaning effect of the back surface of the sheet 40 to be cleaned.
The drain pipe 11 is used for discharging the waste liquid in the washing tank 1.
Example 2
As shown in fig. 1 to 6, the turntable 30 includes an inner disc 31, an outer disc 32 sleeved outside the inner disc 31, and a connecting plate 34 for connecting the inner disc 31 and the outer disc 32, the nozzle 311 is located at the center of the inner disc 31, at least three connecting plates 34 are provided, and a material passing hole 35 is provided between two adjacent connecting plates 34; the magnetic clamping posts 60 are each mounted to the outer edge of the outer disk 32.
The material passing holes 35 are mainly used to enable the material (such as cleaning solution, ice particles in embodiment 3, etc.) at the bottom of the cleaning tank 1 to continuously impact the back of the sheet 40 to be cleaned under the action of turbulence, vibration, etc.
The magnetic clamping column 60 comprises a rotating column 61 and an elastic chuck column 62, the rotating column 61 is rotationally connected with the outer disc 32, and an annular ring structure is arranged on the outer ring of the middle part of the elastic chuck column 62; the elastic collet column 62 includes two axisymmetrically arranged spiked portions 621, the cross section of the tail end of the spiked portions 621 is rectangular, the cross section of the head end of the spiked portions 621 is circular, the side wall between the tail end of the spiked portions 621 and the head end of the spiked portions 621 is a smoothly transitional curved surface structure, and the head ends of the upper and lower spiked portions 621 are connected into a whole; the lower tip portion 621 is integrally connected to the upper end of the rotary column 61, and a rectangular first permanent magnet 622 is embedded in the top end of the upper tip portion 621, and the length direction of the first permanent magnet 622 is parallel to the length direction of the tail end of the tip portion 621.
Wherein, the inner wall of the electromagnetic driving type slot wall 20 is embedded with a plurality of first electromagnets 21, the tail end of the first electromagnets 21 is provided with a cambered surface which is matched with the inner wall of the magnetic driving type slot wall 20, the connecting line between the midpoint of the first electromagnets 21 and the central axis of the electromagnetic driving type slot wall 20 is a datum line, the included angle between the length direction of the first electromagnets 21 and the datum line is gamma, and gamma is an obtuse angle; the number of the first electromagnets 21 is at least 18, and the first electromagnets 21 are symmetrically distributed along the inner wall of the electromagnetic driving type groove wall 20.
First, the number of the first electromagnets 21 is large enough, and the energization thereof can generate a magnetic force repulsive to the first permanent magnets 622, and the rotation of the column 61 can be enabled due to the rectangular structure of the first permanent magnets 622 and the design of the obtuse angle of γ.
In the present embodiment, taking the example that the sheet 40 to be cleaned is rectangular, the number of the magnetic clamping posts 60 must be a multiple of 4. Taking 4 magnetic clamping posts 60 as an example, the first and second prongs 621 are located on one side of the sheet 40 to be cleaned, and the third and fourth prongs 621 are located on the other side of the sheet 40 to be cleaned; initially, the length direction of the first permanent magnet 622 is parallel to the length direction of the sheet 40 to be cleaned, and the sheet 40 to be cleaned can be just put between 4 elastic chuck posts 62 and is located at the annular ring structure; when clamping is required, under the action of magnetic force, the tip portion 621 rotates, that is, the length direction of the first permanent magnet 622 and the length direction of the piece 40 to be cleaned are gradually changed from parallel arrangement to perpendicular arrangement, and due to the rectangular structure, the unique curved surface structure of the side wall of the elastic chuck column 62 can clamp the piece 40 to be cleaned in the rotation process. In addition, due to the annular ring structure, the contact area between the side edge of the sheet 40 to be cleaned and the elastic chuck post 62 is very small, and grooves exist, so that the side edge of the sheet 40 to be cleaned can be cleaned effectively. Wherever the turntable 30 eventually stops, the collet prop 62 can be easily driven to spin as long as the number of first electromagnets 21 is sufficiently large (e.g., 36).
It should be noted that, the elastic chuck post 62 may be made of a nylon elastomer with a hardness of 55-60D, since the cross section of the tail end of the tip portion 621 is rectangular, the cross section of the head end of the tip portion 621 is circular, and the side wall between the tail end of the tip portion 621 and the head end of the tip portion 621 is a curved surface structure with smooth transition, this makes the side wall of the elastic chuck post 62 have a part of four "side edges" with smooth transition, and the "side edges" and the curved surface structure near the side edges can thoroughly clamp the side edges of the piece 40 to be cleaned; at the same time, the contact area between the two is quite small, and enough grooves are reserved to facilitate the flow of liquid.
In this embodiment, the rectangular structure of the to-be-cleaned sheet 40 can be clamped, and as long as the number of the magnetic clamping columns 60 is enough and the to-be-cleaned sheet 40 with rectangular or square structure can be clamped according to symmetrical distribution; at the same time, the rotation of the adjustment magnetic clamping post 60 is not affected.
If the cross section of the trailing end of the spike 621 is square, it will appear that the wafer 40 to be cleaned is not clamped at all times, no matter how much the collet posts 62 are rotated.
Similarly, if the cross section of the tail end of the tip portion 621 is circular, the entire tip portion 621 has a tapered structure, and the cleaning sheet 40 is not clamped all the time no matter how much the elastic chuck post 62 rotates. In addition, if the cross section of the rear end of the tip portion 621 is a regular hexagon or a regular pentagon, there is a case where the sheet 40 to be cleaned is not always gripped regardless of how much the elastic chuck post 62 is rotated.
If the cross section of the tail end of the tip 621 is equilateral triangle, the sheet 40 to be cleaned can be clamped during rotation, but the side edge of the sheet 40 to be cleaned is easily damaged due to too large displacement increment generated during rotation, and especially when the sheet 40 to be cleaned is square or rectangular, cracks can be generated on the sheet 40 to be cleaned if serious.
The cross section of the head end of the tip portion 621 is rectangular or square, the tip portion 621 becomes a rectangular pyramid-shaped structure, the smoothness of the side wall thereof is very poor, the space where the groove is located becomes smaller under the condition of ensuring compression, and the fluxion at the place becomes poor.
Even if the very demanding cleaning process (such as a wafer) is required, only the number of the magnetic clamping columns 60 is a multiple of 8, and the two magnetic clamping columns are alternately arranged, because the first electromagnets 21 are arranged in a ring shape and the number is enough, one half of the magnetic clamping columns 60 can be controlled to perform clamping action, the other half of the magnetic clamping columns 60 do not perform clamping action, and then the alternating clamping mode is adopted in the process of not stopping rotation; in this case, it is required that the sheet 40 to be cleaned should be circular.
Because of the special curved surface structure of the side wall of the tip 621, the clamping effect can be achieved without rotating 360 degrees; in addition, if the rotation of 360 degrees is needed for adjustment, the disorder is very easy to occur in the subsequent practice process, and the repulsive force generated by the rotation of the rotating head can be changed into the attractive force, so that accidents can occur.
The lower end of the rotating post 61 is coaxially connected with a rotating shaft 63, one side of the rotating shaft 63 is fixedly provided with a baffle plate 64, the bottom of the outer disc 32 is provided with a limiting groove 321 used for limiting the moving range of the baffle plate 64, the baffle plate 64 is positioned in the limiting groove 321, and one side of the baffle plate 64 and one side of the limiting groove 321 are provided with an arc-shaped spring 65; the baffle plate 64 has a rotation angle of 0 to 180 ° in the limiting groove 321.
Driven by the magnetic force, the elastic chuck post 62 rotates while the baffle 64 rotates along with the rotation, and the arc spring 65 is compressed; when the magnetic force is removed, the compressed arcuate spring 65 urges the resilient collet prop 62 back to its original position.
The vibrating tank bottom 10 comprises an ultrasonic vibrator 13 fixedly arranged below the vibrating tank bottom 10, a plurality of vibrating bars 50 are arranged above the vibrating tank bottom 10, and the vibrating bars 50 are symmetrically distributed in the cleaning tank 1; the vibrating strip 50 comprises a fixed section 51, a vibrating section 52 and a permanent magnet section 53, wherein the fixed section 51 is fixedly connected with the vibrating tank bottom 10, and an included angle between the length direction of the vibrating section 52 and the surface of the vibrating tank bottom 10 is 0-3.9 degrees; the bottom of the outer disc 32 is embedded with second permanent magnets 322, 1 second permanent magnet 322 is arranged, the motion track of the second permanent magnets 322 and the circle formed by the arrangement of the permanent magnet sections 53 are concentrically arranged, and the motion track of the second permanent magnets 322 is positioned right above the circle formed by the arrangement of the permanent magnet sections 53; the second electromagnet 12 corresponding to the position of the permanent magnet section 53 is embedded at the edge of the vibrating tank bottom 10, the magnetism between the second permanent magnet 322 and the permanent magnet section 53 is in repulsive arrangement, and the second electromagnet 12 is electrified to generate magnetic force repulsive to or attractive to the permanent magnet section 53.
The ultrasonic vibrator 13 can carry out ultrasonic auxiliary cleaning, and the ultrasonic frequency and the cleaning time are specific, so that the cleaning effect is improved. However, the ultrasonic cleaning alone does not additionally significantly improve the cleaning effect of the back surface of the sheet 40 to be cleaned. In the invention, if the cleaning difficulty is very high when the colloidal particles on the surfaces of the LED display screen and the aluminum substrate are cleaned, ice particles with the particle diameter smaller than or equal to 3mm are poured into the cleaning tank 1, then the second permanent magnets 322 intermittently apply repulsive magnetic force to the permanent magnet sections 53 at different positions along with the rotation of the turntable 30, and the vibration sections 52 are obliquely arranged, so that the permanent magnet sections 53 move downwards under the double influence of the repulsive magnetic force applied by the second permanent magnets 322 and/or the magnetic force applied by the second electromagnets 12; after the repulsive magnetic force applied by the second permanent magnet 322 and/or the attractive magnetic force applied by the second electromagnet 12 disappear, the permanent magnet segment 53 moves upwards under the action of the elastic force and/or the repulsive magnetic force applied by the second electromagnet 12; thus, the permanent magnet segment 53 will reciprocate up and down continuously, thereby driving the vibration segment 52 to vibrate continuously. The vibrating strip 50 continuously vibrates, and on one hand, the ice particles are extruded, so that the surrounding ice particles can be continuously lifted up and impacted on the back surface of the cleaning sheet 40 along with water flow, and the cleaning effect on the back surface of the cleaning sheet 40 is improved.
If the jet flow containing the ice particles is finally sprayed out from the spray hole 311 through the rotary pipe 33 to clean the back surface of the piece 40 to be cleaned, firstly, the jet speed at the spray hole 311 is high, and the back surface of the piece 40 to be cleaned is very easy to damage; even if the flow rate is controlled at a low level, the cleaning range is concentrated only in the central region of the sheet 40 to be cleaned, and the cleaning effect on the remaining area is poor.
The current value required by the first electromagnet 21 to drive the shutter 64 through 180 ° of rotation in the limiting groove 321 will also vary, and when γ=129°, the current value required by the first electromagnet 21 is minimum.
Example 3
Based on example 2, when double-sided cleaning is performed on the sheet 40 to be cleaned, ice particles with a particle diameter of less than or equal to 3mm are poured into the cleaning tank 1, and then the sheet 40 to be cleaned is put into the cleaning tank and clamped by the magnetic clamping column 60; the rotating speed value of the rotating disc 30 is v 0 The method comprises the steps of carrying out a first treatment on the surface of the The second electromagnet 12 has an energizing time value t in a single period 1 The power-off time value is t 2 The method comprises the steps of carrying out a first treatment on the surface of the The number of the vibrating strips 50 is n 1 ，t 2 /t 1 ＝3；
When the rotating speed of the turntable is less than or equal to 1080r/min, v 0 ＝70n 1 t 2 ；
When the rotating speed of the turntable is more than 1080r/min, v 0 ＝260n 1 t 2 。
For example, n 1 When the rotation speed of the turntable 30 is v=6 0 When=630, t 2 =1.5, i.e. the power-off time is 1.5s, t 1 ＝0.5。
For example, n 1 When the rotation speed of the turntable 30 is v=6 0 When=1400, t 2 =0.9, i.e. the power-off time is 0.9s, t 1 ＝0.3。
First, if there is no inertial effect, the coefficient should be a multiple of 60 instead of 70, 260; therefore, the adaptation is performed according to the rotation speed of the turntable which is low-speed and high-speed.
If the rotating speed of the turntable is 630r/min, and if the power-off time is set to be 0.9s and the power-on time is set to be 0.3s, the vibration frequency of the vibrating strip 50 is affected, the cleaning is carried out according to the cleaning characterization test, and 86 resin particles (292 resin particles before cleaning) are found to exist after the cleaning is carried out for 3 min; even if the washing time was prolonged, 75 resin particles were found to exist after washing for 10 minutes.
If the rotational speed of the turntable is 1400r/min, and if the power-off time is set to 1.5s and the power-on time is set to 0.5s, the amplitude of the vibrating strip 50 is affected, and after 3min of cleaning, it is found that a slight scratch exists on the copper foil at the edge portion of the aluminum substrate.
After the aluminum substrate was cleaned, resin particles were not found in the edge (region clamped by the magnetic clamping posts 60) region of the aluminum substrate under a 50-fold field of view using a metallographic microscope.
Cleaning characterization test
Selecting an aluminum substrate (diameter is 3 inches) after pretreatment (such as pre-cleaning), controlling the number of resin particles on the front side and the back side of the aluminum substrate to be 280-300, wherein the particle size of the resin particles is less than 0.5mm, observing (50 times) by adopting a metallographic microscope (JS type, automatic counting, available from Jinan Laibao medical instruments Co., ltd.), and counting; the cleaning was performed with a cleaning apparatus (an efficient cleaning apparatus for electronic devices according to the present invention), and after a certain period of time, the cleaning was observed again (50 times) with a metallographic microscope and counted, with a cleaning rate=1—the number of resin particles after cleaning/the number of resin particles before cleaning.
The front surfaces of the aluminum substrates are sprayed and cleaned by adopting conventional spray heads;
comparative example 1
In the example, the vibration bar 50 is not arranged, 2kg of ice particles with the particle size smaller than or equal to 3mm are poured into the cleaning tank, the ultrasonic frequency is 20kHz, and the rotating speed of the rotating disc is 630r/min, so that the cleaning is performed; testing according to a cleaning characterization test, and measuring the cleaning effect of the back surface of the aluminum substrate; the results are shown in Table 1.
Comparative example 2
In this example, ice particles are not poured into the cleaning tank, and the vibration bar 50 is controlled according to the embodiment 3, the ultrasonic frequency is 20kHz, and the rotating speed of the rotating disc is 630r/min, so that the cleaning is performed; testing according to a cleaning characterization test, and measuring the cleaning effect of the back surface of the aluminum substrate; the results are shown in Table 1.
Comparative example 3
2kg of ice particles are poured into the cleaning tank without starting the ultrasonic vibrator 13, and the cleaning is performed by controlling the vibration bar 50 according to the rotating speed 630r/min of the rotating disc in example 3; testing according to a cleaning characterization test, and measuring the cleaning effect of the back surface of the aluminum substrate; the results are shown in Table 1.
Comparative example 4
If the magnetic stirring rotor is adopted to stir the bottom of the cleaning tank 1, 2kg of ice particles are added, the vibrating strip 50 is not arranged, the ultrasonic frequency is 20kHz, and the rotating speed of the rotating disc is 630r/min, so that the cleaning is performed; testing according to a cleaning characterization test, and measuring the cleaning effect of the back surface of the aluminum substrate; the results are shown in Table 1.
Comparative example 5
Only ultrasonic cleaning is carried out, the ultrasonic frequency is 20kHz, the vibrating strip 50 is not arranged, and meanwhile, ice particles are not added; the ultrasonic frequency is 20kHz, and the rotating speed of the rotating disc is 630r/min, so that the cleaning is carried out; testing according to a cleaning characterization test, and measuring the cleaning effect of the back surface of the aluminum substrate; the results are shown in Table 1.
TABLE 1
Example 4
The bearing 71 and the elastic sleeve 72 are embedded in the center of the vibrating tank bottom 10, the elastic sleeve 72 is sleeved outside the bearing 71, and the bearing 71 is sleeved outside the rotary pipe 33. The elastic sleeve 72 is provided to reduce the influence between the vibration counter tube 33 and the bearing 71.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (10)
1. An efficient cleaning device for electronic devices is used for cleaning a piece (40) to be cleaned and comprises a cleaning tank (1) and a rotary table (30) positioned in the cleaning tank (1), and is characterized in that: the cleaning tank (1) comprises an electromagnetic driving tank wall (20) and a vibrating tank bottom (10), a spray hole (311) is formed in the center of the rotary table (30), a rotary pipe (33) is arranged below the rotary table (30), the spray hole (311) is communicated with an inner cavity of the rotary pipe (33), the upper end of the rotary pipe (33) is fixedly connected with the center of the rotary table (30), the lower end of the rotary pipe (33) penetrates through the center of the vibrating tank bottom (10), the lower end of the rotary pipe (33) is located below the vibrating tank bottom (10), and the rotary pipe (33) is in rotary connection with the vibrating tank bottom (10); a plurality of drain pipes (11) are arranged below the vibrating tank bottom (10), and the inner cavity of each drain pipe (11) is communicated with the inner cavity of the corresponding cleaning tank (1); the edge of the turntable (30) is provided with at least four magnetic clamping columns (60) used for clamping the sheet (40) to be cleaned, and the magnetic clamping columns (60) are driven by electromagnetic driving type groove walls (20) to adjust the rotation angle.
2. An electronic device efficient cleaning apparatus as defined in claim 1, wherein: the rotary table (30) comprises an inner disc (31), an outer disc (32) sleeved outside the inner disc (31) and connecting plates (34) used for connecting the inner disc (31) and the outer disc (32), the spray holes (311) are positioned in the center of the inner disc (31), at least three connecting plates (34) are arranged, and a material passing hole (35) is formed between every two adjacent connecting plates (34); the magnetic clamping posts (60) are all mounted on the outer edge of the outer disc (32).
3. An electronic device efficient cleaning apparatus as defined in claim 2, wherein: the magnetic clamping column (60) comprises a rotating column (61) and an elastic chuck column (62), the rotating column (61) is rotationally connected with the outer disc (32), and an annular ring structure is arranged on the outer ring of the middle part of the elastic chuck column (62); the elastic chuck column (62) comprises two axisymmetrically arranged tip parts (621), the cross section of the tail end of each tip part (621) is rectangular, the cross section of the head end of each tip part (621) is circular, the side wall between the tail end of each tip part (621) and the head end of each tip part (621) is of a smoothly transitional curved surface structure, and the head ends of the upper tip part and the lower tip part (621) are connected into a whole; the tip part (621) positioned below is connected with the upper end of the rotary column (61) into a whole, a rectangular first permanent magnet (622) is embedded at the top end of the tip part (621) positioned above, and the length direction of the first permanent magnet (622) is parallel to the length direction of the tail end of the tip part (621).
4. An electronic device efficient cleaning apparatus as defined in claim 1, wherein: the to-be-cleaned sheet (40) is round, rectangular or square.
5. An electronic device efficient cleaning apparatus as defined in claim 3, wherein: the inner wall of the electromagnetic driving type groove wall (20) is embedded with a plurality of first electromagnets (21), the tail end of each first electromagnet (21) is provided with an arc surface matched with the inner wall of the electromagnetic driving type groove wall (20), a connecting line between the middle point of each first electromagnet (21) and the central axis of the electromagnetic driving type groove wall (20) is a datum line, an included angle between the length direction of each first electromagnet (21) and the datum line is gamma, and gamma is an obtuse angle; the number of the first electromagnets (21) is at least 18, and the first electromagnets (21) are symmetrically distributed along the inner wall of the electromagnetic driving type groove wall (20).
6. An electronic device efficient cleaning apparatus as defined in claim 5, wherein: γ=129°.
7. An electronic device efficient cleaning apparatus as defined in claim 3, wherein: the lower end of the rotating column (61) is coaxially connected with a rotating shaft (63), one side of the rotating shaft (63) is fixedly provided with a baffle plate (64), the bottom of the outer disc (32) is provided with a limiting groove (321) used for limiting the movable range of the baffle plate (64), the baffle plate (64) is positioned in the limiting groove (321), and one side of the baffle plate (64) and one side of the limiting groove (321) are provided with an arc-shaped spring (65); the rotation angle of the baffle plate (64) in the limiting groove (321) is 0-180 degrees.
8. An electronic device efficient cleaning apparatus as defined in claim 2, wherein: the vibrating tank bottom (10) comprises an ultrasonic vibrator (13) fixedly arranged below the vibrating tank bottom (10), a plurality of vibrating strips (50) are arranged above the vibrating tank bottom (10), and the vibrating strips (50) are symmetrically distributed in the cleaning tank (1); the vibrating strip (50) comprises a fixed section (51), a vibrating section (52) and a permanent magnet section (53), wherein the fixed section (51) is fixedly connected with the vibrating tank bottom (10), and an included angle between the length direction of the vibrating section (52) and the surface of the vibrating tank bottom (10) is 0-3.9 degrees; the bottom of the outer disc (32) is embedded with second permanent magnets (322), 1 second permanent magnet (322) is arranged, the motion track of the second permanent magnets (322) and the circle formed by the arrangement of the permanent magnet sections (53) are concentrically arranged, and the motion track of the second permanent magnets (322) is positioned right above the circle formed by the arrangement of the permanent magnet sections (53); the side part of the vibrating tank bottom (10) is also embedded with a second electromagnet (12) corresponding to the position of the permanent magnet section (53), the magnetism between the second permanent magnet (322) and the permanent magnet section (53) is in repulsive arrangement, and the second electromagnet (12) is electrified to generate magnetic force which is repulsive or attractive to the permanent magnet section (53).
9. An electronic device efficient cleaning apparatus as defined in claim 8, wherein: when the double-sided cleaning is carried out on the piece (40) to be cleaned, firstly pouring ice particles with the particle size smaller than or equal to 3mm into the cleaning tank (1), then putting the piece (40) to be cleaned into the cleaning tank, and clamping by using the magnetic clamping column (60); the rotating speed value of the rotating disc (30) is v 0 The method comprises the steps of carrying out a first treatment on the surface of the The second electromagnet (12) has an energizing time value t in a single period 1 The power-off time value is t 2 The method comprises the steps of carrying out a first treatment on the surface of the The number of the vibrating strips (50) is n 1 ，t 2 /t 1 ＝3；
When the rotating speed of the turntable is less than or equal to 1080r/min, v 0 ＝70n 1 t 2 ；
When the rotating speed of the turntable is more than 1080r/min, v 0 ＝260n 1 t 2 。
10. An electronic device efficient cleaning apparatus as defined in claim 1, wherein: the bearing (71) and the elastic sleeve (72) are embedded in the center of the vibrating groove bottom (10), the elastic sleeve (72) is sleeved outside the bearing (71), and the bearing (71) is sleeved outside the rotating pipe (33).
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| CN202311337311.2A CN117373953A (en) | 2023-10-16 | 2023-10-16 | High-efficient cleaning equipment of electronic device |
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| CN202311337311.2A CN117373953A (en) | 2023-10-16 | 2023-10-16 | High-efficient cleaning equipment of electronic device |
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| JPH11195630A (en) * | 1997-12-26 | 1999-07-21 | Enya System:Kk | Chuck for brush scrubber |
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| CN209266364U (en) * | 2018-12-12 | 2019-08-16 | 嘉兴中谷半导体有限公司 | A kind of silicon wafer cleaner |
| CN110180810A (en) * | 2019-06-27 | 2019-08-30 | 李静 | A kind of two-sided cleaning equipment of animal doctor's equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11195630A (en) * | 1997-12-26 | 1999-07-21 | Enya System:Kk | Chuck for brush scrubber |
| JP2000334399A (en) * | 1999-05-26 | 2000-12-05 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| JP2006061847A (en) * | 2004-08-27 | 2006-03-09 | Yokohama Machine Service Kk | Apparatus for ultrasonic cleaning/deburring |
| KR20090132966A (en) * | 2008-06-23 | 2009-12-31 | 주식회사 케이씨텍 | Apparatus for holding a substrate |
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