CN117331236A - Crystal monochromator collimation method and crystal monochromator - Google Patents

Abstract

The application discloses a crystal monochromator collimation method and a crystal monochromator, and belongs to the technical field of optical instrument collimation. The collimation method of the crystal monochromator comprises the steps of placing an autocollimator and obtaining a simulated light beam; respectively collimating the link mechanism and the turntable according to the simulated light beam and based on the autocollimator; installing a link mechanism on the turntable, and adjusting the link mechanism to be installed in place according to the simulated light beam and based on the autocollimator; the crystal is mounted on the linkage mechanism, and the crystal is adjusted to be mounted in place according to the analog light beam and based on the autocollimator. The linkage mechanism and the turntable are respectively aligned, and then the linkage mechanism arranged behind the turntable is adjusted, so that the alignment accuracy of all components capable of controlling the movement of crystals is ensured, the alignment is realized only when the crystal monochromator is assembled, the alignment of the turntable and the linkage mechanism when the crystal monochromator is used subsequently is avoided, the use convenience is improved, and the reproduction accuracy is ensured.

Description

Crystal monochromator collimation method and crystal monochromator

Technical Field

The application belongs to the technical field of collimation of optical instruments, and particularly relates to a crystal monochromator collimation method and a crystal monochromator.

Background

A crystal monochromator is a device that separates light emitted from a light source into desired monochromatic light by using a crystal, wherein since it is often necessary to use an internal movement mechanism to adjust the pose of the crystal when separating to form monochromatic light of different wavelengths. However, since the movement mechanism includes at least two movement assemblies, each of which is used to control the movement direction of the crystal, a slight change in the assembly of each movement assembly of the movement mechanism will directly affect the spectroscopic quality. Thus, it is often necessary to collimate the components inside the crystal monochromator before each use thereof, resulting in cumbersome use and difficulty in ensuring reproduction accuracy.

Disclosure of Invention

The present application aims to solve at least one of the technical problems existing in the prior art. Therefore, the crystal monochromator collimation method and the crystal monochromator are provided, and the linkage mechanism and the rotary table are respectively collimated firstly, and then the linkage mechanism arranged behind the rotary table is adjusted, so that the collimation accuracy of all components capable of controlling the movement of crystals is ensured, the collimation is realized only when the crystal monochromator is assembled, the collimation of the rotary table and the linkage mechanism when the crystal monochromator is used subsequently is avoided, the convenience of use is improved, and the reproduction accuracy is ensured.

In a first aspect, the present application provides a crystal monochromator alignment method for aligning a crystal monochromator, where the crystal monochromator includes a turntable, a link mechanism and a crystal that are sequentially connected, the turntable is used for driving the link mechanism to rotate along a first direction, the link mechanism is used for driving the crystal to rotate along a second direction, and the first direction is perpendicular to the second direction, and the crystal monochromator alignment method includes:

placing an autocollimator and obtaining a simulated light beam;

respectively collimating the link mechanism and the turntable according to the simulated light beam and based on the autocollimator;

installing the link mechanism on the turntable, and adjusting the link mechanism to be installed in place according to the simulated light beam and based on the auto-collimator;

and installing the crystal on the link mechanism, and adjusting the crystal to be installed in place according to the analog light beam and based on the auto-collimator.

According to the crystal monochromator collimation method, the linkage mechanism and the rotary table are respectively collimated, and then the linkage mechanism arranged behind the rotary table is adjusted, so that the collimation accuracy of all components capable of controlling the movement of crystals is guaranteed, the collimation is realized only when the crystal monochromator is assembled, the collimation of the rotary table and the linkage mechanism when the crystal monochromator is used subsequently is avoided, the use convenience is improved, and the reproduction accuracy is guaranteed.

According to one embodiment of the application, the simulated light beam comprises a first simulated light beam, the autocollimator comprises a first autocollimator, the autocollimator respectively collimating the linkage and the turntable according to the simulated light beam and based on the autocollimator, comprising:

mounting the link mechanism to a test platform and adjusting the link mechanism to be horizontal;

the right-angle prism is arranged on a crystal installation part of the link mechanism and is used for installing the crystal, the right-angle prism is provided with a first reflecting surface and a second reflecting surface which are vertically connected, the center of the first reflecting surface is positioned on the light path of the first analog light beam, and the first auto-collimator is positioned on the normal line of the second reflecting surface;

rotating the crystal mounting portion to a maximum stroke and obtaining first debugging data through the first autocollimator;

determining a target pose of the right-angle prism according to the first debugging data;

and adjusting the pose of the right-angle prism to the target pose so that the rotation axis of the crystal mounting part is parallel to the first reflecting surface and the second reflecting surface respectively.

According to one embodiment of the application, the simulated light beam further comprises a second simulated light beam, the autocollimator comprises a second autocollimator, the linkage and the turntable are respectively collimated according to the simulated light beam and based on the autocollimator, further comprising:

mounting the turntable to a test platform and adjusting the turntable to be vertical;

installing a plane reflecting mirror to the turntable, wherein the center of the plane reflecting mirror and the second autocollimator are both positioned on the optical path of the second analog light beam;

rotating the plane reflecting mirror to the maximum stroke and obtaining second debugging data through the second autocollimator;

determining a target pose of the second autocollimator according to the second debug data;

adjusting the pose of the second autocollimator to the target pose so that the rotation axis of the plane mirror coincides with the optical path of the second analog light beam;

and removing the plane reflecting mirror.

According to one embodiment of the application, said mounting said linkage to said turret, adjusting said linkage to be mounted in place based on said simulated beam and based on said autocollimator, comprises:

installing the link mechanism on the turntable, and enabling the first reflecting surface to be positioned in the light path of the second analog light beam;

rotating the linkage mechanism to a maximum stroke and obtaining third debugging data through the second autocollimator;

determining a target position of the link mechanism according to the third debugging data;

and adjusting the installation position of the link mechanism to be the target position so that the rotation axis of the link mechanism is perpendicular to the rotation axis of the right angle prism.

According to one embodiment of the application, the analog light beam further comprises a third analog light beam, the autocollimator further comprises a third autocollimator, the adjusting the mounting position of the linkage to the target position further comprises:

adjusting the third autocollimator until the centers of the third autocollimator and the second reflecting surface are both positioned in the optical path of the third analog light beam;

rotating the turntable and obtaining fourth debugging data through the third autocollimator;

judging whether the link mechanism is installed in place or not according to the fourth debugging data.

According to one embodiment of the present application, said mounting said crystal to said linkage mechanism, adjusting said crystal to be mounted in place based on said simulated beam and based on said autocollimator, comprises:

dismantling the right angle prism and installing the crystal to the crystal installation part;

and adjusting the posture of the crystal until the incident light path of the analog light beam, which is emitted to the crystal, and the reflected light path, which is reflected back, coincide.

According to one embodiment of the present application, the crystal monochromator further includes a mounting substrate, the turntable is rotatably mounted on the mounting substrate along the first direction, and the mounting of the link mechanism to the turntable further includes:

mounting the turntable to the mounting substrate;

the mounting of the crystal to the linkage mechanism further comprises:

the installation base plate, the turntable and the link mechanism are integrally installed on a working platform;

and collimating the mounting substrate according to the simulated light beam.

According to one embodiment of the present application, the collimating the mounting substrate according to the simulated beam includes:

and adjusting the mounting substrate until an incident light path of the analog light beam, which is emitted to the reflecting surface of the right-angle prism, and a reflected light path of the analog light beam, are overlapped.

In a second aspect, the present application provides a crystal monochromator obtained based on the above-mentioned method for collimating a crystal monochromator, the crystal monochromator comprising:

a turntable;

the connecting rod mechanism is arranged on the rotary table and is used for rotating along a first direction under the drive of the rotary table;

and the crystal is arranged on the connecting rod mechanism and used for rotating along a second direction under the drive of the connecting rod mechanism, and the first direction is vertical to the second direction.

According to the crystal monochromator, the collimation method of the crystal monochromator is utilized, the connecting rod mechanism and the rotary table are respectively collimated, and then the connecting rod mechanism arranged behind the rotary table is adjusted, so that the collimation accuracy of all components capable of controlling the movement of crystals is ensured, the collimation is realized only when the crystal monochromator is assembled, the collimation of the rotary table and the connecting rod mechanism when the crystal monochromator is used later is avoided, and the repeatability precision is ensured while the convenience of use is improved.

According to one embodiment of the present application, further comprising:

and the rotary table is rotatably arranged on the mounting substrate along the first direction.

Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.

Drawings

The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, wherein:

FIG. 1 is a flow chart of a method for collimating a crystal monochromator provided in an embodiment of the present application;

FIG. 2 is a schematic diagram of a crystal monochromator provided in an embodiment of the present application;

FIG. 3 is a schematic view of a structure of a linkage mechanism provided in an embodiment of the present application without a crystal mount mounted;

FIG. 4 is a schematic view of the optical path of a collimation linkage provided by an embodiment of the present application;

FIG. 5 is a schematic view of an optical path of a collimating turret provided in an embodiment of the present application;

FIG. 6 is a schematic view of an optical path of a linkage mounted on a turntable in alignment as provided by an embodiment of the present application;

fig. 7 is a schematic view of an optical path of a collimation mounting substrate according to an embodiment of the present application.

Reference numerals:

110. a turntable;

120. a link mechanism; 121. a reference surface; 122. a pin hole;

130. a mounting substrate;

201. a first autocollimator; 202. a second autocollimator; 203. a third autocollimator;

301. a first theodolite; 303. a third theodolite; 304. a fourth theodolite;

400. a right angle prism; 401. a first reflecting surface; 402. a second reflecting surface;

500. plane reflecting mirror.

Detailed Description

Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

The following describes a method for collimating a crystal monochromator according to an embodiment of the present application with reference to fig. 1 to 7, where the crystal monochromator includes a turntable 110, a link mechanism 120, and a crystal connected in sequence, the turntable 110 is used to drive the link mechanism 120 to rotate along a first direction, the link mechanism 120 is used to drive the crystal to rotate along a second direction, and the first direction is perpendicular to the second direction.

The crystal monochromator collimation method comprises steps S101, S102, S103 and S104.

S101, placing an autocollimator and obtaining an analog light beam.

In this embodiment, the analog beam may be emitted by the theodolite, or may be emitted by the autocollimator, both of which may emit red laser beams, and may also be used as a reference when the crystal monochromator is internally collimated by using the cross hairs on the eyepiece of the theodolite, or as a reference when the crystal monochromator is internally collimated by the specific size of the reading on the autocollimator. Of course, in other embodiments, the analog beam may also be emitted by a laser emitter, which is not particularly limited in this embodiment. It should be noted that, the theodolite, the laser emitter and the autocollimator are all well known in the art, and are not specifically described herein.

S102, respectively aligning the linkage mechanism 120 and the turntable 110 according to the analog light beam and based on the autocollimator.

It can be understood that, in this embodiment, considering that the linkage mechanism 120 and the turntable 110 control different movement directions of the crystal respectively, the linkage mechanism 120 and the turntable 110 are respectively aligned, so that the alignment of the linkage mechanism 120 and the turntable 110 is ensured, the alignment of the linkage mechanism 120 can drive the crystal to rotate in the second direction, the alignment of the turntable 110 can drive the crystal to rotate in the first direction, and the alignment of the turntable 110 and the linkage mechanism 120 is avoided when the crystal monochromator is assembled, the convenience of use is improved, and the repeatability is ensured.

S103, installing the link mechanism 120 on the turntable 110, and adjusting the link mechanism 120 to be in place according to the simulated light beam and based on the autocollimator.

It will be appreciated that some assembly errors may also occur when the linkage 120 is mounted on the turntable 110, resulting in a certain deviation between the axis of rotation of the mounted crystal on the linkage 120 and the second direction, thereby affecting the use of the crystal at a later stage. The link mechanism 120 is adjusted according to the simulated light beam and based on the autocollimator, so that the rotation axis of the assembled link mechanism 120 driving the crystal and the rotation axis of the turntable 110 driving the link mechanism 120 are respectively overlapped with the corresponding second direction and first direction, the convenience of use is improved, and the reproduction accuracy is ensured.

S104, installing the crystal on the link mechanism 120, and adjusting the crystal to be installed in place according to the analog light beam and based on the auto-collimator.

It will be appreciated that some assembly errors may also occur when the crystal is mounted on the linkage 120, resulting in some deviation between the mounted crystal and the linkage 120, which in turn affects the use of the crystal at a later stage. Therefore, the crystal is adjusted according to the simulated light beam and based on the autocollimator, so that the rotation axis is coincident with the second direction when the posture of the assembled crystal is unchanged, the convenience of use is improved, and the reproduction accuracy is ensured.

According to the crystal monochromator collimation method provided by the embodiment of the application, the linkage mechanism 120 and the turntable 110 are respectively collimated, and then the linkage mechanism 120 arranged behind the turntable 110 is adjusted, so that the collimation accuracy of all components capable of controlling the movement of crystals is ensured, the collimation is realized only when the crystal monochromator is assembled, the collimation of the turntable 110 and the linkage mechanism 120 when the crystal monochromator is used later is avoided, the convenience of use is improved, and the reproduction accuracy is ensured.

In some embodiments, as shown in connection with fig. 4, the simulated light beam comprises a first simulated light beam and the autocollimator comprises a first autocollimator 201, and the step S102 of collimating the linkage 120 and the turntable 110 according to the simulated light beam and based on the autocollimator comprises S10211, S10212, S10213, S10214 and S10215, respectively.

S10211, mounting the linkage 120 to the test platform, and adjusting the linkage 120 to be horizontal.

It should be noted that, since the test platform itself is already debugged, the linkage mechanism 120 is fixed on the test platform, and the level of the reference surface 121 of the linkage mechanism 120 is guaranteed to be uniform, so as to reduce assembly errors as much as possible and improve the accuracy of subsequent collimation. In this embodiment, the height of the test platform is adjustable to accommodate different users and scenarios.

It is understood that the specific steps of adjusting the linkage 120 to the horizontal in S10211 include:

setting a first theodolite 301 and a level, and obtaining a preset height;

the reference surface 121 of the link mechanism 120 is adjusted to be horizontal based on a preset height according to the level gauge.

Specifically, a ceramic gauge block with a size consistent with a preset height is selected as a height reference, and is placed at any position of a reference surface 121 of the link mechanism 120, so that the height of the level is adjusted until the central height of the level is consistent with the height of the top end of the ceramic gauge block, and the level can be regarded as being adjusted. And then sequentially moving the ceramic gauge blocks to the periphery and the center of the reference surface 121, and simultaneously leveling the top ends of the ceramic gauge blocks at the corresponding positions by using a level gauge to obtain the actual heights of the ceramic gauge blocks at all positions, further obtaining the difference between the actual heights at all positions and the preset heights, and adjusting the actual heights of all positions of the reference surface 121 by adjusting the height of a test platform and the like until all the actual heights are consistent with the preset heights, wherein the first simulation light beams emitted by the first theodolite 301 sequentially pass through a plurality of slits arranged at the pin holes 122 of the reference surface 121, so that the reference surface 121 of the link mechanism 120 can be considered to be adjusted to be horizontal.

The second direction is a direction parallel to the normal line of the reference surface 121.

S10212, a right-angle prism 400 is mounted on a crystal mounting part of the link mechanism 120, the crystal mounting part is used for mounting crystals, the right-angle prism 400 is provided with a first reflecting surface 401 and a second reflecting surface 402 which are vertically connected, the center of the first reflecting surface 401 is positioned on the optical path of a first analog light beam, and the first auto-collimator 201 is positioned on the normal line of the second reflecting surface 402.

It can be understood that, after the rectangular prism 400 is installed, the incident light spot of the first analog light beam to the first reflecting surface 401 and the emergent light spot reflected from the first reflecting surface 401 are observed by the first theodolite 301, and the position of the rectangular prism 400 is adjusted to ensure that the incident light spot and the reflecting light spot coincide, so as to ensure that the center of the first reflecting surface 401 is located on the optical path of the first analog light beam, and the first autocollimator 201 is moved to the normal direction of the second reflecting surface 402.

S10213, rotating the crystal mounting part to the maximum stroke and obtaining the first debug data by the first autocollimator 201.

It can be understood that, since the right angle prism 400 is driven to rotate by the crystal mounting portion when the link mechanism 120 is adjusted, a plurality of pitch attitude readings and corresponding horizontal deflection readings can be obtained by the first autocollimator 201 in the process of rotating the crystal mounting portion to the maximum stroke, and each pitch attitude reading corresponds to the movement displacement of the link mechanism 120, that is, the first debug data includes a plurality of pitch attitude readings, corresponding horizontal deflection readings and movement displacement.

S10214, determining the target pose of the rectangular prism 400 according to the first debugging data.

It can be understood that the target pose is determined according to the target motion displacement amount, that is, the target motion displacement amount is selected from the first debug data to have a linear relationship with the corresponding horizontal yaw reading, and the corresponding pitch reading has the smallest change, that is, when the linkage mechanism 120 moves to the target motion displacement amount, the rotation axis of the linkage mechanism 120 is parallel to the second reflection surface 402, and the first reflection surface 401 and the second reflection surface 402 are vertical, that is, the rotation axis of the linkage mechanism 120 is also parallel to the first reflection surface 401.

S10215, the pose of the rectangular prism 400 is adjusted to be the target pose, so that the rotation axes of the crystal mounting parts are respectively parallel to the first reflection surface 401 and the second reflection surface 402.

It will be appreciated that when the linkage 120 moves to the target movement displacement amount, since the rotation axes of the linkage 120 are parallel to the first reflecting surface 401 and the second reflecting surface 402, respectively, it is possible to ensure that the rotation axes of the linkage 120 are aligned until being parallel to the second direction.

The rotation axis of the link mechanism 120 refers to an axis that drives the crystal mounting portion to rotate, and the rotation axis of the turntable 110 refers to an axis that drives the link mechanism 120 to rotate.

In some embodiments, as shown in fig. 5, the analog light beam further includes a second analog light beam, the autocollimator includes a second autocollimator 202, and the step S102 of collimating the linkage 120 and the turntable 110 according to the analog light beam and based on the autocollimator, respectively, further includes S10221, S10222, step S10223, step S10224, step S10225, and step S10226.

Step S10221, mounting the turntable 110 to the test platform, and adjusting the turntable 110 to be vertical.

It should be noted that, the adjustment of the turntable 110 to the vertical direction may refer to the adjustment of the link mechanism 120 to the horizontal direction in the step S10211, which is not specifically described herein. In this embodiment, turntable 110 is adjusted by a second analog beam emitted by a second theodolite.

In step S10222, the plane mirror 500 is mounted to the turntable 110, and the center of the plane mirror 500 and the second autocollimator 202 are both located on the optical path of the second analog beam.

It will be appreciated that after installation of the planar mirror 500, the second autocollimator 202 is moved approximately on the midline extension of the planar mirror 500.

Step S10223, rotating the plane mirror 500 to the maximum stroke and obtaining second debug data through the second autocollimator 202.

It should be noted that, when the turntable 110 is adjusted, the planar mirror 500 is driven to rotate, and the posture of the second auto-collimator 202 is adjusted, so that in the process of rotating the turntable 110 to the maximum stroke (illustratively, rotating the turntable 110 by 360 °), a plurality of pitch posture readings and corresponding absolute postures of the second auto-collimator 202 can be obtained by the second auto-collimator 202, that is, the second debug data includes a plurality of pitch posture readings and the absolute posture of the second auto-collimator 202.

Step S10224, determining the target pose of the second autocollimator 202 according to the second debug data.

It will be appreciated that the absolute attitude of the second autocollimator 202 corresponding to the pitch attitude reading is considered to be the target attitude with the smallest change in pitch attitude reading selected from the second debug data.

In step S10225, the pose of the second auto-collimator 202 is adjusted to the target pose, so that the rotation axis of the plane mirror 500 coincides with the optical path of the second analog light beam.

It will be appreciated that the pose of the second auto-collimator 202 is adjusted to the target pose, and the rotation axis of the plane mirror 500 coincides with the optical path of the second analog beam, so that the rotation axis of the turntable 110 is aligned to be parallel to the first direction, and the second auto-collimator 202 is ensured to be on the rotation axis of the turntable 110.

Step S10226, removing the plane mirror 500.

It will be appreciated that the turntable 110 has been aligned for subsequent installation of the linkage 120 by removal of the planar mirror 500.

In some embodiments, as shown in fig. 6, the mounting of the linkage 120 to the turntable 110 in step S103, according to the simulated beam and based on the auto-collimator adjustment linkage 120, includes:

s1031, installing the link mechanism 120 on the turntable 110, and enabling the first reflecting surface 401 to be positioned in the optical path of the second analog light beam;

s1032, rotating the linkage 120 to the maximum stroke and obtaining third debug data through the second autocollimator 202;

s1033, determining a target position of the link mechanism 120 according to the third debugging data;

s1034, the mounting position of the link mechanism 120 is adjusted to be the target position so that the rotation axis of the link mechanism 120 is perpendicular to the rotation axis of the rectangular prism 400.

It should be understood that after the planar mirror 500 is removed, the collimated linkage mechanism 120 is mounted on the turntable 110, and the first reflecting surface 401 of the rectangular prism 400 on the linkage mechanism 120 and the second autocollimator 202 that has been adjusted to the target position are both located on the optical path of the second analog beam, and then the mounting position of the linkage mechanism 120 on the turntable 110 is adjusted while the turntable 110 rotates the linkage mechanism 120 to the maximum stroke (illustratively, the turntable 110 rotates 360 °), so that a plurality of pitch attitude readings and corresponding mounting positions can be obtained by the second autocollimator 202, that is, the third debug data includes a plurality of pitch attitude readings and corresponding mounting positions. And selecting the installation position corresponding to the pitch attitude reading from the third debugging data, wherein the change of the pitch attitude reading is minimum, and the installation position can be considered as the target position. The mounting position of the link mechanism 120 is then adjusted to the target position so that the first reflecting surface 401 can be considered to be perpendicular to the second analog light beam, i.e., the rotational axis of the turntable 110 is perpendicular to the rotational axis of the link mechanism 120.

In some embodiments, as shown in fig. 6, the analog light beam further includes a third analog light beam, the auto-collimator further includes a third auto-collimator 203, and the adjusting the mounting position of the linkage 120 to the target position in step S1034 further includes:

s1035, adjusting the third autocollimator 203 until the centers of the third autocollimator 203 and the second reflecting surface 402 are both positioned in the optical path of the third analog light beam;

s1036, rotating the turntable 110 and obtaining fourth debugging data through the third autocollimator 203;

s1037, judging whether the link mechanism 120 is installed in place according to the fourth debugging data.

It will be appreciated that moving the third autocollimator 203 to the normal direction of the second reflecting surface 402 of the rectangular prism 400, while rotating the turntable 110, views and obtains pitch readings of the third autocollimator 203, thereby obtaining a plurality of pitch direction readings, corresponding yaw direction readings, and corresponding turntable 110 rotation angles, i.e., the fourth debug data includes a plurality of pitch direction readings, corresponding yaw direction readings, and corresponding turntable 110 rotation angles. When all the yaw direction readings have no obvious change, and the pitch direction readings corresponding to the yaw direction readings and the rotation angle of the turntable 110 are in a linear relationship, the link mechanism 120 can be considered to be installed in place. If there is a significant change in the yaw direction reading and/or the pitch direction reading corresponding to the yaw direction reading and the rotation angle of the turntable 110 do not have a linear relationship, the process returns to step S1032 to continuously adjust the installation position of the link mechanism 120.

In some embodiments, considering that the crystal monochromator further includes a mounting substrate 130, the turntable 110 is rotatably mounted on the mounting substrate 130 along the first direction, the mounting of the link mechanism 120 to the turntable 110 in step S103 further includes:

the turntable 110 is mounted to the mounting substrate 130.

It will be appreciated that since the test platform is calibrated, the mounting substrate 130 may be mounted directly to the test platform for subsequent mounting of the turret 110 and movement of the crystal monochromator as a whole. Of course, in some embodiments, in order to ensure alignment accuracy, the mounting substrate 130 mounted on the test platform may also be aligned, which is not particularly limited in this embodiment.

In some embodiments, the mounting of the crystal to the linkage 120 in step S104 further comprises:

mounting the mounting substrate 130 together with the turntable 110 and the link mechanism 120 integrally to the work platform;

the mounting substrate 130 is collimated according to the analog light beam.

It will be appreciated that since the mounting accuracy of the mounting substrate 130 after mounting to the work platform cannot be ensured, the accuracy of the subsequent alignment of the crystal is ensured by aligning the mounting substrate 130.

In some embodiments, collimating the mounting substrate 130 from the analog light beam includes:

the mounting substrate 130 is adjusted until the incident light path of the analog light beam to the reflection surface of the right angle prism 400 coincides with the reflected light path of the reflected light beam.

It will be appreciated that, as shown in fig. 7, the third theodolite 303 and the fourth theodolite 304 are respectively placed and the fourth analog beam emitted by the third theodolite 303 and the fifth analog beam emitted by the fourth theodolite 304 are perpendicular, and then the mounting substrate 130 is adjusted to ensure that the center of the first reflecting surface 401 and the center of the second reflecting surface 402 are on the optical paths of the fourth analog beam and the fifth analog beam, respectively, and the corresponding incident light coincides with the reflected light, so as to ensure that the mounting substrate 130, the turntable 110 and the link mechanism 120 are integrally aligned to the right. The reflection surfaces of the rectangular prism 400 refer to a first reflection surface 401 and a second reflection surface 402.

In some embodiments, mounting the crystal to linkage 120, adjusting the crystal to be mounted in place based on the simulated beam and based on the autocollimator, includes:

removing the right angle prism 400 and mounting the crystal to the crystal mounting part;

and adjusting the posture of the crystal until the incident light path of the analog light beam to the crystal and the reflected light path of the analog light beam to be reflected back coincide.

It can be understood that the reflecting surface of the crystal is positioned on the light path of the fourth analog light beam or the fifth analog light beam, and the posture of the crystal is adjusted to enable the incident light path to coincide with the reflecting light path, so that the collimation precision of the crystal is ensured.

The embodiment of the application also provides a crystal monochromator which is obtained based on the collimation method of the crystal monochromator.

As shown in fig. 2 and 3, the crystal monochromator includes a turntable 110, a link mechanism 120, and a crystal. The link mechanism 120 is mounted on the turntable 110 and is used for rotating along a first direction under the driving of the turntable 110; the crystal is mounted on the link mechanism 120, and is configured to rotate along a second direction under the driving of the link mechanism 120, where the first direction is perpendicular to the second direction.

The mounting manner of the turntable 110 and the link mechanism 120 and the mounting manner of the crystal and the link mechanism 120 include, but are not limited to, a rivet connection, a screw connection.

According to the crystal monochromator provided by the embodiment of the application, by using the collimation method of the crystal monochromator, the linkage mechanism 120 and the turntable 110 are respectively collimated, and then the linkage mechanism 120 arranged behind the turntable 110 is adjusted, so that the collimation accuracy of all components capable of controlling the movement of crystals is ensured, the collimation is realized only when the crystal monochromator is assembled, the collimation of the turntable 110 and the linkage mechanism 120 when the crystal monochromator is used later is avoided, the convenience of use is improved, and the reproduction accuracy is ensured.

In some embodiments, the crystal monochromator further includes a mounting substrate 130, and the turntable 110 is rotatably mounted on the mounting substrate 130 in a first direction. The material of the mounting substrate 130 includes, but is not limited to, stainless steel, aluminum alloy, titanium alloy, or the like.

The terms first, second and the like in the description and in the claims, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged, as appropriate, such that embodiments of the present application may be implemented in sequences other than those illustrated or described herein, and that the objects identified by "first," "second," etc. are generally of a type and not limited to the number of objects, e.g., the first object may be one or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.

In the description of the present application, "a first feature", "a second feature" may include one or more of the features.

In the description of the present application, the meaning of "plurality" is two or more.

In the description of this application, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, and may also include the first and second features not being in direct contact but being in contact by another feature therebetween.

In the description of this application, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the application, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. The utility model provides a crystal monochromator collimation method for the crystal monochromator, the crystal monochromator includes revolving stage, link mechanism and the crystal that connects gradually, the revolving stage is used for driving link mechanism rotates along first direction, link mechanism is used for driving the crystal rotates along the second direction, just first direction with the second direction is perpendicular, its characterized in that includes:

placing an autocollimator and obtaining a simulated light beam;

respectively collimating the link mechanism and the turntable according to the simulated light beam and based on the autocollimator;

installing the link mechanism on the turntable, and adjusting the link mechanism to be installed in place according to the simulated light beam and based on the auto-collimator;

and installing the crystal on the link mechanism, and adjusting the crystal to be installed in place according to the analog light beam and based on the auto-collimator.

2. The method of claim 1, wherein the analog light beam comprises a first analog light beam, the auto-collimator comprises a first auto-collimator, and the aligning the linkage and the turret according to the analog light beam and based on the auto-collimator, respectively, comprises:

mounting the link mechanism to a test platform and adjusting the link mechanism to be horizontal;

the right-angle prism is arranged on a crystal installation part of the link mechanism and is used for installing the crystal, the right-angle prism is provided with a first reflecting surface and a second reflecting surface which are vertically connected, the center of the first reflecting surface is positioned on the light path of the first analog light beam, and the first auto-collimator is positioned on the normal line of the second reflecting surface;

rotating the crystal mounting portion to a maximum stroke and obtaining first debugging data through the first autocollimator;

determining a target pose of the right-angle prism according to the first debugging data;

and adjusting the pose of the right-angle prism to the target pose so that the rotation axis of the crystal mounting part is parallel to the first reflecting surface and the second reflecting surface respectively.

3. The method of claim 2, wherein the analog light beam further comprises a second analog light beam, the auto-collimator comprising a second auto-collimator, the collimating the linkage and the turret, respectively, based on the auto-collimator and in accordance with the analog light beam, further comprising:

mounting the turntable to a test platform and adjusting the turntable to be vertical;

installing a plane reflecting mirror to the turntable, wherein the center of the plane reflecting mirror and the second autocollimator are both positioned on the optical path of the second analog light beam;

rotating the plane reflecting mirror to the maximum stroke and obtaining second debugging data through the second autocollimator;

determining a target pose of the second autocollimator according to the second debug data;

adjusting the pose of the second autocollimator to the target pose so that the rotation axis of the plane mirror coincides with the optical path of the second analog light beam;

and removing the plane reflecting mirror.

4. A method of aligning a crystal monochromator according to claim 3, wherein said mounting said linkage to said turret, adjusting said linkage to be mounted in place based on said simulated beam and based on said autocollimator, comprises:

installing the link mechanism on the turntable, and enabling the first reflecting surface to be positioned in the light path of the second analog light beam;

rotating the linkage mechanism to a maximum stroke and obtaining third debugging data through the second autocollimator;

determining a target position of the link mechanism according to the third debugging data;

and adjusting the installation position of the link mechanism to be the target position so that the rotation axis of the link mechanism is perpendicular to the rotation axis of the right angle prism.

5. The method of claim 4, wherein the analog light beam further comprises a third analog light beam, the auto-collimator further comprises a third auto-collimator, and the adjusting the mounting position of the linkage to the target position further comprises:

adjusting the third autocollimator until the centers of the third autocollimator and the second reflecting surface are both positioned in the optical path of the third analog light beam;

rotating the turntable and obtaining fourth debugging data through the third autocollimator;

judging whether the link mechanism is installed in place or not according to the fourth debugging data.

6. The method of claim 2, wherein said mounting said crystal to said linkage adjusts said crystal to be mounted in place based on said simulated beam and based on said autocollimator, comprising:

dismantling the right angle prism and installing the crystal to the crystal installation part;

and adjusting the posture of the crystal until the incident light path of the analog light beam, which is emitted to the crystal, and the reflected light path, which is reflected back, coincide.

7. The method of aligning a crystal monochromator according to any one of claims 1 to 6, further comprising a mounting base plate, the turntable being rotatably mounted on the mounting base plate in the first direction, the mounting the link mechanism to the turntable further comprising, before:

mounting the turntable to the mounting substrate;

the mounting of the crystal to the linkage mechanism further comprises:

the installation base plate, the turntable and the link mechanism are integrally installed on a working platform;

and collimating the mounting substrate according to the simulated light beam.

8. The method of claim 7, wherein said collimating the mounting substrate from the analog light beam comprises:

and adjusting the mounting substrate until an incident light path of the analog light beam, which is emitted to the reflecting surface of the right-angle prism, and a reflected light path of the analog light beam, are overlapped.

9. A crystal monochromator obtainable on the basis of the method of collimation of a crystal monochromator according to any one of claims 1 to 8, comprising:

a turntable;

the connecting rod mechanism is arranged on the rotary table and is used for rotating along a first direction under the drive of the rotary table;

and the crystal is arranged on the connecting rod mechanism and used for rotating along a second direction under the drive of the connecting rod mechanism, and the first direction is vertical to the second direction.

10. The crystal monochromator of claim 9, further comprising:

and the rotary table is rotatably arranged on the mounting substrate along the first direction.