CN114923438A - Optical measurement system and measurement method for rotation precision of rotating shaft - Google Patents

Optical measurement system and measurement method for rotation precision of rotating shaft Download PDF

Info

Publication number
CN114923438A
CN114923438A CN202210547866.9A CN202210547866A CN114923438A CN 114923438 A CN114923438 A CN 114923438A CN 202210547866 A CN202210547866 A CN 202210547866A CN 114923438 A CN114923438 A CN 114923438A
Authority
CN
China
Prior art keywords
rotating shaft
plane mirror
adjusting device
autocollimator
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210547866.9A
Other languages
Chinese (zh)
Inventor
裴国庆
张朗
林春刚
徐旭
唐军
张瑶
王德恩
叶朗
王方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laser Fusion Research Center China Academy of Engineering Physics
Original Assignee
Laser Fusion Research Center China Academy of Engineering Physics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laser Fusion Research Center China Academy of Engineering Physics filed Critical Laser Fusion Research Center China Academy of Engineering Physics
Priority to CN202210547866.9A priority Critical patent/CN114923438A/en
Publication of CN114923438A publication Critical patent/CN114923438A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses an optical measuring system and a measuring method for rotation precision of a rotating shaft, wherein the optical measuring system comprises the rotating shaft which is arranged on equipment in a rotating mode, a plane reflector is arranged at one end of the rotating shaft through a plane mirror adjusting device and is positioned outside the rotating shaft, a reflecting surface of the plane reflector is back to the end surface of the rotating shaft, a multidirectional adjusting device is arranged outside the reflecting surface of the plane reflector, an autocollimator is arranged on the multidirectional adjusting device, an emergent light beam of the autocollimator faces the plane reflector, and the multidirectional adjusting device is used for adjusting the position and the posture of the autocollimator. The invention has the beneficial effects that: the measuring system is simple, measurement is carried out based on an optical principle, the installation angle of the plane reflector used as the optical mark of the rotating shaft is calibrated, then the jumping angle of the rotating shaft is measured, the influence of error factors caused by personnel operation is minimized, and compared with a physical ruler measuring method, the measuring method is higher in accuracy and suitable for measuring the rotating precision of rotating shafts with various sizes.

Description

Optical measurement system and measurement method for rotation precision of rotating shaft
Technical Field
The invention belongs to the technical field of high-precision mechanical assembly, relates to rotation precision measurement, and particularly relates to a rotating shaft rotation precision optical measurement system and a rotating shaft rotation precision optical measurement method.
Background
In the process of assembling and debugging mechanical equipment, the high-precision assembling of a rotating shaft is a very important item. The assembly precision of the rotating shaft often determines the overall performance of the equipment, for example, the rotation precision of the motor rotating shaft on a machine tool determines the upper limit of the processing precision, and as in some large high-load equipment, the rotating shaft bears extremely high load during working, and the assembly precision of the rotating shaft affects the service life of the equipment. The rotating shaft of a large centrifuge can often bear the acceleration of hundreds of g values, and when the assembly deviation of the rotating shaft is large, major safety accidents such as the breakage of the rotating shaft can be caused. In the traditional method for measuring the rotating assembly precision of the rotating shaft, if a dial indicator is adopted for measurement, the measured result is the radial runout, in recent years, some reports of methods for measuring the rotating assembly precision of the rotating shaft through a displacement sensor are reported, and the measured result is also the detected radial runout, so that the angular error of the rotating shaft cannot be accurately evaluated.
Disclosure of Invention
In view of the above, one of the objectives of the present invention is to provide an optical measuring system and a measuring method for rotation precision of a rotating shaft.
The technical scheme is as follows:
a kind of spindle rotation accuracy optical measurement system, including the spindle that can be mounted on apparatus autorotatively, its key lies in, one end of the said spindle installs the adjusting device of the level crossing, install the level crossing mirror on the adjusting device of the level crossing, the level crossing mirror locates outside the said spindle and its reflecting surface faces away from the terminal surface of the said spindle, the said level crossing adjusting device is used for regulating the angle of the reflecting surface of the said level crossing mirror and axial lead of the said spindle;
the plane mirror is characterized in that a multi-directional adjusting device is arranged outside a reflecting surface of the plane mirror, an autocollimator is arranged on the multi-directional adjusting device, an emergent light beam of the autocollimator faces the plane mirror, and the multi-directional adjusting device is used for adjusting the position and the posture of the autocollimator.
Preferably, the plane mirror adjusting device is a two-dimensional angle adjusting table.
Preferably, the multi-directional adjustment device includes a five-dimensional adjustment stage fixed to the optical stage.
The second objective of the present invention is to provide a method for measuring the rotation precision of a rotating shaft.
The technical scheme is as follows:
the key point of the method for measuring the rotation precision of the rotating shaft is that the method is carried out according to the following steps,
s1, setting the rotating shaft rotation precision optical measuring system;
s2, calibrating the angle of the plane mirror: opening a switch of the autocollimator, adjusting the multidirectional adjusting device to enable light beams emitted by the autocollimator to irradiate the plane mirror, and adjusting the posture of the plane mirror through the plane mirror adjusting device according to the jumping quantity of a return light cross wire when the rotating shaft rotates until the jumping of the return light cross wire is minimum, wherein the reflecting surface of the plane mirror is considered to be perpendicular to the shaft axis of the rotating shaft at the moment;
s3, rotation accuracy measurement: and adjusting the posture of the autocollimator by adjusting the multidirectional adjusting device to enable the return light cross wire and the emergent light cross wire to be superposed, then enabling the rotating shaft to rotate, and obtaining the rotation angle error of the rotating shaft according to the jumping value of the return light cross wire.
Preferably, step S2 includes:
s21, calibrating the optical system: keeping the rotating shaft still; opening a switch of the autocollimator, and adjusting the multidirectional adjusting device to enable light beams emitted by the autocollimator to irradiate the plane mirror, wherein the return light cross wires and the emergent light cross wires are overlapped;
s22, detecting the angle of the plane mirror: rotating the rotating shaft and driving the plane mirror to rotate, forming a circular or nearly circular track on the autocollimator by the return light cross wires, and fitting the shape and the center position of a fitting circle according to the track;
s23, plane mirror angle adjustment: adjusting the plane mirror adjusting device to adjust the angle of the plane mirror so that the return light cross is close to the center of the fitting circle in step S22;
and S24, repeating the steps S22 and S23 until the diameter of the fitting circle of the return cross hair is minimum, and considering that the reflecting surface of the plane mirror is perpendicular to the axis of the rotating shaft.
As a preferred technical solution, in the step S22, the specific process of calculating the shape and the center position of the fitting circle according to the trajectory fitting includes:
establishing a coordinate system by using a detection plane of a collimator, selecting n points on the track, measuring the angular coordinates of the n points, converting the n points into rectangular coordinates, and marking the ith point as (x) i ,y i ) Wherein n is 3;
general formula x substituting rectangular coordinates of points into a circle 2 +y 2 + Dx + Ey + F equals 0, resulting in n equations
Figure BDA0003649872770000031
And calculating to obtain the value of the unknown D, E, F so as to obtain a fitting circular equation, and calculating the coordinates of the circle center.
As a preferred technical scheme, in the step S22, a least square method is adopted for fitting, n points on the trajectory are uniformly selected, and n is an integer greater than or equal to 4;
firstly, the ith point (x) on the track is ordered i ,y i ) To the edge of the fitted circle by a distance of
Figure BDA0003649872770000032
The sum of the squares of the distances of the points on said trajectory to the edges of the fitted circle is a function
Figure BDA0003649872770000033
Coordinates (x) of 1 st to n th coordinate points i ,y i ) By substituting the above-mentioned function into the above-mentioned function,
the partial derivative is then calculated at D, E, F for the P (D, E, F) function, making the partial derivative equal to 0, and the following equation is formed:
Figure BDA0003649872770000034
Figure BDA0003649872770000035
Figure BDA0003649872770000041
the system of equations above is solved to obtain the value of D, E, F, and thus the equation to fit the circle.
Compared with the prior art, the invention has the following beneficial effects: the measuring system is simple, measurement is carried out based on an optical principle, the installation angle of the plane reflector used as the optical mark of the rotating shaft is firstly calibrated, then the jumping angle of the rotating shaft is measured, the influence of error factors introduced by personnel operation is minimized, the accuracy is higher than that of a physical ruler measuring method, and the method is suitable for measuring the rotating precision of rotating shafts with various sizes.
Drawings
FIG. 1 is a schematic view of an optical measurement system of the present invention;
FIG. 2 is a flow chart of a measurement method of the present invention.
Detailed Description
The present invention will be further described with reference to the following examples and the accompanying drawings.
As shown in fig. 1, an optical measurement system for rotation precision of a rotating shaft includes a rotating shaft 1 rotatably installed on a device, a plane mirror adjusting device 2 is installed at one end of the rotating shaft 1, a plane mirror 3 is installed on the plane mirror adjusting device 2, the plane mirror 3 is located outside the rotating shaft 1, and a reflecting surface of the plane mirror 3 faces away from an end surface of the rotating shaft 1, and the plane mirror adjusting device 2 is used for adjusting an angle between the reflecting surface of the plane mirror 3 and an axial lead of the rotating shaft 1, that is, adjusting a two-dimensional plane angle.
A multi-directional adjusting device 5 is arranged outside the reflecting surface of the plane mirror 3, an autocollimator 4 is arranged on the multi-directional adjusting device 5, the emergent light beam of the autocollimator 4 faces the plane mirror 3, and the multi-directional adjusting device 5 is used for adjusting the position and the posture of the autocollimator 4 so as to adjust the height and the emergent angle of the emergent light beam.
The plane mirror adjusting means 2 may be a two-dimensional angle adjusting stage.
The multi-directional adjustment device 5 comprises a five-dimensional adjustment stage, which is fixed on an optical platform 6.
The two-dimensional angle adjusting table and the five-dimensional adjusting table are both existing mature devices.
The system measures the rotation precision of the rotating shaft by an optical system consisting of the plane mirror 3 and the autocollimator 4. The following specifically describes a method of performing measurement based on the above system.
Referring to fig. 2, a method for measuring the rotation accuracy of a rotating shaft is performed according to the following steps:
s1, setting the rotation precision optical measuring system of the rotating shaft;
s2, plane mirror angle calibration: opening a switch of the autocollimator 4, adjusting the multidirectional adjusting device 5 to enable light beams emitted by the autocollimator 4 to irradiate the plane mirror 3, and adjusting the posture of the plane mirror 3 through the plane mirror adjusting device 2 according to the jumping quantity of a return light cross wire when the rotating shaft 1 rotates until the jumping quantity of the return light cross wire is minimum, wherein the reflecting surface of the plane mirror 3 is considered to be perpendicular to the axial lead of the rotating shaft 1;
s3, rotation accuracy measurement: the posture of the autocollimator 4 is adjusted by adjusting the multidirectional adjusting device 5, so that the return light cross filament and the emergent light cross filament are superposed, then the rotating shaft 1 is rotated, and the jumping value of the return light cross filament is obtained, and the jumping value of the return light cross filament is the rotating angle error of the rotating shaft 1.
In one embodiment, step S2 includes:
s21, calibrating the optical system: keeping the rotating shaft 1 still; opening a switch of the autocollimator 4, and adjusting the multidirectional adjusting device 5 to enable light beams emitted by the autocollimator 4 to irradiate the plane mirror 3, wherein the return light cross wires and the emergent light cross wires are overlapped;
s22, detecting the angle of the plane mirror: the rotating shaft 1 is rotated to drive the plane mirror 3 to rotate, and at the moment, a return light cross wire forms a circular or nearly circular track on the autocollimator 4, and the shape and the circle center position of a fitting circle are fitted according to the track; the fitting circle reflects the angle between the reflecting surface of the plane reflector 3 and the axial lead of the rotating shaft 2;
s23, adjusting the angle of the plane mirror: adjusting the plane mirror adjusting device 2 to adjust the angle of the plane mirror 3 so that the return light cross is close to the center of the fitting circle in step S22;
and S24, repeating the steps S22 and S23 until the diameter of the fitting circle of the return light cross wire is minimum, namely the bounce of the return light cross wire is minimum, and the return light cross wire is located at the center of the fitting circle in an ideal state. In this case, the reflecting surface of the plane mirror 3 is considered to be perpendicular to the axis of the rotating shaft 1.
In step S22, the specific process of calculating the shape and the center position of the fitting circle according to the trajectory fitting includes:
establishing a coordinate system by using a detection plane of a collimator, namely a differentiation plate, selecting n points on the track, measuring the angular coordinates of the n points, converting the n points into rectangular coordinates, and marking the ith point as (x) i ,y i ) Wherein n is 3;
general formula x substituting rectangular coordinates of points into a circle 2 +y 2 + Dx + Ey + F equals 0, resulting in n equations
Figure BDA0003649872770000061
And calculating to obtain the value of the unknown D, E, F so as to obtain a fitting circular equation, and calculating the coordinates of the circle center.
In order to more accurately find the value D, E, F, in a preferred embodiment, in step S22, a least square method is used for fitting, and n points on the trajectory are uniformly selected for calculation, where n is greater than or equal to 4 and is an integer:
firstly, the ith point (x) on the track is ordered i ,y i ) A distance of
Figure BDA0003649872770000062
The sum of the squares of the distances of the points on the trajectory to the edges of the fitted circle is a function
Figure BDA0003649872770000063
Coordinates (x) of 1 st to n th coordinate points i ,y i ) By substituting the above-mentioned function into the above-mentioned function,
the parameter D, E, F is then evaluated to minimize the value of P (D, E, F). Specifically, D, E, F for the P (D, E, F) function is partially differentiated, making the partial derivative equal to 0, which constitutes the following system of equations:
Figure BDA0003649872770000064
Figure BDA0003649872770000065
Figure BDA0003649872770000066
the system of equations above is solved to obtain the value of D, E, F, and thus the equation to fit the circle.
Finally, it should be noted that the above-mentioned description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.

Claims (7)

1. An optical measurement system for rotation accuracy of a rotating shaft comprises the rotating shaft (1) which is arranged on equipment in a rotation way, and is characterized in that: a plane mirror adjusting device (2) is installed at one end of the rotating shaft (1), a plane mirror (3) is installed on the plane mirror adjusting device (2), the plane mirror (3) is located outside the rotating shaft (1), the reflecting surface of the plane mirror (3) is back to the end surface of the rotating shaft (1), and the plane mirror adjusting device (2) is used for adjusting the angle between the reflecting surface of the plane mirror (3) and the axial lead of the rotating shaft (1);
the plane mirror is characterized in that a multidirectional adjusting device (5) is arranged outside the reflecting surface of the plane mirror (3), an autocollimator (4) is arranged on the multidirectional adjusting device (5), the emergent light beam of the autocollimator (4) faces the plane mirror (3), and the multidirectional adjusting device (5) is used for adjusting the position and the posture of the autocollimator (4).
2. The optical measurement system for rotation accuracy of a rotation shaft according to claim 1, wherein: the plane mirror adjusting device (2) is a two-dimensional angle adjusting table.
3. An optical measurement system for rotational accuracy of a shaft as defined in claim 1 or 2, wherein: the multidirectional adjusting device (5) comprises a five-dimensional adjusting table which is fixed on an optical platform (6).
4. A method for measuring the rotation precision of a rotating shaft is characterized by comprising the following steps:
s1, setting the rotating shaft rotation precision optical measurement system according to any one of claims 1-3;
s2, calibrating the angle of the plane mirror: opening a switch of the autocollimator (4), adjusting the multidirectional adjusting device (5) to enable light beams emitted by the autocollimator (4) to irradiate the plane mirror (3), and adjusting the posture of the plane mirror (3) through the plane mirror adjusting device (2) according to the jumping quantity of a return light cross wire when the rotating shaft (1) rotates until the jumping quantity of the return light cross wire is minimum, wherein the reflecting surface of the plane mirror (3) is considered to be perpendicular to the axial lead of the rotating shaft (1);
s3, rotation accuracy measurement: the posture of the autocollimator (4) is adjusted by adjusting the multidirectional adjusting device (5), so that the return light cross wire and the emergent light cross wire are superposed, then the rotating shaft (1) is rotated, and the rotation angle error of the rotating shaft (1) is obtained according to the jumping value of the return light cross wire.
5. The method according to claim 4, wherein the step S2 includes:
s21, calibrating the optical system: keeping the rotating shaft (1) still; opening a switch of the autocollimator (4), and adjusting the multidirectional adjusting device (5) to enable light beams emitted by the autocollimator (4) to irradiate the plane mirror (3), and the return light cross hairs and the emergent light cross hairs are superposed;
s22, detecting the angle of the plane mirror: the rotating shaft (1) is rotated to drive the plane mirror (3) to rotate, at the moment, the return light cross wire forms a circular or nearly circular track on the autocollimator (4), and the shape and the circle center position of a fitting circle are fitted according to the track;
s23, adjusting the angle of the plane mirror: adjusting the plane mirror adjusting device (2) to adjust the angle of the plane mirror (3) so that the return light cross is close to the center of the fitting circle in step S22;
and S24, repeating the steps S22 and S23 until the diameter of the fitting circle of the return light cross wire is minimum, and considering that the reflecting surface of the plane mirror (3) is perpendicular to the axis of the rotating shaft (1).
6. The method of measuring rotational accuracy of a rotating shaft according to claim 5, wherein: in step S22, the specific process of calculating the shape and the center position of the fitting circle according to the trajectory fitting includes:
establishing a coordinate system by using a detection plane of a collimator, selecting n points on the track, measuring the angular coordinates of the n points, converting the n points into rectangular coordinates, and marking the ith point as (x) i ,y i ) Wherein n is 3;
general formula x substituting rectangular coordinates of points into a circle 2 +y 2 + Dx + Ey + F equals 0, resulting in n equations
Figure FDA0003649872760000021
And calculating to obtain the value of the unknown D, E, F so as to obtain a fitting circular equation, and calculating the coordinates of the circle center.
7. The method of claim 5, wherein the step of measuring the rotational accuracy of the spindle comprises: in the step S22, fitting is carried out by adopting a least square method, n points on the track are uniformly selected, and n is an integer which is not less than 4;
firstly, the ith point (x) on the track is ordered i ,y i ) To the edge of the fitted circle by a distance of
Figure FDA0003649872760000022
The sum of the squares of the distances of the points on the trajectory to the edges of the fitted circle is a function
Figure FDA0003649872760000031
Coordinates (x) of 1 st to n th coordinate points i ,y i ) By substituting the above-mentioned function into the above-mentioned function,
the partial derivative is then calculated at D, E, F for the P (D, E, F) function, making the partial derivative equal to 0, and the following equation is formed:
Figure FDA0003649872760000032
Figure FDA0003649872760000033
Figure FDA0003649872760000034
the system of equations above is solved to obtain the value of D, E, F, and thus the equation to fit the circle.
CN202210547866.9A 2022-05-18 2022-05-18 Optical measurement system and measurement method for rotation precision of rotating shaft Pending CN114923438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210547866.9A CN114923438A (en) 2022-05-18 2022-05-18 Optical measurement system and measurement method for rotation precision of rotating shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210547866.9A CN114923438A (en) 2022-05-18 2022-05-18 Optical measurement system and measurement method for rotation precision of rotating shaft

Publications (1)

Publication Number Publication Date
CN114923438A true CN114923438A (en) 2022-08-19

Family

ID=82808687

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210547866.9A Pending CN114923438A (en) 2022-05-18 2022-05-18 Optical measurement system and measurement method for rotation precision of rotating shaft

Country Status (1)

Country Link
CN (1) CN114923438A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105698713A (en) * 2016-01-27 2016-06-22 西安应用光学研究所 An apparatus for calibrating a revolving axis of a precision shaft system and a calibrating method
CN109520446A (en) * 2018-12-14 2019-03-26 中国航空工业集团公司北京长城航空测控技术研究所 A kind of measurement method of revolution at a high speed shafting dynamic inclination error
CN113324514A (en) * 2021-05-21 2021-08-31 安徽创谱仪器科技有限公司 Rotating shaft debugging method and debugging assembly

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105698713A (en) * 2016-01-27 2016-06-22 西安应用光学研究所 An apparatus for calibrating a revolving axis of a precision shaft system and a calibrating method
CN109520446A (en) * 2018-12-14 2019-03-26 中国航空工业集团公司北京长城航空测控技术研究所 A kind of measurement method of revolution at a high speed shafting dynamic inclination error
CN113324514A (en) * 2021-05-21 2021-08-31 安徽创谱仪器科技有限公司 Rotating shaft debugging method and debugging assembly

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
北京林学院数学教研组: "《振动结构模态分析 理论实验与应用 第2版》", 北京:中国林业出版社, pages: 118 - 119 *

Similar Documents

Publication Publication Date Title
CN109141223B (en) PSD-based laser interferometer light path efficient and accurate calibration method
CN107144248B (en) A kind of scaling method of numerically-controlled machine tool turntable error
JP6644146B2 (en) Method for inspecting and / or calibrating the vertical axis of a rotating laser
CN110926364B (en) Blade detection method based on line structured light
WO1995000819A1 (en) Method and apparatus for finding wafer index marks and centers
WO2008067561A2 (en) Interior contour measurement probe
US20100162566A1 (en) Tool, tool set and method of setting the pitch of the blades of a model propeller
JPH07148682A (en) Device and method for calibrating central point of tool
CN110926365B (en) Line structure-based optical detector marking method
CN107091608B (en) A kind of five degree of freedom measurement method of parameters based on primary standard of curved surface part
CN112013797B (en) Method for calibrating spatial revolution axis based on cylinder and line structured light and application thereof
CN108196377B (en) Scanning mechanism light path debugging device and method
US10921107B2 (en) Lens-measuring machine and lens-measurement method
CN113324514B (en) Rotating shaft debugging method and debugging assembly
CN109974579A (en) The caliberating device of optics paraboloid of revolution standard array center distance
CN114923438A (en) Optical measurement system and measurement method for rotation precision of rotating shaft
US4776101A (en) Method and apparatus for testing aspherical lenses
CN116007532A (en) Device for adjusting swing arm type contour measuring instrument by mechanical arm and error calibration method
CN110631523B (en) Device and method for measuring position error between shafts of precise two-dimensional rotary table
CN209541665U (en) The caliberating device of optics paraboloid of revolution standard array center distance
CN107238353B (en) A kind of rotation angle measuring method based on primary standard of curved surface part
CN114646944A (en) Laser radar calibration device and calibration method
CN111272095A (en) High-precision two-dimensional position sensor centering detection device and method
CN110057288A (en) The scaling method of optics paraboloid of revolution standard array center distance
CN113933029B (en) Processing detection system and manufacturing method for off-axis aspheric element

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination