CN117222874A - 红外线传感器以及红外线传感器的制造方法 - Google Patents

红外线传感器以及红外线传感器的制造方法 Download PDF

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Publication number
CN117222874A
CN117222874A CN202280032037.5A CN202280032037A CN117222874A CN 117222874 A CN117222874 A CN 117222874A CN 202280032037 A CN202280032037 A CN 202280032037A CN 117222874 A CN117222874 A CN 117222874A
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CN
China
Prior art keywords
photonic crystal
layer
holes
infrared sensor
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280032037.5A
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English (en)
Chinese (zh)
Inventor
高桥宏平
藤金正树
中村邦彦
姫野敦史
反保尚基
中田裕贵
田中浩之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN117222874A publication Critical patent/CN117222874A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0814—Particular reflectors, e.g. faceted or dichroic mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G01J5/14—Electrical features thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/184—Infrared image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
CN202280032037.5A 2021-05-11 2022-04-19 红外线传感器以及红外线传感器的制造方法 Pending CN117222874A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-080450 2021-05-11
JP2021080450 2021-05-11
PCT/JP2022/018144 WO2022239611A1 (ja) 2021-05-11 2022-04-19 赤外線センサ及び赤外線センサの製造方法

Publications (1)

Publication Number Publication Date
CN117222874A true CN117222874A (zh) 2023-12-12

Family

ID=84029563

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280032037.5A Pending CN117222874A (zh) 2021-05-11 2022-04-19 红外线传感器以及红外线传感器的制造方法

Country Status (5)

Country Link
US (1) US20240060824A1 (https=)
EP (1) EP4339568A4 (https=)
JP (1) JPWO2022239611A1 (https=)
CN (1) CN117222874A (https=)
WO (1) WO2022239611A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022102827A (ja) * 2020-12-25 2022-07-07 パナソニックＩｐマネジメント株式会社 赤外線センサ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04158583A (ja) * 1990-10-22 1992-06-01 Matsushita Electric Works Ltd 赤外線検出素子
JPH0767151B2 (ja) * 1993-02-25 1995-07-19 日本電気株式会社 赤外線撮像装置
JP2674545B2 (ja) * 1995-01-20 1997-11-12 日本電気株式会社 赤外線検出器及びその駆動方法
JP4661207B2 (ja) * 2004-12-20 2011-03-30 日産自動車株式会社 赤外線センサの製造方法
JP2008026124A (ja) * 2006-07-20 2008-02-07 Matsushita Electric Ind Co Ltd 熱型赤外線センサ
JP2011179953A (ja) * 2010-03-01 2011-09-15 Rohm Co Ltd 赤外線センサ
US20200191655A1 (en) * 2018-12-15 2020-06-18 William N. Carr Photonic- and Phononic-structured pixel for electromagnetic radiation and detection
US9417465B2 (en) 2013-04-07 2016-08-16 The Regents Of The University Of Colorado, A Body Corporate Nanophononic metamaterials
GB201322970D0 (en) * 2013-12-24 2014-02-12 Melexis Technologies Nv Etching of infrared sensor membrane
JP2015161642A (ja) * 2014-02-28 2015-09-07 セイコーエプソン株式会社 焦電型光検出器、焦電型光検出装置、電子機器
WO2015193759A1 (en) * 2014-06-18 2015-12-23 Technion Research And Development Foundation Ltd. Sensor array with self-aligned optical cavities
US20160079306A1 (en) * 2014-09-12 2016-03-17 Excelitas Technologies Singapore Pte. Ltd. Surface Micro-Machined Infrared Sensor Using Highly Temperature Stable Interferometric Absorber
JP6311133B2 (ja) 2016-06-13 2018-04-18 パナソニックＩｐマネジメント株式会社 赤外線センサ
US10199424B1 (en) 2017-07-19 2019-02-05 Meridian Innovation Pte Ltd Thermoelectric-based infrared detector having a cavity and a MEMS structure defined by BEOL metals lines
US10403674B2 (en) * 2017-07-12 2019-09-03 Meridian Innovation Pte Ltd Scalable thermoelectric-based infrared detector
JP7232978B2 (ja) * 2017-12-11 2023-03-06 パナソニックＩｐマネジメント株式会社 赤外線センサおよび赤外線センサのボロメータ赤外線受光部を冷却する方法
CN110770548B (zh) * 2018-05-22 2024-08-13 松下知识产权经营株式会社 红外线传感器以及声子结晶体
WO2020174731A1 (ja) * 2019-02-28 2020-09-03 パナソニックＩｐマネジメント株式会社 赤外線センサ、赤外線センサアレイ、及び赤外線センサの製造方法
CN114556602A (zh) * 2019-10-25 2022-05-27 松下知识产权经营株式会社 热电转换装置、热电转换装置的控制方法、使用热电转换装置冷却和/或加热对象物的方法及电子装置

Also Published As

Publication number Publication date
US20240060824A1 (en) 2024-02-22
JPWO2022239611A1 (https=) 2022-11-17
EP4339568A4 (en) 2024-10-09
WO2022239611A1 (ja) 2022-11-17
EP4339568A1 (en) 2024-03-20

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