JPWO2022239611A1 - - Google Patents
Info
- Publication number
- JPWO2022239611A1 JPWO2022239611A1 JP2023520942A JP2023520942A JPWO2022239611A1 JP WO2022239611 A1 JPWO2022239611 A1 JP WO2022239611A1 JP 2023520942 A JP2023520942 A JP 2023520942A JP 2023520942 A JP2023520942 A JP 2023520942A JP WO2022239611 A1 JPWO2022239611 A1 JP WO2022239611A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0814—Particular reflectors, e.g. faceted or dichroic mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
- G01J5/14—Electrical features thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021080450 | 2021-05-11 | ||
PCT/JP2022/018144 WO2022239611A1 (ja) | 2021-05-11 | 2022-04-19 | 赤外線センサ及び赤外線センサの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2022239611A1 true JPWO2022239611A1 (ja) | 2022-11-17 |
Family
ID=84029563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023520942A Pending JPWO2022239611A1 (ja) | 2021-05-11 | 2022-04-19 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20240060824A1 (ja) |
EP (1) | EP4339568A1 (ja) |
JP (1) | JPWO2022239611A1 (ja) |
CN (1) | CN117222874A (ja) |
WO (1) | WO2022239611A1 (ja) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04158583A (ja) * | 1990-10-22 | 1992-06-01 | Matsushita Electric Works Ltd | 赤外線検出素子 |
JP4661207B2 (ja) * | 2004-12-20 | 2011-03-30 | 日産自動車株式会社 | 赤外線センサの製造方法 |
JP2008026124A (ja) * | 2006-07-20 | 2008-02-07 | Matsushita Electric Ind Co Ltd | 熱型赤外線センサ |
US20200191655A1 (en) * | 2018-12-15 | 2020-06-18 | William N. Carr | Photonic- and Phononic-structured pixel for electromagnetic radiation and detection |
US9417465B2 (en) | 2013-04-07 | 2016-08-16 | The Regents Of The University Of Colorado, A Body Corporate | Nanophononic metamaterials |
JP2015161642A (ja) * | 2014-02-28 | 2015-09-07 | セイコーエプソン株式会社 | 焦電型光検出器、焦電型光検出装置、電子機器 |
JP6311133B2 (ja) | 2016-06-13 | 2018-04-18 | パナソニックIpマネジメント株式会社 | 赤外線センサ |
US10199424B1 (en) | 2017-07-19 | 2019-02-05 | Meridian Innovation Pte Ltd | Thermoelectric-based infrared detector having a cavity and a MEMS structure defined by BEOL metals lines |
JP7232978B2 (ja) * | 2017-12-11 | 2023-03-06 | パナソニックIpマネジメント株式会社 | 赤外線センサおよび赤外線センサのボロメータ赤外線受光部を冷却する方法 |
CN113015889B (zh) * | 2019-02-28 | 2024-04-02 | 松下知识产权经营株式会社 | 红外线传感器、红外线传感器阵列及红外线传感器的制造方法 |
-
2022
- 2022-04-19 WO PCT/JP2022/018144 patent/WO2022239611A1/ja active Application Filing
- 2022-04-19 EP EP22807314.4A patent/EP4339568A1/en active Pending
- 2022-04-19 CN CN202280032037.5A patent/CN117222874A/zh active Pending
- 2022-04-19 JP JP2023520942A patent/JPWO2022239611A1/ja active Pending
-
2023
- 2023-10-27 US US18/496,368 patent/US20240060824A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2022239611A1 (ja) | 2022-11-17 |
CN117222874A (zh) | 2023-12-12 |
EP4339568A1 (en) | 2024-03-20 |
US20240060824A1 (en) | 2024-02-22 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20240219 |